MASS FLOW 1179bman PDF

Y-1951179B
Digital Mass Flow Controller

Type 1179B / 1479B / 2179B
and
Digital Mass Flow Meter
179B
- Instruction Manual -
MKS Instruments Ausgabe 2010-06

Deutschland GmbH
Copyright © 2003 by MKS Instruments Deutschland GmbH.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic
or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as
may be expressly permitted in writing by MKS Instruments.
Printed in the Federal Republic of Germany
Swagelok® , VCR®, and VCO® are registered trademarks of Swagelok Marketing Company, Solon, OH
Kalrez® and Viton® are registered trademarks of DuPont Dow Elastomers Inc., Wilmington, DE
NUPRO® is a registered trademark of Crawford Fitting Company, Solon, OH
Kel-F® is a registered trademark of 3M, Minneapolis, MN
1179B/1479B/2179B/179B Table of Contents
Table of Contents
Mass Flow Controller Safety Information ........................................................................................... 9

Symbols Used in This Instruction Manual..............................................................................9
Symbols Found on the Unit..................................................................................................10
Safety Procedures and Precautions.....................................................................................11
Chapter 1: General Information....................................................................................................... 13

Introduction...........................................................................................................................13
Overview of Versions ...........................................................................................................13
Options ....................................................................................................................14
Special versions ......................................................................................................14
Power Supply and Readout Units ...........................................................................14
Profibus Version ...................................................................................................................14
Reliability ..............................................................................................................................15
Instruction Manual ................................................................................................................15
Contents ..................................................................................................................15
Conventions ............................................................................................................15
Designations and Names ........................................................................................16
Chapter 2: Shipment ....................................................................................................................... 17

General.................................................................................................................................17
Unpacking ...............................................................................................................17
Unpacking Checklist.............................................................................................................17
Analog Units ............................................................................................................17
Profibus Units ..........................................................................................................18
Optional Accessories: .............................................................................................18
Label........................................................................................................................19
Clean Room Packaging ..........................................................................................19
Chapter 3: Connectors and Control Elements ................................................................................ 21

Analog Units .........................................................................................................................21
Potentiometer ZERO ...............................................................................................22
RESET Switch.........................................................................................................22
Electrical Connector .............................................................................................................23
1179B, Analog Unit .................................................................................................23
iii
Table of Contents 1179B/1479B/2179B/179B
Profibus Units ...................................................................................................................... 24

RESET Switch ........................................................................................................ 25
Address and Mode switch A/B ............................................................................... 25
Status LED STS ..................................................................................................... 25
Electrical Connectors .......................................................................................................... 26
1179B, Profibus Units, Connector ANALOG.......................................................... 26
1179B, Profibus Units, Connector PROFIBUS ...................................................... 27
Chapter 4: Installation...................................................................................................................... 29
General Requirements ........................................................................................................ 29
Environmental......................................................................................................... 29
Location and Orientation ........................................................................................ 30
Protection against Dust and Water ........................................................................ 31
Use of a Positive Shutoff Valve, e.g. Type 2179B ................................................. 31
Leak Integrity .......................................................................................................... 31
Pressure Drop Test ................................................................................................ 31
Dimensions.......................................................................................................................... 32
Type 179, 1179 and 1479, Analog and Profibus Units .......................................... 32
Mounting Holes on 179, 1179, 1479 Analog and Profibus Units ........................... 33
Type 2179B, Analog and Profibus Units ................................................................ 34
Mounting Holes ...................................................................................................... 35
Electrical Connections and Cables ..................................................................................... 36
Cables and Controllers by MKS ............................................................................. 36
Power Supply / Readout Units of other Manufacturers.......................................... 36
Non MKS Cables .................................................................................................... 37
Finishing the Installation...................................................................................................... 37
Chapter 5: Operation (Analog Units) ............................................................................................... 39

Start Up the Mass Flow Controller/Meter ............................................................................ 39
Zero Adjust .......................................................................................................................... 40
Override the Control Valve .................................................................................................. 41
Priority of Commands .......................................................................................................... 41
iv
Chapter 6: Operation (Profibus Units)............................................................................................. 43

Functions ..............................................................................................................................43
Overview .................................................................................................................43
Valve Override.........................................................................................................44
Auto Zero.................................................................................................................44
Alarm Limits.............................................................................................................44
Temperature Measurement.....................................................................................44
Valve Drive Level ....................................................................................................44
User Span / Gas Correction ....................................................................................45
User Zero ................................................................................................................45
Filter.........................................................................................................................45
Gas Tables ..............................................................................................................45
Soft Start Rate.........................................................................................................45
Start Up the Mass Flow Controller .......................................................................................46
Zeroing the Flow Controller..................................................................................................47
Zero Offset ..............................................................................................................47
Status LED STS ...................................................................................................................48
Adress and Mode Switch A/B...............................................................................................48
Switch Assignment ..................................................................................................48
Mode B ....................................................................................................................48
Setting an Address ..................................................................................................49
Mode A ....................................................................................................................49
Zero Modes .............................................................................................................49
PROFIBUS Protocol.............................................................................................................50
Data Interface.......................................................................................................................50
Send Data ...............................................................................................................51
Small Receive Data.................................................................................................52
Full Receive Data ....................................................................................................53
Small Setup .............................................................................................................54
Full Setup ................................................................................................................55
Small Diagnostics....................................................................................................57
Full Diagnostics .......................................................................................................58
Calibration Table .....................................................................................................60
PROFIBUS Setup.................................................................................................................61
GSD Files Usage.....................................................................................................61
Standard GSD File ..................................................................................................62
v
Chapter 7: Theory of Operation....................................................................................................... 63

Technique of Measurement and Control, Electronics ......................................................... 63
Flow Path................................................................................................................ 64
Measurement Technique........................................................................................ 64
Control Circuitry...................................................................................................... 64
Control Valve ....................................................................................................................... 65
Chapter 8: Gas Correction Factor (GCF) ........................................................................................ 67

The Gas Correction Factor (GCF):...................................................................................... 67
How To Calculate the GCF for Pure Gases ........................................................... 67
How To Calculate the GCF for Gas Mixtures......................................................... 68
Example.................................................................................................................. 69
Mass Flow Rate at a Different Reference Temperature ........................................ 69
Direct Reading of the Analog Output Signal .......................................................... 70
Chapter 9: MFC Sizing Guidelines .................................................................................................. 71

General................................................................................................................................ 71
Determining the Flow Controller Range .............................................................................. 72
Configurations for Low or High Differential Pressure............................................. 72
Chapter 10: Maintenance ................................................................................................................ 73

General................................................................................................................................ 73
Zero Adjustment ..................................................................................................... 73
Checks and Recalibration ...................................................................................... 73
Profibus Support Kit ............................................................................................... 74
Customer Support ............................................................................................................... 74
Troubleshooting................................................................................................................... 75
Chapter 11: Type 179B, 1179B, 1479B, 2179B (Comparison)....................................................... 77

Type 179B ........................................................................................................................... 77
Type 1179B ......................................................................................................................... 77
Type 1479B ......................................................................................................................... 77
Type 2179B ......................................................................................................................... 77
Pneumatic Positive Shutoff Valve .......................................................................... 78
Appendix A: Product Specifications ................................................................................................ 79

Specifications ...................................................................................................................... 79
Environmental Specifications .............................................................................................. 80
Electrical Specifications....................................................................................................... 80
Physical Specifications........................................................................................................ 81
vi
Appendix B: Model Codes............................................................................................................... 83

Model Code ..........................................................................................................................83
Appendix C: Gas Correction Factors .............................................................................................. 87
Appendix D: Binary Code ................................................................................................................ 91
MKS Worldwide Calibration & Service Centers ............................................................................... 93
There is a declaration of contamination on the last page of this instruction manual.
vii
List of Figures
Figure 1: Model Code Label ............................................................................................................ 19

Figure 2: 1179B /1479B / 179B Side View ...................................................................................... 21
Figure 3: 1179B /1479B / 179B Connector Side ............................................................................. 21
Figure 4: 1179B / 1479B / 179B Gas Inlet Side ............................................................................. 22
Figure 5: 15-pol. connector ............................................................................................................. 23
Figure 6: 1179B / 1479B / 179B Side View .................................................................................... 24
Figure 7: 1179B / 1479B / 179B Connector Side ........................................................................... 24
Figure 8: 1179B / 1479B / 179B Gas Inlet Side ............................................................................. 25
Figure 9: 9-pol. Connector............................................................................................................... 26
Figure 10: Profibus Connector ........................................................................................................ 27
Figure 11: 1179B 1479B / 179B Dimensions (Side) ..................................................................... 32
Figure 12: Dimensions (Inlet/Outlet side)........................................................................................ 33
Figure 13: Mounting Holes on 1179B, 1479B, 179B....................................................................... 33
Figure 14: Type 2179B, Side........................................................................................................... 34
Figure 15: Type 2179B, Connector Side......................................................................................... 35
Figure 16: Base Plate, Dimensions and Mounting Holes................................................................ 35
Figure 17: Adress and Mode Switch Map A/B ................................................................................ 48
Figure 18: Assembly........................................................................................................................ 63
Figure 19: Voltage Divider............................................................................................................... 70
List of Tables
Table 1: Definition of Symbols Found on the Unit........................................................................... 10

Table 2: MKS Cables....................................................................................................................... 36
Table 3: Troubleshooting................................................................................................................. 76
Table 4: Ordering Code - Ranges ................................................................................................... 84
Table 5: Ordering Code - Fittings .................................................................................................... 84
Table 6: Ordering Code - Valves..................................................................................................... 85
Table 7: Ordering Code - Connectors ............................................................................................. 85
Table 8: Ordering Code - Seals....................................................................................................... 85
Table 9: Binary Code....................................................................................................................... 91
viii
1179B/1479B/2179B/179B Mass Flow Controller Safety Information
Mass Flow Controller Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard to personnel. It calls

attention to a procedure, practice, condition, or the like, which, if
not correctly performed or adhered to, could result in injury to
personnel.
Caution The CAUTION sign denotes a hazard to equipment. It calls

attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a

procedure, practice, condition, or the like, which is essential to highlight.
9
Mass Flow Controller Safety Information 1179B/1479B/2179B/179B
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
Protective earth
On (Supply) Off (Supply) Earth (ground) (ground)
IEC 417, No.5007 IEC 417, No.5008 IEC 417, No.5017 IEC 417, No.5019
Frame or chassis Equipotentiality Direct current Alternating current

IEC 417, No.5020 IEC 417, No.5021 IEC 417, No.5031 IEC 417, No.5032
Both direct and Three phase

alternating current Class ll equipment alternating current
IEC 417, No.5033-a IEC 417, No.5172-a IEC 617-2 No.020206
Caution, refer to
accompanying Caution, risk of
documents electric shock Caution, hot surface
ISO 3864, No.B.3.1 ISO 3864, No.B.3.6 IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
10
1179B/1479B/2179B/179B Mass Flow Controller Safety Information
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of
this instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Do not install substitute parts or perform any unauthorized modification to the instrument. Return
the instrument to an MKS Calibration and Service Center for service and repair to ensure that all
safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY

Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

If hazardous materials are used, observe the proper safety precautions, completely purge the
instrument when necessary, and ensure that the material used is compatible with the wetted
materials in this product, including any sealing materials.
PURGE THE INSTRUMENT

After installing the unit, or before removing it from a system, purge the unit completely with a clean,
dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING

This instrument must be purged under a ventilation hood, and gloves must be worn for protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT

To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES

All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer’s
directions.
CHECK FOR LEAK-TIGHT FITTINGS

Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES

Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
11
Mass Flow Controller Safety Information 1179B/1479B/2179B/179B
INSTALL A SUITABLE BURST DISC

When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS

Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt,
lint, glass chips, and metal chips may permanently damage the unit or contaminate the process.
ALLOW THE UNIT TO WARM UP

If the unit is used to control dangerous gases, they should not be applied before the unit has
completely warmed up. Use a positive shutoff valve to ensure that no erroneous flow can occur
during warm up.
12
1179B/1479B/2179B/179B Chapter 1: General Information
Chapter 1: General Information
Introduction
The digital mass flow controllers of the 1179B series accurately measure and control the mass flow
rate of gases. The type 179B of this series is a mass flow meter for mass flow measurement only
and is completely metal sealed.
Based upon an patented * MKS measurement technique, these instruments use a laminar flow
device whose precise indication of mass flow is achieved through the use of a laminar bypass
element in parallel with a sensor tube. The 1179, 1479 and 2179 digital controllers use a PID
algorithm which compares the flow signal with an external setpoint command, thus creating a
control signal which is applied to a solenoid driven control valve to set the desired flow rate. The
controllers also feature in the analog mode the ability to accept TTL level commands to remotely
open and close the control valve. The control valve is located at the outlet of the meter section,
also inside the metal instrument housing. The metal cover plus the RF bypass capacitors virtually
eliminate RFI and EMI interference.
The flow signal as derived from the sensor and also an analog setpoint signal are digitalized.
Therefore linearization, flow control and handling of all other signals and commands is operated by
the microcomputer, in both digital and analog versions of the B series. This provides best accuracy
and optimizes the controller’s response and stability.
The 1179,1479 controller and 179 meter have a three-inch footprint. The type 2179 has a positive
shutoff valve, pneumatically driven and close coupled to the controller outlet.
Overview of Versions
Type Function Features

179B Mass Flow Meter Standard unit, all metal sealed, full scale ranges from 5 to
20 000 sccm
1179B Mass Flow Standard unit, one elastomer seal, all other sealing metal, full
Controller scale ranges same as Type 179B, fully closing control valve,
override function
1479B Mass Flow Same as 1179B but all metal sealed
Controller
2179B Mass Flow Same as 1179B but with positive shutoff valve at outlet side
Controller
*
US Patent No 5461913
13
Chapter 1: General Information 1179B/1479B/2179B/179B
Options
• Analog version (digital electronic with analog interfacing)

• Profibus version
• Full scale range: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10.000, 20.000 sccm
(N2-equivalent);
• Fittings: Cajon® 4-VCR® male, Cajon® 4-VCO® male, 6 mm and 1/4“ Swagelok®, DN16KF
For other fittings and ranges contact MKS please.
Special versions
There are many variations of the above listed versions and options possible, for example
• with filter mounted at inlet
• with all metal valve plug
• low pressure drop versions for low inlet pressure or small differential pressure applications,
e.g. combination with vaporizers or use with air sampling pumps etc.
• combinations (Gas Sticks) with filters, pneumatic shutoff valves at inlet and/or outlet, purge
fitting, mini-pressure transducers etc.
The control valve of all mass flow controllers is a normally closed (NC) valve.
Power Supply and Readout Units

The analog versions of the 1179B series can interface to complementary MKS equipment which
are available as single channel, dual channel, four and eight channel units to display the flow
signal and to provide the power and set point commands. Almost all control units are equipped with
serial interface. Refer to the corresponding manuals for requirements and instructions.
Profibus Version
The particular features of units with Profibus interface, setup and control are described in
Chapter 6, Operation.
Note: All Profibus versions can also be operated in analog manner, e.g. for diagnosis purposes.
The analog interface and Profibus interface connector are described in Chapter 3 Overview.
The mechanical features and installation are the same as for the analog version.
Non-Compatibility
Profibus versions 179A, 1179A, 1479A and 2179A measure temperature in K, whereas the B-
series described in this manual measure temperature in °C.
14
1179B/1479B/2179B/179B Chapter 1: General Information
Reliability
To help provide excellent reliability, the design contains a low mechanical and electronic
components count and has successfully passed the following tests:
• STRIFE, including temperature cycling, humidity and vibration (sine and random tests)
and with an overall metal braided shielded cable, properly grounded at both ends:
• CE Compliance - The instrument complies to EN 61326-2-3 with the requirements for
industrial applications with continuous not monitored operation. Braided shielded cables
must be used. The PROFIBUS cable must be qualified.
Contents
This manual provides instructions on setup, installation, operation and service of:
• Mass flow controller 1179B / analog version
• Mass flow controller 1179B / Profibus version
• Mass flow controller 1479B / Profibus version only *
• Mass flow controller 2179B / analog version
• Mass flow controller 2179B / Profibus version
• Mass flow meter 179B / analog version
• Mass flow meter 179B / Profibus version
Conventions
If not explicitly expressed differently at the respective place in this handbook all data are
referenced to:
a) Temperature in °C
b) Gas type is nitrogen N2
c) Pressure
in mbar or bar with index (a) relates to absolute pressure and whereas index (g) stands for
gage pressure, related to atmosphere.
Example: 1,7 bar (g) = 1,7 bar overpressure versus atmosphere (gage pressure).
0,5 bar (a) = 500 mbar absolute pressure.
d) Flow rates
are given in sccm ** or slm *** related to nitrogen or dry air.
*
for analog version order type 1479A
**
1 sccm = 1 standard cm3 / min ; Standard conditions: 1013,25 mbar and 0 °C
***
1 slm = 1 standard liter / min = 1000 sccm
15
Chapter 1: General Information 1179B/1479B/2179B/179B
Designations and Names

Throughout this handbook all three types of mass flow controllers, namely 1179B, 1479B and
2179B will be expressed by type 1179B in common. The types 1479B and 2179B will only be
mentioned by their specific name where it is necessary to avoid confusion.
The mass flow meter 179B will only be mentioned in particular where this is necessary, else wise
the instructions for the 1179B also apply for the meter 179B.
The specific features and characteristics of the types 1479B, 2179B and 179B are described in
extra chapters in this manual.
16
1179B/1479B/2179B/179B Chapter 2: Shipment
Chapter 2: Shipment
General
Unpacking
MKS has carefully packed each unit so that it will reach you in perfect operating order. Upon
receiving the unit, however, you should check for defects, cracks, broken connectors, damaged
cables etc., to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, please notify your carrier and MKS immediately. If it is necessary to return
the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a list
of MKS Calibration and Service Centers.
Unpacking Checklist
Analog Units
Mass flow controller 1179B (type 1479B, 2179B or mass flow monitor 179B respectively)
Accessory kit ZB-30 consisting of
• Mating connector D-type; 15 pin female
• 2 mounting screws #8-32 UNF (MKS part no. 160-3973)
Manual (this book)
Calibration sheet
17
Chapter 2: Shipment 1179B/1479B/2179B/179B
Profibus Units
Mass flow controller 1179B ( type 1479B, 2179B or mass flow monitor 179B respectively)
Accessory kit ZB-27 consisting of
• Mating connector D-type; 9 pin female
• Mating connector D-type; 9 pin male
• 2 mounting screws #8-32 UNF (MKS part no. 160-3973)
GSD file (3,5” disc)
Manual (this book)
Calibration sheet
Note: The mounting screws are not needed for units with mounting plates.
Optional Accessories:
Control units, power supplies, readout units
Cable
Water&Dust protection cap type WPC 63 for use in humid or dusty environments
Profibus Support Kit for units with Profibus only
Ordering Code. 1179-PB-SUPPORT
Consisting of:
1 Disc 3,5“
1 RS 232 cable
1 converter RS232/RS485
1 instructions
etc.
18
1179B/1479B/2179B/179B Chapter 2: Shipment
Label
The label shows the following information: See figure 1 as an example:
Model code 1179B, for other codes ref. to appendix B

Sealing Viton
Range 200 sccm
Gas type N2 (the range is related to this gas)
Serial number 454145G20
CE mark CE
Manufacturer MKS Instruments Deutschland GmbH
Figure 1: Model Code Label
Across the housing and the meter/controller body there is an extra label to avoid access to the
inside by unauthorized people. Broken or removed label means lost of any warranty.
Clean Room Packaging

It is possible to get the flow controllers and meters delivered in clean room packaging (as an
option). When unpacking, follow these steps, please:
1. Remove the outer bag in an ante room (garmenting room) or transfer box.
Do not allow this outer bag to enter the clean room.
2. Wipe down the exterior of the inner bag with a clean room wipe.
This step reduces the contamination introduced into the clean room.
3. Remove the inner bag in the clean room.
19
Chapter 2: Shipment 1179B/1479B/2179B/179B
This page intentionally left blank
20
1179B/1479B/2179B/179B Chapter 3: Connectors and Control Elements
Chapter 3: Connectors and Control Elements
Analog Units
Status LED
(STS)
Zero
Reset
Figure 2: 1179B /1479B / 179B Side View
(Imprint on type 179B: MASS-FLO METER )
Sub-D connector Status LED (STS)

15 pol.
Figure 3: 1179B /1479B / 179B Connector Side
21
Chapter 3: Connectors and Control Elements 1179B/1479B/2179B/179B
ZERO
RESET
Figure 4: 1179B / 1479B / 179B Gas Inlet Side
Potentiometer ZERO
Use this 25 turn potentiometer to adjust the signal output to zero.
Refer to Chapter 5, Operation (Analog Units), section Zero Adjust.
RESET Switch
After pressing the RESET key the unit performs a self check cycle and a reset. The same
procedure is done after power on. During the cycle the two colour LED, labeled STS, changes its
colour a few times between red and green.
Finally the LED changes to green, indicating that self test cycle and reset have been completed
successfully.
22
Electrical Connector
1179B, Analog Unit
(15 pol. Sub-D, male)
Pin ± 15 V Supply 24 V Supply Note
1 Reserved Reserved
2 Flow Signal Flow Signal Referenced to pin 11 and
(0 to +5 V) (0 to +5 V) 12
3 Valve Close1 Valve Close1 Connect to pin 5 to
1 1 activate
4 Valve Open Valve Open
5 ± 15 V Supply Common Signal Common
6 - 15 V Supply + 24 V Supply Common
7 + 15 V Supply +24 V
8 Setpoint Input1 Setpoint Input1 Referenced to pin 11 and
(0 to +5 V) (0 to +5 V) 12
9 NC NC
10 NC NC
11 Signal Common Signal Common
12 Signal Common Signal Common
13 NC NC
14 NC NC
15 Chassis Ground Chassis Ground Shield, Case
Figure 5: 15-pol. connector
For use with control units from MKS Instruments (PR 4000, 647 etc.) we recommend to use the
standard cables of the manufacturer.
____________________
1
Not applicable with mass flow meter 179B
Note Any appropriate 0 to +5 V signal of less than 20 kΩ source impedance

can be used to supply a set point signal to pin 8.
23
Profibus Units
Status LED (STS)
Reset
Figure 6: 1179B / 1479B / 179B Side View
(Imprint on type 179B: MASS-FLO METER )
Figure 7: 1179B / 1479B / 179B Connector Side
24
Address
Switches
RESET
Figure 8: 1179B / 1479B / 179B Gas Inlet Side
RESET Switch
After pressing the RESET key the unit performs a self check cycle and a reset. The same
procedure is done after power on. During the cycle the two colour LED, labeled STS, changes its
colour a few times between red and green.
Finally the LED changes to green, indicating that self test cycle and reset have been completed
successfully.
Address and Mode switch A/B

This switch selects either analog or Profibus mode. In Profibus mode you can set the address of
the unit, in analog mode the mass flow controller requires an analog setpoint voltage.
Refer to Chapter 6, Operation (Profibus Units), for detailed description.
Status LED STS

The Status LED provides two functions: Indicates the status of the instrument and indicates the
Profibus address, at power on or on request.
The LED STS is explained more detailed in Chapter 6, Operation (Profibus Units) .
25
Electrical Connectors
1179B, Profibus Units, Connector ANALOG
(9 pol. Sub-D, male)
Pin ± 15 V Supply 24 V Supply Note
1 Valve Open / Valve Close1,2 Valve Open / Valve Close2,3

2 Flow Signal Analog operation not Referenced to pin 7 and 8
(0 to +5 V) possible
3 + 15 V Supply + 24 V Supply
4 ± 15 V Common Signal Common
5 - 15 V Supply 24 V Common
6 Setpoint Input2 Analog operation not Referenced to pin 7 and 8
possible
7 Signal Common -
8 Signal Common -
9 Reserved Reserved
Figure 9: 9-pol. Connector
For the use of the Profibus version in analog mode is a +/- 15 VDC power supply required. For the
use in digital mode a +/- 15 VDC or a 24 VDC power supply is sufficient.
This connector does not provide a particular pin for connection to the case. Connect the cable
shield to the connector housing for grounding.
_______________
1
To close the valve connect pin 1 to pin 5 (-15 V);
To open the valve apply + 5 V to pin 1 (referenced to pin 7 or 8).
2
Not applicable with mass flow meter 179B
3
To close the valve connect pin 1 to pin 4;
To open the valve apply + 5 V to pin 1 (referenced to pin 7 or 8).
26
1179B, Profibus Units, Connector PROFIBUS
(9 pol. Sub-D, female)
Pin Signal Note
1 NC
2 NC
3 RXD / TXD – P Bus positive
4 CNTR – P Control for Repeater, positive
5 DGND Digital Ground
6 VP Power Supply ( 5V )
7 NC
8 RXD / TXP – N Bus negative
9 NC
Figure 10: Profibus Connector
27
28
1179B/1479B/2179B/179B Chapter 4: Installation
Chapter 4: Installation
General Requirements
Environmental
Follow the guidelines below when installing and using your mass flow controller.
1. Maintain the normal operating temperature between 0° - 50°C (32° and 122°F).
2. Observe the pressure limits

• Maximum gas inlet pressure is 150 psig.
• Operational differential pressure is:
10 to 40 psid for < 5000 sccm units
15 to 40 psid for 10000 to 20000 sccm units.
• The standard orifice is sized for control over this range with the outlet atmospheric
pressure.
3. Two kinds of power supply are possible (applies to all units):

± 15 V (±5%)
or
24 V (20,5 to 31,5 V) 1
Current: ca. 200 mA at startup, type. 100 mA at steady state
4. Allow minimum 15 minutes for warm-up time for analog units as well as for units with
Profibus.
5. Use high purity gas to purge the instrument.
6. The use of a filter upstream of the mass flow controller is recommended, if enough
pressure is available.
Refer also to Appendix A, Product Specifications for other possible precautions and restrictions.
1
For the use of the Profibus version in analog mode is a +/- 15 VDC power supply required. For
the use in digital mode a +/- 15 VDC or a 24 VDC power supply is sufficient.
29
Chapter 4: Installation 1179B/1479B/2179B/179B
Location and Orientation
1. Set the controller into position where it will be connected to a gas supply.
Placement of flow components in an orientation other than that in which they were
calibrated (typically horizontal) may cause a small zero shift. The zero offset can be
removed according to the instructions in Chapter 5, Zero Adjust if an analog unit is used or
in Chapter 6, Zeroing the Flow Controller if a Profibus unit is used.
2. Install the flow controller in the gas stream such that the flow will be in the direction of the
arrow on the side of the controller.
Take into consideration the specified leak through the closed control valve in case of a
mass flow controller. The specified value refers to new and unused units but may change
during operation by age, cycles, temperature and gas. To achieve best possible leak
tightness we strongly recommend the use of positive shut off valves. An optimum solution
is the type 2179, which employs a pneumatically driven shut off valve, close coupled to the
flow controller’s outlet to minimize dead volume.
3. The normal position is horizontal, the electrical connector pointing upwards or vertical with
flow direction either upwards or downwards.
It is possible to mount the units the way that the connector points downwards but control
performance and valve leak can be affected. This applies especially to units with higher
flow ranges. Therefore the ‘ceiling mount attitude’ should be avoided.
4. Allow adequate clearance for the tubing. Take into account when designing the plumbing
that a unit may be removed later, e.g. for service or maintenance.
To de-install units with metal ferrule compression fittings (for example Swagelok) the tubing
must be moved away some millimeters in axial direction whereas VCR fittings allow the
instrument to be removed sidewards also out from complexive and stiff plumbing systems.
5. Allow adequate clearance for the cable connector (two cable connectors in case of Profibus
version).
Straight, shielded connectors need about 75 mm clearance.
Right-angle connectors require about 50 mm space.
6. Position the unit to provide access to the zero potentiometer, in case of Profibus units
access to the dip switch bank and the RESET button:
Potentiometer or DIP-Switch / Button are located at the inlet side of the housing.
Make sure that the status LED is visible when installing units with Profibus.
30
Protection against Dust and Water

MKS Instruments offers a protection set, consisting of an elastic cover for the cable/connector
access plus an adhesive tape to seal the gap between the housing and the body.
Refer to Chapter 2, Optional Accessories, or contact your MKS service center.
Use of a Positive Shutoff Valve,

e.g. Type 2179B
Make sure that there is enough space for the pneumatic air inlet. Check also for available space if
a valve position switch or pilot valve shall be installed.
Leak Integrity
We recommend to check tightness of all ports and connections of the plumbing with a helium leak
detector.
Pressure Drop Test

If a leak check at high pressure is intended then check for the highest allowable pressure for all
parts involved. Example: If a pressure based leak check at 5 bar (g) is done you will damage a
pressure transducer in the line if it is limited to 3,5 bar (g). In this case the pressure transducer (or
whatever component is affected) must be removed or protected by a suitable valve.
31
Dimensions
Type 179, 1179 and 1479, Analog and Profibus Units

The overall outline dimensions (length, width, height) are identical for both the analog and Profibus
Units.
(All dimensions are listed in millimeters. Conversion: 1 inch = 25,4 mm)
139,5
12,7
76,2
Figure 11: 1179B 1479B / 179B Dimensions (Side)

(Shown: analog unit; Imprint on type 179B: MASS-FLO METER)
Fittings (compatible) L
4 VCR 123,9
4 VCO 115,8
8 VCR 133,7
¼“ Swagelok* 112,7
6 mm Swagelok* 112,7
DN 16 KF 124,5
*) without nuts and ferrules
32
ZERO
RESET
36.8
Figure 12: Dimensions (Inlet/Outlet side)
Mounting Holes on 179, 1179, 1479 Analog and Profibus Units
8-32 UNC -2B x 0.25 DP
19,1
69,8 8,8
3,2
Figure 13: Mounting Holes on 1179B, 1479B, 179B
33
Type 2179B, Analog and Profibus Units

The type 2179 consists of a type 1179 flow controller configured with a positive shutoff valve
downstream. The unit is completely mounted on a base plate (MKS p/n 1100299-P1). The four
mounting holes, 6 mm diameter, in the base plate allow safe mounting in the system.
The shutoff valve is pneumatically operated. The inlet fitting for the compressed air is 1/8 NPT size,
located on top of the actuator.
(Shown: Analog Unit)
139,5
85,9
15,8
3,1
Figure 14: Type 2179B, Side
34
160,7
141,7
4,7
28,5
4x∅6
L
Figure 15: Type 2179B, Connector Side
Fittings (compatible) L
4 VCR 170,4
4 VCO 162,3
¼“ Swagelok* 159,2
6 mm Swagelok* 159,2
*) without nuts and ferrules
Mounting Holes
160,7
9,7 141,7
28,5 38,1
4x∅6
Figure 16: Base Plate, Dimensions and Mounting Holes
35
Electrical Connections and Cables
The units comply with the European standards and thus they are labelled with the CE-mark. To
fulfill the above listed guidelines it is mandatory to use the appropriate interconnection cables.
Note EMC Directive Requirements according to 2004/108/EC:
The instrument complies to EN 61326-2-2 with the requirements for

industrial applications. Braided shielded cables must be used.
The PROFIBUS cable must be qualified.
We recommend to use the cables offered by MKS Instruments.

Cables which are in compliance with the CE guidelines are marked with
an „E“ or „S“ (example: CB259E-... or CB259S-...).
Cables and Controllers by MKS

For use of the analog versions of the types 179B, 1179B, 1479B or 2179B with controllers, power
supplies, readout units etc. by MKS standard cables are available.
Flow Controller/Meter Control Unit

( Analog Version ) Sub D 15-polig Flying Leads
Sub D 15 pin CBE259-5 CBE259-6
Table 2: MKS Cables
Power Supply / Readout Units of other Manufacturers

Should you use power supplies / readout units of manufacturers other than MKS then make sure
that these units fulfill the electrical specifications for use with the mass flow controllers/meters as
described herein. Refer to Appendix A, Product Specifications.
36
Non MKS Cables
Requirements
Should you choose to manufacture your own cables, follow the guidelines listed below:
1. The cable must have a braided shield, covering all wires. Neither aluminium foil nor
spiral shielding will be as effective: using either may nullify regulatory compliance.
2. The connectors must have a metal case which has direct contact to the cable’s shield on
the whole circumference of the cable.
3. With very few exceptions, the connector(s) must make good contact (typical 0,01Ω or less)
to the device’s case (ground). The case also must be properly grounded.
4. When selecting the cable, consider:
a) The voltage ratings.
b) The cumulative I2R heating of all the conductors (keep them safely cool).
c) The IR drop of the conductors, so that adequate power or signal voltage gets to the
device.
d) The capacitance and inductance of cables which are handling fast signals
e) If there are specific requirements when supply units etc of other manufacturers are
used
Finishing the Installation
1. Check all fittings and flanges for leaks.

Do not proceed with the next step until you have not made sure that there are no leaks.
2. Connect the interface cable(s) to the mass flow controller.

Connect the other end of the cable to the power supply/control electronics.
Check all electrical connections.
This ends the mass flow controller’s installation.
37
38
1179B/1479B/2179B/179B Chapter 5: Operation (Analog Units)
Chapter 5: Operation (Analog Units)
Start Up the Mass Flow Controller/Meter
1. After you have successfully checked all mechanical and electrical connections and when
you are certain that there is no gas leakage, then power can be applied to the mass flow
controller or to the flow meter respectively.
The first start up should be done preferably using non-critical gas. This could be for
example nitrogen or dry air (if there are no reactive residuals in the plumbing system) or
any inert gas.
2. Switch on the power supply.

When power is first applied, the output signal jumps to + 4...5 V.
The unit performs automatically a reset, indicated by the red/green blinking status LED.
Finally the LED changes to green light which indicates that the electronic circuitry is ready
for use.
You can monitor the flow output signal as the instruments stabilizes and the output
approaches zero. Approximately 15 minutes after power up the signal should be stable
within some millivolts close to zero.
Note Do not use dangerous gases for the first start up. Use a non-critical gas,
for example the gas which serves for purging.
Note If the instrument is being used to control dangerous gases, be sure that
the system is fully warmed up before applying gases to the system. You
may choose to install a positive shutoff valve to prevent inadvertent gas
flow during the warm-up period.
Once the instrument is completely warmed up, you can proceed to zero the unit as
required.
39
Chapter 5: Operation (Analog Units) 1179B/1479B/2179B/179B
Zero Adjust
1. If no gas is flowing and the mass flow controller has stabilized (ref. to Appendix A,
Specifications, Warm Up) the flow output signal should be zeroed by means of the
potentiometer ZERO which is located at the gas inlet side of the unit.
Note Zeroing should be done only on units that are installed in final position.
2. When using a control unit by MKS then you should use the zeroing means there. If the
control unit does not provide enough compensation range then the potentiometer ZERO at
the mass flow unit must be used.
Note If a pressure difference exists at the mass flow control unit then a small
flow might be generated even if the integrated control valve is closed.
This is more likely with special units for low inlet pressures .
Do not adjust the flow signal then to zero value because it is a real flow
but use a positive shutoff valve to definitely stop the flow. Finally with
flow completely stopped you should adjust the flow signal to zero.
3. Periodically check the zero adjustment of the unit, e.g. on maintenance intervals. The zero
adjustment is affected by thermal effects and especially by contamination.
Beside of the need for measurements of highest accuracy the zero signal is very important
for diagnosing the flow sensor and the control valve.
40
1179B/1479B/2179B/179B Chapter 5: Operation (Analog Units)
Override the Control Valve
The valve override feature enables the control valve to be fully opened (purged) or closed
independent of the set point command signal:
To open the valve, apply a TTL low to pin 4 or connect pin 4 to pin 5 (analog ground).
To close the valve, apply a TTL low to pin 3 or connect pin 3 to pin 5 (analog ground).
Priority of Commands
The 1179 flow controller executes commands based on a hierarchical command structure. The
highest priority command is Valve Open, followed by Valve Close, and finally the Set Point Control.
Therefore, if the flow controller is operating under Set Point Control, you can send a Valve Open
command to force the valve to the full open position.
Note When both the Valve Close and Valve Open pins are pulled down, the
Valve Open command takes precedence and the valve is moved to the
open position.
41
Chapter 5: Operation (Analog Units) 1179B/1479B/2179B/179B
42
1179B/1479B/2179B/179B Chapter 6: Operation (Profibus Unit)
Chapter 6: Operation (Profibus Units)
Functions
Beside the normal flow control mode the units equipped with Profibus provide a number of helpful
functions and useful information.
Overview
• Valve Override
• Auto Zero
• Totalizer, gas counter
• Gas Correction
• 15 Calibration Tables, 15 points each
• 4 Limit Alarms
• Run Hours Counter
• Remaining Time to Calibration Observation (Calibration Cycle Count Down)
• Temperature Measurement
• Valve Drive Level
• Status LED
• Signal Filter (flow signal)
• User Span setting
• User Zero setting
• User Tag
Report Functions:
Calibration Date, Type, Model, Manufacturer, Serial No., Firmware/Hardware Revision, Product
Code, Date of Factory Calibration, Full Scale Range, Engineering Unit, Standard Temperature
Standard Pressure, Valve Type, Valve Power Off Mode.
43
Chapter 6: Operation (Profibus Unit) 1179B/1479B/2179B/179B
Valve Override
By means of an analog override signal applied to the respective pins at the connector ANALOG the
control valve can be driven completely open or closed, independent of the setpoint command
signal ( only in analog mode ). Refer to figure 9 and its explanations for the detailed description.
In Profibus mode the override however is only possible via the bus:
Set the parameter VALVE_OVERRIDE to NORMAL to allow the mass flow controller
establishing a flow in accordance to the setpoint command FLOW_SETPOINT.
Set the parameter VALVE_OVERRIDE to FLOW_OFF to completely close the control valve.
Set the parameter VALVE_OVERRIDE to PURGE to completely open the control valve. This
command may be used to purge or vent the instrument or the system.
Auto Zero
If VALVE_OVERRIDE is equal to FLOW_OFF and THERMAL_MASS_FLOW_RATE is smaller
than 5 % of full scale, the flag AUTOZERO (0 to 1 transition) will take the actual sensor signal as
zero and will subtract this value from all future measurements (refer also to USER_ZERO).
Alarm Limits
LOW_TRIP_POINT and HIGH_TRIP_POINT define the limits for LOW_LIMIT_ALARM and
HIGH_LIMIT_ALARM flags. Consider that there is a 0.5% hysteresis for each limit switch. The
hysteresis of 0.5% is divided in a slope 2.5% above and an other slope 2.5% below the defined
limit.
Temperature Measurement
The internal temperature of the device is measured in °C and given as INTERNAL_TEMP.
Valve Drive Level

The position of the valve is given in VALVE_DRIVE_LEVEL. 0% means that the valve is closed
and 100% means that the valve is fully opened (e.g. at the PURGE command).
A typical value under normal operating conditions is 40…60 % with new units. The value depends
on many parameters, e.g. pressure conditions, temperature, contamination, age etc., and may
change also during operation even at the same flow rate.
44
User Span / Gas Correction

For tuning the flow controller's accuracy the USER_SPAN parameter should be used and for
application of a specific gas the nominal full scale (e.g. N2) may be multiplied by the GCF of the
gas and the parameter FULL_SCALE_RNG may be set with the result. Another option is to set the
parameter GAS_CORRECTION to the GCF of the gas (full functionality only).
User Zero
The parameter USER_ZERO may be set to the flow sensors offset. (See also AUTO ZERO)
Filter
The filter is a single-pole low pass filter. The parameter that the user can adjust is the settling time
of the filter (FILTER_SETTLING). E.g. if a step input (magnitude 100) is applied to the filter with a
settling time of 100 second, the response out of the filter will be within 2% of the final value (98%)
in 100 second. The default value is 0 seconds (no filtering).
Gas Tables
Gas tables may be switched off by setting the default table to 15 (i.e. no table is used) and by
selecting the default table. Or by programming a 0 for POINT_NUM (ref. to Calibration Table at
the end of this chapter; function (y=x)) and selecting it. Or by selecting a table with no (zero) points.
A backup of the Gas Tables is generated on Factory Setup. This backup is used for reset the
tables.
Soft Start Rate

A change in the set point is performed in a slope, which is defined by SOFT_START_RATE.
Each controller is factory set to its optimum performance.
45
Start Up the Mass Flow Controller
1. After you have successfully checked all mechanical and electrical connections and when
you are certain that there is no gas leakage, then power can be applied to the mass flow
controller or to the flow meter respectively.
The first start up should be done preferably using non-critical gas. This could be for
example nitrogen or dry air (if there are no reactive residuals in the plumbing system) or
any inert gas.
2. Switch on the power supply.

When power is first applied, the output signal jumps to + 4...5 V.
The unit performs automatically a reset, indicated by the red/green blinking status LED.
Finally the LED changes to green light which indicates that the electronic circuitry is ready
for use.
3. You can monitor the flow output signal as the instruments stabilizes and the output
approaches zero. Approximately 15 minutes after power up the signal should be stable
within some millivolts close to zero.
Note Do not use dangerous gases for the first start up. Use a non-critical gas,
for example the gas which serves for purging.
Note If the instrument is being used to control dangerous gases, be sure that
the system is fully warmed up before applying gases to the system. You
may choose to install a positive shutoff valve to prevent inadvertent gas
flow during the warm-up period.
Once the instrument is completely warmed up, you can proceed to zero the unit as
required.
46
Zeroing the Flow Controller
Zero Offset
The Profibus version provides different modes for zero setting. If the mode switch A/B on the inlet
side of the unit is set to mode B then parameter USER_ZERO in the PROFIBUS Setup is used. If
set to mode A then 5 different options are provided, depending on the configuration of the address
switches. Refer to Zero Modes in this chapter.
1. If no gas is flowing and the mass flow controller has stabilized (ref. to Appendix A,
Specifications, Warm Up) the flow output signal should be zeroed by means of the
respective command.
Note Zeroing should be done only on units that are installed in their final
position.
2. The command for zero setting also sets the analog flow output signal to zero (pin 2 on the
connector ANALOG).
Note If a pressure difference exists at the mass flow control unit then a small
flow might be generated even if the integrated control valve is closed.
This is more likely with special units for low inlet pressures .
Do not adjust the flow signal then to zero value because it is a real flow
but use a positive shutoff valve to definitely stop the flow. Finally with
flow completely stopped you should adjust the flow signal to zero.
3. Periodically check the zero adjustment of the unit, e.g. on maintenance intervals. The zero
adjustment is affected by thermal effects and especially by contamination.
Beside of the need for measurements of highest accuracy the zero signal is very important
for diagnosing the flow sensor and the control valve.
47
Status LED STS
A two-colour LED, marked STS, between the D-connectors, reports basic status information of the
device. It is also used for setup and display of the PROFIBUS address.
LED Status Meaning

off No power or a severe fault
green Ready
green blinking Communication active
red Fault condition
red blinking Communication active but fault condition
green/red blinking Wink flag was triggered
blinking green/red at Device passes test step of software
power on
Adress and Mode Switch A/B
This switch map serves for manually switching from analog mode to Profibus mode and there to
select the device’s address. In analog mode a mass flow controller needs an analog setpoint
signal!
If you are not familiar with the binary code refer to Appendix D how to convert decimal numbers.
Note: After changing any settings the unit must be restarted to store the new configuration.
Switch Assignment
Adress Section Mode

ADDRESS B Top Label
0 0 0 0 0 0 0 Bus Switch Up Value
1 2 4 8 16 32 64 Analog Switch Down Value
0 1 2 3 4 5 6 A Bottom Label
Figure 17: Address and Mode Switch Map A/B
Mode B
If the mode switch sets B mode, the device operates as PROFIBUS device. In that case the
address switches define the device PROFIBUS address. If the address switches are all down (127)
the internal programmed (via PROFIBUS) address is used. All other address switch settings define
the PROFIBUS address by hardware.
48
Setting an Address
Example for address 5 in Profibus mode:
ADDRESS B

0 1 2 3 4 5 6 A
Switch position =
Mode A
If the mode switch sets A mode, the device operates as an analog device. PROFIBUS may be
used for monitoring and the bus address will be used, which was set previously in bus mode. The
address switches in analog mode define the analog zeroing mode.
Example for setting analog mode and zero mode 3:
ADDRESS B

0 1 2 3 4 5 6 A
Switch position =
Zero Modes
0 Offset Value is always Zero

1 Offset Value (USER_ZERO) stored in the device is not changed.
2 If the valve is off (VALVE_OVERRIDE == FLOW_OFF) for at least 10 sec. an AUTOZERO
is performed.
3 10 sec. after reset, AUTOZERO is performed as long as valve is off. (value stored)
4 10 sec. after reset, AUTOZERO is performed if flow is smaller than 10% of FS. (value
stored)
49
PROFIBUS Protocol
On diagnose data, the PROFIBUS protocol provides 6 bytes of PROFIBUS specific diagnosis
information, which comes ahead of the application specific diagnosis data. After this data there is a
length byte for the application specific diagnosis data. The total memory requirements are 6 + 1 +
‘length of the diagnosis data’.
If the communication of the bus is interrupted a set point from the bus will be set to zero, as soon
as the controller has recognized it. In the analog mode, the controller will not react to this event. Of
course in any case, all readings from the device are not longer valid, but the PROFIBUS master
will mark the device as not available.
Data Interface
The 1179 with PROFIBUS have a small data interface with a basic function set and a full data
interface with the full function set of the device. The selection between small and full functionality is
made at setup time with the type of configuration data, which is loaded down, to the device.
• Small / Full Parameter selects the internal function set and is declared by the GSD file
parameters:
User_Prm_Data_Len and User_Prm_Data. The content of these parameters is either the

small setup or full setup structure.
• Small / Full Receive Data, is selected by the MODULE definition in the GSD file. E.g.:
Module = "SMALL_MFC" 0x91, 0xD5, 0xA1, 0xE1 or

Module = "FULL_MFC" 0x91, 0xD7, 0xA1, 0xE1
The data interfaces are documented as data structures with consecutive fields. There is a table
entry for each field, with name, address (add), type information and a comment for explanation.
The address field (Add.) defines the byte and bit address (ByteOffset:BitOffset). For the memory
layout the Motorola Format is used. The following types are used:
• uint:X an unsigned integer with X bits length.

• long signed long integer (4 bytes)
• uint16 unsigned integer (2 bytes, word)
• uint8 unsigned integer (byte)
• char[X] character array of length X
50
Send Data
Name: SET_MFC
Type: Cyclic Write (small & full)
Size: 6
Description: Analog Output Transducer Block, Small & Full Setup
Parameters:
Name Add. Type Comment

VALVE_OVERRIDE 1:0 uint:2 NORMAL, FLOW_OFF, PURGE
AUTOZERO 1:2 uint:1 0 to 1 transition activates zeroing if
(VALVE_OVERRIDE==FLOW_OFF &&
FLOW_SETPOINT < 5%FS)
REPORT_DIAG 1:3 uint:3 transition to a new value, triggers the device to
send a new actual diagnosis:
0 = no diagnosis
1 = diagnosis of small functionality
2 = diagnosis of full functionality
3 = report selected gas table
4..7 = reserved
WINK_STATUS 1:6 uint:1 0 to 1 transition sets the LED to blink red/green
for 3 seconds
ENABLE_TOTALIZER 1:7 uint:1 0 = disabled, 1 = enabled
RESET_TOTALIZER 0:0 uint:1 0 to 1 transition resets totalizer to zero
RESET_STATUS 0:1 uint:1 0 to 1 transition resets error status bits
SELECT_GAS_TABLE 0:2 uint:4 0..14; 15 = default gas table is used
EN_GAS_CORRECTION 0:6 uint:1 0 = disabled, 1 = enabled
Reserved 0:7 uint:1
FLOW_SETPOINT 2:0 long in [FLOW_UNIT] in 10E-4 steps
valve switched off if setpoint < 1%
valve switched on if setpoint > 2%
If the device is in the analog mode (i.e. set point is taken from the analog interface) some functions
are not active:
1. VALVE_OVERRIDE is not active
2. EN_GAS_CORRECTION is not active
3. SELECT_GAS_TABLE is not active and the default table will be used
51
Small Receive Data

Name: FLOW_MFC
Type: Cyclic Read (small)
Size: 14
Description: Analog Input Transducer Block
Parameters:

HIGH_LIMIT_ALARM 1:0 uint:1 (flow > HIGH_LIMIT), Hysteresis = 0.5%
LOW_LIMIT_ALARM 1:1 uint:1 (flow < LOW_LIMIT) , Hysteresis = 0.5%
SYSTEM_ERROR 1:2 uint:1 any severe error condition
Reserved 1:3 uint:5
Reserved 0:0 uint:8
THERMAL_MASS_FLOW 2:0 long in [FLOW_UNIT] in 10E-4 steps
_RATE
INTERNAL_TEMP 6:0 long temperature in °C
VALVE_DRIVE_LEVEL 10:0 long 0 .. 100% (in 10E-4 steps)
0% = valve is closed
100% = valve is in purge position (full open)
52
Full Receive Data

Name: FLOW_MFC
Type: Cyclic Read (full)
Size: 18
Description: Analog Input Transducer Block. This block is used if a full setup was
performed.
Parameters:

HIGH_LIMIT_ALARM 1:0 uint:1 (flow > HIGH_LIMIT), Hysteresis = 0.5% *
LOW_LIMIT_ALARM 1:1 uint:1 (flow < LOW_LIMIT) , Hysteresis = 0.5% *
SYSTEM_ERROR 1:2 uint:1 any severe system error condition
HIGH2_LIMIT_ALARM 1:3 uint:1 (flow > HIGH2_LIMIT), Hysteresis = 0.25%
LOW2_LIMIT_ALARM 1:4 uint:1 (flow < LOW2_LIMIT), Hysteresis = 0.25%
VALVE_CLOSED 1:5 uint:1 (THERMAL_MASS_FLOW_RATE < 1%) &&
(VALVE_OVERRIDE == FLOW_OFF)
PURGE 1:6 uint:1 THERMAL_MASS_FLOW_RATE > 110%
OVER_TEMPERATURE 1:7 uint:1 INTERNAL_TEMP > MAX_TEMP
VALVE_DRIVE_ALARM 0:0 uint:1 VALVE_DRIVE_LEVEL > MAX_VTP
CALIBRATION_ 0:1 uint:1 TIME_TO_CAL count down expired
RECOMMENED
UNCALIBRATED 0:2 uint:1 if a disabled or no table is used
CONTROLLER_ERROR 0:3 uint:1 abs (setp - flow) greater for a longer time period
MEMORY_FAILURE 0:4 uint:1 E2PROM checksum error
UNEXPECTED_ 0:5 uint:1 any process error condition
CONDITION
Reserved 0:6 uint:2
THERMAL_MASS_FLOW 2:0 long in [FLOW_UNIT] in 10E-4 steps
_RATE
INTERNAL_TEMP 6:0 long temperature in ° C
0% = valve is closed
100% = valve is in purge position (full open)
FLOW_TOTALIZED 14:0 long in sl / sm3 (in 10E-4 steps)
i.e. min. 298 days for a 500 range.
*) Hysteresis is +/- 0.25% (i.e. 0.5% in total) based on actual limit
53
Small Setup
Name: SMALL_SETUP
Type: Initial Write (small)
Size: 19
Parameters:

STRUCT_ID 0:0 uint8 0x10 (SMALL_SETUP)
INITIAL_SETUP 2:0 uint:1 THIS, ROM
BASE_UNIT 2:1 uint:1 Display in base unit
OPERATION_MODE 2:2 uint:1 0=ANALOG, 1=PROFIBUS
Reserved 2:3 uint:5
Reserved 1:0 uint:8
USER_SPAN 3:0 long 5% .. 200% in [%] (in 1E-4 steps)
USER_ZERO 7:0 long -5% .. +5% of full scale (in 1E-4 steps)
HIGH_TRIP_POINT 11:0 long -10% .. +120% of full scale (in 1E-4 steps)
LOW_TRIP_POINT 15:0 long -10% .. +120% of full scale (in 1E-4 steps)
54
Full Setup
Name: FULL_SETUP
Type: Initial Write (full)
Size: 80
Parameters:

STRUCT_ID 0:0 uint8 0x11 (FULL_SETUP)
INITIAL_SETUP 2:0 uint:1 THIS, ROM
BASE_UNIT 2:1 uint:1 display in base unit
OPERATION_MODE 2:2 uint:1 0=ANALOG, 1=PROFIBUS
SET_USER_SPAN 2:3 uint:1 1=USER_SPAN will be updated
SET_USER_ZERO 2:4 uint:1 1=USER_ZERO will be updated
SET_HIGH_TRIP_POINT 2:5 uint:1 1=HIGH_TRIP_POINT will be updated
SET_LOW_TRIP_POINT 2:6 uint:1 1=LOW_TRIP_POINT will be updated
SET_GAS_CORRECTION 1:7 uint:1 1=GAS_CORRECTION will be updated
SET_DEFAULT_TABLE 1:0 uint:1 1=DEFAULT_TABLE will be updated
SET_HIGH2_TRIP_POINT 1:1 uint:1 1=HIGH2_TRIP_POINT will be updated
SET_LOW2_TRIP_POINT 1:2 uint:1 1=LOW2_TRIP_POINT will be updated
SET_FILTER_SETTLING 1:3 uint:1 1=FILTER_SETTLING will be updated
SET_SOFT_START_RATE 1:4 uint:1 1=SOFT_START_RATE will be updated
SET_TIME_TO_CAL 1:5 uint:1 1=TIME_TO_CAL will be updated
SET_CAL_DATE 1:6 uint:1 1=CAL_DATE will be updated
SET_USER_TAG 1:7 uint:1 1=USER_TAG will be updated
USER_SPAN 3:0 long 5% .. 200% in [%] (in 1E-4 steps)
USER_ZERO 7:0 long -5% .. +5% full scale (1E-4 steps)
HIGH_TRIP_POINT 11:0 long -10% .. +120% full scale (1E-4 steps)
LOW_TRIP_POINT 15:0 long -10% .. +120% full scale (1E-4 steps)
GAS_CORRECTION 19:0 long 0.05 .. 2.00 (in 1E-4 steps)
(continued on next page)
55

DEFAULT_TABLE 23:0 uint8:4 0 .. 14 is the default table,
15 function (y=x) is the gas table
Reserved 23:4 uint8:4
HIGH2_TRIP_POINT 24:0 long -10% .. +120% full scale (1E-4 steps)
LOW2_TRIP_POINT 28:0 long -10% .. +120% full scale (1E-4 steps)
FILTER_SETTLING 32:0 long 0.0 .. 1000.0 in [sec] (in 1E-4 steps)
SOFT_START_RATE 36:0 long 0.0 .. 3600.0 in [sec] (in 1E-4 steps)
TIME_TO_CAL 40:0 uint16 if SET_TIME_TO_CAL is 1 it will last
TIME_TO_CAL hours until
CALIBRATION_RECOMMENDED flag becomes
active.
CAL_DATE 42:0 char[6] MM/DD/YY
USER_TAG 48:0 chr[32] any 32 character string
56
Small Diagnostics
Name: SMALL_DIAG
Type: Diagnose (small)
Size: 22
Parameters:

STRUCT_ID 0:0 uint8 0x20 (SMALL_DIAG)
Exception Status
ALARM_DEVICE_ 1:0 uint:1 specific to network (e.g. power fail)
COMMON
ALARM_DEVICE_ 1:1 uint:1 specific to flow device (e.g. r/w EPROM)
SPECIFIC
ALARM_MKS_SPECIFIC 1:2 uint:1 specific to MKS
ALARM_TABLE_ERROR 1:3 uint:1 Reports cal. Table errors
Reserved 1:4 uint:4
Identification:
PRODUCT_CODE 2:0 uint16 1179
REVISION_CODE 4:0 uint8 A
VERSION_CODE 5:0 uint16 0x0100
Specification:
FULL_SCALE_RNG 7:0 long full scale range in [FLOW_UNIT] (in 1E-4 steps)
FLOW_UNIT 11:0 uint8 SCCM, SLM (SCCM is base unit)
Status:
RUN_HOURS 20:0 uint16 hours
57
Full Diagnostics
Name: FULL_DIAG
Type: Diagnose (full)
Size: 217
Parameters:

STRUCT_ID 0:0 uint8 0x21 (SMALL_DIAG)
ALARM_DEVICE_ 1:0 uint:1 specific to network (e.g. power fail)
COMMON
ALARM_DEVICE_ 1:1 uint:1 specific to flow device (e.g. r/w EPROM)
SPECIFIC
ALARM_MKS_SPECIFIC 1:2 uint:1 specific to MKS (LinTab error)
ALARM_TABLE_ERROR 1:3 uint:1 Reports cal. Table errors
Reserved 1:4 uint:4
PRODUCT_CODE 2:0 uint16 1179
REVISION_CODE 4:0 uint8 A
VERSION_CODE 5:0 uint16 0x0100
FULL_SCALE_RNG 7:0 long full scale range in [FLOW_UNIT] (in 1E-4 steps)
FLOW_UNIT 11:0 uint8 SCCM, SLM
RUN_HOURS 20:0 uint16 hours
MANUFACTURER 22:0 char[20] MKS INSTRUMENTS
MODEL_DESIGNATION 42:0 char[20] 1179AX12CGA4V
SERIAL_NUMBER 62:0 char[20] 999999 G
DEVICE_TYPE 82:0 char[6] MFC, MFM
MODEL_TYPE 88:0 char[6] 1179
FIRMWARE_REVISION 94:0 char[6] 1.01
HARDWARE_REVISION 100:0 char[6] A
FACTORY_CAL_DATE 106:0 char[6] MM/DD/YY
VENDOR_CODE 112:0 uint16 0
(continued on next page)
58

STANDARD_TEMP 114:0 long 273.0 K ( 0 °C)
STANDARD_PRESSURE 118:0 long 101.1kPa (in 10E-4 steps)
VALVE_TYPE 122:0 uint8 0=SOLENOID, 1=VOICE_COIL,
2=PIEZO_ELECTRIC
VALVE_POWER_OFF_ 123:0 uint8 0=CLOSED, 1=OPEN, 2=LAST_POS
MODE
GAS_TABLE_NUM 124:0 uint8 Number of gas tables programmed.
i.e. values != 0 in GAS_CODE_OF_TABLE_I
GAS_CODE_OF_ 125:0 uint8[15] gas code of gas tables
TABLE_I 0=no table (y=x)
POINT_NUM_OF_ 140:0 uint8[15] Point number of gas tables
TABLE_I
TABLE_FLAGS 155:0 uint:1[15] 0=FACTORY; 1=USER; 1 means that the user
has overwritten the gas table once. All these flags
will be reset at factory setup.
ACTIVE_GAS_NAME 157:0 char[16] e.g. N2, is name of DEFAULT_TABLE if there
was no cyclic comm. In the past.
CAL_DATE 173:0 char[6] MM/DD/YY
USER_TAG 179:0 char[32] any 32 character string
REM_TIME_TO_CAL 211:0 uint16 Remaining TIME_TO_CAL
FLOW_TOTALIZED 213:0 long in sl/sm3 (in 10E-4 steps)
i.e. min. 298 days for a 500 range.
No base unit feature.
59
Calibration Table
Name: CAL_TABLE
Type: Initial Write, Diagnosis (full)
Size: 140
Parameters:

STRUCT_ID 0:0 uint8 0x12 or 0x22 for diagnosis
GAS_TABLE_IDX 1:0 uint8 0..14
GAS_CODE 2:0 uint8 0..254
255 resets to factory setup
POINT_NUM 3:0 uint8 2..15 = table with 2 .. 15 points
0 = disables table
1 = enables table
GAS_NAME 4:0 char[16] e.g. N2
SENSOR_VALS 20:0 long[15] in [FLOW_UNIT] in 10E-4 steps
FLOW_VALS 80:0 long[15] in [FLOW_UNIT] in 10E-4 steps
If a table is loaded, which is not strict monotonous, the table will be disabled (POINT_NUM = 0). If
a table, with a not valid index, is loaded, no tables will be affected. In both case the error flag for
the table will be set.
The calibration tables convert the measured value (SENSOR_VALS) to the true physical value
(FLOW_VALS). If the actual measured value is between two SENSOR_VALS, the flow will be
calculated by linear interpolation. If the measured value is outside of the table definitions, the first
(last) straight line will be continued.
The GAS_CODE may be any definition for gases. It is not evaluated. The GAS_NAME may be any
16 character string. It is also not evaluated.
The calibration tables stored from the factory may be recalled by an GAS_CODE of 255. In this
case the TABLE_FLAG in the full diagnostic is reset.
60
PROFIBUS Setup
GSD Files Usage

A GSD File describes the device and defines the configuration (Parameter) for the actual
application. The 1179PB may have different configurations: Small Setup, Full Setup and
Calibration table. The Standard GSD file uses a default parameter set in the Small Setup structure.
Others may be defined.
The 1179PB is a device, which normally would be looked at, as one module. This is also the
definition in the standard GSD File. But it could be an advantage, to look at it as a device, which
consists of 4 modules, one for each data block type (digital input, analog input, digital output,
analog output). See the section of a GSD file with 4 module below.
Note:
At the time of release of this instruction manual the standard GSD file was mks 1179.gsd
(June 2002)
61
Standard GSD File

; Slave GSD File for MKS flow controller
;========================================
#Profibus_DP
Vendor_Name = "MKS"
Model_Name = "MKS1179B00"
Revision = "V1.0"
Ident_Number = 0x1179
Protocol_Ident =0 ; PROFIBUS DP
Station_Type =0 ; DP Slave
FMS_supp =0 ; FMS is not supported
Hardware_Release = "V12"
Software_Release = "V010906"
;>>> supported Baudrate
9.6_supp =1
19.2_supp =1
93.75_supp =1
187.5_supp =1
500_supp =1
1.5M_supp =1
3M_supp =1
6M_supp =1
12M_supp =1
;>>> Default TSDR
MaxTsdr_9.6 = 60
MaxTsdr_19.2 = 60
MaxTsdr_93.75 = 60
MaxTsdr_187.5 = 60
MaxTsdr_500 = 100
MaxTsdr_1.5M = 150
MaxTsdr_3M = 250
MaxTsdr_6M = 450
MaxTsdr_12M = 800
Redundancy =0 ; no system Redundancy
Repeater_Ctrl_Sig =2 ; TTL level
24V_Pins =0 ; not connected
;>>> Slave Parameter
Freeze_Mode_supp =1 ; Freeze Mode supported
Sync_Mode_supp =1 ; Sync Mode supported
Auto_Baud_supp =1 ; automatic Baudrate Search supported
Set_Slave_Add_supp =1 ; SetSlaveAdr supported
User_Prm_Data_Len = 19
User_Prm_Data = 0x10,0x00,0x04,0x00,0x0f,0x42,0x40,0x00,0x00,0x00,\
0x00,0x00,0x0d,0xbb,0xa0,0x00,0x01,0x86,0xa0
; float data format signed integer
Min_Slave_Intervall =1 ; in 100 ys
Modular_Station =0 ; it is no modular Station
;>>> Device diagnostic
Unit_Diag_Bit(0) = "ALARM_DEVICE_COMMON"
Unit_Diag_Bit(1) = "ALARM_DEVICE_SPECIFIC"
Unit_Diag_Bit(2) = "ALARM_MKS_SPECIFIC"
Module = "SMALL_MFC" 0x91, 0xD5, 0xA1, 0xE1 ; small send / receive
EndModule
62
1179B/1479B/2179B/179B Chapter 7: Theory of Operation
Chapter 7: Theory of Operation
Technique of Measurement and Control, Electronics
The design of the 1179B flow controller incorporates an advanced flow sensor, a new control valve
and an optimized bypass. The latest generation two-element sensing circuit provides accurate,
repeatable performance even in low flow ranges (< 10 sccm). Low temperature effect from ambient
temperature change and a low attitude sensitivity effect are also ensured. The newly optimized
sensor/bypass arrangement minimizes the flow splitting error for gases with different densities,
which dramatically improves measurement accuracy when gases other than the calibration gas are
used.
The surface mount digital, processor controlled electronic circuitry allows optimum adjustment of
the sensing and signal conditioning circuitry and provides tuned flow control for fast response to
any set point in common with excellent stability.
Electronic Board
Valve Housing
with Solenoid
Sensor
Seal Cones
O-Ring
Bypass Valve Plug
Figure 18: Assembly
The flow controller type 1179B measures and controls the gas flow rate accordingly to a given
setpoint signal, which may be an analog signal or a digital command when using the Profibus
version. The control range is from 2 % to 100% of full scale. The accuracy of the flow
measurement is ± (0,5 % of reading + 0,2 % of F.S.) for both the analog units and Profibus
versions.
63
Chapter 7: Theory of Operation 1179B/1479B/2179B/179B
Flow Path
Upon entering the flow controller, the gas stream passes first through the metering section of the
instrument for its mass flow to be measured. The gas moves on through the control valve for its
rate of flow to be regulated according to the given set point, and then exits the instrument at the
established rate of flow.
The metering section consists of one of the following:
• A sensor tube for ranges < 10 sccm (N2 equivalent)

• A sensor tube and parallel bypass for ranges > 10 sccm (N2 equivalent)
The geometry of the sensor tube, in conjunction with the specified full scale flow rate, ensures fully
developed laminar flow in the sensing region. The bypass elements, in those instruments
containing them, are specifically matched to the characteristics of the sensor tube to achieve a
laminar flow splitting ratio which remains constant throughout each range.
Measurement Technique
The flow measurement is based on differential heat transfer between temperature sensing heater
elements which are attached symmetrically to the sensor tube. This senses the thermal mass
movement which is converted to mass flow via the specific heat, Cp, of the gas. The resulting
signal is then amplified, digitalized and linearized. The corrected digital signal is then transferred to
the control section (controllers only) and also converted into a 0 – 5 V analog signal.
Analog versions of the units described herein provide just the analog flow signal, Profibus versions
provide both the digital information and the analog signal.
The measurement principle of keeping temperatures constant results in much shorter response
time than conventional principles.
Control Circuitry
In the digital control section the flow rate is compared to the setpoint value and a control signal
(digital) is generated.
The digital control signal is then conditioned by a PID-algorithm, optimized for fastest controlling
and finally fed into the control circuitry which steers the solenoid control valve. The digital control
reduces overshoots to a minimum and for completely regulating the flow until the difference from
the setpoint is zero. Typical settle time is 0,8 s, for faster tuning contact MKS.
The control valve is closed when no power is applied (Normally Closed, N.O.). Controlling flow is
done by levitating the valve plug from the valve orifice. The plug is mounted at the front end of the
solenoid armature.
64
1179B/1479B/2179B/179B Chapter 7: Theory of Operation
Control Valve
The control valve is a specially designed solenoid driven valve. The armature is suspended by two
radial springs. This design provides frictionless movement and thus precise control. Mounted at the
front end of the cylindrical armature is the valve plug which incorporates the seal disc of Viton or
Kel-F or Teflon (ref. to Appendix A, Specifications). By preload force of the two above mentioned
springs the seal disc is pressed against the valve orifice, closing it’s flow channel. Therefore the
valve is closed when not activated. It is a „Normally Closed“ (N.C.) valve.
The inside diameter of the orifice determines the conductance. Each flow controller incorporates a
valve orifice with a conductance in accordance to the full scale range. The valve orifice in standard
units is sized that with a pressure difference between inlet and outlet fitting of typical 0,7 bar to 2,75
bar the specified full scale flow rate will be achieved. (related to air or nitrogen). For more
information refer to Appendix A, Specifications.
For special applications with low pressure conditions, e.g. vaporizer sources, configurations can be
provided. In this case the valve will have an orifice with higher conductance (=larger diameter of
the flow channel). Mass flow controllers for applications where only 200 mbar (or less) are
available have been realized.
At high line pressures in combination with high flow rates it may be necessary to have an orifice
with smaller conductance installed.
The mass flow monitor 179B has no valve!
65
Chapter 7: Theory of Operation 1179B/1479B/2179B/179B
66
1179B/1479B/2179B/179B Chapter 8: Gas Correction Factor (GCF)
Chapter 8: Gas Correction Factor (GCF)
The Gas Correction Factor (GCF):
A Gas Correction Factor (GCF) is used to indicate the ratio of flow rates of different gases which
will produce the same output signal from a mass flow meter / controller. The GCF is a function of
specific heat, density, and the molecular structure of the gases. Nitrogen (N2) is normally used as
the baseline gas (GCF = 1) since flow meters and controllers are usually calibrated with nitrogen.
GCF (N2) = 1
Appendix C lists the gas correction factors for many commonly used pure gases. If the gas you
are using is not listed in there, you must calculate its GCF. The equations for calculating gas
correction factors are described below.
How To Calculate the GCF for Pure Gases

To calculate the Gas Correction Factor for any pure gas (X), use the following equation:
0,3106 ∗ s
GCFx =
ρ x ∗ cpx
where:
GCFx = gas correction factor for gas X

0,3106 = (standard density of nitrogen) • (specific heat of nitrogen)
s = molecular structure correction factor where S equals:
1.030 for monoatomic gases
1.000 for diatomic gases
0.941 for triatomic gases
0.880 for polyatomic gases
dx = standard density of gas X, in g/l (at 0° C and 1013,25 mbar)
cpx = specific heat of gas X, in cal/g° C
67
Chapter 8: Gas Correction Factor (GCF) 1179B/1479B/2179B/179B
How To Calculate the GCF for Gas Mixtures

For gas mixtures, the calculated Gas Correction Factor is not simply the weighted average of each
component’s GCF. Instead, the GCF (relative to nitrogen) is calculated by the following equation:
0,3106 ∗ (a1s1 + a 2s2 + ....a n sn )

GCFx =
a1ρ1cp1 + a 2 ρ 2cp 2 + .... an ρncpn
where:
GCFm = gas correction factor for a gas mixture
0.3106 = (standard density of nitrogen) (specific heat of nitrogen)
a1, a2,..an = fractional flow of gases 1 through n

Note: a1 through an must add up to 1.0
s1, s2,...sn = Molecular Structure correction factor for gases 1 through n

where S equals:
1.030 for monatomic gases

1.000 for diatomic gases
0.941 for triatomic gases
0.880 for polyatomic gases
d1 through dn = standard density for gases 1 through n, in g/l
(at 0° C and 760 mmHg)
cp1 through cpn = specific heat of gases 1 through n, in cal/g° C
Note 1. When using the GCF, the accuracy of the flow reading may vary by
± 5%, however, the repeatability will remain ± 0,2% of FS.
2. The linearity and accuracy may be improved by calibrating the unit
with the process gas or using a gas with equivalent properties
(surrogate gas). Contact MKS for more information.
3. All MKS readouts have gas correction adjustment controls to
provide direct readout.
68
1179B/1479B/2179B/179B Chapter 8: Gas Correction Factor (GCF)
Example
Calculate the GCF for a gas mixture of argon (gas 1) flowing at 150 sccm and nitrogen (gas 2)
flowing at 50 sccm, where:
Argon (Ar) Nitrogen (N2)
a1 = 150 = 0.75 a2 = 50 = 0.25

200 200
s1 = 1.030 s2 = 1.000
d1 = 1.782 g/l d2 = 1.250 g/l
cp1 = 0.1244 cal/g ° C cp2 = 0.2485 cal/g ° C
GCFM (0 .3 1 0 6 ) [(0 .7 5 )(1 .0 3 0 ) + (0 .2 5 )(1 .0 0 0 )]

=
(0 .7 5 )(1 .7 8 2 )(0 .1 2 4 4 ) + (0 .2 5 )(1 .2 5 0 )(0 .2 4 8 5 )
(0 .3 1 0 6 ) [(0 .7 7 2 5 ) + (0 .2 5 )]
=
(0 .1 6 6 3 ) + (0 .0 7 7 7 )
(0 .3 1 0 6 ) (1 .0 2 2 5 )
=
0 .2 4 4
0 .3 1 7 6
=
0 .2 4 4
GCFM = 1 .3 0 2
Mass Flow Rate at a Different Reference Temperature

The equations for calculating the GCF assume that the MFC was calibrated at a reference
temperature of 0° C (~273,15 K). If you want to read the mass flow as if the MFC was calibrated at
a different reference temperature, adjust the calculated GCF value using the following equation:
Tx
GCFX = GCF x
TN
where:
Tx = actual reference temperature in Kelvin K
TN = international standard temperature 273.15 K ( = 0° C)
69
Chapter 8: Gas Correction Factor (GCF) 1179B/1479B/2179B/179B
Direct Reading of the Analog Output Signal
If a direct reading of output is desirable, and the readout equipment has no GCF potentiometer, a
proper input divider may be constructed.
Example: Using a mass flow controller, full scale range 500 sccm N2, full scale signal is 5 VDC
and a process gas CCl4 . A flow rate of 100 sccm CCl4 shall be converted into 1 VDC.
As the gas correction factor of CCl4 is 0,31 the flow signal must be divided 3.22 to 1.00
volts.
Figure 19: Voltage Divider
Note All MKS readouts have gas correction adjustment controls to provide
direct readout. The analog setpoint output signal is generated
accordingly.
70
1179B/1479B/2179B/179B Chapter 9: MFC Sizing Guidelines
Chapter 9: MFC Sizing Guidelines
General
To select the correct MFC for an application, you must determine the:
• flow controller range

• appropriate valve configuration
The flow controller range depends on the desired flow rate and the gas correction factor for the gas
to be used. MKS states the flow controller ranges based on flow rate of nitrogen; the flow rate for
other gases may vary.
The proper valve configuration depends upon the flow range, inlet pressure, differential pressure
across the unit, and density of the gas. Proper valve configurations have been established for all
standard flow ranges flowing nitrogen under standard operating pressures. These configurations
are suitable for virtually all gases and pressure conditions.
71
Chapter 9: MFC Sizing Guidelines 1179B/1479B/2179B/179B
Determining the Flow Controller Range
The Type 1179 controller is available in ranges of 10, 20, 50, 100, 200, 500, 1000, 2000, 5000,
10000 and 20000 sccm (N2 equivalent). To select the appropriate range, you must determine the
flow rate of nitrogen that is equivalent to the flow rate of the desired gas. Calculate the ratio of the
GCF of nitrogen (1.00) to the GCF of the desired gas (refer to Appendix C as shown in the
following example.
Example:
You need a flow rate of 250 sccm of argon (Ar). What range flow controller should you use?
1. Find the Gas Correction Factor of Ar.

The GCF for Ar is 1.39.
2. Insert the GCF of Ar in the following formula:
(x) = (Argon flow rate) x GCF (N2) : GCF (Ar)
where x is the equivalent flow rate of nitrogen (sccm).
(1.00) =
(x )
(1.39) (250 sccm Ar )
(x) = 180 sccm N2
A flow rate of 250 sccm of argon will produce a flow rate equivalent to 180 sccm of N 2. This falls
within the range of a 200 sccm flow controller.
When calculating equivalent N2 flows using gas correction factors, be sure to use a flow controller
with a sufficient flow rate range. For example, if the calculated equivalent N2 flow in the example
shown above is 205 sccm, use a 500 sccm flow controller. The 500 sccm instrument can then be
calibrated such that 205 sccm N2 = full scale.
Note When using a gas with a density higher than nitrogen, be sure that the
control valve full scale range can accommodate the desired flow rate.
Please call the MKS Applications group if you have any questions.
Configurations for Low or High Differential Pressure

The mass flow controllers are designed to operate under certain differential pressure conditions.
Nominal values are listed in Appendix A, Specifications.
On request however, it is possible to provide special configurations for many applications with low
or high pressure drops, respectively. A typical low pressure application for example is a vaporizer
where liquid material is evaporated at low pressure and reasonable low temperature.
72
1179B/1479B/2179B/179B Chapter 10: Maintenance
Chapter 10: Maintenance
General
After proper installation and correct setup there is typically only the need for occasionally checking
and - if necessary - readjusting the zero flow signal. In general no further maintenance is required.
How often the calibration and the valve should be checked depends on physical influences, e.g.
temperature, vibrations, dust etc., is also related to the required accuracy and last not least on how
the process gas affects the wetted parts inside the unit.
If a controller fails to operate properly upon receipt, check for shipping damage, and check the
power/signal cable for correct continuity. Any damage should be reported to the carrier and MKS
Instruments immediately.
Zero Adjustment
To achieve optimum accuracy and reliability you should periodically check the zero readout and - if
necessary - readjusting it. For adjusting zero refer to the instructions in Chapter 5; Chapter 6,
Operation of Analog/Profibus Units. How often the zero readout should be checked and corrected
depends on the required accuracy and reproducibility the process is asking for.
Checks and Recalibration

Checks and recalibrations can be done by any service center of MKS (refer to section Repair). If
nothing else is specified or shorter intervals are necessary we recommend annual maintenance
and recalibration at a service center of MKS.
MKS offers many standard equipment for checking and calibrating mass flow meters / controllers
to allow you making all testing and calibration even in situ.
For electronic testing and trouble shooting we recommend to do all measurements directly at the
interface connector of the unit. This eliminates or detects erratic diagnosis, typically generated by
incorrect grounding. MKS offers for this purpose so called breakout connectors. These are
switched between the connector of the unit and the cable and provide a test pin for each wire, thus
allowing direct access for a volt meter or oscilloscope etc.
73
Chapter 10: Maintenance 1179B/1479B/2179B/179B
Profibus Support Kit

This kit allows convenient setup and diagnosis of a Profibus mass flow meter/controller. It can be
ordered from MKS as Profibus Support Kit, part no. 1179-PB-SUPPORT, consisting of
• 1 Disc 3,5“
• 1 RS 232 cable
• 1 Converter RS232/RS485
• 1 Instruction paper
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration and
Service Centers, listed at the end of this manual. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your type
1179 instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to MKS,
the MKS Calibration and Service Center will inform you about any formal requirements.
You will find a list of MKS Calibration and Service Centers and a form for Declaration of
Contamination at the end of this handbook.
Warning All returns to MKS Instruments must be free of harmful, corrosive,

radioactive, or toxic materials.
74
1179B/1479B/2179B/179B Chapter 10: Maintenance
Troubleshooting
Symptoms Possible Cause Remedy

No output or overrange at zero Improper cable Check cable for type
(after warm-up)
Valve override function applied Disconnect / disable valve
(Mass flow controller) override
Electronics malfunctioning Return for service
Unit indicates a negative flow Unit installed in gas stream Reinstall unit in proper flow
backwards direction
Controller does not track set Improper zero adjustment Zero meter output
point.
Improper grounding(s) Check all ground connections.
Check signals, if possible
directly at the unit’s connector
Controller does not function Electronics malfunctioning Return for service
Valve sticking, clogged, Check compatibility of the
contaminated, corroded. process gas with materials
wetted (corrosion is typically
also visible inside the process
fittings)
Readjust the valve (return for
service)
Shutoff valve upstream or Open shutoff valve first, then
downstream closed apply again setpoint to the
unit.
No inlet pressure Regulate inlet pressure
Oscillation Supply pressure unstable, e.g. Check manufacturers’
defective pressure regulator. specifications
Supply pressure too high Reduce upstream pressure
(continued next page)
75
Chapter 10: Maintenance 1179B/1479B/2179B/179B
Symptoms Possible Cause Remedy

Excessive closed conductance Inadequate valve preload Readjust the valve (return for
service)
Valve seat elastomer damaged Check compatibility of process
gas with seat material
Replace or change valve seat
elastomer (return for service)
Unit does not achieve full flow Upstream pressure too low Increase upstream pressure
Excessive valve preload Readjust the valve
Valve seat disc damaged, e.g. Check compatibility of process
swollen gas with seat material
Replace or change valve seat
elastomer (return for service)
Table 3: Troubleshooting
76
1179B/1479B/2179B/179B Chapter 11: Type 179B, 1179B, 1479B, 2179B (Comparison)
Chapter 11: Type 179B, 1179B, 1479B, 2179B

(Comparison)
Type 179B
The type 179B is the standard mass flow meter and provides the base for the mass flow controllers
type 1179, 1479 and 2179. The imprint on the aluminium housing is MASS-FLO METER. The flow
path is completely metal sealed. Therefore the meter is inherently an all metal sealed unit.
Type 1179B
The Type 1179B is the standard version of the MKS Mass-Flo® Controller series. Compared to the
flow monitor type 179B it employs an integrated control valve, solenoid driven, and a digital control
electronics. There is just one O-ring seal in the valve body, all other process gas wetted surfaces
are metal sealed or even welded.
The control valve is normally closed, e.g. when no power or a zero setpoint signal is applied. The
sealing material of the valve plug is typically Viton, Kel-F or Teflon which provides a closed
conductance which is sufficiently small for many application. Nevertheless it must be pointed out
that for reliable and completely closing a positive shut off valve is strongly recommended.
Type 1479B
The Type 1479B is the completely metal sealed type 1179B, meaning that also the one O-ring seal
is replaced by a metal C-seal. The valve plug seal disc is Kel-F or Teflon, depending of the range.
Type 2179B
The Type 2179B consists of a mass flow controller 1179B with a positive shut off valve closely
welded to the outlet. This is the recommended configuration for closing flow at minimum leak rate
with minimized dead volume between shutoff valve and control valve. The welded connection
prevents an additional connection by fittings with potential leak.
The shutoff valve is an all metal sealed diaphragm valve (material: 316L VAR SST and Elgiloy)
with a PCTFE valve seat.
The complete stick is mounted on a common base plate.
77
Chapter 11: Type 179B, 1179B, 1479B, 2179B (Comparison) 1179B/1479B/2179B/179B
Pneumatic Positive Shutoff Valve

To open the shutoff valve pressurized air at 4,1 bar(g) to 8,2 bar(g) is required. The air port is a
1/8“ – 27 NPT female thread. To close the valve the air pressure must be released.
The thread connection should be done using Teflon tape thus reducing friction and avoiding
damages to the thread.
Note Throughout this handbook all three types of mass flow controllers,
namely 1179B, 1479B and 2179B will be expressed by type 1179B in
common. The types 1479B and 2179B will only be mentioned by their
specific name where it is necessary to avoid confusion.
78
1179B/1479B/2179B/179B Appendix A: Product Specifications
Appendix A: Product Specifications
Specifications
Accuracy1
Analog and Profibus version: 0,5 % of reading plus 0,2 % of full scale
Control Range (MFC only) 2,0 % to 100% of full scale
2
Controller Settling Time typically < 0,8 seconds (to within 2 % of set
point);
faster settling time on request
3
Full Scale Ranges (nitrogen equivalent) 10, 20, 50, 100, 200, 500, 1000, 2000, 5000,
10.000, 20.000 sccm
Maximum Inlet Pressure 150 psig
4
Operational Differential Pressure (MFC only)
≤ 5000 sccm 0,7 bar (g) to 2,8 bar (g)
10.000 to 20.000 sccm 1 bar (g) to 2,8 bar (g)
Pressure Coefficient 0.02 % of reading/psi
Repeatability (MFC only) ± 0,2 % of full scale
Resolution (measurement) 0,1 % of full scale
Temperature Coefficients
Zero <0.04 % of full scale /°C (400 ppm)
Span <0,08 % of reading /°C (800 ppm)
Warm Up Time 15 minutes
________________________________
1
Includes non-linearity, hysteresis and non-repeatability.
2
Controller settling time per SEMI E17-91, specified for flows starting from 0 to 10% (or greater) of full scale.
3 3
sccm = std. cm / min ; standard (std.) condition: 1013,25 mbar and 0 °C.
4
Referenced to an MFC outlet pressure at atmosphere.
79
Appendix A: Product Specifications 1179B/1479B/2179B/179B
Environmental Specifications
Storage Humidity Range 0 to 95% relative humidity, non-condensing
Operating Temperature 0° to 50° C (32° to 122° F)
Storage Temperature -20° to 50° C (-4° to 122° F)
Electrical Specifications
Connectors
Analog Version: Sub D 15-poles, pin
Profibus Version: Sub D 9-poles, pin (Analog Interface)
Sub D 9-poles, socket (Profibus Interface)
Input Voltage/Current Required 20,5 to 31,5 VDC 2
Maximum at Start Up (first 5 seconds)5 @ 200 mA
Typical at Steady State @ 100 mA
Output Impedance <1Ω
Output Signal/Minimum Load 0 to + 5 VDC into > 10 kΩ
Set Point Command Signal (not for type 179B) 0 to + 5 VDC from < 20 kΩ
________________________________
5
Add 100 mA to start up current if the valve is energized.
2
For the use of the Profibus version in analog mode is a +/- 15 VDC power supply required. For
the use in digital mode a +/- 15 VDC or a 24 VDC power supply is sufficient.
80
1179B/1479B/2179B/179B Appendix A: Product Specifications
Physical Specifications
Dimensions refer to Chapter 4

Fittings:
Standard Cajon® 4-VCR® male compatible
Optional Cajon® 4-VCO® male compatible
6 mm Swagelok compatible
1/4“ Swagelok compatible
DN 16 KF
Internal Surface Area (500 sccm unit) 49,7 cm² (7,7 in²)
Internal Volume (500 sccm unit) 4,43 cm³ (0,27 in³)
Leak Integrity (mbar·l/s He)
External < 1 x 10-9
Through closed Valve (MFC only) < 1 x 10-4
( ≤ 1 % of full scale for units with ranges
greater 10.000 sccm; test gas N2 at 2,7 bar (g)
at inlet and atmosphere at outlet)
Type 2179B
External < 1 x 10-9
Through closed Shutoff Valve < 4 x 10-9
Materials Wetted
Mass Flow Controller:
Body 316L SST
Valve Nickel, Elgiloy, Kel-F® (when Kalrez sealed
and range ≤200 sccm) or Teflon (when Kalrez
sealed and range ≥500 sccm)
Standard Sealing Material Viton®

Optional Buna-N, Neoprene®, Kalrez®
Mass Flow Meter: 316L SST
Mass < 0,9 kg (1,9 lbs)
Due to continuing research and development activities, these product specifications are subject to change without notice.
81
Appendix A: Product Specifications 1179B/1479B/2179B/179B
82
1179B/1479B/2179B/179B Appendix B: Model Codes
Appendix B: Model Codes
Model Code
The model code is identified as follows:
##### XXX Y Z C A E
##### = Type Number

XXX = Full Scale Range
Y = Fittings
Z = Valve
C = Connector
A = Seals
Type Number (#####)

This designates the model number of the instrument:
The mass flow monitor (no valve) is identified as the Type 179B.
The mass flow controller (includes a control valve) is identified as the Type 1179B.
The all metal sealed mass flow controller is identified as the Type 1479B.
The mass flow controller equipped with a positive shutoff valve is identified as the Type 2179B.
83
Appendix B: Model Codes 1179B/1479B/2179B/179B
Full Scale Range (sccm nitrogen) (XXX)

The full scale range is indicated by two digits plus the letter C.
Full scale flow range (sccm) Ordering Code

10 11C
20 21C
50 51C
100 12C
200 22C
500 52C
1000 13C
2000 23C
5000 53C
10.000 14C
20.000 24C
Table 4: Ordering Code - Ranges
Fittings (Y)
There are different fittings available, designated by a single letter code.
Fitting Type Ordering Code

® ®
Cajon 4-VCR male R
Cajon® 4-VCO® male G
Swagelok® 1/4“ S
®
Swagelok 6 mm M
DN 16 KF D
Table 5: Ordering Code - Fittings
84
1179B/1479B/2179B/179B Appendix B: Model Codes
Valve (Z)
Two valve configurations are available, designated by a single number code.
Valve Type Ordering Code

Normally Closed (N.C.) Valve 1
No Valve (Type 179B only) 3
Table 6: Ordering Code - Valves
Connector (C)
The electrical connector of the analog version is designated by a letter, the connectors of the
Profibus unit by a number.
Connector Ordering Code

Analog Version (15 pol. Sub D) B
Profibus Version (2 x 9 pol. Sub D) 4
Table 7: Ordering Code - Connectors
Seals (A)
The seal material is indicated by a single letter code.
Seal Material Ordering Code

Viton® (Standard) V
®
Neoprene N
Buna-N B
Kalrez® K
Metal M
Table 8: Ordering Code - Seals
85
Appendix B: Model Codes 1179B/1479B/2179B/179B
Appendix (F)
With Profibus units the type code ends with two to four digit code which includes the revision code.
Example:
........26C1
Special versions end with a four digit code, consisting of a leading S followed by a three digit
number. Example:
.........S211
Because of limited character length the revision number is then deleted.
Example: Ordering a flow monitor

To order a mass flow meter type 179B, analog version, 500 sccm full scale range, DN16KF fittings,
no valve, 15-pol. Sub D connector, metal sealed, the product code is:
179B 52C D 3 B M
Example: Ordering Code of a Mass Flow Controller

To order a mass flow controller type 1179B, analog version, 100 sccm full scale range, 4-VCR
fittings, valve, 15-pol. Sub D connector and Viton sealing material, the product code is:
1179BX 12C R 1 B V
Example: Ordering a Flow Controller (Profibus)

To order a mass flow controller type 1179B, Profibus version, 2000 sccm full scale range, 6 mm
Swagelok fittings, Kalrez sealing material, software revision 2.6, the product code is:
1179B 23C M 1 4 K 26C1
86
1179B/1479B/2179B/179B Appendix C: Gas Correction Factors
Appendix C: Gas Correction Factors

Please read also the instructions in Chapter 8 and the notes at the end of this table.
GAS SYMBOL SPECIFIC HEAT, Cp DENSITY CONVERSION

cal/goC g/l @ 0oC FACTOR
Air --- 0.240 1.293 1.00
Ammonia NH3 0.492 0.760 0.73

1
Argon Ar 0.1244 1.782 1.39
Arsine AsH3 0.1167 3.478 0.67
Boron Trichloride BCl3 0.1279 5.227 0.41
Bromine Br2 0.0539 7.130 0.81

1
Carbon Dioxide CO2 0.2016 1.964 0.70
Carbon Monoxide CO 0.2488 1.250 1.00
Carbon Tetrachloride CCl4 0.1655 6.86 0.31
Carbon Tetraflouride CF4 0.1654 3.926 0.42

(Freon - 14)
Chlorine Cl2 0.1144 3.163 0.86
Chlorodifluoromethane CHClF2 0.1544 3.858 0.46

(Freon - 22)
Chloropentafluoroethane C2ClF5 0.164 6.892 0.24

(Freon - 115)
Chlorotrifluoromethane CClF3 0.153 4.660 0.38

(Freon - 13)
Cyanogen C2N2 0.2613 2.322 0.61
Deuterium D2 1.722 0.1799 1.00
Diborane B2H6 0.508 1.235 0.44
Dibromodifluoromethane CBr2F2 0.15 9.362 0.19
Dichlorodifluoromethane CCl2F2 0.1432 5.395 0.35

(Freon - 12)
Dichlorofluoromethane CHCl2F 0.140 4.592 0.42

(Freon - 21)
Dichloromethysilane (CH3)2SiCl2 0.1882 5.758 0.25
(Table continued on next page)
87
Appendix C: Gas Correction Factors 1179B/1479B/2179B/179B

Dichlorosilane SiH2Cl2 0.150 4.506 0.40
1,2-Dichlorotetrafluoroethane C2Cl2F4 0.160 7.626 0.22

(Freon - 114)
1,1-Difluoroethylene C2H2F2 0.224 2.857 0.43

(Freon - 1132A)
2,2-Dimethylpropane C5H12 0.3914 3.219 0.22
Ethane C2H6 0.4097 1.342 0.50
Fluorine F2 0.1873 1.695 0.98
Fluoroform CHF3 0.176 3.127 0.50

(Freon - 23)
Freon - 11 CCl3F 0.1357 6.129 0.33
Freon - 12 CCl2F2 0.1432 5.395 0.35
Freon - 13 CClF3 0.153 4.660 0.38
Freon - 13 B1 CBrF3 0.1113 6.644 0.37
Freon - 14 CF4 0.1654 3.926 0.42
Freon - 21 CHCl2F 0.140 4.592 0.42
Freon - 22 CHClF2 0.1544 3.858 0.46
Freon - 23 CHF3 0.176 3.127 0.50
Freon - 113 C2Cl3F3 0.161 8.360 0.20
Freon - 114 C2Cl2F4 0.160 7.626 0.22
Freon - 115 C2ClF5 0.164 6.892 0.24
Freon - 116 C2F6 0.1843 6.157 0.24
Freon - C318 C4F8 0.185 8.397 0.17
Freon - 1132A C2H2F2 0.224 2.857 0.43

2
Helium He 1.241 0.1786 .- - -
Hexafluoroethane C2F6 0.1843 6.157 0.24

(Freon - 116)
2
Hydrogen H2 3.419 0.0899 .- - -
Hydrogen Bromide HBr 0.0861 3.610 1.00
Hydrogen Chloride HCl 0.1912 1.627 1.00
Hydrogen Fluoride HF 0.3479 0.893 1.00
Isobutylene C4H8 0.3701 2.503 0.29
Krypton Kr 0.0593 3.739 1.543
Methane CH4 0.5328 0.715 0.72
(Table continued on next page)
88
1179B/1479B/2179B/179B Appendix C: Gas Correction Factors

Methyl Fluoride CH3F 0.3221 1.518 0.56
Molybdenum Hexafluoride MoF6 0.1373 9.366 0.21
Neon Ne 0.246 0.900 1.46
Nitric Oxide NO 0.2328 1.339 0.99
Nitrogen N2 0.2485 1.250 1.00

2
Nitrogen Dioxide NO2 0.1933 2.052 .- - -
Nitrogen Trifluoride NF3 0.1797 3.168 0.48
Nitrous Oxide N2O 0.2088 1.964 0.71
Octafluorocyclobutane C4F8 0.185 8.937 0.17

(Freon - C318)
Oxygen O2 0.2193 1.427 0.993
Pentane C5H12 0.398 3.219 0.21
Perfluoropropane C3F8 0.194 8.388 0.17
Phosgene COCl2 0.1394 4.418 0.44
Phosphine PH3 0.2374 1.517 0.76
Propane C3H8 0.3885 1.967 0.36
Propylene C3H6 0.3541 1.877 0.41
Silane SiH4 0.3189 1.433 0.60
Silicon Tetrachloride SiCl4 0.1270 7.580 0.28
Silicon Tetrafluoride SiF4 0.1691 4.643 0.35
Sulfur Dioxide SO2 0.1488 2.858 0.69
Sulfur Hexafluoride SF6 0.1592 6.516 0.26
Trichlorofluoromethane CCl3F 0.1357 6.129 0.33

(Freon - 11)
Trichlorosilane SiHCl3 0.1380 6.043 0.33
1,1,2-Trichloro - 1,2,2- CCl2FCClF2 or 0.161 8.360 0.20

Trifluoroethane (C2Cl3F3)
(Freon - 113)
WF6 0.0810 13.28 0.25
Tungsten Hexafluoride
Xe 0.0378 5.858 1.32
Xenon
1Empirically 2Consult
defined MKS Instruments, Inc. for special applications.
NOTE: Standard Pressure is defined as 1013,25 mbar (760 mmHg;14.7 psia), Standard Temperature is defined as 0oC.
89
Appendix C: Gas Correction Factors 1179B/1479B/2179B/179B
90
1179B/1479B/2179B/179B Appendix D: Binary Code
Appendix D: Binary Code
The following table shows how to convert numbers from decimal code into binary code:
Decimal Binary code

0 0000000
1 0000001
2 0000010
3 0000011
4 0000100
5 0000101
6 0000110
7 0000111
8 0001000
9 0001001
10 0001010
11 0001011
12 0001100
13 0001101
14 0001110
15 0001111
16 0010000
17 0010001
18 0010010
19 0010011
20 0010100
21 0010101
22 0010110
23 0010111
24 0011000
25 0011001
26 0011010
27 0011011
28 0011100
29 0011101
30 0011110
31 0011111
... ...
126 1111110
127 1111111
Table 9: Binary Code
91
Appendix D: Binary Code 1179B/1479B/2179B/179B
92
1179B/1479B/2179B/179B MKS Worldwide Calibration & Service Centers
MKS Worldwide Calibration & Service Centers

UNITED STATES GERMANY/BENELUX
MKS Instruments, Inc. MKS Instruments,
Corporate Service Center Deutschland GmbH
651 Lowell Street Schatzbogen 43
Methuen, MA 01844 D-81829 München
Tel. (978) 682-4567 Tel. 49-89-420008-0
Fax (978) 682-8543 Fax 49-89-42-41-06
Email: [email protected]
MKS Instruments, Inc.
HPS Division, ITALY
Vacuum Components, G. Gambetti Kenologia Srl.
Valves & Gauging Via A. Volta No. 2
5330 Sterling Drive 20082 Binasco (MI), Italy
Boulder, CO 80301 Tel. 39-2-90093082
Tel. (303) 449-9861 Fax 39-2-905.2778
Tel. (800) 345-1967
Fax (303) 442-6880 JAPAN
MKS Japan, Inc.
CANADA Harmonize Building
MKS Instruments, Canada Ltd. 5-17-13, Narita-Higashi
30 Concourse Gate Suginami-Ku, Tokyo 166, Japan
Nepean, Ontario, Canada K2E 7V7 Tel. 81-3-3398-8219
Tel. (613) 723-3386 Fax 81-3-3398-8984
(800) 267-3551 (CAN only)
Fax (613) 723-9160 KOREA
MKS Korea Co., Ltd.
FRANCE 1st Floor DK Plaza-I
MKS Instruments, France s.a. 375-1 Geumgok-dong
43, Rue du Commandant Rolland Bundang-gu,Seongnam Kyonggi-do
B.P. 41 Korea 463-805
F-93352 Le Bourget, Cedex, Tel 82-31-717-9244
France Fax 82-31-714-9244
Tel. 33(1)48.35.39.39
Telex 233817 F UNITED KINGDOM
Fax 33(1)48.35.32.52 MKS Instruments, U.K. Ltd.
1 Anchorage Court
TAIWAN Caspian Road
MKS Instruments, Taiwan Altrincham, Cheshire
10F, No.93, Shoei-Yuan Street WA14 5HH, England
Hsinchu City 300 Tel. 44-161-929-5500
Taiwan, R.O.C. Fax 44-161-929-5511
Tel. 886-3-575 3040
Fax 886-3-575 3048
93
Next page: Declaration of Contamination.
Contact your MKS location if the form is missing.

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Y-1951179B

Digital Mass Flow Controller

MKS Instruments Ausgabe 2010-06

Mass Flow Controller Safety Information ........................................................................................... 9

Chapter 1: General Information....................................................................................................... 13

Chapter 2: Shipment ....................................................................................................................... 17

Chapter 3: Connectors and Control Elements ................................................................................ 21

Profibus Units ...................................................................................................................... 24

Chapter 5: Operation (Analog Units) ............................................................................................... 39

Chapter 6: Operation (Profibus Units)............................................................................................. 43

Chapter 7: Theory of Operation....................................................................................................... 63

Chapter 8: Gas Correction Factor (GCF) ........................................................................................ 67

Chapter 9: MFC Sizing Guidelines .................................................................................................. 71

Chapter 10: Maintenance ................................................................................................................ 73

Chapter 11: Type 179B, 1179B, 1479B, 2179B (Comparison)....................................................... 77

Appendix A: Product Specifications ................................................................................................ 79

Appendix B: Model Codes............................................................................................................... 83

Appendix C: Gas Correction Factors .............................................................................................. 87

Appendix D: Binary Code ................................................................................................................ 91

MKS Worldwide Calibration & Service Centers ............................................................................... 93

There is a declaration of contamination on the last page of this instruction manual.

Figure 1: Model Code Label ............................................................................................................ 19

Table 1: Definition of Symbols Found on the Unit........................................................................... 10

Mass Flow Controller Safety Information

Symbols Used in This Instruction Manual

Warning The WARNING sign denotes a hazard to personnel. It calls

Caution The CAUTION sign denotes a hazard to equipment. It calls

Note The NOTE sign denotes important information. It calls attention to a

Symbols Found on the Unit

Definition of Symbols Found on the Unit

Frame or chassis Equipotentiality Direct current Alternating current

Both direct and Three phase

Table 1: Definition of Symbols Found on the Unit

Safety Procedures and Precautions

DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

SERVICE BY QUALIFIED PERSONNEL ONLY

USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

PURGE THE INSTRUMENT

USE PROPER PROCEDURES WHEN PURGING

DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT

USE PROPER FITTINGS AND TIGHTENING PROCEDURES

CHECK FOR LEAK-TIGHT FITTINGS

OPERATE AT SAFE INLET PRESSURES

INSTALL A SUITABLE BURST DISC

KEEP THE UNIT FREE OF CONTAMINANTS

ALLOW THE UNIT TO WARM UP

Chapter 1: General Information

Type Function Features

• Analog version (digital electronic with analog interfacing)

For other fittings and ranges contact MKS please.

Power Supply and Readout Units

Designations and Names

Model code 1179B, for other codes ref. to appendix B

Figure 1: Model Code Label

Clean Room Packaging

This page intentionally left blank

Chapter 3: Connectors and Control Elements

Figure 2: 1179B /1479B / 179B Side View

(Imprint on type 179B: MASS-FLO METER )