Scientific / Metrology Instruments

Scanning Electron Microscope

JSM-IT200
 JSM-IT200 Series
Scanning Electron Microscope

Latest Advancements from JEOL

Fast Observation, Analysis and Report Generation !

High Performance Analytical Tool !

1 | JSM-IT200 Series
 Main Screen

Element Spectrum Data management

button

High Performance
With Faster and Easier Analysis

■ Main screen - Zeromag -

You can locate the specimen area or specify analysis positions with Holder Graphics or CCD image *1
displayed on the main screen.

■ Element / Spectrum display - Live Analysis*2 -

The characteristic X-ray spectrum from the measurement area and the main constituent elements are always
displayed.

■ Data management button - SMILE VIEWTM Lab: Integrated data management -

A single click of the data management button displays the Data management screen allowing you to generate
a report of all images and analysis data, as well as review or re-analyze already-acquired data.

*1 To take a CCD image, SNS (option) is required.

*2 Applicable to (A) Analysis/(LA) Low Vacuum and Analysis versions.

JSM-IT200 Series | 2
 Guided operation from sample introduction to
observation
The JSM-IT200 navigation flow guides the user step-by-step from sample introduction to automatic
image formation.

■ Specimen Exchange Navi

■ Specimen Exchange Navi

A step-by-step guide to sample exchange, condition setting and automatic image formation.

Set sample height Entering Condition setting

Determine the height offset specimen height using recipes
for tall samples before Enter the specimen height within the
sample loading. Specimen Exchange Navi.

● Stage Navigation System (SNS) Option

Switch between the Holder

● Holder Graphics Graphics and CCD (color)
image. You can specify the
Holder Graphics allows you observation area by double-
to immediately observe the clicking the acquired color
specimen position by showing image. Displaying the color
the current specimen position image on the Zeromag screen
including specimen tilt and allows for an easy search of
rotation. the specimen area. CCD image area: 5.1 × 3.8 cm
Number of pixels: 5,000,000
Top view Digital zoom up to ×20

● Chamber Scope (CS) Option

Switch between Holder Graphic

and Chamber Scope view.
A camera which displays the
relationship of the specimen
to the detectors and objective
lens pole piece, is available.
Side view

3 | JSM-IT200 Series
Specimen loading Chamber evacuation starts after
Draw-out method enables smooth acquisition of CCD image
exchange of any form or size of specimen. Observation area can be specified on CCD image*
during evacuation.

Select area for observation.

Move stage?
Go to specified area Do not move stage

Click on desired location for observation Side camera

Maximum specimen diameter: 150 mm dia.
Start observation automatically
Maximum specimen height: 48 mm H after stage movement

Completion of chamber evacuation

Then, the target observation area is specified, observation conditions are set, image adjustment is completed.
You can observe the image at designated magnification.

* To take a CCD image, SNS (option) is required.

JSM-IT200 Series | 4
 True Integration of Optical and SEM imaging

■ Zeromag
■ Zeromag

Smooth transition from optical to SEM imaging Features of Zeromag

・Seamless transition from optical to SEM image.
Zeromag is a function that links the SEM image with Holder Graphics or ・Can pre-set multiple analysis positions across
CCD image* (optical image) where all are linked to the stage coordinates. your specimen set.
This facilitates navigation with seamless transition from the CCD image to ・Displays the areas analyzed for easy review or
a high magnification SEM image. fast return for additional study.

Magnify SEM image

Magnify OM image

100 μm

Zeromag

Zeromag image displayed on the Main screen

5 | JSM-IT200 Series
 Secondary electron image
This high magnification image highlights fine surface morphology of the specimen.

Magnify SEM image

10 μm
500 nm

Specimen: Ignition stone

Accelerating voltage: 30 kV
Magnification: ×200, 2,000 and 50,000 (left to right)
High-vacuum mode, Secondary electron image

● Auto functions
Our advanced automatic functions simplify operation.
Photography
Automatically adjust Focus, Contrast, Brightness and Stigmator with a single click.

Auto

Specimen : Asbestos　
Accelerating voltage: 10 kV
Magnification：×5,000
High-vacuum mode
Secondary electron image
5 μm 5 μm

* To take a CCD image, SNS (option) is required.

JSM-IT200 Series | 6
 Easy Elemental Analysis

■ Live Analysis Standard for (A) / (LA)

■ Live Analysis

Real time display of elemental analysis results during

Features of Live Analysis
observation of a high-magnification SEM image. ・Always displays the X-ray spectrum.
・Display of the main constituent
With our Analytical series, seamless transition is made from high magnification SEM elements.
imaging to elemental analysis. The embedded EDS system shows a real time EDS ・Alert display of elements of interest
spectrum during image observation, making it easy to find elements of interest or
unexpected elements.

SEM observation screen

Analysis icons

Spectrum
Spectrum The X-ray spectrum from
the measurement area and
automatic qualitative analysis
Element results are always displayed.

Single-click to switch the screen

Specimen: Wood metal, Accelerating voltage: 15 kV, Magnification: ×3,000　 Single-click enables you to switch
High-vacuum mode, Backscattered electron composition image Toggle to EDS View between the SEM observation screen
and analysis detail display screen.
Element
The main constituent elements detected in the measurement area are displayed.
You can display an “Alert” by specifying an element.

■ Analysis Detail display screen

The Spectrum screen, Map screen and other screens are displayed automatically.

Spectral analysis screen Elemental map analysis screen

SEM image Periodic Table Superimposition

screen

Spectrum Map
Spectrum

Specimen: Wood metal

Toggle to SEM View Toggle to SEM View

7 | JSM-IT200 Series
Qualitative & quantitative analysis 002 003

SiKa

Select analysis areas directly in the SEM observation

screen. After spectral acquisition, the Quantitative OKa OKa
OKa 001
CuLa
Result tab automatically displays the quantification CuLa SiKa

results. CKa
CuLl AlKa
CKa
CuLl SiKa
003
CKa 002
001

Spectra and qualitative analysis result

Specimen: Chrysocolla
Accelerating voltage: 15 kV
Magnification: ×500
High-vacuum mode:
C coating,Backscattered
electron composition image
50 μm

Elemental map
Using the Whole/Area icon on SEM observation screen,
you can acquire elemental maps from the whole area or a
specified area.

● Net map / Quantitative map

The Net map separates spectral peaks at each pixel and
shows an elemental map with a reduced effect of overlapping
peaks. Compared to the Count map which unavoidably
reflects the peak intensity of other elements close to a
specified element, the Net map enables a real-time display of
an inherent intensity map even from a specimen containing
Backscattered electron composition image and elemental maps
many elements.
Specimen: Chrysocolla
The Quantitative map is also available, which compensates
for the Net map and displays the analysis results with the
quantification values.

● Comparison of Count map and Net map

Spectral peaks of Pb-Mα (2.342 keV) are close to Bi-Mα (2.419 keV).
Thus in the Count (intensity) map, it is difficult to separate Pb from Bi. Applying the Net map enables you to confirm the inherent Bi distribution.

BiMa

BiMb

PbMa
SnLa
BiMz SrLb
BiMr CdLa SnLb2

Peaks of Pb and Bi Pb intensity map Bi intensity map Bi net map

Specimen: Wood metal

JSM-IT200 Series | 8
 Easy Elemental Analysis

Elemental map　　　　 Line analysis

● Color-overlay display of an elemental map Line analysis performs elemental analysis along a line set on
The system allows you to overlay elemental maps on the SEM image. The X-ray intensity of the specified elements
the SEM image in real time. The area is displayed with a is plotted to show the change in concentrations across
composite color. the line. You can change elements to show during or after
completion of data acquisition.

Multi-color
overlay display

Specimen: Wood metal Line analysis result

■ Functions to improve analysis accuracy ■ SMILE VIEWTM Lab for analysis

Visual Peak ID (VID) Pop-up spectrum
This function enables you to confirm whether the constituent Since the stored map has spectral information, you can extract
elements are correctly identified in the qualitative analysis result. spectra from anywhere within the map data set.
A spectrum is reconstructed based on the X-ray intensity of the
elements identified.
SMILE VIEWTM Lab
・Re-specifies elements by spectrum, elemental map, line analysis, etc.
Probe tracking
・Multi-color overlay display of elemental maps.
With long data acquisitions, the system periodically compares the ・Changes the colors of elemental maps, line analysis results, etc.
SEM image at analysis start with the current image, so as to maintain
the same analysis area. This capability helps you to monitor any
change in a specimen or specimen drift during long acquisitions.

■ Other functions QBase (Qualitative analysis database) *1

Real-time filter Used to find a spectrum that coincides with or is close to a
spectrum in the database. Acquisition of spectra, based on standard
The system allows for image processing during a map acquisition
specimens, is required for creating the database. The QBase is very
to signal to noise ratio. This feature provides fast confirmation of the
effective for routine classification, for example identification of foreign
elemental distribution.
materials.
*QBase is an abbreviation of Quantitative Analysis Database.
Pinpoint Navi
Automatic serial analysis can be made by specifying multiple areas in PlayBack Analysis *1
advance. Pinpoint Navi detects small image shifts by probe tracking,
The PlayBack Analysis saves an image and elemental map being
for precise repositioning of the analysis area.
accumulated with each frame. This function can also replay the data
after the acquisition.
Relocating analysis areas
The stage position and magnification are linked with the analysis Automated Gunshot Residue (GSR) analysis *2
data. Return to any analysis area on the SEM image screen for
This function automatically analyzed specific particles (GSR) that
additional study.
originate from primers used in the manufacture of most firearms.

*1 QBase and PlayBack Analysis are the functions of Standard EDS.

*2 GSR is an option of the particle analysis software.

9 | JSM-IT200 Series
Measurement
Measurements are performed on the observation screen,
and their results (distance, angle, area, etc.) can be recorded
and saved on SEM images.

Specimen: Marshmallow

3D imaging
Optional software for creation of 3D image and analysis.
● 3D measurement image Option
Dedicated software for 3D measurement. A 3D image can
be created from two SEM images.
The topographic status of the specimen surface can be
measured.

● Anaglyph
Step-by-step guide to collecting images for creation
of an anaglyph image.

Section height map

Path length

Specimen: Memory device

JSM-IT200 Series | 10
 Seamless report generation

■ Integrated data management software SMILE VIEW™ Lab

■ Integrated data management software SMILE VIEW™ Lab

SMILE VIEW™ Lab is a fully integrated data management software which links the CCD image*1, SEM images, EDS analysis
results*2, and corresponding stage coordinates for fast report generation or recall of specimen position for further study.

SMILE VIEWTM Lab Data management screen Features of SMILE VIEW™ Lab
・Performs integrated management of CCD image*1 data,
SMILE VIEW™ Lab Data management screen allows you to easily
SEM image data and EDS analysis results*2.
handle all your data. Our data manager links the observation position, ・Allows for immediate understanding of data in each field.
observation & analysis results, and a low magnification image ・Enables data searching.
acquired by Holder Graphics or CCD image*1. You can review or ・Screen layout is easy to change.
reanalyze already-acquired data and export selected data to a report. ・Software for image processing and particle diameter
analysis built in.

Name of each field Data search is enabled from specimen name, Positions of each field are
is displayed. creation time, data type, etc. displayed on Holder Graphics
or CCD image*1.

Data is displayed in list form, which includes

analysis data, quantitative analysis result of
elemental map, spectra, etc., in the selected fields.
*1 To take a CCD image, SNS (option) is required.
*2 Applicable to (A) Analysis/(LA) Low Vacuum and Analysis versions.

11 | JSM-IT200 Series
Automatic layout function Patent applied for

The SEM image data is linked with its EDS data. The report is automatically laid out with all related data included.
If the data set is large, additional pages are allocated automatically. When you change the layout, all related data is updated with a
single click.

Select the data for report generation Based on the layout chosen, When you select another layout button,
and click “Add to the report”. the linked data is automatically included. only the layout is changed where the data is updated to the
new format.

User layout
You can create templates for your reports.

User layout

■ Offline analysis software Option

■ Offline analysis software

Improving productivity
Offline analysis software is available. You can process all your data offline and generate reports.
You can create quantitative maps and extract spectra (Pop-up Spectrum) from your map data sets.

JSM-IT200 Series | 12
 Various functions of the JSM-IT200 and their applications are presented.

Secondary electron image

Secondary electron image is used most often to observe the surface morphology
of a specimen.
Accelerating voltage
The following secondary electron images show carbon nanotubes at high 30 kV
accelerating voltage. The sharp high magnification image to the left (×100,000)
enables length measurement of each tube.

0.5 μm
Specimen: Carbon nanotubes
Accelerating voltage: 30 kV
Magnification (left): ×100,000
(right): ×30,000
High-vacuum mode, Secondary electron image

100 nm

Accelerating voltage
1 kV

This hollow fiber specimen has a complicated pore

structure. Executing CF scan mode at low voltage
allows for clear observation without the need to add a
This image shows a cross section of an insulator. conductive coating.

Specimen: Insulator 1 μm Specimen: Hollow fiber 1 μm

Accelerating voltage: 5 kV Accelerating voltage: 1.0 kV
Magnification: ×20,000 Magnification: ×10,000
High-vacuum mode, Secondary electron image High-vacuum mode, Secondary electron image

13 | JSM-IT200 Series
Backscattered electron image
Backscattered electron composition image shows A flat surface prepared with our CROSS SECTION
differences in composition (average atomic number) with POLISHER TM (CP) was observed by a backscattered
different intensity. The backscattered electron image electron composition image at low accelerating voltage.
enables confirmation of the distribution of lubricants on The channeling contrast of zinc-plated and iron (substrate)
the surface of a vitamin pill. was confirmed.

50 μm
Specimen: Vitamin pill (sugar portion) 10 μm Specimen: Hot dip galvanizing on iron
Accelerating voltage: 5 kV Accelerating voltage: 5 kV
Magnification: ×2,000 Magnification: ×500
High-vacuum mode, Backscattered electron composition image High-vacuum mode, Backscattered electron composition image

Low-vacuum (LV) mode

The JSM-IT200(LV)/(LA) comes with LV mode. The LV
mode neutralizes charging on the specimen surface by
introducing the air into the chamber, enabling observation
of a non-conductive specimen in its native state.
Another merit of the (LA) version is easy elemental
analysis without specimen pre-treatment.

50 μm

Specimen: Peel of banana 50 μm Specimen: Egg-shell membrane

Accelerating voltage: 5 kV Accelerating voltage: 10 kV, Magnification: ×500
Magnification: ×500 Low-vacuum mode
Low-vacuum mode, Low-vacuum secondary electron image* Top: Backscattered electron stereoscopic image
Bottom: Composite elemental map (Green: C, Blue: O, Red: Ca)
* To observe a low-vacuum secondary electron image,
Low Vacuum Secondary Electron Detector (option) is required.
JSM-IT200 Series | 14
 Low accelerating voltage
Observation at low accelerating voltage enables finer surface structures to be studied. Contaminants on the surface viewed with an optical
microscope are difficult to observe at an accelerating voltage of 15 kV. Lowering the voltage to 2 kV clearly visualizes the contaminants.

Magnify

Optical microscope image Accelerating voltage: 15 kV 5 μm Accelerating voltage: 2 kV 5 μm

Specimen: Micro SD
Magnification: ×3,000
High-vacuum mode, Secondary electron image

Montage: Automated large-area observation and analysis using Zeromag.

Montage is an effective function for analyzing materials over large areas (for foreign materials, ductile or brittle fracture, etc.).
With Zeromag, it is easy to set up one or more montage areas for imaging and analysis.
“Tilt Correction”, “Field Overlap” and “Autofocus Point Setting” functions are built in.

Magnify

Montage setup with Zeromag.

Montage is an effective function to acquire detailed information across a specimen area.

Approx. 3 mm

Montage result: 4 × 4　
(Left: Backscattered electron composition image, Right : Na map)
Approx. 4 mm
Specimen: Lapis lazuli
Accelerating voltage: 15 kV, Low-vacuum mode

15 | JSM-IT200 Series
Maintenance

Filament
Filaments for the JSM-IT200 are pre-centered and require no
centering by the operator.

Gun alignment
Fully automated alignment function is built in.

By simply inserting the filament into the Wehnelt and fixing it,
the filament is automatically aligned to the center axis.

SMILENAVI
The SMILENAVI, makes it easy to understand operation methods of SEM and EDS, as well as maintenance procedures. Moving
the cursor onto the explanation screen lets you know the icon related to observation. With the SMILENAVI, novice users can quickly
achieve the results.

● SMILENAVI screen

2. Tap『 Fast 』button.

● SEM operation screen

3. Set the lowest magnification.

Method to change magnification

Place the mouse cursor on Screen and change
the magnification by rotating the mouse wheel.

4. Adjust the brightness. (Click ACB )

Put the cursor on the SMILENAVI screen. Lets you know the icon related to observation in the operation screen.

JSM-IT200 Series | 16
 Technical DATA
JSM-IT200 Series Can be equipped in the following 4 configurations: (BU) Base Unit / (A) Analysis / (LV) Low Vacuum / (LA ) Low Vacuum & Analysis.

Main Specifications Main Options

Resolution　 3.0 nm (30 kV), 8.0 nm (3 kV) Backscattered Electron Detector (BED) *1
High vacuum mode 15.0 nm (1.0 kV)
Low Vacuum Secondary Electron Detector (LSED)
Low vacuum mode *1 4.0 nm (30 kV, BED)
Energy Dispersive X-Ray Spectrometer (EDS) *2
Direct magnification ×5 to 300,000
（Print size of 128 mm × 96 mm）
Motor Drive Stage (XYZ-3 axes, XYR-3 axes, 5-axes drive)

Display magnification ×14 to 839,724

Stage Navigation System (SNS)
(Display size of 358 mm × 269 mm） Chamber Scope (CS)
Electron gun W filament, Fully automatic gun alignment Operation Panel
Accelerating voltage 0.5 to 30 kV 3D Measurement Software
Probe current 1 pA to 0.3 μA *5
Table
LV pressure adjustment*1 10 to 100 Pa
Objective lens aperture 1-stage, with XY fine adjustment function
Automatic functions Filament adjustment, Gun alignment,
Focus /Stigmator /Brightness /Contrast
Maximum specimen size 150 mm dia. × 48 mm (H) Installation Requirements
Specimen stage XY-2 axes motor-drive eucentric stage
X: 80 mm, Y: 40 mm, Z: 5 to 48 mm Power Single-phase 100 V AC, 50/60 Hz, 1.5 kVA
Tilt: –10 to 90°, Rotation: 360° (supplied by 3-pin outlet with grounding terminal)
Montage function Built-in Voltage regulation: Within ± 10%
Holder Graphic display 127 mm dia. Grounding terminal: 100 Ω or less
range Installation room: Room temperature: 15 to 27 °C
Standard recipes Built-in (includes EDS condition*2) Humidity: 60% or less
Image mode Secondary electron image, REF image, Room dimensions: 2,500 mm × 2,000 mm × 1,800 mm or more
Composition image*1, Topographic image*1, Door width: 850 mm or more
Shadow image*1
Pixels for image acquisition 320 × 240　640 × 480　1,280 × 960
2,560 × 1,920　5,120 × 3,840 W(mm) D(mm) H(mm) Weight(kg）
OS Microsoft®Windows®10 64bit EOS column unit 630 840 1480 Approx. 260
Observation monitor 24-inch touch panel Rotary pump (RP): 1 530 230 320 Approx. 23
EDS functions *2
Refer to EDS specifications. EDS unit Approx. 5
*2

Measurement functions Built-in (distance between 2 points, between

parallel lines, angle, diameter,)
Data management SMILE VIEWTM Lab Installation Room Example
Report generation Output to Microsoft Word
® *3

　 Output to Microsoft®PowerPoint®*3
Language switch Operable on UI (Japanese/English) Outlet with grounding terminal
Vacuum system Fully automatic, TMP: 1　
RP: 1

*1 Standard in JSM-IT200 (LV) / (LA).

*2 Standard in JSM-IT200 (A) / (LA).
*3 Microsoft® 0ffice must be installed.
*4 The optional probe current compensation unit is required. Automatic
monitoring of the probe current is possible only when EDS is connected
to the microscope PC.
*5 When MP-30060 is used, probe current ranges from 1 pA to 1 μA.
*6 GSR is an option of the particle analysis software.

Entrance
850 mm or more
Unit: mm

17 | JSM-IT200 Series
EDS Applicable to two configurations: (A) Analysis and (LA ) Low Vacuum & Analysis.

Main Specifications
●：Standard　　　○：Option

Basic Standard
SEM integration Built into the SEM control software
Integrated management of observation & analysis data
Specifying analysis positions on the SEM operation screen ● ●
(direct analysis on UI for SEM)
Graphical display of analysis positions
Detector SDD type Refer to "Details of DrySDTM detectors"
Spectral analysis Qualitative analysis (peak identification, automatic qualitative analysis)
Visual Peak ID ● ●
Standard-less quantitative analysis (ZAF method)
Standard quantitative analysis (ZAF method) *4
PHI-RHO-Z (PRZ) method: quantitative correction method - ●
QBase (Qualitative analysis database)
Line analysis Line analysis (parallel & arbitrary direction) ● ●
Real-time net count map Elemental map
(map with multiple colors, monochrome, multiple-color superimposition)
Maximum pixel resolution: 4,096 × 3,072
Real-time pop-up spectrum
Deconvolution map (net count map, quantitative map) ● ●
Real-time net count map
Real-time filter
Line profile display
Probe tracking
Playback analysis - ●
Serial analysis Spectral analysis, line analysis, elemental map
Comprehensive analysis of already-analyzed data ● ●
(qualitative & quantitative analysis)
Montage Automatic montage (SEM image, elemental map)
● ●
Serial elemental mapping for multiple areas
Particle Analysis Software Particle analysis (auto / manual) & EDS analysis
Classification of particle analysis data
Graph display of statistical processed particle analysis data
○ ○
Large-area serial particle analysis & EDS analysis
Specifying the measurement area on Stage Navigation System
GSR Gun shot residue *6
Data management function
Report generation
SMILE VIEWTM Lab ● ●

Help function Help guide ● ●

Offline function Offline software for data analysis ○ ○

Details of DrySDTM detectors

Detection area Energy resolution Detectable elements

25 mm 2
130 eV or less Be to U

Specifications subject to change without notice.

Microsoft, Windows, PowerPoint and Microsoft Office are registered trademarks of Microsoft Corporation in USA and other countries.
Microsoft Word is a product name of Microsoft Corporation.
JSM-IT200 Series | 18
No. 1302J885C Printed in Japan, Kp