Unit – II

Types of MEMS

• Optical MEMS
• RF- MEMS
• Bio-MEMS
• Microfluidics
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 Optical MEMS
• Overview (MOEMS)
• Applications

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• Micro-opto-electromechanical systems (MOEMS)
or optical MEMS, are involving micromachining
structures in the micro to millimeter range
whose purposes are to manipulate light.
• It is not a special class of MEMS but in fact it is a
MEMS merged with Micro-optics which includes
sensing or manipulating optical signals on a micro
size scale using integrated mechanical, optical
and electrical systems.
• These devices are usually fabricated using micro-
optics and standard micromachining technologies
using materials like silicon, silicon dioxide, silicon
nitride and gallium arsenide.
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 If in the MEMS technology, optical component is
combined with mechanisms to allow motion with
electrical structures to provide actuation, then the
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 History of MOEMS
• During 1991-1993, Dr. M. Edward Motamedi, a former
Rockwell International innovator in the areas of
both microelectromechanical systems and micro-optics,
used internally the acronym of MOEMS for micro-opto-
electro-mechanical systems. This was to distinguish
between optical MEMS and MOEMS, where optical
MEMS could include bulk optics but MOEMS is truly
based on microtechnology.
• In 1993, Dr. Motamedi officially introduced MOEMS for
the first time, as the powerful combination of MEMS and
micro-optics

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 Today’s MOEMS devices include Optical switches,

waveguides, moving mirrors (digital micromirror

devices DMD), bistable mirrors, laser scanners, optical

shutters, dynamic micromirror displays, micro lens

arrays, microbolometers, micro optical microphone to

measure air pressure, bistable Fabry Perot resonator

for high accuracy measurement of gas concentration,

diffractive gratings etc…

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 MOEMS as microsensor

MOEMS as microactuator

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 3D- optical MEMS switch

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 Challenges of MOEMS:

• Controllability
• reliability
• Manufacturability
• Serviceability
• standardization

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 Fiber optic waveguides forms biosensors
having advantages like:

• Light weight
• Low cost
• Compatible with bio-systems

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 Micro lenses
• Microlens is a small lens, generally with a
diameter < than a mm and often in micro meters
• The small sizes of the lenses means that a simple
design can give good optical quality
• Single microlenses are used to couple light to
optical fiber
• While arrays of microlens are often use to
increase the light collection efficiency of charge
coupled devices (CCD) arrays

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 3D imaging display

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What is Bio-MEMS???

New Era in biomedical engineering started

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In this area, MEMS have the great potential in
(a) The Biomedical Instruments and Analysis.
(b) Implants and Drug Delivery.

Why Miniaturization of surgical and diagnostic

instruments?
(a) Cost reduction,
(b) Less intrusive surgical procedures,
(c) Health concerns,
(d) Reducing amount of test
sample needed, e.g. blood,
(e) Speed of diagnosis,
(f) Patient recovery time and,
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 MEMS Pressure Sensors

Micromachined needles

MEMS Inertial Sensors

mobility system

Microsurgical tools
Microfluidics for drug delivery

Other BioMEMS applications include

tissue engineering and microfluidics
for cell biology, proteomics, and MEMS Hearing-Aid Transducer
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genomics.
BIOSENSOR
Analytical device which utilize biological reaction of
biochemical molecule for detecting target analyte and
converts a biological response into a quantifiable and
processable signal

Pregnancy test

Glucose monitoring device (for diabetes patients)

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History of Biosensors
1916 First report on immobilization of proteins :
adsorption of invertase on activated charcoal
1922 First glass pH electrode
1956 Clark published his definitive paper on the oxygen electrode. Professor Leland C
1962 First description of a biosensor: an amperometric enzyme Clark Jnr 1918–2005
electrode
for glucose (Clark)
1975 First commercial biosensor (Yellow springs Instruments glucose
biosensor)
1975 First microbe based biosensor, First immunosensor
1976 First bedside artificial pancreas (Miles)
1998 Blood glucose biosensor launch by LifeScan FastTake
1998 Roche Diagnostics by Merger of Roche and Boehringer
mannheim
Current Quantom dots, nanoparicles, nanowire, nanotube

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 Characteristics of a Biosensor
1. LINEARITY: Linearity of the sensor should be high for the detection of
high substrate concentration.
2. SENSITIVITY: Value of the electrode response per substrate
concentration.
3. SELECTIVITY: Chemicals Interference must be minimized for obtaining the
correct result.
4.RESPONSE TIME : Time necessary for having 95% of the response.

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 TYPES OF BIOSENSORS
• Based on Type of Biological Recognition Element and Immobilization
Techniques
• Based on the Type of Transducers

Schematic of different parts of a biosensor including biological recognition elements, Sensors transducers, and detectors.

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Sensors 2015, 15, 30011–30031; doi:10.3390/s151229783
 SENSING TECHNIQUES

Sensors 2015, 15, 30011–30031; doi:10.3390/s151229783

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 MINIATURIZATION OF SENSOR TECHNOLOGY

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 MICROFLUIDICS

Microfluidics deals with the behaviour, precise control and manipulation of fluids that are
geometrically constrained to a small, typically sub-millimeter, scale.

Continuous flow

Droplet-Based

Digital
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