Scientific/Metrogy Instruments

Field Emission Electron Microscope

Ultra High Resolution FE-SEM

JSM-7610F
Scottky Field Emission Scanning Electron Microscope
for nano-science
An Invitation To JEOL's SEM
The JEM-7610F is an ultra-high resolution semi-in lens FE-SEM.
Observation of extremely fine structures as well as elemental
analysis at the micro-nano scale.

Features
Semi-in lens type OL
High spatial resolution (1 kV 1.3 nm, 15 kV 1 nm)

Energy filtering with next generation r-filter

Freely select between secondary electrons and backscattered electrons

Low angle BEI acquired through LABE detector

Select either channeling, Z-contrast or surface topography

In-lens Schottky Electron Gun

Large current necessary for analysis (200 nA 15 kV),
Long service life (3 year warranty for the emitter),
No loss of low kV resolution

Various attachments
The chamber is designed to accept a wide range of attachments, including EDS, WDS, EBSD
STEM, and CL

Semi-in Lens Objective Lens Structure

The semi-in lens objective lens creates a strong magnetic field around the specimen.
This allows ultra-high resolution.
Electron probe

Upper Electron Detector

Secondary /
Backscattered electrons
Lower Electron Detector

Objective lens magnetic field

Bias voltage Secondary electrons (Main component)

Sample / Backscattered electrons
(GB-mode)

1
 Ultra-High Magnification Observation

×500,000 ×1,000,000

10 nm 10 nm

Sample: Platinum Catalyst Nano Particles on Carbon 15 kV

2
Gentle Beam Mode (Beam Deceleration)

In Gentle Beam mode (GB mode), a voltage is applied to the Standard mode GB mode
specimen to reduce the landing voltage of the electrons just before
they strike the specimen, enabling high-resolution observation with Electron probe
accelerating voltages as low as 100 V.
Since the scattering region of the electron beam within the
specimen is small, it is easy to observe the micro structures on the OL (magnetic field)
surface, and the influence on specimens that are susceptible to heat
damage can be reduced. Non-conductive specimens can be easily Deceleration lens
observed with reduced charging. Secondary electrons
from the sample
Sample
The GB mode 1 kV resolution with the JSM-7610F is 1.3 nm,
exceeding that of the JSM-7600F (1.5 nm). Bias voltage

nn
nn Effect of GB Mode
GB mode improves resolution at low accelerating voltage.

Standard mode GB mode

3
Resolution (nm)

2
Standard mode

1 GB mode

0 1 2 3 4 5
50 nm Accelerating voltage (kV)

Sample: Evaporated gold on carbon, 0.7 kV

nn
nn Improved Low-Acceleration Resolution
Conventional JSM-7600F JSM-7610F

Enhanced
resolution

100 nm 100 nm

Sample: Evaporated gold on carbon, 0.1 kV Sample: Evaporated gold on carbon, 0.1 kV

3
 nn
nn GB Mode Imaging (All images are without any conductive coating)

100 nm 10 nm

Sample: Mesoporous silica SBA-15, GB 1.0 kV, Magnification: (Left) × 150,000, (Right) × 300,000

Sample courtesy of: Professor Viveka Alfredsson Department of Physical Chemistry, Lund University

100 nm 100 nm

Sample: Ta3N5 nanorod, GB 0.1 kV, Magnification: (Left) × 50,000, (Right) × 100,000

Sample courtesy of: Professor Kazunari Domen, Dr. Yanbo Li　Department of Chemical System Engineering, School of Engineering, the University of Tokyo　　

100 nm 10 nm

Sample: 3DOM Carbon, GB 0.3 kV, Magnification: ×100,000 Sample: Mesocarbon, GB 2 kV, Magnification: ×300,000
Sample courtesy of: Professor. Ferdi Schuth
Sample courtesy of: Professor Andreas Stein
Department of Heterogeneous Catalysis
Department of Chemistry, University of Minnesota
Max-Planck-lnstitut fur Kohlenforscung

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Energy Filtered Imaging With The New r-filter

nn
nn Next- generation r-filter Electron probe

The next-generation r-filter is a unique energy filter that combines

a secondary electron control electrode, a backscattered electron
control electrode and a filter electrode. When the specimen
Upper Electron Detector
surface is irradiated by the electron beam, electrons with various r-filter
energies are emitted from the surface. The new r-filter makes
it possible to selectively detect the secondary electrons and Secondary electrons/
Backscattered electrons Lower Electron Detector
backscattered electrons from the specimen while the electron
レンズ磁場　ーーーー→
beam is held at the center of the lens using a combination of
multiple electrostatic fields. Sample Secondary electrons (main component)
In comparison to the r-filter of the existing JSM-7600F systems, / Backscattered electrons

the next-generation r-filter has a 3 fold increase in signal. Next-generation r-filter features
. Optimized filter shape, with detector efficiency improved by a factor of 3
. Selectable detection of the electrons from the sample using energy filtering
. Easy operation

nn
nn Signal Detection With The New r-filter
Secondary Backscattered
electrons electrons
Number of electrons

Sample: White: Tin (Sn), Gray: Aluminum oxide Electron energy generated from sample

SB mode
Detects secondary and
backscattered electrons, Detects all electrons
it is a composite images
showing both surface
topology and composition

1 µm

SE mode
Detects secondary
electrons to observe real Secondary electrons +
surface topology images adjustable detection of
backscattered electrons

1 µm

BE mode
Backscattered electrons
Detects backscattered + adjustable detection of
electrons with
secondary electrons
composition contrast

1 µm

5
 nn
nn BSE Imaging Using The New r-filter
The optimization from the r-filter enables an improved signal, by up to a factor of 3 compared to the conventional JSM-7600F.

Conventional JSM-7600F JSM-7610F

Improved
S/N

1 µm 1 µm

Sample: Li-ion battery cathode material, 1.0 kV, Signal mode: BE100

nn
nn Magnified Image Of Mitochondria
Two types of structures of the cristae typically observed
with TEM can be clearly seen.

Sample: Section of rat liver, uranium and lead stain,

5.0 kV, Signal mode: BE60, 100 nm
Magnification: × 100,000

6
LABE Detector

The LABE (Low Angle Backscatter Electron) detector is capable

of detecting very low energy and very low angle backscattered
electrons that were previously not able to be detected.
Detailed topological information of the specimen surface can be
obtained at extremely low accelerating voltages, and compositional
LABE Detector
information for the specimen can be observed with good resolution
at high accelerating voltages.

Sample

Bias voltage

nn
nn LABE Detector: Low Angle Backscattered Electron Images

1 µm 1 µm

Sample: Ceramic with 2 phase metal eutectic, GB 0.2 kV Sample: Ceramic with 2 phase metal eutectic, 5.0 kV

Thin-film crystal grain channeling contrast can be observed using backscattered electrons with an extremely low accelerating
voltage

1 µm 100 nm

Sample: DVD-RAM, GB 0.8 kV, Magnification: × 20,000 Sample: DVD-RAM, GB 0.8 kV, Magnification:× 50,000

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 High Power Optics

A unique electron optical system allows a variety of analyses

In-lens Schottky
and observation at high magnification. The in-lens Schottky field field emission electron gun
emission electron gun*, which can deliver a probe current 10
times that of the conventional Schottky field emission electron
gun (FEG), along with the aperture-angle control lens (ACL)*
that can maintain a small probe diameter with the appopriate
Condenser lens
convergence angle even with the increased probe current makes
it possible to use probe currents of 200 nA or more. The high-
power optics provide all the performance you need to conduct
everything from high-magnification viewing to EDS and EBSD
Objective lens
analyses. aperture
Aperture-Angle Control Lens (ACL)

*JEOL Patent
Patent number　3351647 Semi-in Lens Objective Lens
Patent number　4146103

nn
nn In-lens Schottky Electron Gun
The in-lens Schottky field emission electron gun combines
the electron gun with a low-aberration condenser lens to
enable efficient collection of the electrons generated from the
electron gun.

In-lens Schottky FEG Conventional Schottky FEG

nn
nn Aperture Angle Control Lens (ACL) JSM-7610F optics Conventional optics

The Aperture-Angle Control Lens (ACL) is positioned above the

objective lens to perform automatic optimization of the
Condenser lens
objective lens aperture angle across the entire probe current
range. This makes it possible to obtain a smaller probe
diameter than is possible with conventional systems, even
when the probe current is large. Objective lens
aperture

Aperture-Angle Control Lens

(ACL)

Objective
lens

Sample
With a large probe current, a small probe With a large probe current, the
can be obtained using the optimized angle probe diameter becomes large
of the ACL

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High Power Optics

nn
nn Small Probe Diameter, Even With Large Probe Current

100 nm

Probe current: 50 pA Probe current: 500 pA Probe current: 100 nA

Specimen: Evaporated gold on carbon, 15 kV

nn
nn Highly Stable Probe Current for extended analysis times
The in-lens Schottky field emission electron gun delivers a stable probe current.

Stability of specimen probe current

Probe current (nA)

± 1.0 %/h

Time (h)

nn
nn Probe Current Detector (PCD) [ During observation Probe current
/ analysis measurement
The probe current detector is inserted directly below the
objective lens, enabling measurement of the probe current
at any time during analysis without the need to move the
sample.
Objective lens
aperture
Probe current
detector

[ Optional

9
 Various Attachments

nn
nn Energy Dispersive X-ray Spectrometer (EDS)
The High Power Optics make it possible to effectively take advantage of the features of the EDS (SDD: Silicon Drift Detector)
detector that is difficult to saturate even with large probe currents. By using a low accelerating voltage and a large probe current,
good quality mappings can be obtained in a very short period of time. The images below show the analysis of an extremely thin
graphene and graphite layer on a Ni substrate obtained in 2 minutes.

CK Ni L

10 µm

Sample: Graphene / Graphite, 2.0 kV, Probe current: 10 nA, EDS detector: 30 mm2, Measurement time: 120 sec.

Even using a basic type SSD 10 mm2 detector it is possible to analyze the cross section of a multi-layer film of about 100 nm in just
30 seconds.

Al K Tl K

1 µm 1 µm 1 µm

Sample: Multi-layer film section on cemented carbide (Cross-sectioned using CP: Cross section polisher) 8.0 kV,
Probe current: 38 nA, EDS detector: 10 mm2, Measurement time: 30 sec.

Good S/N ratio maps are acquired quickly NK OK

even on thin specimens with a low X-Ray
yield

100 nm 100 nm

Si K WK

100 nm

100 nm 100 nm

Sample: DRAM (Thin film processing with IS: Ion Slicer) 30.0 kV, Probe current: 2 nA, Measurement time: 10 minutes

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Various Attachments

nn
nn Wavelength Dispersive X-ray Spectrometer (WDS)
Because the High Power Optics provide a large probe current with a small probe diameter, it is possible to take full advantage of the
features of WDS. Using WDS enables confirmation of trace concentration differences or elemental overlaps in a specimen, which
cannot be identified with EDS.
BEI EDS WDS

CK CK

5 µm 5 µm 5 µm

Sample: Rubber (Cross-sectioned using CP: Cross section polisher) 5 kV Measurement time 60 minutes

nn
nn Scanning Transmission Electron Detector (STEM)
With STEM, the electrons that pass through a nano powder or thin film specimen are detected. The data below is an example of
the observation of carbon nanotubes using an accelerating voltage of 30 kV. The catalyst particles in the carbon nanotubes are
just a few nm and can be viewed
with high resolution.

10 nm 10 nm

Magnification: ×300,000 Magnification: ×1,000,000

nn
nn Cathodoluminescence Detector (CL)
CL is a phenomenon of visible light being generated when a specimen is exposed to an electron beam. The light that is generated
from the specimen is collected using a focusing mirror and detected. The images below are a secondary electron image and a CL
image obtained with a diffraction lattice of diamond at 1 kV. Observing the CL image with a low acceleration voltage reveals
defects in the diamond surface with good resolution.

Cathodoluminescence（CL） SE image CL image 1 kV

Focusing
mirror Beam parallel to the detector

Sample

10 µm

11
 nn
nn Electron Backscatter Diffraction (EBSD)
EBSD, electron backscattered diffraction is used to analyze crystallographic orientation, such as the phase distribution orientation
disatribution and measure strain of a crystalline specimen. With the conventional semi-in-lens FE-SEM, EBSD measurements have
been difficult due to the influence of the magnetic field leakage flux (image below: No EBSD Liner). The EBSD Liner that is
incorporated in the JSM-7610F, reduces EBSD pattern distortions, allowing EBSD measurements to be made with high resolution
(image below: With EBSD Liner). It is also possible to make measurements are analyze magnetic specimens.

No EBSD Liner With EBSD Liner

Sample: Si(100), 20 kV

nn
nn Specimen Chamber Optimized for Analysis
The specimen chamber is designed to permit installation of the various detectors in an optimal layout, including the secondary
electron detector, backscattered electron detector, EDS, EBSD, WDS, STEM, and cathodoluminescence detector.
The secondary electron detector, EDS and EBSD are positioned to enable them to be seen at the same time on a tilted specimen,
with the EBSD port perpendicular to the eucentric tilt on the stage.

EDS
LNT Reserved
WDS/EDS
Reserved
RBEI/CL
LABE EBSD Chamber camera

STEM STEM

A variety of accessories can be installed simultaneously

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Eucentric Specimen Stage

The eucentric specimen stage makes it possible to rotate, tilt and shift the specimen in the XY directions with minimal focus
deviation. All 5 of the specimen movement axes are motor driven. The stage is equipped with useful functions for easy observation
and analysis, including stepped movement, field by field movement click-centering, mouse drag, and eucentric rotation.

nn
nn Stage Map nn
nn Navigator
A graphic display (both side Click on a destination position
view and top down view) of on any of the four displayed
the specimen chamber. The SEM images to move the
specimen can be moved using specimen stage to that location.
the graphic display.

nn
nn Trackball
The specimen can be shifted in the X/Y directions using the
trackball. Operating the ring allows rotation or Z direction
movements

Specimen stage panel and trackball

nn
nn One-action Specimen Exchange
By performing specimen exchange using the specimen exchange chamber, a clean vacuum is always be maintained in the specimen
chamber column lenses and interior of the electron gun. This helps to maintain performance and supports high-resolution analysis
over long periods of time. Specimen exchange is simple using a unique one-action exchange mechanism to ensure secure specimen
exchange. Filling the specimen exchange chamber with dry nitrogen also helps to minimize contamination.

　Specimen stage
Type I: X = 70 mm、Y = 50 mm Type II: X = 110 mm、Y = 80 mm Type III: X = 140 mm、Y = 80 mm
Specimen-exchange chamber
View entire surface of View entire surface of
Type I: maximum 150 mm −
a 86 mm diameter specimen a 150 mm diameter specimen

View entire surface of View entire surface of

TypeII: maximum 100 mm × 40 mm Height −
a 86 mm diameter specimen a 100 mm diameter specimen

View entire surface of View entire surface of View entire surface of

Auto exchange chamber: maximum 200 mm
a 86 mm diameter specimen a 100 mm diameter specimen a 200 mm diameter specimen

The observable ranges in the table are possible with a combination of X-Y movement and rotation

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 nn
nn Stage Navigation System [

Using the CCD Camera mounted on top of the specimen

exchange chamber enables color images to be acquired of the
CCD Camera
specimen, which can be used to select the region of interest for
point and shoot navigation.

nn
nn Chamber Camera [
The camera allows viewing the interior of the specimen
chamber. This is convenient for confirming the objective lens
position, in cases of short WD, high tilt or where specimens
with a complex shape are observed.

nn
nn Operation Panel
All operations of the JSM-7610 can be performed using the
mouse, but there is an operation panel provided to allow
operations using physical knobs and buttons, providing
control for operations like adjustment of magnification and
focus. You can freely combine the mouse and operation
panel operations.

[ Optional

14
Operation screens facilitate
easy access to many functions
The operation screens are packed with performance. The icons are arranged in a clear, rational layout to facilitate use of the
necessary functions. Files containing the standard observation condition settings for typical specimen types are provided,
simplifying the initial observation and analysis of specimens. Users can also save their own optimized settings to reuse as desired.

Observation Full screen display of the live image

4 image display with live signal mixing 4 live image display

nn
nn SEM Status Monitor
Displays an easy to understand operating status of the SEM
including the specimen holder, electron probe, and detector
insertion, vacuum level of chamber and airlock, specimen height
offset and specimen exchange status.

15
 nn
nn Report
The image view / report editing software is SMileViewTM offers a wealth of the functions needs to create and edit reports . Reports
can be made simply by displaying a table of thumbnails of saved images, selecting images, and then arranging and pasting
them into the document. The size and layout of the images can be adjusted freely, with the micron bar adjusted automatically to
correspond to the specified image size. Image brightness and contrast can also be adjusted, including a function to adjust all the
images to the same tone. All the functions needed to efficiently create professional reports are provided.

SMileViewTM

SMileViewTM layout
(with measurement result).

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Specifications

Secondary electron 1.0 nm (Accelerating voltage 15 kV)

image resolutiaon
1.3 nm (Accelerating voltage 1 kV GB mode)

During analysis 3.0 nm (Accelerating voltage 15 kV, WD 8 mm, Probe current 5 nA)
Magnification × 25 to × 19,000 (LM mode)
× 130 to × 1,000,000 (SEM mode)
Accelerating voltage 0.1 to 30 kV
Probe current A few pA M 200 nA
Electron Gun In-lens Schottky field emission electron gun
Lens system Condenser lens (CL)
Aperture-angle control lens (ACL)

Semi-in lens objective lens (OL)

Specimen stage 5-axis motor drive Specimen stage
Specimen movement Specimen stage
Standard Optional Optional

type I A2 type II type III

X: 70 mm X: 110 mm X: 140 mm

Y: 50 mm Y: 80 mm Y: 80 mm

Z: 1.0 to 40 mm Z: 1.0 to 40 mm Z: 1.0 to 40 mm

Tilt: -5 to +70° Tilt: -5 to +70° Tilt: -5 to +70°

Rotation: 360° Rotation: 360° Rotation: 360°
Specimen holders 12.5 mm diameter × 10 mm thick, 32 mm diameter × 20 mm thick
Specimen exchange One-action exchange mechanism
Electron detector system Upper detector, r-filter, Built-in,L ower detector
Automatic Functions Focus, Stigmator, Brightness, Contrast
Image observation LCD Screen size: 23-inch wide

Maximum resolution: 1280 × 1024 pixels

SEM Control System PC: IBM PC/AT compatible computer

OS: Windows7 Professional*

Scan and display modes Full-frame scan

Real magnification
Selected- area scan

Two-image display (with different magnifications, different image modes)

Two-image wide display
Four-image display (four-signal live display)

Addition image (4 images + addition image)

Scale
Evacuation System Gun chamber, first and second intermediate chambers: Ultra high-vacuum dry evacuation system using ion pumps
Specimen chamber: Dry evacuation system using a turbo-molecular pump (TMP)
Ultimate pressure Gun chamber: Order of 10-7 Pa (for standard configuration)

Specimen chamber: Order of 10-4 Pa (for standard configuration)

1
Principal options * Retractable Back scattered electron detector(RBEI),
Low angle Back scattered electron detector(LABE),

Scanning Transmission Electron Detector(STEM),

Stage navigation system, Chamber camera,

Ion cleaning device, Energy dispersive X-ray spectrometer (EDS),

Wavelength dispersive X-ray spectrometer (WDS),

Cathodoluminescence Detector(CL), Variety of specimen holders

17
 Installation Requirements

Power Single phase 200 V, 50/60 Hz, 4 kVA maximum,

During normal use: approximately 1.2 kVA

In energy-saving mode: (Evacuation system on: approximately 0.8 kVA Evacuation system off: approximately 0.4 kVA)
Voltage fluctuation tolerance: within ±10 %

Grounding terminal: 100 Ω or less ×1

Cooling water Faucet: 14 mm outside diameter ×1 or ISO 7/1 Rc1/4 ×1

Flow rate: 0.3 to 0.5 L/min

Pressure: 0.05 to 0.25 MPa (gauge pressure)

Temperature: 20 ± 5 °C
Drain 25 mm inside diameter or ISO 7/1 Rc 1/4 ×1 (A cooling water circulator is recommended)
Dry nitrogen gas ISO 7/1 Rc1/4 (Dry nitrogen gas must be provided by the customer)

Pressure 0.45 to 0.55 MPa (gauge pressure)

Room Temperature: 20 °C ± 5 °C

Humidity: 60 % or less
Stray varying magnetic field: 0.3 μT(P-P) or less (50/60 Hz sine wave, WD 15 mm, accelerating voltage 30 kV)*1

Floor vibration: 3 m (p-p) or less at sine waves of 5 Hz or higher frequency *2

Acoustic noise: 70 dB or less with flat characteristics *2

Floor space: 3,000 mm × 2,800 mm or more　

Floor height: 2,300 mm or more

Door size: 1,000*3 mm (W) × 2,000 mm (H) or more

Installation layout

3,000 or more
N2 gas

Drain 455
Faucet
180

RP
Switch board
2,800 or more

PC
1,125

Display
1,000

(350) 790 1,200

Entrance
1,000 or wider 0 500 1000

Unit: mm

* Microsoft Windows is registered trademark of Microsoft Corporation in United States and

other countries.
*1 Standard vs options vary with geographic location.
*2 If the actual conditions do not meet these requirements, we will check the room before
installation and consult with the customer about the maximum observation magnification.
*3 If the door width is 900 mm, please consult us.

[ Specifications subject to change without notice.

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No, 1301H453C Printed in Japan, Kp