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    Jigneshkumar Patel
    This document outlines an Introduction to MEMS course offered at Gujarat Technological University. The course provides an overview of microelectromechanical systems design and fabrication techniques. Students will learn about materials, transducers, actuators, simulation tools, packaging, and applications in biomedical, optical and storage devices. Assessment includes exams, practicals and projects involving the design and simulation of MEMS devices like sensors, actuators and processing techniques. The course aims to equip students with skills in MEMS design, fabrication processes and their applications.

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    Msme

    Uploaded by

    Jigneshkumar Patel
    47 views3 pages
    This document outlines an Introduction to MEMS course offered at Gujarat Technological University. The course provides an overview of microelectromechanical systems design and fabrication techniques. Students will learn about materials, transducers, actuators, simulation tools, packaging, and applications in biomedical, optical and storage devices. Assessment includes exams, practicals and projects involving the design and simulation of MEMS devices like sensors, actuators and processing techniques. The course aims to equip students with skills in MEMS design, fabrication processes and their applications.

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    3171107_MSME

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    This document outlines an Introduction to MEMS course offered at Gujarat Technological University. The course provides an overview of microelectromechanical systems design and fabrication techniques. Students will learn about materials, transducers, actuators, simulation tools, packaging, and applications in biomedical, optical and storage devices. Assessment includes exams, practicals and projects involving the design and simulation of MEMS devices like sensors, actuators and processing techniques. The course aims to equip students with skills in MEMS design, fabrication processes and their applications.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    47 views3 pages

    Msme

    Uploaded by

    Jigneshkumar Patel
    This document outlines an Introduction to MEMS course offered at Gujarat Technological University. The course provides an overview of microelectromechanical systems design and fabrication techniques. Students will learn about materials, transducers, actuators, simulation tools, packaging, and applications in biomedical, optical and storage devices. Assessment includes exams, practicals and projects involving the design and simulation of MEMS devices like sensors, actuators and processing techniques. The course aims to equip students with skills in MEMS design, fabrication processes and their applications.

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    © All Rights Reserved
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    of 3

    GUJARAT TECHNOLOGICAL UNIVERSITY

    Bachelor of Engineering
    Subject Code: 3171107
    SEMESTER: VII
    Subject name: Introduction to MEMS

    Type of course:

    Prerequisite: Knowledge of basic Electronics and Micromechanical structures.

    Rationale: Micro-electro-mechanical system designing is one of the emerging fields. This course extends
    the applicability of different materials, fabrication techniques, and simulation design tools used in
    microelectronic circuits to develop new types of microengineered electro mechanical systems.

    Teaching and Examination Scheme:


    Teaching Scheme Credits Examination Marks
    Total
    Theory Marks Practical Marks
    L T P C Marks
    ESE (E) PA (M) ESE (V) PA (I)
    2 0 2 3 70 30 30 20 150

    Contents:
    Sr. No. Hrs.
    Contents

    1 Introduction: MEMS, Transducers, and actuators 2


    2 Materials and Fabrication Techniques: Materials, Substrates, Additive Materials,
    Fabrication Techniques, Deposition, Lithography Etching, Surface Micromachining,
    Wafer Bonding, Thick-Film Screen Printing,, Electroplating LIGA , Porous Silicon 7
    ,Electrochemical Etch Stop ,Focused Ion Beam Etching and Deposition
    3 MEMS Simulation and Design Tools: Simulation and Design Tools; Behavioral
    Modeling Simulation Tools; Static Analysis, Linearized Analysis, and Transient 4
    Analysis of MEMS devices.
    4 Mechanical Sensor Packaging: Standard IC Packages, Ceramic Packages, Plastic
    Packages, Metal Packages, Packaging Processes, Electrical Interconnects, Methods
    of Die Attachment, Sealing Techniques MEMS Mechanical Sensor Packaging, 7
    Protection of the Sensor from Environmental Effects Protecting the Environment from
    the Sensor, Mechanical Isolation of Sensor Chips
    5 Mechanical Transduction Techniques: Piezoresistivity , Piezoelectricity , Capacitive
    Techniques , Optical Techniques , Intensity , Phase Wavelength ,Spatial Position ,
    Frequency , Polarization ,Resonant Techniques , Vibration Excitation and Detection 8
    Mechanisms, Resonator Design Characteristics ,Actuation Techniques , Electrostatic
    Piezoelectric, Thermal , Magnetic ,Smart Sensors
    6 MEMS applications: MEMS as Secondary Storage in Computer System, Optical 2
    Applications, Biomedical Application

    Page 1 of 3
    w.e.f. AY 2018-19
    GUJARAT TECHNOLOGICAL UNIVERSITY
    Bachelor of Engineering
    Subject Code: 3171107
    Reference Books:

    1. MEMS Mechanical Sensors, by Stephen Beeby, Graham Ensell, Michael Kraft Neil White,
    Publication: Artech House, Inc.,
    2. MEMS and MOEMS Technology and Application, by P Rai Choudhury, PHI Publication.
    3. Stephen D. Senturia, "Microsystem Design", Kluwer Academic Publishers, 1st Ed., 2001.
    4. Marc Madou, "Fundamentals of Microfabrication" , CRC Press, 1st Ed., 1997.
    5. Gregory Kovacs, "Micromachined Transducers Sourcebook", WCB McGraw-Hill, Boston, 1 st
    Ed., 1998.
    6. M. H. Bao, "Micromechanical Transducers: Pressure sensors, accelerometers, and gyroscopes" by
    Elsevier, New York, 1st Ed., 2000.
    7. Julian W. Gardner, "Microsensors — Principles and Applications", John Wiley and Sons, inc., NY,
    1st Ed., 1994.
    8. Maluf N., "An Introduction to Micro electromechanical Systems Engineering", Norwood, MA:
    Artech House, 2000.
    9. Julian W. Gardner, "Micro sensors - Principles and Applications", John Wiley & Sons, Inc.1997.
    10. Current literature from journals and magazines.

    Course Outcome:

    Course Outcomes: After completion of this course students will be able to…

    Sr. CO statement Marks %


    No. weightage

    CO-1 Understand the basics of Micro-Electro Mechanical Systems and role of


    Transducers and Actuators.
    CO-2 Recognize different materials used in fabrication process and understand
    various fabrication techniques to implement MEMS.
    CO-3 Imitate the behavior of different MEMS using various simulation tools

    CO-4 Understand the techniques and structures that can be used to package
    micromachined mechanical sensors.
    CO-5 Apply knowledge of MEMS fabrication and process techniques to develop
    various applications in the field of Biomedical, Optical and Computer storage
    system

    List of Experiments:

    1. Design and simulation of microcantilever beam with different load conditions and finding its
    mechanical response.
    2. Design and simulation of Piezoresistive MEMS devices with square and round diaphragm.
    3. Design and simulation of capacitive MEMS devices under acceleration for sensing different
    signals.
    4. Design and simulation of piezoelectric accelerometer under longitudinal load.

    Page 2 of 3
    w.e.f. AY 2018-19
    GUJARAT TECHNOLOGICAL UNIVERSITY
    Bachelor of Engineering
    Subject Code: 3171107
    5. Design and simulation of thin film based Piezoelectric.
    6. Design and simulation of cantilever based bimetallic thermal actuator.
    7. Design and simulation of thermal bimorph actuator.
    8. Design and simulation of Electrostatic parallel plate actuator for normal motion.
    9. Design and simulation of Torsion bar actuator for torsional motion.
    10. Design and simulation of Longitudinal and transverse piezoelectric actuator.
    11. Process simulation experimentation of oxidation and diffusion techniques.
    12. Process simulation experimentation of mask making and Pattern transferring using Lithography.

    Laboratory tool:

    1 MEMSolver free simulation tool


    2 SUGAR simulation tool for MEMS devices

    Page 3 of 3
    w.e.f. AY 2018-19

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