The document discusses AAF Flanders MEGAcel II ePTFE filters which are designed to meet cleanroom filtration requirements. The filters use ePTFE media which provides extremely high filtration efficiencies, lower pressure drops, and negligible offgassing. The ePTFE media and pleated pack design allow for maximum efficiency with the lowest pressure drop.
The document discusses AAF Flanders MEGAcel II ePTFE filters which are designed to meet cleanroom filtration requirements. The filters use ePTFE media which provides extremely high filtration efficiencies, lower pressure drops, and negligible offgassing. The ePTFE media and pleated pack design allow for maximum efficiency with the lowest pressure drop.
The document discusses AAF Flanders MEGAcel II ePTFE filters which are designed to meet cleanroom filtration requirements. The filters use ePTFE media which provides extremely high filtration efficiencies, lower pressure drops, and negligible offgassing. The ePTFE media and pleated pack design allow for maximum efficiency with the lowest pressure drop.
The document discusses AAF Flanders MEGAcel II ePTFE filters which are designed to meet cleanroom filtration requirements. The filters use ePTFE media which provides extremely high filtration efficiencies, lower pressure drops, and negligible offgassing. The ePTFE media and pleated pack design allow for maximum efficiency with the lowest pressure drop.
• AAF Flanders ePTFE media The AAF Flanders MEGAcel II
combines ultra-high efficiency with ePTFE line of filters is designed to negligible pressure drop meet semiconductor industry cleanroom filtration requirements • Lower energy consumption adds for fabs, modular, mini, and up to savings of more than 30% microenvironments, as stated in the I300I specifications. Manufactured with high performance ePTFE media, MEGAcel filters provide • High resistance to corrosive extremely high particulate filtration efficiencies, lower pressure drops, environments (acids, alkalis, and and negligible offgassing. organic substances)
• Negligible offgassing properties
State-of-the-Art Design (boron, sodium, potassium, silicon) Designed to combine maximum efficiency with lowest pressure drop, the MEGAcel II ePTFE media pack is employed in a variety of design and size • High tensile strength media, more configurations, making it suitable for numerous application requirements. resistant to rough handling in The ePTFE media pack is produced to ensure precision in pleat spacing and transportation and installation height, thereby reducing “dead spots” and promoting consistent and uniform air distribution throughout the filter. The pleat design allows the air to move • Meets I300I specifications and throughout the entire depth of the filter, utilizing the full cleaning capability of is UL 900 and ULC S111 Classified the media.
• Lower profile, reducing space Developed by AAF Flanders Engineers:
and weight ePTFE Media Groundbreaking ePTFE media was engineered by AAF Flanders’ research and • Proven technology. Used in design teams. Media production, testing, and packaging are all performed in semiconductor and microelectronic AAF Flanders’ (ISO 7) ultra-modern controlled environment, eliminating the applications for over 20 years potential for contamination of the filter during manufacturing. MEGAcel Filters ®
Energy Conservation The ePTFE pleated pack resistance is a minimum of 30% lower than conventional micro fiberglass media, a factor contributing to greatly reducing fan energy consumption. AAF Flanders’ pleating method, using intermittent polyamide separators, allows more open media area and optimizes pleat pack resistance.
Perfect Filter Media
MEGAcel ® II frames are available with gel seal frame, gasket seal frame, and Compared with microglass media, ePTFE media provides knife-edge frame (shown from left to right). superior benefits, including inert chemical properties, more uniform fiber distribution, and smaller fiber diameters and pore size, which reduces resistance with higher filtration Sturdy Construction performance to achieve substantial energy savings. Tooling environments often produce harmful and corrosive by-products. The MEGAcel filter is extremely resistant to these harsh conditions and also offers superior efficiency and pressure drop characteristics. Manufactured with high quality ePTFE media, the MEGAcel filter is water resistant and meets the requirements of UL 900 and ULC S111. The media pack is permanently attached to an anodized extruded aluminum frame with a low offgassing urethane adhesive.
Figure A (10,000x) Figure B (10,000x)
Photographed at 10,000x magnification, these images illustrate the finer fiber
diameter and more consistent composition of AAF Flanders’ ePTFE media (Figure A), when compared with microglass media (Figure B).
MEGAcel ® II filters are designed to meet the most demanding high efficiency filtration applications.
2 Chemical Advantages of AAF Flanders’ State-of-the-Art Testing ePTFE Media AAF Flanders has established an air filtration testing Negligible Offgassing methodology that is among the most comprehensive and ePTFE media has smaller pore size and fiber diameter than accurate in the industry. Testing is essential in documenting filter microfiberglass. These characteristics significantly reduce efficiency and assisting in research and development of filtration the levels of offgassing impurities typical to microglass (which products. AAF Flanders’ testing facilities meet the highest include boron, sodium, potassium, and silicon) to almost zero. standards for quality control. High Corrosion Resistance Every MEGAcel II ePTFE filter is tested and certified, using ePTFE media has been proven to be resistant in highly procedures tailored to your specifications, to meet your corrosive environments, including alkaline, acid, and organic performance requirements prior to shipping. substances. All of these environments can be found in semiconductor manufacturing processes. Part No.:905 -253-282
®II ePTFE 99.99995% Superior Water Resistance Efficiency:
MEGAcel : 1265135 SERIAL NO. 7/21/2021 Air Flow 192 CFM Date Tested: ePTFE media provides superior water resistance in comparison NELIOR Filt ration ncy Filter with etration: .00005% /8+2-3/4 Size: 14+23-5 146327 : Test Flow: Resistance: 0.38 IN. W.G .
High Efficie Inspector No. 1265135 n
Pen : Passed Sca with microglass and low boron microglass media. Efficiency: Resistance: 99.99995% . Test Flow: 0.38 IN. W.G 89H4U3T2BA) -253-282 (29F 192 CFM
Passed Sca n SERIAL NO. AIR FILTER UNIT ONLY: AS TO FLAMM ABILITY
Part No. : 905 239A
AAF-2003 lacements Call: 1-888- To Order Rep
Ongoing Quality Control
Process control starts with sample flat sheets taken from each roll of media, tested to verify efficiency and pressure drop. The media is carefully pleated and assembled in the cell side designed for each specific application. The filter is then rigorously tested and certified to meet performance requirements. Figure C (5,000x) The filter is inspected for dimensional accuracy, automatically scanned by computer controlled scanning equipment for pinhole leaks, and tested for filtration efficiency and pressure drop. Every filter is labeled, identifying product code numbers, dimensions, a serial number, tested filter efficiency, and filter resistance at the rated airflow. Rigorous testing ensures customers receive products of the highest quality and performance to meet their stringent requirements, while reducing operating costs and providing the highest energy savings.
Figure D (5,000x)
Examining the structure under the microscope
clearly shows the broken glass fibers at the pleat edge (Figure C), while the fold of the ePTFE media (Figure D) is intact.
3 MEGAcel ll ePTFE Filters ®
Operating Data High Efficiency Performance Lowest Possible Pressure Drop The MEGAcel filter provides efficiency and performance far Pressure drop is measured using a manometer as the test filter superior to the competition. AAF Flanders is first in providing is subjected to a metered air volume. Testing on a volumetric filters that meet rigorous I300I specifications for the basis is specified in the Institute of Environmental Sciences manufacturing of 300 mm wafers. and Technology IEST-RP-CC007 recommended practice on At a peak airflow of 100 FPM, Most Penetrating Particle Size ULPA filters. (MPPS) efficiency is superior to the stringent requirements of AAF Flanders calculates the total square footage of usable 99.99995% efficiency for U16 ULPA filters. media pack area (outside dimensions of filter minus the frame The combination of advanced levels of efficiency and the thickness and adhesive) and multiplies this number by 100 lowest possible pressure drop makes MEGAcel a simple FPM to determine an accurate volumetric test flow (this value choice for use in 450 mm, 300 mm, or 200 mm wafer is approximately 720 CFM for a nominal 24" x 48" filter). This production. method simulates actual cleanroom airflow conditions, ensuring a true measurement of pressure drop.
Penetration vs. Particle Size Typical Data (U16) MEGAcel® II ePTFE U15/U16/U17 Initial Resistance vs. Filter Face Velocity 0.001 Efficiency .55 99.9995% 0.6 U17 0.0001 0.5 U16 Initial Resistance (in. w.g.)
