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This document contains a cleanroom inspection report listing areas, sectors, bays, rooms, and associated systems for a West Fab cleanroom. It includes sign-off forms for mechanical, electrical, and architectural systems by area.

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patrick
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40 views9 pages

Sign Off

This document contains a cleanroom inspection report listing areas, sectors, bays, rooms, and associated systems for a West Fab cleanroom. It includes sign-off forms for mechanical, electrical, and architectural systems by area.

Uploaded by

patrick
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as XLS, PDF, TXT or read online on Scribd
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AREA SECTOR BAY ROOM

West Fab D A
West Fab D B
West Fab D C
West Fab D D
West Fab D Support Room
West Fab D Support Room
West Fab D Support Room
West Fab D Support Room
West Fab D Support Room
West Fab D Support Room
West Fab D Support Room
Support C
Connectivity Room
B2C02
Support C
CMP Rebuilt
B2C24
Support C
ETCH Parts Clean
B2C25
Support C
Utility Zone
B2C23
Support E
Films & Metals Test Wafer
B2E23
Support E
Utility Zone
B2E24
Support E
Material Storage
B2E25
Support E
Connectivity Room
B2E02
Support E
Wafer Starts
B2E26
Support E
Boat Box Wash
B2E27
Support B
Connectivity Room
B2B04
Support B
Janitor
B2B05
Support B
Chemical Room
B2B29
Support B
Quartz Clean
B2B25
Support B
ERT
B2B06
Support B
Electrical Room
B2B07
Support D
Utility Zone
B2D29
Support D
Films & Metals Test Wafer
B2D26
Support D
Utility Zone
B2D25
Support D
Thin Films Parts Clean
B2D07
Support D
Deacon Storage
B2D30
Support D
Connectivity Room
B2D02
Support D
Vestibule
B2D04
Support D
Facilities Pre-Gowning Room
B2D24
Support M
Facilities Gowning Room
B2M24
Support M
Clean Janitor Room
B2M07
Support M
Chemical Room
B2M23
Support M
Connectivity Room
B2M06
Support M
Photo & Metal Parts Clean
B2M22
Support M
Contamination & Control Lab.
B2M09
Support M
Electrical Room
B2M08
Support N
Clean Janitor Room
B2N26
Support N
Clean Room Conference
B2N25
Support N
Pre-Gowning Room
B2N24
Support N
Gown Storage
B2N22
Support N
Gowning Room
B2N23
C
BAY N
B2C14
C
BAY O
B2C12
C
Bay P
B2C10
E
BAY Q
B2E18
E
BAY R
B2E16
E
BAY S
B2E14
E
BAY T
B2E12
B
BAY H
B2B17
B
BAY G
B2B15
B
BAY F
B2B13
B
BAY E
B2B11
D
BAY D
B2D17
D
BAY C
B2D15
D
BAY B
B2D13
D
BAY A
B2D11
M
BAY W
B2N16
N
BAY W
B2N16
M
BAY U
B2M12
East Fab
N/A
N\A
West Fab
N/A
N\A
CLEANROOM INSPECTION REPORT
MOTOROLA MOS-17/BAT3
CST ASIA

LOCATION: Inspection Purpose: To inspect and approve the completeness


Area: and quality of the installed work. This inspection will for the basis of
Sector: a substantial completion certificate for the inspected areas and will
Bay: release CST from any liability for the installed work should damage be
Room Name: inflicted by following trades after this inspection.
Room No.

Punchlist
CST System Motorola work
Owner Approval Date Approval Date required?
Architectural CST System Owner: JohnWaldock/Xu Qi
Floors
Underfloor Zone Walls
Understructure
Floor Panels
Walls
Wall Panels
Batten Strips
Head/Floor Track
Doors
Manual Door
Auto Door
Door Frames
Ceilings
Grid
Blank Panels/Return Air Panels
Filters
Plenum Caps
Plenum Cap
Plenum Sidewall
Interstitial Zone Wall

Electrical CST System Owner: Zhou Hong


Lighting
Light Fixtures
Exit Signs
Light Diffusers
CLEANROOM INSPECTION REPORT
MOTOROLA MOS-17/BAT3
CST ASIA
Cable Labeling
At Room
At Panel
Floor Grounding
Grounding Wire
Attachment to Structure

Mechanical CST System Owner: James Hsueh


RAHU's
RAHU #
RAHU #
RAHU #
RAHU #
RAHU #
RAHU #
RAHU #

VAR's (installation only, VAR's supplied by Bechtel)


VAR Unit #
VAR Unit #
VAR Unit #
VAR Unit #
VAR Unit #

Fire Protection
Sprinkler Piping
Sprinkler Heads
Pressure Test
Ductwork
Ductwork
Insulation
Dampers
FFU's
FFU Units
FFU Power Cable
CLEANROOM AREA SIGN-OFF FORM
MOTOROLA MOS-17/BAT3
CST ASIA

LOCATION:
Area West Fab
Sector D
Bay B
Room No. 0
CST System Motorola
Owner Approval Date Approval Date
Architectural CST System Owner: JohnWaldock/Xu Qi
Floors
Zone walls
Understructure
Floor Panels
Wallls
Wall Panels
Batten Strips
Head/Floor Track
Doors
Manual Door
Auto Door
Door Frames
Ceilings
Grid
Blank Panels/Return Air Panels
Filters

Electrical CST System Owner: Zhou Hong


Lighting
Light Fixtures
Exit Signs
Light Diffusers
Cable Labeling
At Room
At Panel
Floor Grounding
Grounding Wire
Attachment to Structure

Mechanical System Owner: CST James Hsueh


RAHU's
RAHU #
RAHU #
RAHU #
RAHU #
RAHU #
RAHU #
RAHU #
CLEANROOM AREA SIGN-OFF FORM
MOTOROLA MOS-17/BAT3
CST ASIA

VAR's
VAR Unit #
VAR Unit #
VAR Unit #
VAR Unit #
VAR Unit #

Fire Protection
Sprinkler Piping
Sprinkler Heads
Pressure Test
Ductwork
Ductwork
Insulation
Dampers
FFU's
FFU Units
FFU Controls

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