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91 views24 pagesUNIT 3 Diffusion and Ion-Implatation
ic tech
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/ 24
Diffusion Preece
Unit. 3
¢ Whe nhectuction of conbelled amounts of paper”
clopanle € BLP, AL Ga, Me, Spiele) mle celeetec! eq!
nicenelelen Im ondlen te Change ie clectregic feled
Fawaliplanes Cie specictivily amobi tily He) ve Called oliffanic:
ete, 4 -, ea ‘ y
Oiffusion ve aprecett wf eehroclucing conteeled amour?
of aloporte ple Gemiecnclucley ayfilerial ”-
* Diffacion 12 eels clefined ek dyemepest ef chemical
Species trem om cosen at hag concen fecebew 40 am ave
How conehakien ”
E yoy tar
Merk, a
Len c (accra
oo
a hogen
Depante
nt | /
7 -
* dy oly fucion «he clepant Couree Ve placed or c®
Neo surfer of wsefer fn form of
clopom- and Cencemfrortion ef ce
“cea
Loafer >|
v
GSernicenclarcters
at phage
°
Ne oltca cate:
; a0 okmenief frem the eurefowe 'o toafen
- Sn cli ffucion cok Hh aaa
le Ve beni
clebn mine J Sa La) seen Syme, = AA
1 Diffecion Sy ctor : \
es Seb Lource OH Qucalz
a (i ffeceion
NN Tbe
a ¥ WALT a =-
ate Vent
md Foca
So BO oa
Platinu
ih Sour 7 beak
Carries ube 7
Ahave figeee Shove Ce Selig
Where
Scuree “Uffuceion syelem,,
Platinum ‘boat (8 uted dehald a Source -6f ctopar
J materiale moloere “romeportecl to neor tht gubetyed
Surface woth help of Consiey
Matera! ory
acer We ovesedll call equection te
mem below ., J
Fe Rowen,
fon #705 > F8s0Q FUNos
“Sid Qouses
Atesh comerdteal inte Oxicle form tb ache ook
O bersten for Out bi ffution ef Glico and opemts aterm,
Oxide of opont moateviof weackerd with silicon and
ae bowen ettom .
AB,0, £ si
> (Rf BO.
for phos phous — o
) Ahos +58 —>40 4 Ssicg
for ie + 6 4c f 2800
na for Doped ‘p! “
= . ; 100.
— mony 1 eal r
ao
pki uel Source adh mn Sysfem
/ © clifusic oe >
Quookz Diffuvowtebe | curd st ‘
mes a
= = Ly > T, verb
yt Z|
Quota 1s Bock
ol
uh ge commbsell«
yen
TES
Rubble
Liquiel Gouver Diffuaion & chem
Crbewe tyra Sho: ee Roque - carer elif fecaion system, )
lohere & eee : etB)qact to bubblew #
é 3 1 Riquicl Sourree inn
tee
Vorper fey 18 “framape meay the Subs heel woofers
sR. woth he hele Cotte Covries Gab (o
Nuvall reaction in Petion a” ig giver
Ae i
\ cl
Fer Bowem
Laer, 202 — 7A R202 F CBs
e + 6B
(Borers Pui bromicts) Cele ca Bownin for cul ebftusion) iS
I B20 + acer 48+ S00
C Bowen Toi oxide)
Low phosphoreut =
4 pod, + 202
C Phegpoherus 7 chiielt)
djoe FS —tP F582 -—O
—_-U)
> 205 F Glo tO G Gaseous Fousee _ Diffusion § dem sy
ue 1 —
Burod2 Biffeasieon
he
set aL pa i
fic» > Quotas beak
= Te Vent
oe. ne
b s 7 > Chemicer| "Rees Fee
bey ne 2} CU vsartsof gcaes Pref foc! b
al aha) (J chemica!Ecutin(
CR, Ne PM ‘Aa, ) ‘
te GFeue out ~ Source Diffusion Syctem
Above > ch, are shout co. GQauteout — couree! obiffetion eystem,
tcherel tere Sorfixes Edncontretion of alopante ( di z
Coneenfration orf op orks ecw He Sutctoo bet safoes)
12 Confecllect Toate he
feo: volves ond Loner mete Kol) oterp
[2 deemopootes! meds the cud a Caroferee oil he help of
Cowan yedet, Ta over atl weackron (2
fvem by: ,
f Ban, ; GC d
Ryle ~P B00 2255 Roo + Mae —@
C_Dj boxerne)
Oa Do —— 4& f 38'o9 —@)
Jo phos hoes €P) ,
' one f 40s PEs Proof Uo —O
C Phos phine )
BRog Pes —— YP F Sfio2 —G) yfepes or Darr uston IN Soave C Durvcsons eeranuee ) ©
J these are mainly three ctiffurtion anecheniean rm seucls —
@ Vacene dy | Sule) tutonel Diffusion >
A‘ hugh Wen semaine Re lattice ates Vibealt oncund
Ahe Gatton Soe hese ig ce Leite prctatie| Ahead cx
hod atem( Lalicn “clam acquiler Suffieiint te tedve thy laltien
Sta end “become ayy intesstifial aterm anel ercatin
& Vewemee bho & moighbasing finpunily atom aniqncdh
Fede the en ote (fax shecoGl in f
\ (ths
Waele) , +e mechoniem
je awe Vacem ed etif{ ution.
ee oa ° Sb Vacane:
° om eS ° © Dopont
o eo So 6 aa Psp)
° ° ° ° alam,
_ ° Céidiconis odor )
° ° oO Oo
i > ‘Vo.come! Diffution
G
feouep FT Clememb ne} Fou
Pees Al Von qa ctf faiey olement arse tual Concictevedt
@ Foley shi Kal) Diffuse 3° interstitial oto ja movin
C one foee do serve tea heut olichabing a lattice
ato’ je ceetlect the iterctttia| cliffusioy mechemi¢m:
Sn care Yolen cht Bio obi {fusion , the sige & ites cli bra
aA atom al bo amellea thom Spe hoct cutom| -Qecttier citom
amd coer not ov rrlmuke jhe Covalent bonc| ewith Sikicon's
atom Ctatlice amy
G © 5 @ doparts alo
° > C Srthadiol
SOR SO stat
° ° O20 D cube |< ctl
° ° oko }°
ee
fo} oO ° 5° °
'y () Tater Dp Riot Diffesion A AR SN
3) Posh okey T i fPeeien | Jntenchon? Dif feesiow > ¢
oO ° o o 9° ay > Gidice
Self ix
O ° oO ° o ‘at:
a
—~ ee Dopanle
eo a as oO oO tb lie or.
NL 2 Cimpn
2° O — ikicon
°O a oe o oO fo) vathice a
° ° oO 5 .
fe ey Onterc hi tiate Differion:
Above rane ahouog ttaohiale chiffecion mechanier
Sn Sep, Je Self prterct Bred ce ra olplacina em br
irepesity ecto (dtopent atom ). In flop @ clo lim
becomes
om imterct io} alten , Fy sa. “He impusit diz
ote) alam re clteplacing the lattice olom [hock al
ih foe inclep@ lati ctor becomes elf ~ intirsh
¢ Ref +
s Ah extemcteo frtewstitial mechan
A fe moun oA ret
obiffucion amechemism
Bq thre wmecherisen | fe es more cttoms ave aliffuseel
an . ze there ors ino} pase
Alto by inter changin: ae) () ion
d yd
three % om @xcemple of
Cha i and jl /Durrecion Tinoey s
iS Fas, % one olimensioned Diffusion Equestion >)
NSE) Hele pub Micheal fic heen om ob ffusion Hie the
beted on the omalogy bel vweom rmatesiot Ascmefers :
™ Selution | Riqueicl amet heed: Aramifer e Concductio:,
In the prsseree of. -alachic (
stel, He “plus, C&D is
a
aD
j—
fiat ctor Bf dD Bifano ef Co Corsviee aio den
Ca d ve (Le, Fe mo. of elepank oem p
Wrough umib orsece cei Bine | (a (aid
E, = lechsic fice ( Net g em
= Mobi Lit “apurpitey exter» Jolopan
AL obi {7 mm) ~y ae Pp
D = Diffution Coefficient (Gat N=See
N= Aire: of aoe (ee
Y - - Distance mm Cm
fe onchornt ohafasin coefficionk (DD onel coithout -elecletc
faa Lee so, Then from Quarry
)
|
Neqoive Signs r=" feop Bier hak Concentration clecveated
d tom! yerpeck a oc,
Cag) Cquabo) 13 Cabted) -fick'g Fis} lave of chi ffiction
and Guuationg) dates thal a
hex CA) 48
! amt) a se )
ye
GO Vhe hepa ceclern cout move Cab fleue ys [yer “ao.
feccorel ce loc Concer dsalion on
Qo .
Opie onelescle~
“ bee
- t
ms) — (0th goin dopo’ at >
iy deport ater)
. LE at peit x bete .
= Small change in no of f deport
. . olen in mle rorcop eet
ADE IL — ARCarax)y Oe AKIN — Volume Cx )
AS&) — AdU+dx) = Fxdn
_ St
ON _ LD dixsd=) =feo]
ot © OSS
Se
We Kmow fat
Linn PPO ~d ery O¢ a
\ Xe he .
Ns
on
=e
Oe
S| -©
foment ot in,
Ow
> -2 [ =pQx
or Ou Ox
oe a an conclemt “SS
3
oxe | —&
Cqaation@ ja Known ah Pres Second Jaro of ob ffusien C
rot.
Heaney
jisee
@Gie Dy {fusion Coctheernt we net
-Conconbs
oft Corcerbrection )
e Conthont efidncs >
fe Corecy <
ine cw Core Syatic
he mifeat Corel Sey at
al Cardi ter
re fered =
ROKLO
tater
=O --
ah. cleport carter
tchich thectes that
r Corducte (Subshat 1 wnittally BETO -
~Yhe bounden; Concdihons are
GC wot) = Ms a _ Beurday
y Y |
° ih
Rot) = Oo Contin .
The celutin of eke Geeend tore of Diffuse cse > OEE
‘he midi! and teary conihon 12 Giver by
txt) = Ne eee Ge ) |
ey, \o Sree) | —D*
|
\
[ee
Lohne Ne = Surface corcamtration of clopent
r cttem)
t= Ofte Bime to\secon ( oF )
Cre = Con plementeny| exe fanction
] as
1D = Diffuser Cede CSE)
Concerbrationa -
te |) tarts Sty C Diffuee
Ne
| ~~
| Ne §2
| \ 2 Cornplore ner}
| ever frortion
——= \. profile
° Sa
ste Dislenee eM: \
\
Total cancunt of chepert CD one
ane val r?
Qr - [row dx Ne
, 8 A
QQ. Jn exfe (ex)
Ber > —— = Yio.
Aiffooentiatin
Gy
Lith veges be
ax = pt el
ie [ew Be esapy
Q+ - “Ne mit (ys 4 a
Q, = SUSE rse(t. )
Gly =-2Ne [BE = PENA BE
1 Garterctection - of \perction cloptth C75),
Conctdler ce olopin poh Goitly back ,
Greed concentecabog | “nt
ee als
2D
(2%leg.) —®
ls> ba shy
Nae ne n~n
Dretoneer¢
Cfor bn ne ty
ot “he po obepth ace NOt) = Ned
from CaD |
Ne = Ne enfe Ce) Dicon at ICO
19ern?
ne agnaictecired! at 10
the
oY tiger Cuber Joes “Tut oven ond
4
he olepemk concen teotign reaches
f
> vere ltec) 09 ape CIE) PTS
Pre VSI Rabern| Carns
pod out eee
o-yel Hon)
be > vid q .
pO bee ech Gouses Steins es
; C Conttirh Tolal De
A fete quorbly oof the ab fan geitened |
: f on the toa fer of siffes zion ( ove cecth fem
| Ach Cuvee, ord 2 axtumen{ Phat oll of
nteriol 13 comtumeel,
cs
( ces Qe (re se rmpur phy pee sami oree )
© \ Beervclen
f meet) =e Concli in
Tak tro.
N (xe) =O — mikied concblion
)
“the
th a fo. :
hat Soubs fied She mifid cero bewneleny Gondiliont 1%
Ginter by ee =
: HOGbL) = Gr ox : )
: alk et
ution
Fick Becone) Ras of otf ation
fy tcthry =O, WY, Chlam the suefocke
{ / Coreer4ty om ONE) 4 ye kerbs
yu
us! \ Lt? . C toi (femer Pimms )
. f eta
L- Sa
7 \ : ee wider ab hin
Py perc atepth oc
ye gee ion fo >
J , > xy
mak NEN. asd «= 7)
L
- De serclenh Diffusivities
Carc@) Con eorm feakion -
: Ey fhe p = bi Le perm
C tee BDrffusion Ce iced r2 & oe on of cle}
Comecmsecction
As uset eal grok,
2 N
~ lar
Ho —_ Coneertrectren Catone
D: Diffraion ceetficlemb
Alums that DXN
Dekn —@
De = hs —S
De.
© Surface cbftuson Coe .
. an O . vom Coeficiente
fe Me Lob em ® [tes Cyotings Jumebes ky th ip). YBete
Dx bh — *j = VET Det
Dac nN? = ‘| = 01g TbSt
Down? xj =o SOLIS
syn esfes)
ae (e
=O
oo, _]
[efoos KE
- @
221 x 7 mn x<<4
TK
erf (x0) = 2 ex ca ORD!
Nes Usut:? 0%)
ye MPLANITATION
FP ton imp lertetion s¢ procese } tic cloport
: ° Lebicls emer get
ea an be inhveckeced nls a [se — ode ssacdic wate
C cons Suhchrate ) m order! . ae lange
~Cbecksonic properties [ ctectsico) | open ren q
Cource
aba
a ala nt
C BF, Acta D
ha & oy +
veil! Depend tent crt ac)
4 Maal a Ome Coenen:
— tration )
Deed Tons
"7 SS papi pf fe
re Gy Autesion
ee
i mar Uapor Aecele rate Pombersctel |
the er fe ermal] cteradsd|_ Peres |
= nap Lastedion ile
~Giticon's
Cubsteate
+ Danie ton
Deoponls enttr miro Silicon
Pe dye Pave:
spreoccss,
‘l
(frptonteation
Sa _ toa Shepton’ | Ci Micowris ‘atom *
wofuy oad eoltife cody
“cis emrc . fee! Comin Re ache a} Some
loth + ded C hi / ;
Sn io implernd akiow seoceat, THe oe profi ie
chetesmmed tT “rai cvnd | “nant of
basicaW
( ions -
We teed to form a hallod yuock
Ton — tv plowd-ation
cCeg 4 Source ] cl Rrecliow ot a mocre t) Egle OC fern Dany hort ey
Lew hep Gernbec Cio :
Jom = haplonda tier spe the Jrfdooeterction eo
{ emrergot
fre a Cd chvate [%& jeer (fsofeon
Chaoqedd posticles
J r “4 Newhet Pea
r , i Meaps
Mass Magnet. Analyse Qeewh er Beam a, mY
Tass Magnet Aratyse {' ; and plate \ygats
plot
=f]
LUrncvern
Lect beer
ap WHE yt
CoA jill
The
Y-Mie S
Games J
X-axig
— C Sil om't
— YS eh Wofey
Exhectio voltago “f
fy Sehermvtic
@® Jor Gearee Jon Source hata heatre) (hemor
Lo beak: Up fousee qat Such RF om Aelta. mfte
Chaged jonk € ed ox het )
Z Cxbroction plate conte
Que potent
a ( "C
as Eos
> HL, dF Fetes
C BRa patchy l
My Heatea fiRement
fen extsation votto-ge avound 4OKV Coebed the
the lon Coursee Chesabew
“yet tong to ve ert of
asd ¢ tnte mane ONALY QT .
fp ae oy vant eboccl rex SS aa
Th c meng netic vetch he Hic aa gne tic tomas oe
Tr Reh Sab that) ext jond caitle “the cloeia be
ees vatio oc 07) 6 beae| Conhout -{itle secs.
Jone tony PeEfrionce va five ‘pb! cect Abed
t q ie x2) ——O)
Fee anagnetic fosce on crn ient
VW = votheibe ef sen
F 2 Charg€/ of (ion
Bey Jgrete [isecounti a
if iene fottoed | fee pedh ef wackiat % Vthom,
I xR ec may" £C Combifugal forvee,
; (Vx) C q
ve Te = aay?
9
aS GBe __
vd alo Wwe Karaed thal ,
“ Kinetic fatentiol emung
!
dm OU Chand otteg
o-( —@
fom <¥@ end equation @
oav _ 4qBe
NI ay © ay
fe Sel Jan
wy Pr UMALs of ims fo fee a give extracted sani and magne
[ lowe sclensily ch) path vactien
Ve Aneclte >sOpoy |
WromeD be « Square Deed of
The afhane of ion
ton bea
me M4, Cniwente d ion)
~ SAib &
eel
NS \ 5
. un a Sonted jong
@ Acceleration Rae : lm) LE
Altes Mans cmolyzer Perce the Selected fori thin enter
| Le accelthalion Lube LOhcse hry are -creceltyatid
Ureles* ut elechic fied Cohen thry ancue, feos hy vetnge
Bo eS Vetteys Careend) (f .
J
@ XN Sconnes Prot > Atte Oceelevater Aahe process, the ions
elccho-
beam if them Scammed aver the wofers “s wr face by usang_
Slecte elifteclrm pots are! firally jont implentid int
Loner
ati Deflec Gow Hoevixata)
we ‘at Wi pefiection
pate
P .
cy - peo elaftectin ) ce phe. Searmer ) on penons) i Nd venta ene
Jon ~ —|" pall aaa Dood cel wn( 1)
i > , op Shera lon , . 2
cut cl Rees 4 pecerse TA Uscuets Covtec|
he le Cmpecatiac ¢ GA Zefarf bem eretine):
ORE NE dit cobs ~ e s
to 2 Mw ern Guike che im
= eeCiwe Contes) -ones No. (, -
pee be No. of tons) oot plertes| “pen
(te a ble oF pref Con be Sbainer
C MRI the enabs od oleae
fo a C no. et ier pes nike deleay Ore
crmpte Obne, | es Cae ache
re Dads of {chet rn pe of (oy ae
e + . cle pin profile
> Ton - rrp tomdtecbeu + ie non -enustalin
procter te. lopont Concerteatien meicte
CiQiconz Sabstedke re not Oinited
Temp De tee
dune C|
A. Jen - irrtolernbation jaoocst is mocathet rn
Vocuurh Chambus (re ibie e Clean: ond
proces
2 An jon rm plenfeltion proces > fonts encog
SP Siees fool Kev fo !qeu ol Ae ei rae
ene Pe eben ta
oD Of okk fe a
' + od
Discolvertge
oe High Sophichiceted ed ore
eebriquerl re On rh Costly
& ‘tom- tm onto Gon wm { age Fo
vfhs gemionder clos 2 Lo steal de
chise te vai mene: dig A Smo “Creo le.
} {Section of To achei
w
coefen camel thay Lose
cithey cottisions bebroeew U the Tons cont
(Usters OS tC ema
fGeons alen
“8 otis at elechenic doppiny
: an . . (
Seornd celUsion ts aefined ck Nucke by
Serre emeay
{
to Se) Then clecreadro) yrsee ef
[eee
Ly Geo
: f ngage
‘ emesg “ ¢ 48 clefmed cd | C
“dé ie -
Shc o< | Sate) + Cote) |
-d& _ yw fs + Set] —a>
ne ;
Lohuve ae = Noet Leathiee atom pe unik
Volum ©
Syd) = Neuclecr choppy emeng re
( NX
¢ . 4
Ae lE) = Cleckronic topping emergy — -
The crease clishonee Ayovellec} (Jorn imblented
jem okie coming Lo Wer inthe Lattice
Shictuve i& staf ony Ronse ‘g. ~ _ . > .
— 2 : ime = OKs
fryso Kenge CE) end [sejected Rog ¢ Py,
> x-axis
S)Fise atimensinal ions Coneem-
drain Aidsibution of the
Implantes! ions
Tropeeted Remge tkp) i the pagjectiow
J 1 ony ‘ ye
th Nomqe Ro te “Hu direction of IMS
hoam VU trciclenes- ,
q Chetevet -chagale) 48 chatistico} {tuctualiow
clergy, om eis ae to Fheevxts et
~ Melclemer, . . eee
Sp Cire fected choggte) fe stakistical La
m preyeckd ramge along axis at Mefclenct -
iq) chocse *he C cemtrection of ton obs bution
4 Mhe caxts of metclemee, Mee implored
impeit t pe ile Com be pre cimacte cf by a
(
Gausiion oidributio function ( ato x=P, @
nN 2, : i.
¢ Ro) =: S$
=
19x So
* \ sery umnib aver)
Where S= Dese = No vot fonk \
Sp- Profectedd Qh
NOY = roe peecion et ot
from igeere fat dance’ X!
Uo Ronge is coe
arr =< 1
p 4° ‘R= we i {Zs +Sel&)
=e von)
\ jim ee >
cay stallene oc &.
i
rralleg ex
tm cot eneder (he treo em
ind,
Sanet /
flenet/iain
OM A reilegd on
Fok on Onion
j Conk Woofen C Vondase
2D) L Mast ef a 1
fected ¢e
1B Omd jon! p.
: on’
(rh cpm 4 ) Nagel
Jere Me chimed ceachanhel, od, ,
Brel Corn reve
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OY Cyeed blur Cayetn
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