MDX Ii
MDX Ii
5700262-R
April 2002
User Manual
MDX II™
5700262-R
WARNING
Read this entire manual and all other publications pertaining to the work to be performed
before you install, operate, or maintain this equipment. Practice all plant and product safety
instructions and precautions. Failure to follow instructions can cause personal injury and/or
property damage. All personnel who work with or who are exposed to this equipment must
take precautions to protect themselves against serious or possibly fatal bodily injury.
Advanced Energy Industries, Inc., (AE) provides information on its products and associated
hazards, but it assumes no responsibility for the after-sale operation of the equipment or the
safety practices of the owner or user. This equipment produces or uses potentially lethal high-
voltage, high-current, radio frequency (RF) energy. NEVER DEFEAT INTERLOCKS OR
GROUNDS.
All information herein is subject to periodic updates. Inquiries concerning this manual should
be directed to AE. Information provided by AE is believed to be correct and reliable.
However, no responsibility is assumed by AE unless otherwise expressly taken.
is a registered trademark of Advanced Energy Industries, Inc.
Table of Contents
Chapter 1. Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Panels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Unit Control Hierarchy. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Output Regulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Software Highlights . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Arc Suppression . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Fault Conditions and Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
HALO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Programmable Setpoints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Tap Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Target Supervision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Timers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Unit Software Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Identifying Software Versions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Identifying Optional Software Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Understanding the Optional Software Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Custom Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Custom Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
2 Setpoint, 4 Target Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Auto-Contactor Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Custom Hardware. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Setpoint.D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Deko . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Chapter 3. Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Physical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Electrical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Environmental Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Chapter 4. Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Setting Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Spacing Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Cooling Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Cabinet Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Rear Panel Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Grounding ..................................................................... 7
Input Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Output Power Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Optimal Output Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Negative Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Positive Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Floating Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Junction Box Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Slave Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Other Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Disconnecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Output Regulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Current ....................................................................... 2
Voltage ....................................................................... 2
Limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Timers and Counters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Ramp Timer .................................................................. 2
Run Timer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Output Setpoint Level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Out-of-Setpoint Timer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Allowable Setpoint Deviation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Steps and Recipes ............................................................... 4
Target Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Arc Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Arc Counting Features and Limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Arc Delay and Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Arc Trip Levels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Arc-Check™ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Tap Settings ..................................................................... 7
Selecting the Correct Tap ........................................................ 8
Power Supply Enhancements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Lock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Program Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Clicks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Serial Port Timeout Value . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Analog Input Filtering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Transductor Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Features/Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
ASCII . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
HALO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
VHALO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Contactor Hold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Service Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
System Statistics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Memo Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Clear NOVRAM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Check NOVRAM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
References to Operation Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
First-Time Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Physical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Electrical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Environmental Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Operations and Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Contactor Closure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Deko/Varc. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Fast User Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Pulsed Duty Cycle Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Tap Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
VHALO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
18P Unit Illustrations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Appendix B. Master/Slave . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Electrical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Slave Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Fault Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Host/MDXII Communications Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Making Rear Panel Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Setting Up for master/Slave or Stand Alone Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Running as a master/slave system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Running as a stand alone supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Start-up Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Master/Slave Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Target Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Tap Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Selecting the Correct Tap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
List of Figures
List of Tables
1
1 Introduction
READ THIS SECTION!
We know that some of you want to start the MDXII magnetron drive now and that you don't
feel you have the time to read the entire manual. Below is a list of manual sub-sections you
must read before getting started.
• Unit configuration page 2-9
• Electrical specifications page 3-2
• Setting up page 4-1
• Rear panel connections page 4-7
• Control panel interface page 6-2
• First time operation page 5-27
In addition, we recommend that you scan “Interpreting the Manual” on page 1-1. This section
explains the type conventions (what it means when a word appears in capitalized italic type,
for instance) and icon (symbol) definitions.
Type Conventions
To help you quickly find what is being discussed, the manual presents certain words and
phrases in type that are different from the rest of the text. We use the following type
conventions:
• Pin and signal names appear in capitalized italics (DUTY CYCLE.A).
• Labels that are on the unit (switches, indicators, etc.) generally appear in boldface capital
letters (MODIFY).
• Functions are printed in boldface lowercase letters (analog input filtering).
Icons (Symbols)
We include this symbol in Danger, Warning, and Caution boxes to identify specific levels of
hazard seriousness.
DANGER:
This box identifies immediate hazards which will result in severe personal injury or
death.
WARNING:
This box identifies hazards or unsafe practices which could result in severe personal
injury or death.
CAUTION:
This box identifies hazards or unsafe practices which could result in minor personal
injury or product or property damage.
• High voltage
• Earth ground
• CE label
• Non-ionizing radiation
SAFETY
Do not attempt to install or operate this equipment if you have not first acquired proper
training.
• Ensure that this unit is properly grounded.
• Ensure that all cables are properly connected.
• Verify that input line voltage and current capacity are within specifications before turning
on the power supplies.
• Use proper ESD precautions.
• BE CAREFUL AROUND THIS EQUIPMENT.
WARNING:
RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power
before working on this unit or anything connected to it.
PRODUCT SAFETY/COMPLIANCE
This product is designed to meet the following directives and standards.
Directives
The following tables list the Electromagnetic Compatibility (EMC) and Safety directives.
Standards
If your MDXII unit bears the “CE” mark:
• The device has been tested for and complies with the following Safety and EMC
standard(s):
– VDE 0160
– EN 50082-2
– EN 55011 (Class A, Group 2)(CISPR 11)
Your MDXII unit must be installed and used only in compliance with the standards listed in
addition to VDE 0113, EN 60204 (IEC 204), and applicable requirements.
For more information, refer to the letter of conformance (US) or declaration of conformity
(EU) accompanying the product.
Conditions of Use
WARNING:
Operating and maintenance personnel must receive proper training before installing,
troubleshooting, or maintaining high-energy electrical equipment. Potentially lethal
voltages could cause death, serious personal injury, or damage to the equipment.
Ensure that all appropriate safety precautions are taken.
CAUTION:
To maintain compliance with the standards listed, your unit requires the addition of a
protective earth ground conductor on the rear panel and the use of shielded input and
output power cables.
2
2 Product Overview
GENERAL DESCRIPTION
The Advanced Energy® MDXII dc magnetron drive is a sophisticated and intelligent dc
power supply designed exclusively for use in vacuum environments. The MDXII drive
provides the ultimate advantages in dc power by:
• Setting a new standard for compactness, accuracy, reliability, and flexibility
• Ensuring ease of use
• Exhibiting superior output response time and low output ripple voltage
• Quickly extinguishing and recovering from arcs
• Providing high-power density—that is, high-power 15 kW or 30 kW output
• Reducing overheating problems by drawing the cooling air in through the front and
exhausting it out the back
Panels
The following panels may be present in your MDXII unit’s configuration:
• Active front panel - this panel is an integrated part of the MDXII unit. The panel has a
display, switches, soft keys, and a MODIFY knob that you use to control the operation of
your MDXII unit.
• Active remote panel - this panel is a smaller version of an active front panel and is
connected remotely to the MDXII unit through the DISPLAY port on the rear of the unit.
The panel has a display, switches, soft keys, and a MODIFY knob that you use to control
the operation of your MDXII unit.
Note: Your MDXII unit can have one (but not both) of these panels. Throughout this
manual, we use the term “control panel” to refer to either an active front panel or a
an active remote panel (they function identically and give you control over
operations).
• Passive panel - this panel is optional on all MDXII units, so you may or may not have this
panel. This panel gives you no control over operation but contains several LEDs that
provide you with status information.
• MDXII Remote Monitor Panel - this passive panel is typically connected remotely to an
MDXII unit through the DISPLAY port. The panel features three status LEDs and three
meters. Included with the panel are a junction box, ac-to-dc adapter, and cables. Manual
5700321 describes this panel.
Summary:
• An “active” panel gives you control over the operation of the MDXII unit. An active panel
may be either a front panel or a remote panel.
• A “passive” panel gives you no control over operation; it merely reports status
information.
Displays
All panels (active or passive) include displays.
• Passive panel display - this display shows only maximum system output in kilowatts.
• Control panel display (active front or active remote) - this display shows actual output in
kilowatts, amperes, and volts, as well as the setpoint. (For more information, see page
6-1.)
In addition, control panel displays show menu items for soft key programming (see page
6-3).
Interfaces
The MDXII unit provides a broad array of operational features and settings, most of which you
can control and/or monitor using one of three interfaces:
• A control panel (active front panel or active remote panel)
The control panel is an active interface that gives you direct access to all operating
parameters and control functions through the use of switches, softkeys, and the
MODIFY knob.
– The switches let you control output power, unit control, and regulation.
– The soft keys let you select menu choices and parameters that appear on the control
panel’s two-line display.
– The MODIFY knob lets you modify values for selected menu choices and parameters.
Note: Refer to the chapter “Control Panel Controls” on page 6-3 for complete
information on performing operations from the control panel interface.
• The electrically isolated serial port (labeled “Host” on the rear of the unit)
The serial port uses either an AE Bus (RS-232 or RS-485) or Profibus (RS-485)
communications interface that allows remote operational control from a host computer.
You can perform all operations from a host computer interfaced to the MDXII unit
through the serial port interface.
If you want operational control through the serial port, you must first press the HOST
switch on the control panel, or switch control mode using Command 14.
Note: Refer to the chapter “Serial Port Connection, Controls and Indicators” on page 7-1
for complete information on performing operations from a host computer through
a serial port interface.
2. Then press either the LOCAL, HOST, or ANALOG switch located on the control panel.
• LOCAL gives control to the control panel.
• ANALOG gives control to an analog controller connected through the User port.
• HOST gives control to a host computer connected through the serial port.
Note: Also, you can give the serial interface control by issuing Command 14 (see page
7-1).
When you press one of the above switches, control is transferred to the mode you selected.
The most recently selected control mode is stored in nonvolatile memory. This means that if
input power is interrupted, the same control mode is active when power is restored. The
amount of control each interface has is determined by the program source feature (see page
5-16).
Output Regulation
You can use the MDXII unit as a power, current, or voltage source, depending on the method
of output regulation you select using the REGULATION switch on the control panel.
Because setpoint levels are stored in nonvolatile memory, you can use them to recover from
input power interruptions and to ensure repeatability from run to run.
Theory of Operation
Figure 2-1 on page 2-5 and the following paragraphs outline the theory of operation.
Input
In the input section, ac line voltage is applied through the circuit breaker to a three-phase
contactor. The contactor, when closed, delivers the line voltage to a rectifier bridge, where it is
converted to dc. The dc voltage is applied to bus capacitors through soft-start circuitry. This
bus provides dc voltage to the inverter section. The input section also supplies ac voltage to the
housekeeping supply.
Housekeeping Supply
The housekeeping supply section provides various low-voltage dc power levels to the inverter,
card cage, and control panel.
Inverter
The inverter section converts dc to high-frequency voltage by alternating the current through
four sets of switching transistors (see Figure 2-2 on page 2-6 and Figure 2-3 on page 2-6).
Output
In the output section, an isolation transformer steps up the high-frequency voltage from the
inverter section and sends it to a full-wave rectifier bridge. The rectified dc power then passes
out through a filter network and through the output measurement section.
Ripple
Choke
Filter
DC Cap
Tap
Relays
AC Output
Output Tap
30 Transformer Rectifier Relays DC Output
Input Bridges
1248
Figure 2-3 on page 2-6 is a detail of the previous figure, showing the current flow through
switching transistors. In this figure, the dashed lines represent the flow.
1249
Output Measurement
The output measurement section measures current and voltage and calculates power. These
signals are typically scaled to 0 to 10 Vdc and sent to the logic, control, and remote interfaces.
Logic Control
The microprocessor in the logic control section uses operator-supplied parameters and
setpoints to control the output. This section also provides status information to the operator
through all interfaces and controls the input section.
Control Panel Display
The display on the control panel communicates operator-supplied inputs to the logic control
section and provides the operator with status information.
Remote Interfaces
Both remote interfaces communicate operator-supplied inputs to the logic control section from
the serial port (RS-232 or RS-485) and the User port (analog and digital) and provide the
operator with status information.
SOFTWARE HIGHLIGHTS
The MDXII unit provides many standard software functions, some of which are highlighted
here. For more information about optional software features, refer to “Understanding the
Optional Software Features” on page 2-19
Arc Suppression
The arc-handling software provides multi-level suppression and quenching of different types
of arcs, which reduces target burn-in time and material loss. When the software senses a drop
in impedance, it turn offs the power immediately. The software then controls start-up so that
hot spots cool before power is reapplied.
Refer to “Arc Controls” on page 5-5 for information about the options available for handling
arcs.
HALO
HALO (high accuracy at low output) is available on MDXII stand-alone units that do not
feature the VHALO software option (for more about software options, see “Understanding the
Optional Software Features” on page 2-19). HALO increases the accuracy of the User port
scaling when the unit is operating in low output ranges. When you want the MDXII unit to
produce 10% of its maximum rated output or less, you can invoke this feature to gain higher
resolution (by a factor of 10) for the setpoint and internal feedback. For more information
about HALO, refer to page 5-19.
Note: The HALO and VHALO features are independent and cannot be available in the same
unit.
Refer to page 5-20 for more information about the VHALO software option.
Programmable Setpoints
The software lets you program an output setpoint level (up to the MDXII unit’s maximum
rated output) for power, current, or voltage.
Refer to “Output Setpoint Level” on page 5-3 for more information on how to program and
monitor output setpoint level.
Tap Settings
The MDXII unit has six internal voltage taps, which offers set six different output ranges from
each unit. Depending on the tap setting, full rated output power can be delivered at voltages
ranging from 315 V to 1250 V.
Refer to “Selecting the Correct Tap” on page 5-8 for additional information.
Target Supervision
The software lets you choose an operating target, set the length of life for the target, and
monitor target life left while your process is running.
Refer to “Target Controls” on page 5-4 for a complete description.
Timers
The software lets you program:
• Ramp time - the amount of time the MDXII unit takes to reach a programmed output
setpoint
• Run time - the amount of time the MDXII unit is specified to run. When this time is
reached, output shuts off.
Refer to “Timers and Counters” on page 5-2 for more information on setting ramp and run
times.
7. On the following pages find the table that corresponds with your unit’s software version.
(To identify your unit’s software version, see “Identifying Software Versions” on
page 2-9.) Write your conversion on the last row of the table (see example Table 2-3 on
page 2-12).
8. Again, working left to right, translate each digit of the binary numbers into “yes” and “no”
responses: 1 = yes; 0 = no. The 16 yes and no responses correspond with the 12 to 16
options available in your unit’s software version. The relationship would look like this:
opt16 opt1
1 0 0 0 0001 1010 0 0 0 1
yes no no no yes
Note: If your software version table uses only 12 options, the first hex digit is 0, and the
first binary number is 0000. Ignore these zeros. Begin your yes/no translations
with the third binary number.
9. Using your yes/no translation from Step 8 on page 2-10, complete the table by checking
“yes” or “no” next to each option listed.
You now know which optional software features were selected for your MDXII unit.
Table 2-2 on page 2-11 shows the selected options for a unit having software version 7001020
when the hex number is 0x81A1.
Table 2-3. Software Options 7001020 - Expanded Profibus Command Set/Fast User
Port
Yes No Option Definition
Opt1 = Fast Run/Ramp
Opt2 = Arc-Check
Opt3 = 460 to 480 V Line Input
Opt4 = 5 V Analog Input in User Port
Opt 5 = unassigned
Opt 6 = Varc Shutdown Enable
Opt 7 = VHALO
Opt8 = 18P Mode of Operation
X Opt9 = LGA Hardware
Opt10 = Varc-Iarc Counters Enabled in User port
Opt11 = Tap 1 Low Primary Current (with VHALO opt7)
Opt12 = 25 V Voltage Arc (with Varc Shutdown opt6)
Opt13 = Pinnacle Style Front Panel
Opt14 = Tap Select Voltage Limits 5% Above Maximum
Opt15 = User Port ON/OFF In Analog Mode Only
Opt 16 = Contactor Closure New Style (Profibus/Fast User units)
SW Options = 0x
Table 2-8. Software Options 7002218 - Standard MDXII (Universal Logic Card)
Yes No Option Definition
Opt1 = Fast Run/Ramp
Opt2 = Arc-Check
Opt3 = 460 to 480 V Line Input
Opt4 = 5 V Analog Input in User Port
Opt 5 = Unit Ready for Turn On
Opt 6 = Varc Shutdown Enable
Opt 7 = Voltage HALO
Opt8 = unassigned
Opt9 = unassigned
Opt10 = Varc-Iarc Counters Enabled in User Port
Opt11 = Tap 1 Low Primary Current (with VHALO opt7)
Opt12 = unassigned
Opt13 = Pinnacle Style Front Panel
Opt14 = Tap Select Voltage Limits 5% Above Maximum
Opt15 = User Port ON/OFF in Analog Mode Only
Opt16 = 1600 V in Tap 6
SW Options = 0x
Table 2-9. Software Options 7002216 - MDXII CE Fast User Port (Universal Logic Card)
Yes No Option Definition
Opt1 = Fast Run/Ramp
Opt2 = Arc-Check
Opt3 = 460 to 480 V Line Input
Opt4 = 5 V Analog Input in User Port
Opt 5 =unassigned
Opt 6 = Varc Shutdown Enable
Opt 7 = Voltage HALO
Opt8 = 18P Mode of Operation
Opt9 = unassigned
Opt10 = Varc-Iarc Counters Enabled in User Port
Opt11 = Tap 1 Low Primary Current (with VHALO opt7)
Opt12 = unassigned
Opt13 = Pinnacle Style Front Panel
Opt14 = Tap Select Voltage Limits 5% Above Maximum
Opt15 = User Port ON/OFF in Analog Mode Only
Opt16 = Contactor Closure CE Style
SW Options = 0x
Fast Ramp/Run If this option has been activated, the unit can ramp up output as
quickly as 50 ms. Normal ramp time (when this option is not
selected) is 600 ms. This option does not affect ramp functions
within recipes.
Arc-Check If this option has been activated, you can use the active front
(Cathodic Arc) panel to enable the Arc-Check feature (see “Arc-Check™” on
page 5-6).
If Arc-Check has been activated, then the Varc Shutdown
Enable option (below) is disabled.
460/480 Volt Input If this option has been activated, the MDXII unit requires 460 or
480 Vac input (the typical USA input). Also, the maximum
current limit and default current arc (Iarc) trip level is 60 A.
If this option is not enabled, then the unit requires 380 or 400 Vac
input, and the maximum current and default Iarc trip level is
70 A. For more information about Iarc trip levels, see “Arc Trip
Levels” on page 5-6.
5 V Analog Input If this option has been activated, all User port analog signals
operate at full scale from 0 to 5 V, instead of 0 to 10 V.
Varc Shutdown If this option has been activated, you can select a voltage arc
Enable (Varc) trip level at which the MDXII unit will trigger arc
handling (see “Arc Trip Levels” on page 5-6).
If this option is not active, the software does not respond to
voltage arcs (Varcs), but does respond to primary and secondary
current arcs (Iarcs). This response is different from that available
through the Arc-Check (Cathodic Arc) option. Enabling the Arc-
Check option disables this option.
Voltage HALO If this option has been activated, then with the MDXII unit in
(VHALO) tap 1 and HALO.D asserted from the User port, the VOUT pin of
the User port will read 10 V for an output of 400 V. This scaling
gives you a finer resolution for better control at low output power.
For more information about VHALO, see “VHALO” on
page 5-20,
Also, if the unit is in voltage regulation mode, the LEVELIN.A
and LEVELOUT.A signals from the User port are scaled
accordingly.
18kW Power If this option has been activated, the MDXII unit can deliver
18 kW if pin 8 (CLEAR.D) of the User port is active. The MDXII
power supply can operate at 18 kW for a maximum time on of
10 s and a maximum duty cycle of 80%. See Appendix A of this
manual for more information about the MDXII 18P power
supply.
This option is available on older MDXII 15k stand-alone units
(not MDXII master/slave units or MDXII 30k units).
Varc/Iarc Counters If this option has been activated, User port pin 20 (CTHSW2.D)
Enabled in User Port becomes VARCNT.D. This pin goes high for 200 ms
(Varc count > 0) to indicate the Varc count has been reached.
Also, User port pin 1 (CTHSW1.D) becomes IARCNT.D. Pin 1
goes high for 200 ms (Iarc count > 0) to indicate hat the Iarc
count has been reached. See “Arc Counting Features and Limits”
on page 5-5 for more information.
Tap 1 Low Primary If this option has been activated, the MDXII unit will have a
Current maximum current limit and a default Iarc trip level of 55 A in
tap 1 if the unit is also configured with the VHALO option. This
lower current level lets the unit be more sensitive to changes in
current. For more information about VHALO, see “VHALO” on
page 5-20.
Pinnacle™ Style If this option has been activated, you can use a Pinnacle™-style
Mini-Panel active remote panel, which has fewer push buttons than the
MDXII-style active remote panel.
Tap Select Voltage If this option has been activated, output is limited to a peak value
Limits of 5% above the maximum average voltage rating for the selected
tap.
If this option is not enabled, the peak voltage limit is 1500 V for
taps 1, 2, and 3; or 1600 V for taps 4, 5, and 6. If HALO is active,
then the voltage limit is 2000 V for all taps.
User Port ON/OFF If this option has not been activated, the MDXII unit operates
Priority with the User port on/off signals taking priority in any control
mode.
If this option has been activated, then you can send on and off
signals only from the controlling interface, and the User port
cannot override your selection.
Contactor Closure If this option has been activated, the MDXII contactor wiring
Style scheme is for the MDXII 18P unit CE-style hardware, not the
original MDXII style. See Appendix A of this manual for more
information about the MDXII 18P power supply
1600 V In Tap 6 If this option has been activated, the MDXII unit lets you select
1600 V in voltage regulation as the maximum setpoint rather
than the typical 1250 V in tap 6. Peak voltage limits are not
affected.
Unit Ready for Turn If this option has been activated and the MDXII unit is in analog
On control mode and is experiencing no faults, then the OUTPUT.D
line is asserted to indicate the MDXII unit is ready to be turned
on.
You cannot order this option if you have ordered the Varc/Iarc
Counters Enabled in User Port option. Also, this option is not
available in Fast User port software versions (see Appendix .
LGA This option is available only on MDXII units with an active front
panel.
If this option has been activated, the MDXII unit’s main
contactor opens when you press the STOP switch. This safety
feature is standard on MDXII units that feature the universal
logic card.
18k Test Option If this option has been activated, the MDXII 18P unit’s output
can stay on continuously at 18 kW. Note that this option is used
only as a test feature for laboratory use and is not intended as an
option for field MDXII units.
25 V Voltage Arc If this option has been activated at the same time as Varc
Shutdown Enable, you can adjust the Varc trip level(s) from 25
to 400 V, rather than 50 to 400 V. For more information about
trip levels, see “Arc Trip Levels” on page 5-6.
Two Targets, Two If this option has been activated, you will have access to only
Setpoints two target setpoints, rather than eight. The MDXII unit recalls
the setpoint from the last run using either of two targets. You can
program different setpoints for the two targets. (This option is no
longer available on new units.)
CUSTOM OPTIONS
This section describes the two custom software options in more depth and describes two
orderable custom hardware sets.
Custom Software
We have added the following new serial port commands to support this option:
• Command 67: load setpoint (dual)
• Command 141: dual setpoint request
AUTO-CONTACTOR SOFTWARE
This auto-contactor software version includes a software change that allows the contactor to
close automatically when the supply has no active faults. If a fault occurs, the contactor opens
normally and closes again automatically once the fault is cleared.
Custom Hardware
SETPOINT.D
Normally, User port pin 3 (STPT OK.D) goes low and stays low to indicate when the power
supply is out-of-setpoint. However, with this hardware option, the pin has been modified. If
the output power is turned off, this signal goes low temporarily and then quickly goes high.
This quick low/high indicator from pin 3 applies only to a “power off” situation and not to an
out-of-setpoint condition.
DEKO
With this hardware option, the MDXII 18P unit’s Varc-detection circuit has been modified
(de-sensitized) to lengthen Varc detection time. This means the power supply does not detect
or react to micro arcs during a process. See Appendix A for more information about the
MDXII 18P power supply. For more information, see “Arc Delay and Density” on page 5-6.
3
3 Specifications
PHYSICAL SPECIFICATIONS
ELECTRICAL SPECIFICATIONS
ENVIRONMENTAL SPECIFICATIONS
Note 1.
40°C is the maximum allowed. The average over 24 hours must not exceed 35°C.
Note 2.Non-condensing
Note 3.
Maximum relative humidity when the unit temperature slowly increases, or when the
unit temperature directly increases from -25°C to +30°C
Note 4.Maximum absolute humidity when the unit temperature directly decreases from +70°C
to +15°C
4
4 Installation
DANGER:
Operating and maintenance personnel must have the correct training before setting up
and maintaining high-energy electrical equipment. THIS EQUIPMENT MUST BE
INSTALLED ACCORDING TO APPLICABLE REQUIREMENTS.
SETTING UP
Unpacking
Unpack and inspect your MDXII power supply carefully. Check for obvious physical damage.
If no damage is apparent, proceed to make the connections. If you do see signs of shipping
damage, contact Advanced Energy Industries, Inc. and the carrier immediately. Save the
shipping container for submitting necessary claims to the carrier.
Spacing Requirements
• The clearance between either side of the MDXII unit and the enclosure must be 76 mm
(3 in).
• The clearance between the top of the MDXII unit and the top of the enclosure must be
25 mm (1 in).
• No clearance is required between power supplies.
• The clearance between the rear of the MDXII unit and the enclosure must be 102 mm
(4 in), with adequate ventilation, which is explained on page 4-4.
1” (25 mm)
minimum clearance
to top of rack
0” (0 mm)
minimum clearance
between units
3” (76 mm)
minimum clearance from
enclosure to rack, each side
1250
Figure 4-1. Top and side clearance requirements for MDXII units stacked in a cabinet
Figure 4-2. Rear clearance requirements for MDXII units stacked in a cabinet
Cooling Requirements
The MDXII unit is an air-cooled power supply, so ensuring that adequate ventilation is
provided is important.
For the MDXII unit to be sufficiently cooled, the cabinet must be set up to:
• Bring in coolant air of the correct temperature (35°C maximum)
• Distribute coolant air to the power supplies
• Prevent air exhausted from the cabinet from circulating back and becoming input air
• Exhaust the hot air from the cabinet with minimal airflow restriction
Figure 4-3 on page 4-4 illustrates looking down on the top of an MDXII unit in a cabinet.
The arrows in the illustration show the direction of air flow.
Cabinet Design
You must install the MDXII unit in an interlock cabinet in accordance with IEC, EN, and
national or local requirements.
The following is a synopsis of the principles to follow when designing a cabinet containing a
stack of MDXII power supplies.
Coolant air must be drawn into the cabinet easily; exhaust air must be able to pass unrestricted
out of the cabinet. If some physical constraint restricts the flow of exhaust air out of the
cabinet, we recommend that fans or blowers be mounted so that the hot air is removed from
the cabinet as quickly as possible.
Each MDXII 15k unit dissipates 1650 W at full rated output; each MDXII 30k unit dissipates
twice that amount—3300 W at full rated output. The minimum air flow required by the
MDXII 15k is 150 CFM (cubic feet per minute); the minimum air flow for the MDXII 30k is
300 CFM. The static pressure (inches of water) of the empty cabinet should not exceed
0.1 inches of water at the CFM level obtained by adding together the minimum CFM values
for all the power supplies that will be placed in the cabinet.
For example, if two MDXII 15k units and two MDXII 30k units were to be mounted in a
cabinet (see Figure 4-4 on page 4-6), the minimum CFM requirement would be 900 CFM of
cabinet air volume (150 + 150 + 300 + 300 = 900 CFM). This would result in a total power
dissipation within the cabinet of 9900 W (1650 + 1650 +3300 + 3300 = 9900 W). The
difference in temperature between coolant air and exhaust air would be 20°C.
Input
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DANGER:
RISK OF DEATH OR BODILY INJURY: disconnect all sources of input power and
wait a few minutes before working on this unit or anything connected to it. Internal
components may remain live for 1 min after the MDXII unit has been disconnected.
Grounding
On the MDX 15k, a potential equalization ground stud is located in the upper right-hand
quadrant of the rear panel. On the MDX 30k, this ground stud or terminal is located above and
to the left of the input line cord. The terminal is an M6 stud, indicated on the rear panel by the
symbol . The terminal is connected internally to the main terminal block ground position
indicated by the letters “PE.”
DANGER:
Connect the potential equalization ground stud on the MDXII rear panel to protective
earth-ground before making any other connection.
Note: For optimum performance, ground the chassis stud to the chamber ground.
An “N” on the label plate on the rear of the unit indicates that the neutral is internally
connected. You must connect your neutral wire to this N terminal. If the label plate shows no
“N,” no neutral connection is required. A specific phase rotation is not required on any model.
The input connector on the MDXII 30k unit is a five-position, high-current, pluggable
connector with the same line labels as are on the 15k unit.
Note: For both the MDXII 15k unit and 30k unit, connect input power to terminal block
contacts with stranded wire of a gauge recommended by local building codes.
To connect to the power supply’s input power connector, follow these steps:
DANGER:
Before making any other connection, connect the protective earth terminal to a
protective earth-ground.
1. Strip approximately 60 to 70 mm of the insulation from the end of the power cord.
2. Separate the five wires and strip approximately 10 mm of the insulation from each wire.
3. Ensure that the yellow and green ground wire is approximately 7 mm longer than the other
wires.
4. Remove the cover from the strain relief.
5. Slip the cable through the cord grip.
6. Connect each wire to the correct input terminal block according to the labels.
7. Tighten the cable clamp on the line cord.
8. Slide the drawer back in place and tighten the two drawer screws.
9. Connect the shield to the earth ground stud on the back of the unit.
DANGER:
RISK OF DEATH OR BODILY INJURY: disconnect all sources of input power and
wait a few minutes before working on this unit or anything connected to it. Internal
components may remain live for 1 min after the MDXII unit has been disconnected.
DANGER:
Before making any other connection, connect the protective earth terminal to a
protective earth-ground.
Two styles of output cabling satisfy both of the above optimal conditions: “triax” cabling and
“twinax” cabling (see Figure 4-6 on page 4-11).
Triax cable is much like coax cable, except that triax contains an additional shield that
surrounds an inner shield and center conductor. Twinax cable contains a twisted pair of wires
that are surrounded by an outer shield.
Regardless of which style output cable you use, do not let the outer shield carry load current.
NEGATIVE OUTPUT
The most common output configuration for sputtering applications is negative output
(negative voltage with respect to ground). To connect for negative output, follow these steps:
1. Connect the MDXII unit’s negative terminal on the output connector to the chamber’s
cathode.
2. Connect the positive terminal on the unit’s output connector to the chamber’s common or
ground.
3. Use the ground terminal on the unit’s output connector to terminate only the output cable’s
shield.
CAUTION:
Neither the terminal nor the outer shield of the output cable should carry load current.
Do not use the unit’s ground terminal as a system ground. Do not connect a current-
carrying conductor to the terminal, even if the conductor is a shield element of the
cable.
to chamber
anode
unterminated
to chamber wall
outer shield
POSITIVE OUTPUT
For special applications that require a positive output voltage (positive with respect to ground),
follow these steps:
1. Connect the unit’s positive terminal on the output connector to the load.
2. Connect the negative terminal on the unit’s output connector to the load’s common or
ground.
3. Use the ground terminal on the unit’s output connector to terminate only the output cable’s
shield.
CAUTION:
Neither the terminal nor the outer shield of the output cable should carry load current.
Do not use the unit’s ground terminal as a system ground. Do not connect a current-
carrying conductor to the terminal, even if the conductor is a shield element of the
cable.
to negative
terminal of load
unterminated to positive
terminal of load
outer shield
FLOATING OUTPUT
You can configure the MDXII unit’s output such that neither the negative output terminal or
the positive output terminal has a direct connection to ground (floating output). To connect for
floating output, follow these steps:
1. Connect either the positive or the negative terminal of the unit’s output connector to the
load.
2. Connect the opposite polarity terminal to ground indirectly through a passive component
or a second power source.
To make these connections, do the following:
a. Strip approximately 1 cm of insulation from the end of the cable to expose the three
wires.
b. Feed one wire into each opening according to the labels on the output connector.
c. Tighten the screws on each compression terminal.
WARNING:
For safety compliance, do not allow the maximum voltage at the MDXII unit’s output
connector terminals to exceed ±1600 V with respect to ground when configuring for
floating output. Take into account allowances for ignition voltage (1500 V standard
ignition) when determining safety compliance.
Slave Port
This is a 25-pin, female, subminiature-D connector that provides coordinating information
from the MDXII master unit to the slave unit(s).
Note: This port is not currently functional and may or may not be in your unit.
OTHER CONNECTIONS
Connections for an active remote panel, User port, and serial port are explained in other
chapters.
• See page 6-1 to connect an active remote panel.
• See page 9-1 to connect the User port.
• See page 7-1 to connect the serial port.
DISCONNECTING
DANGER:
Internal components may remain live for 1 min after the MDXII unit has been
disconnected. The rear panel may become too hot to touch when the MDXII unit is
producing output power. Wait for a few minutes after the output has been turned off
before you attempt to disconnect any cables.
Disconnect the MDXII unit from all voltage sources and wait a few minutes before
disconnecting cables for any adjustment, replacement, maintenance, or repair.
5
5 Operation Overview
This chapter provides an overview of the MDXII unit’s operational functions and settings to
give you an understanding of their purpose and use before you perform the operations.
Information on using these functions and settings is described in other parts of this manual, as
follows:
• “Control Panel Interface” on page 6-2
• “User Port Connection” on page 9-1
• “Serial Port Connection” on page 7-1
Table 5-1 on page 5-22 is a reference summary of all the MDXII unit’s functions and settings,
including page numbers where you can find out how to access and change or monitor these
operations from the control panel or through the User port or serial port interfaces.
Also read “First-Time Operation” on page 5-27 before you operate the MDXII unit for the first
time.
OUTPUT REGULATION
You can select the method of output regulation from any active interface—you do not have to
perform this function from the control panel menu.
You can choose one of the three methods of output regulation (power, current, or voltage) at
any time without disturbing the output level.
You can program an output level (up to the unit's maximum rated output) for power, current,
or voltage, depending on the method of output regulation you select. “Output Setpoint Level”
on page 5-3 explains how to program output level. Since setpoint levels are stored in
nonvolatile memory, you can use them to recover from input power interruptions and to ensure
repeatability from run to run.
If you switch from one method of regulation to another while output is on, the corresponding
setpoint level becomes the new setpoint. For example: if the MDXII unit is regulating power,
and the setpoint level is 1500 W (voltage level is 500 V and current level is 3 A), and you
select voltage regulation, the new setpoint will be 500 V.
Power
Select power regulation from the control panel by pressing the POWER switch.
Through the serial port interface, use Command 3 to select power regulation.
Through the User port interface, pin 6 (P REG.D) must be low and pin 5 (I REG.D) must be
high.
Current
Select current regulation from the control panel by pressing the CURRENT switch.
Through the serial port interface, use Command 3 to select current regulation.
Through the User port interface, pin 5 (I REG.D) must be low and pin 6 (PREG.D) must be
high.
Voltage
Select voltage regulation from the control panel by pressing the VOLTAGE switch.
Through the serial port interface, use Command 3 to select voltage regulation.
Through the User port interface, both pin 5 (I REG.D) and pin 6 (P REG.D) must be high.
Limits
This feature limits the maximum power output and the maximum current output. The current
limit is especially useful for limiting current into an arc. When you set a limit, you effectively
prevent your supply's full rated output from being delivered into a low impedance. Available
limits vary, depending on your tap selection (see page 5-8).
Ramp Timer
You can program the amount of time the MDXII unit takes to reach a programmed output
setpoint from the control panel, through the serial port, or through the User port. (You can
program only one ramp at a time through the User port.)
The standard ramp range is 0.6 s to 59 min and 59 s. (If you enter a zero, the ramp time will
be 600 ms.) With the fast ramp/run option, the minimum ramp time is 50 ms. (See page 2-11
for more information on this option.)
You can program up to five different ramp/run combinations (steps) to run consecutively,
which forms one recipe (see “Steps and Recipes” on page 5-4).
Run Timer
You can program the MDXII unit from the control panel or through the serial port to shut off
output after running for a specified amount of time. You cannot set or modify a run time from
the User port.
The standard run-time range is 0 s to 99 hr and 59 min and 59 s. With the fast ramp/run
option, the range starts at 0 ms (beginning after any specified ramp time); resolution is 10 ms
between 0 ms and 59.99 s.
You can program up to five different ramp/run combinations (steps) to run consecutively,
which forms one recipe (see “Steps and Recipes” on page 5-4). Setting a zero run time for any
step causes that step to be the last step. When the MDXII unit reaches a step specifying a zero
run time, it ramps to the setpoint and runs continuously.
Out-of-Setpoint Timer
You can program this timer from the control panel or through the serial port. You cannot
program this timer from the User port, but you can use pin 3 through the User port to see if the
output is equal to the requested setpoint.
Note: Pin 3 functions only if you have set the out-of-setpoint timer. If no time is entered, pin 3
remains high.
This timer controls the amount of time the MDXII unit can produce output that is not equal to
the programmed setpoint level. If the MDXII unit cannot reach or maintain the programmed
level within the specified 0 to 9 min and 59 s (the timer begins after any ramp is completed), it
shuts off output.
TARGET CONTROLS
Target control functions let you choose an operating target, set the length of life for the target,
and monitor target life left while the process is running.
All target control functions are available from the control panel, through the serial port, and
through the User port, except you cannot set target life through the User port.
The target life value is entered and displayed in kilowatt-hours. Enter a value in 10 kWh
increments. The maximum target life setting is 15,000 kWh for an MDXII 15k unit and
30,000 kWh for an MDXII 30k unit. If the end of the target life is reached, the message
“EOTL” (end of target life) displays on the control panel, but output does not shut off. The
only way to clear this message is to press the STOP switch, which also shuts off the output.
You must then either reset that target life counter or select another target before the output will
turn on again.
Note: If the life for the selected target is set to zero, the MDXII unit does not monitor target
life or notify you of the end of target life.
User port pins 1 and 20 tell an external device (such as the Advanced Energy® cathode-
switching box) which of eight targets the MDXII unit has been set to decrement. They reflect
selections made from the control panel, host computer, or User port.
If you switch to analog control from local or host control, the target that is specified through
the User port has priority. For example, if the MDXII unit is in local control and target 2 is
specified from the control panel, and then you switch to analog control, where target 5 is
specified, target 5 becomes the active target. When you switch to another control mode, target
5 is still specified until you request another target. (See page 9-1 for information on selecting
targets from the User port.)
Note: You can switch targets only when output is turned off.
ARC CONTROLS
Arc conditions are detected quickly, and MDXII output is modified quickly to prevent damage
to the target and substrate. Several different control and reporting options are available from
the control panel and through the serial interface.
The arc-handling features provide multi-level suppression and quenching of different types of
arcs. The advantage is reduced target burn-in time and material loss. These features prevent
energy from being delivered into hot spots because they sense a drop in impedance and
immediately shut off the output power. After an arc occurs and power shuts off, these features
prevent repeated arcing by controlling start-up to ensure the hot spots cool before power is
reapplied.
The MDXII unit can easily be configured at the factory to take action when it senses an arc.
Sensitive circuitry shuts off output power if the voltage drops below the limit (50 to 400 V)
you set.
When the arc count limit is reached, the control panel displays either a flashing “Varc” or
“Iarc” or the User port (if set at the factory) alerts you (see page 9-1). You cannot monitor arc
count through the serial port.
The Varc and Iarc count limits can be set at 0 to 999. Selecting 0 disables all arc counting.
Arc-Check™
The optional Arc-Check™ feature is proprietary arc-suppression circuitry that enhances
performance in continuous low-impedance processes such as cathodic arc deposition and
applications that produce conductive flakes. Flakes short out the power supply; these shorts
have some of the characteristics of arcs, which is confusing to some circuitry. Arc-Check was
developed to deal with these arc-like process phenomena, eliminating short-inducing flakes in
applications where keeping the chamber extremely clean is impractical.
You can program this optional feature from the control panel or through the serial port.
Arc-Check waits the amount of time you specify (50 ms to 5 s) and then attempts to
extinguish the “arc” by reducing the MDXII unit's output level to zero. Arc-Check then ramps
the output to the maximum current available with the unit's present tap setting and
programmed limit. If this removes the short, output voltage rises. When the voltage (or power)
reaches the operating conditions of the previously selected method of output regulation, Arc-
Check returns control to that circuitry. If the short is not removed by the time the out-of-
setpoint timer runs out, the MDXII unit turns off output and displays the “Out-of-Setpoint”
message (see page 8-5).
Maximum current is delivered into the short until either the flake is destroyed or output is shut
off. Use the out-of-setpoint timer (page 5-3) to specify how long the MDXII unit can operate
at this level before automatically shutting off.
WARNING:
If you do not set a limit on how long the MDXII unit can drive maximum current into
the flake, the target, and other equipment, the MDXII unit could be damaged.
TAP SETTINGS
The MDXII unit has six internal voltage taps, which let you set six different output ranges for
each unit. Depending on the tap setting, full rated output power can be delivered at voltages
ranging from 315 V to 1250 V.
In general, each MDXII unit leaves the factory set for tap 4, but you can easily select a
different tap from any of the three interfaces.
Table 5-1 on page 5-7 indicates the maximum current that can be produced at each tap and
shows the range of output voltages available at each when the MDX is in voltage regulation.
Tap settings you specify through the User port have priority over tap settings you specify from
the control panel or through the serial port. That is, if you want to set a tap from the control
panel or serial port host computer, you must ensure that User pins 15, 17, and 29 are all
floating high. When the MDXII unit is using a tap setting from the User port, you can view the
active tap setting on the control panel display, but the value does not flash, meaning you
cannot modify the setting.
Before you start a recipe, you must set the tap to whatever tap you selected when you
programmed the recipe. If you fail to do this, the output turns off and the message “Incorrect
Tap Selected” displays. Press the STOP switch to clear the message; then change the tap
setting and start the recipe again.
Power
To calculate the operating currents, use Current = --------------------
Voltage
13.8kW
current for new target ------------------ = 17.7A
780V
Now you have the voltage range and current range for the target over its useful life. The
voltage and current values for the target when it is new and then at EOTL are plotted on Figure
5-1 on page 5-11. Notice that the impedance at both target stages falls within the boundaries of
tap 4.
You can go a step farther and calculate the impedance for the target at both states by using the
calculation Target Impedance = Target Voltage-
-----------------------------------
Target Current
Note: If you are specifying a new power supply, you should perform the above step first with
your current equipment. Note that these measurements are accurate only at the power
level used to make them (here, 13.8 kW). Each target and its associated process
parameters produce a unique environment in which the target impedance changes as the
power changes. Therefore, the impedances must be determined for each target/process
combination.
780V
impedance for new target -------------- = 44Ω
17.7A
The impedances are plotted on Figure 5-2 on page 5-12; once again you can see that both
impedances fall within the boundaries of the range available with tap 4. Therefore, selecting
tap 4 enables the power supply to operate throughout the life of the target at a power setting of
13.8 kW.
Example 2
The power supply in this example is an MDXII 15k stand-alone unit, the method of regulation
is power, and the operating level is 13.8 kW. We have assumed typical operating voltages for
both a new target and a target near the end of its useful life (this value is lower than in
Example 1).
Power
To calculate the operating currents, use Current = --------------------
Voltage
13.8kW
current for new target ------------------ = 17.7A
780V
Now you have the voltage range and current range for the target over its useful life. The
voltage and current values for the target when it is new and then at EOTL have been plotted on
Figure 5-3 on page 5-13. Notice that the EOTL current, 25.1 A, is out of the range of tap 4.
You can go a step farther and calculate the impedance for the target at both stages by using the
calculate Target Impedance = Target Voltage-
-----------------------------------
Target Current
780V
impedance for new target -------------- = 44Ω
17.7A
550V
impedance at EOTL -------------- = 22Ω
25.1A
The impedances are plotted on Figure 5-4 on page 5-14; you can see that the EOTL impedance
is out of the range of tap 4. The MDXII unit’s front panel would indicate that the displayed
setpoint value is not equal to the actual output value. An “Out-Of-Setpoint” (page 8-9) or an
‘Incorrect Tap Selected” (page 8-7) message may appear on the display.
One option for addressing this problem is to change the tap when the maximum current for the
tap is reached. Another option is to reduce the power level until the actual output level is equal
to the setpoint.
A third possibility is to use an MDXII unit model that produces more power. The two
impedances are plotted on Figure 5-5 on page 5-15, which shows the impedance boundaries
for the six taps available on the MDXII 30K unit; you can see that both fit within the tap 4
boundaries.
1254
Shown are the voltage and current values plotted for the Example 1 target both when
it is new and when it is near the end of its useful life (EOTL). The impedances at both
target stages fall within the boundaries of tap 4.
Figure 5-1. Voltage and current values for example 1 target within boundaries of tap 4
1255
Shown are the impedances plotted for the Example 1 target both when
it is new and when it is near the end of its useful life (EOTL).
1256
Shown are the voltage and current values plotted for the Example 2 target both when
it is new and when it is near the end of its useful life (EOTL). The EOTL current is out
of the range of tap 4.
Figure 5-3. Voltage and current values for the example 2 target out of range
1257
Shown are the impedances plotted for the Example 2 target both when
it is new and when it is near the end of its useful life (EOTL).
1258
Shown are the voltage and current values plotted for the Example 2 target both when
it is new and when it is near the end of its useful life (EOTL). In this example, we switched
to an MDXII unit capable of producing 30 kW, so both target stages fall within the
boundaries of tap 4.
Figure 5-5. Voltage and current values for example 2 within boundaries of tap 4
Lock
The lock function provides security for your system. When the control panel is locked, only
people who know the unlock code can get access to the menu and make changes. When
locked, you cannot turn on the MDXII unit from the control panel, and all the settings are
protected from unauthorized changes.
The MDXII unit is shipped without an unlock code, so you must enter one before you can lock
the control panel and be able to unlock it later. If you try to use the lock function before you
enter a code, the message “Enter code first” displays and you are returned to the output display
screen.
You can set the code and lock the panel only through the control panel. See “Locking the
Control Panel” on page 6-12 for step-by-step instructions. You can request the lock code
through the serial port. You cannot use the lock function through the User port.
Program Source
The program source function specifies whether the source of the parameters that the MDXII
unit uses is internal or external.
If you set program source to internal, the MDXII unit uses the setpoint and regulation
information for output regulation mode, setpoints, and ramp/run times that you entered either
from the control panel or through the serial port and which are stored internally in nonvolatile
memory. Also, the MDXII unit uses either 1) a ramp/run recipe (if one has been programmed,
see page 5-4) or 2) a manually set value (if the number of recipe steps is set to zero). If the
source is internal and no recipe is active, the “Setpoint = nn.nn” line on the output display
screen is preceded by “Int” (“Int Setpoint = nn.nn”).
If you set the program source to external, the MDXII unit uses the setpoint, regulation, and
ramp time that you specify externally through pins 27, 5 or 6, and 26 (respectively) on the
User port.
Note: If the source is external, you will not be able to set a run time, because that feature is
not available on the User port connector; therefore the unit will run until you turn it off.
If the source is external (and no recipe is active), the “Setpoint = nn.nn” line on the output
display screen will be preceded by “Ext” (“Ext Setpoint = nn.nn”). If a recipe is active, the
message “Timers Active’ will be displayed instead, indicating that you cannot change the
setpoint.
When the MDXII unit is set to operate in local or host mode, the default program source for its
parameters, setpoints, and ramp/run sequences is internal.
When the MDXII unit is set to operate in analog mode, the default program source for its
setpoints and ramp times is external.
You can change the program source and even set a different source for each of the three
operating modes (host, local, analog). Thus it is possible to:
• Set the program source to internal from the control panel or through the serial port
interface, which gives control of the regulation mode, setpoints, and ramp/run sequences
to the control panel or serial port) and
• Turn on the output from the User port.
Or you can:
• Set the program source to external from the control panel or through the serial port
interface, which gives control of the regulation mode, setpoint, and ramp time to the User
port) and
• Turn on the output from the control panel or serial port.
Note: You cannot specify program source from the User port.
Clicks
The clicks function specifies the “encoder rate” (number of counts per click) for the MODIFY
knob, which increases or decreases the rate of change when you turn the knob. You can
program this function only from the control panel (see page 6-14).
The default is 10, but you can enter any number from 1 to 20. If you want the displayed value
(setpoint, for example) to change slowly as you turn the knob, set the number of counts per
click to 1. If you want the value to change quickly, set the number of counts to 20.
Transductor Calibration
The purpose of the transductor calibration function is to calibrate the transductor by zeroing
the “Amps” reading. You can program this function from the control panel and through the
serial port.
FEATURES/OPTIONS
ASCII
If your MDXII unit has the ASCII host communications option enabled (through an active
panel or a serial port), serial communications will use ASCII characters rather than binary
values. This option provides for systems that require packets to end with CR (ASCII 0Dh) or
LF (ASCII 0Ah) characters. The primary drawback is that the resulting packets will be twice
as long as those using binary values.
The communications protocol stays the same, except that all the binary values are converted to
two hex digits.
Note: ACK and NAK are not translated, and the following characters are ignored: ‘0’ to ‘9’,
‘A’ to ‘F’, ‘a’ to ‘f’. This allows any necessary control characters, such as DR or LF to
be added.
The following example shows both the binary and ASCII versions of the transaction of
Command 198, request software version, (see page 7-55).
Binary:
Request from the host:
08h C6h CEh
Header Comman Checksu
ASCII:
Request from the host:
30h 38h 43h 36h 43h 45h 0D 0A
‘0’ ‘8’ ‘C’ ‘6’ ‘C’ ‘5’ CR LF
Header Command Checksum (Optional)
HALO
The HALO (high accuracy at low output levels) feature reduces the full-scale output by one-
tenth so that you can achieve greater accuracy at the lower output levels. When you need a
low-power or low-current output of 0 to 1.5 kW (or 0 to 4.8 A) or 0 to 3 kW (or 9.6 A), HALO
allows you to specify a setpoint within those ranges by providing tighter output regulation.
You can use HALO only when in current or power regulation mode. Voltage remains
unchanged.
Note: If you specify a setpoint from the control panel that is greater than the maximum
HALO range (1.5 kW or 4.8 A for an MDXII 15k unit; 3 kW or 9.6 A from an MDXII
30k unit) and then select HALO from the menu, the setpoint lowers automatically to the
maximum power (or current) level available when HALO is active (1.5 kW or 4.8 A; 3
kW or 9.6 A).
You can use HALO only in current and power regulation modes. Voltage remains
unchanged. You can enable the HALO feature from a control panel and through the serial port
or User port interfaces.
Note: A HALO signal assertion from the User port overrides selections from other control
modes, which allows the MDXII unit to be run from the User port and serial port
simultaneously.
If you select the HALO feature at the time you program a recipe, you must turn on HALO
before you run that recipe. If you turn off HALO and you start this recipe, the output turns off
and the message “Halo Mode Incorrect” displays. Press the STOP switch to clear the message;
then turn on HALO and start the recipe again.
The opposite is also true. If HALO is turned off when you program the recipe, you must turn
it off before the recipe begins running.
Note: The HALO and VHALO features are independent and cannot be available in the same
unit.
VHALO
When the VHALO software option is active on your unit, you can invoke VHALO only
through the User port when the MDXII unit is in tap 1 and User port pin 33 (HALO.D) is
asserted. When these conditions are true, User port pin 23 (VOUT.A), pin 27 (LEVEL IN.A),
and pin 31 (LEVEL OUT.A) are scaled 0 to 10 V, which represents 0 to 400 V.
Note: The HALO and VHALO features are independent and cannot be available in the same
unit.
MDXII units that support VHALO also have one additional Varc trip level available if the
unit also features the Varc shutdown enable software option. This second trip level is applied
only when the user is in tap 1 and VHALO is enabled. The addition of the tap 1 Varc trip
level lets you switch between taps and have separate voltage trip levels without having to
reload the voltage trip level with each tap change. This function is useful in situations where
the User port is controlling the tap selection.
Note: If your unit also features the Tap 1 low primary current software option, then with
VHALO enabled and the unit in tap1, the Iarc trip level is 55 A. (The maximum current
limit also is 55 A.)
Contactor Hold
To help prolong the life of the main and soft-start contactors, the MDXII unit has a contactor
hold feature. If your process run times are short, you may want to specify that the contactors
stay energized after the first ”on” cycle. With this feature, when User pin 16 (CHOLD.D) is
low, the contactors remain closed after the first time the dc bus is energized, regardless of
whether output is being produced or not. Holding User pin 16 low enables contactor hold
regardless of the selected mode of control (local, host, or analog).
You must turn off output power to open the contactors. They stay closed until 1) contactor
hold is inactivated and 2) the output is turned off. If contactor hold is active when you turn
off the output and then you deactivate contactor hold, you must turn the output on and then
off to trigger the contactors to open.
If the MDXII unit is in local control and User pin 16 is high, contactor hold is controlled
from the control panel. If the MDXII unit is in host mode and User pin 16 is high, contactor
hold is controlled through the serial port.
Note: One custom software version contains an auto contactor feature. For more information
about this feature, see “Auto-Contactor Software” on page 2-24.
SERVICE FUNCTIONS
System Statistics
The MDXII unit keeps track of some numbers that are important to AE Customer Support.
These numbers identify bus faults, which are momentary power faults that can be used to help
verify line-power problems. You can obtain the following system statistics from the control
panel or through the serial port.
• How many times the MDXII unit’s (input power) has been turned on
• How many times an overtemperature fault occurred
• How many times output has been turned on
• The amount of time (in seconds) that input power was turned on, but the MDXII unit was
not producing output
• The amount of time (in seconds) that the MDXII unit was producing output
• The total amount of energy output delivered by the MDXII unit
• Momentary power failure events
• Bus fault failures per target life
Note: Both of the counters requested by commands 207 and 208 through the serial port
indicate events per target life. If you reset a new target or reload a target life, the
counters are reset. The purpose of these counters is to help you identify line power
problems in your system.
Memo Function
Via Command 127 through the serial port or the memo function from the control panel, you
can input up to a 40 character text string, which is stored in nonvolatile memory. You can use
this text string to store information that is specific to your particular unit.
Clear NOVRAM
Use this function from the control panel to clear nonvolatile memory and return stored
parameters to a default state.
Check NOVRAM
Use this diagnostic function from the control panel to check values stored in nonvolatile
memory to see whether they exceed system limits. If a value does exceed system limits, the
location of the value is returned when you use this function.
FIRST-TIME OPERATION
This procedure assumes that a control panel has operational control (local control mode).
1. Ensure that the necessary external inputs are supplied (refer to signal descriptions
beginning on page 9-7) or that the “cheater plug” is installed on the User port connector
on the rear of the MDXII unit (see Figure 9-6 on page 9-5).
2. Connect the output connector (see details on page 4-10).
3. Turn on the circuit breaker at the rear of the unit. The output display screen will appear on
the display and the following LEDs will light:
– STOP
– One of the control modes (host, local, or analog)
– One of the methods of regulation (power, voltage, or current).
4. If the control panel does not have control, select the local control mode by pressing the
LOCAL switch.
5. Select a method of output regulation by pressing the POWER, VOLTAGE, or
CURRENT switch.
6. Set an output level (see page 5-3): At the output display screen, turn the MODIFY knob
to select an output setpoint.
DANGER:
Step 7 on page 5-27 will result in high voltage levels at the output connector. Take
appropriate steps to prevent electrical shock.
7. Press the START switch. The START LED flashes for about 3 s as the internal circuitry
is being initialized, then the main contactor closes. The output should reach the
programmed setpoint level in about 600 ms (50ms in units with fast ramp/run).
8. Press the STOP switch any time to turn off output.
WARNING:
You must give the power supply the OFF command before turning off the input line
power or the rear circuit breaker.
6
Panel Connection, Controls and
6
Indicators
ACTIVE REMOTE PANEL CONNECTION
DANGER:
RISK OF DEATH OR BODILY INJURY: disconnect all sources of input power and
wait a few minutes before working on this unit or anything connected to it. Internal
components may remain live for 1 min after the MDXII unit has been disconnected.
CAUTION:
Do not connect an active remote panel if your MDXII unit has an integrated active front
panel. An MDXII unit with an active front panel (that is, a control panel that is an
integrated part of the unit) will not function correctly if an active remote panel is
connected to the DISPLAY port.
WARNING:
To properly initialize the active remote panel, you must connect when the MDXII unit is
off (no live power). This connector was designed for connecting an Advanced Energy®
active remote panel only. The communications format between Advanced Energy®
display panels and the MDXII unit is different than the serial port communications
format. An incorrect connection could damage the MDXII unit.
You can connect an Advanced Energy® active remote panel to your MDXII unit with a 9-pin,
male, subminiature-D connector shown in Figure 6-1 on page 6-1. The corresponding port on
the MDXII rear panel is labeled DISPLAY.
CAUTION:
If the User port won't be used, you must leave the cheater plug attached to the MDXII
unit.
START Turns on output power if the control panel has control of the on/off
function and all interlock conditions are satisfied.
STOP Turns off output power, no matter which interface is currently
controlling the MDXII unit.
Control Switches
Use the following switches to select the controlling interface. “Unit Control Hierarchy” on
page 2-4 describes the default control hierarchy for the MDXII unit.
HOST Gives control to the host computer through the serial port no matter
which interface is currently controlling the MDXII unit. If the serial
port already has control or output is turned on, this switch is ignored.
LOCAL Takes back control from the serial port or User port and gives it to the
control panel. If the control panel already has control or output is
turned on, this switch is ignored.
ANALOG Gives control to the analog controller through the User port no matter
which interface is currently controlling the MDXII unit. If the User
port already has control or output is turned on, this switch is ignored.
Regulation Switches
Use these switches to select the method of output regulation when the control panel has
control.
Two-Line Display
When you first power up, the top line of the two-line display shows the actual output level in
volts, amperes, and kilowatts. The bottom line displays the message “Timers Active” if one or
more ramp\run steps have been programmed (see page 6-6). If “Setpoint = nn.nn” is displayed,
you can enter a setpoint directly.
Use the two-line display to view menu selections, parameters, and messages.
Soft Keys
Use the soft keys to select whichever menu functions are shown immediately above them on
the two-line display. Chapter 5 provides an operational overview of all the MDXII functions.
“Control Panel Controls” on page 6-3 explains how to perform these operations from the
MDXII control panel.
Modify Knob
Use the MODIFY knob with the soft keys to make selections and modify values that appear
on the two-line display.
Use the MODIFY knob and the five unlabeled soft keys that are directly below the display to
select parameters and modify values. To have full access to the menu, the MDXII unit must
be in local control mode (the LOCAL LED will be lit).
Note: When the MDXII unit is in analog or serial mode, you can view all the menu items, but
you cannot modify any of the items or lock the unit. If you switch the MDXII unit to
analog mode while you are viewing an item in the menu, you are returned to the output
display screen immediately.
Press any of the soft keys when the output display screen is displayed to cause the top-level
menu to appear. The top-level menu contains five menu selections, which are shown in Figure
6-2 on page 6-4. Generally, pressing a top-level soft key causes a second level of menu
choices to display (for example, POWER and CURRENT display if you press the LIMITS soft
key).
As you press soft keys and move through the menu levels, the top line of the output display
screen usually continues to display until the last choice in that menu; then the top line is
replaced with information pertaining to the selection you can make. The three exceptions that
always display the first line are the analog input filtering feature, the transductor
calibration feature, and the arc density feature.
A parameter flashes if it can be modified; make such modifications with the MODIFY knob.
Pressing the ENTER soft key enters the modification into nonvolatile memory. You can press
the MODIFY knob at any time to cancel what you are doing (leave the parameter(s)
unchanged) and return to the output display screen.
If a fault exists, the soft keys are locked out until you clear the fault. Fault messages are listed
beginning on page 8-5.
Figure 6-3 on page 6-5 is a graphic representation of the control panel menu tree.
CURRENT
LIMITS
POWER
DELAY
VARCS
DENSITY
IARCS
ARC CHECK ACTIVE?
ARC ARC CHECK
ARC CHECK HOLD-OFF
VARCS
COUNT
IARCS
VHALO UNIT ON
ARC TL VARCS VARC BUS FAULT
IARCS OV TEMP
EVENTS
POWER FLT
TIME
OUTPUT ON
kWh
STATS IDLE
CALIB RUN
S/W REV
FPSTAT
SERVICE CKSUM
MFSTAT XDCAL
DEBUG
PROFI PCALZ
MORE
MORE PCALG
TAPSET
MORE LOCK CHKNVF NB. SSO
FILTER CLRNVF SS ONLY
CONFIG PGM SRC MEMO
HPTOV
LOCK UNIT
CLICKS
SET CODE
ASCII
HOST LOCAL ANALOG
OPTIONS HALO
C HOLD
Figure 6-3. Control panel menu tree
The next several pages contain step-by-step instructions on how to access and perform
operational functions from the MDXII control panel menu. These instructions are organized
by the first-level menu functions illustrated in Figure 6-2 on page 6-4.
8. Either set the RUN 1 time or press the ENTER soft key (see “Run Timer” on page 5-2).
Pressing the ENTER soft key at the final timer value automatically returns you to the
output display screen.
Note: Press the MODIFY knob at any time to return to the output display screen; note that
this disables the recipe (sets the number of steps to zero).
ARC ⇒ DENSITY
To keep track of how many voltage or current arcs were detected in the previous second,
follow these steps:
1. At the top-level menu, press the ARC soft key.
2. Press the DENSITY soft key.
3. Press either the VARCS or IARCS soft key.
4. View the number of arcs per second.
5. Press the MODIFY knob to return to the output display screen.
PROGRAMMING ARC-CHECK
See “Arc-Check™” on page 5-6 for a description of this function.
ARC ⇒ ARC CHECK
To select the amount of time that Arc-Check waits before attempting to extinguish an arc,
follow these steps:
1. At the top-level menu, press the ARC soft key.
2. Press the ARC CHECK soft key.
3. Select YES or NO by turning the MODIFY knob.
a. If you select NO, press the ENTER soft key to be returned to the output display screen.
b. If you select YES, use the MODIFY knob to select the amount of time that Arc-Check
waits before attempting to extinguish an arc (50 ms to 5 s).
4. Press the ENTER soft key; you are returned to the output display screen automatically.
SPECIFYING CLICKS
See “Clicks” on page 5-17 for a description of this function
MORE ⇒ CONFIG ⇒CLICKS
To increase or decrease the rate of change when you turn the MODIFY knob, follow these
steps:
1. At the top-level menu, press the MORE soft key.
2. Press the CONFIG soft key.
3. Press the CLICKS soft key.
4. Use the MODIFY knob to adjust the number of counts per click (1 through 20).
5. Press the ENTER soft key; you are returned to the output display screen.
To see how many times an overtemperature fault occurred, follow these steps:
1. At the top-level menu, press the MORE soft key.
2. Press the SERVICE soft key.
3. Press the STATS soft key.
4. Press the EVENTS soft key.
5. Press the OV TEMP soft key
6. Press the MODIFY knob to return to the output display screen.
To see how many times output has been turned on, follow these steps:
1. At the top-level menu, press the MORE soft key.
2. Press the SERVICE soft key.
3. Press the STATS soft key.
4. Press the EVENTS soft key.
5. Press the OUTPUT ON soft key.
6. Press the MODIFY knob to return to the output display screen.
To see the amount of time, in seconds, that input power was turned on, but the MDXII unit
was not producing output, follow these steps:
1. At the top-level menu, press the MORE soft key.
2. Press the SERVICE soft key.
3. Press the STATS soft key.
4. Press the TIME soft key.
5. Press the IDLE soft key.
6. Press the MODIFY knob to return to the output display screen.
To see the amount of time, in seconds, that the MDXII unit was producing output, follow these
steps:
1. At the top-level menu, press the MORE soft key.
2. Press the SERVICE soft key.
3. Press the STATS soft key.
4. Press the TIME soft key.
5. Press the RUN soft key.
6. Press the MODIFY knob to return to the output display screen.
PANEL INDICATORS
PANEL ILLUSTRATIONS
The graphics in this section illustrate the various panels available for the MDXII 15k and
MDXII 30k units.
Figure 6-4. Front view of 15k stand-alone unit with active front panel
Figure 6-5. Front view of 15k stand-alone unit with passive front panel
Figure 6-7. Front view of 30k stand-along (or master) unit with active front panel
Figure 6-8. Front view of 30k unit with passive front panel
Figure 6-9. Rear view of 30k stand-alone (or master) unit (CE model shown)
7
Serial Port Connection, Controls
7
and Indicators
SERIAL PORT CONNECTION
The serial port interface consists of a host computer attached to the rear panel of the MDXII
unit through a 9-pin female, subminiature-D connector (see Figure 7-1 on page 7-2) next to an
eight-switch DIP. Advanced Energy™ recommends that you use shielded cables for
connecting the serial port.
Table 7-1 on page 7-2 provides information about each pin.
CAUTION:
If the User port won't be used, you must leave the cheater plug attached to the MDXII
unit.
MDXII units are shipped from the factory configured for either an AE Bus RS-232 or RS-485
protocol operation or a Profibus RS-485 protocol operation. “Configuration” on page 7-3
explains how an MDXII unit is configured for either protocol.
Pin Descriptions
Configuration
DANGER:
RISK OF DEATH OR BODILY INJURY: disconnect all sources of input power and
wait a few minutes before working on this unit or anything connected to it. Internal
components may remain live for 1 min after the MDXII unit has been disconnected.
CAUTION:
Ensure that you take standard precautionary procedures against electrostatic discharge.
The top of the logic card (if viewed from the front and slightly right of center) has four
jumpers, a switch, and a ribbon cable, which are used to configure the MDXII unit for either
an AE Bus or a Profibus operation.
Card Cage
1252
The jumpers are labeled P2, P3, P4, and P5. The red switch, labeled S1, is located just to the
right of the jumpers. The ribbon cable, which connects the logic card at P6 or P9 to the back of
the MDXII unit, is located in the upper right corner of the logic card.
5. Return the PCB to the card cage, and replace the safety shields and cover.
Terminating AE Bus
1. Disconnect all sources of input power from the MDXII unit and wait a few minutes before
attempting to set the jumpers.
2. Remove the top cover and the clear plastic safety shields.
3. Pull up on the end of each extractor lever; grasp both levers and use them to remove the
logic PCB from the card cage (the logic PCB is the board closest to the outside of the unit).
4. If RS-485 is used and the MDXII unit is the last node on the multidrop cable, jumper
pins 2 and 3 on headers P10 and P11 (furthest from the silk-screen “TERM”). Otherwise,
leave the jumpers on pins 1 and 2.
5. Return the PCB to the card cage and replace the safety shields and cover.
AE Bus Interface
Use the first five mini-switches (A0 to A4) to specify the “address” of an MDXII unit, which a
host computer must include in the message packet it sends. Each MDXII unit in a network
must have a unique address.
Use the next two mini-switches (BR0 and BR1) to specify the serial port's baud rate. The last
mini-switch is unassigned.
COMMUNICATIONS PROTOCOL
The AE Bus communications protocol uses pure binary data (nothing is coded into ASCII, for
example), and is designed for multi-drop communications networks (networks that contain
two or more nodes). The host computer is always the master unit. Slave units transmit only
after receiving a message packet from the master, and then only to the master. The
transmission parameters are as follows:
• RS-232 or RS-485 transmission standard
• Four baud rates (selected by DIP switch):
– RS-232: 1200, 4800, 9600, 19,200
– RS-485: 9600, 19,200, 38,400, 57,600
• Odd parity
• 1 start bit, 8 data bits, one stop bit
The convention used in the MDXII unit is that a low-order byte is transmitted before higher
order bytes.
The timeout period for the MDXII unit is adjustable from 0.02 s to 5 s (see “Serial Port
Timeout Value” on page 5-17). If a transmission delay occurs, and more than the specified
time elapses between bytes, the unit will reset and begin looking for a new packet.
The host computer must finish a transaction with an MDXII unit before it initiates another
transaction (either with the same unit or with any other MDXII unit). If you have selected RS-
232, the MDXII unit sends data through Serial pin 2 (TXD); this pin must be connected to
pin 2 (RXD) on the host computer's connector. The MDXII unit receives data through Serial
pin 3 (RXD); this pin must be connected to pin 3 (TXD) on the host computer's connector.
If you are using RS-485, the MDXII unit Serial pin 6 (TR-) and Serial pin 7 (TR+) are the
transceiver lines.
Figure 7-5 on page 7-9 shows the organization of these data fields in the AE Bus message
packet. The subsequent paragraphs describe each data field.
7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0
Header
This field contains two pieces of information: the first five bits contain the address, and the last
three bits contain the length of the Data field. If the message packet originates with the host
computer, the address specifies the packet's destination (to an MDXII unit, for example). If the
packet is going to the host, the address specifies the packet's origin (from the MDXII unit).
The address section of the Header field is 5 bits long, which allows a total of 32 distinct
addresses. Address 0 (zero) is reserved for the network broadcast address; when this address is
used in a host-originated packet, all units receive the packet (but will not respond).
The remaining 3 bits tell the receiving unit how long the Data field is so that the receiving unit
can determine when the entire message has been received.
Note: The value in these bits should refer only to the number of actual data bytes. Do not
include the checksum byte when calculating the value for these bits.
The Header field (address and length) must be at the beginning of the message packet so that
the receiving unit can compute the length of the packet after receiving the first byte.
Optional
This field supplements the Header field. The Optional field contains a value only when the
length bits in the Header field contain a value of 7. (A value of 7 indicates that the Data field
contains more than 6 bytes of data.) Under those circumstances, the Optional field contains a
one-byte value (between 7 and 255) indicating the actual length of the Data field.
Command
This field contains a one-byte value: 00h to FFh (0 to 255). If the message packet originates
with the host computer, this value specifies the purpose of the message packet. If the message
originates with the MDXII unit, the value specifies the command to which it is responding.
See Table 7-9 on page 7-20 for a complete list of serial port commands.
Checksum
This one-byte field is the last one in the packet. The content depends on the value of each of
the preceding fields. The transmitting unit determines this value by accumulating the XOR
(exclusive-or) of all bytes of the packet up to, but not including, the checksum byte. The
receiving unit accumulates the XOR of all bytes of the packet, including the checksum. If the
result is zero, the packet has likely been received intact.
Only after the checksum of a message packet is validated will the MDXII unit act on the
message (which consists of the contents of the command and, if appropriate, the data fields).
First, the host computer sends a message packet to the MDXII unit. The packet contains one of
the following:
• A command that requests data or status information
• A command and data that change a parameter setting
• An executable command
Once the MDXII unit receives the message packet, the MDXII unit verifies that the message is
intended for it and not for another unit in the network. At this time it also analyzes the
checksum to verify that the message was received correctly.
If the address is incorrect (that is, if the message was not intended for the MDXII unit that
received it), the MDXII unit does not respond to the host; the MDXII unit resets and resumes
waiting for a message addressed to it. If the address is correct but the sum of the bytes in the
packet (including the checksum) is not zero, the MDXII unit sends a negative
acknowledgment (NAK) with a hex code of 15h to the host. If the address is correct and the
message is intact, the MDXII unit sends an acknowledgment (ACK) with a hex code 06h to
the host.
If the MDXII unit receives a request for data or status information, it gathers and sends the
requested information. Otherwise, it evaluates the incoming command and sends a message
packet that contains a 1-byte data value (CSR code) to the host (see Table 7-10 on page 7-57).
CSR code 0 is sent when the command has been accepted.
If the host receives a NAK from the MDXII unit, it either re-transmits the packet or does
whatever else it has been programmed to do in this situation. If the host receives an ACK, it
waits for the requested data or status information or for the CSR code that tells it whether or
not the new parameter was accepted. If the host receives no response within a reasonable
period (usually 1 s), it takes whatever action it has been programmed to take.
Meanwhile, the MDXII unit has prepared a message packet with the requested information or
appropriate CSR code, which it then transmits to the host. The host determines by means of
the checksum if the message is complete. If the host detects an error in the transmission (by
using the Checksum), it can request the packet be sent again by transmitting a NAK.
If the MDXII unit receives an ACK, it returns to the normal waiting state. If the MDXII unit
receives a NAK, it re-transmits the message packet. The MDXII unit continues to re-transmit
in response to NAK transmissions until the host stops the cycle. If the MDXII unit receives no
response, it assumes an ACK and returns to the waiting state.
Profibus Interface
To enter the unit’s address, set the switch positions for binary representation, starting with the
switch on the left and proceeding to the right (descending order of significance). The switches
are numbered 1 through 8. Switch 1 is the most significant bit, and switch 8 is the least
significant bit.
Placing a switch in the ‘up’ position is the same as indicating “1” binary. The following
example demonstrates switch settings for an address of 12 (decimal):
0000 1100 = 0x0Ch = 12
The zeros indicate the S1 switch is clicked opposite to the “on” side of the DIP, which is the
“down” position.
Note: You cannot use the Profibus host computer to change the MDXII unit’s address.
COMMUNICATIONS PROTOCOL
The Profibus interface consists of a download packet (“outbytes”) and an upload packet
(“inbytes”).
Response times are very fast, so requested information is available approximately every
50 ms. A download packet (“outbytes”) has high priority for the AE Profibus and is processed
immediately. The upload packet (“inbytes”) has lower priority and is updated every 50 ms.
In the packet, bytes 1, 2, and 3 comprise the “data field” and contain information defined by
the command. Note that when the information extends over more than one byte, the packet
sends the least significant byte (LSB) before the most significant byte (MSB).
Bytes 0 and 1 of the upload packet contain information about the unit; this information appears
as status bits (or status “flags”). gives a definition of these status bits.
In the first status byte 0, bit 5 (the active toggle bit) indicates, in general, the status of the
Profibus interface. After the unit has powered up, this bit’s continuous change indicates that
the Profibus interface is ready. During operation, a cessation of this change indicates that a
communication problem exists.
In the upload packet, bytes 8, 9, 10, 11, and 12 comprise the “data field” and contain
information defined by byte 13, the data field definition byte. Note that when the data extends
over more than one byte, the Profibus sends the least significant byte (LSB) before the most
significant byte (MSB). Byte 13 references the requesting command (>127).
The AE Profibus does not support the following functions: address changing, freeze/unfreeze
modes, or sync modes via the Master. For a complete listing of available supply functions, see
Table 7-9 on page 7-20.
TERMINATING PROFIBUS
Profibus cables have termination resistors inside the cable connector itself. If the MDXII unit
is the last node on the Profibus, switch these termination resistors “on” in the cable connector
and ensure the termination resistors on the logic card are not jumpered.
Most of these commands require that the unit be in serial control mode. Exceptions are noted
in the “Description” column of the table.
Some commands are available only through an AE Bus protocol, some are available only
through a Profibus protocol, and many are available through both. The checkmarks (√) in
columns 2 and 3 in the table indicate through which protocol(s) a command is available.
Columns 5 and 6 in the table indicate how many AE Bus or Profibus data bytes are needed to
support the command. Columns 7 and 8 indicate how many AE Bus or Profibus data bytes are
needed to support the returned response to the command.
0 = target life is
inactive
Non-zero = target life is
active
Read back this value with
Command 163.
2 = serial port
4 = User port
6 = a control panel.
Read back this value with
Command 155.
15 √ √ Specifies how long the 2 2 1 0
out-of- MDXII unit can produce
setpoint output that is not equal to the
timer programmed setpoint level;
accepts a value of 0 to 599 s.
Read back this value with
Command 184.
16 √ √ Specifies a percentage that 1 1 1 0
deviation out the MDXII unit can be out of
of setpoint setpoint before it starts the
out-of-setpoint timer;
accepts a value of 1 to 99%.
Read back this value with
Command 185.
AE Bus Indicators
Profibus Indicators
PROFIBUS-SPECIFIC ERRORS
In the event of a Profibus error, the unit turns output power off and displays the appropriate
error message (see page 8-10). All Profibus errors are treated as “explicit clear” type faults;
thus, you must send Command 119 (the “master reset” command) in the next download packet
to clear them. Once all faults have been cleared, the unit is ready to continue operation.
We recommend sending this command upon the startup of Profibus communications so that
any existing fault indications will be cleared.
When you request the Profibus debug screen, the panel display shows two rows of
hexadecimal numbers. To better understand this information, please examine the following
example.
6 12 4 0 10 0 0 0 0 0
0 0 1 60 0 0 0 8F 4 A3 1D
In the example, the first four bytes in sequence (left to right) represent the last recorded
download bytes (from the Profibus master). (To better understand download bytes, see
“Profibus Download Packet” on page 7-14). In this example, the Profibus master has set
setpoint to a value of 1042 (Command 6: Setpoint = 0412h).
Following the download bytes information are the last recorded upload bytes; these values
comprise the remaining six bytes on the first line and the first eight bytes on the second line.
(To better understand upload bytes, see “Profibus Upload Packet” on page 7-15). In this
example, the Profibus master has requested the setting for the user current limit, which is
15.37 A.
The remaining three bytes on the second line (in the lower, right corner) indicate the unit
address (see page 7-13), the first configuration byte, and the second configuration byte,
respectively. For this example, the unit thinks that it is address 0x04 and that it is configured to
receive 4 download bytes from the Profibus master (0xA3) and to send 14 upload bytes to the
master (0x1D).
Note: Hexadecimal numbers that start with a zero are shortened to the second number only;
thus “0x04” becomes “4”.
8
Troubleshooting and Customer
8
Support
BEFORE YOU CALL AE CUSTOMER SUPPORT
If you believe you are experiencing a problem with your MDXII unit, first refer to the
information in this section to help you troubleshoot problems. This section provides
1) troubleshooting checklists and 2) lists of messages or other indicators of problems with
suggested actions to take.
If this information does not provide an adequate solution or if your problem continues, please
refer to “AE Customer Support” on page 8-14 for information on how to contact a Customer
Support representative.
Troubleshooting Checklists
DANGER:
Operating and maintenance personnel must have the correct training before setting up,
maintaining, or troubleshooting high-energy electrical equipment. Potentially lethal
voltages may cause serious personal injury or damage to equipment. Ensure that proper
safety precautions are taken.
FIRST CHECK
DANGER:
RISK OF DEATH OR BODILY INJURY: disconnect all sources of input power and
wait a few minutes before working on this unit or anything connected to it. Internal
components may remain live for 1 min after the MDXII unit has been disconnected.
When you believe you are experiencing a problem with your MDXII unit, first check for
obvious signs of damage to the unit, cables, and connectors. If you see signs of damage, power
off the unit and call AE Customer Support (see page 8-14). If no obvious signs of damage are
evident, proceed with the following checks.
3. Ensure that the unit is connected to its input power source (see “Input Power Connection”
on page 4-7).
4. Ensure that input power meets specifications (see “Specifications” on page 3-1).
5. Ensure that no system-related circuit breakers are tripped.
6. Ensure that all unit connectors are installed correctly and fastened tightly.
7. If your unit has a serial port, check the position of the DIP switches against the addressing
information (see “Addresses and Baud Rates” on page 7-5).
Status Indicators
Several types of status indicators let you monitor potential problem conditions that can cause
the MDXII unit to shut off output or prevent output from being turned on.
WARNING:
To avoid electrical shock, ensure that you use extreme caution when you make voltage
measurements.
AE CUSTOMER SUPPORT
Please contact one of the following offices if you have questions:
WARRANTY
Advanced Energy® (AE) products are warranted to be free from failures due to defects in
material and workmanship for 12 months after they are shipped from the factory (please see
warranty statement below, for details).
In order to claim shipping or handling damage, you must inspect the delivered goods and
report such damage to AE within 30 days of your receipt of the goods. Please note that failing
to report any damage within this period is the same as acknowledging that the goods were
received undamaged.
For a warranty claim to be valid, it must:
• Be made within the applicable warranty period
• Include the product serial number and a full description of the circumstances giving rise
to the claim
• Have been assigned a return material authorization number (see below) by AE Customer
Support
All warranty work will be performed at an authorized AE service center (see list of contacts at
the beginning of this chapter). You are responsible for obtaining authorization (see details
below) to return any defective units, prepaying the freight costs, and ensuring that the units are
returned to an authorized AE service center. AE will return the repaired unit (freight prepaid)
to you by second-day air shipment (or ground carrier for local returns); repair parts and labor
will be provided free of charge. Whoever ships the unit (either you or AE) is responsible for
properly packaging and adequately insuring the unit.
Authorized Returns
Before returning any product for repair and/or adjustment, call AE Customer Support and
discuss the problem with them. Be prepared to give them the model number and serial number
of the unit as well as the reason for the proposed return. This consultation call will allow
Customer Support to determine if the unit must actually be returned for the problem to be
corrected. Such technical consultation is always available at no charge.
Units that are returned without authorization from AE Customer Support and that are found to
be functional will not be covered under the warranty (see warranty statement, below). That is,
you will have to pay a retest and calibration fee, and all shipping charges.
Warranty Statement
The seller makes no express or implied warranty that the goods are merchantable or fit
for any particular purpose except as specifically stated in printed AE specifications. The
sole responsibility of the Seller shall be that it will manufacture the goods in accordance
with its published specifications and that the goods will be free from defects in material
and workmanship. The seller's liability for breach of an expressed warranty shall exist
only if the goods are installed, started in operation, and tested in conformity with the
seller's published instructions. The seller expressly excludes any warranty whatsoever
concerning goods that have been subject to misuse, negligence, or accident, or that have
been altered or repaired by anyone other than the seller or the seller's duly authorized
agent. This warranty is expressly made in lieu of any and all other warranties, express or
implied, unless otherwise agreed to in writing. The warranty period is 12 months after
the date the goods are shipped from AE. In all cases, the seller has sole responsibility for
determining the cause and nature of the failure, and the seller's determination with
regard thereto shall be final.
9
User Port Connection, Controls
9
and Indicators
USER PORT CONNECTION
The User port interface usually consists of a remote analog controller attached to the rear panel
of the MDXII unit through a 37-pin, female, D subminiature connector. Table 9-1 on page 9-7
provides detailed descriptions of the 37 pins.
The associated male connector, connector shell, and jack post screws are included in the
hardware kit.
Noise Prevention
All signal inputs in the User port have filtering to reject noise higher in frequency than 1 ms.
Advanced Energy™ recommends that you use shielded cables for connecting the User port.
(The MDXII unit uses Schmidt triggers for all digital inputs to prevent false triggering.)
When you connect the User port, you may want to take advantage of several different wiring
options.
Wiring Options
LEVEL OUT.A 31 M
V OUT.A 23 M
P OUT.A 24 M
I OUT.A 25 M
KWH OUT.A 30 M
OUT COM.A 9
1253
Figure 9-3. Wiring for externally programming ramp timer and output setpoint
CHEATER PLUG
The “cheater plug” (see Figure 9-6 on page 9-5) that came attached to the User port connector
lets you run the MDXII unit essentially right out of the box, without making any wiring
adjustments. You can continue to use the cheater plug if you want to ignore (“cheat”) the
interlock lines; however, AE does not recommend doing this.
CAUTION:
If the User port won't be used, you must leave the cheater plug attached to the MDXII
unit.
CAUTION:
You are defeating the interlocks if you use the cheater plug.
Target
No. Pin 34 Pin 35 Pin 4
8 low low low
7 low low high
6 low high low
5 low high high
4 high low low
3 high low high
2 low low high
1 low low low
5 36 I REG.D digital Use these signals to set the method of
input output regulation (see page 5-1). An
open input defaults high to 15 V; a low
6 P REG.D digital input is 0 V ± 0.5 V.
input No method of output regulation is
selected if both P REG.D (pin 6) and
I REG.D (pin 5) are low. If you switch
the MDXII unit from local or host mode
to analog mode with this invalid
specification, the message “Invalid
Regulation Mode” displays on the
output display screen, and output power
will not come on. Simply specify a valid
method of regulation from the User port
and clear the message by pressing the
STOP switch or toggling pin 14 (RMT
OFF.D).
Pin 5 Pin 6 Reg. Mode
low high Ireg
high low Preg
high high Vreg
low low invalid
Note 4.
On a 45 kW master/slave system I OUT.A is 0 - 192 A and P OUT.A is 0 - 60 kW.
A
A MDXII 18P Unit
This appendix describes specifications, operations, or features that are either unique to the
MDXII 18P unit or are different than those described for the MDXII 15k or 30k units
elsewhere in this manual. In addition, this appendix contains illustrations of the MDXII 18P
panels.
SPECIFICATIONS
Physical Specifications
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Electrical Specifications
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Environmental Specifications
Contactor Closure
Compared to the MDXII 15k and 30k power supplies, the contactor closure operation in the
18P supply is independent of ‘on’ commands. This means you control contactor closure and
you must close the contactor before requesting or issuing an output ‘on’ command.
To close the contactor from an AE Bus or Profibus serial port, use Command 30. From the
User port, use pin 16 (CHOLD.D).
Note: Because most faults open the contactor, you must close the contactor after a fault occurs
to restore the supply to the ready state.
Deko/Varc
If your MDXII 18P unit features the Deko custom software, then the Varc detection time is
longer than typical. For more information about Deko, see “Deko” on page 2-24. For details
about detection times, see “Arc Delay and Density” on page 5-6.
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• Pin 8 (15k/18k.D): when pulled low, this 0 to 15 V digital signal selects 18P operation.
When left floating high, this signal selects a maximum output of 15 kW. You can use this
feature to make MDXII 18P and 15k units interchangeable in your system
Tap Settings
The MDXII 18P unit has six internal voltage taps, which means you can select six different
output ranges from a single unit. Generally, the MDXII 18P unit is factory set for tap 4;
however, you can easily select a different tap from any of the three interfaces.
Table A-6 on page A-5 shows the maximum current that can be produced at each tap and the
range of output voltages available at each when the MDXII is in voltage regulation.
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Table A-6. MDXII 18P Maximum Tap Setting Voltages and Currents
Tap Max. Output Maximum Output
Number Voltage Current
MDXII 15k MDXII 18k
tap 1 312 V to 400 V 48.00 A 48.00 A
tap 2 400 V to 500 V 37.50 A 45.00 A
tap 3 500 V to 625 V 30.00 A 36.00 A
tap 4 625 V to 800 V 24.00 A 28.80 A
tap 5 800 V to 1000 V 18.75 A 22.50 A
tap 6 1000 V to 1250 V 15.00 A 18.00 A
Tap settings you specify through the User port have priority over tap settings you specify from
the control panel or through the serial port. That is, if you want to set a tap from the control
panel or serial port host computer, you must ensure that User pins 15, 17, and 29 are all
floating high. When the MDXII 18P unit is using a tap setting from the User port, you can
view the active tap setting on the control panel display, but the value does not flash, meaning
you cannot modify the setting.
If you try to change taps when more than 50 V is present at the MDXII 18P output, the
message “Latent Output Voltage Exists” displays briefly and then clears itself. You cannot
change taps until the voltage drops below 50 V.
VHALO
The MDXII 18p unit supports the VHALO feature. Refer to the following sections of this
manual for descriptions and uses of VHALO:
• “HALO” on page 2-8
• “Understanding the Optional Software Features” on page 2-19
• “VHALO” on page 5-20
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Appendix
Chapter
B
Master/Slave
B
This appendix describes specifications, operations, or features that are either unique to the
MDXII master/slave unit or are different than those described for the MDXII 15k or 30k units
elsewhere in this manual.
The master/slave system can deliver anywhere from 15kW (a single master unit) to 120kW ( a
30kW master and three 30kW slaves).
ELECTRICAL SPECIFICATIONS
The following table lists the electrical specifications.
Output Display Accuracy Table B-3 on page B-2 shows the output display
accuracy for configurations based on a 30 kW master
and Table B-4 on page B-2 shows the output display
accuracy for configurations based on a 15 kW master.
Both tables assume that all units are calibrated as stand-
alone units to within 1% (i.e., that there has been no
system calibration):
Output Parameters Table B-5 on page B-3 indicates the maximum current
that can be produced at each tap. It also shows the range
of output voltages available at each tap, when the
MDXII is in voltage regulation.
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OPERATIONS
Slave Port
The master/slave interface, located on the rear panel, is a 37-pin, female, subminiature-D
connector that provides information from the MDXII master unit to the slave units, and
feedback from the slave units to the master unit. Its associated male connector, connector
shell, and jack post screws are included in the hardware kit.
Table B-6 on page B-3 provides quick-reference information about each pin. More detailed
signal descriptions begin on page 3-33 and information about making master/slave
connections is found on page 3-29. A ".A" appended to a pin name indicates an analog signal;
a ".D" appended to a pin name indicates a digital signal. A bar over a signal name indicates
that the signal is true when low.
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Indicators
The following indicators appear on the front panel of your unit.
Note: Each inverter has a bus bar. There is one bus bar in a 15 kW and two bus bars in a 30
kW. Only the RIGHT bus (bus 1) LEDs lights if you have a 15 kW unit.
Fault Messages
Fault messages for both master and slave units are displayed on master units only. Most of
them can be cleared by pressing the STANDBY switch on the master unit.
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Figure B-1. Rear view of a 15 kW slave. (The Prior and Next connectors for the 30 kW
unit are the same as for the 15 kW unit.)
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Note: The interconnect cable is connected to the master unit’s Slave port and the slave unit’s
Prior port. Depending on how many slaves are in your system, either another
interconnect cable or the termination plug will be connected to the Next port.
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Start-up Procedure
Be sure to turn on the circuit breaker at the rear of the slave units before you turn on the circuit
breaker of the master unit. The INPUT POWER LED lights on each unit.
Master/Slave Operation
A master/slave system consists of one 30 kW master unit and from one to three slave units.
Slaves can be either 15 kW units or 30 kW units. The recommended configuration
combinations are shown in the table below.
Note: If the master MDXII is being used as a stand-alone unit, plug the termination plug into
the Slave port.
Connect the master unit's Slave port to the first slave's Prior port with the cable that is shipped
with the slave unit. If you have more than one slave, connect the first slave's Next port to the
second slave's Prior port; do the same if you have a third slave unit. For an illustration and of
the rear of the unit, see Figure B-1 on page B-12. Connect the output of each MDXII to the
chamber independently with separate cables. The current levels are added together under the
control of the master MDXII.
Always power up the slaves first. Then when the master unit is powered up, it can identify
each slave by its signal. If the master unit is turned on before the slave units, it will not
recognize that any slaves exist. In this case, the total system output power is limited to what
the master can produce.
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The output control signal (Slave pins 15 and 34) from the master unit determines the output for
the system. Each slave is told what percentage of its maximum output to produce. For
example, a 15 kW slave unit produces 7.5kW when commanded to produce 50%; a 30 kW
slave produces 15 kW. The master unit calculates and controls the total output by monitoring
the slaves' feedback on the amount of current each one is actually producing.
Once the system is properly connected, it appears to function like a single MDXII unit. This
transparency of operation is ensured by the level of information that is provided to the units in
the system.
The master communicates the following information through the Slave port:
• Tap setting for the system.
• Enable/disable contactor hold.
• Setpoint for the system.
• Specific slave unit on/off.
• System on/off.
The slaves provide the following feedback to the master unit:
• An arc has been detected by a slave unit.
• A fault has occurred in a slave unit.
• Current at output of slave unit.
• Identification of slave unit (slave1, slave2, or slave 3).
• Contactor is closed and slave is ready to deliver power.
Target Controls
Target control functions allow you to choose an operating target, set the length of life for the
target, and monitor target life left while the process is running. The target life value is entered
(and displayed) in kilowatt-hours. The maximum target life setting is 15,000 kWh for an
MDXII 15 kW and 30,000 kWh for an MDXII 30 kW and 45,000 kWh for a MDXII 45kW,
etc. If the end of the target life is reached, the message “EOTL” (end of target life) is displayed
on the control panel, but output is not turned off. The only way to clear this message is to press
the STANDBY switch, which also turns off the output.
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Tap Settings
The MDXII is equipped with six internal voltage taps so that six different output ranges can be
selected for each master/slave system. Each MDXII leaves the factory set at tap 4, but you can
easily select a different tap from any of the three interfaces.
The following table indicates the maximum current that can be produced at each tap. It also
shows the range of output voltages available at each tap when the MDX is in voltage
regulation.
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Index
connector wiring D
external monitoring of output 1 data consistency, Profibus 17
external on/off control 4 debug menu, Profibus 58
external programming of ramp time and Deko option 24
setpoint 3 delay and density, arcs 6, 10, 22
floating output 15 disabling a recipe 4
negative output 12 disconnecting 16
normal interlock connection 3 displays 2, 3
positive output 14 download packet, Profibus 14
contactor closure style 21, 3 dual setpoint 36
contactor hold feature 20, 15, 34, 11
control panel 3 E
main sections electrical specifications 2
environmental specifications 3
control mode switches 2
error messages, Profibus 58
MODIFY knob 3
external on/off control 4
output power switches 2 external output monitoring 1
regulation switches 3 external program source 16
soft keys 3 external programming of ramp timer/setpoint
two-line display 3 3
menu selections 4
ARC functions 10 F
fast ramp/run 19, 2, 7
LIMITS function 6
Fast user port, 18P unit 4
MORE functions 12
fault conditions 7, 3, 4
TARGET functions 9 first check, troubleshooting 1
TIMERS functions 6 first-time operation, start-up procedure 27
control switches 4, 2 floating output connection 15
coolant parameters for air 3 functional block diagram 5
cooling requirements 4
correct tap selection 8 G
counts and limits, arcs 5, 10 grounding 7
current H
input 2 HALO feature 8, 19, 15, 35, 14
maximum at each tap 2 hierarchy, unit control 4
maximum output limit 21 high accuracy at low output 19
output signal 13 HOST switch 2
regulation 2 housekeeping supply 5
CURRENT switch 3
customer support I
before calling 1 IARC
contact information 14 counter 37
trip level 22
HALO 19 checks 1
ramp time 2 precautions 4
run time 2 standards 5
serial port timeout value 17 security of system 16
tap settings 7 seeing which target is active 9
VHALO 20 selecting menu functions on control panel 3
rear clearance requirements 3 selecting the correct tap 8
rear panel connections selections, control panel menu 4
grounding 7 ARC functions 10
input power 7 LIMITS function 6
junction box port 15 MORE functions 12
output power 10 TARGET functions 9
serial port 1 TIMERS functions 6
slave port 15 serial port 3
User port 1 AE Bus
recipe CSR codes 57
disable 6 message packet 8
HALO feature 19 setting addresses 6
tap setting 7 setting baud rates 7
recommended input cable 1 terminating 5
reference table, operation functions 22
transmission parameters 8
regulation switches 3
communications commands 20
regulation, output 5
configuration 3
current 2
connection 1
limits 2
ideal communications transaction 10
power 1
pin descriptions 2
voltage 2
Profibus
relative humidity specifications 3
data consistency 17
remote interfaces 7
remote panel 2 debug menu 58
repair, units 15 download packet 14
requirements master-specific files 18
cabinet design 5 setting baud rate 14
cooling 4 setting network address 13
spacing 2 upload packet 15
returning parameters to default 17 watch dog timer 58
returning units for repair 15 specifying timeout value 17
run timer 2, 8 service functions
checking stored values 17
S
display user input string 16
S1 switch on logic card 4
return parameters to default 17
safety
system statistics 17