Gas Mass Flow Meter: Model MF5700

Gas Mass Flow Meter VC.5
Model MF5700

Sold in North America by:

Servoflo Corporation
75 Allen Street
Lexington, MA 02472
www.servoflo.com/[email protected]
781-862-9572
Gas Mass Flow Meter
with MEMS thermal sensing technology
MF5700 Series

User Manual
Document No. 04‐2022‐MF2 EN
Issue date: 2022.04
Revision: VC.5

Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, CA 95054
USA

Tel: +1(408)969.0368
Email: [email protected]

© Copyright 2022 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions
without prior notice. For further information and updates, please visit: www.Siargo.com

www.Siargo.com MF5700 User Manual 1 | P a g e

Attention !

 Please carefully read this manual prior to operating this product.

 Do not open or modify any hardware which may lead to irrecoverable
damage.

 Do not use this product if you suspect any malfunctions or defection.

 Do not use this product for corrosive media or in a strong vibration
environment.

 Use this product according to the specified parameters.

 Only the trained or qualified personnel shall be allowed to perform
product services.

Use with caution !

 Be cautious for the electrical safety, even it operates at a low voltage,
any electrical shock might lead to some unexpected damages.

 The gas to be measured should be clean and free of particles. Do not apply
this meter for liquid medium.

 Do not apply for any unknown or non‐specified gases that may

damage the product.

 For wireless data with NB‐IoT, please be sure the network is available.


Table of Contents

1. Overview .................................................................................................. 5
2. Receipt / unpack of the products ................................................................ 6
3. Knowing the products ............................................................................... 7
3.1 Product description ............................................................................................... 7
3.2 LCD description ..................................................................................................... 8
3.3 Power and data cable description ........................................................................... 9
3.4 Mechanical dimensions .......................................................................................... 9
4. Installation .............................................................................................. 11
5. Operation and MENU description .............................................................. 14
5.1 Check the product specifications ........................................................................... 14
5.2 Check the leakage ............................................................................................... 14
5.3 Power the meter and digital data connection ......................................................... 14
5.4 Wireless data communication ............................................................................... 15
5.5 Meter MENU description ...................................................................................... 15
5.5.1 Starting the measurement ............................................................................................ 16
5.5.2 MENU entry with a verified password ............................................................................ 16
5.5.3 Set the RS485 Modbus address ...................................................................................... 17
5.5.4 Set the RS485 communication baud rate ........................................................................ 17
5.5.5 Reset or calibrate the offset .......................................................................................... 18
5.5.6 Gas conversion factor (GCF) for different gas measurement ............................................. 18
5.5.7 Set the Response time .................................................................................................. 19
5.5.8 Select the display mode ................................................................................................ 19
5.5.9 Select the display language ........................................................................................... 19
5.5.10 Open/close the valve ..................................................................................................... 20
5.5.11 Set an alarm: upper instant flow rate limit ..................................................................... 20
5.5.12 Set an alarm: lower the instant flow rate limit ................................................................ 20
5.5.13 Set an alarm: accumulated flow rate or totalizer limit ..................................................... 21
5.5.14 Change the default password ........................................................................................ 21

5.5.15 Reset the accumulated or totalized flow rate .................................................................. 22
5.5.16 Exit the MENU .............................................................................................................. 22
5.5.17 Sleeping mode ............................................................................................................. 22
5.5.18 Wake up the meter ....................................................................................................... 22
5.5.19 MENU key sequence for the settings .............................................................................. 23
5.6 RS485 Modbus communication protocol ............................................................... 24
5.6.1 Hardware connection .................................................................................................... 24
5.6.2 Communication parameters .......................................................................................... 24
5.6.3 Frame .......................................................................................................................... 25
5.6.4 Function codes ............................................................................................................. 25
5.6.5 Registers ...................................................................................................................... 25
6. Product selection and order information.................................................... 31
6.1 Product selection ................................................................................................ 31
6.2 Order contact and customer support ..................................................................... 31
7. Technical specifications ............................................................................ 32
8. Technical notes for the product performance ............................................. 33
8.1 Measurement principle ........................................................................................ 33
8.2 Precautions for the best performance of the product .............................................. 33
8.2.1 Comparison with a third party reference meter ............................................................... 33
8.2.2 Particle contamination and fluidic cleanness .................................................................. 34
8.2.3 Apply to a different gas medium .................................................................................... 34
9. Troubleshooting ...................................................................................... 34
10. Warranty and Liability .............................................................................. 36
11. Service contact ........................................................................................ 38
Appendix I: Product evaluation kit .................................................................. 39
Appendix II: Document history ....................................................................... 40


1. Overview

All contact information can be found at the end of this manual.
This manual provides essential information for the operation of the MF5700 series of gas mass flow
meters for general‐purpose gas metrology applications. The product performance, maintenance,
and trouble‐shooting as well as the information for product order, technical support, and repair are
also included.
The MF5700 mass flow meter is one of the company’s best‐selling mass flow meter products on
market, due to its performance and cost‐effective design enabled by the company’s proprietary
MEMS (micro‐electro‐mechanical systems) thermal sensing technology. The current model is the 3rd
generation of the products having significantly upgraded features since its first release in 2010. The
upgrade includes much‐improved accuracy, an additional model to cover flow range and channel size
compatibility; significantly extended measurement dynamic range, wireless data options, and valve
options. The upgrade also ensures back‐compatibility for our existing customers. Siargo is
committed to continuing product innovation while offering the best value to our customers.
This series of products are designed for general purpose mass flow sensing and control purposes.
The wetted materials of the products are compatible with most of the common gases such as oxygen,
nitrogen, air, argon, carbon dioxide, etc. Siargo also offers a wide spectrum of off‐the‐shelf and
customized flow, pressure, temperature/humidity, and gas concentration sensing products and
provides integration and turn‐key solutions to our customers. Please contact the manufacturer for
additional information.


2. Receipt / unpack of the products

Upon receipt of the products, please check the packing box before the dismantlement of the packing
materials. Ensure no damages during shipping. If any abnormality is observed, please contact and
notify the carrier who shipped the product and inform the distributors or sales representatives if the
order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed
as well. For any further actions, please refer to the return and repair section in this manual.
If the packing box is intact, proceed to open the packing box, and you shall find the product (either
the meter or the meter with the valve per the actual order). The power adapter and/or data cable as
shown below may also be found according to your actual order.

or

Flow meter Flow meter with valve Adapter data cable
Figure 2.1: MF5700 flow meter and accessories

Please check immediately for the integrity of the product as well as the power and data cable, if any
abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as
you can. If any defects are confirmed, an exchange shall be arranged immediately via the original
sales channel. (Note: the LCD screen shall not be lighted until the battery is installed or the power
cable is plugged in). This user manual shall also either be included in the packing box or via an online
request for an electronic version. In most cases, this manual shall be made available to the customer
before the actual order.
The meter is designed with low power that can be operated with 4 AA batteries. However, if you
ordered the product with the control valve, it is recommended to have external power since the valve
requires large power consumption. A power adapter must have a safety certification for use with this
meter. The external power/data connector is a type‐C USB. See the detailed requirements in the
operation section.


3. Knowing the products

3.1 Product description

Meter head
LCD display
(rotatable)
Battery
chamber
MENU keys cover

Meter body
BSPP Flow
connector direction

Data and Installation
power port screws

Figure 3.1: MF5700 parts description
ON/OFF
solenoid valve

Figure 3.2: MF5700 with valve


3.2 LCD description

The LCD provides all information that the product
measures. Some symbols are reserved for future
upgrades, and will not be lighted during the
operation. The following table details the meaning
of each of the symbols.

Figure 3.3: LCD symbol illustration.

Table 3.1: Symbols description
The top row. The default displays the totalized flow rate in L (liters),
ACC m3 (cubic meters), or SCF (standard cubic feet). It also displays
pressure (if kPa lights up) or temperature (if °C lights up)*.
The 2nd row. Displays instant flow rate in L/min (Liters per minute)or
Flow
SCFH (standard cubic feet per hour) or m3/h (cubic meters per hour).
Battery status.
Valve status. The current product provides an ON/OFF control valve.

LoRa wireless protocol is enabled when lights up.
NB‐IoT wireless protocol is enabled when lights up.

WIFI wireless protocol is enabled when lights up.
Bluetooth LE 4.2 wireless protocol is enabled when lights up.

Reserved for future upgrade of GPRS inclusion.

*Note: Both the pressure and temperature sensors can be integrated with the current product
but not with the default models. Please contact the manufacturer for further
information.


3.3 Power and data cable description

Table 3.2: MF5700 wire assignment.

Wire Color Definition

1 Red Power supply (5~24 Vdc)
2 Black GND, ground

3 Green RS485A
4 White RS485B
Figure 3.4: MF5700 cable (USB‐C‐100)

3.4 Mechanical dimensions

Figure 3.5: MF5700 meter dimensions


Figure 3.6: MF5700 meter with control valves dimensions

Table 3.3: Mechanical dimensions of the meters/meters with control valves
Connector, G L1 L2 LV1 LV2 W1 W2 H1 H2 H3
MF5706 BSPP ¼” 61 34 95.5 123 34 25 127 28 12.5
MF5708 BSPP 3/8” 81 45 110 134 45 30 134 35 15.5
MF5712 BSPP ½” 90 50 115 143 45 30 141 42 19.5


4. Installation

Do not open or alter any part of the product which would lead to malfunction and irrecoverable
damage. It will also forfeit the terms of the warranty and cause liability.
The product at the time of shipment is fully inspected for its quality and meets all safety requirements.
Additional safety measures during the installation should be applied. This includes, but is not limited
to the leakage verification procedures, standard EDS (electrostatic discharge) precautions, and DC
voltage precautions. Other tasks such as calibration, part replacement, repair, and maintenance
must only be performed by trained personnel. Upon request, the manufacturer will provide
necessary technical support and/or training for the personnel.
The product is preferable to be installed horizontally. Flow direction should be aligned with the arrow
mark on the meter body. If the flowing fluid may have particles or debris, a filter is strongly
recommended to be installed upstream of the meter.
Please follow the following steps to complete the installation:

Figure 4.1: MF5700 meter installation
a) Upon opening the package, the product's physical integrity should be inspected to ensure no visual
damage.
b) Before installation of the product, please ensure that the pipe debris or particles or any other
foreign materials are completed removed.
c) Cautions during installation:
(i) It is preferably to first install the inlet end of the meter and then the outlet end of the meter;
To ensure the measurement accuracy, an upstream straight pipe of length no less than 10DN
and a downstream straight pipe of length no less than 5DN should be in place. Please refer to
the following recommended installation configuration.

(a) 90‐degree elbow or T‐piece (b) 2x90‐degree elbow
(ii) If the upstream or downstream pipe size is different from that of the product, the size of the
installation line pipe diameter(s) should be larger than the flow channel (pipe) size of the meters
to be installed. For some typical situations, please follow the installation recommendation
detailed in the following sketches.

(c) 2x90‐degree elbow, 3 D (d) Pipe size‐reduction

(e) Pipe size expansion (f) Control valve at upstream or downstream

(iii) During installation, please make sure no foreign materials (such as water, oil, dirt, particles,
etc.) enter the installation pipeline.


d) Install 4‐AA batteries into the battery chamber. In case the external power supply is desired,
connect electrical wires per the wire definition in Table 3.2. Please be sure of the power supply
range (i.e., 5 ~ 24 VDC) and power supply polarization. If an adapter is other than the one supplied
by the manufacturer, make sure the adapter meets industrial standards and has all safety
certifications.
e) For the communication wire connection, please follow the description in Table 3.2 and make sure
that the wires are correctly connected to the proper ports on your data device/equipment. Please
make sure the data cable meets industrial standards with proper shielding.
f) Once the battery is installed, or the external power is successfully connected, the LCD should be
lighted up with the proper information displayed to work correctly.
g) Slowly open the valve(s) if any, upstream or downstream or both of the pipeline, and the meter
should then start to measure the flow in the pipeline.
Note: because the meter has a large dynamical measurement range, it could be normal if you see
the small instant flow rate before you open the valve as there could be some leakage.
However, make sure the meter reads null when there is no flow present in the pipeline.
h) This will conclude the installation.

Cautions
a) Don't alter any parts of the product.
b) Ensure the electrical connection is properly done per the instructions.
c) Make sure no mechanical stresses in the connections.
d) The strong electromagnetic interference sources close by or any mechanical shocks at the
pipeline may also create malfunctioning of the product.
e) Slowly open/close valves to prevent abrupt pulse flow impact.


5. Operation and MENU description

5.1 Check the product specifications

Before starting to use this product, check the product specifications that can be found in this manual
or the basic information located on the back panel of the product.
The detailed product technical specifications can be found in Section 7. For a specific application,
the pressure rating must not be higher than the system pressure to be measured, and the flow range
should also be within the specified ones. In most cases, the use of a high full‐scale ranged meter for
the very low flow rate measurement often results in erroneous data. The gas to be measured must
also be consistent with that specified by the product. Be particularly cautious about the supplied
voltage indicated in the specification. A higher voltage may lead to irrecoverable damage, and a
lower voltage will not power the product for any desired functions.
For the best performance of the product, it is advised that the gas to be measured must be clean and
free of particles or other foreign materials.

5.2 Check the leakage

Check gas leakage before any measurement. If it is needed, the pressurized nitrogen or air can be
used for the leakage check.

5.3 Power the meter and digital data connection

Although this product complies with the CE‐required EMC regulations, it also requires the product to
be used according to the standard electrical device practice. For general‐purpose usage, the meter
can be powered by 4 AA batteries. Be sure to select the batteries with safety proof and within the
expiration date. Do not use batteries without a known manufacturer and expiration date. For models
with control valves or for extensive usage, it is recommended to have the meter powered with
external DC power or an AC‐DC adapter. Make sure the supply voltage is within the range of the
specified ones in Section 7. Before connecting the product with the external power, make sure the
standard electrical device precautions such as EDS (electrostatic discharge) and DC voltage are
observed. Excessive electrostatic discharge may damage the product.

The power and data are connected via a standard Type‐C USB port. The manufacturer‐supplied
Type‐C USB cable has the screw locking fixture. It is recommended such a feature to ensure the cable
is properly engaged and will not be accidentally got unplugged.
Half‐duplex RS485 Modbus is used for digital data communication. Make sure the wires are properly
connected to the receiver side.

5.4 Wireless data communication

The product has optional wireless data transmission, including Bluetooth LE 4.2, LoRa, WIFI, and NB‐
IoT wireless data.
An application APP named “Siargo Smart Meter 2.0” can be downloaded from either Apple Store for
smart devices based on the iOS system or from Google Play Store for smart devices based on the
Android system.
The APP provides the basic functions to access the meter/sensor data, plot an instant flow rate chart,
and calculate totalized or accumulated flow volume at a specific time defined by the user. It allows
the user to send the local data instantly to a remote destination when the wired connection is not an
option. Also, the interface provides the readout of the product information as well as technical
support information.
For the detailed protocols of LoRa, WIFI, and NB‐IoT, please contact the manufacturer for further
information.

5.5 Meter MENU description

Up MENU Down

The meter has a front 3‐key board for the user to set the desired functions, access data, and check
the status. The Menu key (M) is at the central position that allows the user to select a function and
confirmation or other related actions that will be detailed below. Two keys (“Up” and “Down”) to
select the menu and sub‐menu.

5.5.1 Starting the measurement

Once the power is supplied and no abnormal issues are observed,
the meter is ready to perform the measurements. The default
display is for the mass flow measurement having two numerical
lines on the LCD. The upper line is the accumulated or totalized
flow rate, and the lower line is the instant flow rate. If the battery
symbol turns into , proceed to change the battery or plug in
the external power cord.

The display characters are limited by the LCD capability, the following table is the illustration.

5.5.2 MENU entry with a verified password

At the flow measurement (main) display, press the central “M” MENU key, it will enter into the
password setting and verification MENU. The default password is “11111”. If the password is incorrect,
the display will return to the main display.
To enter a new password, press the “Up” or “Down” key to change the digit that flashes, and press
the “M” key to confirm. Repeat this process for all 5 digits and the meter will enter into the menu
setting interfaces/screen.
Subsequently, the MENU allows the user to:
 Set Modbus address F2 ‐ Addr
 Change communication baud rate F3 ‐ bPS
 Reset or calibrate the offset F11 ‐ oFFST
 Enter the gas conversion factor (GCF) F12 ‐ GCF
 Change the response time F16 ‐ rESPS
 Change the display mode F38 ‐ dISP
 Change the display language F39 ‐ LAnG

 Open/Close the valve F43 ‐ VALVE
 Set upper flow rate limit alarm F51 ‐ ALM‐H
 Set lower flow rate limit alarm F52 ‐ ALM‐L
 Set totalized or accumulated flow rate alarm F53 ‐ ALM‐A
 Change the default password F91 ‐ PASS
 Clear or reset the totalizer or accumulated flow rate F92 ‐ CLr‐A
 Exit from the MENU F99 ‐ qUIT
Note: During this process, the meter will continue to measure the flow without being interrupted.

5.5.3 Set the RS485 Modbus address
After the password is verified and entered into the MENU settings,
press the “Up” or “Down” key until the screen shows the F2 ‐ Addr as
indicated to the left.
The Modbus address has 3 digits, which can be any number between
001 to 255. Press the “M” key to enter into the change address screen.
Press the “Up” or “Down” key to change the flashing digits, and then
press the “M” key to confirm. After the address is set, the display will
return to F2 ‐ Addr, which indicates the task is completed. Press the
“Up” or “Down” key to select F99 ‐ qUIT and the “M” key to exit the
MENU and return to the Main Display screen.

5.5.4 Set the RS485 communication baud rate
Following the above‐mentioned steps, at the MENU setting screen,
use the “Up” or “Down” key to select F3 ‐ bPS and then press the
“M” key to set the RS485 communication baud rate.
There are 6 baud rates selectable, depending on your system
requirements: 4800, 9600, 19200, 38400, 57600, and 115200. The
default baud rate is 9600. Use the “Up” or “Down” key to select the
desired one and press the “M” key to confirm. The display will then
return to the F3 ‐ bPS screen, which indicates the task is completed.
Use the “Up” or “Down” key to select F99 ‐ qUIT and the “M” key to exit the MENU and return to the
Main Display screen.

5.5.5 Reset or calibrate the offset
After a certain time of usage, the meter’s offset (zero flow rate) might
or might not have a small shift. Or when you apply the meter for
different gases, the offset might be shifted. To ensure measurement
accuracy, it is necessary to reset or calibrate the offset. Following the
above‐mentioned steps, at the MENU setting screen, use the “Up” or
“Down” key to select F11 ‐ oFFST. Before performing the task, make
sure there is absolutely no flow in the flow channel, otherwise, it will
create even bigger erroneous measurement results.
Press the “M” key to confirm the task, and it will open the sub‐MENU asking you to confirm. Use the
“Up” or “Down” key to select the desired one and press the “M” key to confirm. The display will then
return to the F11 ‐ oFFST screen, which indicates the task is completed. Use the “Up” or “Down” key
to select F99 ‐ qUIT and the “M” key to exit the MENU and return to the Main Display screen.

5.5.6 Gas conversion factor (GCF) for different gas measurement
For the general purpose of the application, a gas conversion factor
(GCF) can be applied to meter the gas different from the default one
or the one used for calibration. The GCF is determined by the thermal
calorimetric sensing principle as well as the meter fluidic dynamic
design and the control circuitry. Contact the manufacturer to obtain
the values corresponding to the correct models.
The GCF for air is 1000.
Note: If the meter is required with a special real gas calibration, contact the manufacturer before
placing the order.
Following the above‐mentioned steps, at the MENU setting screen, use the “Up” or “Down” key to
select F12 ‐ GCF. Press the “M” key to confirm, and it will open the sub‐MENU showing the current
gas conversion value. Use the “Up” or “Down” and the “M” confirming key to input the desired value,
and press the “M” key again to complete the task. The display will then return to the F12 ‐ GCF screen,
which indicates the task is completed. Use the “Up” or “Down” key to select F99 ‐ qUIT and the “M”
key to exit the MENU and return to the Main Display screen.


5.5.7 Set the Response time
use the “Up” or “Down” key to select F16 ‐ rESPS and then press
the “M” key to set the response time.
There are 6 response time selectable: 125, 250, 500, 1000, 2000, and
5000, unit is msec. The default response time is 125 msec. Use the
“Up” or “Down” key to select the desired one and press the “M” key
to confirm. The display will then return to the F16 ‐ rESPS screen,
which indicates the task is completed. Use the “Up” or “Down” key
to select F99 ‐ qUIT and the “M” key to exit the MENU and return to the Main Display screen.

5.5.8 Select the display mode
This function is to set the display modes, cycle display mode, or
fixed display mode. If one likes to switch between these two display
modes, following the above‐mentioned steps, at the MENU setting
screen, use the “Up” or “Down” key to select F38 ‐ dISP. Press the
“M” key to confirm, and it will open the sub‐MENU showing the
current display mode. Use the “Up” or “Down” and the “M”
confirming key to select the desired one, and press the “M” key
again to complete the task. The display will then return to the F38 ‐
dISP screen, which indicates the task is completed. Use the “Up” or “Down” key to select F99 ‐ qUIT
and the “M” key to exit the MENU and return to the Main Display screen.

5.5.9 Select the display language
This function is reserved for future upgrades. The current models are
configured to be English or Chinese based on the shipping
geographic regions. However, if one likes to switch between these
two default languages, following the above‐mentioned steps, at the
MENU setting screen, use the “Up” or “Down” key to select F39 ‐
LAnG. Press the “M” key to confirm, and it will open the sub‐MENU
showing the current language. Use the “Up” or “Down” and the “M”
confirming key to select the desired one, and press the “M” key
again to complete the task. The display will then return to the F39 ‐
LAnG screen, which indicates the task is completed. Use the “Up” or “Down” key to select F99 ‐ qUIT
and the “M” key to exit the MENU and return to the Main Display screen.


5.5.10 Open/close the valve
This function is to open or close the valve. If one likes to open or close
the valve, following the above‐mentioned steps, at the MENU
setting screen, use the “Up” or “Down” key to select F43 ‐ VALVE.
Press the “M” key to confirm, and it will open the sub‐MENU showing
the current valve status. Use the “Up” or “Down” and the “M”
confirming key to select the desired one. Here “on” means valve
open and “off” indicates valve close. Then press the “M” key again to
complete the task. The display will then return to the F43 ‐ VALVE
screen, which indicates the task is completed. Use the “Up” or
“Down” key to select F99 ‐ qUIT and the “M” key to exit the MENU and return to the Main Display
screen.
Note: The valve is configured to a constant‐open valve, or its default status is open (on). A
constant‐close valve can be an option by contacting the manufacturer

5.5.11 Set an alarm: upper instant flow rate limit
This function allows the user to set the instant flow rate above which
the meter will trigger the alarm function. The alarm will be a sharp
sound every 2 seconds while the screen/display will flash. The
triggered alarm will not stop the meter from continuous operation.
The alarm will be off once the metering value is below the set value.
The flow rate has two decimal points with a maximum not over the
full‐scale flow rate at the order. Following the above‐mentioned
steps, at the MENU setting screen, use the “Up” or “Down” key to
select F51 ‐ ALm‐H. Press the “M” key to confirm, and it will open the sub‐MENU showing a default
flow rate of 999.99. Use the “Up” or “Down” and the “M” confirming key to enter the desired one,
and press the “M” key again to complete the task. The display will then return to the F51 ‐ ALm‐H
screen, which indicates the task is completed. Use the “Up” or “Down” key to select F99 ‐ qUIT and
the “M” key to exit the MENU and return to the Main Display screen.

5.5.12 Set an alarm: lower the instant flow rate limit
This function allows the user to set the instant flow rate below which the meter will trigger the alarm
function. The alarm will be a sharp sound every 2 seconds while the screen/display will flash. The
triggered alarm will not stop the meter from continuous operation. The alarm will be off once the
metering value is above the set value.

The flow rate has two decimal points with a minimum of 0.00.
use the “Up” or “Down” key to select F52 ‐ ALm‐L. Press the “M” key
to confirm, and it will open the sub‐MENU showing a default flow rate
of 0.00. Use the “Up” or “Down” and the “M” confirming key to enter
the desired one, and press the “M” key again to complete the task.
The display will then return to the F52 ‐ ALm‐L screen, which indicates
the task is completed. Use the “Up” or “Down” key to select F99 ‐
qUIT and the “M” key to exit the MENU and return to the Main Display screen.

5.5.13 Set an alarm: accumulated flow rate or totalizer limit
This function allows the user to set the maximum accumulated or
totalized flow rate above which the meter will trigger the alarm
function. The alarm will be a sharp sound every 2 seconds while the
screen/display will flash. The triggered alarm will not stop the meter
from continuous operation. The alarm will be off by resetting the
setting.
The accumulated or totalized flow rate has seven digits with a
maximum of 9999999. Following the above‐mentioned steps, at the
MENU setting screen, use the “Up” or “Down” key to select F53 ‐ ALm‐A. Press the “M” key to
confirm, and it will open the sub‐MENU showing a default flow rate of 9999999. Use the “Up” or
“Down” and the “M” confirming key to enter the desired one, and press the “M” key again to
complete the task. The display will then return to the F53 ‐ ALm‐A screen, which indicates the task
is completed. Use the “Up” or “Down” key to select F99 ‐ qUIT and the “M” key to exit the MENU
and return to the Main Display screen.

5.5.14 Change the default password
For data safety, it is recommended that the default password of 11111 should be changed when the
first use of this product.
use the “Up” or “Down” key to select F91 ‐ PASS. Press the “M” key
to confirm, and it will open the sub‐MENU showing the default
password of 11111. Use the “Up” or “Down” and the “M” confirming
key to enter the desired one, and press the “M” key again to complete
the task. The display will then return to the F91 ‐ PASS screen, which
indicates the task is completed. Use the “Up” or “Down” key to select
F99 ‐ qUIT and the “M” key to exit the MENU and return to the Main Display screen.

Please keep the changed password in a safe yet accessible place. In case it is unrecoverable, please
contact the manufacturer to obtain a special password to access the meter MENU.

5.5.15 Reset the accumulated or totalized flow rate
As the maximum value of the accumulated or totalized flow rate that
the internal register can have is 9999999, the register will stop
accumulating once the value is reached. At this time, it is necessary to
reset this register. Following the above‐mentioned steps, at the
MENU setting screen, use the “Up” or “Down” key to select F92 ‐ CLr‐
A. Press the “M” key to confirm, and it will open the sub‐MENU for
resetting the value. Use the “Up” or “Down” to select and the “M”
confirming key to execute, and press the “M” key again to complete
the task. The display will then return to the F92 ‐ CLr‐A screen, which indicates the task is completed.
Use the “Up” or “Down” key to select F99 ‐ qUIT and the “M” key to exit the MENU and return to the
Main Display screen.

5.5.16 Exit the MENU
At the MENU settings, use the “Up” or “Down” key to select the F99 ‐
qUIT option and press the “M” confirming key to exit the MENU
settings and return to the Main Display screen.

5.5.17 Sleeping mode
When the meter is powered by batteries, it is necessary to enable the sleeping mode for the power
saving to allow a longer operation time.
The meter is programmed with an automatic sleeping mode that will automatically shut off the
display and the control circuitry is at minimal power consumption. This mode will be executed when
the continuously measured flow rate is zero for 5 minutes.
The meter can also be turned into the sleep mode manually via pressing the “Up” key for 3 seconds.
5.5.18 Wake up the meter
When the meter is in sleeping mode, it will automatically wake up if the flow rate in the flow channel
is larger than 0.5 L/min (1.1 SCFH or 0.03 m3/h ) for 10 seconds. Or the meter can be waked up
manually by pressing any of the three keys on the front meter face for 5 seconds.

5.5.19 MENU key sequence for the settings

5.6 RS485 Modbus communication protocol

The digital communication protocol is based on standard Modbus RTU Half‐plex mode. A master
(PC or PLC) can communicate with multiple slaves (the current product) for data exchange and
communication parameter configuration.

5.6.1 Hardware connection

The hardware layer is TIA/EIA‐485‐A, as illustrated below. In this configuration, the product
(MF5700) is a slave.

5.6.2 Communication parameters

The PC UART communication parameters are listed in the following table.
Protocol
Parameters
RTU
Baud rate (Bits per second) 9600 bps
Start bits 1
Data bits 8
Stop bits 1
Even/Odd parity None
Bits period 104.2 µsec
Bytes period 1.1458 msec
Maximum data length 20
Maximum nodes 247


5.6.3 Frame

The frame function is based on the standard Modbus RTU framing:
Start_bits Address Function codes Data CRC Stop_bits

T1‐T2‐T3‐T4 8 bit 8 bit N 8 bit (20≥n≥0) 16 bit T1‐T2‐T3‐T4

Start_bits: 4 periods bit time, for a new frame.
Address: The address can be set from 1 to 255 except for 157 (0x9d). 0 is the broadcast address.
Function codes: Define the product (MF5700)'s functions/actions (slaves), either execution or response.
Data: The address of the register, length of data, and the data themselves.
CRC: CRC verification code. The low byte is followed by the high byte. For example, a 16‐bit
CRC is divided into BYTE_H and BYTE_L. In the framing, the BYTE_L will come first, then
followed by the BYTE_H. The last one is the STOP signal.
Stop_bits: 4 periods bit time, for ending the current frame.
5.6.4 Function codes

The Modbus function codes applied for the product are the sub‐class of the standard Modbus
function codes. These codes are used to set or read the registers of the product:
Code Name Functions

0x03 Read register Read register(s)
0x06 Set single register Write one single 16‐bit register
0x10 Set multiple registers Write multiple registers

5.6.5 Registers

The product (MF5700) has multiple registers available for the assignment of the various functions. With
these functions, the user can obtain the data from the products, such as product address and flow rates from
the registers, or set the product functions by writing the corresponding parameters.
The currently available registers are listed in the following table, and the registers may be customized upon
contacting the manufacturer. Where R: read; W: write‐only; W/R: read and write.

Note: At the time of shipping, the write protection function is enabled except for address and baud
rate. Once the user completes the register value change, the write protection will be automatically
enabled once again to prevent incidental data loss.
Functions Description Register Modbus

reference
Address Product address (R/W) 0x0081 40130 (0x0081)
Serial number Serial number of the product 0x0030 40049 (0x0030)
Alarm information Read the alarm information (R) 0x0037 40056 (0x0037)
Flow rate Current flow rate (R) 0x003A ~ 0x003B 40059 (0x003A)
Accumulated flow Accumulated or totalized flow rate (R) 0x003C ~ 0x003E 40061 (0x003C)
Baud rate Communication (R/W) 0x0082 40131 (0x0082)
GCF * Gas correction factor (R/W) 0x008B 40140 (0x008B)
Response time * Set the response time (R/W) 0x008D 40142 (0x008D)
Totalizer alarm * Accumulated/totalized flow rate alarm (R/W) 0x0096 ~ 0x0097 40151 (0x0096)
Upper flow alarm * Upper flow rate limit alarm (R/W) 0x0098 ~ 0x0099 40153 (ox0098)
Lower flow alarm * Lower flow rate limit alarm (R/W) 0x009A ~ 0x009B 40155 (ox009A)
Password * Password change (R/W) 0x00AE ~ oxooAF 40175 (0x00AE)
Offset calibration * Offset reset or calibration (W) 0x00F0 40241 (0x00F0)
Reset totalizer * Reset accumulated or totalized flow rate (W) 0x00F2 40243 (0x00F2)
Valve status Read/check the valve status 0x0037 40056 (0x0037)
Valve control* Open/close (turn on/off) the valve 0x00F5 40246 (0x00F5)
Write protection Write protection of selected parameters (W) 0x00FF 40256 (0x00FF)

Notes: 1, R – Read‐only, W – Write only, R/W – Read and write.
2, For the * marked functions, please disable the write protection before executing the command.
The detailed information of each register is described below: Y: enabled; N: disabled
Write Y
Flowmeter address 0x0081 Read Y
Description Address of the product
Value type UINT 16
Notes Values from 1 to 255 except for 157 (0x9d). 0 is the broadcast address.

Write N
SN, Serial number 0x0030 Read Y
Description Series Number of the product, SN
Value type UINT8 (12 bits)
SN= value(0x0007), value(0x0008),….,value (0x000C);
Notes e.g.: Receiving 12 bits as: 0x2A47, 0x3741, 0x4549, 0x3032, 0x3035, 0x382A,
the corresponding Serial Number is *G7AEI02058*.

Write N
Alarm information 0x0037 Read Y
Description Read the alarm information
Value type UINT 16
Bit 13 ‐ Upper flow alarm (0 ‐ alarm not triggered, 1 ‐ alarm triggered);
Bit 14 ‐ Lower flow alarm (0 ‐ alarm not triggered, 1 ‐ alarm triggered);
Bit 15 ‐ Totalizer alarm (0 ‐ alarm not triggered, 1 ‐ alarm triggered).
e.g.: when the user reads “0x0012” (Bin: 1010 0000 0000 0001) from register
Notes
0x0037.
 Upper flow alarm is triggered (bit 13 = 1);
 Lower flow alarm is not triggered (bit 14 = 0);
 Totalizer alarm is triggered (bit 15 = 1).

Write N
Current flow rate 0x003A ~ 0x003B Read Y
Description Current flow rate
Value type UINT 16
Flow rate = [Value (0x003A)*65536 + value (ox003B)]/1000
e.g.: for a flow rate of 20.340 L/min, the user will read “0” from register
Notes
0x003A and “20340” from register 0x003B, therefore
Current flow rate = (0*65536+20340)/1000 = 20.340

Write N
Accumulated flow rate 0x003C ~ 0x003E Read Y
Description Accumulated or totalized flow rate
Value type UINT 32 + UNIT 16
Accumulated flow rate
= Value (0x003C) * 65536 + Value (0x003D) + Value (0x003E)/1000
e.g.: For an accumulated flow rate of 3452.245 m3, the user will read “0
Notes
(0x0000)” from register 0x003C; “3452 (0x0D7C)” from register 0x003D, and
“245 (0x00F5)” from register 0x003E.
Then, the accumulated flow rate = 0 + 3425 + 245/1000 = 3425.245.

Write Y
Baud rate 0x0082 Read Y
Description Communication baud rate with a PC
Value type UINT 16
0 ‐ 4800; 1 ‐ 9600; 2 ‐ 19200; 3 ‐ 38400; 4 ‐ 57600; 5 ‐ 115200.
The default value is 1, the baud rate is 9600.
Notes
e.g.: When the user reads “2 (0x0002)” from register 0x0082, the baud rate is
19200.


Write Y
GCF 0x008B Read Y
Description The gas conversion factor for a gas that is different from the calibration gas.
Value type UINT 16
The air (default) is 1000, normally read from register 0x008B.
The product will disable this function with write protection once the
Notes metering gas is confirmed with the proper GCF.
For a specific GCF value, please contact the manufacturer.
Notes: please disable the write protection before executing this command.

Write Y
Response time 0x008D Read Y
Description Set response time
Value type UINT 16
125, 250, 500, 1000, 2000, or 5000, unit is msec.
The default value is 125 msec.
Notes e.g.: when the user reads “2000” from register 0x008D, the response time is
2000 msec (2 sec).

Alarm: Accumulated Write Y
flow rate
0x0096 ~ 0x0097 Read Y
Description Alarm set for the maximum value of an accumulated flow rate
Value type UINT 32
Alarm values = Value (0x0096)*65536 + Value (0x0097)
Notes When the set value is reached, an alarm will be triggered.

Alarm: Upper limited Write Y
of a flow rate
0x0098 ~ 0x0099 Read Y
Description Set alarm value for an upper flow rate limit
Value type UINT 32
Alarm values = Value (0x0098)*65536 + Value (0x0099)
Notes When the flow rate is above a set value, an alarm will be triggered.

Alarm: Lower limit of a Write Y
flow rate
0x009A ~ 0x009B Read Y
Description Set alarm value for a lower flow rate limit
Value type UINT 32
Alarm values = Value (0x009A)*65536 + Value (0x009B)
Notes When the flow rate is below a set value, an alarm will be triggered.


Write Y
Change password 0x00AE ~ 0x00AF Read Y
Description Change the default password
Value type UINT 32
Password values = Value (0x00AE)*65536 + Value (0x00AF)
Notes Available: 00000 ~ 99999

Write Y
Offset calibration 0x00F0 Read N
Description Reset or calibrate the offset
Value type UINT 16, Fixed value 0xAA55
To reset or calibrate the offset, write 0xAA55 to register 0x00F0.
When you execute this function, make sure there is NO flow in the flow
Notes
channel.

Reset accumulated Write Y
flow rate
0x00F2 Read N
Description Reset the accumulated or totalized flow rate value
Value type UINT 16, Fixed value 0x0001
To reset the accumulated or totalized flow rate value, write 0x0001 to register
Notes 0x00F2.

Write N
Valve status 0x0037 Read Y
Description Read the valve status
Value type UINT 16
Bit 0 ‐ valve status (0 ‐ closed, 1 ‐ open);
e.g.: when the user reads “0x0012” (Bin: 1010 0000 0000 0001) from register
Notes 0x0037.
 Valve is open (bit 0 = 1);
 Valve is close (bit 0 = 0).

Write Y
Valve control 0x00F5 Read N
Description Open/close (Turn on/off) the valve
Value type UINT 16. Close valve: Fixed value 0x0001; Open valve: Fixed value 0x8001.
To close (turn off) the valve, write 0x0001 to register 0x00F5.
To open (turn on) the valve, write 0x8001 to register 0x00F5.
Notes
The valve is configured to be constant‐open, i.e., the default status is open.


Write Y
Write protection 0x00FF Read N
Description Write protection disabler for a set value to a specific register.
Value type UINT 16, Fixed value 0xAA55
This function is enabled at the time of product shipment. To enable the write
function of a specific parameter, such as GCF, the user needs to send 0xAA55
Notes to the register 0x00FF, and then the write function will be enabled (write
protection is disabled). After the write execution is completed, the firmware
will automatically re‐enable the write protection.


6. Product selection and order information

6.1 Product selection

The product part number is composed of the product model number and suffixes indicating the full‐
scale flow rate, as well as the other parameters. Refer to the following for details.
MF57 ‐ ‐ ‐ ‐
Gas (A ‐ air; C ‐ CO2; N ‐ N2; O ‐ O2; R‐ Ar, for
other gases, please contact the manufacturer.

Output (B ‐ RS485 Modbus).
Maximum full scale flow rate (for other units refer
to the table below). If the unit is not L/min, the
unit needs to be specified here.

Mechanical connection (G ‐ BSPP; N ‐ NPT)
Valve (V ‐ valve integrated, Null ‐ No valve)
DN (pipe inner diameter: 06, 08 or 12 mm)
Table 6.1: Connection and maximum full‐scale flow rate selection
Maximum full‐scale flow rate
Model DN (mm) Connection
L/min SCFH
MF5706 6.0 BSPP 1/4” or NPT 1/4” 20 40
MF5708 8.0 BSPP 3/8” or NPT 3/8” 100 200
MF5712 12.0 BSPP 1/2” or NPT 1/2” 250 500
Table 6.2: Units conversion table
L/min SCFH NCMH L/min SCFH NCMH

20 42.38 1.20 18.88 40 1.13

100 211.89 6.00 94.40 200 5.66
250 529.72 15.0 235.97 500 14.16
6.2 Order contact and customer support
The sales offices and the sales distributors/representatives are listed at the end of this document. For
small quantities, the order can be placed either through the Siargo website: www.siargo.com or the
sales office. For large quantities, please contact the sales office, distributors, or sales representatives.
Siargo is making every effort to ensure the quality of the products. In case of questions and/or
product support, please contact the customer service listed at the end of the document.

7. Technical specifications

All specifications listed in the following table unless otherwise noted apply for calibration conditions
at 20°C and 101.325 kPa absolute pressure with air. The product is horizontally mounted at
calibration.

MF5706 MF5708 MF5712 Unit
Full‐scale flow range 0~20 0~100 0~250 L/min
Accuracy ±(2.0+0.5FS) %
Repeatability 0.5 %
Turn‐down ratio 80:1
Response time <2.0 sec
Working temperature ‐10~55 °C
Maximum pressure 0.8 MPa
Humidity <95, no condensation %RH
Maximum overflow 100 200 400 L/min
Maximum flow change 15 30 60 L/min/sec
Pressure loss 0.6 1.0 2.0 kPa
Power supply 4‐AA batteries (LR6) / 5~24 Vdc
Power consumption >60 (on batteries) day
Power / data interface USB Type‐C
Digital output RS485 Modbus half‐duplex
Wireless options LoRa / WIFI / NB‐IoT / BT LE
Display LCD
Resolution 0.01 L/min (instant) / 1 L (accumulated)
BSPP 1/4 BSPP 3/8” BSPP 1/2”
Mechanical connection
or NPT 1/4” or NPT3/8” or NPT/ 1/2”
Storage temperature ‐20 ~ 70 °C
Reference conditions 20°C, 101.325 kPa, air
Protection IP50
Fluid compatibility Non‐corrosive
CE EN61326‐1; ‐2; ‐3


8. Technical notes for the product performance

8.1 Measurement principle

The products utilize the Company’s proprietary micro‐machined

(MEMS) thermal calorimetric sensing technology. A thermal signal
generator (microheater) is placed on a thermally isolated membrane
where two thermistors are placed symmetrically concerning the
microheater. The flowing fluid carries away the heat from the
microheater causing a re‐distribution of the temperature field which is
registered by the thermistors. The amount of heat carried by the
flowing fluid is dependent on the fluid’s mass as well as its thermal
Figure 8.1: Measurement properties. By precisely gauging the changing of the temperature field
approach illustration. with a metrological reference standard, the fluid’s mass flow rate can
be established and reproduced.
After the circuitry temperature compensation, and with the proper design of the MEMS sensing chip
by adding the pressure balancer that allows the flatness of the membrane at various fluidic pressure
conditions. the calorimetric thermal sensing will guarantee a pressure and temperature independent
mass flow data acquisition. The MEMS technology also allows the mass production of the sensing
elements which significantly reduces the cost compared to a traditional thermal mass flow sensing
element. It enables the current offer with superior value to the users. For additional information,
please refer to the company’s US patents and other publications made available to the public.

8.2 Precautions for the best performance of the product

8.2.1 Comparison with a third party reference meter
It is very common that a user may compare the data from the product with a third‐party reference
meter, and in many cases, there could be some discrepancies.
When performing such a comparison, please note that the reference meter should have a better‐
specified accuracy (about 1/3 of the product), and pay special attention to the differences in the
reading accuracy and full‐scale accuracy.
A full scale accuracy = reading accuracy x (full scale flow rate/ set point (current) flow rate)
Another key point to comparing the different flow meters is that as long as the fluidic flow is a
continuous flow without pulsation, then the fluidic dynamic will have the system following the
Bernoulli equation:

where ρ is the fluid density; g is the acceleration due to gravity; P1 is the pressure of the reference
meter; P2 is the pressure at the test meter; v1 is the velocity of the reference meter, and v2 is the
velocity of the test meter. h1 and h2 are the corresponding height for the meters which in most cases
is the same in the system. Therefore, it would be very critical to have the system with a pressure
variation minimal possible. (This explains our recommendations for the installations in Section 4).
Also, the meter measurement principle is often very important for the understanding of any
discrepancies.

8.2.2 Particle contamination and fluidic cleanness
Any contamination including particles and liquid vapors would be detrimental to the accuracy of the
flow measurement and also to the meter functionality. It is important to ensure the applied flow
medium will be clean and dry. If any contamination is suspected, please allow experienced technical
personnel to have it checked and re‐conditioned. Do not use a foreign cleanser or other fluids to
clean the flow path which could bring irrecoverable damage.

8.2.3 Apply to a different gas medium
The product is calibrated with a high precision NIST traceable metrological standard with clean and
dry air. In case the meter will be applied to meter the other clean and dry gas, a correct gas
conversion factor needs to be registered into the meter before the measurement.
The meter operates similarly to the principle described in the international standard for thermal mass
flow meters (ISO 14511:2001 ‐ Measurement of fluid flow in closed conduits — Thermal mass
flowmeters). Due to the meter assembled procedure, the head loss value from the meter to the
meter would not be 100% identical, and at the large dynamic measurement range, the thermal
response would also have some deviations and nonlinearity from gas to gas. Therefore,
measurement by the meter for a gas medium other than the calibration gas would bear larger
measurement errors, particularly at the low Reynold number range where the laminar flow has a
sensitive flow profile.
9. Troubleshooting

Phenomena Possible causes Actions
Power not connected; battery Connect the power, check the
No signal / display empty cable
Cable connection incorrect Check cable

No flow or clogging Check flow and contamination
Power regulator failure Return to factory
Sensor failure Return to factory
Large errors or unexpected
Particles, fluid type Check system
flowrate
Erroneous or large noise Vibration, unstable flow Check system
Valve not work Wire connection, valve Return to factory
Offset unstable Circuitry instability Check system, power off
No digital interface Wrong address, software Check commands, connection
No wireless, BT cannot pair Wrong model, data jam Check model, power off/on


10.Warranty and Liability
(Effective January 2018)
Siargo warrants the products sold hereunder, properly used, and properly installed under normal
circumstances and service. As described in this user manual, it shall be free from faulty materials or
workmanship for 180 days for OEM products and 365 days for non‐OEM products from the date of
shipment. This warranty period is inclusive of any statutory warranty. Any repair or replacement
serviced product shall bear the same terms in this warranty.
Siargo makes no warranty, representation, or guarantee and shall not assume any liability regarding
the suitability of the products described in this manual for any purposes that are not specified in this
manual. The users shall be held full responsibility for validating the performance and suitability of
the products for their particular design and applications. For any misusage of the products out of the
scope described herein, the user shall indemnify and hold Siargo and its officers, employees,
subsidiaries, affiliates, and sales channels harmless against all claims, costs, damages, and expenses
or reasonable attorney fees from direct or indirect sources.
Siargo makes no other warranty, express or implied, and assumes no liability for any special or
incidental damage or charges, including but not limited to any damages or charges due to installation,
dismantling, reinstallation, etc. other consequential or indirect damages of any kind. To the extent
permitted by law, the exclusive remedy of the user or purchaser, and the limit of Siargo's liability for
any and all losses, injuries, or damages concerning the products, including claims based on contract,
negligence, tort, strict liability, or otherwise shall be the return of products to Siargo, and upon
verification of Siargo to prove to be defective, at its sole option, to refund, repair or replacement of
the products. Regardless of form, no action may be brought against Siargo more than 365 days after
a cause of action has accrued. The products returned under warranty to Siargo shall be at the user or
purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are
deemed to have accepted this limitation of warranty and liability, which contains the complete and
exclusive limited warranty of Siargo. It shall not be amended, modified, or its terms waived except
by Siargo's sole action.
This manual's product information is believed to be accurate and reliable at the time of release or
made available to the users. However, Siargo shall assume no responsibility for any inaccuracies
and/or errors and reserves the right to make changes without further notice for the relevant
information herein.
This warranty is subject to the following exclusions:
(1) Products that have been altered, modified, or have been subject to unusual physical or
electrical circumstances indicated but not limited to those stated in this document or any
other actions which cannot be deemed as proper use of the products;

(2) Products that have been subject to chemical attacks, including exposure to corrosive
substances or contaminants. In the case of battery usage, long term discharge or leakage
induced damages;
(3) Products that have been opened or dismantled for whatever reasons;
(4) Products that have been subject to working conditions beyond the technical specification as
described by this manual or related datasheet published by the manufacturer;
(5) Any damages incurred by the incorrect usage of the products;
(6) Siargo does not provide any warranty on finished goods manufactured by others. Only the
original manufacturer's warranty applies;
(7) Products that are re‐sold by unauthorized dealers or any third parties.


11. Service contact

Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions, and or
product support, please contact customer service at the address listed below. We will respond to your
request in a timely fashion and will work with you toward your complete satisfaction.

Customer service and all orders should be addressed to

Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210,
Santa Clara, California 95054, USA
Phone: +01(408)969‐0368
Email: [email protected]

For orders, please provide an accurate and full postal address. Siargo will not ship to P.O. Boxes or
via a third party.

For further information and updates, please visit www.Siargo.com.


Appendix I: Product evaluation kit

Siargo offers a product evaluation kit, including a digital data converter, USB data cable, and User
Application software, that allows the user to evaluate the product performance on a Microsoft
Windows‐based computer. For some simple applications with digital data transfer, this kit could
serve the purpose. The user can read and visualize the flow rate of the product, obtain the totalized
values, and save the data for further analysis. It can read from up to 128 sensors with the RS485
interface in serial.
For further information and purchase of the evaluation kit, please contact the manufacturer or the
sales representative.
Each converter has a fixed cable that can be
Cable to connect directly connected to the product. The USB
to the product cable connected to the PC is also included.
For most of the products, the power from the
PC via the USB cable will be sufficient to power
the sensor product, no external power will be
USB cable to required. However, for multiple sensors in serial,
connect to PC
the power via the USB cable may not be enough,
External power an external power adapter with 8~24Vdc will be
adapter (optional) required.


Appendix II: Document history

Revision C.5 (April 2022)
Update valve operation, and minor corrections in some descriptions.

Revision C.4 (January 2022)
Added the valve option.

Revision C.3 (November 2021)
Added the response time setting.
Corrections.

Revision C.2 (July 2021)
Corrections.

Revision C.1 (March 2021)
The formal release of the 3rd generation products.

Revision C.0 (September 2020)
The first release of the 3rd generation products.

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Start_bits Address Function codes Data CRC Stop_bits

Code Name Functions

Functions Description Register Modbus

L/min SCFH NCMH L/min SCFH NCMH

The products utilize the Company’s proprietary micro‐machined

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