Mems Mirror Koth9003e

Technical information
MEMS mirrors
Contents
1. Overview 4. How to use

P.01 1-1 Structure P.20 4-1 Linear mode one-dimensional type
1-2 Operating principle 4-2 Raster scanning two-dimensional type
1-3 Drive method 4-3 Linear mode two-dimensional type
2. Operation mode 5. High-accuracy control

P.03 2-1 Linear mode P.30 5-1 Correction curve for optical deflection angle
2-2 Non-linear mode vs. drive current characteristics
2-3 Mirror types and operation modes 5-2 Low-speed operation and high-speed operation
5-3 Linear mode
5-4 Ringing correction
3. Specifications 5-5 Temperature correction
P.04 3-1 One-dimensional type 5-6 Reproducibility of optical deflection angle
3-2 Raster scanning two-dimensional type
3-3 Linear mode two-dimensional type
1-1 Structure
1. Overview
MEMS mirrors consist of a mirror chip and a magnet.
Our MEMS mirrors are miniature electromagnetic
The mirror chip includes a mirror, coil and torsion bars
mirrors that incorporate MEMS technology. Within a
[Figure 1-1]. The mirror chip [Figure 1-2] is formed
magnetic field generated by the magnet, electrical current
as a thin film on a portion of a silicon substrate using
flowing in the coil surrounding the mirror produces a
MEMS technology. Whereas electromagnetic mirrors are
Lorentz force based on Fleming’s left-hand rule, and this
usually configured with a magnet surrounding the mirror
force drives the mirror. MEMS mirrors feature a wide
chip, our MEMS mirrors use a small, powerful magnet
optical deflection angle and high mirror reflectivity as
positioned under the mirror chip, a design that achieves
well as low power consumption.
an ultra-compact size. The magnet is designed to provide
an optimal magnetic field to the coil around the mirror.
Description There are two types of MEMS mirrors: a single-axis one-
dimensional type and a dual-axis two-dimensional type.
Low voltage operation
Wide optical deflection angle of mirror [Figure 1-1] Structure
Compact Laser light
Evaluation circuit (USB interface) available

(sold separately) Force
nt
rre
Cu
nt
rre
Cu
Coil Force
Magnet
Magnetic
field
KOTHC0058EB
01
[Figure 1-2] Mirror chip The operation mode that uses resonance is called
resonant mode, and the mode that does not use
resonance is called non-resonant mode. Because non-
resonant mode is used for linear operation that takes
advantage of the excellent linearity between the drive
current and optical deflection angle, it is also called linear
mode. Note that resonant mode is also called non-linear
mode.
1-3 Drive method
There are several general MEMS mirror drive methods

[Table 1-1]. Our MEMS mirrors are electromagnetic. This
method requires only a low voltage to drive both resonant
1-2 Operating principle mode and non-resonant mode, and offers excellent
balance. Electromagnetic MEMS mirrors can be used in a
wide variety of applications, such as in portable battery-
The basic operating principle for controlling the angle of
powered devices.
the mirror is based on Fleming’s left-hand rule [Figure
1-3]. When a coil is placed perpendicular to a magnetic
[Table 1-1] General MEMS mirror drive methods
field, and current flows in the coil, force is exerted on
the coil. This force is called the Lorentz force, and its Electromagnetic
Electrostatic Piezoelectric
magnitude is proportional to the strength of the current Drive method
method method
method
(One-dimensional type)
and magnetic field.
Rotational torque Low High Medium
[Figure 1-3] Operating principle
Drive voltage 50 V to 150 V 20 V to 50 V -
Coil
Lorentz force Drive current - - Approx. 20 mA
Power <<1 mW High Approx. 100 mW

consumption (Approx. 0 mA) (Approx. 20 mA) (Approx. 5 V)
t
ren Optical deflection
Cur
angle ±10° ±25° ±25°
(Non-linear mode)
Magnetic force Optical

Lorentz force deflection angle ±5° Difficult to control ±15°
Torsion bar
KOTHC0072EB
(Linear mode)
The mirror is supported by beams called torsion bars.

The torsion bar serves as the axis of rotation and also as
a torsion spring for suppressing mirror rotation. When
current flows through the coil around the mirror, a torque
that rotates the mirror (Lorentz force) is produced, and
an elastic force of the torsion bar spring is exerted in the
opposite direction. The rotation of the mirror stops when
these two forces balance each other. The mirror's angle
can be changed by varying the magnitude of the current
flowing through the coil to control the torque.
MEMS mirrors resonate at their characteristic oscillation
frequencies, which are determined by their mass, structure,
and spring constant. Using resonance makes it possible to
obtain large mirror deflection angles very quickly using only
a small current. Since mirror movements are represented
as sine waves and complex movements are not possible
when resonating, resonance is used for applications where
constant reciprocating motion suffices.
02
[Table 2-1] MEMS mirror types
2. Operation mode Operation mode
Main
Type Type no.
application
First axis Second axis
As mentioned in section 1-2, “Operating principle,” there
are two operation modes for MEMS mirrors: linear mode S12237-03P Linear mode - Measurement
(non-resonant mode) and non-linear mode (resonant One-dimensional
Non-linear High-speed
mode). - -
mode measurement
S13124-01 Linear mode Linear mode Measurement

2-1 Linear mode Non-linear Image
S13989-01H Linear mode
Two-dimensional mode display
Linear mode is used to accurately control the mirror's Non-linear Non-linear High-speed
-
mode mode image display
optical deflection angle by means of the drive current.
The relationship between the drive current and optical
deflection angle of the mirror exhibits excellent linearity,
and the angle reproducibility relative to the drive
current is high. Note that linear mode is not suitable for
high-speed operation. The mirror must be driven at a
frequency lower than the specific resonant frequency of
the mirror to prevent resonance. Normally, a frequency in
the range of 1/10 the resonant frequency (or less) to 1/5
the resonant frequency (or less) is recommended.
2-2 Non-linear mode
Non-linear mode is a resonance operation mode at the

resonant frequency of the mirror. High-speed operation
is possible, but the optical deflection angle of the mirror
cannot be controlled with high accuracy. Non-linear
mode is used to drive a non-linear mode MEMS mirror or
to drive a non-linear mode axis. Driving a mirror in non-
linear mode requires the application of either a sine-wave
or square-wave current signal at the same frequency as
the mirror's resonant frequency.
In non-linear mode, even if a square wave is applied, the
deflection angle of the mirror operates as a sine wave.
Further, a phase lag occurs in the optical deflection angle
relative to the drive current.
2-3 Mirror types and operation modes
There are two types of MEMS mirrors: a single-axis one-

dimensional type and a dual-axis two-dimensional type.
The two-dimensional mirrors come in various types with
different modes for each axis [Table 2-1].
Currently, Hamamatsu provides a portion of the MEMS
mirrors in Table 2-1. Contact us for future product release
plans.
03
before the drive current reaches its absolute maximum
3. Specifications rating. The drive current must not be increased to its
absolute maximum rating. The magnitude of the drive
current must be observed carefully so that the maximum
3-1 One-dimensional type optical deflection angle is not exceeded. Particularly in
high-speed operation, even when the mirror is driven
with the same current, the maximum optical deflection
Definition of optical deflection angle angle may be exceeded as the resonant frequency is
approached, causing damage to the mirror. The deflection
angle, especially at the resonant frequency, is several tens
Hamamatsu defines the MEMS mirror deflection angle
of times higher than that at low frequencies, which makes
using optical deflection angle, not mechanical deflection
it difficult to control. As such, do not drive the mirror at the
angle. The optical deflection angle is an angle formed
resonant frequency for linear mode MEMS mirrors and
between the incident light and reflected light when a light
axes.
beam from a light source is directed at a mirror. It is twice
Non-linear mode MEMS mirrors and axes must be driven
the mechanical deflection angle, which is the tilt angle of
at the resonant frequency. Note that in non-linear mode,
the mirror [Figure 3-1].
the optical deflection angle when the mirror is driven
at the resonant frequency differs significantly from the
[Figure 3-1] Optical deflection angle
optical deflection angle at other frequencies. Driving the
mirror at frequencies other than the resonant frequency
may produce unexpected optical deflection angles even
Light source
(Semiconductor
when the drive current is adjusted to obtain the optical
laser and the like) deflection angle under the recommended operating
conditions and may damage the mirror.
8°
(Optical deflection When driving a non-linear mode MEMS mirror or axis, use
angle)
drive signals produced by a reference signal generator with
4° excellent temperature stability.
(Mechanical
deflection angle) Mirror
KOTHC0070EB
Recommended operating conditions
Absolute maximum ratings
The re commended operating conditions are for
guaranteeing, “Electrical and optical characteristics
Table 3-1 shows an example of the absolute maximum
[Table 3-3].” Note that even if the recommended
ratings of a MEMS mirror (S12237-03P: linear mode one-
operating conditions are exceeded slightly, as long as the
dimensional MEMS mirror). MEMS mirrors must be used
absolute maximum ratings are not exceeded, the MEMS
within the absolute maximum ratings.
mirror will not be damaged.
Table 3-2 shows the recommended operating conditions
[Table 3-1] Absolute maximum ratings (S12237-03P)
for the S12237-03P. The recommended optical deflection
(Tcase=25 °C, unless otherwise noted) angle is ±15 degrees, but the absolute maximum rating is
Parameter Symbol Value Unit ±18 degrees, so there is about a 3-degree margin. Further,
the recommended drive frequency is DC to 100 Hz.
Drive current Is ±20 mA
For frequencies higher than 100 Hz, the MEMS mirror
Optical deflection angle s ±18 ° operates in non-linear mode and may be damaged, so
we recommend that you use it within the recommended
Operating temperature Topr -40 to +80 °C
operating condition range.
Storage temperature Tstg -40 to +85 °C
[Table 3-2] Recommended operating conditions (S12237-03P)
The maximum optical deflection angle is defined as
Parameter Min. Typ. Max. Unit
the angle that if the mirror deflection angle were to be
increased further, the mirror would be damaged as a Operation mode Linear mode -
result of the mirror making contact with the magnet or
Optical deflection angle -15 - +15 degrees
the other parts.
The maximum drive current is defined as the current Drive frequency DC - 100 Hz
that may melt the coil wires. When the drive current is
increased, the maximum optical deflection angle is reached
04
Electrical and optical characteristics optical deflection angle under recommended operating
conditions.
Figure 3-3 shows the optical deflection angle versus
Table 3-3 shows the electrical and optical characteristics of
drive current characteristics of the S12237-03P. The
the S12237-03P.
relationship between the optical deflection angle
and drive current can be approximated by a straight
[Table 3-3] Electrical and optical characteristics
(S12237-03P) line. From the graph that connects the minimum and
maximum drive currents with a straight line, the current
(Recommended operating conditions unless otherwise noted)
for a given deflection angle can be calculated. This
Parameter Symbol Condition Min. Typ. Max. Unit method enables the mirror to be controlled to any optical
Mirror size A 2.59 2.60 2.61 mm
deflection angle with an accuracy of 1° or less (if you
want to control the mirror with even higher accuracy, see
s=-15° -17 -15 -13 chapter 5, “High-accuracy control.”)
Ta=25 °C
Drive current Is mA
fs=DC In Figure 3-3, the drive current's polarity represents the
s=+15° +13 +15 +17
direction of the drive current flowing through the MEMS
Resonant
frequency
fS-R Is=0.6 mAp-p 500 530 560 Hz mirror coil. The drive current's direction can be used to
change the direction of the optical deflection angle. In
Reflectance Or =450 to 650 nm 80 - - % Figure 3-3, the drive current in one direction produces
Coil resistance Rs Ta=25 °C, Is=0.2 mA 135 165 195 Ω 15° of optical deflection angle and in both positive and
negative directions produce a total of 30°.
Note that the optical deflection angle characteristics
Mirror reflectivity of linear mode MEMS mirrors are measured using DC
Aluminum metal is deposited on the mirror surface operation.
of the MEMS mirror providing high reflectance in the
visible region. Figure 3-2 shows the relationship between [Figure 3-3] Optical deflection angle vs. drive current
(S12237-03P)
wavelength and reflectance. For the three primary colors
of red, blue, and green, reflectance is 85% or higher. 20
(Typ. Ta=25 °C)
Note that reflection from the chip surface outside the

mirror area is not zero, so if the light source's beam size
Optical deflection angle (°)
is greater than the mirror size, the reflection appears as 10
stray light on the target. Design the optical system so that

the beam size is smaller than the mirror size.
0
[Figure 3-2] Mirror reflectivity

(Typ. Ta=25 °C) -10
100
95
-20
-20 -10 0 10 20
90
Reflectivity (%)
Drive current (mA)

KOTHB0004EC
85
[Figure 3-4] Drive current and optical deflection angle directions

80
(S12237-03P)
75 Applies negative current to ӳcoil1
No drive current
70
400 600 800 1000 1200 1400 1600 1800 Applies positive current to ӳcoil1
ŎŪųųŰų
Wavelength (nm) ӲCoil2 ӳCoil1

KOTHB0020EB
KOTHC0071EC
Drive current
Drive current is an important parameter that defines
Resonant frequency
the optical deflection angle. Drive current, in linear
mode and non-linear mode, is defined as values that Resonant frequency in linear mode serves as a guide
can achieve the minimum and maximum values of the for determining the range of drive frequencies. Figure
05
3-5 shows the frequency characteristics of the S12237 [Figure 3-6] Optical deflection angle vs. drive frequency
-03P. At the resonant frequency, an extremely small drive (S12237-03P)
current of 0.6 mA produces a large optical deflection angle. (Typ. Ta=25 °C, Is=15 mA)
30
A small shift in the drive current can cause the absolute
maximum rating of the optical deflection angle to be 25
exceeded and may damage the mirror. Never drive the

Optical deflection angle's
absolute maximum ratings
mirror at a frequency near the resonant frequency in linear 20
mode.
15
[Figure 3-5] Frequency characteristics (S12237-03P)

10
(Typ. Ta=25 °C, Is=±0.3 mA=0.6 mAp-p, input waveform: sine wave)
20
Recommended
5 operating conditions
0
15
0 100 200 300
Drive frequency (Hz)

KOTHB0022EA
10
Coil resistance
5 Range shown with broken line:
not usable The inductive component due to the coil wiring around
the MEMS mirror is extremely small. It is less than several
0 microhenries for linear mode MEMS mirrors and 0.1 μH
0 200 400 600 800
or less for non-linear mode MEMS mirrors. As such, at the
Frequency (Hz) linear mode frequency region around several hundred
KOTHB0016EB
hertz and at the non-linear mode frequency region
around several megahertz, the coil impedance is 0.1  or
Drive frequency less, and this can be ignored when compared to the pure
Figure 3-6 shows the frequency characteristics of the resistivity of the coil. In most cases, the coil resistance
optical deflection angle in the low frequency region. Here, can be assumed to be its pure resistance. Note that the
a sine wave with a 15 mA current amplitude is driving coil resistance indicated in the electrical and optical
the mirror. At the recommended drive frequencies of characteristics is for 25 °C.
100 Hz or less, the graph shows nearly flat frequency
characteristics, but as the drive frequency is increased, Temperature characteristics
the optical deflection angle increases. At around 180 Hz,
In MEMS mirrors, the coil resistance, the magnetic
the optical deflection angle's absolute maximum rating of
force of the magnet, the resonant frequency, and the
18° is reached, and the possibility of damaging the mirror
like have temperature characteristics. To control the
increases. You must drive the MEMS mirror under the
mirror's optical deflection angle with high accuracy over
recommended operating conditions (drive frequency: DC
a wide temperature range, you must pay attention to the
to 100 Hz).
temperature characteristics.
Figure 3-7 shows the temperature characteristics of
resonant frequency for the S12237-03P.
06
[Figure 3-7] Temperature characteristics of resonant frequency [Figure 3-9] Temperature characteristics of optical
(S12237-03P) deflection angle (S12237-03P)
(Typ. Is=0.6 mAp-p) (Typ. Is=15 mA)
535 17
534
533

Resonant frequency (Hz)
16
532
531
530 15
529
528
14
527
526
525 13
-20 -10 0 10 20 30 40 50 60 70 -20 -10 0 10 20 30 40 50 60 70
Case temperature (°C) Case temperature (°C)

KOTHB0019EB KOTHB0086EA
In the operating temperature range, the resonant In the measurement of Figure 3-9, a current source was
frequency varies by about 0.1 to 0.2%, and the effect on used. Current is not affected by coil resistance changes
the characteristics can be ignored. due to temperature. Therefore, it can be assumed that the
Figure 3-8 shows the temperature characteristics of coil optical deflection angle is changing due to the changes in
resistance for the S12237-03P. When the MEMS mirror is the magnetic force caused by temperature.
driven by a voltage source, the temperature characteristics In Figure 3-9, we can see that the changes in the magnetic
of the coil resistance cannot be ignored. When the MEMS force due to temperature are causing a deflection angle
mirror is driven by a current source, the temperature error of about ±0.5°. Because the coil resistance changes
characteristics of the coil resistance can be ignored. according to temperature, the chip temperature can be
Therefore, we recommend that the MEMS mirror be monitored by reading the coil resistance. And this makes
driven by a current source. temperature correction possible.
[Figure 3-8] Temperature characteristics of coil resistance

(S12237-03P)
3-2 Raster scanning two-dimensional type
(Typ. Is=0.1 mA)
200
Definition of optical deflection angle
190
180 The two-dimensional type MEMS mirror S13989-01H

Coil resistance (Ω)
has a window material that is tilted 20° with respect to

170
the scanning direction of the slow axis in order to achieve
160 a highly reliable hermetic seal package. The tilt of the
window material is set so that the laser light reflected
150
from the front or back of the window does not enter the
140 mirror scan's projection range [Figure 3-10].
130
-20 -10 0 10 20 30 40 50 60 70 [Figure 3-10] Effect of tilting window material
Case temperature (°C) Scan light Incident light
KOTHB0018EB
The temperature characteristics of the magnet’s magnetic

force are not easy to measure. As such, the changes in
the magnetic force due to the magnet temperature is Reflected light from
window surface
estimated from the changes in the optical deflection angle
due to temperature. Figure 3-9 shows the changes in the
Window
optical deflection angle relative to temperature.
Mirror
KOTHC0082EA
07
The optical deflection angle of the MEMS mirror is Depending on the incident angle of the laser light on the
defined as twice the mechanical deflection angle. mirror and the mechanical deflection angle, the light path
Since the laser light refracts when it passes through the deviation due to refraction when passing through the
tilted window material, the path of the mirror-reflected material must be considered.
light deviates depending on the laser light's incident Figure 3-13 shows the light path deviation when the
angle on the mirror and the mechanical deflection angle optical deflection angle changes in the scanning direction
[Figure 3-11]. The following shows how to calculate the of the slow axis. When the incident angle on the mirror is
amount of light path deviation of the mirror-reflected 20°, the light path deviation is ±100 μm or less.
light.
[Figure 3-13] Light path deviation vs. optical deflection angle
[Figure 3-11] Light path deviation of the mirror-reflected light (slow axis)
(Typ. Ta=25 °C)
Δp 0.5
α
Δp 0.4
t
Δp
0.3
Light path deviation (mm)

Window 0.2
ɸ Incident angle: 20°
+θ 0.1
-θ Incident angle: 10°
0
-0.1
Mirror
-0.2
KOTHC0083EA
Incident angle: 0°
-0.3
The amount of light path deviation Δp [mm] is expressed -0.4
by equation (3-1). -0.5
-12 -10 -8 -6 -4 -2 0 2 4 6 8 10 12
sinγ
t sin{γ - arcsin ( )} Optical deflection angle (°)
n ............... (3-1)
∆p = KOTHB0066EA
sinγ
cos {arcsin ( )}
n
Figure 3-14 shows the light path deviation when the
t : window material thickness [mm]
γ: (α - ϕ) - θ
optical deflection angle changes in the scanning direction
α: incident angle of the laser light on the mirror [°] of the fast axis. The light path deviation is not affected
ϕ: angle of the window material relative to the mirror [°]
θ: optical deflection angle of the mirror-reflected light [°] by the incident angle on the mirror. Note that light path
n: refractive index of window material (1.526 when λ=546 nm) deviation occurs due to light refraction caused by the
window material (±180 μm or less).
In Figure 3-12, we assume a case in which laser light is
projected at a flat screen that is tilted by β° with respect to
the mirror (mechanical deflection angle: 0°). The amount (fast axis)
of position deviation on the screen Δα [mm] is expressed
(Typ. Ta=25 °C)
by equation (3-2). 0.5
0.4
∆p ...............
∆α = (3-2) 0.3
cosη
0.2
η = (α - β) - θ
0.1
0
[Figure 3-12] Position deviation on screen
-0.1
-0.2
Δα
-0.3
Δα
-0.4
Δα α
β -0.5
t
-20 -16 -12 -8 -4 0 4 8 12 16 20
Window Optical deflection angle (°)

Screen
ɸ KOTHB0067EA
+θ
-θ
Absolute maximum ratings

Mirror
KOTHC0084EA
Table 3-4 shows the absolute maximum ratings of the

two-dimensional type MEMS mirror S13989-01H. MEMS
08
mirrors must be used within the absolute maximum n-1
Is_rms = 1 ∑ Is(i)2 ............... (3-4)
ratings. n i=0
i : data index
n : number of drive current data values
[Table 3-4] Absolute maximum ratings (S13989-01H) Is(i): ith drive current [A]
(Ta=25 °C unless otherwise noted)
Parameter Symbol Value Unit Recommended operating conditions

Fast axis Optical deflection angle θf ±22 °
The recommended operating conditions [Table 3-5] are
Drive current Is_dc ±100 mAdc
Slow axis
for guaranteeing the electrical and optical characteristics
Optical deflection angle θs_max ±14 ° [Table 3-6]. If the recommended operating conditions
are exceeded slightly, as long as the absolute maximum
Power consumption Pcoil 520 mW
ratings are not exceeded, the MEMS mirror will not be
Operating temperature Topr ‐20 to +60 °C damaged. Note that if the drive frequency of the slow
axis exceeds 100 Hz, the MEMS mirror will be in non-
Storage temperature Tstg ‐40 to +85 °C
linear mode, which may damage the MEMS mirror, so we
recommend using it under the recommended operating
The fast axis is exclusive to non-linear mode and must be conditions (100 Hz or less).
driven at the resonant frequency. The optical deflection
angle when the mirror is driven at a non-resonant [Table 3-5] Recommended operating conditions
frequency differs significantly from the optical deflection (S13989-01H)
angle when driven at the resonant frequency. Driving the
mirror at frequencies other than the resonant frequency Parameter Min. Typ. Max. Unit
may result in unexpected optical deflection angles
Incident angle -15 0 +15 °
even when the drive current is set to obtain the optical
deflection angle under the recommended operating Fast axis Optical deflection angle -20 - +20 °
conditions, and may damage the mirror. Drive frequency Resonant frequency Hz
The slow axis is exclusive to linear mode. The drive
current must be set so that the optical deflection angle Incident angle -13 +20 +25 °
does not exceed the absolute maximum rating. In Slow axis Optical deflection angle -12 - +12 °
addition, in high-speed operation, the maximum optical
Drive frequency 10 - 100 Hz
deflection angle may be exceeded as the resonant
frequency is approached, causing damage to the mirror.
Do not drive the slow axis at the resonant frequency The incident angle in the recommended operating
because the optical deflection angle at the resonant conditions is the angle of incident light on the mirror with
frequency will be several hundred times that at a low an optical deflection angle of 0°. It is an angle at which
frequency and cannot be controlled. the reflected laser light can pass through the effective
The slow-axis drive current at the absolute maximum area of the window material when a laser collimated to
rating is a DC current that damages wiring. Since driving ϕ1 mm is incident on the mirror and scanned with the
the slow axis with a DC current may reduce the service recommended optical deflection angle. Figure 3-15 shows
life, driving with an AC current is recommended. the definition of the incident angle. Figure 3-16 shows the
Power consumption indicates the total power consumption effective area of the window material.
of the fast-axis and slow-axis coils. Since the wiring
may be damaged by the heat generated by the coil, set
the drive currents for the fast and slow axes so that the
absolute maximum rating of power consumption is not
exceeded. Power consumption is given by equation (3-3).
P_coil = (Rs × Is_rms2 + Rf × If_rms2) × X × 1000 [mW] ............... (3-3)
Rs : coil resistance of slow axis [Ω]

Is_rms: rms value of slow-axis drive current [A]
Rf : coil resistance of fast axis [Ω]
If_rms : rms value of fast-axis drive current [A]
X : correction factor (=2)
When the slow axis is operated by a drive current with an

arbitrary waveform, Is_rms is given by equation (3-4).
09
[Figure 3-15] Definition of incident angle [Table 3-6] Electrical and optical characteristics (S13989-01H)
A (Recommended operating conditions unless otherwise noted)
Parameter Symbol Condition Min. Typ. Max. Unit
-15° Mirror size A ϕ1.21 ϕ1.23 ϕ1.25 mm

+15° θin=0 to +43°
B
Transmittance of
T 95 - - %
window material λ=460 to 640 nm
Resonant Ta=25 °C, θf=±20°
A-A ff-r 28.6 29.3 30.0 kHz
Fast axis scan direction A frequency Is=0 mA, square wave
Fast axis
incident angle
Ta=25 °C, ff=ff-r
-13° +25° Drive current If θf=±20°, Is=0 mA 12 22 34 mAamp.
square wave
Ta=25 °C, If=0.1 mA
Coil resistance Rf 7.5 10.5 13.5 Ω
Is=0 mA
Ta=25 °C
Resonant
fs-r Is=±0.3 mA 525 575 625 Hz
frequency
sine wave
Slow axis
Ta=25 °C θs=+12° 140 175 210
B-B
fs=60 Hz
Slow axis scan direction incident angle Drive current Is mAamp.
KOTHC0081EA
sine wave
If=0 mA θs=-12° -210 -175 -140
[Figure 3-16] Effective area of window material Ta=25 °C, If=0 mA

Coil resistance Rs 6 8 10 Ω
Is=0.1 mA
11.7
Mirror reflectivity
Effective area 8.55
Aluminum alloy is deposited on the mirror of the S13989-

12.55
11.55
A A
01H providing high reflectance in the visible region.
Reflectance of 80% or more is achieved for red, blue, and
green [Figure 3-17]. If the beam size of the incident light
6
is larger than the mirror size, stray light reflected from the
11.2
8.26 chip surface other than the mirror will occur. The optical
e area
e ctiv
Ef f
system must be designed so that the beam size is smaller
than the mirror size.
Cross section A-A
KOTHC0089EA [Figure 3-17] Mirror reflectance vs. wavelength
(Typ. Ta=25 °C, white light source, incident angle*=8°)
100
Electrical and optical characteristics
Table 3-6 shows the electrical and optical characteristics

of the S13989-01H. 90
Reflectance (%)
80
70
400 500 600 700
Wavelength (nm)
* Incident angle of light to the mirror

KOTHB0060EA
Transmittance of window material
Figure 3-18 shows the spectral transmittance characteristics

of the S13989-01H window material.
10
[Figure 3-18] Spectral transmittance characteristics of the slow axis, which causes the torsion bar's mechanical
window materials characteristics to change. Because the relationship
(Typ. Ta=25 °C) between the drive current and the optical deflection angle
100
of the fast axis varies depending on the slow-axis drive
99
current, the fast-axis drive current needs to be adjusted.
98
97
Transmittance (%)
[Figure 3-20] Drive current (fast axis) vs. optical

96 deflection angle (slow axis)
95
(Typ. θf=±20°, ff=ff-r, fs=60 Hz, low-axis drive current: sine wave)
22
94
93
Fast-axis drive current max. (mA)

92
Incident angle: 0°
Incident angle: 30° 21
91
Incident angle: 45°
90
400 500 600 700
Wavelength (nm)
20
Note: Incident angle
=Angle of incidence of light on window material
KOTHB0061EA
19
Drive current (fast axis) 0 2 4 6 8 10 12
The fast-axis drive current given in the table of electrical Slow-axis optical deflection angle max. (°)
KOTHB0068EA
and optical characteristics is defined as a value at which
the maximum optical deflection angle can be obtained Resonant frequency (fast axis)
under the recommended operating conditions. Figure
3-19 shows the optical deflection angle versus the drive The fast axis exclusive to non-linear mode must be
current characteristics when a single fast axis is driven. driven at the resonant frequency. Figure 3-21 shows
For the fast axis, the drive frequency must be set to the the frequency characteristics of the fast axis near the
resonant frequency. The relationship between the optical resonant frequency. Figure 3-21 shows the characteristics
deflection angle and drive current of the fast axis is non- (hardening) in which the frequency characteristics are
linear. tilted to the high frequency side. Hardening occurs due
to the mechanical properties of the torsion bars. If the
[Figure 3-19] Optical deflection angle vs. drive current drive frequency shifts to the higher frequency side of
(S13989-01H, fast axis) the resonant frequency, the optical deflection angle
(Typ. Ta=25 °C, θs=0°, ff=ff-r, drive current: square wave) decreases drastically.
25
The resonant frequency varies depending on the optical
deflection angle amplitude, slow-axis drive conditions,
20
ambient temperature, and changes in torsion bar
mechanical properties over time. Operating the fast axis

15 stably at the resonant frequency requires performing
feedback control to monitor the resonance state and
10 adjust the drive frequency to the resonant frequency.
0
0 10 20 30
Drive current max. (mA)

KOTHB0062EA
The fast-axis drive current varies depending on the

optical deflection angle and the drive current frequency
of the slow axis. Figure 3-20 shows changes in the fast-
axis drive current when the optical deflection angle of
the slow axis changes. This is because the amount of heat
generated by the coil changes due to the drive current of
11
[Figure 3-21] Optical deflection angle vs. drive frequency [Figure 3-23] Back electromotive force vs. optical
(fast axis) deflection angle (fast axis)
(Typ. Ta=25 °C, θs=0°, If=22 mAamp., drive current: square wave) (Typ. θs=0°, ff=ff-r)
25 30
High to low
Maximum optical deflection angle (°)
Back electromotive force max. (mV)

Low to high
25
20
20
15
15
10
10
5
5
0 0
29275 29285 29295 29305 29315 29325 0 5 10 15 20
Frequency (Hz) Optical deflection angle max. (°)

KOTHB0064EA KOTHB0069EA
Back electromotive force (fast axis) [Figure 3-24] Back electromotive force vs. optical
deflection angle (slow axis)
When the fast axis is operating at the resonant frequency,
(Typ. θs=0°, ff=ff-r)
back electromotive force is generated in the fast- and 25
slow-axis coils. Monitoring the amplitude of this back

electromotive force allows the amplitude of the fast axis's 20
optical deflection angle to be determined.

Figure 3-22 shows the timing chart (fast axis) of the drive 15
current, optical deflection angle, and back electromotive
force. When the fast axis is operating at the resonant 10
frequency, the timing of the back electromotive force and
drive current is the same, and the mirror phase is delayed
5
by 90° relative to this timing. The back electromotive force
is monitored at the 1/4 cycle point of the drive frequency
0
(resonant frequency). 0 5 10 15 20
Optical deflection angle max. (°)

[Figure 3-22] Timing chart (fast axis) of the drive current, optical KOTHB0070A
deflection angle, and back electromotive force

Drive current (slow axis)
CLK
The slow-axis drive current given in the table of electrical

Drive current
and optical characteristics is defined as a value at which
Optical the minimum and maximum optical deflection angles
deflection
angle can be obtained under the recommended operating
Back conditions in linear mode.
electromotive
force
The optical deflection angle versus the drive current
Time
characteristics when a single slow axis is driven [Figure
KOTHC0090EA 3-25] can be approximated to a straight line. From the
graph that connects the minimum and maximum drive
Figures 3-23 and 3-24 show the relationship between the currents with a straight line, the drive current for a given
back electromotive force and optical deflection angle optical deflection angle can be calculated. With this
of the fast and slow axes. This relationship is linear, method, the optical deflection angle can be controlled
and the back electromotive force can be converted into with an accuracy of 1° or less. Strictly speaking, the
the optical deflection angle of the fast axis. The back relationship can be approximated by a cubic polynomial
electromotive force is related to magnetic force. And function, so a cubic polynomial function must be used to
since magnetic force varies depending on the ambient control the MEMS mirror with high accuracy.
temperature, temperature correction is necessary to In Figure 3-25, the drive current's polarity represents the
obtain accurate back electromotive force. direction of the drive current flowing through the slow-
12
axis coil. The drive current's direction can be used to [Figure 3-27] Optical deflection angle vs. drive frequency (slow axis)
change the direction of the optical deflection angle. The (Typ. Ta=25 °C, θf=0°, Is=±0.3 mA, drive current: sine wave)
1000
drive current in one direction produces 12° of optical
Optical deflection angle (relative value)

deflection angle, and that in both positive and negative
directions produces 24°.
100
[Figure 3-25] Optical deflection angle vs. drive current (slow axis)
(Typ. Ta=25 °C, θf=0°, fs=60 Hz, drive current: sine wave) 10
15
10
1
0.1
0 0 200 400 600 800
Frequency (Hz)
-5 KOTHB0065EA
-10 Temperature characteristics
-15 Figures 3-28 to 3-37 show the temperature characteristics

-300 -200 -100 0 100 200 300
when a single axis is driven for each of the fast and slow
Drive current max. (mA) axes of the S13989-01H. The magnet’s magnetic force,
KOTHB0063EA
resonant frequency, and coil resistance have temperature
The slow-axis drive current varies depending on the characteristics. Since the magnetic force varies with
optical deflection angle of the fast axis [Figure 3-26]. The temperature, the optical deflection angle and back
change in the slow-axis drive current is small with respect electromotive force change.
to the optical deflection angle of the fast axis.
[Figure 3-28] Temperature characteristics of optical
deflection angle (fast axis)
[Figure 3-26] Drive current (slow axis) vs. optical
deflection angle (fast axis) (Typ. If=22 mA, ff=ff-r, θs=0°)
24
(Typ. ff=ff-r θs=±12°, fs=60 Hz, drive current: sine wave)
176
22
Slow-axis drive current max. (mA)
175
20
18
174
16
-20 0 20 40 60
173
0 5 10 15 20 Ambient temperature (°C)
KOTHB0072EB
Fast-axis optical deflection angle max. (°)
KOTHB0071EA
Resonant frequency (slow axis)
Figure 3-27 shows the frequency characteristics of the

slow axis. Since the slow axis is exclusive to linear mode,
the drive frequency must be set to 100 Hz or less (solid
line in Figure 3-27). The resonant frequency of the slow
axis is approximately 575 Hz. If the frequency is higher
than 100 Hz, the optical deflection angle will increase and
moving parts may be damaged.
13
[Figure 3-29] Temperature characteristics of resonant [Figure 3-32] Temperature characteristics of coil resistance
frequency (fast axis) (fast axis)
(Typ. θf=±20°, θs=0°) (Typ. If=0.1 mA)
29600 13
29500
12

29400
11
29300
10
29200
9
29100
29000 8
-20 0 20 40 60 -20 0 20 40 60
Ambient temperature (°C) Ambient temperature (°C)

[Figure 3-30] Temperature characteristics of back [Figure 3-33] Temperature characteristics of optical
electromotive force (fast axis) deflection angle (slow axis)
(Typ. θf=±20°, ff=ff-r, θs=0°) (Typ. Is=175 mA, fs=60 Hz, drive current: sine wave, θf=0°)
34 13
32
30
12
28
26
24 11
-20 0 20 40 60 -20 0 20 40 60

KOTHB0074EA KOTHB0077EB
[Figure 3-31] Temperature characteristics of slow axis’s back [Figure 3-34] Temperature characteristics of resonant
electromotive force that occurs with fast-axis operation frequency (slow axis)
(Typ. θf=±20°, ff=ff-r, θs=0°) (Typ. Is=0.6 mAp-p, θf=0°)
24 590
22
580
20
570
18
16 560
-20 0 20 40 60 -20 0 20 40 60

14
[Figure 3-35] Temperature characteristics of Q factor
(slow axis)
3-3 Linear mode two-dimensional type
(Typ. Is=0.6 mAp-p, θf=0°)
450
Definition of optical deflection angle
430
The linear mode two-dimensional type MEMS mirror

410 S13124-01 is equipped with the window material in order
Q factor
to prevent foreign matter from adhering to the mirror

section. The window material tilt (20° with respect to the
390
scanning direction of the first axis) is set so that the laser
light reflected from the front or rear surface of the window
370
does not enter the mirror scanning projection range.
Since the laser light refracts when it passes through the
350
-20 0 20 40 60 tilted window material, the path of the mirror-reflected
light deviates depending on the laser light's incident
Ambient temperature (°C)
KOTHB0079EA
angle on the mirror and the mechanical deflection angle.
See Figure 3-11 and Figure 3-12 for how to calculate this
[Figure 3-36] Temperature characteristics of coil resistance deviation amount.
(slow axis) Figure 3-38 (a) shows the light path deviation when the
(Typ. Is=0.1 mA) optical deflection angle changes in the scanning direction
10
of the first axis. When the incident angle on the mirror is
20°, the light path deviation is ±0.1 mm or less.
9
Figure 3-38 (b) shows the light path deviation when the
optical deflection angle changes in the scanning direction
of the second axis. The light path deviation is not affected

8 by the incident angle on the mirror. Refraction of light in
the window material causes a light path deviation of ±0.1
mm or less.
7

6 (a) First axis
-20 0 20 40 60
(Typ. Ta=25 °C)
Ambient temperature (°C) 0.5
KOTHB0080EA
0.4
0.3
[Figure 3-37] Temperature characteristics of temperature
sensor resistance 0.2

Incident angle: 20°
0.1
(Typ. Ith=0.1 mA) Incident angle: 10°
370
0
350 -0.1
-0.2
330 Incident angle: 0°
-0.3
Resistance (Ω)
310 -0.4
-0.5
290 -10 -8 -6 -4 -2 0 2 4 6 8 10

270
KOTHB0107EA
250
230
-20 0 20 40 60

KOTHB0081EA
15
(b) Second axis Recommended operating conditions
(Typ. Ta=25 °C)
0.5
The recommended operating conditions [Table 3-8] are
0.4
for guaranteeing the electrical and optical characteristics
0.3
[Table 3-9]. If the recommended operating conditions

0.2
are exceeded slightly, as long as the absolute maximum
0.1
ratings are not exceeded, the MEMS mirror will not be
0
damaged. If the drive frequency exceeds 90 Hz, the MEMS
-0.1 mirror will be in non-linear mode, which may damage
-0.2 the MEMS mirror. We recommend using it under the
-0.3 recommended operating conditions (90 Hz or less).
-0.4
-0.5 [Table 3-8] Recommended operating conditions (S13124-01)

-10 -8 -6 -4 -2 0 2 4 6 8 10
Optical deflection angle (°) Parameter Min. Typ. Max. Unit

KOTHB0108EA
Incident angle -12 +20 +21 °
Absolute maximum ratings First Optical deflection

-10 - +10 °
axis angle
Table 3-7 shows the absolute maximum ratings of the Drive frequency DC - 90 Hz
S13124-01. MEMS mirrors must be used within the Incident angle -15 0 +15 °
absolute maximum ratings.
Second Optical deflection
-10 - +10 °
axis angle
[Table 3-7] Absolute maximum ratings (S13124-01)
Drive frequency DC - 90 Hz
(Ta=25 °C unless otherwise noted)
Parameter Symbol Value Unit

The incident angle in the recommended operating
Optical deflection conditions is the angle of incident light on the mirror with
θ1_max ±12 °
First angle
axis
an optical deflection angle of 0°. It is an angle at which
Drive current I1 ±20 mA the reflected laser light can pass through the effective
area of the window material when a laser collimated to
Optical deflection
θ2_max ±12 ° ϕ1.95 mm is incident on the mirror and scanned with the
Second angle
axis recommended optical deflection angle. Figure 3-39 shows
Drive current I2 ±25 mA
the definition of the incident angle.
Operating temperature Topr -20 to +80 °C
[Figure 3-39] Definition of incident angles
Storage temperature Tstg -40 to +85 °C
The first and second axes are exclusive to linear mode.

15°
When doing high-speed operation, the optical deflection 15°
angle increases as the drive frequency approaches
the resonant frequency. Do not drive the device at the
resonant frequency, because the optical deflection angle
at the resonant frequency will be several hundred times Second axis scan direction incident angle
12° 21°
higher than when the drive frequency is low, so it cannot
be controlled.
The drive current at the absolute maximum rating is a DC
current that damages wiring. Because driving the device
with a DC current can shorten the service life, driving
the device with an AC current is recommended. If the AC
First axis scan direction incident angle
current has a positive or negative bias, the current will KOTHC0096EB
only flow in one direction and the life of the wiring may
be shortened. For this reason, we recommend using AC
current in both positive and negative directions.
16
Electrical and optical characteristics [Figure 3-40] Optical deflection angle vs. drive current
(a) First axis coil
Table 3-9 shows the electrical and optical characteristics (Typ. Ta=25 °C, I2=0 mA)
15
of the S13124-01.
10
[Table 3-9] Electrical and optical characteristics (S13124-01)

5
Parameter Symbol Condition Min. Typ. Max. Unit
Coil I1=0.1 mA 0
R1 125 155 185 Ω
resistance I2=0 mA
First axis
Resonant I1=0.12 mAp-p

F1-r 450 480 510 Hz -5
frequency I2=0 mA
Quality I1=0.12 mAp-p
Q1 100 120 140 -
factor I2=0 mA -10
Coil I1=0 mA
R2 70 90 110 Ω
Second axis
resistance I2=0.1 mA -15

Resonant I1=0 mA -15 -10 -5 0 5 10 15
F2-r 940 1000 1060 Hz
frequency I2=0.16 mAp-p
Quality I1=0 mA Drive current (mA)
Q2 140 165 190 - KOTHB0087EA
factor I2=0.16 mAp-p
I1 f1=f2=DC 11.5 15 18.5

θ1=+10° (b) Second axis coil
I2 θ2=+10° 14 18 22 (Typ. Ta=25 °C, I1=0 mA)
Drive current mA 15
I1 f1=f2=DC -18.5 -15 -11.5
θ1=-10° 10
I2 θ2=-10° -22 -18 -14
First axis Second axis

Mirror reflectivity 0
Aluminum alloy is deposited on the mirror of the

-5
S13124-01 providing high reflectance in the visible
region. Reflectance of 80% or more is achieved for red,
-10
blue, and green [Figure 3-17]. If the beam size of the
incident light is larger than the mirror size, stray light -15
-25 -20 -15 -10 -5 0 5 10 15 20 25
reflected from the chip surface other than the mirror will
occur. The optical system must be designed so that the Drive current (mA)
KOTHB0088EA
beam size is smaller than the mirror size.
Transmittance of window material Resonant frequency
S e e F i g u r e 3-18 f o r t h e s p e c t r a l t r a n s m i s s i o n Figure 3-41 shows the frequency characteristics of the

characteristics of the window material of the S13124-01. S13124-01.
Drive current [Figure 3-41] Optical deflection angle vs. drive frequency (S13124-01)
The drive current of electrical and optical characteristics (a) First axis
is defined as a value at which the minimum and (Typ. Ta=25 °C, θ2=0°, I1=0.12 mAp-p.)
10
maximum optical deflection angles can be obtained
under the recommended operating conditions in linear
8
mode. Figure 3-40 (a) shows the optical deflection angle

vs. drive current characteristics when a current is passed
6
through the first axis coil. When electric current is passed
through the first axis coil, the mirror rotates the first axis.
4
Figure 3-40 (b) shows the optical deflection angle vs. drive
Range shown
current characteristics when a current is passed through 2 with broken line:
the second axis coil. When electric current is passed not usable
through the second axis coil, the mirror rotates diagonally 0

with respect to the second axis.
0 200 400 600 800 1000 1200
Frequency (Hz)
KOTHB0089EA
17
(b) Second axis Temperature characteristics
(Typ. Ta=25 °C, θ1=0°, I2=0.16 mAp-p.) The optical deflection angle, resonant frequency, and coil
10
resistance have temperature characteristics. Figure 3-43 to
8 Figure 3-49 shows the temperature characteristics of the
S13124-01.
6
[Figure 3-43] Temperature characteristics of optical deflection angle

4 (S13124-01)
(a) First axis
2 Range shown with broken line:
not usable (Typ. I1=8.5 mA, I2=0 mA, θ2=0°)
12

0 200 400 600 800 1000 1200
11
Frequency (Hz)
KOTHB0090EA
10
At the resonant frequency, a very low drive current
(first axis: 0.12 mA, second axis: 0.16 mA) causes a large
optical deflection angle. Even a small change in the drive 9
current can cause it to exceed the optical deflection angle

of absolute maximum ratings and cause damage to the
8
mirror. In linear mode, do not drive at a frequency near -20 -10 0 10 20 30 40 50 60 70
the resonant frequency. If the drive current of the second

axis has a signal that induces the resonant frequency of KOTHB0092EA
the first axis, then the first axis may resonate.

(b) Second axis
Drive frequency (Typ. I1=0 mA, I2=18 mA)
12 -5
Optical deflection angle of second axis (°)
Figure 3-42 shows the frequency characteristics of the
Optical deflection angle of first axis (°)

optical deflection angle of each axis in the low frequency
region. Under the recommended operating conditions 11 -6
Second axis
of "drive frequency: DC up to 90 Hz", it is almost flat.
However, the higher the drive frequency, the larger the
10 -7
optical deflection angle. The optical deflection angle of
the mirror in the first axis direction reaches the absolute
First axis
maximum rating optical deflection angle of 12° near 195 9 -8
Hz. This increases the probability of mirror damage.
[Figure 3-42] Optical deflection angle vs. drive frequency 8 -9

-20 -10 0 10 20 30 40 50 60 70
(S13124-01)
(Typ. Ta=25 °C, I1=15 mA, I2=18 mA) KOTHB0093EA
20
15
First axis
10
Second axis
0
0 100 200 300
Drive frequency (Hz)

KOTHB0091EA
18
[Figure 3-44] Temperature characteristics of resonant frequency [Figure 3-47] Temperature characteristics of Q factor
(first axis) (second axis)
(Typ. I1=0.12 mAp-p, I2=0 mA) (Typ. I1=0 mA, I2=0.16 mAp-p)
482 190
185
180
481
175
170
Q factor
480 165
160
155
479
150
145
478 140
-20 -10 0 10 20 30 40 50 60 70 -20 -10 0 10 20 30 40 50 60 70

[Figure 3-45] Temperature characteristics of Q factor [Figure 3-48] Temperature characteristics of coil resistance
(first axis)
(a) First axis
(Typ. I1=0.12 mAp-p, I2=0 mA)
130
(Typ. I1=0.1 mA)
200
128
126 190
124 180
122
Q factor
170
120
160
118
116 150
114 140
112
130
110
-20 -10 0 10 20 30 40 50 60 70 120
-20 -10 0 10 20 30 40 50 60 70
KOTHB0096EA Ambient temperature (°C)
KOTHB0099EA
[Figure 3-46] Temperature characteristics of resonant frequency

(second axis) (b) Second axis
(Typ. I2=0.1 mA)
(Typ. I1=0 mA, I2=0.16 mAp-p) 120
1002
110
1001
100
90
1000
80
999
70
60
998
-20 -10 0 10 20 30 40 50 60 70
-20 -10 0 10 20 30 40 50 60 70

KOTHB0100EA
KOTHB0097EA
19
[Figure 3-49] Temperature characteristics of temperature
sensor resistance 4. How to use
(Typ. Ith=0.1 mA)
340
4-1 Linear mode one-dimensional type

Temperature sensor resistance(Ω)
320
300
280 Drive method

260
If a voltage source is used to control the drive current, the
240 drive current is determined by the applied voltage and
coil resistance. Coil resistance changes due to the heat
220
generated by the drive current and ambient temperature.
200 As such, to make a given current flow through the
-20 -10 0 10 20 30 40 50 60 70
coil using a voltage source, you must monitor the coil
Ambient temperature (°C) resistance and adjust the voltage. To vary the optical
KOTHB0101EA
deflection angle continuously, you must also take back
electromotive force into consideration. When the MEMS
mirror is operated in linear mode, the drive frequency is
relatively low, so the back electromotive force is extremely
small and can be ignored in some cases, but when
operated in non-linear mode, it cannot be ignored in most
cases. When a voltage source is used, the actual voltage
applied to the coil is the voltage obtained by subtracting
the back electromotive force from the applied voltage, and
this makes controlling the drive current difficult.
Therefore, a current source is used to drive the MEMS
mirror in order to control the current flowing through the
coil [Figure 4-1]. Figure 4-2 shows an example of a driver
circuit.
[Figure 4-1] Drive example

Current source
Coil Mirror
MEMS mirror
KOTHC0072EA
[Figure 4-2] Example of driver circuit

Voltage-to-current converter MEMS mirror
-
Signal +
input +- Rm
-
Rm Drive voltage
- monitor output
+
+
Rm
Rm
Rc
Voltage detector
KOTHC0073EA
20
Driving a MEMS mirror only requires a voltage-to-current system. Design the optical system to maximize the beam
converter. Further adding a voltage detector enables the waist to make the beam as close to a collimated light as
detection of back electromotive force and coil resistance. possible.
The drive current of the MEMS mirror in Figure 4-2 is Figure 4-3 shows an optical system in which a 630 nm
expressed by equation (4-1) using input voltage Vs. wavelength laser beam is concentrated, reflected at the
mirror, and focused on a screen at distance L from the
Vs ...............
Is= (4-1) mirror. The beam size on the screen is S (=2ω0). In this
Rc
condition, check whether the beam size on the mirror
Is : drive current surface is smaller than the mirror size.
Rc: current detection resistor
Using a metal film resistor with a small temperature [Figure 4-3] Optical system
coefficient as a current detection resistor allows the
drive current to be controlled down to 0.1% or less in S=2ω0
2θ
the operating temperature range. The voltage detector L
section detects the potential difference that is actually

Screen
applied across the coil terminals of the MEMS mirror and
outputs it to the drive voltage monitor output terminal.
2ω
The coil resistance can be determined by dividing this
Laser
voltage by the drive current given by equation (4-1). λ=630 nm
MEMS mirror
Condenser lens
Mirror size and beam size
KOTHC0074EA
For the light source used with the MEMS mirror, we

If distance L to the screen is 100 mm, and the beam is
recommend a semiconductor laser (except when a
focused on the screen at S=ϕ100 μm, the beam waist ω0 is
specific light source is required). The optical system must
50 μm. When λ=0.63 μm is substituted in equation (4-2),
be designed so that the beam size of the light source is
the radius of the beam at the mirror position is 400 μm,
sufficiently smaller than the mirror size. Semiconductor
and the beam size is ϕ800 μm. The beam size is typically
lasers are suited to achieve small beam sizes.
defined in area at (1/e)2 the peak power, so even when
The MEMS mirror is designed so that its mirror size
the spreading of the beam is considered, the S12237-03P
is max imized w ithin the range that provides the
mirror size of ϕ2.6 mm is sufficiently large.
required optical deflection angle versus drive current
If the distance L to the screen is 1 m and you want to
characteristics and frequency characteristics. For
focus the beam at ϕ100 μm on the screen, calculating the
example, the diameter of the mirror in the S12237
required mirror size in the same manner yields ϕ8 mm or
-03P is 2.6 mm. This is sufficiently large to be used in
greater, and the S12237-03P mirror size is not enough to
combination with semiconductor lasers and other
cover this diameter. However, if the beam can be focused
coherent light sources in a wide range of applications.
at ϕ1 mm on the screen, the diameter at the mirror
However, the mirror size may not be enough depending on
position is 1.3 mm, and the S12237-03P mirror size can
the application, so it is necessary to check that the MEMS
cover this diameter.
mirror can provide the required performance beforehand.
In this way, consider the required beam size and the
When a MEMS mirror scans light, the distance from the
distance between the mirror and the screen, and check
light source to the mirror and the distance to the projection
whether the mirror size of the MEMS mirror is sufficient.
screen must be verified.
Even with a collimator lens, it is not possible to make the
Measurement system of optical deflection angle
laser light an ideal collimated light. The beam size of an
ideal Gaussian beam depends on the distance from the vs. drive current characteristics
beam waist due to diffraction. The radius ω of the beam is
expressed by equation (4-2). As explained in “Electrical and optical characteristics”
of section 3-1, “One-dimensional type,” the optical
λL 2
( )
ω = ω0 ⸱ 1 + π ω02 ............... (4-2) deflection angle can be controlled down to 1° or less
by approximating the relationship between the optical
λ : wavelength of laser light [μm] deflection angle and drive current with a straight line.
ω0: beam waist [μm]
L : distance from beam waist [μm] Controlling the optical deflection angle at an even higher
accuracy requires highly accurate measurement of the
Beam waist is the radius of the beam at the focal point relationship between the optical deflection angle and
when the laser light is concentrated with an optical drive current. Figure 4-4 shows an example of such a
measurement system.
21
[Figure 4-4] Simple measurement system of optical deflection [Figure 4-5] Measurement system of optical deflection angle
angle vs. drive current characteristics vs. drive current characteristics (using a PSD)
Laser Laser
Collimating
Condenser lens lens
MEMS
mirror L1 L2 L3
Screen
PSD
MEMS Lens 1 Intermediate
mirror F1 image
L1 Lens 2
F2
KOTHC0075EA
KOTHC0076EA
The light output from a laser device is concentrated with The laser beam is nearly collimated using a collimating
a condenser lens. The focus position is set on the screen lens. Then, the laser beam is reflected by the MEMS
surface where the mirror is directed at. The reflected light mirror, and the deflection angle information of the beam
from the mirror is projected at a given position on the is converted into position information by lens 1 at the
screen according to the mirror's optical deflection angle. intermediate image position. Set distance L1, from lens 1
This position is detected to measure the optical deflection to the intermediate image, equal to the focal distance
angle. of lens 1. The image size A at this point is expressed by
A screen with a scale (e.g., graph paper) is used so that equation (4-4).
the projected position on the screen can be determined.
If you want to detect positions at about 1 mm resolution A = 2 × F1 × tan (θmax) ............... (4-4)
on the screen, we recommend that the beam size be F1 : focal distance of lens 1
set to about 500 μm. Making the beam size too small θmax: full width at half maximum of optical deflection angle
will increase the beam size on the mirror surface due

to diffraction. When the wavelength is 632 nm and the For example, if F1=30 mm and θmax=15°, image size A
beam size 500 μm, the focusing numerical aperture (NA) is 8 mm. If a PSD that can detect this size is placed at the
is about 8 × 10-4. When a collimated laser is used, it may intermediate image position and a measurement is taken,
be better to insert a beam expander before the condenser the latter stage of the optical system is not necessary. If
lens to widen the beam. the photosensitive area of the PSD is small, lens 2 is used
The relationship between the beam position P on the to reduce the image. If the distance from the intermediate
screen and optical deflection angle is expressed by image to lens 2 is L2, and the distance from lens 2 to the
equation (4-3). PSD is L3, the focal distance of lens 2 must be set to F2 in
equation (4-5).
P = L1 × tan(θ) ............... (4-3)
1 1 1 ...............
= + (4-5)
F2 L2 L3
With Figure 4-4, if L1=30 cm and the projected positions
on the screen are measured at 1 mm resolution, the
The intermediate image in this condition is scaled by a
optical deflection angle resolution is 0.2°. Making
factor of L3/L2, and the image is formed on the PSD. For
L 1 longer can improve the optical deflection angle
the PSD, we recommend our C10443 series PSD module.
resolution. If you want to improve the optical deflection
angle resolution further or obtain optical deflection angle
data automatically, you need to use an optical sensor Mirror flatness and warping
that detects projected positions [an image sensor or
position sensitive detector (PSD)] in place of the screen. The S12237-03P mirror flatness [Figure 4-6] and warping
As the photosensitive area of optical sensors is not large, [Figure 4-7] are shown.
an optical system must be used to reduce the projection
area.
Figure 4-5 shows a measurement system that uses a PSD
for the optical sensor.
22
[Figure 4-6] Mirror flatness: Ra=1.3 nm Magnetic field
(S12237-03P, measurement example)
(Measurement range: mirror center area □500 μm)
5 Figure 4-9 shows the simulation data of the magnetic field
4 of the magnet built in the S12237-03P.
Y
3
2
[Figure 4-8] Magnetic field direction (S12237-03P)
Flatness (nm)
1 +Y
+Z
0
-1
-2
X
-3
-4
+X
-5
-250 -200 -150 -100 -50 0 50 100 150 200 250
Position (μm)
KOTHB0039EA
KOTHC0088EA
Measurement range: □500 μm

[Figure 4-9] Magnetic flux density vs. distance
(S12237-03P, simulation result)
Y
(a) X direction
X
103
In package
102
Magnetic flux density (mT)
Mirror size: ɸ2.6 mm

KOTHC0086EA
101
[Figure 4-7] Mirror warping 100

(S12237-03P, measurement example)
(Radius of curvature=1.29 m) 10-1
0.4
0.3 10-2
0.2 10-3
-150 -100 -50 0 50 100 150
Y
Warping (μm)
0.1
Distance X (mm)
0 KOTHB0041EA
-0.1 X
(b) Y direction
-0.2
103
In package
-0.3
102
-0.4
-1.5 -1.0 -0.5 0 0.5 1.0 1.5
101
Position (mm)
KOTHB0040EA
100
Y
10-1
10-2
X
10-3
-150 -100 -50 0 50 100 150
Distance Y (mm)
Mirror size: ɸ2.6 mm KOTHB0042EA
KOTHC0087EA
23
(c) Z direction angle (± 20 °) given in the recommended operating
103
conditions. On the other hand, when the drive current
In package
is a sine wave, set the drive current to If × 4/π. Note that
102 the fast axis lags the drive current by 90°.
Because the Q factor of the fast axis is very large, the

101 resonant frequency of the fast axis varies depending
on the operation time, ambient temperature, and the
100
operating conditions of the slow axis. Feedback control
is required to adjust the drive frequency to the resonant
10-1
frequency, so the operation of the fast axis must be
monitored . This is when the back electromotive force
10-2
appearing in the coil is used. The back electromotive
10-3 force appears as a sine wave in the fast and slow axes’
-150 -100 -50 0 50 100 150
coils. The back electromotive force is in phase with
Distance Z (mm) the drive current when the fast axis is in resonance. By
KOTHB0043EA
monitoring the phase of the back electromotive force, you
can determine whether the fast axis is in resonance. For
Reduction in magnetic force due to high temperature the timing chart of the drive current, optical deflection
angle, and back electromotive force, see Figure 3-22.
The magnetic force of the magnet built in the MEMS Figure 4-10 shows an example of a fast-axis driver
mirror decreases when exposed to high temperatures for circuit. This circuit structure consists of a V/I conversion
a long time. Reduction in magnetic force occurs due to circuit and an H-bridge circuit (switching circuit). The
heat and length of time when soldering the MEMS mirror, voltage applied to Vin_f is converted to current, then
causing the characteristics (especially the current vs. passes through the fast axis coil. The frequency of the
optical deflection angle characteristics) to change. When switching signal (DIR2) of the H-bridge circuit is the drive
soldering with a soldering iron, use a pair of tweezers or frequency. A square wave current is supplied to the fast
the like to prevent the product from moving. Otherwise, axis coil.
when the solder tip is brought closer to the product, the Figure 4-11 shows the back electromotive force waveform
product may be attracted by the magnetic force and be when the drive frequency is the resonant frequency. The
damaged. signal circled in orange is the back electromotive force
Table 4-1 shows the recommended soldering conditions. generated by fast axis operation. The H-bridge circuit
If you cannot provide these conditions, then grip the root is used here, so a half sine wave appears repeatedly
of the leads you are soldering with tweezers or a similar at the Vbmf_f terminal on the DC voltage, as the back
tool to radiate heat so that heat is not easily transferred to electromotive force. The back electromotive force makes
the package. Do not perform reflow soldering. it possible to monitor whether or not the fast axis is
resonating and the amplitude of the optical deflection
angle. The relationship between the back electromotive
[Table 4-1] Recommended soldering conditions
force amplitude Vf [Figure 4-11] and the optical deflection
Soldering temperature Soldering time angle shows linear characteristics [Figure 3-23]. This
relationship is shown with equation (4-6), and the factor
260 °C or less Within 10 s
(which varies by product) is listed in the final inspection
sheet.
4-2 Raster scanning two-dimensional type θf = e(1, 0) + e(1, 1)∙Vf ............... (4-6)
[Figure 4-10] Example of driver circuit (fast axis)

Drive method
Vin_f +
Vbemf_f
-
Fast axis
Iout2p
MEMS mirror
Since the fast axis is exclusive to non-linear mode, it must
If
be driven at the resonant frequency. Operate with sine DIR2
wave or square wave drive current. Iout2n

Vin_f
When the drive current is a square wave, input the If =
Rdet_f
drive current If described in the final inspection sheet
attached to the product to drive at the optical deflection Rdet_f
KOTHC0103EA
24
[Figure 4-11] Waveform of back electromotive force (fast axis) [Figure 4-12] Example of driver circuit (slow axis)
Back electromotive force HPF
Vin_s +
Vbemf_s
- Iout1p
DIR2
MEMS
mirror Is
Vf
Iout2n
Iout1n
Vin_s
Is =
Rdet_s
Rdet_s
KOTHC0104EA
Iout2p
[Figure 4-13] Waveform of back electromotive force (slow axis)
Slow axis DIR2
The slow axis is exclusive to linear mode and operates

with an arbitrary waveform drive current with a drive
Vs
frequency of 10 to 100 Hz. The optical deflection angle of
Vbemf_s
the slow axis varies almost linearly with the drive current
[Figure 3-25]. Arbitrary operation is performed with a
drive current such as a triangular wave or sawtooth wave.
Figure 4-12 shows an example of a slow-axis driver
circuit. Apply voltage to Vin_s to control the slow axis.
The relationship between the drive current and the
optical deflection angle of the slow axis is expressed Relationship between vertical resolution
with polynomial (4-7). The factor is listed in the final and frame rate in raster scanning
inspection sheet.
Is = k(3, 0) + k(3, 1)∙θs + k(3, 2)∙θs2 + k(3, 3)∙θs3 ............... (4-7) There is a trade-off between vertical resolution and frame
rate in raster scanning. Figure 4-14 shows an illustration
In the structure of the S13989-01H, when the fast axis is of raster scanning. The horizontal axis represents the
operating at the resonant frequency, a sinusoidal back fast-axis operation and the vertical axis the slow-axis
electromotive force in sync with the fast axis operation is operation (drive current: sawtooth wave). Figure 4-15
generated in the slow axis coil. This back electromotive shows the scanned waveform of the slow axis.
force is small and faster (about 29.3 kHz) than slow axis The horizontal scanning time is determined by the
operation, so there is no affect on slow axis operation. resonant frequency of the fast axis. The vertical resolution
The back electromotive force of this slow axis coil is determined by how many times the fast axis can move
makes it possible to monitor whether or not the fast back and forth while the slow axis moves. Since the
axis is resonating and the optical deflection angle. The resonant frequency of the fast axis is fixed, increasing
combined wave of this back electromotive force and the the vertical resolution increases the scanning time and
slow axis drive signal is output from the Iout1p terminal decreases the frame rate. If the retrace time is shortened,
[Figure 4-12]. This makes it necessary to remove the slow the frame rate will increase, but if it is shorter than the
axis drive signal with an HPF (high-pass filter). period of the slow axis's resonant frequency, ringing will
The back electromotive force Vbemf_s and the fast occur. Table 4-2 shows the relationship between vertical
axis switching signal (DIR2) are in the same phase resolution and frame rate.
[Figure 4-13]. The relationship between Vs (the back
electromotive force amplitude of the slow axis) and
the optical deflection angle of the fast axis is expressed
by equation (4-8), and the factor is listed in the final
inspection sheet.
θf = s(1, 0) + s(1, 1)∙Vs ............... (4-8)
25
[Figure 4-14] Illustration of raster scanning [Figure 4-16] Screen projection image
1 round-trip scanning time=1/(2 × Ffr) (a) Incident angle: 0°
Horizontal scanning time
Slow axis
Vertical scanning time
Fast axis
Retrace time
Laser light
KOTHC0091EA
[Figure 4-15] Mirror operation (slow axis, during raster scanning)

Retrace time Scanning time
KOTHC0092EB
(b) Incident angle: 20°

Slow axis
Fast axis
Time (ms) Laser light
KOTHB0082EA
[Table 4-2] Vertical resolution and frame rate

(S13989-01H, retrace time: 1.78 ms)
Vertical resolution
256 512 720 1024 2048
(unit: pixel)
Frame rate
115 76 60 46 25 KOTHC0093EB
(unit: frames/s)
Magnetic field
Distortion
The S13989-01H uses a magnet with a strong magnetic
Figure 4-16 shows screen projection images for when the field. Figure 4-18 shows the simulation results of the
incident angle of light to the mirror is 0° and 20° in the surrounding magnetic field distribution.
S13989-01H. When the incident angle is 0°, the image
is projected almost symmetrically, but a pincushion
distortion results. On the other hand, when the incident
angle is 20°, a greatly curved distortion results. In this
way, the projected image's shape changes depending
on the incident angle of light on the mirror. To suppress
distortion, you need to install a correction optical system
between the screen and MEMS mirror.
26
[Figure 4-17] Magnetic field direction (S13989-01H) (c) Z direction
+Z 103
+Y In package
102

+X 101
100
10-1
KOTHC0094EB
10-2
[Figure 4-18] Magnetic flux density vs. distance -150 -100 -50 0 50 100 150
(S13989-01H, simulation result)
Distance Z (mm)
(a) X direction KOTHB0085EA
103
In package Notes when fixing the product in place

102
The S13989-01H has screw holes for mounting. Since it

101 is a resin package, fastening the screws too tightly may
damage the package when there is vibration. Keep the
100
tightening torque under 0.088 N·m. A powerful magnet
is inside the product. If a magnetic body is brought
close to the product, the product may be damaged. We
10-1
recommend using non-magnetic screws and screwdrivers
when fixing the product in place.
10-2
-150 -100 -50 0 50 100 150
Distance X (mm) 4-3 Linear mode two-dimensional type

KOTHB0083EA
(b) Y direction
Drive method
103
In package
Figure 4-19 shows operation when the linear mode two-

102
dimensional type S13124-01 is installed in front of a
screen. The X/Y axes on the screen show the direction

101 in which the light reflected from the MEMS mirror is
projected. The X axis is the projection direction when
100 the mirror rotates on the first axis. When the current
direction of the first axis coil is positive, the mirror
10-1
rotates in the direction of the red arrow and the reflected
light from the mirror is projected in the direction of the
10-2
arrow on the X axis. The Y axis is the projection direction
-150 -100 -50 0 50 100 150 when the mirror rotates on the second axis. When the
Distance Y (mm) current direction of the second axis coil is positive, the
KOTHB0084EA mirror rotates in the direction of the green arrow and the
reflected light from the mirror is projected in the direction
of the arrow on the Y axis.
27
[Figure 4-19] Linear mode two-dimensional type operation [Figure 4-21] Chip enlarged view (S13124-01)
Y axis First axis torsion bar
Deflection angle of First axis coil
First axis first axis θ1 First axis
Second axis torsion bar
X axis Second axis Magnetic field direction
Deflection angle of
Mirror second axis θ2
MEMS mirror
KOTHC0099EA
Second axis
Figure 4-20 shows the scanning image that is on the

screen when a current is passed through the first and
second axis coils of the S13124-01. When a current is
passed through only the first axis coil, the scanned image Second axis torsion bar
Second axis coil
will align with the X axis [Figure 4-20 (a)]. In contrast, if
First axis torsion bar
a current is passed only through the second axis coil, the KOTHC0106EA
scanned image will be tilted from the Y axis [Figure 4-20

(b)]. Figure 4-22 shows a driver circuit example of the S13124-
01. Prepare a driver circuit separately for each of the first
[Figure 4-20] Scanned image on the projection screen and second axes, in order to control the current flowing
(a) When a current is passed (b) When a current is passed through the coils for first and second coils.
through the first axis coil through the second axis coil
[Figure 4-22] Example of driver circuit (S13124-01)
Y axis Y axis
Vin +
-
MEMS mirror
X axis X axis
Im
KOTHC0100EA
Figure 4-21 shows a photograph of the mirror chip of the Rdet

S13124-01. The structure has a magnetic field direction
aligned with the orange arrow. Therefore, when a current
is passed through the first and second axis coils, the KOTHC0107EA
Lorentz force generated in the red frame grows stronger,

The drive current Im supplied to the MEMS mirror
and the force rotating diagonally with respect to the first
is expressed by equation (4-9). Fluctuations in the
axis is generated in the first axis and second axis coils.
drive current can be minimized within the operating
The first axis coil is held by one pair of torsion bars, so
temperature range by using a current detection resistor
the mirror rotates the first axis when a current is passed
with a small temperature coefficient.
through the first axis coil. In contrast, the second axis
coil is held by two pairs of torsion bars, so the mirror Vin ...............
is subjected to force around the first and second axes Im = (4-9)
Rdet
and rotates about the first axis as well as the second
Im : drive current
axis. Therefore, the scan image is tilted from respect to Vin : input voltage
Rdet: current detection resistor
the Y axis, as shown in Figure 4-20 (b). In order to drive
normally, the current flowing through the first axis coil
must be corrected. In linear mode, there is ringing when the drive current
has a resonant frequency or a frequency component that
induces resonance (near 1/odd number fraction of the
resonant frequency).
Distortion
The shape of the projected image changes depending on

the incident angle of light on the mirror and the refraction
in the window material. Figure 4-23 shows screen
28
projection images for when the incident angle of light is 0° [Figure 4-24] Magnetic field direction (S13124-01)
and 20°. +Z
+Y
When the incident angle is 0°, the projection is nearly
square shaped, but has a minor spool-shaped distortion.
In contrast, when the incident angle is 20°, the projected
+X
image is greatly curved. In order to reduce distortion, it
is necessary to provide a compensation optical system or
else set the drive current with consideration for distortion
correction.
[Figure 4-23] Screen projection image KOTHC0105EA
(a) Incident angle: 0°

[Figure 4-25] Magnetic flux density vs. distance
X axis (S13124-01, simulation results)
(a) X direction
103
Y axis
In package
102

101
Laser light
100
10-1
10-2
-150 -100 -50 0 50 100 150
KOTHC0101EB
Distance X (mm)
KOTHB0102EA
(b) Incident angle: 20°
X axis (b) Y direction

103
In package
Y axis
102
101
Laser light 100
10-1
10-2
-150 -100 -50 0 50 100 150
Distance Y (mm)
KOTHB0103EA
KOTHC0102EB
Magnetic field
The S13124-01 uses a magnet with a strong magnetic

field. Figure 4-25 shows the simulation results of the
magnetic field distribution around the product.
29
(c) Z direction
103
In package
5. High-accuracy control
102
This chapter explains the parameters that are necessary
if you want to control MEMS mirrors with high accuracy.

101 Consideration of these parameters enables the operating
temperature's effects on the optical deflection angle to be
100 corrected to some degree. If you need to control a MEMS
mirror with even higher accuracy, obtain the necessary
10-1 parameters in the operating conditions and feed back the
values.
10-2
-150 -100 -50 0 50 100 150
5-1 Correction curve for optical deflection
Distance Z (mm)
KOTHB0104EA angle vs. drive current characteristics
Notes when fixing the product in place
The optical deflection angle versus drive current
characteristics of MEMS mirrors are not linear in the
The S13124-01 has screw holes for mounting. Since it strict sense. Driving a MEMS mirror by assuming linearity
is a resin package, fastening the screws too tightly may leads to errors in the optical deflection angles. To avoid
damage the package when there is vibration. Keep the this, you need to obtain multiple sets of optical deflection
tightening torque under 0.088 N·m. A powerful magnet angle and drive current data within the recommended
is inside the product. If a magnetic body is brought operating conditions of optical deflection angles, calculate
close to the product, the product may be damaged. We the correction curve based on the data, and use it to adjust
recommend using non-magnetic screws and screwdrivers the drive current.
when fixing the product in place. Figure 5-1 shows the angle errors that appear when a
correction line is created by connecting the drive currents
in the recommended operating conditions of optical
deflection angles (±15°).
[Figure 5-1] Correction line and angle error

(Typ. Ta=25 °C)
20 0.3
15 0.2
10 0.1 Angle error (°)
5 0
0 -0.1
-5 -0.2
-10 -0.3
Measured value
-15 Correction line -0.4
Angle error
-20 -0.5
-20 -10 0 10 20
Drive current (mA)

KOTHB0026EA
In Figure 5-1, the correction line, especially the drive

current in the negative region, is shifted relative to the
actual values. The maximum angle error is about 0.4° in
the operating optical deflection angle range. Note that
when differences between each device and temperature
characteristics are considered, it can be assumed that the
angle error of about ±1° using this correction method is
the limit.
30
If you want to perform correction with an even higher lower than the resonant frequency, the frequency
accuracy, you need to use a correction curve approximated characteristics can be expressed with equation (5-1) and
with a third-order polynomial [Figure 5-2]. The angle equation (5-2) using parameters that can be obtained
error in Figure 5-2 is 0.03° or less. The resolution of this through simple measurements.
measurement system is about ±0.03°, so this means that the
2
angle error is corrected to about the same level. Because T(ω) =
ω0 ( )
1 + ω ............... (5-1)
{ }
reproducibility of the optical deflection angle with respect
to the drive current is high in MEMS mirrors, using such a 1 . ω
correction curve to control the drive current yields highly Q ω0 ............... (5-2)
tan-1
arg{T(ω)} =
2
accurate optical deflection angles.
1-
ω
( )
ω0
[Figure 5-2] Third-order polynomial correction curve and angle error θac (ω) ...............
T(ω) = (5-3)
(Typ. Ta=25 °C) θdc (ω)
20 0.08
ω0
15 0.06 Q = ω2 - ω1 ............... (5-4)
10 0.04
T(ω): transfer function
ω0 : resonant frequency
Angle error (°)
5 0.02
θdc : optical deflection angle of low-speed operation
θac : optical deflection angle of high-speed operation
0 0 Q : Q factor
ω1 : drive frequency at 1/√2 of the optical deflection angle when resonating
-5 -0.02 on the low frequency side
ω2 : drive frequency at 1/√2 of the optical deflection angle when resonating
-10 -0.04 with the higher frequency than the resonant frequency
Measured value
-15 Third-order polynomial correction curve -0.06
Angle error Equation (5-1) expresses the absolute value of the transfer
-20 -0.08 function, and equation (5-2) the phase lag of the optical
-20 -10 0 10 20
deflection angle. These are parameters that can all be
Drive current (mA) measured and can be obtained by using a measurement
KOTHB0027EA
system shown in "[Figure 4-4] Simple measurement
system of optical deflection angle vs. drive current
5-2 Low-speed operation and characteristics." Note that equation (5-1) and equation
high-speed operation (5-2) are for average Q factors (several tens) within the
S12237-03P's recommended operating drive frequency
conditions of DC to 100 Hz.
There are two ways the mirror can operate while the
MEMS mirror is driven: low speed and high speed. In 5-3 Linear mode
low-speed operation, the mirror tilts slowly to a given
angle and stops. In high-speed operation, the mirror can
either continue to move at high speed within a given
Frequency range
angle range or tilt quickly to a given angle and stop (step
operation).
Figure 5-3 shows the frequency characteristics calculated
In low-speed operation, the optical deflection angle can
with equation (5-1) and equation (5-2) [ω0=approx. 530
be controlled with high accuracy by using the correction
Hz, Q=30 (typical S12237-03P value)]. The recommended
curve mentioned earlier. Further, if the absolute angle
operating optical deflection angle of 15° is used as
of the mirror is not very important, another way to
the reference. The optical deflection angle at a drive
control the angle is to obtain the drive current and drive
frequency of 50 Hz (about one-tenth the resonant
frequency that would produce the desired mirror angle in
frequency) or less is 15° ± 0.2°. Within the recommended
advance and use those values in the actual operation.
operating conditions of the optical deflection angle, the
angle error is 0.2° or less. At 100 Hz (about one-fifth the
Frequency characteristics during high- resonant frequency) or less, the angle error is 0.6° or less.
speed operation If you need an angle error of 0.5° or less for the accuracy,
a drive frequency of 50 Hz or less is recommended. If
As MEMS mirrors are mechanical, their frequency you need 1° or less for the accuracy, 100 Hz or less is
characteristics can be expressed with an equation. This recommended.
equation matches the actual operation to some degree
under given operating conditions. If you want to operate
the MEMS mirror (S12237-03P) at a frequency sufficiently
31
[Figure 5-3] Frequency characteristics (S12237-03P) [Figure 5-4] Step signal
(Typ. Ta=25 °C)
16.0 1.2
Signal amplitude
15.8 1.0
Phase deviation (°)

15.6 0.8
t0
15.4 0.6
Time (s)
KOTHC0077EA
15.2 0.4
The step signal contains numerous high frequency

15.0 0.2
components. If the resonant frequency component
14.8 0
is included, ringing occurs at that frequency, and
0 20 40 60 80 100 120 settling to a given optical deflection angle takes time.
Frequency (Hz) There are two methods to not include the resonant
KOTHB0028EA frequency component. One is to set the rise time t0 to
At a drive frequency of 100 Hz or less, the phase lag is an extremely large value, and the other is to set t0 to an
0.4° or less, and this can be ignored in many applications. integer multiple of the resonant frequency's reciprocal.
Even in linear mode, angle error occurs according to the In the latter, if t0 deviates from an integer multiple of the
drive frequency, so the amplitude must be kept in mind. resonant frequency's reciprocal, ringing will occur, so it
Note that operating at a frequency higher than the is important to set t0 as close to that value as possible.
recommended drive frequency range may cause damage, Using these methods will eliminate most of the resonant
so use it within the recommended operating conditions. frequency component from the step signal. However, it
cannot be eliminated completely, so some ringing will
occur. This ringing is extremely small, so it will converge
How to use linear mode
to a given optical deflection angle in a short wait time.
Figure 5-5 shows the relationship between the ringing
As explained earlier, in linear mode, using a drive
attenuation ratio and attenuation time for a resonant
frequency within the recommended operating conditions
frequency of 500 Hz and Q=30.
(1/10 to 1/5 the resonant frequency) yields excellent
linearity in the optical deflection angle versus drive
[Figure 5-5] Ringing attenuation ratio vs. attenuation time
frequency characteristics. As such, we recommend that
the drive signal's frequency components be set within (Typ. Ta=25 °C)
100
the recommended operating conditions of the drive
t0=0 ms
frequency. 10-1
In step operation where the mirror is tilted to a given
Ringing attenuation ratio
optical deflection angle and stopped, generating a

10-2
rising drive signal within the recommended operating
conditions of the drive frequency causes the rising of the
10-3
drive signal to be extremely slow. This may not suffice
depending on the application. t0=2 ms
The step signal and periodic waveform responses 10-4
to achieve faster step operation are explained in the

following sections. 10-5
0 20 40 60 80 100 120 140 160
Attenuation time (ms)

Step signal response KOTHB0029EA
This section explains the behavior of the mirror when a If you want to make the attenuation ratio be 1/100, the
step signal with a rising slope is applied [Figure 5-4]. attenuation time is 87 ms when t0=0 ms and 10 ms when
t0=2 ms (the resonant frequency's period). For example,
when varying the optical deflection angle from 0° to 10°,
the step signal is raised in t0=2 ms, and 8 ms later, the
optical deflection angle stabilizes within 10° ± 0.1°. To
change the angle every 1°, the angle can be controlled
with an accuracy within about ±0.1° only with a rise time
of 2 ms.
32
Figures 5-6 and 5-7 show the step signal's monitored 5-8]. In this case, t2 - t1=t0 and t1=T/2, so there are two
response using the S12237-03P. independent parameters: t0 and T. Setting this square
wave's period to a value that is not an integer multiple of
[Figure 5-6] Step signal response the resonant frequency's period will exclude the resonant
(t0=0 ms, typical example) frequency from the square wave's frequency components.
However, frequency components near the resonant
18
frequency may be included, and these components'
15 effects must be reduced as much as possible. Therefore,
t0 is set to the period of the resonant frequency (or a
12
frequency near it).
9
[Figure 5-8] Square wave (duty ratio: 50%)
6
Drive signal
1
3
0 t0 t1 t2 T
=T/2 Time (s)
-3
0.45 0.50 0.55 0.60 0.65 0.70 t0 : rise time
t1 - t0: stable time
t2 - t1: fall time
Time (s)
T : period
KOTHB0030EA
KOTHC0078EA
[Figure 5-7] Step signal response Figures 5-9 (t 0 =1 ms) and 5-10 (t 0 =2 ms) show the
(t0=2 ms, typical example)
monitored results of square wave responses using the
18 S12237-03P (resonant frequency: 530 Hz). Ringing can
be seen at t0=1 ms, but at 2 ms, which is near the period
15
of the resonant frequency, ringing is suppressed. Note
12
that t0 does not exactly match the period of the resonant
frequency. In some cases, it is better that they match
9 exactly, but in other cases, it is better that they are
slightly offset. This depends on the relationship between
6
the drive period of the square wave and the resonant
3 frequency.
0
[Figure 5-9] Square wave response
-3 (t0=1 ms, typical example)
0.45 0.50 0.55 0.60 0.65 0.70
(f=100 Hz)
18
Time (s)
KOTHB0031EA
15
Periodic waveform response 12
9
Like the step signal, the response when a periodic
waveform is applied can also be optimized by not 6
including the resonant frequency component in the drive

3
signal and further reducing the frequency components
near it. 0
The frequency components of a given periodic waveform

-3
can be determined through Fourier series expansion. If 0 0.5 1.0 1.5 2.0
the input signal is divided into its frequency components
Time (s)
and they contain the resonant frequency component KOTHB0032EA
and frequency components near it, the input signal

parameters need to be adjusted.
(1) Square wave

This section explains the case for a square wave (duty
ratio: 50%, with the same rise time and fall time) [Figure
33
[Figure 5-10] Square wave response [Figure 5-12] Sawtooth wave response
(t0=2 ms, typical example) (t0=4 ms, typical example)
(f=100 Hz) (f=30 Hz)
18 20
15 15

10
12
5
9
0
6
-5
3
-10
0 -15
-3 -20
0 0.5 1.0 1.5 2.0 0 0.005 0.01 0.015 0.02 0.025 0.03 0.035
Time (s) Time (s)

(2) Sawtooth wave

5-4 Ringing correction
A sawtooth wave [Figure 5-11] can be obtained by
converting t0, t1, and t2 of the square wave in Figure 5-8
and can basically be handled in the same manner as the Since the MEMS mirror is mechanical, it has a resonant
square wave. A sawtooth wave is obtained when t1=t0 frequency. When driving the MEMS mirror in linear
and t2=T (there are two parameters in this case). For a mode, set the drive frequency to 1/5 or less of the
sawtooth wave, ringing can be minimized in the same resonant frequency to avoid ringing (S12237-03P: 100
manner as the square wave by following the procedure Hz or less). Even when the drive frequency is 1/5 or less
below. of the resonant frequency, ringing will occur if the drive
current contains frequency components that induce
 Set the period to a value that is not an integer multiple MEMS mirror resonance. Ringing can be suppressed
of the resonant frequency's period by removing frequency components that induce MEMS
 Set the rise time t0 to an integer multiple of the resonant mirror resonance from the drive current in advance.
frequency's period Figure 5-13 shows ringing correction. If the drive current
indicated in (a) (the same waveform as the ideal optical
[Figure 5-11] Sawtooth wave deflection angle waveform) is input to the MEMS mirror
in linear mode, the optical deflection angle should ideally
Input intensity (N/m)
be the black line indicated in (b). But, actually, ringing

1 occurs as shown by the red line.
The black line in (c) shows the ideal waveform of the
t0 T optical deflection angle in (b) with the frequency on the
Time (s)
KOTHC0079EA horizontal axis. The red line in (c) shows the ideal drive
frequency waveform of the MEMS mirror. There are
Figure 5-12 shows the changes in the optical deflection frequency components of the ideal optical deflection
angle when a sawtooth wave (period: 30 Hz) is applied to angle waveform near the resonant frequency. Therefore,
an S12237-03P (resonant frequency: 500 Hz). The rise time when a drive current with the ideal optical deflection
of the drive signal is set to about 4 ms, which is double angle waveform is input to the MEMS mirror, frequency
the resonant frequency's period. In Figure 5-12, a clean components near the resonant frequency are amplified
response is obtained for the sawtooth wave. Note that the and ringing occurs [red line in (d)].
distortion in the response during the rise time cannot be Ringing can be suppressed by reducing the frequency
suppressed. Use the response of the falling slope. components near the resonant frequency from the
drive current with the ideal optical deflection angle
waveform [red line in (e)]. When the drive current with
these frequency characteristics is converted into the time
domain, it becomes as shown in (f ). When this drive
current is input to the MEMS mirror, the ideal optical
deflection angle waveform shown in (b) can be achieved.
34
[Figure 5-13] Ringing correction (d) Drive frequency components
(a) Drive current vs. time Ideal
(same waveform as the ideal optical deflection angle waveform) Actual
Amplitude
Input current
Frequency
KOTHB0047EA
Time
(e) Drive frequency components (before and after ringing correction)
KOTHB0044EA
Before correction
(b) Optical deflection angle vs. time After correction
[when drive current (same waveform as the ideal

optical deflection angle waveform) is input]
Ideal
Amplitude
Actual
Optical deflection angle
Frequency
KOTHB0048EA
(f) Drive current vs. time (after ringing correction)
Time
KOTHB0045EA
(c) Ideal drive frequency waveform and frequency components

Drive current
Ideal
Optical deflection angle
Amplitude
Time
KOTHB0049EA
Figure 5-14 shows the effect of ringing correction. Figure

5-14 (a) is the result obtained by inputting the same drive
Frequency
KOTHB0046EA
current as the ideal optical deflection angle waveform.
There is an error of about ±1° at the falling edge with
respect to the ideal optical deflection angle. In addition,
Figure 5-14 (b) shows the result obtained by inputting
a drive current with ringing correction. The error is
35
suppressed to ±0.03° or less at the falling edge with Therefore, to keep the optical deflection angle constant
respect to the ideal optical deflection angle waveform. when the ambient temperature changes, you need to
Note that the accuracy of this optical deflection angle monitor the temperature and correct the drive current.
measurement system is ±0.03°, and ringing is suppressed A temperature sensor must be installed as close to the
to that level. MEMS mirror as possible in the enclosure or on the
In Figure 5-14 (b), the error is measured from (a) and circuit board that the MEMS mirror is mounted on. Table
reflected in the ringing correction to match the actual 5-1 shows the temperature coefficient of the S12237-03P
frequency characteristics of the optical deflection angle. MEMS mirror's optical deflection angle.
This operation can be repeated multiple times [Figure
5-14 (b): 4 times] to remove frequency components that [Table 5-1] Temperature coefficient of optical deflection angle
could not be filtered and further reduce ringing.
(S12237-03P, linear value, θs=±15°, typical value)
Temperature coefficient
[Figure 5-14] Effect of ringing correction (measurement example) Temperature range α
Typ.
(a) Before ringing correction
20 4
-20 to +70 °C -0.095%/°C
Ideal
15 Actual -20 to +25 °C -0.085%/°C
Error
10 2 +25 to +70 °C -0.105%/°C

5
Error (°)
0 0 The temperature coefficient α of the optical deflection

-5 angle in Table 5-1 is the value when the drive current is
-10 -2
constant and is expressed by equation (5-5).
-15
θs (Is, T2) - θs (Is, T1)
α= × 100 ............... (5-5)
-20 -4 T2 - T1
0 5 10 15 20
T1 to T2 : temperature range
Time (ms)
θs(I, T): optical deflection angle (I: drive current, T: temperature)
KOTHB0050EA
As shown in Table 5-1, the temperature coefficient of the

(b) After ringing correction
optical deflection angle is different between the -20 to +25
20 0.4
Ideal
°C range and the +25 to +70 °C range and is non-linear.
Actual
15
Error
To perform temperature correction with high accuracy,
10 0.2 you need to calculate the temperature coefficient of the

5
optical deflection angle using the quadratic polynomial
Error (°)
in equation (5-6). Table 5-2 shows the correction factor of

0 0
the quadratic polynomial.
-5
β = 1 + α1∙∆T + α2∙∆T2 ............... (5-6)

-10 -0.2
-15 ΔT : T - Tstd
T : ambient temperature
-20 -0.4 Tstd: reference temperature (25 °C)
0 5 10 15 20
Time (ms)
KOTHB0051EA
[Table 5-2] Quadratic polynomial correction factor for temperature
coefficient of optical deflection angle
5-5 Temperature correction (S12237-03P, typical value)
Correction coefficient Value
α1 -9.4 × 10-4
The electromagnetic MEMS mirror moves its mirror
by generating Lorentz force using the magnetic field of α2 -1.81 × 10-6
the magnet and the current flowing through the coil.
The optical deflection angle decreases as the ambient
In actual temperature correction, the drive current
temperature increases, so the drive current must be
is divided by β to keep the optical deflection angle
increased [Figure 3-9]. The drive current's temperature
constant. When α of Table 5-1 is substituted into α1 of
characteristics depend on the temperature characteristics
equation (5-6) and 0 is substituted into α2 of equation
of the magnetic force. The magnet’s magnetic force
(5-6), β is obtained.
decreases as the ambient temperature increases.
Figure 5-15 shows the result of applying temperature
36
correction using the drive current as described above
5-6 Reproducibility of optical deflection angle
and ringing correction (see “5-4 Ringing correction”).
Even at an ambient temperature of 70 °C, operation
e q u i v a l e n t t o t ha t i n ro o m t e m p e ra t u re ca n b e Figure 5-17 shows examples of reproducibility over time
achieved with only a drive current correction. for A to D in Figure 5-16. These data show the amount of
change in the optical deflection angle when the MEMS
[Figure 5-15] Temperature correction results mirror is operated for 30 minutes and show that the
(with ringing correction, measurement example)
stability is ±0.01 degrees or less.
(a) Tcase=25 °C
20 0.4 [Figure 5-16] Optical deflection angle vs. time
Actual
15 Error 20
10 0.2
B

5 10
Error (°)
0 0 C
-5
0
-10 -0.2 A
-15
-10 D
-20 -0.4
0 5 10 15 20
Time (ms)
-20
KOTHB0052EA 0 5 10 15 20
Time (ms)
(b) Tcase=-20 °C
20 0.4 <Measurement conditions>
Actual ∙ Drive waveform: sine wave
15 Error ∙ Drive frequency: 50 Hz
∙ Drive current amplitude: 15 mA
∙ Measurement time: 30 min

10 0.2
∙ Measurement interval: 1 s
∙ Measurement accuracy of the measurement device: ±0.03°
5
KOTHB0055EA
Error (°)
0 0
-5
[Figure 5-17] Examples of optical deflection angle's reproducibility
-10 -0.2 (a) Near A

-15 -0.12
-20 -0.4
0 5 10 15 20
-0.14
Time (ms)
KOTHB0053EA
-0.16
(c) Tcase=70 °C
-0.18
20 0.4
Actual
15 Error
-0.20
10 0.2
5
-0.22
Error (°)
0 500 1000 1500 2000

0 0
Time (s)
-5
KOTHB0056EB
-10 -0.2
-15
-20 -0.4
0 5 10 15 20
Time (ms)
KOTHB0054EA
37
(b) Near B (d) Near D
15.27 -15.25
15.25 -15.27

15.23 -15.29
15.21 -15.31
15.19 -15.33
15.17 -15.35
0 500 1000 1500 2000 0 500 1000 1500 2000
Time (s) Time (s)

KOTHB0057EB KOTHB0059EB
(c) Near C
0.25
0.23
0.21
0.19
0.17
0.15
0 500 1000 1500 2000
Time (s)
KOTHB0058EB
Information described in this material is current as of December 2020.

Product specifications are subject to change without prior notice due to improvements or other reasons. This document has been carefully prepared and the
information contained is believed to be accurate. In rare cases, however, there may be inaccuracies such as text errors. Before using these products, always
contact us for the delivery specification sheet to check the latest specifications.
The product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovered and reported to us within that
one year period. However, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use.
Copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission.
www.hamamatsu.com
HAMAMATSU PHOTONICS K.K., Solid State Division
1126-1 Ichino-cho, Higashi-ku, Hamamatsu City, 435-8558 Japan, Telephone: (81)53-434-3311, Fax: (81)53-434-5184
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218, E-mail: [email protected]
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-265-8, E-mail: [email protected]
France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10, E-mail: [email protected]
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, United Kingdom, Telephone: (44)1707-294888, Fax: (44)1707-325777, E-mail: [email protected]
North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46)8-509 031 00, Fax: (46)8-509 031 01, E-mail: [email protected]
Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93 58 17 33, Fax: (39)02-93 58 17 41, E-mail: [email protected]
China: Hamamatsu Photonics (China) Co., Ltd.: B1201, Jiaming Center, No.27 Dongsanhuan Beilu, Chaoyang District, 100020 Beijing, P.R.China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866, E-mail: [email protected]
Taiwan: Hamamatsu Photonics Taiwan Co., Ltd.: 8F-3, No. 158, Section2, Gongdao 5th Road, East District, Hsinchu, 300, Taiwan R.O.C. Telephone: (886)3-659-0080, Fax: (886)3-659-0081, E-mail: [email protected]
Cat. No. KOTH9003E04 Dec. 2020 DN
38

Mems Mirror Koth9003e

Uploaded by

Copyright:

Available Formats

Mems Mirror Koth9003e

Uploaded by

Document Information

Original Title

Copyright

Available Formats

Share this document

Share or Embed Document

Sharing Options

Did you find this document useful?

Is this content inappropriate?

Copyright:

Available Formats

Mems Mirror Koth9003e

Uploaded by

Copyright:

Available Formats

Technical information

1. Overview 4. How to use

2. Operation mode 5. High-accuracy control

Evaluation circuit (USB interface) available

1-3 Drive method

There are several general MEMS mirror drive methods

Power <<1 mW High Approx. 100 mW

Magnetic force Optical

The mirror is supported by beams called torsion bars.

S13124-01 Linear mode Linear mode Measurement

2-2 Non-linear mode

Non-linear mode is a resonance operation mode at the

2-3 Mirror types and operation modes

There are two types of MEMS mirrors: a single-axis one-

Note that reflection from the chip surface outside the

is greater than the mirror size, the reflection appears as 10

stray light on the target. Design the optical system so that

[Figure 3-2] Mirror reflectivity

Drive current (mA)

[Figure 3-4] Drive current and optical deflection angle directions

75 Applies negative current to ӳcoil1

Wavelength (nm) ӲCoil2 ӳCoil1

Optical deflection angle (°)

[Figure 3-5] Frequency characteristics (S12237-03P)

Drive frequency (Hz)

Optical deflection angle (°)

Case temperature (°C) Case temperature (°C)

[Figure 3-8] Temperature characteristics of coil resistance

180 The two-dimensional type MEMS mirror S13989-01H

has a window material that is tilted 20° with respect to

The temperature characteristics of the magnet’s magnetic

Light path deviation (mm)

-20 -16 -12 -8 -4 0 4 8 12 16 20

Window Optical deflection angle (°)

Absolute maximum ratings

Table 3-4 shows the absolute maximum ratings of the

(Ta=25 °C unless otherwise noted)

Parameter Symbol Value Unit Recommended operating conditions

P_coil = (Rs × Is_rms2 + Rf × If_rms2) × X × 1000 [mW] ............... (3-3)

Rs : coil resistance of slow axis [Ω]

When the slow axis is operated by a drive current with an

Parameter Symbol Condition Min. Typ. Max. Unit

-15° Mirror size A ϕ1.21 ϕ1.23 ϕ1.25 mm

[Figure 3-16] Effective area of window material Ta=25 °C, If=0 mA

Aluminum alloy is deposited on the mirror of the S13989-

Table 3-6 shows the electrical and optical characteristics

* Incident angle of light to the mirror

Transmittance of window material

Figure 3-18 shows the spectral transmittance characteristics

[Figure 3-20] Drive current (fast axis) vs. optical

Fast-axis drive current max. (mA)

mechanical properties over time. Operating the fast axis

Drive current max. (mA)

The fast-axis drive current varies depending on the

Back electromotive force max. (mV)

Frequency (Hz) Optical deflection angle max. (°)

slow-axis coils. Monitoring the amplitude of this back

electromotive force allows the amplitude of the fast axis's 20

optical deflection angle to be determined.