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ECE 8149: MEMS Design & Micromachining: Engineering Mechanics For Microsystem Design

1. The document discusses the design theory of a micro-accelerometer. 2. A micro-accelerometer uses a proof mass connected to a fixed frame by springs to detect acceleration. When acceleration is applied, the mass is displaced proportional to the acceleration. 3. The document provides equations to model the dynamic behavior of the proof mass based on its mass, the damping coefficient, spring constant, and external acceleration input.

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38 views

ECE 8149: MEMS Design & Micromachining: Engineering Mechanics For Microsystem Design

1. The document discusses the design theory of a micro-accelerometer. 2. A micro-accelerometer uses a proof mass connected to a fixed frame by springs to detect acceleration. When acceleration is applied, the mass is displaced proportional to the acceleration. 3. The document provides equations to model the dynamic behavior of the proof mass based on its mass, the damping coefficient, spring constant, and external acceleration input.

Uploaded by

Abc
Copyright
© © All Rights Reserved
Available Formats
Download as PDF, TXT or read online on Scribd
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ECE 8149: MEMS Design &

Micromachining
Chapter # 4
Engineering Mechanics for Microsystem Design

Dr Shafaat Ahmed Bazaz


Professor
Ghulam Ishaq Khan Institute of Engineering Sciences and
Technologies, Topi, Pakistan
Lecture # 11

1
4.3.4 Design Theory of Micro-accelerometer
1. Seismic Mass or proof mass (m)
2. Dashpot with damping coefficient c
3. Spring with spring constant k

2
4.3.4 Design Theory of Micro-accelerometer

•To extract the acceleration value, the


sensor has a movable seismic or proof
mass which is connected to a fixed frame
via spring’s structure.
• When there is an external acceleration,
the proof mass is displaced from its rest
position.
•The magnitude of this displacement
is proportional to the magnitude of
the acceleration and
• inversely proportional to the
stiffness of the spring structures [3].

•Hence the acceleration input that is


applied to the sensor is converted to the
proof mass displacement in the sensor.
•The sensor then extracts the magnitude
of this displacement using its sensing
scheme
3
4.3.4 Design Theory of Micro-accelerometer

1. Seismic Mass or proof mass (m)


2. Dashpot with damping
coefficient c
3. Spring with spring constant k

4
4.3.4 Design Theory of Micro-accelerometer

The casing of the vibration machine with


an amplitude of vibration, x(t) can be
described by a harmonic motion,
expressed mathematically as:

x(t )  X sin wot


• Where X is the maximum amplitude of
the vibration of the base, t is the time
and is the circular frequency W0 of
vibration of the base.
• If we designate y(t) to be the
displacement of vibration of the mass, m
from its initial equilibrium position, then
the relative or net motion of mass with
reference to the base can be expressed
as:
z (t )  y (t )  x(t )

5
4.3.4 Design Theory of Micro-accelerometer

z (t )  y (t )  x(t )
z(t )  y (t )  x (t )
z(t )  y(t )  x(t )

From Newton’s law of dynamic


equilibrium
.. . .. . ..
m y (t ) c z (t ) keq z (t )  0 m z (t ) c z (t ) keq z (t )  m x(t ) 6
4.3.4 Design Theory of Micro-accelerometer
.. . ..
m z (t ) c z (t ) keq z (t )  m x(t )
Second order non-homogenous differential
equation, its solution consists of two parts,
(particular solution) and (complementary
solution),

z (t )  zc (t )  z p (t )
Complementary solution can be obtained from
homogenous part: .. . k
z (t ) c z (t ) eq
z (t )  0
m m
 2 c keq  c c 2  4m2 wn c c2
s  ms m  0 s    i wn 
2

 
2
2m 4m 2m 4m 2
K eq
We know that c  2wn n   Natural Frequency
m m

s   wn  i wn 2  wn 2 2   wn  iwn 1   2    i  7


4.3.4 Design Theory of Micro-accelerometer

Complementary solution can be obtained from


homogenous part:
For Under damped Case: ζ<1
zc (t )  e t (C1 cos  t  C2 sin  t )
zc (t )  e  wn t (C1 cos wn 1   2 t  C2 sin wn 1   2 t )

For Over damped Case: ζ>1

zc (t )  e  wn t
C e
1
wn 1 2 t
 C2e  wn 1 2 t

For Critical damped Case: ζ=1

zc (t )  e wn t (C1  C2t )

s   wn  i wn 2  wn 2 2   wn  iwn 1   2    i  8


4.3.4 Design Theory of Micro-accelerometer
Particular solution is obtained by using
non-homogenous equation
mzp (t )  c z p (t )  keq z p (t )  mx(t )
c keq
zp (t )  z p (t )  z p (t )  X02 sin 0 t
m m
z p (t )  A cos w0t  B sin w0t
The maximum amplitude, Z of the
relative motion of the mass can also be
obtained by assuming: The casing of the vibration machine with
an amplitude of vibration, x(t) can be
z (t )  Z sin( w0t   ) described by a harmonic motion,
expressed mathematically as:

x(t )  X sin wot


x(t )   X02 sin 0 t
9
4.3.4 Design Theory of Micro-accelerometer
x(t )  X sin wot
Particular solution is obtained by using
non-homogenous equation
.. . keq
z p (t ) c z p (t ) z p (t )  Xw2 sin w0t
m m
z (t )  Z sin( w0t   )
Take the first and 2nd derivates and using the entities:
cos(   )  cos cos   sin  sin 
sin(   )  sin  cos   cos sin 

We obtain:

10
4.3.4 Design Theory of Micro-accelerometer z (t )  Z sin( w0t   )

Particular solution is obtained by using


non-homogenous equation

Comparing the coefficients of cosw0t on both sides

11
4.3.4 Design Theory of Micro-accelerometer

Particular solution is obtained by using


non-homogenous equation

Comparing the coefficients of sinw0t on both sides

Using the identity:

X02
Z
2
 c 
 2
n 
 02   0 
2
12
 m 
Proof of Z from Previous slide
4.3.4 Design Theory of Micro-accelerometer

Particular solution is obtained by using


non-homogenous equation
z (t )  Z sin( w0t   )

X02
Z
2
 c0 
2 2 2

n  0   
 m 

14
4.3.4 Design Theory of Micro-accelerometer

Complementary solution can be obtained from


homogenous part:
For Under damped Case: ζ<1
zc (t )  e t (C1 cos  t  C2 sin  t )
zc (t )  e  wn t (C1 cos wn 1   2 t  C2 sin wn 1   2 t )

For Over damped Case: ζ>1

zc (t )  e  wn t
C e
1
wn 1 2 t
 C2e  wn 1 2 t

For Critical damped Case: ζ=1

zc (t )  e wn t (C1  C2t )


c  2wn
m

s   wn  i wn 2  wn 2 2   wn  iwn 1   2    i 


15
4.3.4 Design Theory of Micro-accelerometer
.
Complementary solution can be obtained from
homogenous part:

For Critical damped Case: ζ=1


.. . keq
z (t ) c z (t ) z (t )  0
zc (t )  e wn t (C1  C2t ) m m

s   wn  i wn 2  wn 2 2   wn  iwn 1   2    i 


Cc2 4 K eq
 0
c  2wn
2 m
m m C C
Damping Coefficient Cc  2mn h 
for Critical Damping 2mn Cc
It is the ratio of the damping coefficients of the damping medium in the micro
accelerometer to its critical damping, with c  2mw c n
X 2
Z 0
Xw0 2
2 Z
 c0 
 
2
 w0 2   w0 
2
2
 2 2
   1  2    2h
16
wn 
2
n 0 wn
 wn  
 m 
Derivation of Z from previous slide

17
4.3.4 Design Theory of Micro-accelerometer

Homework
Example 4.6-4.9

Xw0 2
Z
2
 w0 2   w0 
2
wn 2
 1     2h wn 
  
2
 wn

18
4.3.4 Design Theory of Micro-accelerometer

Homework
Example 4.6-4.9

Xw0 2
Z
2
 w0 2   w0 
2
wn 2
 1     2h wn 
  
2
 wn

19

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