Chapter 01
Chapter 01
1994 2000
Ref.Toshiba
L-Micron
Year
.1
1980 1985 1990 1995 2000 2005
40
Analog/RF
35
30
25
Digital
20
15
10
0
350 250 180 130 90 65 nm Lmin
10000
1000
100
1000 nm 100
p+ n+ n+ n+ n+
p
p
WM
LM
G+
S D+
tox Cox εsi
CD =
tsi
n+ n+
CD
εox
Cox =
tox
p tsi
B CD
=n-1
Cox
Willy Sansen 10-05 019
MOST layout : Cox and CD values
εsi = 1 pF/cm
εsi 2εsi(φ - VBD)
CD = tsi = εox = 0.34 pF/cm
tsi qNB
φ ≈ 0.6 V
q = 1.6 10-19 C
Example : L = 0.35 µm; W/L = 8
NB ≈ 4 1017 cm-3
VBD = -3.3 V : tsi = 0.1 µm
CD ≈ 10 -7 F/cm2
Lmin
tox = tox = 7 nm
50 CD
Cox ≈ 5 10 -7 F/cm2 = n - 1 ≈ 0.2
Cox
Willy Sansen 10-05 0110
N-well CMOS technology
Gate oxyde
Polysilicon gate
VDS = ct
IDS IDS VGS
linear
saturation
VGS
VGS
VGS
0 VT VGS 0 VDS
Saturation because high VDS
Willy Sansen 10-05 0112
Table of contents
• Models of MOST transistors
• MOST as a resistor
• MOST as an amplifier in strong inversion
• Transition weak inversion-strong inversion
• Transition strong inversion-velocity saturation
• Capacitances and fT
• Models of Bipolar transistors
• Comparison of MOSTs & Bipolar transistors
IDS
linear
VDS > VGS-VT
saturation
Linear resistor VGS-VT
Ron = n
1
β (VGS-VT) 0 VGS-VT VDS
W
β = KP L
Willy Sansen 10-05 0114
MOST parameters β , KP , Cox , ...
Choose
minimum channel length and
find an average VGS !
Choose
Ron minimum channel length !
vIN vOUT
RL
γ CD
n= = 1+ |2ΦF| ≈ 0.6 V
|2ΦF| + VBS Cox
n ≈ 1.2 … 1.5
vIN vOUT
RL Start with VBS = 0.
D iDS G D
+
G
+ vGS rDS
vGS gmvGS
- -
S=B S diDS S
gm =
dvGS
W W 2 IDS
gm = 2K’ n L (VGS-VT) = 2 K’ n IDS =
L VGS-VT
Is gm ~ IDS
or ~ IDS ?
Willy Sansen 10-05 0123
MOST small-signal model : rDS
IDS
linear VEL
rDS = ro =
IDS
saturation
1
λ =
VEL
VEn = 4 V/µmL
IB 2 VE L
Av = gmrDS =
+ VGS-VT
vout
vin
-
Av ≈ 100
If VEL ≈ 10 V
and VGS-VT ≈ 0.2 V
L High
Choose
VGS-VT = 0.2 V !
D iDS G D
+
G
+ vGS rDS
vGS gmvGS
- -
S=B S S
S=B
+ S S
vGS +
- vGS rDS
G gmvGS
D iDS -
G D
Willy Sansen 10-05 0128
MOST small-signal model: gm & gmb
G D B
iDS + +
+ + vGS rDS vBS
vGS vBS
- - - -
S gmvGS gmbvBS
diDS diDS
gm = gmb =
dvGS dvBS
gmb CD
= =n-1
gm Cox
gm vs
Subthreshold slope :
nkT/q ln(10)
si
IDSwi
wi gmwi =
VGS nkT/q
gm
mS
gmsat
6 VT
4 si vs
2
wi
0.2 0.5 VGS-VT
0
0 0.5 1 1.5 V VGS
kT W kT 2
(VGSt-VT)t = 2n IDSt ≈ K’ (2n )
q n L q
kT W
(VGSt-VT)t = 2n ≈ 70 mV IDSt ≈ 2 µA for = 10
q L
for nMOST
log IDS si
wi
IDSt ~ (VGS-VT) 2
VGS
~ nkT/q
VGS
VT VT + 70mV
gm
1
IDS kT/q
4x
1
20 gm 2
nkT/q =
IDS VGS-VT
10
IDS
0
0.01 0.1 1 10 100
IDSt
W KP
IDS = K’ VGSTt2 [ ln (1 + ev ) ]2 VGST = VGS-VT K’ =
L 2n
VGST kT
v= VGSTt = (VGS-VT) t = 2n
VGSTt q
≈ 70 mV
Small v : ln (1 + ev )≈ ev
W W VGS-VT
IDS = K’ VGSTt2 e2v = K’ VGSTt2 exp ( )
L L n kT/q
IDSt
Large v : ln (1 + ev )≈v
Enz, AICSP ‘95,
W W 83-114
IDS = K’ VGSTt2 v2 = K’ (VGS-VT) 2 Cunha, JSSC Oct.98
L L 1510-1519
W
IDSt = IDS = K’ VGSTt2 IDSt = 2 µA for W/L = 10
L
V=1
i=1 IDS
i= = [ ln (1 + ev ) ]2 inversion
IDSt coefficient
v = ln ( e i - 1)
VGS-VT = VGSTt ln ( e i - 1)
kT
VGSTt = 2n ≈ 70 mV
q
400
kT
VGSTt = 2n
300
q
200 mV
200
100
80 mV
0
0 mV
-100
0.5 2 8 40
-200
IDS
0.01 0.1 1 10 100 i i=
IDSt
Willy Sansen 10-05 0139
Transconductance gm between wi & si
IDS
i= = [ ln (1 + ev ) ]2 gm ≈ ….
IDSt
gm nkT 1-e- i 1
GM = = Large i : GM =
IDS q i i
i
Small i : GM = 1 -
2
Alternative approximation :
1
GM = Large i : GM = 1
1+ 0.5 i + i
i
i
Small i : GM = 1 -
4
Willy Sansen 10-05 0140
GM versus inversion coefficient i
GM
1.0 gm nkT
GM =
0.9 sqrt IDS q
0.8
exp GM =
0.7
0.6
1-e- i
0.5
i
0.4
0.3 1
0.2 1+ 0.5 i + i
0.1
8 IDS
0.0 i=
0.01 0.1 1 10 100 i IDSt
gm vs
gmsat = WCoxvsat
si
wi is absolute max. !
VGS
IDS saturation
linear
(VGS-VT )vs
Saturation region
Square-law region
(VGS-VT )t
gm gmsat = WCoxvsat
mS vsat = 107 cm/s
gmsat
6 VT
4 si vs
2
wi
0.2 0.5 VGS-VT
0
0 0.5 1 1.5 V VGS
= WCoxvsat
µ 1 1
θL= =
2n vsat Ec Ec is the vertical critical field !
K’n W (VGS-VT) 2
IDS = L
1 + θ (VGS-VT) [large VGS]
K’n W gm 1
gmsat ≈ gmRs = ≈
θ L 1 + gm RS RS
θ µ 1 1
RS = RS ≈ ≈
K’n W/L 2n W K’nvsat W Coxvsat
K’n W (VGS-VT) 2
L IDSsat = WCoxvsat (VGS-VT)
IDS =
1 + θ (VGS-VT)
K’n W
gmsat = WCoxvsat ≈
θ L
1 vsat Is proportional to
(VGS-VT)vs = ≈ 2nL
θ µ channel length L !!!
≈ 5 L ≈ 0.62 V if L = 0.13 µm
Willy Sansen 10-05 0148
Transition Current IDSvs between si and vs
2n vsat vsat2
IDSvs ≈ K’ WL ( )2 ≈ 100 n εox W
µ µ
IDSvs µCox
≈ 10 A/cm K’ =
W 2n
εox L
Cox = tox =
tox 50
W
gmK’ = 2K’ (VGS-VT) gmK’ ≈ 1.2 10-9 VGST W/L2 S/cm
L
VGST
1 1 1 W 17 10-5
= + gm ≈ L
gm gmK’ gmsat L 1 + 2.8 104 L / VGST in cm
If VGST = 0.2 V, vsat takes over for L < 65 nm (If 0.5 V for L < 0.15 µm)
clear si
.1 si
wi
Year
.01
1988 1990 1992 1994 1996 1998 2000 2002 2004 2006 2008
gm VGS-VT ≈ 0.5 V
mS VGS-VT ≈ 0.2 V
gmsat
6
4 si vs
VT
2 wi
0.2 0.5 VGS-VT
0
0 0.5 1 1.5 V VGS
gm gm
L>>Lmin
Lmin ≈ 50 tox
L>>Lmin
Lmin ≈ 50 tox
VGS-VT VGS-VT
W
W = ct = ct
L
Willy Sansen 10-05 0154
gm vs VGS for different tox (≈ Lmin/50)
Exercise :
gm gm
Lmin small
Lmin small
VGS-VT VGS-VT
W
W = ct = ct
L
Willy Sansen 10-05 0155
Table : MOST IDS , gm & gm/IDS
Summary :
JG ≈ 4 10-2 A/cm2
For 10 x 0.5 µm
IG ≈ 2 nA
JG (A/cm2)
L
≈ 4.5 105 exp( - )
6.5
L in nm
rG CGD CDB
G D B
+ +
CGS vGS vBS CSB
- rDS
-
gmvGS gmbvBS
S
2
CGS ≈ 3 WLCox ≈ 2W fF/µm for Lmin
εox
LminCox ≈ Lmin ≈ 50 εox ≈ 2 fF/µm
tox
CGD = WCgdo
Willy Sansen 10-05 0160
MOST fT where iDS = iGS
iGS
G D
iGS = vGS CGS s
+
CGS iDS0
vGS
- iDS = gm vGS
gmvGS rDS
S
2 ’ W µCox
CGS = 3 WLCox gm = 2K L (VGS-VT) K’ =
2n
gm 1 3 µ vsat
fT = = (VGS-VT) or ≈
2π CGS 2π 2n L2
2π L
fmax ≈ fT / 8π rGCGD
Willy Sansen 10-05 0161
Design for high speed :
L High Low
Processors
Willy Sansen 10-05 0163
fT model in si and velocity saturation
1 13.5
fT = GHz
L 1 + 2.8 L / VGST
L in µm
IDS 1-e- i
gm = but IDS = i IDSt
nkT/q i
IDSt
gm = i (1 - e - i)
nkT/q
= 2 µ kT/q
4 K’ nkT/q
≈ i for small i ! =
2π Cox L2 2π L2
Willy Sansen 10-05 0165
fT versus inversion coefficient i
fT
=
1 fTH
GM
fT
i (1 - e - i)
fTH
0.5 GM =
1-e- i
0 IDS
0.01 0.1 1 10 100 i=
IDSt
1 µ K’IDS IDS
fT = (VGS-VT) = =
2π L2 π Cox WL3 πWLCox(VGS-VT)
rG CGD CDB
G D B
+ +
CGS vGS vBS CSB
- rDS
-
gmvGS gmbvBS
S
CjSB0
CSB = φjS ≈ φjD ≈ 0.5 … 0.7 V
1 + VSB/φjS
CjDB0
CDB =
1 + VDB/φjD
CG /5
CGD
G D
RG /3 +
vGS rDS
CGS -
gmvGS
S
CG = CGS + CGD
Ref. Sansen, etal, ACD, XDSL,
Ref. Tin, Tr. CAD, April 1998, 372 RFMOS models, Kluwer 1999
W W 2 IDS
gm = 2K’ n L (VGS-VT) = 2 K’ n IDS =
L VGS-VT
VEL
rDS = ro = VEn ≈ 5 V/µmL VEp ≈ 8 V/µmL
IDS
vsat = 107 cm/s
3 µ
1 vsat
fT = (VGS-VT) or now ≈
2π 2n L2
2π L
Willy Sansen 10-05 0170
Growing number of parameters !
BSIM4 : http://www-device.eecs.berkeley.edu/bsim/bsim_ent.html
Model 11 : http://www.semiconductors.philips.com/Philips_Models/mos_models
EKV : http://legwww.epfl.ch/ekv/model.html /model11/index.html
C iCE
iBE iCE
B
+ 0.7 V : not more
vBE
not less
-
E vBE
0 0.5 1V
VBE ICE
kT/q IBE =
ICE = IS exp β
is leakage current
IS ≈ 10 -15 A kT/q = 26 mV at 300 K
β ≈ 10 … 1000
diCE ICE gm 1
gm = = = ≈ 40 V-1
dvBE kT/q ICE kT/q
dvBE dvBE β VE
rπ = = β = ro = VEn ≈ 20 V
diBE diCE gm ICE VEp ≈ 10 V
rB Cµ C
B’ B
+
CCS
rπ Cπ - vBE ro
gmvBE
E
S
CjBE0
Cπ = CjBE + CD CjBE = φjE ≈ 0.7 V
1 + VBE/φjE
rB B
Cµ C
B’
+
CCS
rπ Cπ - vBE ro
gmvBE
E S
QB diCE ICE
CD = = τF = τFgm = τF
vBE dvBE kT/q
WB2 WB
Base transit time τF = or now ≈
2Dn vsat
≈ 10 … 200 ps
Willy Sansen 10-05 0178
Bipolar transistor capacitances Cµ & CCS
rB B
Cµ C
B’
+
CCS
rπ Cπ - vBE ro
gmvBE
E
S
CjBC0
Cµ = CjBC CjBC =
1 + VBC/φjC
CjCS0
CCS = CjCS CjCS = φjC ≈ φjS ≈ 0.5 V
1 + VCS/φjS
+
CCS
rπ Cπ - vBE ro
gmvBE
E=S
gm 1 1 vsat
fT = = or ≈
2π Cπ 2π 2π WB
τF + CjBE+Cµ
gm
ICE
1
2πfT 1 kT 1
slope
= τF + (CjBE + Cµ)
2πfT q ICE
τF
1/ICE slope
VBE
kT/q
ICE = IS exp IS ≈ 10 -15 A kT/q = 26 mV at 300 K
ICE VE
gm = ro = VEn ≈ 20 V VEp ≈ 10 V
kT/q ICE
1 1 vsat
fT = or ≈
2π Cje+Cjc 2π WB
τF +
gm
β?
CD
n=1+
Cox
4… 6 x
IDS
VDSsat ≈ VGS-VT
IDS
VGS-VT ≈
K’n W
L
VCEsat ≈ kT/q’s
0 VCEsat VDSsat VDS
Ref. Laker - Sansen Table 2-8
gm
1
IDS kT/q
4 X
1
V-1 20
nkT/q
10
IDS ICE
0
0.01 0.1 1 10 100 i
dvi2