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Scanning Electron Microscope

The document discusses the scanning electron microscope (SEM), including its introduction, working principle, components, advantages, disadvantages, and applications. The SEM uses a focused beam of electrons to generate signals that produce very high-resolution images of a sample surface. It can achieve magnifications up to 50,000x and has a resolution ranging from nanometers to millimeters. The SEM is useful for imaging surface topography and chemistry and is widely used for quality control and materials analysis.

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Raza Ali
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110 views6 pages

Scanning Electron Microscope

The document discusses the scanning electron microscope (SEM), including its introduction, working principle, components, advantages, disadvantages, and applications. The SEM uses a focused beam of electrons to generate signals that produce very high-resolution images of a sample surface. It can achieve magnifications up to 50,000x and has a resolution ranging from nanometers to millimeters. The SEM is useful for imaging surface topography and chemistry and is widely used for quality control and materials analysis.

Uploaded by

Raza Ali
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as DOCX, PDF, TXT or read online on Scribd
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“Scanning Electron Microscope”

Subject: Characterization of Engineering Materials (MME 308)

Submitted to:
Dr. Muhammad Asif Rafiq

Submitted by:
Raza Ali (2018-MM-34)

Date of submission: June 9th, 2021

University of Engineering and Technology, Lahore


Scanning Electron Microscope
Introduction
Scanning electron microscope (SEM), type of electron microscope, designed for
directly studying the surfaces of solid objects, that utilizes a beam of focused electrons of
relatively low energy as an electron probe that is scanned in a regular manner over the
specimen.
 The electron source and electromagnetic lenses that generate and focus the beam are
similar to those described for the transmission electron microscope (TEM).
 The action of the electron beam stimulates emission of high-energy backscattered
electrons and low-energy secondary electrons from the surface of the specimen.
 SEM produces images that can show information on a material’s surface
composition and topography.
 No elaborate specimen-preparation techniques are required for examination in the
SEM, and large and bulky specimens may be accommodated.
It is desirable that the specimen be rendered electrically conducting; otherwise, a
sharp picture will not be obtained. Conductivity is usually achieved by evaporating a film
of metal, such as gold, 50–100 angstroms thick onto the specimen in a vacuum (such a
thickness does not materially affect the resolution of the surface details).

If, however, the SEM can be operated at 1–3 kilovolts of energy, then even non-
conducting specimens may be examined without the need for a metallic coating.

Scanning electron microscopy can subsequently be used for imaging the elemental
composition of a sample surface and determining topographical sample features with a
significantly increased resolving power.

Working principle
At the heart of a scanning electron microscope is a high-energy electron source
positioned above a series of condenser lenses and apertures which focus these electrons into a
beam as shown in figure 2. The position of this beam is altered by sets of deflection or
scanning coils before the final lens aperture. A sample is placed in the path of the electron
beam which is continuously deflected into a raster scanning pattern by the deflection coils.

When electrons impact a surface, they generate secondary and backscattered electrons
(BSE), as well as x-rays. BSE and x-ray detectors in the sample chamber acquire these
signals, which are characteristic of the sample’s elemental composition, morphology, and
crystalline structure.

The sample is positioned on a stage in the chamber of the microscope before a


vacuum is created in the chamber via a series of pumps. The level of the vacuum depends on
the microscope’s design, while some microscopes are designed to operate in low vacuum
environments, meaning that the chamber does not need to be evacuated.

Scan coils control the position of the electron beam above the objective lens. These
coils allow for the beam to scan across the surface of the sample, enabling information about
a defined area to be collated.

Components of SEM

Essential components of all SEMs include the following:

 Electron Source ("Gun")


 Electron Lenses
 Sample Stage
 Detectors for all signals of interest
 Display / Data output devices
 Infrastructure Requirements:
o Power Supply
o Vacuum System
o Cooling system
o Vibration-free floor
o Room free of ambient magnetic and electric fields
SEMs always have at least one detector (usually a secondary electron detector), and
most have additional detectors. The specific capabilities of a particular instrument are
critically dependent on which detectors it accommodates.

Use of Electrons instead of Light


The distance that the human eye can distinguish two parts in visible light is 0.2mm
apart, however this can be increased through the use of a lens. This distance is called the
resolving power of the lens, which can magnify the distance many times over. However, a
light microscope has a resolving power of about 1000x, as it is limited by the wavelength of
the light as well as the quality and number of lenses used. However, electron microscopes
provide a shorter wavelength, which creates a better resolution.

Properties of SEM microscope

Scanning electron microscopy can generate 3D chemical surface maps of a sample


with a magnifying capacity of up to 50,000x. This offers high lateral resolution ranging from
millimeters to nanometres (>10nm), while energy dispersive x-ray (EDX) analysis provides
chemical detection limits of 1000 – 3000 parts per million (ppm).

The maximum resolution for a SEM image depends on factors such as interaction
volume of the beam and electron spot size. SEMs can achieve a high resolution of below 1
nanometer (nm), although they cannot provide atomic resolutions. Most modern SEMs
provide a resolution of 1-20 nm, while smaller desktop version offer a resolution of 20 nm or
more.

Advantages of SEM

 Produces detailed three-dimensional and topographical images


 Easy to operate with training
 User-friendly software
 Can perform quick scans (BSE, EDS and SEI analyses can be performed within a few
minutes)
 Samples require a small amount of preparation

Disadvantages of SEM

 Expensive to buy and run


 Large (takes up lots of space)
 Needs to be in an environment where there is no electric, magnetic or vibration
interference
 Needs a trained operative to prepare the samples and operate the microscope
 Small risk of radiation exposure
 Restricted to samples small enough to fit into the vacuum chamber
 Requires cool water and a steady voltage

Applications of SEM

Scanning electron microscopy is a robust analytical tool with a broad range of


practical applications in the commercial, analytical, and industrial spaces. It is broadly used
for quality control (QC) and good-bad testing of pharmaceutical products and has proven
useful for detecting and identifying unknown contaminants in manufactured goods. It has
applications in the following aspects also
1) Acquiring elemental maps or spot chemical analyses using EDS,

2) Discrimination of phases based on mean atomic number (commonly related to relative


density) using BSE,

3) Compositional maps based on differences in trace element "activitors" (typically transition


metal and Rare Earth elements) using CL.

The SEM is also widely used to identify phases based on qualitative chemical analysis
and/or crystalline structure.

Precise measurement of very small features and objects down to 50 nm in size is also
accomplished using the SEM.

Backescattered electron images (BSE) can be used for rapid discrimination of phases
in multiphase samples.

SEMs equipped with diffracted backscattered electron detectors (EBSD) can be used
to examine microfabric and crystallographic orientation in many materials.

References

1. scanning electron microscope | Definition, Images, Uses, Advantages, & Facts |


Britannica

2. What is Scanning Electron Microscopy (SEM)? - TWI (twi-global.com)

3. Working Principles and Applications of Scanning Electron Microscopy


(jordilabs.com)

4. Scanning Electron Microscopy (SEM) (carleton.edu)

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