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    Micro-Electro-Mechanical Systems: Presented by Rajan Kumar

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    rajan2258
    The document introduces micro-electro-mechanical systems (MEMS) technology. MEMS are microfabricated structures that combine electrical and mechanical components. They range in size from sub-microns to millimeters. MEMS are built using deposition, lithography, and etching to form thin films and pattern structures. Example applications include sensors, actuators, and microsystems for various industries. MEMS offer benefits like miniaturization and cost-effectiveness but also challenges like complex design and high initial investment costs.

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    Micro-Electro-Mechanical Systems: Presented by Rajan Kumar

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    rajan2258
    19 views13 pages
    The document introduces micro-electro-mechanical systems (MEMS) technology. MEMS are microfabricated structures that combine electrical and mechanical components. They range in size from sub-microns to millimeters. MEMS are built using deposition, lithography, and etching to form thin films and pattern structures. Example applications include sensors, actuators, and microsystems for various industries. MEMS offer benefits like miniaturization and cost-effectiveness but also challenges like complex design and high initial investment costs.

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    rajan_memsseminar

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    The document introduces micro-electro-mechanical systems (MEMS) technology. MEMS are microfabricated structures that combine electrical and mechanical components. They range in size from sub-microns to millimeters. MEMS are built using deposition, lithography, and etching to form thin films and pattern structures. Example applications include sensors, actuators, and microsystems for various industries. MEMS offer benefits like miniaturization and cost-effectiveness but also challenges like complex design and high initial investment costs.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPS, PDF, TXT or read online from Scribd
    Download as pps, pdf, or txt
    19 views13 pages

    Micro-Electro-Mechanical Systems: Presented by Rajan Kumar

    Uploaded by

    rajan2258
    The document introduces micro-electro-mechanical systems (MEMS) technology. MEMS are microfabricated structures that combine electrical and mechanical components. They range in size from sub-microns to millimeters. MEMS are built using deposition, lithography, and etching to form thin films and pattern structures. Example applications include sensors, actuators, and microsystems for various industries. MEMS offer benefits like miniaturization and cost-effectiveness but also challenges like complex design and high initial investment costs.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PPS, PDF, TXT or read online from Scribd
    Download as pps, pdf, or txt
    of 13

    Micro-Electro-Mechanical

    Systems
    -The Future Technology, but Today’s choice

    Presented by… Rajan Kumar


    Guide:- Prof. Ashwani Mathur
    AIM OF THE PRESENTATION

     To introduce about the MEMS TECHNOLOGY

     To introduce the MEMS Design process.

     Applications, Advantages and Disadvantages of the MEMS.

    2
    Introduction
    What is MEMS Technology?
     MEMS technology is based on a number of tools and
    methodologies, which are used to form small structures with
    dimensions in the micrometer scale

     MEMS fabrication approach that conveys the advantages of


    miniaturization, multiple components, and microelectronics to the
    design and construction of integrated Electromechanical systems

    3
    Introduction Conti…
    What are MEMS?
     • Micro - Small size, microfabricated structures
    • Electro - Electrical signal /control ( In / Out )
    • Mechanical - Mechanical functionality (Out/ In )
    • Systems - Structures, Devices, Systems controls
    What is the size of MEMS?
    They range in size from the sub micron level to the
    millimeter level, and there can be any number, from a few
    to millions, in a particular system.
    4
    Building Blocks In MEMS
     How MEMS are prepared?
     There are three basic building blocks in MEMS technology.
    1. Deposition: The ability to deposit thin films of
    material on a substrate.
    2. Lithography: To apply a patterned mask on top of
    the films by photolithograpic imaging.
    3. Etching: To etch the films selectively to the mask.

    5
    MEMS Deposition Technology
    MEMS deposition technology can be classified in two groups:

    1. Depositions that happen because of a chemical reaction:


     Chemical Vapor Deposition (CVD)
     Electrodeposition
     Epitaxy
     Thermal oxidation
    2. Depositions that happen because of a physical reaction:
     Physical Vapor Deposition (PVD)
     Casting

    6
    MEMS Lithography Technology
    MEMS lithography technology can be classified in two groups:
    1. Pattern Transfer
    2. Lithographic Module
    a. Dehydration bake and HMDS prime
    b. Resist spin/spray and Soft bake
    c. Alignment, Exposure
    d. Post exposure bake and Hard bake
    e. Descum

    7
    MEMS Etching Technology
    There are two classes of etching process:

    1. Wet etching: The material is dissolved when immersed in a


    chemical solution.

    2. Dry etching: The material is sputtered or dissolved using


    reactive ions or a vapor phase etchant.

    8
    MEMS Applications
    Micro-engines –Micro Reactors, Vibrating Wheel
    Inertial Sensors –Virtual Reality Systems
    Accelerometers –Airbag Accelerometer
    Pressure Sensors –Air Pressure Sensors
    Optical MEMS –Pill Camera
    Fluidic MEMS -Cartridges for Printers
    Bio MEMS -Blood Pressure Sensors
    MEMS Memory Units -Flash Memory

    9
    Advantages and Disadvantages
     Minimize energy and materials  Farm establishment requires
    use in manufacturing huge investments
     Cost/performance advantages  Micro-components are Costly
     Improved reproducibility compare to macro-components
     Improved accuracy and  Design includes very much
    reliability complex procedures
     Increased selectivity and  Prior knowledge is needed to
    sensitivity integrate MEMS devices

    10
    Conclusion
    The medical, wireless technology, biotechnology, computer,
    automotive and aerospace industries are only a few that will
    benefit greatly from MEMS.

    This enabling technology promises to create entirely new


    categories of products

    MEMS will be the indispensable factor for advancing


    technology in the 21st century

    11
    References for MEMS
    IEEE Explore http://ieeexplore.ieee.org/Xplore/DynWel.jsp
    PDF Files http://www.scribd.com/mems/

    Introduction to Microengineering
    http://www.dbanks.demon.co.uk/ueng/
    MEMS Clearinghouse
    http://www.memsnet.org/
    MEMS Exchange
    http://www.mems-exchange.org/
    12
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