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    Failure Analysis of Resist Pattern Collapse - Surface Tension ...

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    zerocool86
    The document discusses how surface tension influences the failure of resist patterns during collapse. It presents a shear and bending model to analyze the stresses and deformation in resist beams at high aspect ratios. The model shows that elastic deformation reduces stresses and allows higher aspect ratios before failure compared to a rigid model. The key length scale for deformation due to surface tension is around 0.07nm times the aspect ratio to the fourth power.

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    Failure Analysis of Resist Pattern Collapse - Surface Tension ...

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    zerocool86
    30 views9 pages
    The document discusses how surface tension influences the failure of resist patterns during collapse. It presents a shear and bending model to analyze the stresses and deformation in resist beams at high aspect ratios. The model shows that elastic deformation reduces stresses and allows higher aspect ratios before failure compared to a rigid model. The key length scale for deformation due to surface tension is around 0.07nm times the aspect ratio to the fourth power.

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    Failure Analysis of Resist Pattern Collapse

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    Failure Analysis of Resist Pattern Collapse_ Surface Tension ...

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    The document discusses how surface tension influences the failure of resist patterns during collapse. It presents a shear and bending model to analyze the stresses and deformation in resist beams at high aspect ratios. The model shows that elastic deformation reduces stresses and allows higher aspect ratios before failure compared to a rigid model. The key length scale for deformation due to surface tension is around 0.07nm times the aspect ratio to the fourth power.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    30 views9 pages

    Failure Analysis of Resist Pattern Collapse - Surface Tension ...

    Uploaded by

    zerocool86
    The document discusses how surface tension influences the failure of resist patterns during collapse. It presents a shear and bending model to analyze the stresses and deformation in resist beams at high aspect ratios. The model shows that elastic deformation reduces stresses and allows higher aspect ratios before failure compared to a rigid model. The key length scale for deformation due to surface tension is around 0.07nm times the aspect ratio to the fourth power.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 9

    Failure Analysis of Resist Pattern Collapse:

    Surface Tension Influences

    Cyrus Tabery
    May 29, 2000
    Problem: Resist Feature Collapse
    • Resist features collapse upon formation
    at high aspect ratios.
    • What are important parameters
    controlling this phenomena?
    • What is required to design around this
    problem?
    Shear and Bending Model
    • Beam is treated as Pitch P
    elastic solid
    L
    d 4v
    EI y 4
    = ∆PL
    dz

    • Young-Laplace R
    z Thickness
    pressure E
    εP/2
    y γ
    γ
    ∆P = γ∇ ⋅ n =
    R x Substrate
    LP3
    • Aspect Ratio Iy = Moment of Inertia
    96
    Thickness z2
    ε= M y = ∆PL Bending Moment
    HalfPitch 2
    Shear and Bending Model Cont.
    • Shear Stress is linear x
    with ε
    2z
    τ xy = ∆P(ε − )
    P

    • Tensile stresses is z
    quadratic in ε
    My 48∆Pxz 2
    σz = x=
    Iy P3
    γ 2
    σ max = 12 ε
    P
    Perturbation in Spacing
    • Stress field in resist
    beam causes R
    deformation
    γ
    vmax = 3ε 4
    E

    • Deformation Elastic Deformation


    influences Laplace R
    pressure
    4γ
    ∆P =
    P − vmax
    An Illustrative Example
    Perturbation in Spacing Cont.
    −m
    • Updated Laplace 4 γ
    i
     4 γ 
    pressure gives new
    (i )
    vmax = 3ε ∑  − 6ε
    E m =0 

    EP 
    elastic problem.
    • Several iterations +
    reveals a series ∞

    convergence for ∑ (− x )−m


    = x +1
    m =0
    deformation and stress
    • Note: Rigid Model is
    recovered in limit EÆ8 



    γ  1 
    σ max = 12 ε 2  4 8 2 
    P 3ε γ 18ε γ
     1 − − 2 2 
     PE P E 
    Feature Collapse Comparison
    • Consider the 106
    Elas tic Model

    system Rigid Model

    – E~109 Pa 104

    γ~70 mJ/m2 S table Region

    Failure Pitch (microns )


    102

    • High stresses Models Conflict

    cause adhesive or 100

    plastic deformation
    failure, thus critical 10-2
    Uns table Region

    aspect ratio exists 10-4


    for each pitch. 100 101
    As pect Ratio
    102
    Conclusions
    • Elastic deformation is important in
    considering failure of resist beams
    – Rigid model significantly overestimates
    stable region

    – N = ε γ = Deformation _ scale
    4

    Ta
    PE Feature _ scale

    • Length scale for deformation is


    γ/Eε4~0.07ε4nm for glassy polymer/H2O
    • Supercritical develop would eliminate
    interfacial tension induced failure

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