Polycold Maxcool Series
Uploaded by
Rafael OliveiraPolycold Maxcool Series
Uploaded by
Rafael OliveiraPolycold® MaxCool Cryochiller
Installation and Operation Manual
Including Models:
MaxCool 4000H
MaxCool 2500L
214072 Revision B
Polycold Cryochiller
Installation and Operation Manuall
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
AcuLigner™, Align™, AquaTran™, AutoTeach™, ATR™, AXM™, Basic Blue™, BiSymmetrik™,
CenterSmart™, Cool Solutions™, Crate to Operate™, e-RMA™, e-Spares™, e-Volution™, FastRegen™,
FIXLOAD™, FrogLeg™, InLigner™, InCooler™, Interface™, Jet Engine™, LowProfile™, M2 Nano™,
Mini-Ion™, PASIV™, PowerPak™, PerformanceBlue™, PowerTools™, QuadraFly™, Radius™, Radient™,
Radient Express™, Reliance™, Reliance ATR™, RetroEase™, SCARA™, SmartPM™,
SPOTLevel™, Synetics™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time Optimal
Trajectory™, Time Optimized Path™, TopCooler™, TopLigner™, Ultimate Blue™, VAC-407™, VacuTran™,
Vacuum Quality Monitor™, VQM™, Vacuum Quality Index™, VQI™, and the Brooks logo are trademarks of
Brooks Automation, Inc.
AcuTran®, AquaTrap®, Conductron®, Convectron®, the Cool Solutions logo, Cryodyne®, Cryotiger®,
Cryo-Torr®, Fusion®, GOLDLink®, Granville-Phillips®, Guardian®, GUTS®, Helix®, Jet®, Leapfrog®,
MagnaTran®, MapTrak®, Marathon®, Marathon 2®, Marathon Express®, Micro-Ion®, MiniConvectron®,
On-Board®, Polycold®, Razor®, Simplicity Solutions®, the Simplicity Solutions logo, Stabil-Ion®, TrueBlue®,
TurboPlus®, Vision®, Zaris®, and the Brooks Automation logo are registered U.S. trademarks of Brooks
Automation, Inc.
All other trademarks are properties of their respective owners.
© 2014 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary
Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot
be used for distribution, reproduction, or sale without the express written permission of Brooks Automation. This
information may be incorporated into the user’s documentation, however any changes made by the user to this
information is the responsibility of the user.
Corporate Headquarters
15 Elizabeth Drive, Chelmsford, MA 01824 USA
For Technical Support:
Location GUTS® Contact Number
+1-800-FOR-GUTS (1-800-367-4887)
North America
+1-978-262-2900
Europe +49-1804-CALL-GUTS (+49-1804-2255-4887)
Japan +81-45-477-5980
China +86-21-5131-7066
Taiwan +886-3-5525225
Korea +82-31-288-2500
Singapore +65-6464-1481
Visit us online: www.brooks.com
June 26, 2014 Part Number 214072 Revision B
This technology is subject to United States export Administration Regulations and authorized to the destination
only. Diversion contrary to U.S. law is prohibited.
Original manual written in English - Printed in the U.S.A.
Brooks Automation
ii 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
Contents
Introduction
Using This Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
System Illustration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
System Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Definitions: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
About the Polycold MaxCool Cryochiller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Polycold Cryochiller Versions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Water Vapor Capturing in High Vacuum Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Minimizing Oil Backstreaming From Diffusion Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Heat Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
Polycold Cryochiller System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Polycold Cryochiller Component List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Polycold Cryochiller Views. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Regulatory Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Declaration of Conformity (DOC). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Declaration of Incorporation (DOI). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14
Disclosure Table, EIP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15
Limited Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-16
Safety
Explanation of Hazard Alerts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
Safety Text . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
Safety Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
Signal Words and Color. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Alert Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Use of Notes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
General Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Safety Labels and Safety Label Identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Label Identification and Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Safety and Operational Interlocks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9
Cryochiller Lockout/Tagout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
Mechanical Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-12
Electrical Hazards. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-14
Thermal Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-15
Brooks Automation
214072 Revision B iii
Contents Polycold Cryochiller
Installation and Operation Manual
Chemical Hazards. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16
High Pressure Gas Hazard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Fire and Explosion Hazard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Environmental Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Refrigerant Gas Recycling and Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Hazardous Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Material Safety Data Sheets - MSDS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Specifications and Site Preparation
Physical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Site Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Electrical Characteristics - MaxCool 4000H and MaxCool 2500L . . . . . . . . . . . . . . . . . 3-4
Electrical Protection Requirements - MaxCool 4000H and 2500L . . . . . . . . . . . . . . . . 3-5
Electrical Specification Notes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Cooling Water Purity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Water Purity Properties . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Performance Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Cryocoils and Refrigerant Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Balance Pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Refrigerants in the MaxCool Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Installation
Installation Checklist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Installation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Installing a Refrigeration Unit to Meet ASHRAE Requirements . . . . . . . . . . . . . . . . . . . 4-3
Inspect and Unpack the Polycold Cryochiller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Move to Location. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Remove the Compressor Hold-Down Nuts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Connect the Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Connect Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Input Power Transformers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16
Install the Cryosurface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
Install the Feed-Through and Cryocoil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
Install a Cryobaffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
Install the Refrigerant Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-19
Guidelines for Refrigerant Lines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
Route and Install the Refrigerant LInes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
Install Parker UltraSeal Compatible Couplings (Standard Fitting) . . . . . . . . . . . . . . . . . 4-24
Install Cajon VCR Couplings (Optional Fitting) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25
Brooks Automation
iv 214072 Revision B
Polycold Cryochiller Contents
Installation and Operation Manual
Route Condensate Drain Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-26
Check the Refrigerant Line and Cryosurface for Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-27
About Leak Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-27
Leak Check Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-28
Correct a Leak in a Parker UltraSeal Compatible or Cajon VCR Coupling . . . . . . . . . . .4-31
Evacuate the Refrigerant Line and Cryosurface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-32
Connect the Refrigerant Line Thermocouples (Type T) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-36
Preliminary Check of the Polycold Cryochiller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-39
Insulate Exposed Refrigerant Tubes and Couplings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-41
Startup and Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-46
Evaluate the Polycold Cryochiller / Place Into Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-48
Install Seismic Restraints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-51
Interfacing
General Interface Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
General Interface Rules. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
RS-232 Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
Gauge Relay (J4) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-3
Human Machine Interface - HMI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Navigation Keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Cool/Standby/Heat Keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Remote Key . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
OK LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Fault LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
Reset Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
HMI Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-5
HMI Home Screen Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
HMI Top Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-7
System Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8
Configuration Page 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
Configuration Page 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
Control Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-11
Set Comm Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-12
Basic Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-13
Ethernet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-14
Profibus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-15
DeviceNet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-16
24V DI/DO Remote Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-17
24 V DI/DO Single Circuit Non-Isolated. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-20
24 V DI/DO Dual Circuit Non-Isolated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-21
24 V DI/DO Single Circuit Isolated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-22
24 V DI/DO Dual Circuit Isolated . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-23
24V DI/DO Remote Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-24
Brooks Automation
214072 Revision B v
Contents Polycold Cryochiller
Installation and Operation Manual
Operation
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
System Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Local Controls and Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
HMI Keypad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
LED Status Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Single Circuit Modes of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Standby . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Cool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Cool Mode Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Defrost . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Defrost Mode Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Dual Circuit Modes of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
One Circuit Standby and One Circuit Cool. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
One Circuit Defrost and One Circuit Cool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
One Circuit Defrost versus One Circuit Standby . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Compressor Safety Chain . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Polycold Cryochiller Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
System Boot/Power-Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Compressor Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Alternate Compressor Startup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Operating the Polycold Cryochiller with a Cryocoil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Start and Cool the System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Defrost the Cryocoil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Operating the Polycold Cryochiller with a Cryobaffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Standby and Cool Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Defrost the Cryobaffle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Host Commands
Command Group Listing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
Command Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
Response Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
Command Terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
32 Bit Numbered Bitfield . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Checksum Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4
Excel Macro for Checksum Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Example of Interface Usage:. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Example of a Get Host Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Example of a Set Host Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Set Command Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
Security Levels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
Example of Security Level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
Command Listing Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
ABC_DEF Description of the Command . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
Commonly Used Host Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8
Brooks Automation
vi 214072 Revision B
Polycold Cryochiller Contents
Installation and Operation Manual
System Configuration Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-9
SW_VER Software Version & Build Number . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-9
VENDOR_ID Get the DeviceNet Vendor ID . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-10
IP_ADDR IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-10
DEFAULT_GATEWAY Default Gateway . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-10
NETWORK_MASK Network Mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-11
DEVICENET_PARAMS DeviceNet parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-11
PROFIBUS_PARAMS Profibus parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-12
HMI_TIMEOUT HMI Timeout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-12
LEGACY_REMOTE,COMP_SIGNAL_LOGIC Compressor Input Signal Logic . . . . . .7-13
LEGACY_REMOTE,RMT_SIGNAL_LOGIC Legacy Remote Output Signal Logic . . .7-14
LEGACY_REMOTE,OP_MODE_LOGIC Legacy Remote Operating Mode Logic . . .7-15
System Operational State Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-16
SYSTEM_CONTROL_MODE_DEF Default System Control Mode . . . . . . . . . . . . . .7-16
SYSTEM_CONTROL_MODE System Control Mode . . . . . . . . . . . . . . . . . . . . . . . . .7-16
FAULT_STATUS Current Fault Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-17
ALARM_STATUS Current Alarm Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-18
ACTIVE_ALARMS Current Active Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-19
CAPACITY_TARGET_TEMP Cooling Capacity Target Temperature . . . . . . . . . . . . .7-22
POWER_MGMT_STANDBY_DELAY Excess Capacity Temperature difference . . . .7-22
E_MGMT_ENABLE Energy Management Enable. . . . . . . . . . . . . . . . . . . . . . . . . . . .7-23
System Sensor Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-23
SENSOR_SNAPSHOT Sensor Data Snapshot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-23
SYSTEM_VALVE_STATE Valve Open/Closed State for system valves. . . . . . . . . . . .7-25
CLDST_LQD_TEMP Unit Coldest Liquid Temperature . . . . . . . . . . . . . . . . . . . . . . . .7-25
COLD_JUNCT_TEMP Cold Junction Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . .7-25
BUFFER_LINE_TEMP Buffer Line Temperature. . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-26
WARM_CTL_TEMP Rapid Balance Pressure Check Control Temperature . . . . . . . .7-26
System Actions Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27
RESET_ALARMS Reset alarms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27
SECURITY_LEVEL Security Level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27
Compressor Configuration Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-28
COMP_SERIAL_NUM Compressor Serial Number . . . . . . . . . . . . . . . . . . . . . . . . . . .7-28
COMP_MOTOR_HOURS Refrigerant Motor Operating Hours . . . . . . . . . . . . . . . . . .7-28
Compressor Operational State Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-29
COMP_MOTOR_STATE Refrigerant Compressor On/Off State . . . . . . . . . . . . . . . . .7-29
Compressor Sensor Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-29
UNIT_BALANCE_PRESS Compressor Static Charge Pressure. . . . . . . . . . . . . . . . .7-29
COMP_DISCHRG_TEMP Compressor Discharge Temp . . . . . . . . . . . . . . . . . . . . . .7-30
COMP_LINE_TEMP Compressor Liquid Line Temperature . . . . . . . . . . . . . . . . . . . .7-30
COMP_SUCT_PRESS Compressor Suction Pressure . . . . . . . . . . . . . . . . . . . . . . . .7-30
COMP_DSCHRG_PRESS Compressor Discharge Pressure . . . . . . . . . . . . . . . . . . .7-31
Circuit Configuration Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-31
CLDST_LQD_SETPT Coldest Liquid Temperature Set Point . . . . . . . . . . . . . . . . . . .7-31
SETPOINT_RELAY Setpoint Relay Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-32
EXT_VAC_CONTACT External Vacuum Device Contact Closure Monitor . . . . . . . . .7-33
DEFR_SETPT Defrost Complete Set Point. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-34
EXT_TC_ENABLE Enable external thermocouple . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-34
EXT_TC_ALARM External thermocouple alarm. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-35
Circuit Operational State Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-36
Brooks Automation
214072 Revision B vii
Contents Polycold Cryochiller
Installation and Operation Manual
OPERATING_MODE_DEF_COOL Cool operating mode default state . . . . . . . . . . 7-36
OPERATING_MODE_DEF_DEFROST Defrost operating mode default state . . . . . . 7-36
OPERATING_MODE Current Operating Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37
Circuit Sensor Readings Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-37
CIRCUIT_VALVE_STATE Valve Open/Closed State of a Circuit's valve . . . . . . . . . . 7-37
CIRC_INLT_TEMP Circuit Inlet Temperature. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38
CIRC_OTLT_TEMP Circuit Outlet Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-38
CIRC_FEED_TEMP Circuit Feed Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39
CIRC_RTN_TEMP Circuit Return Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-39
CIRC_PROC_CTL_TEMP Circuit Process Control Temperature . . . . . . . . . . . . . . . 7-40
Configuration
About System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
Power Management - Cylinder Unloading . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
Power Management in Standby Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
Power Management in Cool Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
Mode Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Standby . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Cool Mode Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Defrost Mode Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Alternate Thermocouple Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
External Vacuum Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
Set Point Relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
Remote Control Methods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
Preventive Maintenance
Preventive Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
Preventive Maintenance Schedules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
Troubleshooting
Troubleshooting Techniques . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
Define the Problem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
Contacting Authorized Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
Troubleshooting Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
Fault Reporting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
HMI and Observed Errors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
Power Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
Communication Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
Compressor Motor Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
Fan Fault Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Pressure Related Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
Temperature Related Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-7
Performance Related Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9
Date or Time Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-9
Brooks Automation
viii 214072 Revision B
Polycold Cryochiller Contents
Installation and Operation Manual
Remote Monitor Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-10
Bit Mask Value Listing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10-10
Tools and Parts
Tools and Fixtures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-1
Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Parts Shipped with Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Maintenance Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Optional Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-3
Appendices
Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-1
Appendix A: Contact Brooks Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-1
Customer Support Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-2
Appendix B: Lifting Rings (Optional). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-3
Appendix C: CB2 Excepted Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-5
Appendix D: Remote EMO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-6
EMO Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-6
EMO Remote Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-6
Remote EMO Connector Wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-7
Appendix E: Water Vapor Cryotrapping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-8
Cryosurface Pumping Efficiency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-8
Appendix F: Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-10
About Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-10
Appendix G: Zero Line Loss Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-13
Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-13
Appendix H: Rapid Balance Pressure Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-19
Static Pressure versus Rapid Balance Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-19
Rapid Balance Pressure Check Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-19
Appendix I: Disconnect, Packing, and Shipping Instructions. . . . . . . . . . . . . . . . . . . . . . . . . .12-20
Packing Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-21
Appendix J: Material Safety Data Sheets - MSDS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-21
MSDS - Refrigerant Gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-22
MSDS - POE Solest Oil LT-32 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-29
Glossary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1
Brooks Automation
214072 Revision B ix
Contents Polycold Cryochiller
Installation and Operation Manual
This Page Intentionally Left Blank
Brooks Automation
x 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
1 Introduction
Using This Manual
The Polycold Cryochiller contains high voltages and other hazards
which, if not properly handled, may result in death or serious injury.
Only trained and qualified personnel should work on the Polycold
Cryochiller.
Do not perform installation, operation, or maintenance procedures
on the Polycold Cryochiller unless you have read and understand
the information in the Safety chapter of this manual.
This product is intended for use by industrial customers and should be serviced only by Brooks or
Brooks trained representatives. The manuals and related materials are provided in English at no charge
and are intended for use by experienced technicians. It is the responsibility of the user to obtain and
assure the accuracy of any needed translations of manuals. If you require assistance please contact
Brooks service department. Contact information can be found at: www.brooks.com.
This manual provides information for a wide variety of Polycold Cryochiller configurations. Some of the
features that are shown are optional and may not be installed on your system. Refer to Brooks Automa-
tion sales literature to determine what items are optional.
There may be additional installation, maintenance, troubleshooting, and repair information in other
manuals which may affect the settings or operation of the Polycold Cryochiller. When integrated in a
system, the Polycold Cryochiller may be set to system specifications. Before adjusting or changing set-
tings, consult the appropriate system documentation.
All documents that are referenced in this manual refer to documents of the latest revision as of the pub-
lication date of this manual. Brooks Automation Technical Support issues Technical Support Bulletins
(TSBs) to notify the owners of record of any field retrofits.
Pressures are stated as gauge (i.e., psig) not absolute. Psig is pounds per square inch gauge and kPa
is Kilopascals gauge. kPa = 6.895 x Psig. bar = Psig ÷ 14.5
Brooks Automation
214072 Revision B 1-1
Introduction Polycold Cryochiller
System Illustration Installation and Operation Manual
System Illustration
Circuit 1
Lift Rings (optional) Refrigerant
Lines
Feed (left)
Return (right)
EMO Switch
(optional)
(optional)
Circuit 2
HMI Refrigerant
Display Lines
and Feed (left)
Keypad Return (right)
Communications
Panel
Circuit
Breakers
Power In
Water In / Out
Figure 1-1: Illustration of MaxCool Cryochiller
Brooks Automation
1-2 214072 Revision B
Polycold Cryochiller Introduction
Installation and Operation Manual System Summary
System Summary
Definitions:
Refrigeration Unit: The device that compresses, cools, and pumps the refrigerant through the refrig-
erant line and cryosurface.
Refrigerant Line: Typically an insulated bundle that contains feed and return hoses that transfer refrig-
erant between the Polycold Cryochiller refrigeration unit and the cryosurface.
Cryosurface: The cold element that is installed in the customer's vacuum chamber. Cryosurfaces are
usually shaped as a coil to capture water vapor or as a baffle to capture backstreaming oil.
About the Polycold MaxCool Cryochiller
The MaxCool Cryochiller is a closed loop cryogenic refrigeration system with many applications. It is
frequently used to capture water vapor and other condensable substances by freezing them onto a cold
surface such as a cryocoil (Meissner trap) or chevron baffle. This Cryochiller is also used to cool and
heat objects such as electrostatic chucks used in semiconductor wafer processing.
The Polycold MaxCool Cryochiller consists of a refrigeration unit, refrigerant line set, and a cryosurface
with cryogenic feedthrough. The refrigeration unit can pump cold or hot refrigerant in a continuous loop
through the refrigerant lines and cryosurface. The innovative cryogenic refrigeration process in the
Polycold Cryochiller uses patented refrigerant mixtures and patented control processes developed by
Brooks Automation Polycold Systems.
Some configurations include advanced controls that reduce power consumption. Models are available
that control two independent circuits, providing greater design flexibility for vacuum systems such as
two cryocoils or one cryocoil and one cryobaffle. All models include both local and remote operation.
Optional features can be selected to add advanced performance and remote communications features
that enhance productivity and add convenience. Some of these optional features include:
• Additional sound attenuation
• Compliance with SEMI S2 and F-47 standards
• Process heating
• Ethernet, Profibus, DeviceNet, or 24V DI/DO remote interfaces
Brooks Automation
214072 Revision B 1-3
Introduction Polycold Cryochiller
Theory of Operation Installation and Operation Manual
Polycold Cryochiller Versions
The Polycold Cryochiller is manufactured in different models and configurations to fit a variety of appli-
cations. Table 1-1 shows the currently manufactured Cryochiller model numbers and their description.
Contact Brooks Sales for optional configurations.
Table 1-1: Polycold Cryochiller Models and Descriptions
Configuration Description
MaxCool 4000H Optimized for maximum water vapor cryopumping speed and maxi-
mum vacuum process throughput (formerly XC-8800 HC)
MaxCool 2500L Optimized for minimum water vapor partial pressure and maximum
vacuum process quality (formerly XC-8800 MT)
Theory of Operation
The Polycold MaxCool Cryochiller employs a patented non-flammable HCFC-free refrigerant mixture in
an auto-refrigerating cycle (ARC) cooling process to provide operating temperatures from -80°C to
-150°C.
This process, which is thermodynamically more efficient than a multistage cascade process, combines
all of its refrigerants into a single multi-component stream circulated by one compressor.
The advantages of the mixed refrigerant ARC cooling process are reduced system complexity, more
favorable operating conditions, lower maintenance, and greater reliability.
Figure 1-2: Refrigeration Flow Diagram
Brooks Automation
1-4 214072 Revision B
Polycold Cryochiller Introduction
Installation and Operation Manual Theory of Operation
Water Vapor Capturing in High Vacuum Systems
Water vapor can be up to 95% of the residual gas in high-vacuum chambers and is typically the most
reactive contaminant in such systems. The exceptionally high water vapor pumping speed provided by
the Cryochiller greatly increases product throughput and produces higher film quality, better adhesion,
and more reproducible deposition.
When capturing water vapor in high vacuum systems, the cryosurface is normally a coil. A rapid inter-
change between the cold and defrost states frees up valuable cycle time and increases product
throughput.
As the vacuum chamber begins the pump down sequence, the pre-programmed Polycold Cryochiller
can exit the Standby mode and quickly cool the cryocoil, providing much higher pumping speeds than
traditional vacuum pumps and significantly reducing chamber pump down time.
During the deposition process, the Polycold Cryochiller remains in the Cool mode to greatly reduce
water vapor contamination and increase product yield. During chamber venting, the Polycold Cryo-
chiller quickly heats the cryocoil to defrost and sublime the captured water vapor.
In this application, the cryocoil can be mounted directly in the vacuum chamber so conductance is not
limited by ports, manifolds, valves and baffles. The cryocoil is easy to install and can be adapted to fit
any system. It does not need a high vacuum valve. See Figure 1-3 on page 1-6.
Brooks Automation
214072 Revision B 1-5
Introduction Polycold Cryochiller
Theory of Operation Installation and Operation Manual
A
B
Figure 1-3: Polycold Cryochiller Used for Water Vapor Capture
Legend:
A. Polycold Cryochiller Refrigeration Unit
B. Refrigerant line
C. Cryogenic feedthrough
D. Vacuum chamber wall
E. Cryosurface
Minimizing Oil Backstreaming From Diffusion Pumps
Backstreaming can occur any time oil diffusion pumps are used in high vacuum systems. Hot oil vapor
from a diffusion pump can migrate into the vacuum chamber and contaminate the system.
An optically-opaque cryogenic chevron baffle that is cooled by the Polycold Cryochiller is placed over
the diffusion pump to greatly reduce oil contamination due to backstreaming. This baffle also provides
additional water vapor pumping speed to the vacuum tool. This greatly improves vacuum system clean-
liness and leads to greater product quality and yield. Quick cooling and defrosting is not typically
required for such an application because the cold cryobaffle remains isolated behind a high vacuum
valve whenever the chamber is vented to atmosphere. See Figure 1-4 on page 1-7.
Optically transparent cryobaffles are also available from Brooks Automation Polycold. These baffles are
appropriate for increased water vapor pumping speed in turbomolecular pump applications.
Brooks Automation
1-6 214072 Revision B
Polycold Cryochiller Introduction
Installation and Operation Manual Theory of Operation
B C
Figure 1-4: Polycold Cryochiller Used with Optically Opaque Baffle to Minimize Oil Backstreaming
Legend:
A. Polycold Cryochiller Refrigeration Unit
B. Refrigerant line
C. High vacuum valve
D. Cryobaffle
E. Oil diffusion pump
Heat Removal
The Polycold MaxCool Cryochiller is also used in applications requiring high power cooling to temper-
ature as low as -150°C.
There are a wide variety of heat removal applications, but two notable examples include the cooling of
external heat exchangers that chill a gas or a liquid and the cooling of refrigerant-cooled chucks that
control the temperature of semiconductor wafers and other substrates during a manufacturing process
in vacuum. See Figure 1-5.
Brooks Automation
214072 Revision B 1-7
Introduction Polycold Cryochiller
Polycold Cryochiller System Components Installation and Operation Manual
B C
D E
Figure 1-5: Polycold Cryochiller used for Heat Removal
Legend:
A. Polycold Cryochiller Refrigeration Unit
B. Refrigerant line
C. Feedthrough
D. Chamber Wall
E. Cool Plate
Polycold Cryochiller System Components
Polycold Cryochiller components are shown along with all optional components. Optional components
must be selected when the system is ordered.
Polycold Cryochiller Component List
See figures 1-2, 1-3, and 1-4.
1. Human Machine Interface - HMI - Area
2. Fan Filter Access
Brooks Automation
1-8 214072 Revision B
Polycold Cryochiller Introduction
Installation and Operation Manual Polycold Cryochiller System Components
3. High Voltage Box Cover and Circuit Breaker Access
4. Seismic Anchor Points (4 Places)
5. Warm Valves (for recharging and service only)
6. Compressor Shipping Hold Down Nuts (4 Places)
7. Removable Kick Plate for Pallet Jack Access
8. Water Supply and Return Connections
9. Casters (4 Places) (Optional) (not shown)
10. Power Inlet
11. Suction Service Valve
12. Compressor
13. Water Cooled Condenser
14. Discharge / Recharge Valve
15. Cold Valve Box
16. Feed / Return Lines (Optional Second Circuit Shown)
17. Lifting Rings (4 Places) (Optional)
18. Remote Interface Terminals
19. Thermocouple Access Panel
20. Discharge Service Valve
21. Compressor
22. Expansion Tank (s)
23. Pressure Gauge
24. Profibus Connection (Optional)
25. Thermocouple Terminal Block
Brooks Automation
214072 Revision B 1-9
Introduction Polycold Cryochiller
Polycold Cryochiller System Components Installation and Operation Manual
Polycold Cryochiller Views
18
17
19
16
2
15
14
13
12
11
10
5 6 7 8
Figure 1-6: Polycold MaxCool Cryochiller System Exploded View
Brooks Automation
1-10 214072 Revision B
Polycold Cryochiller Introduction
Installation and Operation Manual Polycold Cryochiller System Components
23
20
22
21
Figure 1-7: Polycold MaxCool Cryochiller Compressor View
Brooks Automation
214072 Revision B 1-11
Introduction Polycold Cryochiller
Polycold Cryochiller System Components Installation and Operation Manual
24
25
Figure 1-8: Low Voltage Section
Limitations
This product is intended for use by industrial customers and should be serviced only by Brooks or
Brooks trained representatives.
The Installation and Operation manual and related materials are provided in English at no charge and
are intended for use by experienced technicians. It is the responsibility of the user to obtain and assure
the accuracy of any needed translations of manuals.
If you require assistance, please contact Brooks service department. Contact information can be found
at www.brooks.com.
Brooks Automation
1-12 214072 Revision B
Polycold Cryochiller Introduction
Installation and Operation Manual Regulatory Compliance
Regulatory Compliance
Declaration of Conformity (DOC)
The Polycold Cryochiller meets the requirements of the European Union’s Machinery Directive
(2006/42/EC), the Low Voltage Directive (2006/95/EC), and the EMC Directive (2004/108/EC).
Brooks Automation has issued a Declaration of Conformity for units that are used independently from
a system, and the Polycold Cryochiller has a CE mark affixed.
Brooks Automation
214072 Revision B 1-13
Introduction Polycold Cryochiller
Regulatory Compliance Installation and Operation Manual
Declaration of Incorporation (DOI)
When the Polycold Cryochiller is supplied for integration into a system, the final integrator is overall
responsible for conformity to the applicable directives and safety systems. When the system has the CE
mark, the Cryochiller becomes an incorporated component and the attached Declaration of Incorpora-
tion applies.
Declaration of Incorporation Document #:
of Partly Completed Machinery Rev
For the European Union
Description: Polycold® Cryogenic Refrigeration Unit,
Function: Closed loop cryogenic refrigeration water vapor recovery
system
Models: XC8800 MT, XC8800 HC, MaxCool 4000H, MaxCool 2500L.
Part Number:
Serial Number:
Business name and full address of the manufacturer of the partly completed machinery:
Brooks Automation Inc., 15 Elizabeth Drive, Chelmsford, MA, USA 01824
Name and address of the person, established in the Community, authorized to compile the relevant technical documentation:
Brooks Automation (Germany) GmbH, Ernst-Ruska-Ring 11, 07745 Jena, Germany
The manufacturer declares:
x That the following essential requirements of Machinery Directive 2006/42/EC are applied and
fulfilled and that the relevant technical documentation is compiled in accordance with part B of
Annex VII:
Annex I sections: 1.1.2, 1.1.3, 1.1.5, 1.1.6, 1.2.1, 1.2.2, 1.2.3, 1.2.4, 1.2.5, 1.2.6, 1.3.1, 1.3.2,
1.3.4, 1.5.1, 1.5.2, 1.5.3, 1.5.4, 1.5.5, 1.5.6, 1.5.7, 1.5.8, 1.5.9, 1.5.11, 1.6.1, 1.6.3, 1.6.4,
1.7.1, 1.7.2, 1.7.3
o EN 60204-1
x That the safety objectives set out in directive 2006/95/EC (LVD) have been applied to the partly
completed machinery.
x That this partly completed machinery conforms with the provisions of Electromagnetic
Compatibility Directive 2004/108/EC.
o EN 61000-6-4
o EN 61000-6-2
x That this partly completed machinery fulfills all the relevant provisions of Directive 97/23/EC
(Pressure Equipment Directive).
o PED Category: II
o Conformity Assessment: Module A1
o Notified Body: TÜV SÜD Industrie Service GMBH (NB #0036)
WestendStrasse, 80686, Munchen, Germany
o Standards: EN 378, EN 60204-1, EN ISO 12100-1, -2
x We will transmit, in response to a reasoned request by a national authority, relevant information
on the partly completed machinery, on paper or in electronic form, without prejudice to our
intellectual property rights.
The partly completed machinery must not be put into service until the final machinery into which it is
incorporated has been declared in conformity with the provisions of Directive 2006/42/EC
Signature
Name of signatory date of declaration
Title of signatory place of declaration
Brooks Automation
1-14 214072 Revision B
Disclosure Table, EIP, Polycold Cryochiller Part Number 192189 Revision B
Brooks Automation
214072 Revision B
Polycold Cryochiller
Control of Pollution Caused by Electronic Information Products, China
Disclosure Table, EIP
Disclosure Table
February 5, 2013
Installation and Operation Manual
1 Ქኂ‛德ᚗర⚛ฬ⒓㊂㪖幕ᩰᑼ
Ქኂ‛德ᚗర⚛
ચ杻 ᄙ䅃勣⧶ ᄙ䅃ੑ⧶搩
捷ↅ⚜䱿 Polycold Cryochiller 杔 ᳮ 柘
Mercury Hexavalent Polybrominated Polybrominated
Lead Cadmium
(Hg) Chromium Biphenyls Diphenyl Ethers
(Pb) (Cd)
(Cr(VI)) (PBB) (PBDE)
䟄㘶乀 ELECTRICAL ASSY X X X O O O
㗱䍼⣷♙梏桷 HEAT EXCHANGER/VALVE ASSY X O O O O O
☚冸㧉⸳ COMPRESSOR COMPARTMENT ASSY X O O O O O
抩帾♙拴㘶㘴♲ CUSTOMER COMMUNICATION ASSY X X X O O O
▔ⵝ♙棓ↅ PACKAGING/ACCESSORY ASSY X O O O O O
Ⓟ⑆ⓑ REFRIGERANT O O O O O O
O:␜年Ქኂ‛德年ㇱઙᚲဋ൪᧚ᢱਛ⊛㊂ဋ SJ/T11363-2006 屓ቯ⊛㒢㊂ⷐ᳞એਅޕ
X:␜年Ქኂ‛德⥋ዋ年ㇱઙ⊛ᨱ৻ဋ൪᧚ᢱਛ⊛㊂ SJ/T11363-2006 屓ቯ⊛㒢㊂ⷐ᳞ޕ
એᚲㇱઙਛ⊛Ქኂ‛德年ㇱઙᚲဋ൪᧚ᢱਛ⊛㊂ဋޝ䟄ሶାᕷℶຠ㻰ᨴប㊀ὐ▤ℂ⋡
╙৻ᛕ ޞ屓ቯ⊛㒢㊂ⷐ᳞એਅޕ
All assemblies listed above comply with China RoHS temporarily allowed exemptions limit from The Key Catalog for Controlling Pollution by Electronic Information
Products (Batch 1)
Brooks Automation
15 Elizabeth Drive
Chelmsford, MA 01824 USA
REVISION HISTORY:
Revision A: 5/15/2012 Initial Release per EC # 57074 L. Case
Revision B: 2/5/2013 Updated product names per EC# 63451 L. Case
Form #: FM-HW-SAC-018 Rev A DCO Q00724
1-15
Introduction
Regulatory Compliance
Introduction Polycold Cryochiller
Regulatory Compliance Installation and Operation Manual
Limited Warranty
Limited Warranty
Polycold® Systems Cooling Products, CryoTiger®,AquaTrap®, Polycold Compact Cooler, Repair
+ ;]!Z Z+^ ++ ^@;+Z + ; ^
@+@@Z_`0D[&RRO'&''{|+} Z_~
~|F\UR+ Z_|& ^ "&@ + ;@+ _|;++ ZZ Z ; \ Z} ;@;+Z_} “Pro
ducts”|; @ !
+ _ ? @ Z} } @ Z| ;\ ; +Z Z;
Z} @; Z
+ } @ ;ZZ } &\ "\ ; Z} @ Z" {+ _Z |
&} @ !
+ ;;+Z Z ;} +@ @Z @ + ; @ @ ;\ZZ+
Z Z Z@Z \ +}^ Z; <@ Z ZZ!
+ Z@
; ;Z Z + \Z +} + ZZZ
} ; \ Z} ;;+Z; <+}^ ;+Z + ; ? +; ;+
Z ;parts and materials.
Table A
Product New Product Repair Service
Warranty Warranty
Cryotiger® Products and Systems 15 Months 12 Months N/A
AquaTrap® Products and Systems
Polycold® Compact Cooler (PCC)
Cryogenic cooling products, including: 24 Months 12 Months 12 months
Water vapor cryopumps (XC, PFC, PCT,
FLC, FI), chillers (PGC, PGCL), cryocoolers (P),
and accessories
!">!& >>>!>&"&{!""&{>!>`>!!{{>{& >!>&& &!
!>{>! >!!>`>!!{>&{'{>"!"""&!>{'{"&{!{" &"&"! >>&!&{& &>
>'">~"!"&""&{>! !">!""&>!>&{~& >> "&"{{&
' &!& >{! {&"{{&'{&>!!'""&{ " !> !>>!>&{~{'{~>-
>&'{&>>& ">&{~ &! BROOKS DISCLAIMS ANY WARRANTY WITH RESPECT TO PRODUCTS MODIFIED
WITHOUT BROOKS’ WRITTEN CONSENT, REPAIRS MADE OUTSIDE OF OUR FACTORY, PRODUCTS RENDERED DEFECTIVE
BY CUSTOMER MISUSE, NEGLIGENCE, CORROSIVE ATMOSPHERES, ATTACK BY FREE CHEMICALS WITHIN THE SYSTEM,
ACCIDENT, DAMAGE BY CUSTOMER OR CUSTOMER’S AGENT, OPERATION CONTRARY TO OUR RECOMMENDATION, IF THE
SERIAL NUMBER HAS BEEN ALTERED, DEFACED OR REMOVED, THE USE OF SERVICE REPLACEMENT REFRIGERANTS FROM
ANY THIRD PARTY NOT LICENSED BY BROOKS, OR THE PRODUCT IS OTHERWISE COMPROMISED BY USE OF UNAUTHOR-
IZED PARTS OR SERVICE, ALL AS DETERMINED BY BROOKS IN ITS SOLE DISCRETION.
{>>&{ !&>>>&{&>&{!>{">'{{>&!>{"{{>&" {-
&{>!> >&{"""~>!'""& >{ {~{&
&{{&"&{>~{~>>!&{&{"{{&
&
>{!>"{!{~"&"&{>'"" !>
"&!>>{ {~{&
&{{&"&{?&{>
!&!"&"!!""~>&"!!{"&>> {>&>"">{!&""&{!&!> >>&
!&!!&'{&!>>{'!
"!>>"{!>'&
>!!{{{&'!
""~>!">>{'
&
>{{&>>>{>!'>"{>">>&'"{'&
>{>!!>&{" !> &
{!"{>'{"{{&
>!&"&>{&
>!{"{{& >"!&"& &>"&">&"{{~&{{ &
"{"{{&{ {~ &'""~>&&
>
>"&
{'>'">!
&} <+ Z
; Z\ +} \ } @ @ + } + ^@Z;+Z; ^} -
@ ;} Z ; Z+ ZZ} @@ ;><Z_{+ Z|Z+ Z Z +
Z
+ Z} <+ ;} @ ;\+Z Z} ;+!
+ ^
^ Z Z+}+ Z@ +
}
} + } } ++} Z Z Z Z@ +} ;+Z } Z\ @
+ @;Z Z } ;Z; Z+
^; + >
+ ++; +
Z} @Z}
\ ; ;
; ZZ; ^ } } @ ;Z@ + ;\
Z; ZZZ } }
@ ZZZ } \ ^ Z \ Z + + }} Z } ;+Z
! "
#
$
%& '
!
! @ \ =%==
+!?
>
Polycold® is a registered trademark of Brooks Automation, Inc.
! " $$ $% $& ' * + ;'<$$ $% =
>? @ Z Z[\Z + \Z +
Brooks Automation
1-16 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
2 Safety
Failure to review the Safety chapter and follow the safety warnings
can result in death or serious injury.
• Do not perform installation, operation, or maintenance proce-
dures until you have read and understand the safety information.
• Follow all applicable facility safety codes
• Read and understand each procedure before performing it.
If additional safety related upgrades or newly identified hazards associated with the Polycold Cryo-
chiller are identified, Brooks Automation Technical Support notifies the owner of record with a Technical
Support Bulletin (TSB).
Explanation of Hazard Alerts
This manual and this product use industry standard hazard alerts to notify the user about personal or
equipment safety hazards. Hazard alerts contain Safety Text, Safety Icons, and Signal Words and
Color.
Safety Text
Hazard alert text follows a standard, fixed-order, three-part format.
• Identify the hazard,
• State the consequences if the hazard is not avoided,
• State how to avoid the hazard.
Safety Icons
• Hazard alerts contain Safety Icons that graphically identify the hazard.
• The safety icons in this manual conform to ISO 3864 and ANSI Z535 standards.
Brooks Automation
214072 Revision B 2-1
Safety Polycold Cryochiller
Explanation of Hazard Alerts Installation and Operation Manual
Signal Words and Color
Signal Words inform of the level of hazard.
Danger indicates a hazardous situation which, if not avoided, will
result in death or serious injury.
Danger signal word is white on a red background with an iconic
exclamation point inside a yellow triangle with black border.
Warning indicates a hazardous situation which, if not avoided, could
result in death or serious injury.
Warning signal word is black on an orange background with an iconic
exclamation point inside a yellow triangle with black border.
Caution indicates a hazardous situation or unsafe practice which, if
not avoided, may result in minor or moderate personal injury.
Caution signal word is black on a yellow background with an iconic
exclamation point inside a yellow triangle with black border.
Indicates a situation or unsafe practice which, if not avoided, may
result in equipment damage.
Notice signal word is white on blue background with no icon.
Alert Example
The following is an example of a WARNING hazard alert.
General Alert Icon:
Hazard Symbols) Meaning Signal Word
Refer to the Manual
Type of Hazard
ELECTRICAL SHOCK HAZARD
Contact with electrical power can cause death or serious injury. Cause and Severity
of Hazard
To avoid electrical shock, disconnect the power before trouble-
shooting the electrical components. How to Avoid
the Hazard
Figure 2-1: Components of a Safety Alert
Use of Notes
This manual uses notes to make the reader aware of additional information. Information in notes is not
related to human or equipment safety. A note does not use icons. The following is an example of a Note.
NOTE: Save all shipping materials for future use. If the Polycold Cryochiller is shipped, the original
shipping crate must be used.
Brooks Automation
2-2 214072 Revision B
Polycold Cryochiller Safety
Installation and Operation Manual Explanation of Hazard Alerts
General Guidelines
Unauthorized Service
Operation or service by untrained or unauthorized personnel may
result in personal harm or damage to equipment.
• Only qualified personnel who have received certified training and
have the proper qualifications for their jobs are allowed to trans-
port, assemble, operate, or maintain the Product.
• Only Brooks parts are authorized to be used when configuring or
repairing this system.
Proper Operation
Improper use of the Polycold Cryochiller may cause personal
injury.
• Do not operate the Polycold Cryochiller before it is properly
installed.
• Do not modify connectors or cables.
• Do not operate the unit without all guards and safety devices in
place.
• Do not install or operate the Polycold Cryochiller if it has been
dropped, damaged, or is malfunctioning.
• Do not use the Polycold Cryochiller for any purpose other than
as a cryochiller or damage to the Cryochiller or the equipment to
which it is connected may occur.
Seismic Restraint
The use of the Polycold Cryochiller in an earthquake prone envi-
ronment may cause equipment damage or personal harm.
• The user is responsible for determining whether the product is
used in an earthquake prone environment
• The user is responsible for providing appropriate seismic
restraint in accordance with local regulations.
Brooks Automation
214072 Revision B 2-3
Safety Polycold Cryochiller
Safety Labels and Safety Label Identification Installation and Operation Manual
Safety Labels and Safety Label Identification
Safety labels are placed on the Polycold Cryochiller to identify hazards. Identification labels provide
information about the product. This section describes each label and identifies its location.
NOTICE
Do not change or remove the safety labels or equipment identification labels.
Label Identification and Location
Table 2-1 lists the labels that are affixed to the Polycold Cryochiller. These labels alert personnel to haz-
ards on or within the product and provide information about the product.
Figure 2-2 shows the location of each label. To replace a lost or damaged label call Brooks Automation
Technical Support.
Table 2-1: Labels Used on the Polycold Cryochiller
Hazard: Hazardous Voltage
Part Number: 407110-00
Qty: 2
Location: (1) On inside and (1) on outside of inner control
unit cover below circuit breaker view port.
Possible injuries: Electrical Shock or burn
How to avoid the hazard: Turn off power and lock out
before servicing.
Hazard: Heavy Object
Part Number: 407112-00
Qty: 1
Location: On compressor body
Possible injuries: Muscle strain or back injury
How to avoid the hazard: Use lifting aids and proper lifting
techniques
Brooks Automation
2-4 214072 Revision B
Polycold Cryochiller Safety
Installation and Operation Manual Safety Labels and Safety Label Identification
Table 2-1: Labels Used on the Polycold Cryochiller
Hazard: Tip (On units with Caster option installed)
Part Number: 184193
Qty: 2
Location: Front and back lower panels. Only on units with
caster option
Possible injuries: Crush
How to avoid the hazard:
Push from below the midpoint of the height.
Lock casters when not moving.
Move only on level surfaces.
Do not use casters to move up and down ramps.
Move at slow speed with slow acceleration/deceleration
Move on smooth floors free of gaps, grooves, or debris
Hazard: Extreme Temperatures (Hot and Cold)
Part Number: 407114-00
Qty: 3
Locations: (1) Lower right front cover.
(1) Lower rear cover,
(1) Inner valve cover panel on inside of unit.
Possible injuries: Burns or Frost Bite injuries
How to avoid the hazard: Do not touch exposed piping.
Allow to come to ambient temperature before servicing.
Unit Nameplate Label, Abbreviated
Part Number: 179924
Qty: 1
Location: Outside Lower Right Front Cover
Contains part number, serial number
Brooks Automation
214072 Revision B 2-5
Safety Polycold Cryochiller
Safety Labels and Safety Label Identification Installation and Operation Manual
Table 2-1: Labels Used on the Polycold Cryochiller
Nameplate Label
Part Number: 407168-00 (left or top section)
Qty: 1 (2 label set)
Location: Inside on lower left frame of compressor area
Contains part number, serial number, and specification
information.
Brooks Automation
2-6 214072 Revision B
Polycold Cryochiller Safety
Installation and Operation Manual Safety Labels and Safety Label Identification
Table 2-1: Labels Used on the Polycold Cryochiller
Nameplate Label
Part Number: 407168-00 (right or bottom section)
Qty: 1 (2 label set)
Location: Inside on lower left frame of compressor area
Contains specification information
Brooks Automation
214072 Revision B 2-7
Safety Polycold Cryochiller
Safety Labels and Safety Label Identification Installation and Operation Manual
407114-00
407110-00
407112-00
184193
407168
407114-00
Figure 2-2: Locations of Labels on the front side of the Polycold Cryochiller
Brooks Automation
2-8 214072 Revision B
Polycold Cryochiller Safety
Installation and Operation Manual Safety and Operational Interlocks
184193
407114-00
Figure 2-3: Locations of Labels on the back side of the Polycold Cryochiller
Safety and Operational Interlocks
Safety interlocks protect personal safety. Operational interlocks protect the Polycold Cryochiller. Addi-
tional interlocks may be added to the Cryochiller by the user. For additional information, see Compres-
sor Safety Chain on page 6-7.
The Cryochiller contains the interlocks listed in Table 2-2 and shown in Figure 2-4.
Brooks Automation
214072 Revision B 2-9
Safety Polycold Cryochiller
Safety and Operational Interlocks Installation and Operation Manual
Table 2-2: Interlocks on the Polycold Cryochiller
Interlock Function
Circuit Breakers Protective devices that prevent current overload of the com-
pressor motor or control system.
Circuit breakers require manual reset.
High Voltage Interlock The Lockout/Tagout slide bar must be moved to the lock-
out/tagout position with the primary circuit breaker in the OFF
position in order to remove the cover to the high voltage box
and access the interior of the high voltage assembly.
Over Pressure Relief Valve A pressure relief valve vents refrigerant gas when the refriger-
ant circuit pressure exceeds the set point of the valve.
Causes a controlled-release of excess pressure for the refrig-
erant in a manner that avoids an over pressure event.
Valve closes when pressure is reduced to the valve set point.
Compressor Motor Thermo- Detects when the temperature of the compressor on the Poly-
stat cold Cryochiller exceeds a safe temperature and shuts off
power to the compressor motor.
The thermostat automatically resets when the temperature of
the compressor motor thermostat falls to a safe level.
Hazardous Voltage
Overriding interlocks can cause electrical hazards. Direct contact
with hazardous voltage will cause death or serious injury.
• Do not defeat, modify, or disable any of the unit’s safety inter-
locks.
NOTICE
The user may choose to add an Emergency Off (EMO) circuit to the Polycold
Cryochiller and is accountable for that EMO circuit.
Brooks Automation
2-10 214072 Revision B
Polycold Cryochiller Safety
Installation and Operation Manual Safety and Operational Interlocks
Main
Circuit
Breaker
Lockout/Tagout
Slide Bar
Provides Interlock for
High Voltage Cover
Over Pressure
Relief Valve
Compressor
Motor Thermostat
(internal to compressor)
Figure 2-4: Location of Safety Interlocks on the Polycold Cryochiller
Lockout / Tagout
Working with energized equipment may cause electrical shock or
burn and may result in death or serious harm.
• All energy must be removed from the equipment per the sys-
tem’s or the facility’s Lockout/Tagout procedure before servicing.
• If local procedures are not available, follow the procedure for
Lockout/Tagout in OSHA Standard 29CFR 1910.147.
Brooks Automation
214072 Revision B 2-11
Safety Polycold Cryochiller
Mechanical Hazards Installation and Operation Manual
Cryochiller Lockout/Tagout
A slide bar that is attached to the high voltage box cover is provided as the Lockout/Tagout device.
When the high voltage box cover is removed, the Lockout/Tagout device is also removed, and Lock-
out/Tagout procedures must be performed on the input power to the Polycold Cryochiller.
To use the Lockout/Tagout device:
1. Turn off the main circuit breaker.
2. Slide the Lockout/Tagout bar across the circuit breaker to prohibit the circuit breaker
from being turned on.
3. Apply the Lockout/Tagout device to hold the slide bar in place.
To remove the high voltage box cover:
1. Apply Lockout/Tagout procedures at the source of the input power.
2. Turn off the main circuit breaker and move the Lockout/Tagout slide bar to the Lock-
out/Tagout position.
3. Remove the high voltage box cover.
Mechanical Hazards
Tip Hazard
This unit has a high center of gravity and may tip when moved
improperly or when left stationary with casters unlocked which may
cause death or personal injury.
To avoid this hazard, follow these precautions:
• Read the user’s manual before moving.
• For smooth hard floors, move by rolling slowly and avoid rapid
acceleration and deceleration.
• Move only on smooth level surfaces that are free of gaps,
grooves, or debris.
• For uneven or soft floors, move using optional hoist rings with
overhead lift
• Do not use casters to move up and down ramps.
• Apply force below center line when moving by hand.
• Lock two front casters when not moving.
Brooks Automation
2-12 214072 Revision B
Polycold Cryochiller Safety
Installation and Operation Manual Mechanical Hazards
Lifting Ring Hazard
This unit is equipped with lift rings that when used improperly may
fail and cause death or serious personal injury.
To avoid this hazard, follow these precautions:
• Lift with 4 straps that each have a minimum strength as required
by local regulations but not less than the weight of the lifted item.
• Length for each strap between the lift ring bolt and the lifting
point must be greater than 736mm (29 inches).
• The angle between the sling strap and horizontal at each lift ring
must be greater than 45°
• Strength of lift device must be greater than 4 times weight of unit
being lifted.
Trip Hazard
Trip hazard which may cause personal injury exists if the facilities
connections such as power and communications cables, gas and
vacuum lines, for the compressor are not properly routed.
• Route facilities connections and communication cables out of
the way where there is no travel and they do not cause trip haz-
ards
Heavy Object
The Polycold Cryochiller weighs a minimum of 533 kg (1175 lb) up
to a maximum of 544 kg (1200 lb).
Failure to take the proper precautions before moving this unit could
result in personal injury.
• Follow appropriate methods for moving heavy equipment.
Brooks Automation
214072 Revision B 2-13
Safety Polycold Cryochiller
Electrical Hazards Installation and Operation Manual
Electrical Hazards
The Brooks Automation Polycold Cryochiller is a hazardous voltage device. It requires a user installed
slow blow circuit breaker that meets, or exceeds, the minimum SCCR rating specified by SEMI S2. See
Electrical on page 3-4.
The proper precautions for operating and servicing electrical equipment must be observed.
Electrical Installation Hazard
Improper electrical connection or improper handling of the power
can cause electrical shock resulting in death or serious injury and
can cause fire and damage to the equipment.
• Ensure that a proper ground is provided from the power connec-
tion and confirm the equipment is properly grounded.
• Use proper power and proper electrical connections in accor-
dance with the appropriate electrical code.
• Do not allow cables to be walked on or become wet.
• Turn off power before connecting or disconnecting cables.
• Allow only a qualified electrical installer to perform electrical
work on the Polycold Cryochiller in accordance with local codes.
Electrical Hazard
Contact with energized equipment can cause electric shock and
result in death or serious injury.
• All electrical energy supplied to the Polycold Cryochiller must be
disconnected from the system according to the facility’s lock-
out/tagout procedure before performing service or maintenance.
• Lockout/Tagout device is provided for use when high voltage box
cover is in place.
• Lockout/Tagout must be provided at the input power source if
high voltage box cover is removed,
• Only a qualified electrician or electrical technician is allowed to
open the Polycold Cryochiller and troubleshoot electrical prob-
lems.
Brooks Automation
2-14 214072 Revision B
Polycold Cryochiller Safety
Installation and Operation Manual Thermal Hazards
Thermal Hazards
The condenser and compressor inside the Polycold Cryochiller present thermal hazards.
Extreme Temperature Hazard
Contact with hot or cold surfaces can cause death or serious injury.
from burns or frost bite.
• Do not operate the Polycold Cryochiller without all covers in
place.
• Wait 90 minutes after performing appropriate Lockout/Tagout
procedures before removing covers.
• Allow cryocoil, cold chuck, or cryobaffle to come to +10° C (50°
F).
• Wait until signs of frost have gone before servicing.
• Use appropriate Personal Protective Equipment if handling cold
devices.
• Do not touch any uninsulated part of the refrigerant circuit when
the unit is operating. This includes the:
- Solenoid
- Hand valves
- Uninsulated parts of the refrigerant line
- Uninsulated parts of the feedthrough
- Cryosurface
Cold Thermal Hazard
Moving or repositioning the refrigerant line when cold may result in
crimping of the gas lines and insulation may crack and cause minor
or moderate injury along with hazardous refrigerant discharge.
• Do not attempt to move or position the refrigerant line.
Brooks Automation
214072 Revision B 2-15
Safety Polycold Cryochiller
Chemical Hazards Installation and Operation Manual
Chemical Hazards
The Polycold Cryochiller is supplied with two Overpressure Relief Valves. In the unlikely event that the
relief valves release refrigerant gas, the gas must vent to atmosphere in a well vented area that meets
the minimum room size requirements as specified in ASHRAE-15 and EN-378.
Asphyxiation Hazard
The blend of refrigerant used in the Polycold Cryochiller is non
flammable and non toxic. However, as with any gas, asphyxiation
could occur if concentrated refrigerant gas is inhaled which may
cause death or serious injury.
• Service the Polycold Cryochiller in a well ventilated area as
specified by ASHRAE-15 and EN-378.
Chemical Hazard
Opening the refrigerant circuit or changing valve settings without
following the instructions in this manual could result in release of
refrigerant gas which is considered a green house gas.
• Avoid releasing refrigerant gas to the atmosphere.
• Keep the gas line couplings aligned when making or breaking
coupling connections to prevent leaks due to a sharp bends.
• Review this manual before performing any procedure including
routine operation.
NOTICE
United States and other federal laws require a certified refrigeration technician
(Type 2, High Pressure) perform any procedure that could release refrigerant to
the atmosphere.
This includes:
• Installing the Polycold Cryochiller
• Inspecting procedures
• Disconnecting the refrigerant lines
• Troubleshooting procedures
• Repairing
• Disposing of the unit or charged components
Brooks Automation
2-16 214072 Revision B
Polycold Cryochiller Safety
Installation and Operation Manual High Pressure Gas Hazard
High Pressure Gas Hazard
High Pressure Gas
The use of high pressure gas or compressed air during cleaning
may cause flying debris.
• Wear personal protection equipment such as safety glasses if
using high pressure gas for cleaning,
• Follow safety guidelines for cleaning with high pressure gas as
specified by the facility.
Fire and Explosion Hazard
The Polycold Cryochiller does not have any direct fire or explosion hazard.
Fire Hazard
Cleaning fluids such as isopropyl alcohol may cause fire if used on
hot parts.
• Allow the Polycold Cryochiller to cool before using cleaning flu-
ids.
High Pressure Refrigerant
In the unlikely event that the Polycold Cryochiller develops a refrig-
erant leak inside an enclosed chamber, it is possible that a high
pressure event could occur which may result in equipment damage
or personal injury.
• The vacuum chamber must have a pressure-relief valve to avoid
an over-pressure condition.
Brooks Automation
214072 Revision B 2-17
Safety Polycold Cryochiller
Environmental Information Installation and Operation Manual
Environmental Information
NOTICE
The Polycold Cryochiller contains fluorinated green house gases covered by the
Kyoto Protocol.
Refrigerant Gas Recycling and Disposal
Refrigerant Gas
A qualified refrigeration technician is required to remove the refrig-
erant from the Polycold Cryochiller.
• When working with refrigerant gas, follow all facility and local
regulatory environmental procedures regarding the storage, han-
dling, and disposal of the gases.
• Refer to the refrigerant Material Safety Data Sheets, MSDS.
Hazardous Materials
Ensure the product has been properly decontaminated before performing any service. Follow the facil-
ity’s decontamination procedures.
Follow all facility and local regulatory procedures for the disposal of hazardous materials. If the compo-
nents are charged with refrigerant, refer to the Material Safety Data Sheets, MSDS, for each refrigerant.
Material Safety Data Sheets - MSDS
The Polycold Cryochiller contains refrigerants that are a proprietary mixture of different gasses. The
actual blend may vary depending on the application. All of the blends of refrigerant gases are non-flam-
mable and non-toxic.
A single Material Safety Data Sheet set for the different blends of gasses is located in Appendix J:
Material Safety Data Sheets - MSDS on page 12-21.
The compressor in the Polycold Cryochiller contains lubrication oil which may be considered a hazard-
ous substance. The MSDS for the POE Solest LT-32 oil is included in Appendix J: Material Safety Data
Sheets - MSDS on page 12-21
Brooks Automation
2-18 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
3 Specifications and Site Preparation
Physical Specifications
Table 3-1: Physical Specifications
Parameter MaxCool 4000H MaxCool 2500L
Width - mm (inch) 813 (32) 813 (32)
Depth - mm (inch) 663 (26.1) 663 (26.1)
Height - mm (inch)
1791 (70.5) 1791 (70.5)
(without castors or lifting hooks)
Min. room volume, m3 (ft3) 33.98 (1200) 39.64 (1400)
(per ASHRAE 15 and EN 378-1)
Weight kg (lb) 533 (1175) 544 (1200)
Shipping Weight kg (lb) 567 (1250) 578 (1275)
Cooling Water Connection 3/4 NPT Female 3/4 NPT Female
Max. operating sound level, dB(A) 78 78
Max. operating sound level with sound
69 69
attenuation option dB (A)
NOTE: All units have cold elements that may be decoupled from the refrigerant lines.
NOTE: Maximum angle of inclination for shipping or handling all units is forty-five degrees (45°).
When moving units using pallet jack or optional casters must be moved on level floors only.
NOTE: All specifications are for the standard product configuration. Specifications can vary for
customized configurations
NOTE: Sound measurements were made on each side of the unit at a distance of 1.0m (39 in) and
at a height of 1.6m (63 in). Measurements taken from each side of the unit did not vary sig-
nificantly. Measurements will vary with the acoustics of the environment.
Brooks Automation
214072 Revision B 3-1
Specifications and Site Preparation Polycold Cryochiller
Physical Specifications Installation and Operation Manual
Dimensions
Dimensions are mm (inches) based on a
standard unit.
Center of gravity based on a unit without
casters.
For a unit with casters, increase vertical
dimension by 76.2mm (3 inches)
For a unit with lift hooks folded down, increase
vertical dimension by 34mm (1.34 inches)
Designates Center of Gravity
Figure 3-1: Polycold Cryochiller Refrigeration Unit Dimensions
Brooks Automation
3-2 214072 Revision B
Polycold Cryochiller Specifications and Site Preparation
Installation and Operation Manual Physical Specifications
Site Preparation
The refrigeration unit should be installed in an environment that meets the following conditions:
• Indoors
• Above ground
• Well ventilated area. Room size must meet minimum requirements of ASHRAE-15 and
EN-378. See Installing a Refrigeration Unit to Meet ASHRAE Requirements on page 4-3.
• Room temperature of 4-38° C (40-100° F)
• Relative humidity of 20-80%, non-condensing
The Polycold Cryochiller must remain vertical while operating. The refrigeration unit is not gravity sen-
sitive and may be placed at any elevation relative to the cryosurface.
Access
During operation, the Polycold Cryochiller
requires 51mm (2 inches) of clear area at
the back of the system and 914mm (36
inches) at the front.
See Figure 3-2.
This clearance is required for access to
switches, settings, air circulation, and
safety reasons.
For service and maintenance, it is recom-
mended that the unit is installed with as
much clear service access as the facility
will allow.
Routine service is performed from the
front.
Major compressor service requires a mini-
mum of 36 inches of rear clearance.
Units that are seismic anchored require a
minimum of 914mm (36 inches) of rear
service access.
Units that have the caster option require
51 mm (2 inches) of side clearance for
gripping the unit.
Multiple units may be placed side by side
as long as the rear clearance is provided.
Multiple units placed facing each other Figure 3-2: Polycold Cryochiller Service Access
require 914mm (36 inches) front service Units are mm (inches) (not to scale)
access.
Brooks Automation
214072 Revision B 3-3
Specifications and Site Preparation Polycold Cryochiller
Electrical Installation and Operation Manual
Electrical
Table 3-2: Nominal and Maximum Power
Parameter MaxCool 4000H MaxCool 2500L
19.2 kW 19.2 kW
Power Input at Max Rated Load
@ 4000 watts @ 2500 watts
12.4 kW 13.9 kW
Power Input with Cool and Low Load
@ 0 to 300 watts @ 0 to 300 watts
Standby Power 12 kW 11.4 kW
Table 3-3: For units with Power Management Option Enabled
Parameter MaxCool 4000H MaxCool 2500L
Power Management Cool at 2/3 Max Rated Load 14 kW 14.9 kW
Power Management Cool with No Load 9.2 kW 12.4 kW
Power Management in Standby 10.1 kW 9.9 kW
Electrical Characteristics - MaxCool 4000H and MaxCool 2500L
Table 3-4: MaxCool 4000H and 2500L Cryochiller Electrical Characteristics
Compressor Common Nominal
Transformer
Voltage Voltages Worldwide Voltage Range
Tap Setting
Range (Voltage-Phase-Frequency)
200-3-50
180-222 @ 50 Hz
200-3-50/60 202-3-60
182-229 @ 60 Hz
200-230 VAC 208-3-60
207-230 @ 50 Hz
230-3-60 230-3-60
207-253 @ 60 Hz
380-3-50 380-3-50 342-418 @ 50 Hz
400-3-50
400-3-50 360-440 @ 50 Hz
415-3-50
380-480 VAC
440-3-60
460-3-60 414-506 @ 60 Hz
460-3-60
480-3-60 480-3-60 432-528 @ 60 Hz
575 VAC 575-3-60 575-3-60 518-632 @ 60 Hz
Brooks Automation
3-4 214072 Revision B
Polycold Cryochiller Specifications and Site Preparation
Installation and Operation Manual Electrical
Electrical Protection Requirements - MaxCool 4000H and 2500L
Table 3-5: MaxCool 4000H and 2500L Cryochiller Electrical Protection Requirements
Transformer
Fuse Size Power Input
Tap Setting RLA Amps MCC Amps LRA Amps
Amps kVA
and ID Label
200-3-50/60 55.4 75 160 80 19.2
230-3-50/60 48.3 75 160 80 19.2
35 (see Note 1)
380-3-50 27.2 39 80 17.9
45 (see Note 2)
400-3-50 25.8 39 80 35 17.9
460-3-50/60 25.4 39 80 35 20.2
480-3-60 21.5 39 80 35 17.9
575-3-60 17.9 31.2 64 35 17.8
All voltages are nominal +10%/-10%, unless otherwise stated.
Note 1: 35Amp breaker is allowable for 380-3-50 setting when nominal voltage is 380V +10% / -5%.
Note 2: 45Amp breaker is required for 380-3-50 setting when nominal voltage is 380V +10% / -10%.
Electrical Specification Notes
• The Cryochiller is shipped with transformer tap settings for the voltage specified on the system
label. If voltage is outside of the specified range, the transformer taps must be changed.
• 24 volt transformers on systems capable of 230 to 480 Volt power input may be configured in
the field to the actual voltage. Refer to Change Transformer Tap Settings on page 4-16.
• RLA = Rated Load Amps is the current drawn by the compressor at rated load. It may also be
referred to as the maximum full load amps.
• A Bussman FRS-R dual element, current limiting fuse or equivalent is recommended to protect
the Polycold Cryochiller power circuit.
• Actual protection must comply with local codes.
• “Worst Case low Volts” refers to the lowest amount of voltage available. Power fluctuates by
10%, so the lowest voltage amount would be 90% of the nominal voltage.
• MCC = Maximum Continuous Current of the compressor motor.
• LRA = Locked Rotor Amps. This refers to the current that the compressor motor uses when the
compressor is not able to rotate because the rotors are locked.
• Gould TRS, Littelfuse FLSR, MCA, minimum circuit ampacity, should be at least 125% RLA.
This value is to assist the site electrician in determining the dimensions of the electrical system.
• Compressors are provided with over current and over temperature protection which comply
with UL and NEC definitions of inherent thermal protection.
kVA = (Test Volts) X (RLA) X (1.732/1000)
kW = (kVA) X Power Factor (Power Factor is 90% in this case.)
Brooks Automation
214072 Revision B 3-5
Specifications and Site Preparation Polycold Cryochiller
Cooling Water Installation and Operation Manual
Cooling Water
The cooling water supplied to the Cryochiller must meet temperature, flow, and purity requirements.
• Cooling water temperature must be between 13 – 38° C (55 – 100° F).
• Minimum flow rates and water temperatures are shown in Table 3-6.
• Purity requirements are shown in Table 3-7.
Minimum water flow rates are based on requirements to effectively remove heat from the cryochiller
and to reduce risk for scale and corrosion of the condenser. Flow rates below the published minimum
required flow rate can result in scale and corrosion since the risk for these conditions increases with
lower water flow rates and higher outlet water temperatures.
Condenser failures or unit performance issues that occur on units operating at water flow rates that are
lower than the minimum required flow rate in Table 3-6 are not covered by warranty.
Allow for cooling water temperature rise during the summer months.
User is advised to add a filter to the cooling water to remove dirt and abrasives. 100 micron filter is rec-
ommended. Chemical impurities in the cooling water must be compatible with copper. See Table 3-7.
Cooling water recommendations:
• Install a user-supplied filter that can be quickly purged of accumulated sediment by purging
water from the filter, or install two parallel redundant user-supplied water filters with individual
input and output shut off valves to allow for continuous operation during maintenance by divert-
ing water to the opposite filter.
• Install a water flow rate meter in the input water line to monitor water flow.
Table 3-6: Water Flow and Inlet Water Temperature
Refrigeration Water Minimum Maximum Internal Pressure Drop Heat Rejection
Unit Inlet Temperature Required Allowable Pressure Drop in Supply kW
°C (°F) Flow Rate Flow Rate kPa (Psi) Line1 (Btu/Hour)
L/min (gpm) L/min (gpm) kPa/m (Psi/ft)
13 (55) – Min. 13.6 (3.6) 145 (38.3) 6.9 (1) No data 23.2 (79,232)
18 (65) 18.2 (4.8) 145 (38.3) 10.3 (1.5) No data 23.2 (79,232)
MaxCool 27.3 (7.2) 145 (38.3)
24 (75) 20.7 (3) No data 23.2 (79,232)
4000H
29 (85) 54.1 (14.3) 145 (38.3) 77.2 (11.2) 3.4 (0.15) 23.2 (79,232)
38 (100) – Max. 54.1 (14.3) 145 (38.3) 77.2 (11.2) 3.4 (0.15) 23.2 (79,232)
13 (55) – Min. 13.6 (3.6) 145 (38.3) 6.9 (1) No data 21.7 (74,109)
18 (65) 18.2 (4.8) 145 (38.3) 10.3 (1.5) No data 21.7 (74,109)
MaxCool 27.3 (7.2) 145 (38.3)
24 (75) 20.7 (3) No data 21.7 (74,109)
2500L
29 (85) 54.1 (14.3) 145 (38.3) 77.2 (11.2) 3.4 (0.15) 21.7 (74,109)
38 (100) – Max. 54.1 (14.3) 145 (38.3) 77.2 (11.2) 3.4 (0.15) 21.7 (74,109)
1
NOTE: Pressure Drop values assume a 3/4-inch (20 mm) standard pipe size.
Maximum working pressure of the unit’s cooling water circuit is 1380 kPa (200 psig).
Brooks Automation
3-6 214072 Revision B
Polycold Cryochiller Specifications and Site Preparation
Installation and Operation Manual Cooling Water
Cooling Water Purity
The chemistry of water typically used to cool equipment can vary widely. Multiple different elements,
compounds and ions may be present at the same time. Depending on which chemicals are present,
their amount, and the cooling water temperature, there may or may not be a risk for scaling.
The guidelines listed here are provided to reduce the potential for scale and scale related corrosion.
Whereas scale reduces heat exchanger effectiveness and cause the cryochiller performance to
degrade, scale deposits can result in corrosion that can occur beneath the scale layer. The presence
of excessive amounts of chlorine or chloride can accelerate this type of corrosion.
In addition to scale, the accumulation of micro organisms on heat exchanger surfaces can lead to
corrosion. Even after microbes have been killed by heat of chemical agents, they remain on the
surface and have the same effect as scale.
The specific elements of water quality which are important depend upon your local area and the
minerals and chemicals dissolved in your cooling water. Although your local water supply was used to
fill water into your cooling loop, it is the chemistry of the water circulating through your cooling loop
which is important. In many cases, this is significantly different from the make up of the water originally
filled into the cooling loop.
Best practice for cooling loop maintenance call for periodic sampling (i.e. monthly) and analysis of the
water quality circulating in the cooling loop. When parameters are beyond the limits listed in Table 3-7,
then corrective action is needed to bring them within the limits.
In cases where the cooling water is consistently at risk for scale, a periodic descaling process should
be put in place, such as monthly or quarterly depending on scaling risk. Scale risk typically increases
with water outlet temperature. This risk increases significantly when the compressor is allowed to
operate without any water flow. While such events are expected, if a unit is repeatedly operated
without cooling water, the condenser should be descaled.
Water quality may vary by location. The most common chemical properties and their recommended lev-
els are identified in bold in Table 3-7. Additional properties which may be present in your cooling water
are listed without bold.
Water Purity Properties
The following table provides general water purity guidelines.
Table 3-7: Water Purity Properties
Water Recommended
Explanation
Property Level
<10,000 CFU Higher microbiological levels can result in buildup of
Microbiological
(Colony Forming biofilm, which causes poor heat transfer and copper
Control
Units) pitting corrosion.
Particle Size < 100 microns Larger particles can clog heat exchanger passages.
Lower levels increase corrosion risk
Higher levels increase scale formation and precipitation.
pH 7.5 - 9.0
Some references recommend keeping the pH level in the
range 7.5 – 8.5
Brooks Automation
214072 Revision B 3-7
Specifications and Site Preparation Polycold Cryochiller
Cooling Water Installation and Operation Manual
Table 3-7: Water Purity Properties
Maintain recommended levels to reduce scaling
Scaling affects heat transfer and can lead to crevice
corrosion.
Total hardness 3.9 – 8.4 °dH
(°dH) (70 - 150 ppm) Values below 100 ppm are strongly recommended as
there is a higher risk for scale above 5.6 °dH (100 ppm).
(Note: This assumes the majority of hardness is due to
calcium carbonate, CaCO3)
Low levels cause copper corrosion, dissolution and
release into water.
High levels can cause increased chance of scaling.
Alkalinity (HCO3) 70 - 250 ppm
Note: The alkalinity of interest is “methyl orange”
alkalinity or “m alkalinity”
Conductivity above the recommended level indicates a
Electrical high concentration of ionic substances which results in
10 - 600 μS/cm
Conductivity high dissolved solids and potential for particles and
scale.
Chlorides (Cl-) < 100 ppm Higher levels can cause pitting corrosion.
Higher levels accelerates copper leaching by oxidation
Free Chlorine (Cl2) < 0.5 ppm
and dissolution of the metal surface.
Levels higher than 100 ppm increase the risk of copper pitting
Sulphate (SO42- ) < 100 ppm
corrosion.
Resistivity is the inverse of Conductivity.
Electrical Resistivity 2,000 - 100,000 Ω-cm Higher resistivity above 100,000 Ω-cm can result in copper
corrosion.
Hydrogen Sulfide (H2S) < 0.05 ppm Higher levels can lead to corrosion, pitting, and copper fatigue.
Free (aggressive)
< 5 ppm Higher levels can indicate oxidation of metals.
Carbon Dioxide (CO2)
Nitrate ions help to inhibit corrosion, similar to Sulphate (SO42-)
Nitrate (NO3-) < 100 ppm
Higher levels increase the risk of copper pitting corrosion.
Iron (Fe) < 0.3 ppm Higher levels can increase the risk of galvanic corrosion.
Aluminum (Al) < 0.2 ppm Higher levels can increase the risk of galvanic corrosion.
Manganese < 0.5 ppm Higher levels can increase the risk of galvanic corrosion.
Silica < 50 ppm
Total Copper (Cu) < 0.3 ppm Higher levels can increase the risk of galvanic corrosion.
HCO3- / SO42- > 1 ppm Lower levels below 1 ppm add risk of copper pitting
Higher turbidity levels are signs of high levels of microorganisms.
Turbidity < 5 FTU
Clean water is less likely to form deposits.
Ammonium (NH4+) < 2 ppm Higher levels increase the risk of copper corrosion.
Brooks Automation
3-8 214072 Revision B
Polycold Cryochiller Specifications and Site Preparation
Installation and Operation Manual Performance Specifications
Performance Specifications
Table 3-8 lists the performance specifications for the Polycold Cryochiller product family. For additional
information, contact Brooks Automation Polycold Systems.
Table 3-8: Typical Performance Specifications
Performance MaxCool 4000H MaxCool 2500L
Maximum load
4000 W at -98 C 2500 W at -120 C
(watts at warmest average temperature)
Theoretical maximum pumping speed (l/sec)
327,800 208,600
(See footnote 2)
Conservative pumping speed, in chamber (l/sec)
220,000 140,000
(See footnote 2)
Ultimate operating pressure, torr (mbar)
(See footnote 3) 5x10 -8 (7x10 -8) 8x10 -10 (1x10 -9)
Maximum pump start pressure, (atm)
1.0 1.0
(See footnote 4)
Time to defrost, (minutes) 2.2 m2 = 6min
(See footnote 5) 1.4 m2 = 3 min
1 m2 = 3 min
Standard cryocoil surface area m2 (ft2) 2.2 (23.7) 1.4 (15.1)
Notes:
1. Standard conditions for performance testing:
• Cryocoil environment at 25°C
• Recommend cryocoils and line lengths
• Cooling water temperature between 25° and 28°C
• Operation at 60 Hz
2. Larger cryocoils may give greater pumping speeds and can be used in some applications.
Contact your Sales Representative or a Polycold Applications Engineer for details.
3. Standard cryocoil at 25% of maximum pumping speed
4. Recommended cryopump start pressure is near normal crossover. Mechanical roughing pumps
and blowers are generally more effective for moisture above 1 torr.
5. Estimated time depending upon cryocoil mass and refrigerant line.
6. Units were tested in a manufacturing environment while under maximum load in the Cool mode.
7. Operation at 50Hz results in warming of the cryocoil temperatures by 3 to 5°C.
8. Operation of warmer cooling water temperatures results in a reduction of maximum load rating and
warms cryocoil temperatures by about 4°C for a 10°C increase in cooling water temperature.
Brooks Automation
214072 Revision B 3-9
Specifications and Site Preparation Polycold Cryochiller
Cryocoils and Refrigerant Lines Installation and Operation Manual
Cryocoils and Refrigerant Lines
Refrigerant lines should be kept to a minimum length. Any line over 6m (20 ft) should be reviewed by a
Brooks Automation Polycold Applications Engineer. Longer refrigerant lines delay the start of
cryopumping and the time to complete the defrost cycle. They also add to the total heat load on the
cryochiller and impact the coldest achievable temperatures at the cryocoil. The heat gain through the
insulation on the combined feed and return refrigerant line set is 8 Watts/ft (25 Watts/m).
The cryocoil(s) must be specified and sized for the process. Contact Brooks Automation Polycold for
assistance in selecting the proper cryocoil.
Total cryocoil surface area for dual circuit models must be divided between the two circuits. Larger
cryocoils may give faster pumping speeds and can be used in some applications. However, if the heat
load is too great, the cryopump becomes less efficient and may be shut off by a protective device
Table 3-9: Typical Cryocoils and Refrigerant Lines for MaxCool
Single Circuit Dual Circuit
Cryocoils and
Refrigerant Lines MaxCool MaxCool MaxCool MaxCool
4000H 2500L 4000H 2500L
Design Pressure, bar (psig) 31 (450) 31 (450) 31 (450) 31 (450)
Test Pressure, bar (psig) 44.4 (644) 44.4 (644) 44.4 (644) 44.4 (644)
Temperature Range +150C to -160C +150C to -160C +150C to -160C +150C to -160C
Standard Cryocoil Surface Area
2.2 (23.7) 1.4 (15.1) 1.1 (11.8) 0.7 (7.5)
m2 (ft2) - per circuit
Standard Cryocoil Tube Length
43.8 (144.7) 27.9 (92.1) 21.9 (72.4) 18.6 (57.6)
- m (ft) - per circuit
Standard Cryocoil Tube OD
16 (5/8) 16 (5/8) 16 (5/8) 12 (1/2)
- mm (in)
Refrigerant Line Length
2.4 (8) 2.4 (8) 2.4 (8) 2.4 (8)
-m (ft) - per circuit (note 1)
Feed Line Tube OD - mm (in) 10 (3/8) 10 (3/8) 10 (3/8) 8 (5/16)
Return Line Tube OD - mm (in) 16 (5/8) 16 (5/8) 16 (5/8) 12 (1/2)
Note 1 Other refrigerant line lengths and cryocoils may be possible, depending upon performance
requirements.
Brooks Automation
3-10 214072 Revision B
Polycold Cryochiller Specifications and Site Preparation
Installation and Operation Manual Cryocoils and Refrigerant Lines
NOTICE
The tubing for the refrigerant lines and cryocoil must be dried prior to installation.
• Perform strength test with dry compressed nitrogen using the appropriate
safety precautions
• After testing, backfill with dry nitrogen and cap the assembly.
• Hydrostatic pressure testing is NOT recommended because it introduces sig-
nificant amounts of water and will void the warranty.
• Lines or coils that are hydrostatically tested must be drained of water and then
baking out at 80 C for at least 12 hours under a dry nitrogen purge.
• A calibrated hygrometer should be used to verify that water vapor concentra-
tion is less than 50 ppm at the end of the bake out process.
Balance Pressure
Table 3-10: .Balance Pressures for Polycold Cryochiller Refrigeration Units1
Refrigeration Unit Balance Pressure kPa (psig)
MaxCool 4000H 1241-1586 (180-230)
MaxCool 2500L 1448-1724 (210-250)
NOTE: 1 These pressures are for the refrigeration units only. The balance pressure may drop 5-20
psig (35-70 kPa) after installing the refrigerant line and cryosurface and opening the isola-
tion valves.
NOTE: 2
Balance Pressure refers to the pressure of the unit when it is turned off and warmed up
to room temperature. It is the balance of pressure on both sides, the suction side and the
discharge side, of the compressor. When the compressor is running, the unit creates a
pressure difference between the suction and discharge sides of the compressor.
Brooks Automation
214072 Revision B 3-11
Specifications and Site Preparation Polycold Cryochiller
Cryocoils and Refrigerant Lines Installation and Operation Manual
Refrigerants in the MaxCool Unit
This product does not contain R-22 or any CFC’s or HCFC’s and is in accordance with U.S. EPA law
and EC2037/2000 and EC1005/2009.
All refrigerant used in Polycold's MaxCool Cryochiller products have significant GWP values. Users and
service providers should ensure that refrigerant is not released to the environment at any time. The
refrigerant should be reclaimed and either recycled or destroyed in accordance with international regu-
lations and the current best industry practices.
Calculations of the GWP for the Polycold Cryochiller refrigerant blends, as shown in Figure 3-11, were
calculated in accordance with the European Union's EC Regulation No 842/2006 on Certain Fluori-
nated Greenhouse Gases.
Table 3-11: GWP Values for Polycold Cryochiller Refrigerants
Refrigerants used in the Blend Total Refrigerant
Model Blend GWP
(see product I.D. Label for amounts) Weight - kg (lb)
MaxCool 4000H R-245fa, R-125, R-23, R-14, Argon 8.5 (18.74) 5310
MaxCool 2500L R-245fa, R-125, R-23, R-14, Argon 9.0 (19.9) 5200
Brooks Automation
3-12 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
4 Installation
General Hazard
Failure to review the Safety section and follow the safety warnings
can result in death or serious injury.
• Do not attempt to perform installation, operation, or maintenance
procedures on the Polycold Cryochiller until you have read and
understand the information in the Safety chapter.
• Read and understand each procedure before performing the
procedure.
This chapter assumes that the user has completed the specification, design, and component selection
process. Refer to the Introduction and Specification chapters for design and specification information.
When using this chapter. follow the recommendations below.
• Read and become familiar with the Safety chapter.
• Read the Specifications chapter and ensure the site and system components are suitable for
the installation location.
• Read this chapter and be familiar with the steps required to install the unit.
• Be aware of all Safety issues associated with the materials and refrigerants contained in the
Polycold Cryochiller.
• Read the section titled “Installation Considerations” and decide on how each of these issues
will be handled.
• Confirm the availability of certified refrigeration specialists that may be required for some pro-
cedures.
• Arrange for a qualified electrician or electrical installer to perform electrical power installation.
• Follow the Installation Checklist to guide you through the installation.
Brooks Automation
214072 Revision B 4-1
Installation Polycold Cryochiller
Installation Checklist Installation and Operation Manual
Installation Checklist
Use the checklist in Table 4-1 when installing the Polycold Cryochiller. Perform the procedures in the
order shown. Initial and date each procedure as you complete it.
NOTE: Before installing the Polycold Cryochiller, check the specifications and site requirements in
this manual.
Table 4-1: Installation Checklist
Name Completion Page
1. Installation Overview 4-3
2. Inspect and Unpack the Polycold Cryochiller Balance
4-4
Pressure:_______
3. Move to Location 4-7
4. Remove Compressor Hold-Down Nuts 4-9
5. Connect Cooling Water 4-10
6. Connect Electrical Power 4-13
7. Install the Cryosurface 4-17
8. Install the Refrigerant Lines 4-19
9. Install the Condensate Drain Tube 4-26
10. Check the Refrigerant Lines and Cryosurface for Leaks 4-27
11. Evacuate the Refrigerant Lines and Cryosurface 4-32
12. Connect the Refrigerant Line Thermocouples 4-36
13. Preliminary Check of the Polycold Cryochiller 4-39
14. Insulate Exposed Refrigerant Tubes and Couplings 4-41
15. Startup and Test 4-46
16. Evaluate the Polycold Cryochiller / Place Into Service 4-48
17. Install Seismic Restraints (as required) 4-51
Brooks Automation
4-2 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Installation Overview
Installation Overview
Before starting installation, review the items in this section to confirm that the installation location meets
the requirements of the Cryochiller and that the proper components have been selected and are avail-
able to perform the installation.
Component Description
Confirm that each of the main components of the Polycold Cryochiller are available for installation.
• Refrigeration Unit
• Refrigerant Line
• Cryosurface; one of two types:
– Coil - for water vapor cryotrapping
– Baffle - usually used to minimize oil back streaming
• Cryogenic feedthrough, which routes the refrigerant lines through the vacuum chamber wall
Installing a Refrigeration Unit to Meet ASHRAE Requirements
The following information helps to comply with ANSI / ASHRAE 15-1994 “Safety Code for Mechanical
Refrigeration.”
• ANSI is for the American National Standards Institute.
• ASHRAE is for the American Society of Heating, Refrigeration, and Air Conditioning Engineers.
Normally, the manufacturer provides the type and amount of refrigerant used in the refrigeration unit.
However, Polycold considers their mixtures of refrigerants to be proprietary. Therefore, the following
information complies with the above standards.
• The amount of refrigerant mixture, the minimum room size, and the refrigerant safety group
classification are included next to the refrigeration unit's nameplate.The nameplate is located
on the frame under the lower left front panel or above the water connection panel, lower right
front panel.
• Brooks determined the refrigerant safety group classification of the refrigerant mixture by eval-
uating the safety group classifications of the individual components. This evaluation used ANSI
/ ASHRAE-34 and EN 378.1 as a guide.
• The Polycold Cryochiller is a “direct (refrigeration) system”. It is only intended to be installed
above ground in an industrial environment.
• To comply with the Safety Code for Mechanical Refrigeration, ANSI/ASHRAE-115-2007, the
units should be located in a room no smaller than listed.
• If the minimum room size indicated on the nameplate is not obtainable, the refrigeration unit
must be installed in a “refrigerating machinery room”. Consult local or national building codes
for machinery room requirements.
• See section 9.7.8 of ANSI / ASHRAE 15- 1994 for location requirements.
• Only A1 refrigerants are used on MaxCool systems. According to ASHRAE 15 and EN 378, it
is permissible for the pressure relief valves to vent into the equipment cabinet. This assumes
the unit is installed above ground and in a room that meets the minimum room volume.
Brooks Automation
214072 Revision B 4-3
Installation Polycold Cryochiller
Inspect and Unpack the Polycold Cryochiller Installation and Operation Manual
Table 4-2: Pressure Relief Venting Requirements
Refrigeration Unit Recommended Discharge Capacity (lb-air / min) 1
ANSI / ASHRAE 15 EN 378
MaxCool 4000H 2.58 1.58
MaxCool 2500L 2.37 1.47
1
The discharge capacity recommended by Polycold is based on actual relief requirements from the refrigera-
tion system as assessed by these standards. The pressure relief devices on the refrigeration unit are over-
sized. Discharge capacities based on the pressure relief devices are 23.9 pounds of air per minute.
Inspect and Unpack the Polycold Cryochiller
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools Standard tool kit and unpacking tools
Overhead crane or forklift truck capable of lifting the Cryochiller
General Hazards
The Polycold Cryochiller presents hazards that may cause death
or personal injury.
• Review this manual before performing any procedure. This
includes routine operation of the Polycold Cryochiller.
• Know the information in the Safety Chapter.
• Review the MSDSs that are associated with this tool.
Brooks Automation
4-4 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Inspect and Unpack the Polycold Cryochiller
High Pressure Rupture
If a high pressure circuit is ruptured, such as a refrigerant circuit,
equipment damage could occur. Cuts and eye injury from flying
objects could result in death or serious injury.
• Inspect the refrigerant circuit and entire unit before performing
any installation procedures.
Heavy Object - Lift / Tip Over
Polycold Cryochiller refrigeration unit weighs a minimum of 533kg
(1175 lb) and up to 544kg (1200 lb). Failure to properly lift or move
this device may result in death or serious injury.
• Use proper lifting devices and techniques when moving the Poly-
cold Cryochiller.
1. Carefully inspect all surfaces of the shipping containers for signs of damage or stress.
Note that there may be more than one shipping container.
2. If the container has signs of damage:
• Record the damage and notify the carrier immediately.
• Assess the damage to the shipping container with the carrier.
• Determine if the Polycold Cryochiller is damaged.
• If the Polycold Cryochiller is damaged, STOP THIS PROCEDURE!
Do NOT install a damaged unit.
Notify Brooks Automation of the damage to the unit.
• Arrange with the carrier and Brooks Automation to repair the damage or replace the unit.
Refer to the Brooks Automation contact information in the Appendix of this manual.
• If there is no damage, continue this procedure
3. Remove strapping and fasteners that hold the cardboard enclosure to the palette.
Examine the contents for damage.
Report any damage that is discovered.
4. Remove the lower braces from the palette that block the base frame of the Cryochiller.
Brooks Automation
214072 Revision B 4-5
Installation Polycold Cryochiller
Inspect and Unpack the Polycold Cryochiller Installation and Operation Manual
5. Remove the front and rear bottom
panels from the Cryochiller.
6. Locate and remove the bolts that
hold the cryochiller to the palette.
7. Save the bolts, palette, shipping
materials, and the shipping con-
tainers that are in re-usable condi-
tion to ship the Polycold
Cryochiller to another location, as
required.
8. If a spare parts kit was shipped
with the unit, remove the front
panel of the refrigeration unit to Figure 4-1: Bottom Panels
retrieve the spare parts kit and the
manual. Verify that all of the parts
were shipped with the unit.
9. Record the balance pressure by performing the following steps:
a. Locate the pressure gauge on the rear of the refrigeration unit. When the compressor is
turned off and at room temperature, the pressure gauge reading is the balance pressure.
b. Read the balance pressure on the pressure gauge. The pressure should be within the
ranges shown on the Balance Pressure Table, Table 3-10 on page 3-11.
c. Record the balance pressure in the space in Task 1 on Table 4-1 on page 4-2.
d. If the equipment has recently been moved from an area where the temperature differs
greatly from the installation area, allow the components 24 hours to stabilize to the new
room temperature before reading the balance pressure and verifying correct charge pres-
sure.
e. If the pressure is not within the listed range, contact the nearest Brooks Automation Poly-
cold Service Center.
NOTE: If the system is exposed to extreme cold during shipping, the balance pressure is reduced
due to the increased condensation of the refrigerant mixture. Refrigerant may take up to 48
hours at room temperature to achieve normal balance pressure and for the pressure gauge
to display the proper reading.
10. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Brooks Automation
4-6 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Move to Location
Move to Location
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools Lift Device to lift, move, and place the unit -See Warning -
Heavy Object below
# 2 Phillips screwdriver
(2) 9/16-inch wrenches
NOTE: If the unit includes the Lifting Ring option, refer to Appendix B: Lifting Rings (Optional) on
page 12-3
If the unit includes casters, refer to 185304, Install Procedure, Caster Option.
Heavy Object
The refrigeration unit weighs more than 522 kg (1150 lb). Failure to
properly lift this device may result in death or serious injury.
• Use a fork lift or crane when lifting or moving the compressor
unit.
• If using lift ring option, refer to Appendix B: Lifting Rings
(Optional) on page 12-3
High Pressure Rupture
If a high pressure circuit is ruptured, equipment damage could
occur and cuts and eye injury from flying objects could cause death
or serious injury.
• Wear gloves and goggles when working around the Polycold
Cryochiller.
1. Check the location where the Cryochiller is to be placed.
Refer to Figure 3-1 on page 3-2 and Figure 3-2 on page 3-3 for placement and spacing
requirements.
Brooks Automation
214072 Revision B 4-7
Installation Polycold Cryochiller
Move to Location Installation and Operation Manual
2. Follow the placement recommendations below.
• Place the unit in an area where routing and connecting the water and electrical power will
not pose a personnel or equipment hazard.
• Place the refrigeration unit as close as possible to where the cryosurface will be installed.
• Orient the refrigeration unit for ease of maintenance and connection of facilities and refrig-
erant lines.
• Place the refrigeration unit indoors and above ground.
• Place the refrigeration unit in a well-ventilated area.
• Place the refrigeration unit in an environment where the temperature is between 40° - 100°
F (4° - 38° C).
• Placement of the unit may be at any elevation relative to the cryosurface. The cryopumping
system is not gravity-sensitive.
NOTICE
If using a fork lift or pallet jack, make sure the forks extend fully through the frame
of the Polycold Cryochiller and completely support both sides of the frame.
Lifting the unit with a forklift or pallet jack without having the forks or jack fully
extended through the Cryochiller frame will damage the frame and void the war-
ranty.
3. Use a forklift or pallet jack or an
appropriate lift device to lift the refrig-
eration unit.
When using a forklift or pallet jack,
remove both the front and back bot-
tom panels to access the slots for the
forks. See Figure 4-2.
Place the forks of the forklift or pallet
jack fully through the frame of the
Cryochiller so that they extend out
the back side of the unit and are in
position to lift the Cryochiller by both
sides. Figure 4-2: Bottom Panels for Fork Lift Access
Carefully lift the unit and confirm that
it is being lifted by both sides.
4. Keep the Cryochiller vertical while it is being moved.
5. Place the refrigeration unit at the desired location.
6. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next checklist task.
Brooks Automation
4-8 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Remove the Compressor Hold-Down Nuts
Remove the Compressor Hold-Down Nuts
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools # 2 Phillips screwdriver
(2) 9/16-inch wrenches
1. Use a Phillips-head screwdriver to remove the (4) screws that attach the front lower
panel on the system and remove the panel.
2. Use a Phillips head screw driver to remove the (5) screws that attach the rear lower panel on the
system and remove the panels.
See Figure 4-4.
3. If an optional spare parts kit was ordered, it will be behind the lower front panel of the unit.
Remove the spare parts kit and verify that all of the parts were shipped with the unit.
4. Locate the compressor in the bottom of the refrigeration unit. See Figure 4-3 and Figure 4-5.
Figure 4-4: Rear Lower Panel Access Screws
Figure 4-3: Polycold Cryochiller with panels
removed showing compressor location
Brooks Automation
214072 Revision B 4-9
Installation Polycold Cryochiller
Connect the Cooling Water Installation and Operation Manual
5. Locate the four hold-down nut locations
on the compressor. See Figure 4-5.
6. Use two 9/16-inch wrenches to remove
the two hold down nuts on each corner
of the compressor.
• Place one wrench on the lower nut
and the other wrench on the upper
nut.
• Hold the lower nut and loosen and
remove the upper nut from the bolt.
• Loosen and remove the lower nut.
7. Repeat the procedure to remove the
remaining three sets of hold-down nuts.
Figure 4-5: Hold-down Nuts
8. Save the hold-down nuts for future use
(2 of 4 shown)
when moving or shipping the refrigera-
tion unit.
Recommended: Place nuts on cable tie and secure to compressor.
9. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Connect the Cooling Water
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools Pipe wrenches
Materials Fabricated water lines from 3/4-inch (20 mm) standard pipe
or equivalent with compatible fittings.
3/4-inch female NPT fittings.
Thread sealant such as Teflon tape
NOTICE
Water should be filtered for contaminants and copper reducing microbes.
Brooks recommends filtration to 100 microns and microbiological controls be put
in place in order to supply clean and safe cooling water to your Polycold product.
Failure to provide water of proper specification may void the system warranty.
Brooks Automation
4-10 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Connect the Cooling Water
NOTICE
If the system is turned on before cooling water has been connected, damage to
the equipment can result.
Verify that cooling water has been connected before turning on power to the unit.
1. Ensure that the water supply for the Polycold Cryochiller refrigeration unit meets the
specifications in Cooling Water on page 3-6
Optional:
Install pressure gauges on the water lines at the refrigeration unit in order to measure the pressure
drop within the refrigeration unit. This will help you adjust the water flow for optimum operation of
the Polycold Cryochiller. It will also aid you in troubleshooting if there are water cooling problems.
See Figure 4-6
It is also recommended to install two parallel input water lines including valves, water filters, and
flow meters. This allows switching water lines and avoiding equipment shutdown during scheduled
maintenance. See Figure 4-6
NOTICE
If using rotameter-type flow meters, their inherent restriction may reduce the
actual flow rate delivered to the refrigeration unit.
Manual
shut-off valves Filters
Water from Water to IN water port
facilities on refrigeration unit
Flow
Meters
Figure 4-6: Redundant Water Circuits in Supply Line, Optional
Brooks Automation
214072 Revision B 4-11
Installation Polycold Cryochiller
Connect the Cooling Water Installation and Operation Manual
2. Route the supply and drain water
lines to the In and Out water fittings
on the lower right side of the Poly-
cold Cryochiller.
IN water port is on the right.
OUT water port is on the left
See Figure 4-7.
3. Apply two wraps of water-grade Tef-
lon tape or apply water sealant paste
to the threads of all of the male fit- OUT
tings that connect to the In and Out Water Port
water ports on the refrigeration unit. IN
Water Port
4. Connect the supply water line to the
IN water port on the right side. Figure 4-7: Location of Water Ports
Connect the drain water line to the
OUT water port on the left side.
5. Tighten each water line finger tight until the water line gasket contacts the fitting and then tighten 2
to 3 additional full turns. The number of turns required to tighten the fittings is affected by the thick-
ness of the tape or sealant that has been applied to the threads.
6. Turn the supply and return water lines on. Check for leaks. If water leakage is found, tighten the
leaking fitting an additional 1/4 turn. If water continues to leak at the connection, turn off the supply
and return water lines, disconnect the fittings and check for the cause of the leak.
7. When the water connections are installed, test, and do not leak, go to the Installation Checklist
Table 4-1 on page 4-2. Initial and date this task. Go to the next task on the checklist.
Brooks Automation
4-12 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Connect Electrical Power
Connect Electrical Power
Electrical power connections must be performed by a qualified electrician or electrical installer and must
meet local electrical codes.
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools Torque Wrench for 3.9 to 4.5 N-m (35 to 40 lb-in) range
... or equivalent for electrical terminal connections
Materials 4-Conductor power cable that meets local electrical code for the volt-
age and amperage of the unit See Table 3-5 on page 3-5.
Connector for power cord to facilities power connection
Cable Strain Relief or Conduit Connector for 49.2mm (1.94 inch)
power access hole
1/4 inch ring lugs
Hazardous Voltage
Contact with energized equipment may cause electric shock and
result in death or serious injury.
• Only a qualified electrician or electrical installer is allowed to
install the power to the Polycold Cryochiller.
1. The location of power input to the Polycold Cryochiller is on the lower right corner of
the front of the unit. There is a 49.2mm (1.94 inch) clearance hole in the outer skin and
a 42.1mm (1.656 inch) mounting hole on the frame for mounting an appropriate sized
strain relief or conduit connector.
Strain Relief Example: “OZ-Gedney KC-125T Flexible Conduit Connector”
2. Route the 4 conductor cable or individual wires through the connection, up the right front leg, above
the cable tray that is attached to the bottom of the shelf that separates the compressor area from
the valve area, and then up to the circuit breaker area.
3. Confirm that the protective grommet or strain relief is in place in the opening below CB1.
4. When using larger cables, the (3) screws that hold the front edge of the upper cable track may be
removed and the track lowered to provide greater access. When completed, replace the (3) screws.
5. If the input power cable is too large to route through the cable tracks or existing cable is too short,
use Terminal Block Accessory and Wiring Kt, p/n 181500.
If using 4-conductor cable that is too stiff to bend in the cable tracks, remove the outer jacket from
the cable after it passes through the strain relief. Optionally, use Terminal Block Accessory and Wir-
ing Kt, p/n 181500.
Brooks Automation
214072 Revision B 4-13
Installation Polycold Cryochiller
Connect Electrical Power Installation and Operation Manual
Cable Cable or wires
or wires run in track
run up to below shelf
circuit
breaker
Confirm Cable or wires
protective run behind
grommet front frame
is in place.
Cable connects to
customer provided
strain relief
Cable Track
Screws
Conduit connects to
(3 places)
customer provided
conduit connection
Figure 4-8: Power Cable Routing
6. Attach 1/4 inch ring lugs to
each conductor on the
CB2
input power cable.
7. Remove the finger guard
CB1
from CB1 and CB2 as
required.
Input
8. Connect the three phase Power
lines of the input power Conductors
cable to the lower termi-
nals / input side of CB1
using the provided screws
and washers (optional) in
the stack sequence shown Ground
in Figure 4-10. Conductor
Figure 4-9: Input Power Connections to CB1
Brooks Automation
4-14 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Connect Electrical Power
9. Tighten each 1/4-20 (M6) terminal screw to 3.9 to 4.5 N-m (35
to 40 lb-in).
10. Connect the ground line of the power cable to the ground stud
using the hardware provided in the fastener sequence. Follow
the stack sequence below and shown in Figure 4-11.
• External star washer
• Terminal lug
• Flat washer - (optional)
• Lock washer - (optional)
• 1/4-20 (M6) Nut
11. Tighten the 1/4-20 (M6) ground nut to 4.5 to 5.1 N-m (40 to 45
lb-in).
12. After the power cable is fully connected, secure the power
cable to the track using cable ties. Holes are provided in the Figure 4-10: Terminal Washer
cable track for inserting the cable ties. Stack Sequence
13. If the Polycold Cryochiller is operating at maximum load and
the power rating is lower than 93% of the power setting
selected for the transformer tap setting, then it is recommended
that the input power to CB2 be wired in accordance to the
“Excepted Wiring Method” as found in Appendix C: CB2
Excepted Wiring on page 12-5 or contact Brooks as required.
14. Check the input voltage and compare to the voltage specified
on the system label. Adjust the tap settings, if required, to
accommodate the actual input voltage. See Input Power Trans-
formers on page 4-16.
Figure 4-11: Ground Washer
Stack Sequence
Brooks Automation
214072 Revision B 4-15
Installation Polycold Cryochiller
Connect Electrical Power Installation and Operation Manual
Input Power Transformers
The Polycold Cryochiller has one of three different transformers installed based on the input power
requested when the unit was ordered. The system is set to a specific input voltage at the factory by
transformer tap settings. These tap settings must be adjusted in the field as required to accommodate
the actual voltage at the installation site.
• Available tap settings are: 200V, 230V, 380V, 400V, 430V 460V and 480V.
• All transformers use the same numbering scheme for tap settings but the taps may be in differ-
ent physical locations on the transformer depending on the transformer that is used.
Change Transformer Tap Settings
1. Check the input voltage.
2. Check the transformer tap settings. Refer to the tap setting sticker on the transformer or Figure
4-12.
3. Rewire the transformer tap settings as required. Refer to Table 3-4 on page 3-4 for tap settings for
your compressor and voltage.
• Remove the protective cover
• Change the input wiring and jumper settings as required
• Replace the protective cover
Figure 4-12: Tap Settings for 230 and 480 Volt Transformers
4. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to next task on the checklist.
Brooks Automation
4-16 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Install the Cryosurface
Install the Cryosurface
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools 2.5 inch Spanner wrench, p/n 810030-07, for the nut on
feedthrough connection
Materials High-vacuum grease - must have an appropriate low vapor
pressure (for optional use on the feed-through's)
O-ring, as required
This section describes how to install the cryocoil or cryobaffle, and refrigerant lines. If these items are
not already selected, then follow the recommendations below.
• Refer to System Summary on page 1-3 and Cryocoils and Refrigerant Lines on page 3-10 for
cryosurface information.
• Refer to Appendix F: Feedthroughs on page 12-10 for feedthrough selection information.
• Contact Brooks Automation Polycold Systems for more information.
NOTE: This task assumes that both a cryosurface and a standard 50mm (2-inch) feed-through
from Brooks Automation Polycold Systems are being installed.
If a cryobaffle or cryocoil and feed-through has been custom-fabricated by a source other
than Brooks Polycold, verify that the part meets the specifications in the section Specifica-
tions and Site Requirements, Cryocoils and Refrigerant Lines on page 3-10.
The feed-through on the Brooks Polycold Systems Cryocoil is designed to be installed from the inside
of a vacuum chamber. This allows removal of the cryosurface when cleaning or servicing the vacuum
chamber.
High Working Pressure
The refrigeration unit's working pressure may exceed the cryosur-
face's working pressure which may damage the vacuum system
components and may result in equipment damage and personal
injury.
• Do not use reservoir type cryosurfaces.
• Do not connect the refrigeration unit to a cryosurface without first
verifying that the cryosurface meets specifications.
Install the Feed-Through and Cryocoil
1. Inspect the feed-through port thickness, hole diameter, and sealing surface. Ensure
that the feed-through port is compatible with the feed-through.
2. Clean the inner and outer surfaces of the feed-through port on the vacuum chamber wall where the
cryosurface feed-through is to be installed.
Brooks Automation
214072 Revision B 4-17
Installation Polycold Cryochiller
Install the Cryosurface Installation and Operation Manual
3. Inspect and clean the O-ring groove and O-ring in the inner flange of the feed-through.
4. Insert the O-ring into the groove in the inner flange.
5. From the inside of the vacuum chamber, insert the feed-through into the feed-through port.
6. Tighten the feed-through nut finger-tight and position the cryosurface. If the cryosurface has fasten-
ers, secure them at this time. See Figure 4-13.
Figure 4-13: Typical Feedthrough
7. Verify that no moving parts will hit the cryosurface. Make sure the cryosurface does not touch the
vacuum chamber wall or anything in the vacuum chamber. The cryosurface must be at least 16mm
(5/8-inch) from the vacuum chamber wall to prevent ice bridging. Greater distances are better.
8. Hold the feed-through in place and tighten the nut with the spanner wrench included with the cryo-
surface assembly. Make certain the nut is tight. If the nut is loose, the O-ring will tend to lift from the
vacuum chamber wall when under vacuum.
9. Install a heat radiation shield if the cryocoil is in direct view of a source of heat greater than 50°C.
Position the shield between the cryocoil and the heat source. The shield should be as close as pos-
sible to the heat source and as far away as possible from the cryocoil. The cryocoil traps molecules
best when it has maximum view of the vacuum chamber.
10. Check the vacuum chamber for leaks. If any leaks are found, correct them before proceeding.
11. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Brooks Automation
4-18 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Install the Refrigerant Lines
Install a Cryobaffle
1. If you are installing a Polycold “CB” type cryobaffle, carefully center it between the
flange bolt holes to assure a good O-ring seal.
2. Verify that no moving parts will hit the cryosurface.
3. Make sure the cryosurface does not touch the vacuum chamber wall or anything else in the vacuum
chamber. The cryosurface should be at least 16mm (5/8-inch) away from the vacuum chamber wall
to prevent ice bridging. Note that greater distances are better.
4. Install a heat radiation shield if the cryobaffle is in direct view of a source of heat greater than 50°C.
Position the shield between the cryobaffle and the heat source. The shield should be as close as
possible to the heat source and as far away as possible from the cryobaffle. The cryobaffle traps
molecules best when it has maximum view of the vacuum chamber.
5. Check the vacuum chamber for leaks. If any leaks are found, correct them before proceeding.
6. Go to Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the checklist.
Install the Refrigerant Lines
NOTICE
This procedure assumes that refrigerant lines from Brooks Automation, Inc.
Polycold Systems are being installed.
• If installing a refrigerant lines not made by Polycold Systems, verify that the
refrigerant lines meet the required specifications.
• Contact Brooks Polycold for assistance.
NOTICE
Dual-Circuit System
This section assumes both refrigerant circuits are connected at the same time.
It is possible to connect only one refrigerant circuit of a dual circuit system.
• When connecting the second refrigerant circuit, the refrigerant mixture must
be fully drawn back into the unit.
• Contact Brooks Automation Customer Support for more information.
Brooks Automation
214072 Revision B 4-19
Installation Polycold Cryochiller
Install the Refrigerant Lines Installation and Operation Manual
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools Torque wrench (optional)
For Parker UltraSeal Silver-plated stainless steel O-rings
Style Couplings 1 inch open end wrench
(Standard) 15/16 inch open end wrench
For Cajon VCR Silver-plated stainless steel gaskets or unplated nickel gaskets
Style Couplings 1-3/16 inch open end wrench
(Optional) 1-1/16 inch open end wrench
Guidelines for Refrigerant Lines
• Improper connection of the couplings is a common source of leaks. Internal leaks can damage
the equipment.
• Use a new O-ring or gasket each time the coupling is assembled.
• Do not use grease when assembling the couplings. Grease can contaminate the cryopump and
can mask a leak during the leak-checking procedures. Additionally, the coupling will leak when
the grease gets brittle at cryogenic temperatures.
• Do not scratch or dent the sealing surfaces of the couplings.
• Always use the O-ring removal tool to remove an O-ring from the Parker UltraSeal compatible
couplings. See Appendix G: Zero Line Loss Procedure on page 12-13.
NOTICE
Use of unauthorized or non-standard couplings voids your warranty.
Improper use of, incorrect installation of, over-tightening of, or use of damaged
O-rings in couplings will void your warranty.
NOTICE
O-ring removal tool requires lubrication.
Always clean couplings after using the lubricated tool.
Brooks Automation
4-20 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Install the Refrigerant Lines
NOTICE
Refrigerant lines should only be bent once.
Re-bending a refrigerant line can cause “work hardening” and fractures and
refrigerant line failure.
Route and Install the Refrigerant LInes
1. Use the following considerations to plan the route of the refrigerant line between the
cryosurface and the top of the refrigeration unit:
• The refrigerant line should not be a hindrance or hazard to the movement of personnel.
• The refrigerant line should not hinder access to or maintenance of any equipment.
• Provide at least 32mm (1-1/4 inches) wall thickness of insulation around the feed and return
lines. If the insulation and system are not completely sealed and airtight, water vapor from the
air will accumulate on some of the surfaces and create ice on the refrigerant lines.
• Support the line at mid-length and at three-foot intervals.
Ensure that the line supports do not crush the insulation covering the lines.
Use supports that are at least 100mm (4 inches) wide.
• Do not use supports that make direct contact with the exposed tubes or couplings.
• Do not allow the lines to be vibrated by the application.
• Important.
The feed lines are made of soft
refrigeration copper and have a min-
imum bend radius of 300mm (12
inches).
Feed lines are only suitable to be
bent once to fit the planned layout.
• Bend the refrigerant line so that the
couplings are even at the point of
connection to the refrigeration unit.
The feed and return lines should
have the same bend radius.
The brand or type of tape, hangers, Figure 4-14: Minimum Refrigerant Line Bend Radius
clamps, or cradles depends on what
is available and acceptable at the
installation site.
Brooks Automation. Inc. Polycold Systems recommends using a continuous line length from
the refrigerant unit to cryocoil feed-through. Polycold does not recommend or warranty the use
of intermediate fittings.
If your line design has an intermediate set of fittings between the unit and chamber
Brooks Automation
214072 Revision B 4-21
Installation Polycold Cryochiller
Install the Refrigerant Lines Installation and Operation Manual
feed-through, Polycold recommends eliminating these fittings and brazing the tubes together.
If brazing the lines cannot be done, use only approved fittings and support the tubing within
300mm (12 inches) of each side of the intermediate fitting.
2. Inspect the sealing surfaces of the couplings for the following:
• Dirt and foreign material
• Scratches
• Dents
3. Clean the sealing surfaces of the couplings.
If the sealing surfaces are scratched or dented, contact the Brooks Automation Polycold Service
Department.
NOTE: Parker UltraSeal compatible couplings are standard on all Polycold Cryochillers.
4. Connect the refrigerant line to the cryosurface first, if possible.
Finger-tighten the refrigerant line couplings to the feed-through couplings.
5. Remove the upper-right front panel of the
refrigeration unit.
6. Locate the isolation valve box which is the
box just below the refrigerant line couplings.
7. Remove the upper right panel on the front of
the Polycold Cryochiller to expose the valve
box.
8. Locate the hand valves in the isolation valve
box.
Hand valves are the manually operated valve
and have red handles.
A unit may have up to 4 hand valves, depend-
ing on the configuration.
See Figure 4-15 for valve locations.
9. Close each of the hand valves by turing them
clockwise until they are firmly closed.
NOTE: The isolation valves are used to hold
the refrigerant mixture in the refrigera-
tion unit during shipping or whenever Figure 4-15: Cold Valve Box Showing Hand
the cryosurface or refrigerant line is dis- Valves with Red Handles
Brooks Automation
4-22 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Install the Refrigerant Lines
connected. These valves cannot be operated when they are at cryogenic temperatures.
10. Locate the refrigerant feed and return fittings on the upper right corner of the front of the refrigera-
tion unit.
Remove the brass blank-off fittings from the feed and return lines using the following procedure.
See Figure 4-16.
a. Use one wrench to hold the fitting on the refrigerant line steady.
b. Use a second wrench to carefully loosen the blank-off fitting from the refrigerant line.
c. Slowly remove the blank-off fittings from the feed and return couplings while listening for
refrigerant leakage.
– A brief hiss of refrigerant gas leakage is OK.
– Continuous escape of refrigerant is NOT OK. Quickly reinstall the blank-off fit-
tings and make certain the isolation valves are closed.
Circuit 1
Feed Return
Lines Lines
Circuit 2
Figure 4-16: Polycold Cryochiller Refrigerant Lines with Standard Ultra Fittings
Brooks Automation
214072 Revision B 4-23
Installation Polycold Cryochiller
Install the Refrigerant Lines Installation and Operation Manual
11. Save the blank-off fittings and store them with the
unit for reinstallation if the refrigerant lines are dis-
connected.
12. Bend the refrigerant line so that the couplings are
even when they get to the mating couplings on the
refrigeration unit. Commonly, the feed and return
lines should have the same bend radius.
13. Loosely fasten all couplings on the refrigerant line.
14. Check the line for stress or misalignment between
couplings.
Resolve line stress or misalignment before going
to the next step.
Figure 4-17: Blank off Fittings
15. Go to the installation procedures for either the
Parker UltaSeal or Cajon VCR couplings.
Install Parker UltraSeal Compatible Couplings (Standard Fitting)
Female Nut
Gland
Silver Plated Stainless Steel O-ring
Male Coupling
Sealing Surfaces
Figure 4-18: Parker Ultra Seal compatible Coupling (standard coupling)
1. Insert a new O-ring into the male coupling's groove
2. Place the gland against the O-ring and male coupling. Make certain the O-ring does not drop out of
the groove
3. Slide the nut forward and finger-tighten the coupling.
4. Use two wrenches to tighten the coupling. Keep the male coupling stationary with the 15/16-inch
wrench and tighten the nut with the 1-inch wrench. Each wrench must have a length of at least 12
inches (300 mm).
Brooks Automation
4-24 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Install the Refrigerant Lines
5. Tighten the nut no less than ¼ turn until resistance increases sharply and no further tightening
occurs. The metal o-ring will be crushed into the o-ring groove. Tighten each coupling to 54-80 Nm
(40-60 pound-foot).
NOTE: The Parker fittings are coupled and sealed based on mechanical displacement of the
threaded parts, which results in compression at the sealing surface. Torque values are pro-
vided for customers requiring a measurable value.
6. Go to the Installation Checklist Table 4-1 on page 4-2. Initial and date this task. Go to the next task
on the checklist.
Install Cajon VCR Couplings (Optional Fitting)
Female Nut
Gland
Silver Plated Stainless Steel Gasket
or Unplated Nickel Gasket
Sealing Surfaces
Gland
Male Nut
Figure 4-19: Cajon VCR Coupling (optional fitting)
1. Place a new gasket into the female nut.
2. Assemble the components and finger-tighten the coupling.
3. Use both wrenches to tighten each coupling no less than ¼ turn until resistance increases sharply
and no further tightening occurs, approximately 54-80 Nm (40-60 pound-foot).
NOTE: The Cajon fittings are coupled and sealed based on mechanical displacement of the
threaded parts, which results in compression at the sealing surface. Torque values are pro-
vided for customers requiring a measurable value.
4. Go to Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the checklist.
Brooks Automation
214072 Revision B 4-25
Installation Polycold Cryochiller
Route Condensate Drain Tube Installation and Operation Manual
Route Condensate Drain Tube
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools Standard hand tools
Material 5/16 inch ID tubing
Length is dependent on facility drain location
Condensate Pump Kit (optional)
1. Locate the condensate drain tube. It is visible from the base of the unit and is visible
when the front skirt and rear skirt are removed. See Figure 4-20.
2. Determine if the drain tube should be routed to the front or to the rear of the unit.
3. Be careful to not damage the fitting on the bottom of the drain pan while moving the hose to posi-
tion.
Support the drain pan fitting while carefully moving the drain hose to the desired side of the unit.
4. When the drain hose is in its final position, check the hose for kinks and adjust as required.
5. Route the tubing to a facility waste water drain or to the input line of a condensate pump.
External
Condensate
Drain Tube
Figure 4-20: Condensate Drain Tube
6. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Brooks Automation
4-26 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Check the Refrigerant Line and Cryosurface for Leaks
Check the Refrigerant Line and Cryosurface for Leaks
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tool or material Cylinder of refrigerant gas R-134a
Cylinder of dry nitrogen gas (very low dew point of -80 C) with a regulator
Service manifold gauge set with three hoses (manifold)
Electronic halogen leak detector with a leak sensitivity of at least 0.40 ounces
(11 g) per year
Leak detector soap
Inspection mirror
1/4 inch ratchet valve wrench
7/16 inch open-end wrench
9/16 inch open-end wrench
5/8 inch open-end wrench
15/16 inch open-end wrench
1 inch deep socket or open end or crow foot wrench
1 1/16 inch deep socket or open end wrench
1 5/16 inch deep socket or open end wrench
Adjustable wrenches as required
Reference Documents Service Procedure, Zero Line Loss, p/n 185307
Service Procedure, Evacuation-Recovery, p/n 185308
Service Procedure, Brazing Specifications, p/n 185305
Chemical Hazard
Failure to have a qualified refrigeration technician do all refrigera-
tion work could result in system damage or personal injury.
• Contact a qualified refrigeration technician to perform all refriger-
ant work.
About Leak Check
The leak gas used must be dry with a dew point of -80 C or less.
Helium leak checking the refrigerant line and cryosurface is an acceptable alternative to the procedure
specified below if helium leak check equipment and trained helium leak check operators are available.
If helium is used as a leak check medium, only use helium while the compressor is off and ensure that
the pressure in the line and cryosurface during this test does not exceed the lowest refrigerant pres-
Brooks Automation
214072 Revision B 4-27
Installation Polycold Cryochiller
Check the Refrigerant Line and Cryosurface for Leaks Installation and Operation Manual
sure. This is important to assure that helium does not migrate into and contaminate the refrigerant sys-
tem. When the system is off, the lowest pressure is the balance pressure.
During evacuation of the line and coil, after the leak check, it is recommended to purge the line with dry
nitrogen or dry argon that has a dew point of -80 C or less since it can be difficult to pump out pure
helium.
Be aware of false positives created by the armaflex insulation around the line set. The factory installed
tube insulation and flat insulation can produce false positives with some leak check sensors.
Refrigerant
Gas
R134a
Dry
Nitrogen
Gas
Figure 4-21: Leak Check - Add “Trace” Refrigerant
Leak Check Procedure
Refer to Figure 4-21 and Figure 4-22 for the following steps.
1. Make certain the valves on the manifold are closed.
2. Connect the manifold's suction (low pressure) hose to the evacuation valve inside the valve box.
See Figure 4-21.
3. Open the evacuation valve.
4. Connect the refrigerant cylinder to the center port of the manifold.
5. Open the suction valve on the manifold and pressurize the refrigerant line and cryosurface to
70-140 kPa (10-20 psig). This adds refrigerant trace gas to the system.
Brooks Automation
4-28 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Check the Refrigerant Line and Cryosurface for Leaks
6. When the refrigerant line is pressurized, close the suction valve and disconnect the refrigerant cyl-
inder.
NOTICE
Improper pressurization can damage refrigerant lines or system components.
Do not pressurize the refrigerant line and cryosurface above 3100 kPa (450 psig)
with the cryosurface attached to the system. The pressure relief valve may leak
if it is activated.
7. Connect the nitrogen cylinder to the center port of the manifold. See Figure 4-21.
8. Open the suction valve and increase the pressure in the refrigerant line and cryosurface to 1030
kPa (150 psig).
9. Close the valve on the nitrogen cylinder.
Refrigerant
Gas
R134a
Dry
Nitrogen
Gas
Figure 4-22: Leak Check - Pressurize with Nitrogen
10. Use a halogen leak detector to check each connection in the refrigerant circuits. This includes the
Parker UltraSeal compatible or Cajon VCR couplings, the Evacuation Valve, and all brazed joints.
The couplings have two small access holes on each nut to help find leaks. Cover the lower access
hole with a finger and put the sensor at the higher hole. See Figure 4-23.
NOTE: If there is a large leak and the source cannot be pinpointed without activating the leak
detector, open the manifold's suction valve until the pressure drops to about 345 kPa (50
psig). This should allow detection of the source of the leak.
Brooks Automation
214072 Revision B 4-29
Installation Polycold Cryochiller
Check the Refrigerant Line and Cryosurface for Leaks Installation and Operation Manual
Figure 4-23: Leak-Checking Couplings
Chemical Hazard
The blend of refrigerants used in the Polycold Cryochiller is non
flammable and non toxic. However, as with any gas, asphyxiation
could occur if concentrated refrigerant gas is inhaled.
• Service the Polycold Cryochiller in a well ventilated area.
• Never add refrigerant to a unit with a leak. Locate and repair any
leaks prior to adding refrigerant or re-charging.
11. If the pressure in the manifold has decreased below 1030 kPa (150 psig), use leak detector soap
and an inspection mirror to locate the source of the leak.
12. If a leak is found, correct the leak using one of the steps below and retest:
• To correct a leak on a Parker UltraSeal compatible or Cajon VCR coupling, follow the steps in
Correct a Leak in a Parker UltraSeal Compatible or Cajon VCR Coupling on page 4-31.
• To correct a a leak on a brazed joint or a valve, contact Brooks Service for assistance.
13. If no leaks are found, verify the manifold pressure is still 1030kPa (150 psig).
14. If the pressure in the manifold stays at 1030 kPa (150 psig), follow these steps:
a. Close the valves on the manifold.
b. Disconnect the equipment from the manifold, but leave the manifold connected to the evac-
uation valve on the refrigeration unit.
15. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Brooks Automation
4-30 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Check the Refrigerant Line and Cryosurface for Leaks
Correct a Leak in a Parker UltraSeal Compatible or Cajon VCR Coupling
1. Cover the lower access hole with a finger and apply leak detector soap to the higher
access hole. Observe the higher access hole for at least 2 minutes.
If a bubble forms, verify that the coupling is tightened to within specification.
2. Check for leak again.
• If the leak is repaired, return to the previous procedure.
• If the coupling still leaks, reassemble the coupling as follows:
a. Open the discharge valve on the manifold to release the gas in the refrigerant line and
cryosurface.
b. Perform the Zero Line Loss Procedure and then disassemble the coupling. See Appendix
G: Zero Line Loss Procedure on page 12-13.
c. Check the coupling's sealing surfaces to make sure they are not scratched or damaged.
d. Re-assemble the coupling using a new o-ring or gasket and following the instructions found
at Install Parker UltraSeal Compatible Couplings (Standard Fitting) on page 4-24 or Install
Cajon VCR Couplings (Optional Fitting) on page 4-25.
e. Leak check the coupling again.
• If the coupling still leaks, contact Brooks Automation Service.
• If the leak is repaired, return to the previous procedure.
3. Return to the Check Refrigerant Lines procedure.
Brooks Automation
214072 Revision B 4-31
Installation Polycold Cryochiller
Evacuate the Refrigerant Line and Cryosurface Installation and Operation Manual
Evacuate the Refrigerant Line and Cryosurface
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools Vacuum pump with a 1/4-inch SAE male flare connection that is capa-
ble of pumping down to at least 0.05 torr (6.5 Pa)
Thermistor or thermocouple type vacuum gauge (Granville-Phillips
Convectron works well for this purpose)
Service manifold gauge set with hoses (manifold)
1/4 inch ratchet valve wrench
7/16 inch open-end wrench
9/16 inch open-end wrench (important)
5/8 inch open-end wrench
15/16 inch open-end wrench
Adjustable wrenches as required
Coil Magnets (3) for single circuit, (6) for dual circuit
Materials Cylinder of dry nitrogen gas with a regulator
Chemical Hazard
Failure to have a qualified refrigeration technician do all refrigera-
tion work could result in personal injury or system damage.
• Have a qualified refrigeration technician do all refrigerant work.
1. Connect the vacuum pump, vacuum gauge, and service manifold. See Figure 4-24.
Figure 4-24: Cold Valve Box Setup to Evacuate Refrigerant Line and Cryosurface
Brooks Automation
4-32 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Evacuate the Refrigerant Line and Cryosurface
2. Open both valves on the service manifold.
3. On the following valves, remove the solenoid coils and place coil magnets on the valve stems:
See Figure 4-25, Figure 4-26, and Figure 4-27.
• Single Circuit:
VLV5 in the cold valve box
VLV6 in the warm valve assembly.
• Dual Circuit:
VLV5, VLV11 in the cold valve box
VLV6 and VLV12 in the warm valve assembly.
VLV5
Cool Ckt 1
VLV11
Cool Ckt 2
Figure 4-25: Cold Valve Box
Brooks Automation
214072 Revision B 4-33
Installation Polycold Cryochiller
Evacuate the Refrigerant Line and Cryosurface Installation and Operation Manual
Rear
Of Unit VLV6
Defrost Ckt 1
VLV12
Defrost Ckt 2
Front
Of Unit
Figure 4-26: Warm Valve Assembly
Figure 4-27: Coil Magnet on Solenoid Valve
4. Turn on the vacuum pump and evacuate the refrigerant line and cryosurface to 13Pa (0.1 torr).
5. Allow the vacuum pump to continue pumping for at least 30 minutes.
NOTE: The vacuum pump should evacuate the refrigerant line and cryosurface to 13Pa (0.1 torr)
within 30 minutes.
If not, there may be a leak which must be corrected.
Brooks Automation
4-34 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Evacuate the Refrigerant Line and Cryosurface
6. Close the evacuation valve while the
vacuum pump is still pumping.
Turn off the vacuum pump.
Carefully remove the hose from the
evacuation valve.
Recheck the tightness of the brass top
nut on the evacuation valve to prevent
leaking.
7. Reinstall the protective cap and flare
nut with bonnet onto the output port of
the evacuation valve. Torque to 13.6
to 20.3 Nm (10 - 15 lb-ft). See Figure
4-28.
8. Remove the magnets and reinstall the
solenoid coils on the valves. Figure 4-28: Install Cap and Flare Nut on Evacuation
Valve
NOTICE
Improper tightening of the refrigerant lines or caps may cause damage or leaks.
Always use correct size wrench
Always use two wrenches when connecting to or installing the refrigerant lines or
cap on the evacuation valve.
• Use one wrench to hold the valve nut.
• Use the other wrench to tighten the fitting or cap.
NOTICE
It is very important to re-install the protective cap and flare nut with bonnet onto
the evacuation valve to prevent refrigerant leaks.
9. Go to the Installation Checklist Table 4-1 on page 4-2. Initial and date this task. Go to the next task.
Brooks Automation
214072 Revision B 4-35
Installation Polycold Cryochiller
Connect the Refrigerant Line Thermocouples (Type T) Installation and Operation Manual
Connect the Refrigerant Line Thermocouples (Type T)
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools and materials: Torque wrench, 0.34Nm (3 lb-inch) range (optional)
Phillips screwdriver
Small straight blade screwdriver
Wire stripper, a thermal wire stripper is preferred
Small labels or tape
Each Polycold Cryochiller may have up to 20 type T thermocouples depending on configuration.
Table 4-3: Complete Thermocouple List for Unit with All Options
Thermo- Customer-
Description Note
couple Installed
TC1 Compressor Discharge
TC2 Refrigerant Liquid Line
TC3 C1 Return
TC4 Coldest Liquid
TC5 C2 Return Optional
TC6 Rapid Balance Pressure Check
TC7 Yes C1 Control (see note) Optional
TC8 Yes C2 Control (see note) Optional
TC9 Yes C1 Inlet
TC10 Yes C1 Outlet
TC11 Yes C2 Inlet Optional
TC12 Yes C2 Outlet Optional
TC13 C1 Feed
TC14 C2 Feed Optional
TC 15 Not Used
TC16 Buffer Line
TC17 Yes Custom 1 (customer use, no control functions) Optional
TC18 Yes Custom 2 (customer use, no control functions) Optional
TC19 Yes Custom 3 (customer use, no control functions) Optional
TC20 Yes Custom 4 (customer use, no control functions) Optional
Brooks Automation
4-36 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Connect the Refrigerant Line Thermocouples (Type T)
For all units:
• Several commands are available to get the individual thermocouple values by name.
• Each circuit has factory installed Thermocouples for the feed and return lines. Other Ther-
mocouples may be added as desired by the user for monitoring their process. Each cold
chuck should have a Thermocouple.
• Thermocouple junction must be either a commercially made junction or must be a soldered
or welded junction.
• Thermocouple junction must NOT be a simple twisted wire junction.
Additional Options available on some units:
• TC7 and TC8 are available as customer-installed temperature control thermocouples for
Cool and Defrost modes using Host command EXT_TC_ENABLE
NOTE: If the refrigerant line was made by someone other than Polycold, make sure the thermo-
couples are properly installed. Refer to Install the Refrigerant Lines on page 4-19.
Thermocouple Thermocouple
Terminal Block Wiring
Pass-Through
Figure 4-29: Location of Low Voltage Box and Thermocouple Terminals
1. Locate the low voltage box on the refrigeration unit and remove the terminal access
cover. See Figure 4-29.
2. Pass the thermocouple wires through the thermocouple wire pass-through.
To access the pass through, push in on the foam insulation at the left corner of the coolant sup-
ply-return connections and pass the wires behind the sheet metal front panel. Then, pass the wires
behind the interface panel and to the thermocouple terminal block.
3. Locate the external thermocouple terminal block in the low voltage box. See Figure 4-29
Brooks Automation
214072 Revision B 4-37
Installation Polycold Cryochiller
Connect the Refrigerant Line Thermocouples (Type T) Installation and Operation Manual
4. On the refrigerant line, locate the thermocouple wires labeled COIL IN and COIL OUT.
a. Fold a small piece of tape around each thermocouple wire next to its label.
b. Label the tape “Circuit 1” on the COIL IN and COIL OUT thermocouple wires coming from
the first refrigerant circuit.
c. Label the tape “Circuit 2” on the COIL IN and COIL OUT thermocouple wires coming from
the second refrigerant circuit.
5. Strip about 1/4 inch (6 mm) of insulation from the end of each thermocouple wire.
NOTICE
Do not nick the conductor. The wire may break at the nick from system vibration
and can result in damage to the equipment.
6. Attach the thermocouple wires to their designated locations. See Figure 4-30 and Table 4-3
• The blue-insulated copper wire must be attached to the positive (+) terminal.
• The red-insulated constantan wire must be attached to the negative (-) terminal
• Torque terminal screws to 0.34Nm (3 lb-in).
• Refer to the System Wiring Diagram provided with your system
Figure 4-30: Thermocouple Terminal Block
7. Minimum recommended Thermocouple usage is Coil In and Coil Out for each refrigerant circuit.
Cool plates should also have a Thermocouple.
Additional Thermocouples can be added by the user as desired.
If you are working on a single circuit Polycold Cryochiller, connect the Thermocouple wires as fol-
lows:
• Position # 9: COIL IN
• Position # 10: COIL OUT
Brooks Automation
4-38 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Preliminary Check of the Polycold Cryochiller
If you are working on a dual circuit. Polycold Cryochiller, connect the Thermocouple wires as fol-
lows:
• Position # 9: #1 Line COIL IN
• Position # 10: #1 Line COIL OUT
• Position # 11: #2 Line COIL IN
• Position # 12: #2 Line COIL OUT
8. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Preliminary Check of the Polycold Cryochiller
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools and materials No tools required
NOTICE
Do not open the isolation valves at this time or the unit may be damaged.
Follow the instructions that follow in proper sequence to avoid damage to the
equipment.
1. Make sure you have performed all of the tasks up to this point on the installation check-
list.
2. Perform the following tasks before opening the isolation valves on the refrigeration unit: Refer to
Figure 4-31
a. Check the Refrigerant Line and Cryosurface for Leaks
b. Evacuate the Refrigerant Line and Cryosurface
Brooks Automation
214072 Revision B 4-39
Installation Polycold Cryochiller
Preliminary Check of the Polycold Cryochiller Installation and Operation Manual
Circuit 1 Circuit 1
Feed Line Return Line
Circuit 2
Return Line
Circuit 2
Feed Line
VLV5
Cool Ckt 1 MV107
Evac Ckt 1
VLV11 *
Cool Ckt 2
MV101
MV102 Hot Gas Feed
Cold Gas Feed
MV103
Common
Return
Figure 4-31: Illustration of Cold Valve Box with Valve Names
* asterisk denotes optional item
Brooks Automation
4-40 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Insulate Exposed Refrigerant Tubes and Couplings
3. Open the cold box on the right top panel of the refrigeration unit and locate the red hand valves.
4. Locate the valves labeled as follows: See Figure 4-31.
• MV101 - Hot Gas Feed
• MV102 - Cold Gas Feed
• MV103 - Common Return
5. Turn each of these hand valves completely counter-clockwise to fully open each valve.
6. Turn each hand valve clockwise 1/4 turn from full open.
7. Wait 10 minutes for the pressure to equalize in the system.
The pressure may drop 35-70 kPa (5-10 psig) as the refrigerant mixture enters the refrigerant line
and cryosurface.
8. If the back side of the system is not accessible, dis-
regard this step. Pressure Gauge
If the back side of the system is accessible, locate
the pressure gauge and read the pressure value.
This is the Static Pressure. See Figure 4-32
Record the pressure reading in a maintenance log
for future reference.
9. Inspect the valve box cover to make sure the rub-
ber seals are intact.
10. Reinstall the valve box cover and securely screw it
into place, covering the hand valves. The gasket
should form a seal to keep out water vapor.
11. Start the cooling water. Figure 4-32: Pressure Gauge on
Back of Refrigeration Unit
12. Confirm the cooling water flow meets specifications
found in Cooling Water on page 3-6.
13. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Insulate Exposed Refrigerant Tubes and Couplings
Properly insulating the exposed tubes and couplings keeps them dry. Penetrating moisture adds heat
load to the cryopump and can cause corrosion or leaks.
Brooks Automation
214072 Revision B 4-41
Installation Polycold Cryochiller
Insulate Exposed Refrigerant Tubes and Couplings Installation and Operation Manual
Item Description
Electrical Category Type 1 – Equipment is fully de-energized
Tools Large pair of scissors or knife
Materials: Insulation materials shipped with unit
• Tubes of closed-cell pipe insulation
• Sheet of closed-cell pipe insulation
• Armaflex Insulation Tape
• Armstrong 520 adhesive - See warning below
Flammable Materials and Chemicals
Fumes from the adhesive Armstrong 520 are a source of ignition
and suffocation and may cause fire and serious injury or death.
• Make sure there is adequate ventilation and no ignition source
when using the Armstrong 520 adhesive.
• Read the label and follow the instructions on the container.
NOTICE
Armaflex tape is extremely difficult to remove and makes the feed-through nut
bind when unscrewed and may result in damage to the equipment.
• Do not get Armaflex tape or Armstrong 520 adhesive in the threads of the
feed-through.
Insulate exposed tubes between the refrigeration unit and the refrigerant line insulation:
Refer to Figure 4-33, Figure 4-34, and Figure 4-35
1. Cut the tubes of insulation so that they will fit snugly between the refrigeration unit and
the refrigerant line's insulation. Cut each tube of insulation lengthwise.
2. Fit a smaller diameter tube of insulation around each exposed tube. Apply adhesive to the length-
wise slits in the insulation. Close the lengthwise slits to form an air-tight seal.
3. Fit the larger diameter tubes of insulation around the smaller diameter tubes of insulation. Seal
each lengthwise slit shut with adhesive. (It is best to stagger the lengthwise seams.)
4. Cover the insulated refrigerant line bundle with a spiral wrap of Armaflex Insulation Tape. Overlap
the previous wrap of insulation tape by at least 1 inch to ensure there are no gaps.
Alternately, cut sheet insulation the same length as the tubes of insulation and wrap the sheet once
Brooks Automation
4-42 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Insulate Exposed Refrigerant Tubes and Couplings
around the refrigerant line bundle, allowing the sheet to overlap 2-3 inches (50-75 mm). Put adhe-
sive on the last 1-1.5 inches (25-40 mm) of the overlapping sheet to secure it in place.
5. Seal both ends of the refrigerant line bundle with tape or insulation tape. Secure the insulation
around the refrigerant line bundle to the refrigerant line's insulation and to the unit's panel. Flare the
tape so that it connects the insulation directly to the Polycold Cryochiller panel.
6. Use the tape or sheet Insulation to insulate all remaining exposed tubes and refrigerant compo-
nents between the refrigerant line insulation and the feed-through.
Figure 4-33: Insulating Exposed Tubes and Couplings
Brooks Automation
214072 Revision B 4-43
Installation Polycold Cryochiller
Insulate Exposed Refrigerant Tubes and Couplings Installation and Operation Manual
Small Diameter
Circuit 1 Insulation on
Refrigerant Refrigerant Line
Lines
Large Diameter
Circuit 2 Insulation on
Refrigerant Refrigerant Line
Lines (with seams offset)
(optional)
Outer Wrap of
Sheet Insulation or
Armaflex Insulation Tape
on Refrigerant Line Bundle
Figure 4-34: Cutaway View A-A Showing Sheet Insulation on Refrigerant Lines at Polycold Cryochiller
Small Diameter
Insulation on
Refrigerant Line
Outer Wrap of
Sheet Insulation or
Armaflex Insulation Tape
on Refrigerant Line Bundle
Figure 4-35: Cutaway View B-B Showing Sheet Insulation on Refrigerant Lines to Cryosurface
7. Cover the exposed tubes between the pre-insulated refrigerant line and the feed-through with a spi-
ral wrap of Armaflex Insulation Tape. Overlap the previous wrap of insulation tape by at least 1 inch
to ensure there are no gaps.
If using sheet insulation, fit the sheet of insulation onto the exposed tubes. Wrap the insulation
around the exposed tubes three times. Put adhesive on the last 1-1.5 inches (25-40 mm) of the
overlapping sheet to secure it in place.
Seal both ends of the insulation with tape to secure the insulation on to the insulation on the refrig-
erant lines and to the feed-through. Do not put the tape closer than 1-2 inches (25-50 mm) to the
threads on the feed-through.
Brooks Automation
4-44 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Insulate Exposed Refrigerant Tubes and Couplings
Figure 4-36: View of Armaflex Insulating Tape on Refrigerant Line Bundle on Polycold Cryochiller
8. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Brooks Automation
214072 Revision B 4-45
Installation Polycold Cryochiller
Startup and Test Installation and Operation Manual
Startup and Test
Item Description
Electrical Category Type 2 - Equipment is energized. Energized circuits are covered or insulated
Tools and materials: No tools required
The Startup and Test section requires that the Polycold Cryochiller is fully installed and that the vacuum
chamber is operational.
1. Confirm that cooling water is on and flowing properly through the system.
2. Turn on the electrical power source for the refrigeration unit.
3. Move CB-1 to the ON position. See Figure 4-37.
4. Move CB-2 to the ON position. See Figure 4-38
Figure 4-37: Move CB-1 to ON Figure 4-38: Move CB-2 to ON
5. Wait for the system to boot up. Boot up takes less than one minute.
When boot up is complete, the system HMI screen displays information.
6. On systems equipped with the EMO, twist the EMO switch clockwise to confirm that it is in the Out
or disengaged position. See Figure 4-39
7. Move the compressor On/Off switch to the ON position. See Figure 4-39
The unit should go to the Standby mode. See Figure 4-40.
Brooks Automation
4-46 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Startup and Test
Figure 4-39: Set Compressor Switch to ON Figure 4-40: Standby Mode
(Optional EMO shown)
8. Let the unit stay in the Standby mode for 30 minutes for the "Polycold Stack" to reach operating
temperature. The Polycold Stack is the heat exchangers and other components that are encased
in insulating foam
9. Evacuate the vacuum chamber where the cryosurface is installed to at least 0.01 torr (1.33 Pa)
10. After the 30 minutes of Standby, scroll through the menu
to check the temperature and pressure parameters. See
Figure 4-41
• Circuit feed, return, coil in, and coil out temperatures
should be positive values.
• Coldest liquid temperatures should be below -80C.
11. Record the temperature and pressure parameter data.
12. Select Cool. See Figure 4-42.
• Wait 5 minutes if the refrigeration line plus coil is 6
meters (20 feet) or less.
• Wait 10 minutes if the refrigerant line plus coil is lon- Figure 4-41: Check Parameters
ger than 6 meters (20 feet).
• When pressed, the Cool LED blinks slowly.
13. Check the coil inlet and coil outlet temperatures to make
sure that they reach the desired temperatures.
14. Select Defrost. The unit automatically goes to Standby
when Defrost is complete.
15. Allow the unit to remain in Standby for 5 minutes.
16. Repeat the Cool, Defrost, and Standby cycle two or
three times.
17. For systems with dual refrigerant circuits, repeat steps 9 Figure 4-42: Select Cool Mode
through 16 for channel 2.
18. Go to the Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the check-
list.
Brooks Automation
214072 Revision B 4-47
Installation Polycold Cryochiller
Evaluate the Polycold Cryochiller / Place Into Service Installation and Operation Manual
Evaluate the Polycold Cryochiller / Place Into Service
Item Description
Electrical Category Type 2 - Equipment is energized. Energized circuits are covered or insulated
Tools and materials: No tools required
This section requires that the Polycold Cryochiller Startup and Test procedure is complete and the unit
is still running in Standby.
Unless you are installing a remote interface, this is the last task for installing a Polycold Cryochiller.
Electric Shock
The compressor electrical box contains hazardous voltages. Fail-
ure to have a qualified electrician do all electrical work could result
in serious injury or death.
• Do not reach inside the unit with power applied.
• Have a qualified electrician perform all electrical work.
Extreme Temperatures
The compressor's heads and discharge line may be hot when
operating. Contact with the hot surface may result in minor or mod-
erate injury.
• Do not reach inside the compressor compartment when the unit
is operating.
• Do not touch the compressor's heads or discharge lines.
1. With the Polycold Cryochiller in Standby, make sure the minimum water flow rate is
adequate for the temperature of the water. See Cooling Water on page 3-6.
2. Select LOCAL.
3. Listen to the compressor. It should run continuously without cycling or turning off.
4. If the back side of the system is not accessible, disregard this step.
If the back side of the system is accessible, remove the unit's lower rear panel and locate the oil
sight glass on the body of the compressor. Oil level should be 1/8 to 1/2 full on a compressor that
has been running for at least 60 minutes. Preferred level is 1/8 full. See Figure 4-43.
Record the compressor oil level after the compressor has run for at least 60 minutes.
Brooks Automation
4-48 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Evaluate the Polycold Cryochiller / Place Into Service
Oil Level
Sight Glass
Figure 4-43: Compressor Oil Level Sight Glass
5. Check the direction of the flow of the cooling water.
• The left water line is the water OUT or drain line.
• The right water line is the water IN or supply line.
• The OUT line should be warmer than the IN line.
• If the OUT line is cooler than the IN line, then turn off the unit, disconnect the water lines, and
connect the supply and drain lines to the proper ports.
6. Record the pressures and temperatures in Table 4-4.
Table 4-4: Cryochiller Pressures and Temperatures in Standby
Acceptable Range Acceptable Range
Item for for Your Measurements
MaxCool 4000H MaxCool 2500L
SUCTION 21 to 345 kPa 21 to 345 kPa
PRESSURE (3 to 50 psig) (3 to 50 psig) _______ kPa (psig)
DISCHARGE 689 to 2068 kPa 689 to 2068 kPa
PRESSURE (100 to 300 psig) (100 to 300 psig) _______kPa (psig)
DISCHARGE LINE 80 to 125°C 80 to 125°C
(TC # 1) __________°C
LIQUID LINE 15 to 38°C 15 to 38°C
(TC # 2) __________°C
COLDEST LIQUID -120 to -155°C -130 to -155°C
TEMPERATURE __________°C
(TC # 4)
7. Evacuate the vacuum chamber where the cryosurface is installed to at least 0.01 torr (1.33 Pa).
8. Select Cool and wait 30 minutes.
NOTE: If a dual circuit system, select Cool for both refrigerant circuits.
Brooks Automation
214072 Revision B 4-49
Installation Polycold Cryochiller
Evaluate the Polycold Cryochiller / Place Into Service Installation and Operation Manual
9. Check the outlet temperature of the cooling water. The drain line (OUT) should be 16 to 41°C (60
to 105°F) If not, adjust the water flow to attain a temperature in this range.
10. If there is any ice or water on the refrigerant line, turn off the unit and remove the ice or water. Apply
additional insulation at the points where ice was formed or another complete layer of insulation if
the lines were icy. Re-evaluate the cryopump starting at Step 1 of this section.
11. Record the pressures and temperatures in Table 4-5.
Table 4-5: Cryochiller Pressures and Temperatures in Cool Mode
Acceptable Range Acceptable Range
Your
Item for for
Measurements
MaxCool 4000H MaxCool 2500L
SUCTION 21 to 414 kPa 21 to 414 kPa
PRESSURE (3 to 60 psig) (3 to 60 psig) _______ kPa (psig)
DISCHARGE 689 to 2827 kPa 689 to 2827 kPa
PRESSURE (100 to 410 psig) (100 to 410 psig) ________kPa (psig)
DISCHARGE LINE 80 to 128 °C 80 to 128 °C
(TC # 1) __________°C
LIQUID LINE 15 to 41°C 15 to 41°C
(TC # 2) __________°C
COLDEST LIQUID -80 to -150 °C -100 to -155 °C
TEMPERATURE __________°C
(TC # 4)
COIL IN -96 to -145 °C -118 to -155 °C
TEMPERATURE (application based) (application based) __________°C
COIL OUT -80 to -145 °C -102 to -155 °C
TEMPERATURE (application based) (application based) __________°C
MAXIMUM 20 °C 20 °C
COIL IN -COIL OUT __________°C
DIFFERENCE
12. Select Defrost.
NOTE: If a dual circuit system, select Defrost for both refrigerant circuits.
13. Record the time it takes for the cryosurface to defrost. Actual Defrost Time:________ minutes
When Defrost completes, the unit automatically switches to Standby. Default temperature is 20 C.
14. Open the vacuum chamber. The cryosurface should be dry and at room temperature or warmer.
15. Recheck the balance pressure, see Table 3-10, and cooling water temperature, see Table 3-6, to
verify that the Polycold Cryochiller is operating within specifications. Check that TC8, and TC10 if
a dual circuit, are at or near 20C.
16. Record all measurements taken in this task in a maintenance log for future use as a baseline.
17. Go to Installation Checklist Table 4-1. Initial and date this task. Go to the next task on the checklist.
Brooks Automation
4-50 214072 Revision B
Polycold Cryochiller Installation
Installation and Operation Manual Install Seismic Restraints
Install Seismic Restraints
Item Description
Electrical Category Type 2 - Equipment is energized. Energized circuits are covered or insulated
Tools and materials: Seismic Restraint Brackets - Customer Supplied.
Mounting tools and hardware - Customer Supplied, as required.
The Cryochiller is provided with four (4) seismic anchor points for mounting seismic restraints. Two (2)
anchor points are located on the left and on the right side of the frame. See Table 4-6 for dimensions.
Seismic bracket design and construction is the responsibility of the facility where the Cryochiller is
installed.
Table 4-6: Seismic Bracket Mount Specifications
Item Description
Mounting Hole Size (2) 9/16 inch (14.28mm) thru holes on the left side and on the
right side of the bottom frame
Mounting Hole Height With casters - 4 inches above floor
Mounting Hole Separation Without casters - 1 inch above floor / bottom of frame.
23.5 inches between centers
Fasteners on System Up to 1/2 inch (M12) hardware including backing flat washers
against the inside Cryochiller frame.
Fasteners on Floor As specified by facility and local regulations
Working Load 1800 pounds or greater to comply with SEMI S2
1. Confirm that the Cryochiller is in its final position and adequate access for operation
and service is provided.
2. Secure the seismic brackets to the Cryochiller using 1/2 inch (12mm) hardware. Use flat washers
for backing against the inside frame. Use lock washers as appropriate.
3. Secure the seismic brackets to the floor using appropriate hardware as required by the bracket
design and facility or local regulations.
4. Tighten all hardware to appropriate torque specifications.
5. Go to the Installation Checklist Table 4-1. Initial and date this task.
Brooks Automation
214072 Revision B 4-51
Installation Polycold Cryochiller
Install Seismic Restraints Installation and Operation Manual
This Page Intentionally Left Blank
Brooks Automation
4-52 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
5 Interfacing
Interfacing refers to the methods for communication with or control of the Polycold Cryochiller.
General Interface Information
The Polycold Cryochiller interfaces with many different communication and control protocols. Actual
available interfaces is dependent on the model. The available interface options are as follows:
• RS-232 (standard)
• Gauge Relay (standard)
• Human Machine Interface (HMI) (standard)
• Ethernet - Host and Service
• Profibus
• DeviceNet
• 24V DI/DO Remote
All interfaces either connect to external terminals on the Remote Interface Panel or pass through the
panel and connect on the panel on the top of the Low Voltage Box. The connections that are available
on each unit depend on the communications options ordered with that unit.
Low Voltage Box
Interface Connection
Panel
Remote Interface
Panel
Figure 5-1: Interface Communication Connections
Brooks Automation
214072 Revision B 5-1
Interfacing Polycold Cryochiller
RS-232 Interface Installation and Operation Manual
General Interface Rules
For information on commands, see Chapter 7: Host Commands.
• Only one interface can be in “Control” at a time
• “Set” commands can only be executed by the interface that is in “Control”.
• “Get” commands can be executed by any interface at any time if the security level is satisfied.
See Security Levels on page 7-7.
• Interface control is set by Ethernet or RS-232 using the command
SYSTEM_CONTROL_MODE or by the HMI.
• The system is set to Local mode, or HMI control, when the Remote key is pressed when the
system is in remote mode.
• The default control mode becomes the control interface when the Remote key is pressed.
• The Remote LED is on when in Remote mode and off when in Local mode.
• The system is set to the default “Control” mode when the system boots or when the Remote
key is pressed when the system is in local mode.
• The default “Control” interface can be set by the command SYSTEM_CONTROL_MODE_DEF
or by the HMI.
RS-232 Interface
RS-232 Interface is standard on all models of Polycold Cryochiller.
Port DB9 Female connection on Communications Panel
Cable Standard RS-232 Null Modem cable with 9-pin D male connector
Communication Fixed Settings
Settings 9600 baud, 7 data, even parity, 1 stop bit, no hardware flow control
Protocol EIA-232-E
RS-232
Connection
Brooks Automation
5-2 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual Gauge Relay (J4)
Gauge Relay (J4)
The Gauge Relay connection provides external control to place each refrigerant circuit into Cool Mode.
Item Description
J4 Port 4-pin Connector (female pins)
Cable Connector 4-pin Cable Connector (male pins) (Amp CPC-11 - 206429-1)
Cable Terminal Pins (4) crimp-style male pins for 16 to 18AWG wire size.
Cable Size 20 - 24 AWG
Input Non-polar fully isolated 24VAC or 24VDC input signals
Circuit 1 Control Pins 1 and 2
Circuit 2 Control Pins 3 and 4 (Only on units with full Circuit 2 control)
When the refrigerant circuit is in Standby mode and the Gauge Relay is enabled and the appropriate
Gauge Relay contact pair is provided a 24V AC/DC (-25%/+17%) 10MA input voltage across a Gauge
Relay pin pair, the selected refrigerant circuit goes into the current default Cool mode.
Example: A Granville-Phillips (G-P) Mini-Convectron® Gauge is used to control circuit 1. This gauge
has a pair of Process Setpoint Relay contacts that close when the gauge detects the setpoint pressure.
• One side of the relay contacts on the
gauge is connected to a 24V power
source. Gauge
Relay
• The other side of the relay contacts on Connection
the gauge is connected to either pin 1
or pin 2 of the Polycold Cryochiller
Gauge Relay input.
• Common for the 24V power source is
connected to the remaining pin 2 or pin
1 of the Polycold Cryochiller Gauge
Relay input.
When the G-P gauge detects that the process
has reached the programmed set point vac-
uum level, the G-P gauge contacts close and
the 24V is applied across Gauge Relay input
pins 1 and 2. The Polycold Cryochiller
responds by setting refrigerant circuit 1 to the
current default Cool mode.
Figure 5-3: Gauge Relay Connection
See Gauge Relay Kit in Optional Parts on page
11-3 for the kit part number.
See External Vacuum Control on page 8-4.
Brooks Automation
214072 Revision B 5-3
Interfacing Polycold Cryochiller
Human Machine Interface - HMI Installation and Operation Manual
Human Machine Interface - HMI
The HMI consists of a 4-line display and a keypad for navigation and selection.
Navigation Keys
Use Navigation keys to select the display
menus.
• Use Arrow keys to move the cur-
sor up and down to scroll through
screen menus
• Use Enter key to select the high-
lighted item.
• Use Arrow keys to increase or
decrease the selected screen
value.
• Use Enter key to increment
through the characters of a dis-
played value.
• Use Enter key to save the value
after the incrementing past the last
character.
Cool/Standby/Heat Keys
Press the Cool, Heat, or Standby mode
keys to set the mode for each circuit.
The default mode for Cool and Heat mode
set by the Cool and Heat keys is set by
OPERATING_MODE_DEF_COOL and Figure 5-4: HMI Display and Keyboard
OPERATING_MODE_DEF_DEFROST or
by the HMI input.
Each Mode has a green LED which is illuminated when the mode is active.
Remote Key
Remote key allows Remote / Local interface control
• When Remote LED is lit, the remote interface is active.
Remote interface is set by the SYSTEM_CONTROL_MODE_DEF command.
• When Remote LED is NOT lit, the controlling interface is the HMI Local interface keypad.
• HMI Local must be active to change modes and change values using the keypad and the HMI
display.
• HMI Local is not required to be active in order to browse the HMI screens.
OK LED
• If OK LED is lit, indicates compressor contactor is closed. (compressor on)
• If OK LED is not lit, indicates compressor contactor is not closed.
Brooks Automation
5-4 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual HMI Display
Fault LEDs
Fault LED (amber and red) indicates a warning or fault has occurred.
Red fault LED is reserved for High Pressure Faults
Some Faults cause the compressor contactor to open (Compressor OFF)
Reset Button
Reset button can perform 2 functions.
• Acknowledges Alarms / Faults the same as the RESET_ALARMS command.
– If the alarm / fault condition still exists, then the alarm / fault does not clear.
– If the alarm / fault is acknowledged and cleared, the Amber / Red Fault LED turns off.
• Turns on Compressor if compressor was turned OFF by an alarm / fault condition and the com-
pressor switch is in the ON position (contactor closed)
HMI Display
Use Navigation keys to move to each display menu and make selections.
• HMI display is 4 rows with 20 characters per row.
• Use Arrow keys to scroll cursor up and down through current screen selections
• Use Enter key to select highlighted item.
• Pressing an Arrow key to move the cursor past the end of a nested display returns you to the
next higher display.
• If highlighted item has an right arrow (>), then Enter will bring you to a nested sub-menu.
• If highlighted item does not have a right arrow (>), then Enter toggles the selection or allows
data entry using the up and down arrows.
HMI Display
• Press the up and down arrow key to advance to additional items on the same menu.
• Asterisk at the end of a menu item (*) indicates the current setting.
• Up and down arrows in the display indicate more display selections are available. Use the up
and down arrows to advance up and down in the display.
• Right arrow (>) at the end of a menu line indicates this entry has additional nested pages. Use
the Enter key to display the nested menu.
• After a period of inactivity, the display selection returns to the previous display until it reaches
the Home Screen Display. The period of inactivity is configurable.
• Selecting a nested display opens the nested display at the selection that was last displayed.
• Numeric values in the display may be either a reported value or a set point value.
• Reported display values cannot be changed.
• Set point display values may be changed by using the Enter key to open the value for setting
and then using the up and down arrows to change the value of each digit and using the Enter
key to move to next digit and then use the Enter at the last digit to store the value.
• Display illustrations in this chapter show the full list of screen options for each nested display.
Brooks Automation
214072 Revision B 5-5
Interfacing Polycold Cryochiller
HMI Display Installation and Operation Manual
HMI Home Screen Display
Home Screen is the default HMI display that is displayed at initial power up and after a configurable
internal 30 seconds (default) of HMI keyboard inactivity at each of the nested menus.
The 4-line display shows the mode for each circuit plus user programmable information as shown in the
tables below.
LN2, LN3 and LN4 values are programmed from the appropriate HOME SCREEN LN(number) MEAS
selection in the MONITOR CONFIG display under CONFIGURATION display. Selecting the blank
selection for the LN value leaves that line blank.
Table 5-1: Default HMI Home Menu for Single Circuit
Single Circuit Home Screen Description
C1 (mode) Static display of the specific mode of Circuit 1
1 user selected value from LN2 list Static display of selected LN2 value
1 user selected value from LN3 list Static display of selected LN3 value
Up to 8 user selected values from Static display if only 1 LN4 value is selected.
LN4 list
Scrolling display of all selected LN4 values if 2 or more
values are selected.
Table 5-2: Default HMI Home Menu for Dual Circuit Units
Dual Circuit Home Screen Description
C1 (mode) Static display of the specific mode of Circuit 1
C2 (mode) Static display of the specific mode of Circuit 2
On Base models, this may only read “Cool”
1 user selected value from LN3 list Static display of selected LN3 value
Up to 8 user selected values from Static display if only 1LN4 value is selected.
LN4 list
Scrolling display of all selected LN4 values if 2 or more
values are selected.
Brooks Automation
5-6 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual HMI Display
HMI Top Menu
CKT 1 MODE
C1 MODE
C2 MODE
COOL
MONITORED TEMP XXX.X
STANDBY*
USER MONITORED XXX.X
DEFROST
TOP MENU CKT 2 MODE
CKT1 MODE> COOL
CKT2 MODE> STANDBY*
COMPRESSOR ON/OFF> DEFROST
SYSTEM STATUS>
FAULT STATE>
CONFIGURATION>
SERVICE MENU> COMPRESSOR ON/OFF
COMPRESSOR ON*
COMPRESSOR OFF
Go to
SYSTEM STATUS
System Status
SHOW ALL> on page 5-8
CRYO COOLER>
CKT1 STATUS>
CKT2 STATUS>
STACK STATE SCREEN>
FAULT STATE
NO FAULT
CONFIGURATION Go to
Configuration
CONTROL CONFIG>
MONITOR CONFIG>
Page 1 on page
SET COMM PARAMS> 5-9
SET PRESSURE UNITS>
DATE XX-XX-XXXX
TIME XX:XX:XX
SERVICE MENU Go to
S/N XXXXXXXXX
Basic Service
M/N XXXXXXXXX on page 5-13
SW VER XX.XX.XX.XX
DSP VER XX.XX.XX.XX
CPRS HRS XX
LAST RCHG
AUTHORIZATION CODE
Brooks Automation
214072 Revision B 5-7
Interfacing Polycold Cryochiller
HMI Display Installation and Operation Manual
System Status
From
HMI Top Menu
On Page 5-8
Brooks Automation
5-8 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual HMI Display
Configuration Page 1
From
HMI Top
Menu on
page 5-7
See Also
Configuration
Page 2 on page
5-10
CONTROL CONFIG
LOCAL / REMOTE
CONTROL PARAMETERS>
SET CKT1 COOL MODE>
SET CKT1 DEFR MODE>
SET CKT2 COOL MODE>
SET CKT2 DEFR MODE>
LOCAL/REMOTE CONTROL PARAMETERS
SET CKT1 COOL MODE
SET LOCAL MODE* SHOW ALL
CRYO COOLER PARAMS COOL
SET REMOTE MODE
CKT1 PARAMETERS> COOL RAMP CONTROL
DEF REMOTE MODE>
CKT2 PARAMETERS> COOL TEMP CONTROL
SERV MODE PARAMS> COOL RMP+TMP CNTL
DEF REMOTE MODE Go to
LEGACY REMOTE Control Param- SET CKT1 DEFR MODE
RS 232* SET CKT2 COOL MODE SET CKT2 DEFR MODE
eters on page
ETHERNET DEFROST
DEVICENET 5-11 HEAT TEMP CONTROL
COOL DEFROST
PROFIBUS COOL RAMP CONTROL HEAT TEMP CONTROL
DEFROST RAMP CNTL DFR RAMP CONTROL
WEB GUI COOL TEMP CONTROL
DFR RMP+TEMP CNTL DFR RMP+TEMP CNTL
COOL RMP+TMP CNTL
HEAT HEAT
Brooks Automation
214072 Revision B 5-9
Interfacing Polycold Cryochiller
HMI Display Installation and Operation Manual
Configuration Page 2
From
HMI Top Menu
on page 5-7
See Also
Configuration
Go to
Set Comm
Parameters on
page 5-12
Brooks Automation
5-10 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual HMI Display
Control Parameters
From
Configuration
Page 1 on
page 5-9
CRYOCOOLER PARAMS SERV MODE PARAMS
CKT 1 PARAMETERS CKT 2 PARAMETERS
SHOW ALL
FREEZEOUT STK WARM ST PT
C1 COLDEST LQ TMP C2 COLDEST LQ TMP
C1 COLDEST LQ TMP BUFF V START BUFF MIN OPEN
C1 EXT DEFR DB C2 EXT DEFR DB
C2 COLDEST LQ TMP
C1 COOL ST PT C2 COOL ST PT
C1 EXT DEFR DB
C1 AUX COOL OPEN C2 AUX COOL OPEN
C2 EXT DEFR DB
C1 AUX COOL SHUT C2 AUX COOL SHUT
FREEZEOUT
CI DEFR COMPLT C2 DEFR COMPLT
BUFF V START
C1 BYPASS TMP C2 BYPASS TMP
C1 COOL ST PT
C1 COOL RAMP LMT C2 COOL RAMP LMT
C2 COOL ST PT
C1 DEFR RAMP LMT C2 DEFR RAMP LMT
C1 AUX COOL OPEN
C2 AUX COOL OPEN
C1 AUX COOL SHUT
C2 AUX COOL SHUT
STK WARM ST PT
C1 DEFR COMPLT
C2 DEFR COMPLT
C1 BYPASS TMP
C2 BYPASS TMP
BUFF MIN OPEN
C1 COOL RAMP LMT
C2 COOL RAMP LMT
C1 DEFR RAMP LMT
C2 DEFR RAMP LMT
Brooks Automation
214072 Revision B 5-11
Interfacing Polycold Cryochiller
HMI Display Installation and Operation Manual
Set Comm Parameters
From
Configuration
Page 2 on
page 5-10
ETHERNET HOST LEGACY REMOTE DEVICENET PROFIBUS
MANUAL> COMP SIGNAL LOGIC > COMM SPEED> COMM SPEED XXX
INFO> RMT SIGNAL LOGIC > MAC ID> ADDRESS>
OP MODE LOGIC >
COMM SPEED MAC ID PROFIBUS
MANUAL INFO
125K MANUAL XX ADDRESS XXX
IP ADDRESS IP ADDRESS 250K
XXX.XXX.XXX.XXX XXX.XXX.XXX.XXX 500K
DEFAULT GATEWAY DEFAULT GATEWAY
XXX.XXX.XXX.XXX XXX.XXX.XXX.XXX
NETMASK NETMASK
XXX.XXX.XXX.XXX XXX.XXX.XXX.XXX
MAC ID
XX-XX-XX-XX-XX-XX
COMP SIGNAL LOGIC RMT SIGNAL LOGIC OP MODE LOGIC
COMP CTRL ON WHEN COMP OFF COOL DEFR-STANDBY
NO COMP CTRL OFF WHEN COMP OFF COOL DEFR-COOL
Brooks Automation
5-12 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual HMI Display
Basic Service
From
HMI Top Menu
on page 5-7
SERVICE MENU
S/N XXXXX
M/N XXXXXXXXXX
SW VER XX.XX.XX.XX
DSP VER XX.XX.XX.XX
CPRS HRS XX
LAST RCHG NONE
AUTHORIZATION CODE>
AUTHORIZATION CODE
0.*.*.*.*.*
Go to
Service
Manual
Brooks Automation
214072 Revision B 5-13
Interfacing Polycold Cryochiller
Ethernet Installation and Operation Manual
Ethernet
Host and Service Ethernet communication is an available option on some packages. Ethernet connec-
tion requires specific protocols for setting IP and Mask addresses. Set the Cryochiller Ethernet settings
using the HMI - Configuration - Set Comm Params - Ethernet menus. Set PC settings as stated below.
The Cryochiller is a non DHCP connection. The host or service PC will not automatically set the IP
address. If the IP address is changed, a new connection using the new IP address must be made.
Port Host or Service port RJ45 on the Communications Panel
Cable Crossover CAT5 / 6 cable with RJ45 connector
Standard CAT5 / 6 is OK if computer supports auto crossover.
IP Address (nnn.nnn.nnn.nnn) First 3 fields same as Cryochiller.
4th field must be different
Host command IP_ADDRESS
HMI “Set Comm Params - Ethernet Host”
Network Mask (nnn.nnn.nnn.nnn) Same mask as Cryochiller - recommended
(Subnet Mask) Host command NETWORK_MASK
(Subnet) HMI “Set Comm Params - Ethernet Host”
Default Gateway (nnn.nnn.nnn.nnn) May be left blank or all zeros
Host command DEFAULT_GATEWAY
HMI “Set Comm Params - Ethernet Host”
Speed 10/100 Mbps
Protocol IEEE 802.3 10Base-T, IEEE 802.3u 100Base-TX
Ethernet
Host Ethernet
Connection Service
Connection
Figure 5-5: Ethernet Host and Ser-
Brooks Automation
5-14 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual Profibus
Profibus
Profibus communication is an available option. Refer to Profibus Interface User Manual, p/n 200989.
Profibus is a communication protocol designed for controlling process equipment. It uses its own hard-
ware and software command set to retrieve system data and to control some functions such as Mode
selection and turning the compressor on and off.
Port Standard ProfiBus DB9 connector on top of low voltage box
Route through pass-through on Communications Panel
Cable Standard ProfiBus DB9 Cable
“Slave ID” 1-125
Address Host command PROFIBUS_PARAMS,ADDRESS
HMI “Set Comm Params”
Speed 9.6k, 19.2K, 45.45K, 93.75, 187.5K, 500K, 1.5M, 3M, 6M, 12M
Set by: ProfiBus master controller
Read by:
Host command PROFIBUS_PARAMS,SPEED
HMI “Set Comm Params”
Configuration Profibus DP-V0 Slave
Use appropriate GSD file to configure ProfiBus on host system
Profibus
Pass-Through
Profibus
Connection
in Center of
LV Top Panel
Figure 5-6: Profibus Pass-Through and Low Voltage Box Top Panel Connection
Brooks Automation
214072 Revision B 5-15
Interfacing Polycold Cryochiller
DeviceNet Installation and Operation Manual
DeviceNet
DeviceNet communication is an available option. Refer to DeviceNet Interface User Manual, p/n
213645.
DeviceNet is a communication protocol designed to interconnect control devices for data exchange. It
uses its own hardware and software command set to retrieve system data and has the ability to control
some functions such as Mode selection and turning the compressor on and off.
Port Connects to a standard microsealed DeviceNet connector on the
Communications Panel
Cable Standard DeviceNet 5-pin microsealed cable
Mac ID (0-63)
Host command DEVICENET_PARAMS
HMI “Set Comm Params”
Speed (125, 250, 500 Kbps)
Host command DEVICENET_PARAMS
HMI “Set Comm Params”
Protocol Common industrial protocol (CIP), ODVA DeviceNet specification
DeviceNet
Connection
Figure 5-7: DeviceNet Communication Connection
Brooks Automation
5-16 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual 24V DI/DO Remote Interface
24V DI/DO Remote Interface
The optional 24V DI/DO interface connection allows for direct wiring for inputs to and outputs from the
Polycold Cryochiller similar to earlier PFC models.
The 24V DI/DO may be Isolated or Non-Isolated. Both isolated and non-isolated can control Single Cir-
cuit or Dual Circuit systems. See System Operational State Commands on page 7-16.
24V DI/DO Remote pins are either incoming commands or outgoing data.
• Incoming command lines carry control signals from the remote user to the Polycold Cryochiller.
• Incoming command lines are referred to as “Operate”.
• Outgoing data information lines send data from the Polycold Cryochiller to the remote user.
• Output data lines are either active or inactive.
• MaxCool Cryochiller Remote provides 2 set point relays instead of optional on the PFC.
• MaxCool Cryochiller Remote provides 1.2A maximum to power external devices.
• MaxCool Cryochiller Remote Interface does not support outgoing analog temperature signals.
• The Indicate Remote signal on the PFC goes away when in Remote mode when the compres-
sor is off. On the MaxCool Cryochiller, this signal stays on.
• This behavior is configurable in v1.4.0.3 and above by command
LEGACY_REMOTE,COMP_SIGNAL_LOGIC or from HMI -> Top Menu -> Configuration ->
Set Comm Params -> Legacy Remote -> Comp Signal Logic.
• Default behavior in v1.4.0.3 is PFC backward compatible when v1.4.0.3 is installed. Users
will see a change from the previous MaxCool behavior. In v1.4.0.3, jumping Pins 1/2 is not
necessary as this function is controlled by software.
• Remote compressor on/off is supported by the MaxCool using pins 1 and 2.
• Connect a switch or relay contact set to pins 1 and 2 to remotely control the compressor.
• Connect a jumper between pins 1 and 2 to bypass the remote compressor control.
• Customers who used J11 with a PFC unit must add a jumper between pins 1 and 2 on their
side of the 37 pin connector. See also Remote EMO Connector Wiring on page 12-7.
• This behavior is configurable in v1.4.0.3 and above by command
LEGACY_REMOTE,COMP_SIGNAL_LOGIC or from HMI -> Top Menu -> Configuration ->
Set Comm Params -> Legacy Remote -> Comp Signal Logic.
• Default behavior in v1.4.0.3 is PFC backward compatible when v1.4.0.3 is installed. Users
will see a change from the previous MaxCool behavior. In v1.4.0.3, jumping Pins 1/2 is not
necessary as this function is controlled by software.
• When both COOL and DEFROST Legacy Remote signals are High, early PFC behavior was to
put unit in Cool Mode. Original MaxCool behavior put unit in Standby Mode.
• This behavior is configurable in V1.4.0.3 and above by command
LEGACY_REMOTE,OP_MODE_LOGIC or from HMI -> Top Menu -> Configuration -> Set
Comm Params -> Legacy Remote -> Op Mode Logic.
• Default behavior in v1.4.0.3 is PFC backward compatible when v1.4.0.3 is installed. Users
will see a change from the previous MaxCool behavior.
Brooks Automation
214072 Revision B 5-17
Interfacing Polycold Cryochiller
24V DI/DO Remote Interface Installation and Operation Manual
Item Non Isolated (standard) Isolated
Power 24 (-25/+17%) V AC/DC 10mA
Port on 37-pin bulkhead connector 37-pin bulkhead connector
Cryochiller (female pins) (male pins)
Connector 37 pin (Amp CPC-23) Male pins 37 pin (Amp CPC-23) Female pins
Use kit 840104-00 Use kit 840105-00
Input Customer-supplied external switch Customer-supplied 24(-25/+17%)V
Connections closes and returns the 24V AC AC/DC (10mA) power must be applied
(10mA) provided by the Polycold to the input pin to activate internal opto
Cryochiller when active. isolator when active.
Output 24VAC (10MA) output from Polycold Internal relay contacts in the Polycold
Connections Cryochiller when active. Cryochiller close when active.
1.2 A maximum total output. Contact rating is 10A
Customer must supply external relay Customer must supply 24 V AC/DC
or indicator to detect the output. power which is returned by the output
relay contacts when output is active.
Brooks Automation
5-18 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual 24V DI/DO Remote Interface
24V DI/DO
Remote
Connector
Figure 5-8: 24V DI/DO Remote
Communication Connection
4 1 1 4
9 5 5 9
15 10 10 15
22 16 16 22
28 23 23 28
33 29 29 33
37 34 34 37
Isolated pin sequence Non-Isolated pin sequence
Female pins, wire side view Male pins, wire side view
Figure 5-9: 24V DI/DO Connector Wire-Side Pin-Out
Brooks Automation
214072 Revision B 5-19
Interfacing Polycold Cryochiller
24V DI/DO Remote Interface Installation and Operation Manual
24 V DI/DO Single Circuit Non-Isolated
If a Polycold Cryochiller with the new 24V DI/DO non-isolated interface is replacing a PFC unit that used
the standard PFC remote interface, please note that the Cryochiller isolated remote has some differ-
ences. Please carefully review the wiring information in this section.
Figure 5-10: 24V DI/DO Single Circuit Non-Isolated
Brooks Automation
5-20 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual 24V DI/DO Remote Interface
24 V DI/DO Dual Circuit Non-Isolated
If a Polycold Cryochiller with the new 24V DI/DO non-isolated interface is replacing a PFC unit that used
the standard PFC remote interface, please note that the Cryochiller isolated remote has some differ-
ences. Please carefully review the wiring information in this section.
Figure 5-11: 24V DI/DO Dual Circuit Non-Isolated
Brooks Automation
214072 Revision B 5-21
Interfacing Polycold Cryochiller
24V DI/DO Remote Interface Installation and Operation Manual
24 V DI/DO Single Circuit Isolated
If a Polycold Cryochiller with the new 24V DI/DO isolated interface is replacing a PFC unit that used the
optional PFC isolated remote interface, please note that the Cryochiller isolated remote has some dif-
ferences. Please carefully review the wiring information in this section.
Figure 5-12: 24V DI/DO Single Circuit Isolated
1. External power supply can be connected per customer requirements (reversible supply support)
2. Active HIGH inputs and active LOW outputs. - Wire as above.
3. Active LOW inputs and active HIGH outputs. - Wire as above but reverse polarity of external power supply
4. Active HIGH input and active HIGH outputs. - Connect GND signal at the INPUT_COMMON TERMINALS
(Pin 2, 14 and 24 of 37-Pin CPC connector) and +24V DC at the OUTPUT_COMMON TERMINALS (Pins 4, 6,
10 and 17 of 37-Pin CPC connector)
5. Active LOW inputs and active LOW outputs - Connect +24DC at the INPUT_COMMON terminals (Pins 2, 14
and 24 of 37-Pin CPC connector) and GND signal at the OUTPUT_COMMON terminals (Pin-4, 6, 10 and 17 of
37-Pin CPC connector)
Brooks Automation
5-22 214072 Revision B
Polycold Cryochiller Interfacing
Installation and Operation Manual 24V DI/DO Remote Interface
24 V DI/DO Dual Circuit Isolated
If a Polycold Cryochiller with the new 24V DI/DO isolated interface is replacing a PFC unit that used the
optional PFC isolated remote interface, please note that the Cryochiller isolated remote has some dif-
ferences. Please carefully review the wiring information in this section.
Figure 5-13: 24V DI/DO Dual Circuit Isolated
1. External power supply can be connected per customer requirements (reversible supply support)
2. Active HIGH inputs and active LOW outputs. - Wire as above.
3. Active LOW inputs and active HIGH outputs. - Wire as above but reverse polarity of external power supply
4. Active HIGH input and active HIGH outputs. - Connect GND signal at the INPUT_COMMON TERMINALS
(Pin 2, 14 and 24 of 37-Pin CPC connector) and +24V DC at the OUTPUT_COMMON TERMINALS (Pins 4, 6,
10 and 17 of 37-Pin CPC connector)
5. Active LOW inputs and active LOW outputs - Connect +24DC at the INPUT_COMMON terminals (Pins 2, 14
and 24 of 37-Pin CPC connector) and GND signal at the OUTPUT_COMMON terminals (Pin-4, 6, 10 and 17 of
37-Pin CPC connector)
Brooks Automation
214072 Revision B 5-23
Interfacing Polycold Cryochiller
24V DI/DO Remote Interface Installation and Operation Manual
24V DI/DO Remote Installation
1. Locate the remote control plug parts kit that shipped with the unit. Note that the cus-
tomer must provide a cable that is suitable for their interface requirements.
2. Slide the back shell of the connector over the cable.
3. Remove no more than 13mm (1/2 inch) of the outer cable jacket that covers the cable wire bundle.
4. Strip 4mm (5/32 inch) of insulation from each of the wires and pre-tin each wire.
5. Solder each wire to the solder tail of a pin. Do not insert the wire into the hole on the solder tail.
6. Cut the heat shrinkable insulating tubes into 13mm (1/2-inch) lengths. Slide one of the insulation
tubes onto each soldered wire but do not shrink at this time.
7. Insert each pin into the appropriate contact socket on the back side of the connector. Push each pin
in until it clicks into place. Gently tug the wire to confirm the pin is properly inserted.
8. Slide the 13mm (1/2-inch) long insulating tubes down to the connector so that they cover the unin-
sulated wire and solder joint. Shrink the insulating tubes in place using a heat gun.
9. Thread the connector back shell onto the connector and screw it on until tightened firmly.
10. Install the cable clamp using the two screws provided and tighten it over the cable jacket so it firmly
holds the cable. The cable clamp may be reversed for large or small cables.
Solder Tail Tinned Lead
Shrinkable Insulating Tubing
Connector Connector
Back Shell Cable Clamp
Wire Side
Figure 5-14: 24V DI/DO Remote Solder-tail Connector Wiring (non-isolated male pins shown)
Brooks Automation
5-24 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
6 Operation
Introduction
The Polycold Cryochiller is ready to operate as soon as it is installed.
Basic startup consists of only a few steps:
• Turn on the cooling water and ensure it is flowing through the system.
• Turn on the power at the electrical power source for the refrigeration unit.
• Switch CB-1 to the ON position.
• Switch CB-2 to the ON position.
• Wait about a minute for the system to boot up and the HMI screen to display
information.
• Turn the EMO switch clockwise to set it to the disengaged position, if
equipped.
• Switch the compressor On/Off switch to the ON position.
• The Polycold Cryochiller operates in Standby mode while it cools the internal
stack and gets ready for normal operation.
To manually operate the unit,
• Set the unit to Local control by pressing the Remote key to turn off the LED.
When the Remote LED is not lit, the system is in Local control.
• When ready, select Cool by pressing the Cool key.
• When ready, select Defrost by pressing the Heat key.
The Polycold Cryochiller has many different methods of operation that can be used to meet the specific
needs of your application.
This chapter discusses the standard operating methods as well as other methods used for a variety of
different application requirements and system configurations.
Review this chapter and your application to ensure that you use the appropriate features and get the
best performance from your system.
Brooks Automation
214072 Revision B 6-1
Operation Polycold Cryochiller
System Components Installation and Operation Manual
System Components
Circuit 1
Lift Rings (optional) x 4
Refrigerant
Lines
Feed (left)
Return (right)
EMO Switch
(optional)
HMI Circuit 2
Display Refrigerant
and Lines
Keypad Feed (left)
Return (right)
Communications
Compressor Panel
ON/OFF Switch
Valve Access
Panel
Circuit Breakers
CB1 and CB2
(CB3 behind panel)
Power In
Cooling Water
In/Out
Figure 6-1: Illustration of Polycold Cryochiller Components
Brooks Automation
6-2 214072 Revision B
Polycold Cryochiller Operation
Installation and Operation Manual Local Controls and Indicators
Local Controls and Indicators
System
Display
System
Keypad
Control
Navigation Optional
Keys EMO
Switch
CKT 1
Control
Compressor
CKT 2 On / Off
Control Switch
(optional)
Communication
and Status
Figure 6-2: HMI Keyboard and Display
HMI Keypad
Table 6-1: Polycold Cryochiller Key Descriptions
Switch or Indicator Function
Up or Left Move cursor up or down or left or right.
Arrow Increase or decrease the value of a highlighted field.
Down or Right
Arrow
Enter Selects the current highlighted field.
Enters the current submenu designated by > character
Advances to next character in a selected field.
Saves the current value after last character is selected
Note: Cannot go backwards. Enter and redo if an error is created.
Brooks Automation
214072 Revision B 6-3
Operation Polycold Cryochiller
Local Controls and Indicators Installation and Operation Manual
Table 6-1: Polycold Cryochiller Key Descriptions
Switch or Indicator Function
Cool Places associated refrigeration circuit in Cool Mode
Green LED flashing
• when cold cycle is running
Green LED on solid
• when unit is in Cool mode
Standby Places associated refrigeration circuit in Standby Mode
Green LED on solid
• when in Standby mode
• when defrost is complete
Heat Places associated refrigeration circuit in Heat (Defrost) Mode
Green LED flashing
• when defrosting
Green LED on solid
• when defrost is complete
Remote Toggles the system between Remote and Local mode.
Green LED on solid when system is in Remote mode
Green LED off when system is in Local mode
Reset Resets faults
OK Green LED on solid
• when the compressor contactor is on and contacts are
closed.
Faults - General (!) Amber General LED on solid
• when a general fault has occurred See HMI message
Faults - Pressure (P)
Red Pressure LED on solid
• when high pressure fault has occurred See HMI message
Brooks Automation
6-4 214072 Revision B
Polycold Cryochiller Operation
Installation and Operation Manual Single Circuit Modes of Operation
LED Status Table
Table 6-2: LED Status Table
Cool Standby Heat OK Remote Faults
Status / LED
LED LED LED LED LED LED
Power On Off Off Off Off Off Off if
Compressor Off no fault
Power On As set As set As set On when As set Off if
Compressor contactor on no fault
On
At Cool On Off Off On when As set Off if
contactor on no fault
Standby Off On Off On when As set Off if
contactor on no fault
Defrost in Off Off Flash On when As set Off if
Process contactor on no fault
Defrost Off On On On when As set Off if
Complete contactor on no fault
Rapid BP Off Off Off On when As set Off if
Check contactor on no fault
Fault As set As set As set On when As set On
contactor on
Single Circuit Modes of Operation
The MaxCool Cryochiller must have a proper refrigerant line and cryosurface connected to it in order to
operate in any mode, including standby.
The Base Model cryochiller has three modes of operation.
Standby
When the unit is in Standby, the Cool and Defrost solenoid valves are closed. The unit circulates (and
cools) the refrigerant in the “stack” in the top of the refrigeration unit. The refrigerant is not pumped to
the cryosurface. The refrigerant is coldest when the unit is operating in this mode because it has the
least heat load.
All solenoids and valves are closed when in Standby mode with the exception of the following:
• Freezeout Prevention valve logic based on the FRZ_PREVENT_SETPT Host command value
controlled around the Coldest Liquid Temperature (TC4) thermocouple reading. Default is
-148C.
• Logic associated with compressor startup where the Buffer valve may be opened
• Logic for the Cylinder Unloader solenoid for power management
If the Cylinder Unloader solenoid is enabled, it is activated if the unit is in Standby for more than the time
designated by the command POWER_MGMT_STANDBY_DELAY. Default value is 20 minutes.
E_MGMT_ENABLE is enabled by default if the system is equipped with Cylinder Unloader.
Compressor will continue to run when in Standby Mode.
Brooks Automation
214072 Revision B 6-5
Operation Polycold Cryochiller
Single Circuit Modes of Operation Installation and Operation Manual
After power up, when the compressor is turned on, the system always defaults to Standby mode.
On system Alarm/Fault which shuts down the compressor, once the compressor is turned back on, the
system defaults to Standby mode.
Standby mode can be selected using HMI or the command line interface.
If the unit is in a Standby mode, another mode (Cool or Defrost mode) can be selected.
Cool
When the unit is put into Cool, the Cool solenoid valve opens and the Defrost solenoid valve closes.
Cold refrigerant is pumped into the feed line then to the cryosurface and cools the cryosurface and
returns through the return line to the refrigeration unit. Inside the refrigeration unit, the refrigerant
releases the heat it absorbed from the cryosurface and then it is pumped through the system to repeat
the process.
Cool Mode Description
Cool Cool valve is open continuously until the unit is switched to Standby or Defrost. The cryo-
(Standard) surface gets as cold as possible as fast as possible for the applied heat load.
Cool Mode Selection
Cool modes can be selected using the HMI or the remote command line interface or the web GUI to set
the default Cool mode for the Cool button(s).
The unit must first be turned to Standby or Defrost then back to the desired Cool mode.
Defrost
When the unit is put into Defrost, the Cool solenoid valve closes and the Defrost solenoid valve opens.
Hot refrigerant is pumped from the unit into the feed line then to the cryosurface where it warms the
cryosurface and returns through the return line. The unit automatically switches to Standby when the
return temperature or coil out temperature has reached the programmable set point temperature.
Some optional configurations of the Polycold Cryochiller include multiple Defrost Modes
Defrost Mode Description
Standard Defrost Defrost valve is open until DEFR_SETPT is reached.
(standard) After DEFR_SETPT is reached, the valve is closed.
Defrost Mode Selection
Defrost modes can be selected using the HMI or the remote command line interface to set the default
Defrost mode for the heat buttons.
Brooks Automation
6-6 214072 Revision B
Polycold Cryochiller Operation
Installation and Operation Manual Dual Circuit Modes of Operation
Dual Circuit Modes of Operation
Each refrigerant circuit in the dual-circuit Polycold Cryochiller functions in the same way as the sin-
gle-circuit Polycold Cryochiller. The only difference is that the refrigerant is split into two separate feed
and return lines so that it serves two cryosurfaces. Both refrigerant circuits can be put into Defrost mode
or Cool Mode or Standby Mode.
When one circuit is in Defrost while the other circuit is in Cool, the circuit in Cool may warm by a few
degrees, nominally about 5 degrees.
The timing of the Defrost activity may be considered to maintain your process requirements. If the sec-
ond circuit is a baffle for a diffusion pump, this is not an issue. However, when both circuits are used to
cool cryocoils, you must evaluate the impact on your process when you defrost one circuit while the
other circuit is in Cool during a deposition process.
If the refrigerant circuits are operated in different modes, the following will happen.
One Circuit Standby and One Circuit Cool
The cryosurface being cooled will get several degrees colder than when both cryosurfaces are cooled
simultaneously. This is because there is less total heat load on the system. It is not possible, however,
to get 100% of the cooling capacity into one circuit simply by not using the other circuit.
One Circuit Defrost and One Circuit Cool
The cryosurface being cooled may warm by about 20 C degrees. The warming is caused by refrigerant
from both cryosurfaces being combined in the common return line.
One Circuit Defrost versus One Circuit Standby
The cryosurface being defrosted may have a defrost time that is slightly longer than when both cryosur-
faces are defrosted at the same time.
Brooks Automation
214072 Revision B 6-7
Operation Polycold Cryochiller
Compressor Safety Chain Installation and Operation Manual
Compressor Safety Chain
If the compressor does not start, it is usually caused by an item in the Compressor Safety Chain.
The compressor safety chain consists of several hardware and software interlocks that cause the com-
pressor to stop or prevent the compressor from starting.
Table 6-3: Compressor Safety Chain
Safety Chain Item Description
Compressor ON/OFF switch Switch on HMI panel controls compressor contactor. Must be manually
(SW1) turned on for contactor to close and compressor to run.
Circuit breaker CB1 (CB1) CB1 controls input power for entire compressor unit
Must be manually turned on or manually reset.
Circuit breaker CB2 (CB2) CB2 controls power to the low voltage transformers
Must be manually turned on or manually reset.
Circuit breaker CB3 (CB3) CB3 controls low voltage power to the control PC Board.
If off, the main control PC Board looses power and contactor opens
and all electrical valves close
Must be manually turned on or manually reset.
Emergency Off Button (EMO) EMO provides emergency control for compressor contactor.
(if equipped on unit) If the EMO button is pressed in, compressor contactor opens.
EMO button must be manually disengaged to enable contactor
Optional Remote Emergency Remote EMO provides remote emergency control for compressor con-
Off Button (EMO) tactor.
(if equipped on unit) If the Remote EMO connection is open, compressor contactor opens.
Remote EMO connection must be closed to enable contactor
Compressor Over Temp Over Temp switch is a thermal cut out switch located inside the com-
Switch pressor motor and wired in series with the compressor power.
Opens when compressor motor temperature is above the rated value.
Closes when compressor motor temperature is below rated value.
Pressure switch (PS1) Pressure switch is mounted in compressor discharge line. Wired in
series with EMO and SW1. Trigger pressure is preset.
Switch opens if discharge pressure is above the rated value.
Switch closes when pressure is below rated value.
Software “Thermal Overload” Software monitors system performance comparing suction and dis-
Fault charge pressures. Generates “Thermal Overload” fault when condi-
tions are met. Fault condition opens the compressor contactor.
Fault resets after a 30 minute wait period.
Brooks Automation
6-8 214072 Revision B
Polycold Cryochiller Operation
Installation and Operation Manual Polycold Cryochiller Startup
Polycold Cryochiller Startup
System Boot/Power-Up
1. Before compressor power up, read the pressure gauge and compare the reading to the
recorded system static pressure. If the pressure reading is off by greater than 10%,
record the value and contact service for advice.
2. Open the Circuit Breaker Access panel.
3. Set CB1 to the UP or ON position.
4. Set CB2 to the UP or ON position.
5. Wait several seconds for the system to fully boot up.
• Boot up is complete when the 4-line HMI displays shows the “Home” screen.
• Cool / Standby / Heat mode LED’s are not lit until the contactor is closed
• Boot up is not affected by compressor contactor or On/Off or EMO switches.
Compressor Startup
Use one of the following methods to start the compressor after system boot up completes.
• If the compressor switch is in the OFF position when system boot up com-
pletes, switch the compressor switch to ON
• If the compressor switch is in the ON position when system boot up completes,
toggle the compressor switch to OFF and then to ON.
• If the compressor does not startup, refer to Compressor Safety Chain on page
6-7 and Compressor Motor Troubleshooting on page 10-4.
Alternate Compressor Startup
1. Set the compressor switch on the control panel to the ON position.
2. Use the Remote button to set the system to Local mode (Remote LED not Lit)
3. Press the Reset key to set the compressor contactor to ON.
• Compressor turns on
• OK LED is lit.
4. After the compressor starts, the Standby LED is on until the operating mode is changed.
NOTE: Several conditions prevent compressor starting. See Compressor Motor Troubleshooting
on page 10-4
Brooks Automation
214072 Revision B 6-9
Operation Polycold Cryochiller
Operating the Polycold Cryochiller with a Cryocoil Installation and Operation Manual
Operating the Polycold Cryochiller with a Cryocoil
Start and Cool the System
1. Follow the System Boot/Power-Up and Compressor Startup procedures in the previ-
ous section.
2. Switch the unit to Standby using the HMI or remote control.
3. Monitor the temperature indicated by Coldest Liquid (TC # 4).
• TC # 4 monitors the temperature of the refrigerant in the coldest part of the
stack and is a good indicator of when to switch to Cool mode.
• For quick cooling when switching to Cool, TC # 4 should be 5 -10°C colder
than the desired cryocoil temperature. See Table 12-1 on page 12-9
NOTE: The unit may be operated indefinitely in Standby.
If the unit is off for more than 12 hours, it may take up to 30 minutes after going into Standby
to attain complete precooling.
4. Once the unit has cooled to the desired temperature, the circuit may be switched to Cool mode any
time after the vacuum chamber has achieved vacuum. Most users switch to Cool at crossover
when opening the high vacuum valve. The cryocoil will start capturing water vapor within 60 sec-
onds.
NOTE: Experiment to determine the shortest pumpdown time for each application.
The sooner the unit is switched to Cool, the faster the vacuum chamber's pumpdown time
will be. However, switching too soon may cause the cryocoil to capture too much water
vapor causing the cryocoil's apparent surface temperature to rise and limit the ultimate
attainable base pressure.
NOTE: You can use a relay contact from a vacuum gauge on your system to control when to switch
into cool. See Gauge Relay (J4) on page 5-3.
Defrost the Cryocoil
Defrost allows the “regeneration” of a cryocoil in preparation for the next vacuum cycle.
1. Switch the unit to Defrost using the unit's control panel or remote control.
NOTE: Start Defrost so that the cryocoil is warm before the vacuum chamber reaches atmospheric
pressure. A typical Defrost takes 4 minutes or less. The exact time depends upon the
length of the refrigerant line and the size of the cryocoil.
2. By default, the unit terminates Defrost when the return temperature of the refrigerant reaches 20°C.
This assures that no additional moisture condenses on the cryocoil from the atmosphere.
The thermocouple and the end point temperature are user configurable if a shortened Defrost cycle
is desired.
Brooks Automation
6-10 214072 Revision B
Polycold Cryochiller Operation
Installation and Operation Manual Operating the Polycold Cryochiller with a Cryobaffle
3. The unit automatically goes into Standby when Defrost is complete.
Defrost Hazard
If large amounts of water are collected during the vacuum cycle,
liquid or ice may drop from the cryocoil during Defrost.
You may need to provide a drip pan or similar device to prevent liq-
uid water from accumulating in an undesirable location
NOTICE
Dual Polycold Cryochiller Defrosting
When defrosting one circuit while the other circuit is in Cool, the temperature of
the circuit in cool may increase.
Review the required temperatures for the affected process to make sure the
warming does not affect the process. If the temperature change is not accept-
able, wait until the completion of the cool process before performing Defrost.
Both circuits may be defrosted at the same time.
Operating the Polycold Cryochiller with a Cryobaffle
An optically transparent cryobaffle enhances the water vapor pumping speed of the turbomolecular
pumps and an optically opaque cryobaffle minimizes oil backstreaming from oil diffusion pumps. Back-
streaming is the process of hot vapor migrating and condensing on cold surfaces. When an oil diffusion
pump is in operation, the pump oil heats up and hot oil vapor can travel opposite of the pumping direc-
tion and condense on the interior vacuum chamber walls and contaminate the system.
Standby and Cool Modes
1. Switch the unit to Standby using the unit's control panel or remote control.
2. If the compressor switch is turned OFF, turn the switch to ON.
3. When in Standby, the refrigeration unit cools the refrigerant so the unit is ready to go into Cool
mode.
NOTE: If the unit is off for more than 12 hours, it may take up to 30 minutes after going into Standby
to attain complete precooling.
4. Evacuate the vacuum chamber where the cryobaffle is installed to at least 0.01 torr (1.33 Pa).
5. From Standby, select Cool and allow the cryobaffle to cool down.
6. Turn on the high vacuum pump. It is not necessary to wait until the cryobaffle has cooled down.
Brooks Automation
214072 Revision B 6-11
Operation Polycold Cryochiller
Operating the Polycold Cryochiller with a Cryobaffle Installation and Operation Manual
Defrost the Cryobaffle
NOTE: If the cryobaffle captures too much water, the cryobaffle's apparent surface temperature
will rise and limit the ultimate attainable base pressure. Regular defrosting is recom-
mended to "regenerate" the cryobaffle. Complete defrosting can take 8 hours or more
depending upon the amount of moisture captured, the mass of the cold surface, and the
vacuum level.
1. When ready to defrost, switch the high vacuum pump to OFF.
2. Switch the refrigeration unit OFF or switch it to Standby.
NOTICE
Do not select Defrost if the cryobaffle is not isolated from the oil diffusion or tur-
bomolecular pump. The Defrost cycle may release the captured moisture too
quickly and damage the equipment.
3. When the cryobaffle is free of moisture, return the system to Cool mode as described at the begin-
ning of this procedure.
Brooks Automation
6-12 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
7 Host Commands
This chapter lists the common commands used by RS-232 or Ethernet for an operator to control and
configure the Polycold Cryochiller from a host or service computer. Refer to the Interface chapter in the
Polycold Cryochiller Installation and Operation manual for interconnect information.
The Host Commands are not used by Profibus or DeviceNet which each have their own communication
protocols.
Command Group Listing
Command Group Listing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
Command Format. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2
Example of Interface Usage: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6
Security Levels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-7
Command Listing Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-8
Commonly Used Host Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-8
System Configuration Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-9
System Operational State Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-16
System Sensor Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-23
System Actions Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-27
Compressor Configuration Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-28
Compressor Operational State Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-29
Compressor Sensor Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-29
Circuit Configuration Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-31
Circuit Operational State Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-36
Circuit Sensor Readings Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-37
Brooks Automation
214072 Revision B 7-1
Host Commands Polycold Cryochiller
Command Format Installation and Operation Manual
Command Format
Command Format
Commands are either GET or SET commands based on comma separated parameters following the
command name. Use GET to check the status of something and SET to change a setting.
Host commands use the following protocol
• Must be sent by RS-232 or Ethernet connection
• Ethernet port for Host commands is port 5000
• Must begin with the $ character followed by the specific command with associated parameters.
• Parameters are separated with a comma.
• Command must end with a single character checksum.
• The Checksum is a single character that follows the parameters and is not separated by a
comma. Software interprets the last character in a string as the command checksum.
• Checksum is calculated by the 8 bit sum of all characters sent following $calculated by the
equation in Checksum Calculation on page 7-4.
• Must be terminated with an ASCII Carriage Return (CR) (Hex 0D).
• Must be sent complete to Polycold Cryochiller under 10 seconds from the $ to the <CR> for the
unit to recognize data sent as a complete command
• Must be sent as uppercase ASCII characters
Get Example:
Get software version “$SW_VER,?P(CR)”.
Set Example:
Set cooling termination set point “DEFR_SETPT,1,19D(CR)”.
Response Format
The first character of the response from the Polycold system to the external device provides information
about the specific command received along with information about whether the command succeeded.
Table 7-1: Command Response Codes
Letter Meaning
‘A’ Command understood, reply (if any) follows.
‘C’ Proper command, which cannot be acted upon currently for some reason which, may
be temporary or correctable. Typically because you have not entered the correct
security level.
‘F’ Invalid command or invalid data argument for the given command. Set commands
have min and max values associated with each command. If a set command uses a
value outside the min/max range, ‘F’ is the response.
Brooks Automation
7-2 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Command Format
Command Terms
The following will be used to represent the format of command and reply parameters.
[n] = a numeric value (0 thru 9)
[nnnn] or [nnn.n] = a multi-numeric value which may contain a decimal place
(Example: 1234 or 567.8)
[nnnnnnnn] = 32 bit number / bitfield
[c] = a character value such as an alphabetic character
[cccc] = a multi-character value which may contain alphabetic character and/or numeric values.
[A] = the reply code. The first character of the response from the Polycold system to the external
device provides information about the specific command received along with information about
whether the command succeeded. Refer to Response Code Table 7-1.
32 Bit Numbered Bitfield
Bitfields are hexadecimal data that contain parameter data that is interpreted using the decimal value.
Follow the steps below to find the decimal values in the hexadecimal bitfield value.
• Convert the hexadecimal value to binary.
• Determine the value of each set bit by counting the binary bits starting from the least significant
bit as zero.
• Record the decimal value of all of the bits that are set.
• Look up the decimal values of each set bit in the parameter listing for the command.
Example of Remote Monitor Usage Use with Table 7-2.
1. Send the command “ACTIVE_ALARMS, 1, ?
2. Receive the response ACTIVE_ALARMS $A 00002000, 0, 0.
00002000 is the Hexadecimal response.
3. Translate the hexadecimal value of 00002000 to binary.
• The first three hex digits are 0 and the 4th hex digit is 2.
• The 4th hex digit value of 2 decodes to 0010 in binary.
4. Find the decimal value of each set binary bit by counting from the LSB with the LSB being 0.
• The table shows that hex 00002000 is decimal value 13.
5. Look up the decimal value in the parameter list. This example shows that alarm bit 13 is set.
Table 7-2: Hexadecimal Bit Field Decoding
Hex Bit Hex Digit 4 Hex Digit 3 Hex Digit 2 Hex Digit 1
Hex Value 2 0 0 0
Binary Value 0 0 1 0 0 0 0 0 0 0 0 0 0 0 0 0
Brooks Automation
214072 Revision B 7-3
Host Commands Polycold Cryochiller
Command Format Installation and Operation Manual
Table 7-2: Hexadecimal Bit Field Decoding
Hex Bit Hex Digit 4 Hex Digit 3 Hex Digit 2 Hex Digit 1
Decimal Value 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0
Hex Bit Hex Digit 8 Hex Digit 7 Hex Digit 6 Hex Digit 5
Hex Value 0 0 0 5
Binary Value 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0
Decimal Value 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16
Checksum Calculation
Each command must end in a valid checksum. For heavy usage, it s recommended that the checksum
be calculated using a program/script/macro.
The checksum algorithm is defined as follows:
Perform the 8 bit sum of all the ASCII characters sent in the data field (with the most significant bit
cleared to 0, ignore parity). This is performed on the first character following the ‘$’ up to the last
data character before the checksum and Carriage Return (CR)
C Language example for checksum calculation:
///////////////////////////////////////////////////////////////////////////////////////////////////////////
// Function: CtiChkSum
// Purpose: Calculate the checksum for a given NULL terminated
// command.
unsigned char CtiChkSum (unsigned char * pCommand)
{
unsigned char checkSum = 0;
unsigned char
= 0;
do
{
checkSum = checkSum + (pCommand[charNum] & 0x7f);
charNum++;
} while ( pCommand[charNum] != 0 );
checkSum = 0x3f & (checkSum ^ (checkSum >> 6) );
checkSum = (0x30 + checkSum) & 0x7f;
return checkSum;
}// End Function CtiChkSum
Brooks Automation
7-4 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Command Format
Excel Macro for Checksum Calculation
A macro may be created in Microsoft Excel using Visual Basic to calculate a checksum of a command.
Create an Excel Macro
1. Open Excel.
Click the Microsoft Office button on the upper left corner.
Click on the “Excel Options” button.
Click on the check box to enable “Show Developer tab in the Ribbon”.
Click OK.
2. Click the Developer Tab.
In the “Code” tab click Macro Security.
Select “Enable all Macros”.
Click OK.
Note: at the end of this session, return the settings to their original state.
3. In the Developer Tab, Code Tab, click on “Visual Basic”. The Visual Basic program opens.
If a “Module” window does not open, click “Insert” in the Visual Basic tool bar and click “Module”.
4. Copy the command strings below and paste it into the Macro window.
Sub CalculateCheckSum()
Dim CommandString, checksum, character
Dim LengthofCommandString, Counter As Integer
checksum = 0
CommandString = Application.InputBox("Enter the Command To Calculate checkSum (ex.
SW_VER,?)", "CommandString")
LengthofCommandString = Len(CommandString)
For Counter = 1 To LengthofCommandString
character = Mid(CommandString, Counter, 1)
checksum = checksum + (Asc(character) And &H7F)
Next Counter
checksum = checksum And &HFF
checksum = &H3F And (checksum Xor (Int(checksum / (2 ^ 6))))
checksum = (&H30 + checksum) And &H7F
checksumChar = Chr(checksum)
checksumstring = "CheckSum Character is: " & checksumChar
Response = MsgBox(checksumstring, 0, "CheckSum Result")
End Sub
5. Save the Excel program using a name you might remember such as “CheckSum Macro”.
Brooks Automation
214072 Revision B 7-5
Host Commands Polycold Cryochiller
Example of Interface Usage: Installation and Operation Manual
Test or Use the Excel Macro
1. Test the Macro by closing Excel and then opening the CheckSum Macro Excel file.
2. Click on Developer tab, click Macros. Select the CalculateCheckSum Macro. Click Run.
3. Enter the sample command SW_VER,? using upper case only. Press OK.
4. Excel calculates the checksum and a checksum window appears. The window should show the
checksum is P. If not, check the command that you entered and check the macro.
5. To use the macro, follow the steps above entering the command in all caps without the $.
Example of Interface Usage:
A user has a Polycold Cryochiller with connections for both the RS-232 port and Ethernet Port and
wants to set a parameter value for DEFR_SETPT using the RS-232 connection.
In the RS-232 terminal, the user must
• Send a command to set SYSTEM_CONTROL_MODE to 2 (RS-232 port)
• Send a command to set DEFR_SETPT along with the value to be set
If the interface sends a Set command and the interface does not have control, the host will respond with
“C” which means that the command is OK but cannot be executed.
Example of a Get Host Command
$SW_VER,?P command to get current installed software version
$ then command SW_VER then ,? (get parameter) then P (command checksum)
$AQF0.1.0.32I response to command to get current installed software version
$ then response code A (accepted) then response value QF0.1.0.32 then I (response checksum)
Example of a Set Host Command
$SYSTEM_CONTROL_MODE,04 command to Set System Control Mode
$ then command SYSTEM_CONTROL_MODE then ,0 (set to 0 local mode) then 4 (checksum)
$A0 is the response for Set System Control Mode
$ then response code A (accepted) then 0 (checksum)
Brooks Automation
7-6 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Security Levels
Set Command Information
Most Set values for parameter Host commands are stored to non-volatile flash memory when the SET
is executed.
However, some configuration Set command values are not stored and must be set again after a power
cycle or CPU reset.
Example SECURITY_LEVEL, SYSTEM_CONTROL_MODE
Set commands have min and max values associated with each command. If a set command uses a
value outside the min/max range, F is the response.
Set values take affect immediately and do not require a system restart or power cycle to take effect.
Security Levels
Polycold Cryochiller command functions are security protected and require that the security level be set
to a specific level in order to perform the Get or Set command functions.
• Security Level 1 - Limited Operator Access -Password: 02030A (where all 0s are zeros)
Limited user access. Allows for locking operators out of access to commands.
• Security Level 2 - Default Operator Access - Password: 02030B (where all 0s are zeros)
Normal unit access. Normal operations are available such as Cool, Defrost, Rapid BP Check.
• Security Level 3 - Some Configuration / Maintenance (manager access) Contact Brooks Poly-
cold for password Access to service menu for Zero Line Loss function to allow disconnect and
installation.
Security levels follow these rules.
• “Get” and “Set” functions for each command require a specific security level and the command
function does not perform unless the security level is set to the required level or higher.
• Security level for Get and Set functions for each command are hard coded and cannot be
changed.
• The default system security level is 2 and cannot be changed.
• Current security level can be temporarily changed by Host command SECURITY_LEVEL.
• Security level set to 1 stays at 1 until changed by the SECURITY_LEVEL command or the sys-
tem is power cycled.
• Security level set above level 2 changes back to default level 2 after 5 minutes of inactivity.
• Time to change back to default can be set using the SERVICE_INTERVAL command.
• Security Levels are interface dependant.
Example: setting a SECURITY_LEVEL of Level 3 through RS232 Host port does not change
the Security Level of the ETHERNET Host port, WEBGUI, or HMI.
• Security level does not affect HMI access.
• HMI access to Service Modes "Authorization Code" menu requires a Security Level password
of 2 or higher. The HMI Service Modes menu options are based on the Security Level password
that is entered.
Brooks Automation
214072 Revision B 7-7
Host Commands Polycold Cryochiller
Command Listing Format Installation and Operation Manual
Example of Security Level
User wants to set DEFR_SETPT value. This command has a Get security level of 1 and a Set level of
3. System security level is 2 by default.
• User can use a Get command for DEFR_SETPT since get is level 1.
• User cannot use Set command since the set level is 3.
• User must change the security level to 3 or above to use Set command for DEFR_SETPT.
• If a command is not accepted for security reasons, the response is “C”.
Command Listing Format
The commands are listed in this chapter using the title block and table format shown below.
ABC_DEF Description of the Command
Purpose: Describes the purpose of the command
Parameter(s): List of parameters
Return Value: Lists information the system returns for this command [A][nn.nn.nn.nn]
Default Value: Default command value, if applicable
Security Level: Security required to Get the value Security required to Set the value
Example: Sample of command with exact syntax
Interface Interface options available for this command
Commonly Used Host Commands
Table 7-3: Commonly Used Host Software Commands
Command Description
SENSOR_SNAPSHOT Returns value of all current system thermocouple and state of all
system commanded valves
Return value:
1e70ff7f,0,23.5,23.5,23.5,171.8,171.8,171.8,121.1,0.0,171.8,171.8,
171.8,171.8,171.8,171.8,171.8,171.8,0.0,0.0,0.0,0.0,23.9,25.2,
0.0,0.0,0.0,0.0,0.0,180.6,92.0,0.0,0.0,0.0,0.0,0
SYSTEM_CONTROL_MODE Get/Set the current “Control” interface of the system
(ie. RS-232, Ethernet etc.
SYSTEM_CONTROL_MODE_DEF Get/Set the current default “Control” interface of the system
(ie. RS-232, Ethernet etc.)
Brooks Automation
7-8 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Configuration Commands
Command Description
SECURITY_LEVEL Get the current security level setting
COMP_MOTOR_STATE Get / Set the current state of the Compressor Motor ON/OFF
ACTIVE_ALARMS Get current alarms/warning pending on the system. The return
value is a Hex encoded bitfield corresponding to the current alarms
RESET_ALARMS Acknowledge Alarms.
Clears alarms if the condition causing the alarm is resolved
OPERATING_MODE Get/Set the system Cool/Defrost modes and Standby mode
SW_VER Get the currently running system software/firmware version
UNIT_BALANCE_PRESSURE Get the system balance pressure (static charge)
DEFR_SETPT Get/Set the system setpoint for Defrost modes
System Configuration Commands
SW_VER Software Version & Build Number
Purpose: Returns identifier strings for the current software version and build number.
Parameter(s): ?
Return Value: [A][nn.nn.nn.nn] (major.minor.patch.build)
Default Value: N/A
Security Level: Get: 1 Set (none)
Example: “SW_VER,?” Get application software revision
Interface RS-232, Ethernet
Brooks Automation
214072 Revision B 7-9
Host Commands Polycold Cryochiller
System Configuration Commands Installation and Operation Manual
VENDOR_ID Get the DeviceNet Vendor ID
Purpose: Returns identifier string indicating the vendor ID.
Only returns a value if DeviceNet config is installed
Parameter(s): ?
Return Value: [A][cccccccc]
Default Value: N/A
Security Level: Get: 1 Set: N/A
Example: “VENDOR_ID,?”
Interface RS-232, Ethernet
IP_ADDR IP Address
Purpose: Get/set the IP Address for the system.
Parameter(s): ? or [nnn.nnn.nnn.nnn]
[nnn.nnn.nnn.nnn] is the IP address
Return Value: [A] or [A][nnn.nnn.nnn.nnn]
Default Value: 0.0.0.0
Security Level: Get: 1 Set: 3
Example: “IP_ADDR,192.168.1.100” Set the IP Address for host port
Interface: RS-232, Ethernet
DEFAULT_GATEWAY Default Gateway
Purpose: Get/set the default network gateway for the system.
Parameter(s): ? or [nnn.nnn.nnn.nnn]
[nnn.nnn.nnn.nnn] is the Gateway address
Return Value: [A] or [A][nnn.nnn.nnn.nnn]
Default Value: 0.0.0.0
Security Level: Get: 1 Set: 3
Example: “DEFAULT_GATEWAY,192.168.1.1” Set the default gateway for host port
Interface RS-232, Ethernet
Brooks Automation
7-10 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Configuration Commands
NETWORK_MASK Network Mask
Purpose: Get/set the subnet mask for the system.
Parameter(s): ? or [nnn.nnn.nnn.nnn]
[nnn.nnn.nnn.nnn] is the Network Mask address
Return Value: [A] or [A][nnn.nnn.nnn.nnn]
Default Value: 0.0.0.0
Security Level: Get: 1 Set: 3
Example: “NETWORK_MASK,255.255.255.0” Set the subnet mask for host port
Interface RS-232, Ethernet
DEVICENET_PARAMS DeviceNet parameters
Purpose: Set / Get the DeviceNet speed and mac id
Parameter(s): ? or [speed],[Mac ID]
[speed] is
- 0 = 125k
- 1 = 250k
- 2 = 500k
[Mac ID] is
0 - 63
Return Value: [A] or [A][speed],[Mac ID]
Default Value: A,63
Min: [speed] = 0 Max: [speed] = 2
[Mac ID] = 0 [Mac ID] = 63
Security Level Get: 1 Set: 3
Example: “DEVICENET_PARAMS,?”
Interface RS-232, Ethernet
Brooks Automation
214072 Revision B 7-11
Host Commands Polycold Cryochiller
System Configuration Commands Installation and Operation Manual
PROFIBUS_PARAMS Profibus parameters
Purpose: Bet the profibus speed and Get/Set Profibus
Parameter(s): SPEED,? or ,ADDRESS,? or ,ADDRESS,[address]
[speed] is READ ONLY
- 0 = 9.6k
- 1 = 19.2k
- 2 = 45.45k
- 3 = 93.75k
- 4 = 187.5k
- 5 = 500k
- 6 = 1.5M
- 7 = 3M
- 8 = 6M
- 9 = 12M
[address] is 1 - 125.
Return Value: [A] or [A][speed] or [A][address]
Default Value: [speed] = 0 [address] = 7
Min: [speed] = 0 Read Only Max: [speed] = 9 Read Only
[address] = 1 [address] = 125
Security Level Get: 1 Set: 3
Example: “PROFIBUS_PARAMS,SPEED,?” Get the Profibus speed
Interface RS-232, Ethernet
HMI_TIMEOUT HMI Timeout
Purpose: Get/Set the timeout of the HMI menu to previous menu
Parameter(s): ? or [nnnn]
[nnnn] is HMI timeout in seconds
Return Value: [A] or [A][nnnn]
Default Value: 300
Min: 30 Max: 1800
Security Level: Get: 1 Set: 3
Example: “HMI_TIMEOUT,?” get the current HMI timeout setting
Interface RS-232, Ethernet
Brooks Automation
7-12 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Configuration Commands
LEGACY_REMOTE,COMP_SIGNAL_LOGIC Compressor Input Signal Logic
Purpose: Get/Set the Legacy Remote compressor input signal logic. Default setting is
equivalent to jumper “J11” being placed on PFC system control board. The
compressor will not be controlled by Legacy Remote compressor on/off input
signal.
Monitor Data: N/A
Parameter(s): ? or [n]
[n]
0 = Compressor controlled by Legacy Remote compressor input signal
Equivalent to “J11” jumper being removed from PFC system control board
1 = Compressor not controlled by Legacy Remote compressor input signal.
Equivalent to “J11” jumper being placed on PFC system control board
Return Value: [A] or [A][n]
Data Type: [n]: Integer
Default Value: [n] = 1
Min: [n] = 0 Max: [n] = 1
Units: N/A
Security Level Get: 1 Set: 3
Example: “LEGACY_REMOTE,COMP_SIGNAL_LOGIC,0” Set the Legacy Remote
interface to use the state of the compressor on/off input signal to control the
compressor.
Interface RS-232, Ethernet
Brooks Automation
214072 Revision B 7-13
Host Commands Polycold Cryochiller
System Configuration Commands Installation and Operation Manual
LEGACY_REMOTE,RMT_SIGNAL_LOGIC Legacy Remote Output Signal Logic
Purpose: Get/Set the Legacy Remote, remote output signal logic. Default setting is to
remain compatible with remote signal functionality on PFC. The remote output
signal will be Low when the Compressor is off regardless of unit being in Local
or Remote control.
Monitor Data: N/A
Parameter(s): ? or [n]
[n]
0 = Remote output signal will be:
Low when compressor is Off in Local Control
High when compressor is Off in Remote Control
Original MaxCool remote signal logic
1 = Remote output signal will be:
Low when compressor is Off in Local Control
Low when compressor is Off in Remote Control
Original PFC remote signal logic
Return Value: [A] or [A][n]
Data Type: [n]: Integer
Default Value: [n] = 1
Min: [n] = 0 Max: [n] = 1
Units: N/A
Security Level Get: 1 Set: 3
Example: “LEGACY_REMOTE,RMT_SIGNAL_LOGIC,0” Set the Legacy Remote,
remote signal logic to the original MaxCool logic.
Interface RS-232, Ethernet
Brooks Automation
7-14 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Configuration Commands
LEGACY_REMOTE,OP_MODE_LOGIC Legacy Remote Operating Mode Logic
Purpose: Get/Set the Legacy Remote, operating mode logic when cool and defrost sig-
nals are both High. Default setting is to remain compatible with operating
mode functionality on PFC. When the Cool and Defrost input signals are both
High, the unit will switch to Cool operating mode.
Monitor Data: N/A
Parameter(s): ? or [n]
[n]
0 = When both Cool and Defrost input signals are High, system will switch to
Standby Mode
Original MaxCool mode signal logic
1 = When both Cool and Defrost input signals are High, system will switch to
Cool Mode
Original PFC mode signal logic
Return Value: [A] or [A][n]
Data Type: [N]: Integer
Default Value: [n] = 1
Min: [n] = 0 Max: [n] = 1
Units: N/A
Security Level Get: 1 Set: 3
Example: “LEGACY_REMOTE,OP_MODE_LOGIC,0” Set the Legacy Remote, operat-
ing mode logic to the original MaxCool operating mode logic.
Interface RS-232, Ethernet
Brooks Automation
214072 Revision B 7-15
Host Commands Polycold Cryochiller
System Operational State Commands Installation and Operation Manual
System Operational State Commands
SYSTEM_CONTROL_MODE_DEF Default System Control Mode
Purpose: Get/set the default system control mode on startup. This command does
not actually change the mode.
Parameter(s): ? or [mode]
[mode] is
0 = local mode
1 = remote Ethernet
2 = remote RS232
3 = remote RS485 (Not supported)
4 = remote 24V DI/DO Remote
5 = remote DeviceNet
6 = remote Profibus
Return Value: [A] or [A][n]
Default Value: Base Units: 2 Units with Ethernet: 1
Security Level Get: 1 Set: 3
Example: “SYSTEM_CONTROL_MODE_DEF,0” Set the system default control
mode to local mode.
Interface RS-232, Ethernet
SYSTEM_CONTROL_MODE System Control Mode
Purpose: Get/set the system control mode.
Parameter(s): ? or [mode]
[mode] is
0 = local mode
1 = remote Ethernet
2 = remote RS232
3 = remote RS485
4 = remote 24V DI/DO Remote
5 = remote DeviceNet
6 = remote Profibus
8 = Default Control Mode (SYSTEM_CONTROL_MODE_DEF)
Return Value: [A] or [A][n]
Default Value: Determined by command SYSTEM_CONTROL_MODE_DEF
Security Level Get: 1 Set: 2
Example: “SYSTEM_CONTROL_MODE,0” Set the system to local mode.
Interface RS-232, Ethernet
Brooks Automation
7-16 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Operational State Commands
FAULT_STATUS Current Fault Status
Purpose: Get the current fault status.
Parameter(s): ?
Return Value [A] or [A][nnnnnnnn],[nnnnnnnn]
parameter 1: Equipment operation faults: 32 bit number / bitfield hex
encoded
bit 0: HIGH DISCHRG PRESS
bit 1: EXCESS SUCT PRESS
bit 2: VOLT OUT OF RANGE
bit 3: THERMAL OVERLOAD
bit 4: PRESSURE SWITCH
bit 5: WATER TEMP or WATER TEMP HIGH
bit 6: DISCHARGE TEMP
bit 7: PRESS SENSOR FAULT
bit 8: Not Used
bit 9: LOW SUCT PRESSURE
bit 10: Not Used
bit 11: C1/C2 COOL TEMP SETPT
bit 12: C1/C2 DFR TEMP SETPT
bit 13: SYSTEM DATE (Not supported)
bit 14: C1/C2 COOL VLV CYCLE
bit 15: C1/C2 DFR VALVE CYCLE
bit 16-27: Not Used
bit 28: EMO SW ACTIVATED
bit 29: FAN WARNING
bit 30: CONTACTOR CHATTER
bit 31: EXCESS COMPRESS ON
parameter 2: Sensor value range faults: 32 bit number / bitfield hex
encoded
bit 0: DSCHRG TEMP SENSOR (TC1)
bit 1: LQD LN TEMP SENSOR (TC2)
bit 2: C1 INLET SENSOR (TC9)
bit 3: C1 OUTLET SENSOR (TC10)
bit 4: C2 INLET SENSORTC (TC11)
bit 5: C2 OUTLET SENSOR (TC12)
bit 6: C1 FEED SENSOR (TC13)
bit 7: C1 RETURN SENSOR (TC3)
bit 8: CLDST LQD TEMP (TC4)
bit 9: C2 FEED SENSOR (TC14)
bit 10: C2 RETURN SENSOR (TC5)
Brooks Automation
214072 Revision B 7-17
Host Commands Polycold Cryochiller
System Operational State Commands Installation and Operation Manual
Return Value bit 11: C2 OUTLET SENSOR (TC12)
bit 12: C1 PROC CTRL SENSOR (TC7)
bit 13: C2 PROC CTRL SENSOR (TC8)
bit 14: Not Used
bit 15: BUFFER LINE TC FAULT (TC16)
bit 16: OPTION1 TC FAULT (TC17)
bit 17: OPTION2 TC FAULT (TC18)
bit 18: OPTION3 TC FAULT (TC19)
bit 19: BP CHK CTRL (TC6)
bit 20: CLD JUNCTION SENSOR (TC21)
bit 21: Not Used
bit 22: Not Used
bit 23: OPTION4 TC FAULT (TC20)
bit 24: Not Used
bit 25: Not Used
bit 26: DSCHRG PRESS SENSOR (PT2)
bit 27: SUCT PRESS SENSOR (PT1)
bit 28: Not Used
bit 29: Not Used
bit 30: Not Used
bit 31: Not Used
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “FAULT_STATUS,?”
Interface RS-232, Ethernet
ALARM_STATUS Current Alarm Status
Purpose: Get the current alarm or warning status.
Parameter(s): [n], [nnnnnnnn],?
[n] is
0 = Equipment operation alarms
1 = Sensor range alarms
2 = Performance Monitor alarms
[nnnnnnnn] is a 32 bit number / bitfield that represents the state of the
alarm. Displays the hex number that represents the state of the 6 bits of
one of the bitfields returned by ACTIVE_ALARMS command
Brooks Automation
7-18 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Operational State Commands
Return Value: [A] or [A], [alarm status bits] or [A], [circuit 1 alarm status bits], [circuit 2
alarm status bits]
The alarm name and status.
“alarm name” is the name used to refer to the alarm
“alarm status bits” is a bit field with the following values:
bit 0: 0 = warning, 1 = alarm
bit 1-4: alarm or warning level as an integer.
bit 5: alarm clear state (0 = not cleared, 1 = cleared)
bit 6: alarm acknowledge state (0 = not acknowledged, 1 = acknowl-
edged)
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “ALARM_STATUS,0,40000,?” returns the alarm status of the cool tem-
perature ramp monitor alarm
Interface RS-232, Ethernet
ACTIVE_ALARMS Current Active Alarms
Purpose: Get the current active alarms and warnings
Parameter(s): [n],?
[n] is
0 = Warnings
1 = Alarms
2 = Both
Return Value [A],[nnnnnnnn], [nnnnnnnn], [nnnnnnnn]
parameter 1: Equipment operation alarms: 32 bit number / bitfield (differ-
ent from parameter 1 from FAULT_STATUS) hex encoded
• bit 0: C1/C2 USER TC FAILED
• bit 1: Not Used
• bit 2: LOW REFRIG TEMP
• bit 3: Not Used
• bit 4: PRESS SENSOR FAULT
• bit 5: EXCESS SUCT PRESS
• bit 6: SYSTEM DATE (Not Supported)
• bit 7: HIGH DISCHRG PRESS
• bit 8: DISCHARGE TEMP
• bit 9: Not Used
• bit 10: VOLT OUT OF RANGE
• bit 11: COOLING WATER
• bit 12: WATER TEMP HIGH
• bit 13: PRESSURE SWITCH
• bit 14: LOW SUCT PRESSURE
• bit 15: THERMAL OVERLOAD
Brooks Automation
214072 Revision B 7-19
Host Commands Polycold Cryochiller
System Operational State Commands Installation and Operation Manual
Return Value • bit 16: Not Used
• bit 17: C1/C2 DFR TEMP SETPT
• bit 18: Not Used
• bit 19: Not Used
• bit 20: Not Used
• bit 21: Not Used
• bit 22: C1/C2 COOL VLV CYCLE
• bit 23: C1/C2 DFR VALVE CYCLE
• bit 24; FREEZEOUT VLV CYCLE
• bit 25: Not used
• bit 26: Not Used
• bit 27: Not Used
• bit 28: EMO SW ACTIVATED
• bit 29: FAN WARNING
• bit 30: CONTACTOR CHATTER
• bit 31: EXCESS COMPRESS ON
parameter 2: Sensor value range alarms: 32 bit number / bitfield (differ-
ent from parameter 2 from FAULT_STATUS) hex encoded
• bit 0: DSCHRG TEMP SENSOR
• bit 1: LQD LN TEMP SENSOR
• bit 2: CLD JUNCTION SENSOR
• bit 3: Not Used
• bit 4: Not Used
• bit 5: Not Used
• bit 6: DSCHRG PRESS SENSOR
• bit 7: SUCT PRESS SENSOR
• bit 8: Not Used
• bit 9: Not Used
• bit 10: CLDST LQD TEMP
• bit 11: BP CHK CTRL
• bit 12: C1 INLET SENSOR
• bit 13: C2 INLET SENSOR
• bit 14: C1 OUTLET SENSOR
• bit 15: C2 OUTLET SENSOR
• bit 16: C1 FEED SENSOR
• bit 17: C2 FEED SENSOR
• bit 18: C1 RETURN SENSOR
• bit 19: C2 RETURN SENSOR
• bit 20: C1 PROC CTRL SENSOR
• bit 21: C2 PROC CTRL SENSOR
• bit 22: Not Used
• bit 23: BUFFER LINE TC FAULT
• bit 24: Not Used
• bit 25: Not Used
• bit 26: OPTION1 TC FAULT
• bit 27: OPTION2 TC FAULT
• bit 28: OPTION3 TC FAULT
• bit 29: OPTION4 TC FAULT
• bit 30: Not Used
• bit 31: Not Used
parameter 3: Performance Monitor alarms: 32 bit number / bitfield
• bit 0: Balance Pressure
Brooks Automation
7-20 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Operational State Commands
Return Value • bit 1: Cool Performance
• bit 2: Trend Cool
• bit 3: Cool Deviation
• bit 4: Not Used
• bit 5: Trend Cool Deviation
• bit 6: Not Used
• bit 7: Defrost Performance
• bit 8: Trend Defrost
• bit 9: Not Used
• bit 10: Not Used
• bit 11: Not Used
• bit 12: Not Used
• bit 13: Cooling Under
• bit 14: Defrost End
• bit 15: Cool Down Time
• bit 16: Cool Down Asymptote
• bit 17: Defrost time
• bit 18: Cool Steady
Security Level Get: 1 Set: N/A
Example: “ACTIVE_ALARMS,1,?” Get current active alarms
Interface RS-232, Ethernet
Brooks Automation
214072 Revision B 7-21
Host Commands Polycold Cryochiller
System Operational State Commands Installation and Operation Manual
CAPACITY_TARGET_TEMP Cooling Capacity Target Temperature
Purpose: Get/Set the target temperature used to define the normal capacity for non-tem-
perature controlled cooling modes to engage power management mode.
Monitor Data: Refrigerant Return temperature
Parameter(s): ? or [nnnn]
[nnnn] is target temperature
Return Value: [A] or [A][nnnn]
Data Type: Integer
Default Value: -120
Min: -190 Max: -70
Units: Degrees Celsius (signed)
Security Level: Get: 1 Set: 3
Example: “CAPACITY_TARGET_TEMP,?” Get the normal cooling capacity target temper-
ature.
Interface RS-232, Ethernet
POWER_MGMT_STANDBY_DELAY Excess Capacity Temperature difference
Purpose: Get/Set Power Management Standby Mode delay time
Monitor Data: Time
Parameter(s): ? or [nnnn]
[nnnn] is delay in seconds
Return Value: [A] or [A][nnnn]
Data Type: Integer
Default Value: 1200
Min: 1 Max: 36000
Units: Seconds
Security Level Get: 1 Set: 3
Example: “POWER_MGMT_STANDBY_DELAY,?” Get the power management
delay
Interface RS-232, Ethernet
Brooks Automation
7-22 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Sensor Readings
E_MGMT_ENABLE Energy Management Enable
Purpose: Get/set the enable state of energy management. (also referred to as
power management)
Monitor Data:
Parameter(s): ? or [n]
[n] is
1 = enabled
0 = disabled
Return Value: [A] or [A][n]
Data Type: Integer
Default Value: 1
Min: 0 Max: 1
Units: N/A
Security Level: Get: 1 Set: 3
Example: “E_MGMT_ENABLE,?” Get the enable state of energy management
Interface RS-232, Ethernet
System Sensor Readings
SENSOR_SNAPSHOT Sensor Data Snapshot
Purpose: Get a snapshot of the current sensor data.
Parameter(s): ?
Return Value [A][nnnnnnnn1],[nnnnnnnn2],[nnn.n]….
Param 1 is bit field for if sensors values are valid (valid = 1) hex encoded
• bit 0 – 20: T1 – T21
• bit 21: Voltage transformer
• bit 22: Not Used (0)
• bit 23: Not Used (0)
• bit 24: Not Used (0)
• bit 25: Not Used (0)
• bit 26: Not Used (0)
• bit 27: Discharge Pressure Transducer
• bit 28: Suction Pressure Transducer
• bit 29: Not Used (0)
• bit 30: Not Used (0)
• bit 31: Not Used (0)
Brooks Automation
214072 Revision B 7-23
Host Commands Polycold Cryochiller
System Sensor Readings Installation and Operation Manual
Return Value Param 2 is bit field for if sensors are faulted
• same bit mapping as above (faulted = 1) hex encoded
Param 3-23 TC1-TC21 temperature values
Param 24 Voltage transformer value
Param 25 Not Used (0)
Param 26 Not Used (0)
Param 27 Not Used (0)
Param 28 Not Used (0)
Param 29 Not Used (0)
Param 30 Discharge Pressure Transducer value
Param 31 Suction Pressure Transducer value
Param 32 Not Used (0)
Param 33 Not Used (0)
Param 34 Not Used (0)
Param 35 Not Used (0)
Param 36 is bit field for Valve states, hex encoded (1=valve open)
• bit 0: Fault Relay
• bit 1: Buffer Valve
• bit 2: Not Used (0)
• bit 3: Not Used (0)
• bit 4: Cylinder Unloader Valve
• bit 5: Ckt1 Cool Valve
• bit 6: Ckt1 Defrost Valve
• bit 7: Not Used (0)
• bit 8: Not Used (0)
• bit 9: Not Used (0)
• bit 10: Not Used (0)
• bit 11: Ckt2 Cool Valve
• bit 12: Ckt2 Defrost Valve
• bit 13: Not Used (0)
• bit 14: Not Used (0)
• bit 15: Not Used (0)
• bit 16: Not Used (0)
• bit 17: Freezeout Prevention Valve
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “SENSOR_SNAPSHOT,?” Get the sensor snapshot
Interface RS-232, Ethernet
Brooks Automation
7-24 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Sensor Readings
SYSTEM_VALVE_STATE Valve Open/Closed State for system valves.
Purpose: Get the open/closed state of a system valve. A value of 1 indicates the
valve is open. A value of 0 indicates the valve is closed.
Parameter(s): [n],?
[n] is Valve identifier:
0 = Buffer
1 = Not Used
2 = Not Used
3 = Cylinder Unloader
4 = Freeze Out Prevention
Return Value: [A] [n]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “SYSTEM_VALVE_STATE,0,?”
Interface RS-232, Ethernet
Note:
CLDST_LQD_TEMP Unit Coldest Liquid Temperature
Purpose: Get the unit coldest liquid temperature sensor value. (TC4)
Parameter(s): ?
Return Value: [A][nnnn]
Default Value: N/A
Units: Degrees Celsius (signed)
Security Level Get: 1 Set: N/A
Example: “CLDST_LQD_TEMP,?”
Interface RS-232, Ethernet
COLD_JUNCT_TEMP Cold Junction Temperature
Purpose: Get the cold junction temperature. (TC21)
Parameter(s): ?
Return Value: [A][nnn.n]
Default Value: N/A
Brooks Automation
214072 Revision B 7-25
Host Commands Polycold Cryochiller
System Sensor Readings Installation and Operation Manual
Units: Degrees Celsius (signed)
Security Level Get: 1 Set: N/A
Example: “COLD_JUNCT_TEMP,?”
Interface RS-232, Ethernet
BUFFER_LINE_TEMP Buffer Line Temperature
Purpose: Get the buffer line temperature. (TC16)
Parameter(s): ?
Return Value: [A][nnn.n]
Default Value: N/A
Units: Degrees Celsius (signed)
Security Level Get: 1 Set: N/A
Example: “BUFFER_LINE_TEMP,?”
Interface RS-232, Ethernet
WARM_CTL_TEMP Rapid Balance Pressure Check Control Temperature
Purpose: Get the Rapid Balance Pressure Check control temperature sensor
value. (TC6)
Parameter(s): ?
Return Value: [A][nnn.n]
Default Value: N/A
Units: Degrees Celsius (signed)
Security Level Get: 1 Set: N/A
Example: “WARM_CTL_TEMP,?”
Interface RS-232, Ethernet
Brooks Automation
7-26 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual System Actions Commands
System Actions Commands
RESET_ALARMS Reset alarms
Purpose: Acknowledge all outstanding alarms.
Parameter(s): N/A
Return Value: [A]
Default Value: N/A
Security Level Get: N/A Set: 2
Example: “RESET_ALARMS”
Interface RS-232, Ethernet
SECURITY_LEVEL Security Level
Purpose: Get/set the system security level.
Parameter(s): ? or [n],[cccccc],[userID]
[n] is security level 1-3
[cccccc] is password
[userID] is userID string
Return Value: [A] or [A][n]
Default Value: 2
Security Level Get: 1 Set N/A
Example: “SECURITY_LEVEL,?” Get the current security level.
Interface RS-232, Ethernet
Note Security level timeout is set by SERVICE_INTERVAL command
Brooks Automation
214072 Revision B 7-27
Host Commands Polycold Cryochiller
Compressor Configuration Commands Installation and Operation Manual
Compressor Configuration Commands
COMP_SERIAL_NUM Compressor Serial Number
Purpose: Get / Set identifier string representing the serial number of the specified
Compressor Module.
Parameter(s): [n],? or [cccccccc]
[n] is
0 = Refrigerant compressor
1 = Nitrogen compressor
[cccccccc] is serial number string (32 character max)
Return Value: [A] or [A][cccccccc]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “COMP_SERIAL_NUM,0,?”
Interface RS-232, Ethernet
COMP_MOTOR_HOURS Refrigerant Motor Operating Hours
Purpose: Get / Set the total number of hours that the specified compressor motor
has run in its lifetime.
Parameter(s): [n],? or [nnnn]
[n] is
0 = Refrigerant compressor
1 = Nitrogen compressor
[nnnn] is motor hours
Return Value: [A][nnnn]
Default Value: N/A
Range Min: 0 Max: 2000000
Security Level Get: 1 Set: 3
Example: “COMP_MOTOR_HOURS,0,?”
Interface RS-232, Ethernet
Brooks Automation
7-28 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Compressor Operational State Commands
Compressor Operational State Commands
COMP_MOTOR_STATE Refrigerant Compressor On/Off State
Purpose: Get/Set the refrigerant compressor motor on/off state.
Parameter(s): [n],? or [n1]
[n] is
0 = Refrigerant compressor
1 = Not Used
[n1] is motor state
0 = motor off (contactor open)
1 = motor on (contactor closed)
Return Value: [A] or [A][n1]
Default Value: N/A
Security Level Get: 1 Set: 2
Example: “COMP_MOTOR_STATE,0,?” Get the motor state.
Interface RS-232, Ethernet
Compressor Sensor Readings
UNIT_BALANCE_PRESS Compressor Static Charge Pressure
Purpose: Get the unit balance (static charge) pressure.
Parameter(s): [n],?
[n] is
0 = Refrigerant compressor
1 = Not Used
Return Value: [A] [nnn.n]
Default Value: N/A
Units: PSI
Security Level Get: 1 Set: N/A
Example: “UNIT_BALANCE_PRESS,0,?”
Interface RS-232, Ethernet
Brooks Automation
214072 Revision B 7-29
Host Commands Polycold Cryochiller
Compressor Sensor Readings Installation and Operation Manual
COMP_DISCHRG_TEMP Compressor Discharge Temp
Purpose: Read the compressor discharge temperature sensor value. (TC1)
Parameter(s): [n],?
[n] is
0 = Refrigerant compressor
1 = Not Used
Return Value: [A][nnn.n]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “COMP_DISCHRG_TEMP,0,?”
Interface RS-232, Ethernet
COMP_LINE_TEMP Compressor Liquid Line Temperature
Purpose: Read the compressor liquid line temperature sensor value. (TC2)
Parameter(s): [n],?
[n] is
0 = Refrigerant compressor
1 = Not Used
Return Value: [A][nnn.n]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “COMP_LINE_TEMP,0,?”
Interface RS-232, Ethernet
COMP_SUCT_PRESS Compressor Suction Pressure
Purpose: Read the compressor suction pressure sensor value.
Parameter(s): [n],?
[n] is
0 = Refrigerant compressor
1 = Not Used
Return Value: [A][nnn.n]
Default Value: N/A
Brooks Automation
7-30 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Circuit Configuration Commands
Security Level Get: 1 Set: N/A
Example: “COMP_SUCT_PRESS,0,?”
Interface RS-232, Ethernet
COMP_DSCHRG_PRESS Compressor Discharge Pressure
Purpose: Read the compressor discharge pressure sensor value.
Parameter(s): [n],?
[n] is
0 = Refrigerant compressor
1 = Not Used
Return Value: [A][nnnn]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “COMP_DSCHRG_PRESS,0,?”
Interface RS-232, Ethernet
Circuit Configuration Commands
CLDST_LQD_SETPT Coldest Liquid Temperature Set Point
Purpose: Get/set the temperature set point at which to transition from Standby to Cool
mode.
Monitor Data: Coldest liquid temperature
Parameter(s): [n],?
or [n],[nnn.n]
[n] is circuit number (1or 2) or * for all circuits
[nnnn] is the set point
Return Value: [A] or [A][nnn.n]
Data Type: Double
Default Value: -200
Min: -200 Max: -80
Units: Degrees Celsius (signed)
Security Level Get: 1 Set: 3
Brooks Automation
214072 Revision B 7-31
Host Commands Polycold Cryochiller
Circuit Configuration Commands Installation and Operation Manual
Example: “CLDST_LQD_SETPT,1,?” Get the coldest liquid temp. set point for circuit 1
Interface RS-232, Ethernet
SETPOINT_RELAY Setpoint Relay Control
Purpose: Get/set the External Relay 1 or Relay 2 parameters These relays are internal to
the unit and contact outputs are accessible from the 24V DI/DO interface. All
MaxCool Cryochiller models equipped with a 24V DI/DO 37-pin interface include
this feature as standard.
Defines the sensor, setpoint, and parameters for sensor monitored by each relay.
Monitor Data: Setpoint Type
Parameter(s) SETPOINT_RELAY,[1..2],?
SETPOINT_RELAY,[1..2],[Setpoint Type],[Relay Logic],[Setpoint],[Deadband]
Parameters:
- Relay [1..2] = Setpoint Relay 1 or Relay 2
- Setpoint Type: Sensor to monitor
None = 0,
1 = Circuit1_FeedTemp,
2 = Circuit1_ReturnTemp,
3 = Circuit1_CoilInTemp,
4 = Circuit1_CoilOutTemp,
5 = Circuit1_ProcessCtrlTemp,
6 = Circuit1_Avg_FeedReturn,
7 = Circuit1_Avg_CoilInOut,
8 = Circuit2_FeedTemp,
9 = Circuit2_ReturnTemp,
10 = Circuit2_CoilInTemp,
11 = Circuit2_CoilOutTemp,
12 = Circuit2_ProcessCtrlTemp,
13 = Circuit2_Avg_FeedReturn,
14 = Circuit2_Avg_CoilInOut,
15 = Compressor_DischargeTemp,
16 = Customer_Option1,
17 = Customer_Option2,
18 = Customer_Option3,
19 = Customer_Option4,
20 = Discharge_Pressure,
21 = Suction_Pressure
22 = Coldest_LiquidTemp ,
23 = RefrigerantLiquid_LineTemp,
24 = Not Used,
25 = Stack_WarmerTemp,
26 = Buffer_LineTemp,
Brooks Automation
7-32 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Circuit Configuration Commands
Parameter(s) - Relay Logic: Relay will close when either above or below Setpoint value
0: = Close_Above
1: = Close_Below
- Setpoint: Setpoint of selected sensor to initiate relay logic
- Deadband: deadband value from setpoint to open relay
Return Value: [A] or [A][nn],[n],[nnn.n],[nnn.n]
Data Type: Integer
Default Value: 0,0,0.0,0.0
Min: Setpoint Type: 0 Max: Setpoint Type: 21
Relay Logic: 0 Relay Logic
Setpoint: -200 Setpoint: -200
Deadband: 0 Deadband: 600
Units:
Security Level: Get: 1 Set: 3
Example: “SETPOINT_RELAY,1,?” Get the external vacuum device set point for Relay 1
“SETPOINT_RELAY,2,3,1,-30,5” Set the external relay set point for Relay 2,
monitor sensor Circuit1_CoilInTemp, close relay below -30c, open relay at -25c
(-30 setpoint plus the 5 degree deadband)
Interface RS-232, Ethernet
EXT_VAC_CONTACT External Vacuum Device Contact Closure Monitor
Purpose: Get/set the enable/disable state for using the gauge relay input to
change the mode of the circuit.
Monitor Data: External vacuum contact
Parameter(s): [n],?
or [n],[n]
[n] is circuit number (1 or 2) or * for all circuits
[n] is the enable state of the external vacuum contact
0 = Disabled
1 = Enabled
Return Value: [A] or [A][n]
Data Type: Integer
Default Value: 0
Min: 0 Max: 1
Units:
Security Level Get: 1 Set: 3
Brooks Automation
214072 Revision B 7-33
Host Commands Polycold Cryochiller
Circuit Configuration Commands Installation and Operation Manual
Example: “EXT_VAC_CONTACT,1?” Get the external vacuum device enable state
for circuit 1
Interface RS-232, Ethernet
DEFR_SETPT Defrost Complete Set Point
Purpose: Get/Set the defrost complete temperature set point.
Monitor Data: Refrigerant return temperature.
Parameter(s): [n],?
or [n],[nnn.n]
[n] is circuit number (1 or 2) or * for all circuits
[nnn.n] is the setpoint
Return Value: [A] or [A][nnn.n]
Data Type: Double
Default Value: +20
Min: -40 Max: 100
Units: Degrees Celsius (signed)
Security Level Get: 1 Set: 3
Example: “DEFR_SETPT,1,?” Get the defrost compete set point for circuit 1.
Interface RS-232, Ethernet
EXT_TC_ENABLE Enable external thermocouple
Purpose: Get/set the enable state of the external thermocouple on the circuit. If
enabled, the external Thermocouple is used to monitor the temperature,
else the internal Return temperature Thermocouple is used.
Parameter(s): [n],?
or [n],[state]
[n] is circuit number (1or 2)
[state] is enable state
1 = Enabled
0 = Not Enabled
Return Value: [A] or [A][0 or 1]
Data Type: Integer
Default Value: 0
Security Level Get: 1 Set: 3
Brooks Automation
7-34 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Circuit Configuration Commands
Example: “EXT_TC_ENABLE,1,?” Get the enable state of the circuit 1 external
thermocouple
Interface RS-232, Ethernet
EXT_TC_ALARM External thermocouple alarm
Purpose: Get/set the alarm setpoint for the External Thermocouple if enabled.
Alarm is raised if difference between External TC temperature and
Return temperature of circuit is greater than setpoint
Parameter(s): [nnn.n] or ?
[nnn.n] is temperature difference
Return Value: [A] or [A][nnn.n]
Data Type: Double
Default Value: 20
Min: 0 Max: 200
Units: Deg C
Security Level: Get: 1 Set: 3
Example: “EXT_TC_ALARM,?” Get the setpoint for external thermocouple alarm
Interface RS-232, Ethernet
Brooks Automation
214072 Revision B 7-35
Host Commands Polycold Cryochiller
Circuit Operational State Commands Installation and Operation Manual
Circuit Operational State Commands
OPERATING_MODE_DEF_COOL Cool operating mode default state
Purpose: Get/set the operating mode’s default cool state.
Parameter(s): [n],?
or [n],[mode]
[n] is the circuit number (1or 2)
[mode] is
0 = COOL
1 = Not Used
2 = Not Used
3 = Not Used
4 = Not Used
5 = Not Used
Return Value: [A][mode]
Default Value: N/A
Security Level Get: 1 Set: 2
Example: “OPERATING_MODE_ DEF_COOL,1,?” Get the current default cool
mode.
Interface RS-232, Ethernet
OPERATING_MODE_DEF_DEFROST Defrost operating mode default state
Purpose: Get/set the operating mode’s default defrost state.
Parameter(s): [n],?
or [n],[mode]
[n] is the circuit number (1 or 2)
[mode] is
0= DEFROST
1 = Not Used
2 = Not Used
3 = Not Used
4 = Not Used
5 = Not Used
Return Value: [A][mode]
Default Value: N/A
Security Level Get: 1 Set: 2
Example: “OPERATING_MODE_ DEF_DEFROST,1,?” Get the current default
defrost mode.
Interface RS-232, Ethernet
Brooks Automation
7-36 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Circuit Sensor Readings Commands
OPERATING_MODE Current Operating Mode
Purpose: Get/set the current operating mode.
Parameter(s): [n], ?
or [n],[mode]
[n] is the circuit number (1 or 2)
[mode] is
-1= INACTIVE (Note: Cannot “Set” this mode)
0 = STANDBY
1 = cool (default) – use the default cool mode
2 = defrost (default) – use the default defrost mode
3 = COOL
4 = Not Used
5 = Not Used
6 = Not Used
7 = Not Used
8 = Not Used
9 = DEFROST
10 = Not Used
11 = Not Used
12 = Not Used
13 = Not Used
14 = Not Used
Return Value: [A][mode]
Default Value: N/A
Security Level Get: 1 Set: 2
Example: “OPERATING_MODE,1,?” Get the current operating mode on circuit 1
Interface RS-232, Ethernet
Circuit Sensor Readings Commands
CIRCUIT_VALVE_STATE Valve Open/Closed State of a Circuit's valve
Purpose: Get the open/closed state of a valve belonging to a circuit. A value of 1
indicates the valve is open. A value of 0 indicates the valve is closed.
Brooks Automation
214072 Revision B 7-37
Host Commands Polycold Cryochiller
Circuit Sensor Readings Commands Installation and Operation Manual
Parameter(s): [n],[valve],?
[n] is circuit number (1 or 2)
[valve] is Valve identifier:
0 = Cool
1 = Not Used
2 = Defrost
3 = Not Used
4 = Not Used
5 = Not Used
Return Value: [A][n] [n] = 0 valve closed [n] = 1 valve open
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “CIRCUIT_VALVE_STATE,1,0,?” Get circuit 1 cool valve state
Interface RS-232, Ethernet
CIRC_INLT_TEMP Circuit Inlet Temperature
Purpose: Read the circuit inlet temperature sensor value. TC9/TC11
Parameter(s): [n],?
[n] is circuit number (1 or 2)
Return Value: [A][nnn.n]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “CIRC_INLT_TEMP,1,?” Get circuit 1 inlet temperature
Interface RS-232, Ethernet
CIRC_OTLT_TEMP Circuit Outlet Temperature
Purpose: Read the circuit outlet temperature sensor value. TC10 / TC11
Parameter(s): [n],?
[n] is circuit number (1 or 2)
Return Value: [A][nnn.n]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “CIRC_OTLT_TEMP,1,?” Get circuit 1 outlet temperature
Brooks Automation
7-38 214072 Revision B
Polycold Cryochiller Host Commands
Installation and Operation Manual Circuit Sensor Readings Commands
Interface RS-232, Ethernet
CIRC_FEED_TEMP Circuit Feed Temperature
Purpose: Read the circuit feed temperature sensor value.TC13 / TC14
Parameter(s): [n],?
[n] is circuit number (1 or 2)
Return Value: [A][nnn.n]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “CIRC_FEED_TEMP,1,?”
Interface RS-232, Ethernet
CIRC_RTN_TEMP Circuit Return Temperature
Purpose: Read the circuit return temperature sensor value. TC3 / TC5
Parameter(s): [n],?
[n] is circuit number (1 or 2)
Return Value: [A][nnn.n]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “CIRC_RTN_TEMP,1,?”
Interface RS-232, Ethernet
Brooks Automation
214072 Revision B 7-39
Host Commands Polycold Cryochiller
Circuit Sensor Readings Commands Installation and Operation Manual
CIRC_PROC_CTL_TEMP Circuit Process Control Temperature
Purpose: Read the circuit process control temperature sensor value. TC7 /TC8
Parameter(s): [n],?
[n] is circuit number (1 or 2)
Return Value: [A][nnnn]
Default Value: N/A
Security Level Get: 1 Set: N/A
Example: “CIRC_PROC_CTL_TEMP,1,?”
Interface RS-232, Ethernet
Brooks Automation
7-40 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
8 Configuration
About System Configuration
The operation of the Polycold Cryochiller is configurable using the system commands. Some of the
common configuration options and the associated commands are listed in this section.
For clarity, the letter P is used in place of the actual command checksum. See Checksum Calculation
on page 7-4 to determine the actual checksum for a specific command.
For simplicity, only a single sample of command parameters may be shown instead of listing the full set
of command options.
For full list of options for each command, go to the command description in Chapter 7: Host Commands.
Brooks Automation
214072 Revision B 8-1
Configuration Polycold Cryochiller
Power Management - Cylinder Unloading Installation and Operation Manual
Power Management - Cylinder Unloading
Cylinder unloading is used to save energy during periods of low cooling load. Cylinder Unloading dis-
ables one of the compressor cylinders which allows for saving a significant amount of energy. Cylinder
Unloading is only available with systems equipped with the power management option.
Key elements of Cylinder Unloading are as follows:
• Enable the Cylinder Unloading using the E_MGMT_ENABLE command
• Set a delay before engaging Cylinder Unloading
• Establish the target temperature to be maintained while unloading is active.
• Establish a delta which creates a safety margin for the target temperature before engaging
cylinder unloading.
Power Management in Standby Mode
When in Standby mode, if cylinder unloading is enabled, the Cylinder Unloader goes active after a
delay period defined by the command POWER_MGMT_STANDBY_DELAY.
• E_MGMT_ENABLE,1P
Enables cylinder unloading - ? = get the status, 0 = disable, 1 = enable
• POWER_MGMT_STANDBY_DELAY,300P
Sets Cylinder Unloader to activate after the system has been in Standby mode for 300 sec-
onds and power management is enabled.
Power Management in Cool Mode
When in the Cool modes of either Standard Cool or Ramp Controlled Cool, a target temperature is used
to define the temperature at which Cylinder Unloading stays active and an additional delta temperature
that must be reached for the Cylinder Unloading to go active.
The typical temperature warming experienced with the cylinder unloader activated varies based on
application conditions. You need to verify and adjust the settings based on the performance of your
application.
• E_MGMT_ENABLE,1P
Enables cylinder unloading - ? = get the status, 0 = disable, 1 = enable
• CAPACITY_TARGET_TEMP, -120P
Sets maximum temperature of -120 for Cylinder Unloading to remain active Will only stay
active once per cycle.
• EXCESS_CAP_TEMP_DELTA,8P
Sets an 8º C delta T value that the temperature must be below
CAPACITY_TARGET_TEMP for Cylinder Unloader to begin.
Brooks Automation
8-2 214072 Revision B
Polycold Cryochiller Configuration
Installation and Operation Manual Mode Selection
Mode Selection
All models have only one Standby mode.
Standby
Set the unit to standby using the operating mode command.
• OPERATING_MODE,1,0P sets circuit 1 to Standby Mode.
Cool Mode Selection
Standard Cool Mode
Standard cool means that the cool valve is activated continuously. It is available on all units. Set the
unit to cool mode using the operating mode command.
• OPERATING_MODE,1,1P sets the Cool mode to Standard.
Defrost Mode Selection
Standard Defrost Mode
In Standard Defrost mode, the unit defrosts the circuit until the return refrigerant reaches a speci-
fied set point. The default defrost termination set point is + 20 °C on all models. The defrost termi-
nation set point is configurable from -40 °C to + 20 °C.
• OPERATING_MODE,1,9P
• DEFR_SETPT,1,10P sets the Defrost complete temperature set point for circuit 1 to 10 C.
Alternate Thermocouple Control
Allows an alternate external or internal thermocouple to monitor and control the circuit performance.
Use this command to define which thermocouple to use for circuit control functions. By default, the con-
trol thermocouple for all circuit functions (i.e. defrost complete, temperature control, etc) is the Return
thermocouple for that circuit. This command allows you to select either the Coil Out, average of Coil In
and Coil Out, or customer process thermocouple.
• EXT_TC_ENABLE,1,1P enables the External Thermocouple for circuit 1.
• EXT_TC_ENABLE,1,0P enables the Internal Thermocouple for circuit 1
Brooks Automation
214072 Revision B 8-3
Configuration Polycold Cryochiller
External Vacuum Control Installation and Operation Manual
External Vacuum Control
Allows external vacuum devices to change the Polycold Cryochiller’s operating mode from Standby to
Cool.
When the circuit is in standby and the external vacuum control is enabled, a 24V signal (AC or DC)
applied to the designated contacts on the 4-pin Gauge Relay port will be detected and cause the unit
to switch to cool.
See Gauge Relay (J4) on page 5-3 for more information on the use of this feature.
• EXT_VAC_CONTACT,1,?P gets the enable/disable status of the circuit 1 Gauge Relay
control.
• EXT_VAC_CONTACT,1,1P enables the Gauge Relay input to be used for circuit 1.
Set Point Relays
All Polycold Cryochillers models equipped with the 24V DI/DO 37 pin interface include this feature. Set-
point relays are outputs that are enabled or disabled by the status of programmable parameters.
A user can configure the behavior of these two relays via software. This allows the user to select the
sensor to be associated with each relay, the set point, deadband and relay logic.
See 24V DI/DO Remote Interface on page 5-17 for more information on the use of this feature.
• SETPOINT_RELAY,1,?P gets the external vacuum device setpoint for Relay 1.
• SETPOINT_RELAY,2,3,1,-30,5P sets the Relay 2 external setpoint to monitor sensor
Circuit1_CoilInTemp and close relay below -30 C with 5º C of dead band which means the
relay opens at -25º C.
Remote Control Methods
The Polycold Cryochillers may be controlled remotely by RS232 or Ethernet or other interfaces. Once
in remote control, system commands may be sent to configure or control the unit.
Commands for remote control are as follows:
• SYSTEM_CONTROL_MODE,2P sets the system to the mode designated by the value
sent by this command, in this case, RS232.
RS232 and Ethernet can set the control and take control using this command. Other
remote interfaces can only set the control when they are in control.
• SYSTEM_CONTROL_MODE_DEF sets the default system control mode that the system
is set to on startup and that the unit goes to when the Remote key is pressed to set the unit
to remote mode.
Brooks Automation
8-4 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
9 Preventive Maintenance
Preventive Maintenance
The best way to ensure maximum productivity for your system is through Polycold’s Preventive Main-
tenance servicing option.
Polycold recommends that the user inspect the system at daily, weekly, monthly and quarterly intervals.
Polycold recommends that every 12 months a preventive maintenance service visit is performed by
Polycold authorized service personnel.
Benefits of Polycold preventive maintenance include:
• Improved system reliability
• Decreased cost of replacement
• Decreased system downtime
Preventive maintenance activities include
• Equipment check
• Top off charge (if required),
• Evacuate and recharge (if required)
• Valve replacement, as necessary
• Insulation inspection and repair
• Data backup
• Battery replacement, as required, (every 5 years)
In addition, the Polycold Engineer will record any equipment deterioration and recommend replacement
parts or repair before these items cause system failure. Preventive maintenance will result in savings
due to an increase of effective system service life.
Brooks Automation
214072 Revision B 9-1
Preventive Maintenance Polycold Cryochiller
Preventive Maintenance Schedules Installation and Operation Manual
Preventive Maintenance Schedules
Interval Action
Daily Ensure the unit is functioning as expected
Weekly Ensure the unit is functioning as expected
Check Temperatures (during process)
Check Pressures (during process)
Monthly Perform Weekly Maintenance
Check Time to Cool Down
Check for air flow from E-box fans
Quarterly Perform Monthly Maintenance
Check system balance pressure
Verify LCD display is not missing characters
Verify HMI keypad / Remote Control functions properly
Verify Insulation is intact
Verify Oil Level in Compressor is appropriate
Power cycle the system. leaving it off for minimum of 10 seconds.
Replace Fan Filter (as appropriate)
Annual Perform Quarterly Maintenance
Replace fan filter (mandatory) and check fan operation
Replace valve and valve components as necessary
Review event files for errors and backup system data (future capability)
Check Cool Down Cycle Time, Pressure, and Temperature
Check Defrost Cycle Time, Pressure, and Temperature
Verify Water Flow and Temperatures
Confirm that customer-provided water filters are replaced as required
Inspect Frame, Compressor, and Components for wear
Reinsulate (as appropriate)
Perform Compressor Pump Down Test
Perform Leak Check on fittings within the Cryochiller and feedthroughs
Clean electronic control box and replace mother board battery as required
(nominally every 3-5 years)
Inspect all harness connections
Top off charge as required
Evacuate and recharge as necessary
Brooks Automation
9-2 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
10 Troubleshooting
Troubleshooting Techniques
Successful troubleshooting involves gathering enough information and asking enough questions to
define the problem using a single statement of how the system is supposed to operate and how the sys-
tem is operating improperly.
Define the Problem
You may be able to define and solve the problem by creating a simple statement that describes the
problem.
• Observe and list the symptoms of the problem
• Determine what is happening that is different from what should happen
• Determine the items that have the problem and those that do not
• Determine when the problem first occurred and how often it occurs
• Determine the state of the system when the problem occurred or occurs
• Reduce the list of symptoms to the primary symptom.
• List the possible causes of the symptom
• Reduce the list of causes based on what is happening and what is supposed to happen.
Contacting Authorized Service
When contacting authorized service, have as much of the following information available as is possible.
• Record the model number, part number, and serial number from the equipment.
• Provide installed location
• Provide name, address, E-mail address, and phone number of person to contact.
• List error codes or symptoms.
• List work done on unit before problem occurred, function unit was performing when the problem
occurred, actions taken after problem occurred.
Brooks Automation
214072 Revision B 10-1
Troubleshooting Polycold Cryochiller
Troubleshooting Tables Installation and Operation Manual
Troubleshooting Tables
Troubleshooting issues are listed in two groups:
• HMI and Observed Errors
• Remote Monitor Troubleshooting using bit mask values
Troubleshooting tables use a 3-column format.
Problem column shows the messages in BOLD UPPER CASE and the status of the Fault LED.
• If the system recognizes a fault, the HMI screen may display a fault message and a recom-
mended action and the Fault LED may be lit.
• If the system does not recognize a fault, the display may not provide any fault information and
the Fault LED may not be lit and the user must determine the problem.
Possible Cause column lists the probable causes of the problem.
Corrective Action column lists recommended actions to correct the problem.
Fault Reporting
If a Fault occurs, the HMI display automatically goes to the Fault State screen and displays the fault and
two lines of the available 3 lines of fault data using the format below:
• Line 1 - Fault State (menu selection header)
• Line 2 - Name of Fault
• Line 3 - Fault description line 1
• Line 4 - Fault description line 2, if applicable
• (scroll) - Fault description line 3, if applicable
To view current Fault information, go to the Fault State display, if required. The Fault State display
shows the current fault and descriptions as stated above.
To view additional faults, if applicable, use the down arrow to display the next fault.
To view all information for the displayed fault, press the Enter key to select the current fault and then
use the arrow keys to scroll through all three lines of information for the current fault. Note that the arrow
keys stay on the selected fault. Press the Enter key again to exit the current fault display.
To exit a selected fault, press the Enter key. The display goes back to the Fault State display and then
the arrow keys may be used to scroll through each of the active faults, if applicable.
Brooks Automation
10-2 214072 Revision B
Polycold Cryochiller Troubleshooting
Installation and Operation Manual HMI and Observed Errors
HMI and Observed Errors
Power Troubleshooting
Troubleshooting power requires that CB1 and CB2 are turned on.
Problem / HMI Display Possible Cause Corrective Action
POWER FAILURE Control voltage is outside of Check the transformer tap set-
acceptable limits. tings and ensure they are cor-
NO RECOMMENDATION rect for your supply voltage
Fault LED is Amber Check supply voltage for devia-
tions beyond the allowable volt-
age range for this tap setting.
(No HMI message) Faulty component in the power Contact authorized service
or control circuit.
No LED indicators
CB1 or CB2 trip, cannot reset.
(No HMI message) Power consumption too close to Refer to Appendix C: CB2
CB1 maximum rated value. Excepted Wiring on page 12-5
No LED indicators
Have a qualified electrician
CB1 occasionally trips rewire CB2 to Excepted Wiring
(No HMI message) No input power Check power source fuses, cir-
cuit breakers, and wiring
No LED indicators
System does not boot up. Contact authorized service to
CB1 stays ON repair as needed
(No HMI message) Motor on/off switch fault Contact authorized service to
check the switch and replace if
Fault LED not lit required.
System boots up
Compressor will not turn on
Communication Troubleshooting
Problem / HMI Display Possible Cause Corrective Action
System does not communi- System electronics is “confused” Power cycle the system.
cate on RS232, Ethernet, Pro-
fibus, or DeviceNet Contact authorized Service
Brooks Automation
214072 Revision B 10-3
Troubleshooting Polycold Cryochiller
HMI and Observed Errors Installation and Operation Manual
Compressor Motor Troubleshooting
Troubleshooting the compressor motor requires that the Polycold Cryochiller is fully booted up.
Problem / HMI Display Possible Cause Corrective Action
Compressor will not start Compressor switch must be on Set compressor switch to ON.
for compressor to run.
No LEDs lit
Compressor switch is off
Compressor will not start Compressor contactor circuit Turn compressor switch OFF
needs to be reset after power up. and then ON
No LEDs lit
Remote EMO connector or J11 Connect remote EMO cable or
Compressor switch is on. bypass is disconnected install J11 EMO Jumper
Remote EMO signal open at Check continuity on pins 3 and
remote device 4 on remote EMO connector.
Correct remote EMO condition.
Remote EMO wiring insufficient Check EMO wiring for 16AWG
Must be 16AWG and less than Correct wiring as required.
15M (50 feet).
Supply voltage too low Check voltage and correct
Compressor will not start Compressor contactor circuit Press Reset switch
needs resetting
Fault LED flashing
A Fault that opens the compres- Determine what fault is active
sor contactor is active and resolve the issue.
Contact authorized service if
fault continues
Compressor will not start Compressor pressure switch Wait for pressure to come down
PS1 is open indicating high dis- below the threshold level.
Fault LED flashing charge pressure
Contact authorized service if
high pressure continues
Compressor thermal cutout Wait for compressor motor to
switch is open cool.
Contact authorized service if
over heating continues
Brooks Automation
10-4 214072 Revision B
Polycold Cryochiller Troubleshooting
Installation and Operation Manual HMI and Observed Errors
Problem / HMI Display Possible Cause Corrective Action
EMO SWITCH ALARM EMO switch is pressed in and Turn EMO switch clockwise to
activated disengage the switch
CHECK EMO SWITCH
Remote EMO is active - open Correct remote EMO condition
Fault LED Amber Remote EMO bypass J11 dis- Connect J11
connected
CONTACTOR CHATTERING Motor contactor is rapidly Verify power supply meets all
opening and closing requirements
CHECK POWER LINE
Verify control transformer tap
Fault LED not lit settings are correct for supply
voltage
Verify transformer output
voltage is in the correct range
If all voltages are in spec. con-
tact authorized service.
ABUSIVE COMP ON ALARM The compressor has been Review cause for multiple
reset too frequently. resets.
WAIT 60 SECONDS
If due to faults, investigate root
Fault LED Amber cause of the faults and correct.
Contact authorized service if
problem cannot be resolved
Fan Fault Troubleshooting
Problem / HMI Display Possible Cause Corrective Action
FAN FAULT WARNING One or more electrical box cool- Check power and cable.
ing fans are not operating. Check fan operation
CHECK COOLING FAN Replace both cooling fans
Fault LED not lit Contact authorized Service
Brooks Automation
214072 Revision B 10-5
Troubleshooting Polycold Cryochiller
HMI and Observed Errors Installation and Operation Manual
Pressure Related Troubleshooting
Problem / HMI Display Possible Cause Corrective Action
DIFFERENTIAL PRESSURE PT1 > PT2 Differential 20psi Pressure Sensor Fault
PT1 = Suction Pressure Trans-
ducer Contact Authorized Service
PT2 = Discharge Pressure
Transducer
Alarm L1
HIGH SUCTION PRESSURE PT1 > 270 psi Escessive Suction Pressure
PT1 = Suction Pressure Trans-
ducer Contact Authorized Service
Alarm L1
REF PRESSURE SWITCH Refrigerant Discharge Pressure Contact authorized Service
Switch has activated.
NO RECOMMENDATION
Fault LED is Red
LOW SUCTION PRESS A low suction pressure Check system balance pres-
condition has occurred. sure. See Appendix H: Rapid
REFRIGERANT LEAK Balance Pressure Check on
CHECK page 12-19
BALANCE PRESSURE If pressure has dropped, check
for leak
Fault LED is Amber Contact authorized service
HIGH DISCHRG PRESS Discharge pressure is too high Review application to ensure it
is within the capability of the
EXCESSIVE HEAT LOAD unit.
Check for excessive heat load.
Fault LED Red Make sure all thermal radiation
shields are in place.
Ensure that the unit has a mini-
mum of 5 minutes in Standby
before switching to cool.
Brooks Automation
10-6 214072 Revision B
Polycold Cryochiller Troubleshooting
Installation and Operation Manual HMI and Observed Errors
Temperature Related Troubleshooting
Problem / HMI Display Possible Cause Corrective Action
FREEZOUT PREVENTION Freeze out prevention sensor is Check refrigerant
experiencing a temperature
Fault LED not lit colder than expected. Check freezeout prevention
valve and thermocouple
Contact authorized service
C1 CUST TC FAILED Thermocouple not proper type Verify that a type T (copper -
C2 CUST TC FAILED constantan thermocouple sen-
sor is being used.
Fault LED is Amber
Thermocouple not properly Check installed polarity of cus-
installed tomer installed thermocouple
Check TC terminal connection
tightness Torque
Spec is 0.34 N-m (3 lb-in)
Check thermal bonding of sen-
sor to tube.
Thermocouple junction not prop- Check TC junction is commer-
erly fabricated cially prepared junction
OR
TC junction is soldered or
welded
TC Junction must NOT be just
twisted wires
HIGH DISCHRG TEMP Compressor discharge tempera- Check cooling water flow
REFRIGERANT LEAK ture is too high
CHECK BALANCE PRES- Contact authorized service
SURE
Fault LED Amber
REF LQD LINE TEMP Cooling water flow and / or Check your temperature and
temperature are outside of flow to ensure it is within
Fault LED is Amber acceptable limits. acceptable limits.
The system turns off due to
excessively low cooling water
temperature, excessively high
cooling water temperature or
insufficient flow.
Brooks Automation
214072 Revision B 10-7
Troubleshooting Polycold Cryochiller
HMI and Observed Errors Installation and Operation Manual
Problem / HMI Display Possible Cause Corrective Action
LQD LINE START TEMP Cooling water flow and / or Check your temperature and
temperature are outside of flow to ensure it is within
NO RECOMMENDATION acceptable limits during system acceptable limits.
start
Fault LED is Amber
This fault will occur during
startup if the system coolant sen-
sor fails to reach a temperature
below 42 C within 14 seconds.
THERMAL OVERLOAD Motor thermostat has tripped Contact authorized service.
NO RECOMMENDATION
CB1 has tripped Check for cause of excessive
Fault LED is Amber thermal load on the cryocoil,
Check if supply voltage is below
nominal conditions.
If application has a combination
of high load, near max rating
and supply voltage is below
93% nominal, have a qualified
electrician rewire CB2 to
“Excepted Wiring”.
See Appendix C: CB2 Excepted
Wiring.
C1 COOL VALVE CYCLE Cool valve requires replacement Contact authorized service
C2 COOL VALVE CYCLE
NO RECOMMENDATION
Fault LED is Amber
C1 DEFR VALVE CYCLE Defrost valve requires replace- Contact authorized service
ment
C2 DEFR VALVE CYCLE
NO RECOMMENDATION
Fault LED is Amber
Brooks Automation
10-8 214072 Revision B
Polycold Cryochiller Troubleshooting
Installation and Operation Manual HMI and Observed Errors
Performance Related Troubleshooting
Problem / HMI Display Possible Cause Corrective Action
Too slow to go to cool Cryosurface full and requires Defrost the cryosurface
defrosting.
Fault LED not lit Contact authorized Service
Date and Time rolled back
Date or Time Troubleshooting
Problem / HMI Display Possible Cause Corrective Action
(No HMI Message) Internal battery is dead and real Reset the real time clock to cor-
time clock has reset to default rect time using remote interface
Fault LED not lit after recent power cycle
Contact authorized Service to
Date and Time rolled back have battery replaced
Brooks Automation
214072 Revision B 10-9
Troubleshooting Polycold Cryochiller
Remote Monitor Troubleshooting Installation and Operation Manual
Remote Monitor Troubleshooting
This section is for the convenience of Remote Monitor troubleshooting. The tables below are the same
faults as previously listed in this chapter but are listed in numerical order of the bitmask value.
This section lists faults in numeric order of the bit mask value as received from the command
ACTIVE_ALARMS. See ALARM_STATUS Current Alarm Status on page 7-18.
For assistance in decoding bitmask values, see 32 Bit Numbered Bitfield on page 7-3.
Bit Mask Value Listing
Bit Mask Value / Problem Possible Cause Corrective Action
Bit 0 Difference between system TC Check customer installed TC for
3/5 and customer installed TC proper installation and proper
Customer Installed TC is out 7/8 greater than value of operation
of range EXT_TC_ALARM when
EXT_TC_ENABLE is set to 1 for Press Reset to clear alarm
Fault LED Amber the circuit
Compressor ON
Absolute difference between
TC3 and TC7 > EXT_TC_
ALARM
or
Absolute difference between
TC5 and TC8 > EXT_TC_
ALARM
Fault sets EXT_TC_ENABLE to
0 for affected Ckt
Alarm L1
Bit 1 Not used N/A N/A
Brooks Automation
10-10 214072 Revision B
Polycold Cryochiller Troubleshooting
Installation and Operation Manual Remote Monitor Troubleshooting
Bit Mask Value / Problem Possible Cause Corrective Action
Bit 2 Coldest Liquid Temperature Check freezeout prevention
(TC4) valve.
Freeze out prevention active
(6C low-side dead band in effect Check freezeout TC installation
Fault LED Amber when FRZ_RREVENT_SETPT > and operation.
Compressor ON -158C)
When FRZ_PREVENT_SETPT
> -158C, then Alarm when TC4
is lower than 6C below
FRZ_PREVENT_SETPT
When FRZ_PREVENT_SETPT
< -158C, then...
Alarm when TC4 is lower than
FRZ_PREVENT_SETPT
Warning L2
Bit 3 Not used N/A N/A
Bit 4 PT1 > PT2 Differential 20psi Pressure Sensor Fault
PT1 = Suction Pressure Trans-
Differential Pressure ducer PT2 = Discharge Pressure Contact Authorized Service
Transducer
Fault LED Amber
Compressor OFF Alarm L1
Bit 5 Suction Pressure Transducer Escessive Suction Pressure
(PT1)
High Suction Pressure PT1 > 270 psi Contact Authorized Service
Fault LED Amber Alarm L1
Compressor ON
Bit 6 Not used N/A N/A
Bit 7 Pressure Transducer PT2 shows Check system load and perfor-
high discharge pressure which mance
High discharge pressure indicates excessive heat load
Fault LED Red PT2 > 3102.6kpa (450 psi)
Compressor OFF Alarm L1
Brooks Automation
214072 Revision B 10-11
Troubleshooting Polycold Cryochiller
Remote Monitor Troubleshooting Installation and Operation Manual
Bit Mask Value / Problem Possible Cause Corrective Action
Bit 8 Compressor Discharge Temper- Contact authorized service
ature (TC1) too high
High discharge temperature TC1 80 to 125C is normal
LED Amber TC1 125 to 148.9C at startup is
normal
Warning: Compressor ON
TC1 135 to 148.9C for 30 min
Alarm: Compressor OFF Warning L2
TC1 135 to 148.9C for 40 min
Alarm L1
TC1 145 to 148.9C for 2 min
Warning L2
TC1 >149C immediate Alarm L1
Bit 9 Rapid Balance Pressure Check Contact authorized service
Valve Cycle Count has exceeded
Rapid Balance Pressure limit
Check Valve Cycle Count
CRYO_VALV_OPEN_CNT
Fault LED Amber for Rapid Balance Pressure
Compressor ON Check Valve >
VALVE_CYCLE_WARN
Alarm L1
Bit 10 Input voltage out of range of Check and correct the input
PWR_WARN_BAND voltage
Input power out of range
Voltage outside of range of
Fault LED Amber PWR_WARN_BAND for 10sec
Warning: Compressor ON Waning L2 - Comp On
Alarm: Compressor OFF (10 sec to restart compressor)
Voltage outside of range of
PWR_WARN_BAND for 30min
Alarm L1 - Comp Off
(10 min to restart compressor)
Voltage above 33.2V for 1min
Alarm L1 -Comp Off
(10 sec to restart compressor)
Brooks Automation
10-12 214072 Revision B
Polycold Cryochiller Troubleshooting
Installation and Operation Manual Remote Monitor Troubleshooting
Bit Mask Value / Problem Possible Cause Corrective Action
Bit 11 Refrigerant Liquid Line Tempera- Check cooling water flow and
ture (TC2) multiple conditions temperature
Refrigerant liquid line temp
TC2 is between 9C and 12C for
Fault LED Amber 1 min.
Warning L1
Warning: Compressor ON
Alarm: Compressor OFF TC2 < 9C for 15 min
Alarm L1
TC2 > LINE_TEMP_FAULT_
LIMIT for 2 min
Alarm L1
TC2 > 50C for 1 min
Alarm L1
TC2 > 60C for 30 sec
Alarm L1
Bit 12 Cooling water is poor Water temperature too high.
Refrigerant Liquid Line Temp Before Comp start Check cooling water flow and
(TC2) before and during oper- TC2 >85C temperature
ation Comp will not start
Fault LED Amber After Comp start
Compressor OFF TC2 > 85C for 14 seconds, then
Alarm L1 Comp OFF
Bit 13 Pressure switch is open Check refrigerant pressure
Pressure switch fault
Refrigerant Pressure Switch Contact authorized service
Alarm L1
Fault LED Red
Compressor OFF
Bit 14 PT1 < -17.9kpa (-2.6psi) Low refrigerant pressure
Alarm L1 Possible refrigerant leak
Low Refrigerant Suction Pres-
sure PT1 < -4.13kpa (-0.6psi) Contact authorized service
for 5 min
Fault LED Amber Alarm L1
Compressor OFF
Brooks Automation
214072 Revision B 10-13
Troubleshooting Polycold Cryochiller
Remote Monitor Troubleshooting Installation and Operation Manual
Bit Mask Value / Problem Possible Cause Corrective Action
Bit 15 Absolute difference between Wait 30 minutes to clear
PT2 and PT1 < 137.9kpa (20
Thermal Overload psi) for 20 seconds Check input power and load.
Fault LED Amber Alarm 1 Check for cause of thermal
Compressor OFF 30 min to restart compressor overload
OR
“Aux” contact pair on the Contac- Check the contactor operation.
tor is 1 (open), and contactor is Check the “Aux” contact set on
programmed to be 0 (closed) the Contactor
Alarm L1
Bit 16 Not used N/A N/A
Bit 17 Not used N/A N/A
Bit 18 Not used N/A N/A
Bit 19 Not used N/A N/A
Bit 20 Buffer Valve cycle count has
exceeded limit
Buffer Valve Cycle Count Contact authorized service
CRYO_VALV_OPEN_CNT
Fault LED Amber for Buffer Valve >
Compressor ON VALVE_CYCLE_WARN.
Alarm L1
Bit 21 Cylinder Unloader Valve Cycle
Count has exceeded limit
Cylinder Unloader Valve Cycle Contact authorized service
CRYO_VALV_OPEN_CNT
Fault LED Amber for Cylinder Unloader valve >
Compressor ON VALVE_CYCLE_WARN
Alarm L1
Bit 22 Cool Valve Cycle Count has
exceeded limit
Cool Valve Cycle Contact authorized service
CIRC_VALV_OPEN_CNT
Fault LED Amber for Cool valve >
Compressor ON VALVE_CYCLE_WARN
Alarm L1
Brooks Automation
10-14 214072 Revision B
Polycold Cryochiller Troubleshooting
Installation and Operation Manual Remote Monitor Troubleshooting
Bit Mask Value / Problem Possible Cause Corrective Action
Bit 23 Defrost Valve Cycle Count has
exceeded limit
Defrost Valve Cycle Contact authorized service
CIRC_VALV_OPEN_CNT
Fault LED Amber for Defrost valve >
Compressor ON VALVE_CYCLE_WARN
Alarm L1
Bit 24 Freezeout Valve Cycle Count
has exceeded limit
Freezeout Valve Cycle Contact authorized service
CRYO_VALV_OPEN_CNT
Fault LED Amber for Freezeout valve >
Compressor ON VALVE_CYCLE_WARN
Alarm L1
Bit 25 Not used N/A N/A
Bit 26 Not used N/A N/A
Bit 27 Not used N/A N/A
Bit 28 EMO switch is open Check EMO switch
EMO Switch Alarm L1 Twist EMO switch CW to reset
Fault LED Amber
Compressor OFF
Bit 29 One or both of the (2) E-Box Check if cooling fans are oper-
cooling fans is disconnected or ating properly
Cooling Fan has stopped
Check power for cooling fans
Fault LED not lit Warning L2
Compressor ON Repair power connection or
replace fan(s)
Bit 30 Compressor Contactor is chat- Check input power
tering ON/OFF due to low volt-
Contactor Chatter age or power issues Check Transformer tap setting
Fault LED not lit Warning L2
Compressor ON
Bit 31 Compressor has been turned Wait one minute to clear before
ON/OFF 3 times within 1 minute compressor allowed to start
Abusive Comp On/OFF
Alarm L1
Fault LED Amber
Compressor ON
Brooks Automation
214072 Revision B 10-15
Troubleshooting Polycold Cryochiller
Remote Monitor Troubleshooting Installation and Operation Manual
This Page Intentionally Left Blank
Brooks Automation
10-16 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
11 Tools and Parts
Tools and Fixtures
The Polycold Cryochiller does not require special tools or fixtures for normal operation or servicing. A
kit of tools and maintenance items comes with each unit.
The tables below list the supplied tools, recommended tools, and optional tools.
Table 11-1: Supplied Tools and Fixtures shipped with the Polycold Cryochiller
Part Number Description and Use
166937 O Ring Removal Tool (part of shipping kit - as required)
Table 11-2: Recommended Tools and Fixtures for the Polycold Cryochiller
Part Number Description and Use
7/16”, 9/16”, 1”, 1 1/16”, 1 5/16”, 1 11/16” wrenches for valve maintenance
1 1/16” Deep socket for valve maintenance
1 1/16” Crow Foot for vale maintenance
1 3/4“ Deep socket for valve maintenance
Adjustable wrenches, as required, if inch wrenches are not available
Table 11-3: Optional Tools and Fixtures for the Polycold Cryochiller
Part Number Description and Use
810030-07 2.5 inch spanner (commonly shipped with cryocoils)
Brooks Automation
214072 Revision B 11-1
Tools and Parts Polycold Cryochiller
Parts Installation and Operation Manual
Parts
Refer to the system documentation for installed components and options.
Parts Shipped with Unit
Table 11-4: Polycold Cryochiller Standard Parts
Part No. Description
840164-XX Shipping Kit
Insulation kit. Components dependent on the system configuration.
Maintenance Items
Maintenance items are dependent on the system configuration and application. Standard maintenance
items are listed in Table 11-5. Contact Brooks Automation Technical Support for additional mainte-
nance items.
Table 11-5: Polycold Cryochiller Maintenance Items
Part No. Description Frequency
171705-01 Fan Filter (one per unit, covers 2 fans) Annually or as required
081009-00 Compressor Oil, POE LT-32 Solest Oil As required
840298-00 3/8 inch Superior Valve Service Kit As required
840279-00 5/8 inch Henry Valve Service Kit As required
380090-00 B-6S1 Valve Service Kit As required
380091-00 B-9 Valve Service Kit As required
(with warm valve gasket)
183901 B-14S2 Solenoid Valve Service Kit As required
(with warm valve gasket)
183902 B-9S2 Valve Service Kit As required
(with Polycold Cryo Valve Gasket)
183903 B-14 Valve Service Kit As required
(with Polycold Cryo Valve Gasket)
Brooks Automation
11-2 214072 Revision B
Polycold Cryochiller Tools and Parts
Installation and Operation Manual Parts
Optional Parts
Table 11-6: Polycold Cryochiller Optional Parts
Part No. Description
840302-00 Lift Ring Option
181500 Terminal Block Accessory Kit
183933 Cryochiller Caster Kit
Contact Brooks Refrigerant Line Set (2 lines)
840305 Gauge Relay Kit (4-pin 11 CPC) (20 to 24AWG)
207104 Remote EMO Kit (4-pin 11 CPC) (16 to 18AWG)
840104-00 24V DI/DO Non-Isolated Remote Connector (37-pin 23 CPC)
With backshell and pins For use with customer cable
840105-00 24V DI/DO Isolated Remote Connector (37-pin 23 CPC)
With backshell and pins For use with customer cable
Brooks Automation
214072 Revision B 11-3
Tools and Parts Polycold Cryochiller
Parts Installation and Operation Manual
This Page Intentionally Left Blank
Brooks Automation
11-4 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
12 Appendices
Contents
Appendix A: Contact Brooks Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-1
Appendix B: Lifting Rings (Optional). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-3
Appendix C: CB2 Excepted Wiring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-5
Appendix D: Remote EMO . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-6
Appendix E: Water Vapor Cryotrapping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-8
Appendix F: Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-10
Appendix G: Zero Line Loss Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-13
Appendix H: Rapid Balance Pressure Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-19
Appendix I: Disconnect, Packing, and Shipping Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . .12-20
Appendix J: Material Safety Data Sheets - MSDS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-21
Appendix A: Contact Brooks Information
When contacting Polycold Division of Brooks Automation for Technical Support, please follow the pro-
cedures described here and have the following information available.
1. Unit Information
• Serial number, Model number, Name of tool:
• Balance pressure of the unit or TC9 at ambient temperature (~ 17°C):
See Appendix H: Rapid Balance Pressure Check on page 12-19
• TC readouts 1-10 in cool mode and standby after 30 minutes:
2. Site Information
• Company Name, Site Location, Street Address, City, State Zip:
3. Contact Information:
• Primary Contact Name, Phone, and E-mail:
• Secondary Contact Name, Phone, and E-mail:
Brooks Automation
214072 Revision B 12-1
Appendices Polycold Cryochiller
Appendix A: Contact Brooks Information Installation and Operation Manual
4. Describe the malfunction observed and any error codes received during the failure.
• Time that this issue has been occurring
• Work that was done on the equipment prior to the error
• Actions taken after the error and the results of those actions
• Other information that may assist the Specialist
5. E-mail this information to Polycold at: [email protected].
Customer Support Information
You can reach Polycold and Brooks Global Customer Operations Teams around the world at the times
and phone numbers below.
Table 12-1:
Weekday Support 5:00 AM to 5:00 PM (PST)
Polycold 1-707-769-7000 (FAX +1-707-769-1380)
E-mail: [email protected]
After Hours Support
Brooks Location: Contact Number
North America 1-800-FOR-GUTS (1-800-367-4887) US/Canada
+1-978-262-2900
E-mail: [email protected]
Germany, France, UK +49 1804 CALL GUTS (+49 1804 2255 4887)
Japan +81-45-477-5980
China +86-21-5131-7066
Taiwan +886-3-552-5225
Korea +82-31-288-2500
Singapore +65-6464-1481
For additional contact information, please go to the Brooks Automation web site at www.brooks.com.
Brooks Automation
12-2 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix B: Lifting Rings (Optional)
Appendix B: Lifting Rings (Optional)
Optional lifting rings may be installed on the top four corners of the Polycold Cryochiller refrigeration
units to aid in lifting and moving.
Load Shift Hazard
When lifting the Polycold Cryochiller using straps and rings, the
straps may shift slightly due to the offset center of gravity and may
cause death or severe injury.
Ensure that the area beneath the hoist is clear of personal and
equipment when lifting the unit.
Heavy Object Hazard
Electrical Equipment Safety guideline IEC61010-1 and UL61010-1
CI.7.5.3 require that the lifting sling have a safety factor (SF) of at
least 4 times (4X) the weight of the load. Other standards have dif-
ferent safety factors.
Use a lifting device and slings rated according to local regulations
but not less than 2132 kg (4700 lb)
Heavy Equipment
This unit can weigh up to 1300lbs (590kg). This unit may fall when
moved improperly which may cause serious injury or death.
To avoid this hazard, follow these precautions:
• Read the user’s manual before moving
• Use all four hoist rings with overhead lift equipment rated for use
with this load with an adequate safety factor.
• Lift with more than 45 degree angle from horizontal
Brooks Automation
214072 Revision B 12-3
Appendices Polycold Cryochiller
Appendix B: Lifting Rings (Optional) Installation and Operation Manual
When using a sling to lift the unit by the lift rings, observe the following:
• The strength the lifting device must be greater than 4 times the weight of the unit being lifted.
• Lift with 4 straps that each have a minimum strength as required by local regulations but not
less than the weight of the item being lifted.
• The length for each strap between the lift ring bolt and the lifting point must be greater than
736mm (29 inches).
• The angle between the sling strap and horizontal at each lift ring must be greater than 45°.
Strength of lift device greater
than 4 times weight of unit
Length of each strap greater
than 736mm (29 in)
Strength of each
Angle of strap strap greater than full
greater than 45° weight of unit
Figure 12-1: Polycold Cryochiller with Lifting Rings
Brooks Automation
12-4 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix C: CB2 Excepted Wiring
Appendix C: CB2 Excepted Wiring
CB2 input wiring is shipped with input power coming from the output terminals T2 and T3 of CB1.
Customers running at low voltage below 93% of nominal voltage and running the system at or near
maximum load may consider an excepted method for wiring CB2. The excepted method is to wire the
two input lines to CB2 directly from the input side L2 and L3 of CB1. This wiring change decrease the
load on CB1 and will not affect the system safety or performance. When the CB2 is wired in the
“excepted method”, wire and label “in accordance to local requirements”.
When CB2 wiring is completed, reinstall the finger guards.
CB1
CB1
T2 and T3
L2 and L3
Output
Input
CB2
Excepted
Input
CB2 Wiring
Standard
Input
Wiring
Figure 12-2: CB2 Input Wiring: Standard CB2 Wiring (left) and Excepted CB2 Wiring (right)
Electric Shock
Contact with exposed electrical conductors may cause electric
shock and death or serious injury.
Replace all finger guards and protective covers for circuit breakers
and transformers, as provided, after electrical connections are
completed.
Brooks Automation
214072 Revision B 12-5
Appendices Polycold Cryochiller
Appendix D: Remote EMO Installation and Operation Manual
Appendix D: Remote EMO
The optional J11 EMO connection allows for a
4-pin Remote EMO control and Remote EMO J11 EMO
Status connection at J11 on the Interface Connector
panel.
The Remote EMO Status and Remote EMO
Control connections allow for monitoring the
status of the compressor contactor and con-
trolling the power to the compressor contac-
tor.
If Remote EMO is not used, J11 EMO Jumper
J11
must be installed or the compressor will not
EMO
operate.
Jumper
Figure 12-3: Remote EMO Connector and J11
EMO Status
Pins 1 and 2 of J11 allow a remote device to sense the status of the Cryochiller EMO circuit.
• Open circuit between this pair of contacts indicates that the compressor contactor is off or
open.
• Closed circuit between this contact pair indicates that the compressor contactor is on and the
compressor is probably running.
EMO Remote Control
Pins 3 and 4 of J11 allow a remote device to interrupt the power to the coil of the contactor which con-
trols the power to the compressor motor. Pins 3 and 4 are in series with the power to the compressor
motor contactor relay.
• When pins 3 and 4 are open, the circuit to the compressor contactor is open. The compressor
cannot operate until this pair is closed. These pins directly interrupt the wiring of the power cir-
cuit that controls the contactor.
• When pins 3 and 4 are closed, the circuit to the compressor contactor is closed. This allows the
compressor contactor to be turned on by the compressor on/off switch on the Cryochiller.
Pins 3 and 4 must be wired to a switch or a set of relay contacts or must be jumpered using the J11
EMO jumper connector.
Brooks Automation
12-6 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix D: Remote EMO
Remote EMO Connector Wiring
System EMO Connection 4-pin Connector (female pins)
Cable Connector 4-pin Cable Connector (male pins) (Amp CPC-11 - 206429-1)
Cable Terminal Pins (4) crimp-tail style male pins for 16 to 18AWG wire size.
Cable Size 16AWG wire required for pins 3 and 4
16 to 18AWG for pins 1 and 2
Cable must be less than 15M (50 feet).
EMO Status Connection Pins 1 and 2 give dry contact switch closure output signal to remote
(Output) device to monitor compressor contactor on/off.
Closed = contactor on. Open = contactor off
EMO Control Connection Pins 3 and 4 interrupt the compressor contactor circuit.
(Input) Switch set or relay contact pair or jumper wire is required for com-
pressor contactor to turn on.
Closed = contactor enabled. Open = contactor disabled
Construct the EMO Remote cable connection following these steps.
• Select a cable that meets the 16AWG size requirements for pins 3 and 4.
• Strip the cable conductors as required for the male crimp terminals.
• Crimp a male terminal onto each conductor in accordance with best practices.
• Place the connector back shell onto the cable.
• Insert the conductor male terminals into the wire side of the connector. See Figure 12-4.
• Thread the connector back shell onto the connector body and tighten firmly.
• Install the cable clamp to the back shell and tighten so that the cable clamp firmly holds the
cable. Check for proper cable restraint. Adjust the cable clamp as required.
Pin 1 - Top
Pin 2 - Right
EMO Status Output
Pin 3 - Left
PIn 4 - Bottom
EMO Control Input
Figure 12-4: J11 Remote EMO Connector - Wire Side View
Brooks Automation
214072 Revision B 12-7
Appendices Polycold Cryochiller
Appendix E: Water Vapor Cryotrapping Installation and Operation Manual
Appendix E: Water Vapor Cryotrapping
Figure 12-5 and Table 12-1 show the relationship between cryosurface temperature and water vapor
partial pressure for different cryotrapping efficiencies.
Figure 12-5: Water Vapor Cryotrapping
Cryosurface Pumping Efficiency
For satisfactory pumping results, cryosurfaces should be operated at temperatures cold enough to pro-
vide 90% or greater trapping efficiency.
0% efficiency occurs when the cryosurface is in equilibrium with water vapor. At this efficiency, satura-
tion is reached and as many water vapor molecules escape from the cryosurface as stick to it. The
right-hand column of Table 12-1 gives the temperatures at which zero pumping occurs at the stated
pressure.
To find the best cryosurface temperature for a vacuum application, find the pressure at which the sys-
tem operates in the left column of Table 12-1 and then follow across to the column showing 90% effi-
ciency. This is the warmest temperature that the cryosurface must be for efficient water vapor pumping.
In general, the deeper the vacuum level, the colder the cryosurface must be in order to trap water vapor
at optimum efficiency. For example, for an application requiring a vacuum pressure range of 1 x 10-5
torr, the cryosurface needs to reach a temperature of -112°C or colder to achieve a water vapor trapping
efficiency of 90% or better. For an application requiring 5 x 10-7 torr, the cryosurface must be cooled to
-124°C to obtain the same efficiency.
Brooks Automation
12-8 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix E: Water Vapor Cryotrapping
The average cryosurface temperature is a convenient number to use when there is a temperature gra-
dient between the coil inlet and coil outlet temperatures. The average cryosurface temperature is simply
the average of the coil inlet and coil outlet temperatures. In non-cryopumping applications, such as
those used for heat removal, it is the coil outlet temperature that is most important.
Table 12-1: Cryosurface Temperature needed for desire Water Vapor Partial Pressure
Desired Water
Vapor Partial Cryosurface Temperature Needed, °C
Pressure
torr mbar 98% 95% 90% 80% 60% 20% 0%
5.0E+00 6.7E+00 -40.8 -32.3 -25.4 -18.2 -10.5 -2.3 1.0
2.0E+00 2.7E+00 -48.7 -40.8 -34.4 -27.7 -20.6 -13.0 -9.7
1.0E+00 1.3E+00 -54.3 -46.8 -40.8 -34.4 -27.7 -20.6 -17.3
5.0E-01 6.7E-01 -59.7 -52.6 -46.8 -40.8 -34.4 -27.7 -24.5
2.0E-01 2.7E-01 -66.4 -59.7 -54.3 -48.7 -42.8 -36.5 -33.4
1.0E-01 1.3E-01 -71.2 -64.8 -59.7 -54.3 -48.7 -42.8 -39.7
5.0E-02 6.7E-02 -75.8 -69.7 -64.8 -59.7 -54.3 -48.7 -45.6
2.0E-02 2.7E-02 -81.5 -75.8 -71.2 -66.4 -61.4 -56.1 -53.1
1.0E-02 1.3E-02 -85.6 -80.1 -75.8 -71.2 -66.4 -61.4 -58.4
5.0E-03 6.7E-03 -89.6 -84.3 -80.1 -75.8 -71.2 -66.4 -63.5
2.0E-03 2.7E-03 -94.6 -89.6 -85.6 -81.5 -77.2 -72.7 -69.9
1.0E-03 1.3E-03 -98.2 -93.4 -89.6 -85.6 -81.5 -77.2 -74.4
5.0E-04 6.7E-04 -101.6 -97.0 -93.4 -89.6 -85.6 -81.5 -78.8
2.0E-04 2.7E-04 -106.0 -101.6 -98.2 -94.6 -90.8 -86.9 -84.3
1.0E-04 1.3E-04 -109.1 -104.9 -101.6 -98.2 -94.6 -90.8 -88.2
5.0E-05 6.7E-05 -112.2 -108.1 -104.9 -101.6 -98.2 -94.6 -92.0
2.0E-05 2.7E-05 -116.0 -112.2 -109.1 -106.0 -102.7 -99.3 -96.8
1.0E-05 1.3E-05 -118.8 -115.1 -112.2 -109.1 -106.0 -102.7 -100.3
5.0E-06 6.7E-06 -121.5 -117.9 -115.1 -112.2 -109.1 -106.0 -103.6
2.0E-06 2.7E-06 -125.0 -121.5 -118.8 -116.0 -113.1 -110.1 -107.8
1.0E-06 1.3E-06 -127.5 -124.1 -121.5 -118.8 -116.0 -113.1 -110.8
5.0E-07 6.7E-07 -129.9 -126.7 -124.1 -121.5 -118.8 -116.0 -113.8
2.0E-07 2.7E-07 -132.9 -129.9 -127.5 -125.0 -122.4 -119.7 -117.5
1.0E-07 1.3E-07 -135.2 -132.2 -129.9 -127.5 -125.0 -122.4 -120.2
5.0E-08 6.7E-08 -137.3 -134.5 -132.2 -129.9 -127.5 -125.0 -122.8
2.0E-08 2.7E-08 -140.1 -137.3 -135.2 -132.9 -130.6 -128.2 -126.2
1.0E-08 1.3E-08 -142.1 -139.5 -137.3 -135.2 -132.9 -130.6 -128.6
5.0E-09 6.7E-09 -144.1 -141.5 -139.5 -137.3 -135.2 -132.9 -131.0
2.0E-09 2.7E-09 -146.6 -144.1 -142.1 -140.1 -138.0 -135.9 -133.9
1.0E-09 1.3E-09 -148.4 -146.0 -144.1 -142.1 -140.1 -138.0 -136.1
Brooks Automation
214072 Revision B 12-9
Appendices Polycold Cryochiller
Appendix F: Feedthroughs Installation and Operation Manual
Appendix F: Feedthroughs
About Feedthroughs
Feedthrough must be selected to match the requirements of the process.
Feedthroughs are used to provide feed and return refrigerant to and from the Polycold Cryochiller cryo-
surface through the vacuum chamber wall.
One single feedthrough typically incorporates both feed and return lines for the cryosurface.
Typical Brooks Polycold feedthroughs used with the Polycold Cryochiller have a 50mm (2.0 inch) diam-
eter barrel that fits into the vacuum chamber wall. See Figure 12-6. See Figure 12-7 for a close-up of a
feedthrough showing the diameter of the barrel of the feedthrough that fits into the hole in the vacuum
chamber wall.
P/N 409054-00 has copper tubing. P/N 409053-00 has stainless steel tubing.
Additional feedthrough models are also available from Brooks Polycold, including single-pass
feedthroughs for 25mm (1 inch) diameter holes. A total of two such single-pass feedthroughs are
required for each cryocoil.
NOTE: Brooks Automation Polycold feedthroughs are designed to be installed from the inside of
the vacuum chamber. This permits removal of the cryosurface when cleaning or servicing
the vacuum chamber.
Table 12-2: Specifications for Polycold Cryochiller Feedthrough
Parameter Specification
Number 228 [57mm (2.25 inches) ID X 3 mm (0.1.25 inch) section]
Material Buna-nitrile
Surface 66mm (2.60 inches)
Surface roughness not to exceed 0.81 micron (32 micro-inch 0.000032 inch)
Must be flat, clean, and free of scratches or deposits.
Brooks Automation
12-10 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix F: Feedthroughs
Figure 12-6: Polycold's Two-Inch (50 mm) Feedthrough with Port Requirements
Figure 12-7: Close-up Detail of Feedthrough Connection (Feed and Return Tubes not Shown)
Brooks Automation
214072 Revision B 12-11
Appendices Polycold Cryochiller
Appendix F: Feedthroughs Installation and Operation Manual
Figure 12-8: Feedthrough; Version -2 and -03
Figure 12-9: .Feedthrough; Version -04
Figure 12-10: .Feedthrough; Version -05
Brooks Automation
12-12 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix G: Zero Line Loss Procedure
Appendix G: Zero Line Loss Procedure
This procedure is used to pull the refrigerant into the Polycold Cryochiller in order to evacuate the exter-
nal refrigerant lines to repair a refrigerant line leak. This procedure is also found in “Service Procedure,
Zero Line Loss, Polycold Cryochiller”, p/n 185307
Item Description
Electrical Category Type 2 - Equipment is energized. Energized circuits are covered and insulated.
Tools and materials: Standard Hand Tools
Open end wrenches or adjustable wrenches as required
1 1/16 inch Crow foot wrenches or deep socket wrenches as required
Service menu authorization access code
One of the three manifold selections listed below
• Service Bypass Line with hand valve, pressure gauge, and (1) 1/4” T adapter
and (2) 1/4” evacuation lines
• Three-Port Refrigeration Manifold, a ¼” Tee adaptor, and (4) ¼” evacuation lines
• Four-Port Refrigeration Manifold and (3) ¼” evacuation lines
NOTICE
Untrained or improperly equipped personnel performing this procedure may cause
damage to the equipment.
• Only Brooks Automation, Polycold Division, trained personnel should perform
this procedure.
• Personnel performing this procedure must read and understand this proce-
dure, the Safety chapter of the Polycold Cryochiller Service Manual, and have
the proper tools and supplies ready before starting.
• Personnel performing this procedure must know the applicable regulatory and
safety codes, facility safety procedures, safety equipment, and contact infor-
mation.
Procedure
Step Action
1. Set the Polycold Cryochiller to Defrost Mode
2. Wait for the Polycold Cryochiller to complete the Defrost cycle and indicate that defrost is compete
with the Standby and Heat indicators illuminated.
Brooks Automation
214072 Revision B 12-13
Appendices Polycold Cryochiller
Procedure Installation and Operation Manual
Step Action
3. Turn off the Polycold Cryochiller.
If the unit has the Rapid Balance Pressure Option, perform a Rapid Balance Pressure Check.
Otherwise, wait for at least two hours for the system to come to ambient temperature
4. Open the valve box.
Close the Cold Gas Feed, Hot Gas Feed, and Common Return hand valves.
Evac Ckt 1
Valve
Hot Gas Feed
Cold Gas Feed Valve
Valve
Common Return
Valve
5. If using a Service Bypass Line:
• Close the hand valve on the service bypass line by turning the handle fully clockwise.
If using a Three or Four-Port Refrigeration Manifold:
• Close all manifold hand valves by turning them clockwise.
6. Remove the caps from the output end of the Evac Ckt 1 hand valves in the valve box for the circuit
being evacuated.
Brooks Automation
12-14 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Procedure
Step Action
7. For Service Bypass Line
Connect the 1/4” service line from the pressure gauge end of the service bypass line to the evacua-
tion port in the valve box for the circuit to be evacuated.
Pressure Gauge
1/4” Line
Hand Valve
1/4” Line
8. For Three Port Refrigeration Manifold
Connect the 1/4” service line from the high pressure port to the evacuation port in the valve box for
the circuit to be evacuated.
If evacuating a dual circuit unit, connect to both ports using a “T” fitting.
Low Pressure High Pressure
Gauge Gauge
Low Pressure High Pressure
Hand Valve Hand Valve
Low Pressure High Pressure
Port Port
1/4” Line 1/4” Line
Brooks Automation
214072 Revision B 12-15
Appendices Polycold Cryochiller
Procedure Installation and Operation Manual
Step Action
9. For Four Port Refrigeration Manifold
Connect the 1/4” service line from the high pressure gauge port to the evacuation port in the valve
box for the circuit to be evacuated.
If evacuating a dual circuit unit, connect to both the high pressure gauge port and the vapor charg-
ing port to each evacuation port in the valve box.
Low Pressure
Gauge High Pressure
Gauge
Low Pressure Vapor Charging
Hand Valve Hand Valve
Vacuum Pump High Pressure
Hand Valve Hand Valve
High Pressure
Low Pressure Port
Port Vapor Charging
Port
1/4” Line 1/4” Lines
10. For Service Bypass Line
Connect the 1/4” service line from the hand valve on the service bypass line to the Low Pressure
Service Suction Port on the back of the compressor.
For Three or Four Port Refrigeration Manifold
Connect the 1/4” service line from the low pressure port to the Low Pressure Service Suction Port
on the back of the compressor.
Low Pressure
Low Pressure Service Suction
Service Suction Port
Valve Stem
Brooks Automation
12-16 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Procedure
Step Action
11. Turn on the cryochiller.
Set the system control mode to Local. The Remote LED is OFF when system control is set to Local.
12. Use the HMI keypad and follow the steps to select the ZERO LINE LOSS function.
• From the Main Menu, navigate to the SERVICE MENU selection. Press the Enter key to
select.
• Navigate to AUTHORIZATION CODE. Press Enter.
• Input the LEVEL 3 authorization code to access the function.
• A menu of service options appears.
• Scroll down to ZERO LINE LOSS. Press Enter.
• Scroll down to CONTINUE. Press Enter.
13. Turn on the compressor by the turning the Compressor On/Off toggle switch to On.
14. Open the Evac Ckt 1 hand valve for the refrigerant lines to be evacuated.
15. For Service Bypass Line:
• Slowly open the hand valve on the service bypass line to bleed the pressure.
• After the pressure equalizes, fully open the valve.
For a standard Three-Port Refrigeration Manifold
• Slowly open the High Pressure Hand Valve on the manifold to bleed in the pressure.
• After the pressure equalizes, fully open the valve.
• Repeat this process for the Low Pressure Hand Valve.
For a Four-Port Refrigeration Manifold:
• Slowly open the High Pressure Hand Valve on the manifold to bleed in the pressure.
• After the pressure equalizes, fully open the valve.
• Repeat this process first for the Vapor Charging Hand Valve and then for the Low Pres-
sure Hand Valve.
16. Purge the line connected to the Low Pressure Service Suction Port by loosening the fitting
(~1/4-turn) just enough to hear gas escape for approximately 2 seconds and then retighten the fit-
ting.
17. Turn the compressor suction service valve fully in to the front seated position to open the compres-
sor suction to the evacuation line.
18. Continue with the vacuum extraction until the compound pressure gauge reads 15 inches mercury
(50.8 kPag) (7.36 Psig) or lower.
Brooks Automation
214072 Revision B 12-17
Appendices Polycold Cryochiller
Procedure Installation and Operation Manual
Step Action
19. For a Service Bypass Line:
• Close the service bypass line hand valve.
For a Three-Port Refrigeration Manifold:
• Close the High Pressure Hand Valve.
For a Four-Port Refrigeration Manifold:
• Close both the High Pressure Hand Valve and the Vapor Charging Hand Valve.
20. Close the Evac Ckt 1 hand valve that are opened for evacuation.
21. Turn off the compressor by turning the Compressor On/Off toggle switch to Off.
22. For a Service Bypass Line:
Observe the compound pressure gauge on the service bypass line for 2 minutes.
• If the pressure rises, go to step 4 and close the hand valves tighter and start over from step
3.
• If the pressure does not rise after 2 minutes, turn the compressor suction service valve fully
out to the back seated position.
For a Three or Four-Port Refrigeration Manifold:
Observe the Low Pressure Gauge on the manifold for 2 minutes.
• If the pressure rises, go to step 4 and close the hand valves tighter and start over from step
3.
• If the pressure does not rise after 2 minutes, turn the compressor suction service valve fully
out to the back seated position.
23. Confirm that the evacuation port Evac Ckt 1 hand valve is closed.
24. Press the Enter key on the HMI keypad.
25. Disconnect all ¼” lines and “T” adapters from the compressor Low Pressure Service Suction Port
and Evac Port(s).
26. Reinstall the caps on the evacuation hand valve and the compressor low pressure service suction
port.
27. Recheck the “packing nut” on the Evacuation Valve for proper tightness to prevent possible leaks.
Brooks Automation
12-18 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix H: Rapid Balance Pressure Check
Appendix H: Rapid Balance Pressure Check
Rapid Balance Pressure Check, sometimes referred to as Stack Warm, is a method to rapidly check the
equalized system pressure to confirm proper system charge. Balance pressure is the pressure of the
refrigerant when the compressor is at rest and the suction and discharge pressures have equalized to
the same pressure.
Rapid BP Check is done by rapidly warming the system and then allowing the suction and discharge
pressure transducers to reach equilibrium. Once at equilibrium, the pressure gauge reading is the Bal-
ance Pressure. This pressure is very close to the static pressure and very useful for service purposes.
The amount of time that it takes the system to reach the end of the Rapid BP Check is dependent on
the state of the system, the load of the system, and the temperature and flow rate of the cooling water.
Nominal Rapid BP Check takes approximately 15 minutes. Note that unlike other products, the Polycold
MaxCool Cryochiller does not require 48 hours to reach balance pressure.
The vacuum chamber should be in a vacuum state when operating the Rapid BP Check Mode. Oper-
ating this feature when the cryosurface is not in a vacuum environment may cause excessive heat loss
and the process may not be able to complete.
When Rapid Balance Pressure check is completed, some service functions may be performed. How-
ever, charge removal requires a waiting period of a minimum of 12.
Static Pressure versus Rapid Balance Pressure
Static pressure is different from Balance pressure due to the fact that static pressure requires that the
unit is at rest and at ambient temperature for 48 hours or longer. Balance Pressure and Static pressure
may be different by 5 to 20 psi.
To make Rapid Balance Pressure check more relevant, the user should perform a Rapid Balance Pres-
sure check soon after installation. This value should be recorded for future reference.
Rapid Balance Pressure Check Procedure
1. Verify the vacuum chamber is in a vacuum state, typically 10-3 torr or below.
2. Use the HMI keypad to go to the SERVICE MENU and press “Enter”.
3. Scroll to the AUTHORIZATION CODE. Press “Enter”.
4. Enter the authorization code for Security Level 2 (Default Operator Access). Press “Enter”. See
Security Levels on page 7-7.
5. Scroll down to “INIT RAPID BP CHECK”. Press “Enter”.
6. The system performs a rapid defrost and stops the Rapid BP Check procedure when the endpoint
has been reached.
7. Wait until the suction and discharge pressure transducers reach equilibrium. This typically takes
about 5 minutes.
Note that the transducers may not read the same value when at equilibrium but may have a slight
offset due to gauge accuracy.
Brooks Automation
214072 Revision B 12-19
Appendices Polycold Cryochiller
Appendix I: Disconnect, Packing, and Shipping Instructions Installation and Operation Manual
8. When the transducers are at equilibrium and hold a steady value, take a pressure reading. This is
the Balance Pressure.
Appendix I: Disconnect, Packing, and Shipping Instructions
If the Polycold Cryochiller is to be shipped, it must be properly packaged to ensure it arrives undam-
aged.
NOTE: The original shipping crates or equivalent must be used when shipping the Cryochiller. If
the original crates are lost or damaged, contact Brooks Automation for replacements.
Electrical Hazard
Contact with energized equipment can cause electric shock and
result in death or serious injury.
Avoid contact with electrical circuits.
Disconnect electric energy before disassembling electric service.
NOTICE
Refrigerant removal or charging must be performed by Brooks Service personnel
or Brooks authorized service providers.
Customers must never attempt to add or remove refrigerant from the system.
Item Description
Electrical Category Type 2 - Equipment is energized. Energized circuits are cov-
ered or insulated.
840164-XX Shipping Kit
XX designates the kit version for the Polycold Cryochiller
Tools and materials: Standard tool kit and refrigerant line tools.
Moisture, Shock, and Tip indicators as required
Brooks Automation
12-20 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix J: Material Safety Data Sheets - MSDS
Packing Procedure
1. Evacuate the refrigerant from the refrigerant lines and cryosurface by performing the
Zero Line Loss procedure. See Appendix G: Zero Line Loss Procedure on page 12-13
2. Carefully disconnect the cryosurface, refrigerant lines, and thermocouples and package them for
shipment.
3. Disconnect all external wiring and facilities connections.
4. Lock down the compressor to the frame by installing the double lock-down nuts on each of the (4)
compressor bolts.
5. Secure all panels firmly in place with shrink wrap or similar product.
6. Firmly secure the Polycold Cryochiller to a shipping pallet and cover with a cardboard enclosure.
7. Add shipping indicators, if required.
Appendix J: Material Safety Data Sheets - MSDS
Document 825086-00 provides the MSDS information for the blends of refrigerant gas.
Document 825103-00 provides the MSDS information for the compressor oil.
Brooks Automation
214072 Revision B 12-21
Appendices Polycold Cryochiller
Appendix J: Material Safety Data Sheets - MSDS Installation and Operation Manual
MSDS - Refrigerant Gas
Brooks Automation, Inc. Tel (707) 769-7000
3800 Lakeville Highway Fax (707) 769-1380
Petaluma, CA 94954 www.brooks.com
Material Safety Data Sheet
PRODUCT IDENTIFICATION
Product Name: INERT-HFC POLYCOLD® Refrigerant (Proprietary)
Chemical
Hydro fluorocarbons and Inert Gas Mixture
Classification:
Product Use: Refrigerant Gas
Manufacturer’s Name: Brooks Automation Inc.
Address: 3800 Lakeville Highway, Petaluma, CA 94954
Business Phone: (707) 769-7000
Emergency Phone:
Chemtrec North 1-800-424-9300 or 1-703-527-3887
America:
Preparation Date: May 7, 2001
Revision Date: November 01, 2005
COMPOSITION AND INFORMATION ON INGREDIENTS
Ingredients CAS No. EINECS No. R Phrases
Proprietary blend of HFC
(hydro fluorocarbon) N/A N/A R36/37
refrigerant gases
Inert gas N/A N/A R36/37
HAZARD IDENTIFICATION
Symptoms of Exposure by Route
The most significant route for overexposure is through
inhalation of high concentrations of the gas product.
Overexposure may cause central nervous system depression
and oxygen deficiency. Effects of overexposure may include
Inhalation: light-headedness, giddiness, shortness of breath, headaches,
and in extreme cases, irregular heartbeats, cardiac arrest,
and death. Symptoms of overexposure at lower
concentrations may include transient eye, nose, and throat
irritation.
Contact with rapidly released gas may cause frostbite. Other
direct dermal contact may result in skin de-fatting, dryness,
Skin Contact:
irritation, or contact dermatitis. Symptoms of frostbite may
include changes in skin color to white or grayish-yellow.
Eye contact with rapidly released gas may cause severe
Eye Contact: frostbite damage to eyes and lids. Eye irritation may occur
with exposure to low concentrations.
825086-00 REV 07 Page 1 of 7 Brooks Automation, Inc
Brooks Automation
12-22 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix J: Material Safety Data Sheets - MSDS
Brooks Automation, Inc. Tel (707) 769-7000
3800 Lakeville Highway Fax (707) 769-1380
Petaluma, CA 94954 www.brooks.com
(cont.) HAZARD IDENTIFICATION
Perforation of the stomach lining and nausea may develop if
Ingestion:
liquid product is ingested.
Inhalation associated with deliberate abuse, or spills
Other Potential Health occurring in poorly ventilated areas, may result in severe
Effects: cardiovascular and respiratory effects, and even sudden
death.
OSHA - No
Carcinogenicity: NTP - No
IARC - No
Exposure to high concentrations may result from a release or
spill in a poorly ventilated area. Inhalation of high-
concentrations may result in suffocation from oxygen
Health Effects or Risk deprivation or other severe health effects including central
of Exposure: nervous system depression, heart attack, and sudden death.
Direct skin or eye contact with rapidly released gas may
cause frostbite and severe tissue damage.
FIRST-AID MEASURES
Administer fresh air immediately. Use a bag valve mask or
Inhalation: similar device to perform artificial respiration (rescue
breathing) if needed. Get medical attention immediately.
Wash if needed. If frostbite, freezing, or cryogenic burns
occur, warm affected area in warm water. If this is not
Skin Contact: available, gently wrap affected parts in blankets. Allow
circulation to return naturally. Get medical attention
immediately.
Wash with large amounts of water or normal saline until no
evidence of chemical remains (at least 15-20 minutes). Get
Eye Contact:
medical attention immediately. Remove contact lenses if
easily possible.
Ingestion: Get medical attention immediately.
FIRE-FIGHTING MEASURES
Flashpoint: Not applicable.
Auto-ignition
Not applicable.
Temperature:
Flammable Limits (in
Not applicable.
air by volume, %)
Fire Extinguishing
Use media appropriate for surrounding materials.
Media:
825086-00 REV 07 Page 2 of 7 Brooks Automation, Inc
Brooks Automation
214072 Revision B 12-23
Appendices Polycold Cryochiller
Appendix J: Material Safety Data Sheets - MSDS Installation and Operation Manual
Brooks Automation, Inc. Tel (707) 769-7000
3800 Lakeville Highway Fax (707) 769-1380
Petaluma, CA 94954 www.brooks.com
(cont.) FIRE-FIGHTING MEASURES
CAUTION: Cylinders that are exposed to heat from a fire may
rupture or burst and release contents. Although this material
Unusual Fire and is non-flammable, the contents can present health hazards to
Explosion Hazards: firefighters if involved in a fire. When involved in a fire, this
material may decompose and produce toxic hydrogen
fluoride and carbonyl fluoride gases.
Move containers away from fire if possible without personal
Special Fire Fighting risk. Keep containers cool well after fire is out. Stay upwind
Procedures: and keep out of low areas. Ventilate closed spaces prior to
entry.
ACCIDENTAL RELEASE MEASURES
Stop leak immediately if possible without personal risk.
Keep people away, isolate area, and deny access. Gases
may be heavier than air and spread along the ground and
Spill and Leak collect in low or confined areas (sewers, basements,
Response: tanks). Stay upwind and avoid low areas. Ventilate closed
spaces prior to entry. If possible, turn leaking containers so
that gas escapes rather than liquid. Water spray may be
used to reduce vapor cloud drift.
Environmental
Do not allow product to enter drains or watercourses.
Precautions:
HANDLING AND STORAGE
Cylinders should be stored in dry, well-ventilated areas away
from sources of heat. Store cylinders away from heavy traffic
Storage and Handling or equipment operation areas and emergency exits. Confirm
Practices: that storage and handling is in accordance with all current
regulations and standards. Keep separated from
incompatible substances (See section 10).
Special Precautions
Protect cylinders against physical damage. Do not allow
for Handling Gas
temperature of storage areas to exceed 52 oC (125o F).
Cylinders:
EXPOSURE CONTROLS – PERSONAL PROTECTION
Ventilation and
Provide local exhaust ventilation.
Engineering Controls:
Respiratory If a worker exposure to this gas is going to occur, then
Protection: respiratory protection should be used.
Splash goggles, face shields, or safety glasses should be
Eye Protection:
used for protection from rapidly expanding gas.
Wear Viton or rubber gloves if contact with gas or liquid may
Hand Protection:
occur.
A protective suit should be worn to prevent frostbite and skin
Body Protection:
contamination if contact with liquid or gas may occur.
825086-00 REV 07 Page 3 of 7 Brooks Automation, Inc
Brooks Automation
12-24 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix J: Material Safety Data Sheets - MSDS
Brooks Automation, Inc. Tel (707) 769-7000
3800 Lakeville Highway Fax (707) 769-1380
Petaluma, CA 94954 www.brooks.com
PHYSICAL AND CHEMICAL PROPERTIES
Physical State: Odorless gas or liquid
Vapor Density (range
of individual
components at 1.4 - 4.2 (Heavier than air).
standard temperature
and pressure):
Specific Gravity: Not applicable.
Evaporation Rate: Not available.
Vapor Pressure: Not available.
Odor Threshold: Not available.
Appearance and
Colorless gas in normal conditions.
Color:
How to Detect This The gas is not visible, however, rapidly released gases may
Substance (Warning cause the formation of a vapor cloud. The gas may be
Properties): odorless or have a very slight, sweet odor.
pH: Not applicable
Freezing Point : Less than –100o C
Boiling Point : Less than –128o C
STABILITY AND REACTIVITY
Stability: Stable at normal temperatures and pressures.
Hazardous
Thermal decomposition or burning of gas may produce
Decomposition
hydrogen fluoride and carbonyl fluoride.
Products:
POWDERED ALUMINUM AND ACTIVE METALS are not
compatible with this gas product and may produce violent
reactions.
POLYSTYRENE is not compatible with this gas product and
may produce violent reactions.
Materials with Which
ALKALINE EARTH METALS like calcium, magnesium,
Substance is
sodium, potassium, lithium, and barium are not compatible
Incompatible:
with this gas and may produce violent reactions.
EARTH METALS like silver, brass, bronze, and copper may
enhance the decomposition of this gas at elevated
temperatures.
OXIDIZERS may produce fire and explosion hazards.
Hazardous
Will not polymerize.
Polymerization:
825086-00 REV 07 Page 4 of 7 Brooks Automation, Inc
Brooks Automation
214072 Revision B 12-25
Appendices Polycold Cryochiller
Appendix J: Material Safety Data Sheets - MSDS Installation and Operation Manual
Brooks Automation, Inc. Tel (707) 769-7000
3800 Lakeville Highway Fax (707) 769-1380
Petaluma, CA 94954 www.brooks.com
TOXICOLOGICAL INFORMATION
Toxicity Data: Low order of toxicity.
Suspected Cancer
Not a suspected cancer agent.
Agent:
Irritancy of Product: Product may cause irritation through all routes of exposure.
Weak cardiac sensitization, a potentially fatal disturbance of
Sensitization to the
the heart, is caused by a heightened sensitivity to the action
Product:
of epinephrine after exposure to gas components.
Reproductive Toxicity No reproductive toxic effects on humans have been
Information: described for the components of this product.
Medical Conditions Cardiovascular, pulmonary, and central nervous system
Aggravated by medical conditions may be aggravated by inhalation of this
Exposure: gas.
Do not administer adrenaline due to the sensitizing effect of
fluorocarbons on the myocardium. Treatment of
overexposure should be directed at the control of symptoms
and the clinical condition. Exposure to fluorocarbon pyrolysis
Recommendations to
products should be considered in the diagnostic evaluation of
Physicians:
occupationally related fever of short duration and unknown
origin. Signs of exposure include tachycardia, hyperpnea,
and pharyngeal congestion; investigation may reveal
pulmonary edema and leucocytosis.
Biological Exposure
None.
Indices (BEIs):
ECOLOGICAL INFORMATION
Gas components are expected to volatilize rapidly from soil
Environmental
and water surfaces. Vapor phase gases are expected to
Stability:
degrade very slowly in the ambient atmosphere.
Effect of Material on Compounds are not expected to bioconcentrate in organisms.
Plants or Animals: Specific toxic effects are not known.
Effect of Chemical on
Bioconcentration in aquatic life is expected to be low.
Aquatic Life:
DISPOSAL CONSIDERATIONS
Preparing Wastes for
Dispose in accordance with all applicable regulations.
Disposal:
TRANSPORTATION INFORMATION
Proper Shipping Names
For Shipments of Refrigerant gases, n.o.s., 2.2, UN 1078,
Cylinders: (contains hydrofluorocarbons, inert gas).
Units contain less than 25 pounds (12 kg) of non-flammable,
For Shipments of non-toxic refrigerant gas. In accordance with Section
Refrigeration Units: 173.307 (a) (4) (i) of 49 CFR, units are not subject to the
requirements of Hazardous Materials Regulations.
825086-00 REV 07 Page 5 of 7 Brooks Automation, Inc
Brooks Automation
12-26 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix J: Material Safety Data Sheets - MSDS
Brooks Automation, Inc. Tel (707) 769-7000
3800 Lakeville Highway Fax (707) 769-1380
Petaluma, CA 94954 www.brooks.com
(cont.) TRANSPORTATION INFORMATION
U.N. Hazard Class
2.2 (Non-Flammable Gas)
Number:
U.N. Identification
UN 1078 for shipments of cylinders.
Number:
Packing Group: Not applicable.
North American
Emergency Response
126
Guidebook Number
(2000):
Marine Pollutant: Not applicable.
Canada Transportation
This material is considered a dangerous good. Use the
of Dangerous Goods
above information to prepare Canadian shipments.
Regulations:
REGULATORY INFORMATION
U.S. SARA Reporting
None.
Requirements:
U.S. SARA Threshold
Not applicable.
Planning Quantity:
U.S. CERCLA
Reportable Quantity Not applicable.
(RQ):
Canadian DSL/NDSL
Not applicable.
Inventory Status:
U.S. TSCA Inventory Hydrofluorocarbon gas constituents are listed on the TSCA
Status: inventory.
U.S. State Regulatory This product is subject to state worker and community Right-
Information: to-Know Acts.
California Safe
Drinking Water and
Product ingredients are not listed.
Toxic Enforcement Act
(Proposition 65):
Labeling:
CAUTION: THIS UNIT HAS INTERNAL SYSTEMS WITH
LIQUID AND GAS UNDER PRESSURE. Store and use in a
well-ventilated area where temperatures will not exceed 52o
Refrigeration Units:
C (125o F). Contact the manufacturer or a certified technician
for the repair and maintenance of internal refrigeration
systems.
825086-00 REV 07 Page 6 of 7 Brooks Automation, Inc
Brooks Automation
214072 Revision B 12-27
Appendices Polycold Cryochiller
Appendix J: Material Safety Data Sheets - MSDS Installation and Operation Manual
Brooks Automation, Inc. Tel (707) 769-7000
3800 Lakeville Highway Fax (707) 769-1380
Petaluma, CA 94954 www.brooks.com
(cont.) REGULATORY INFORMATION
CAUTION: LIQUID AND GAS UNDER PRESSURE. CAN
CAUSE RAPID SUFFOCATION. MAY CAUSE
FROSTBITE. Store and use with adequate ventilation. Do
not get liquid in eyes, on skin or clothing. Cylinder
temperature should not exceed 52oC (125qF). Use in
Cylinders: accordance with the Material Safety Data Sheet.
FIRST AID: If inhaled, administer fresh air immediately.
Administer oxygen if breathing is difficult. Contact a
physician. In case of frostbite, obtain immediate medical
attention. DO NOT REMOVE THIS PRODUCT LABEL.
R phrases: R 36/37
S phrases: 2, 46, 51
EINECS Number: Refer to Page 1, Section 2.
Canadian WHMIS
Class A: Compressed Gases
Classification:
OTHER INFORMATION
Only use product in accordance with its intended use.
Uses and Restrictions: Cylinders should never be refilled without permission from the
owner.
U.K. Legislation: Control of Substances Hazardous to Health as amended.
End of MSDS
825086-00 REV 07 Page 7 of 7 Brooks Automation, Inc
Brooks Automation
12-28 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix J: Material Safety Data Sheets - MSDS
MSDS - POE Solest Oil LT-32
SOLEST LT-32
MATERIAL SAFETY DATA SHEET
Material Safety Data Sheet
SOLEST LT-32
Prepared according to 29CFR 1910.1200.
1 Chemical Product and Company Identification
The Lubrizol Corporation
29400 Lakeland Boulevard
Wickliffe, Ohio 44092
Tel: (440) 943-4200
Product Trade Name SOLEST LT-32
CAS Number Not applicable for mixtures.
Synonyms None.
Generic Chemical Name Mixture.
Product Type Multipurpose.
Preparation/Revision Date 04 May 2011
Transportation Emergency Phone FOR TRANSPORT EMERGENCY call CHEMTREC: (+1) 703-527-3887 (outside the U.S.), 1-800-424-9300 (in the
No. U.S.)
MSDS No. 3862567-2301925-5036121-102103
2 Hazards Identification
Appearance Clear to yellow liquid.
Odor Mild
Principal Hazards Caution.
z May cause skin irritation.
See Section 11 for complete health hazard information.
3 Composition/Information on Ingredients
This material contains no ingredients requiring disclosure under regulatory hazard criteria for this jurisdiction. See Section 11
Hazardous Ingredients
for additional details.
4 First Aid Measures
Eyes Flush with water at least 30 minutes. Get medical attention if eye irritation develops or persists.
Skin Wash with soap and water. Remove contaminated clothing. If skin irritation occurs, get medical attention. Launder
contaminated clothing before reuse.
Inhalation Remove exposed person to fresh air if adverse effects are observed.
Oral DO NOT INDUCE VOMITING. Get immediate medical attention.
Additional Information Note to physician: Treat symptomatically.
5 Fire Fighting Measures
Flash Point 246 C, 475 F COC (Typical)
Extinguishing Media CO2, dry chemical, or foam. Water can be used to cool and protect exposed material.
Firefighting Procedures Recommend wearing self-contained breathing apparatus. Water may cause frothing. Use water to cool containers exposed
to fire.
Unusual Fire & Explosion Hazards See section 10 for additional information.
6 Accidental Release Measures
Spill Procedures Personal Protective Equipment must be worn, see Personal Protection Section for PPE recommendations. Ventilate area if
Page 1 / 5
Brooks Automation
214072 Revision B 12-29
Appendices Polycold Cryochiller
Appendix J: Material Safety Data Sheets - MSDS Installation and Operation Manual
SOLEST LT-32
spilled in confined space or other poorly ventilated areas. Prevent entry into sewers and waterways. Pick up free liquid for
recycle and/or disposal. Residual liquid can be absorbed on inert material.
7 Handling and Storage
Pumping Temperature Not determined.
Maximum Handling Temperature Not determined.
Handling Procedures Keep away from potential sources of ignition. Keep containers closed when not in use. Avoid breathing dust, fume, gas,
mist, vapors or spray. Wash thoroughly after handling. Launder contaminated clothing before reuse. Empty container
contains product residue which may exhibit hazards of product. Dispose of packaging or containers in accordance with local,
regional, national and international regulations.
Maximum Storage Temperature Not determined.
Storage Procedures Store in a cool, dry location. See section 10 for incompatible materials.
Loading Temperature Not determined.
8 Exposure Controls/Personal Protection
Exposure Limits None established
Other Exposure Limits None known.
Engineering Controls Use with adequate ventilation.
Gloves Procedures Neoprene.
Eye Protection Safety Glasses.
Respiratory Protection Use NIOSH/MSHA approved respirator with an organic vapor cartridge if exposure limit is exceeded. Use self-contained
breathing apparatus for entry into confined space, for other poorly ventilated areas and for large spill clean-up sites. Consult
with an industrial hygienist to determine the appropriate respiratory protection for your specific use of this material. A
respiratory protection program compliant with all applicable regulations must be followed whenever workplace conditions
require the use of a respirator.
Clothing Recommendation Long sleeve shirt is recommended. Do not wear rings, watches or similar apparel that could entrap the material and cause a
skin reaction. Launder contaminated clothing before reuse.
9 Physical and Chemical Properties
Flash Point 246 C, 475 F COC (Typical)
Upper Flammable Limit Not determined.
Lower Flammable Limit Not determined.
Autoignition Point Not determined.
Explosion Data Material does not have explosive properties.
Vapor Pressure Not determined.
pH Not determined.
Specific Gravity 0.98 (20 C)
Bulk Density 8.21 Lb/gal, 0.98 Kg/L
Water Solubility Insoluble.
Percent Solid Not determined.
Percent Volatile Not determined.
Volatile Organic Compound Not determined.
Vapor Density Not determined.
Evaporation Rate Not determined.
Odor Mild
Appearance Clear to yellow liquid.
Viscosity 34.8 Centistokes (40 C)
6 Centistokes (100 C)
Odor Threshold Not determined.
Boiling Point Not determined.
Pour Point Temperature Not determined.
Melting / Freezing Point Not determined.
The above data are typical values and do not constitute a specification. Vapor pressure data are calculated
unless otherwise noted.
10 Stability and Reactivity
Stability Material is normally stable at moderately elevated temperatures and pressures.
Decomposition Temperature Not determined.
Incompatibility Strong acids. Strong bases.
Polymerization Will not occur.
Page 2 / 5
Brooks Automation
12-30 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix J: Material Safety Data Sheets - MSDS
SOLEST LT-32
Thermal Decomposition Smoke, carbon monoxide, carbon dioxide, aldehydes and other products of incomplete combustion.
Conditions to Avoid High temperatures.
11 Toxicological Information
-- ACUTE EXPOSURE --
Eye Irritation Not expected to cause eye irritation. Based on data from components or similar materials.
Skin Irritation May cause mild skin irritation. Does not meet Canadian D2B or EU R38 criteria. Based on data from components or similar
materials.
Respiratory Irritation No data available to indicate product or components may cause respiratory irritation under normal workplace conditions and
good industrial hygiene practices.
Dermal Toxicity The LD50 in rabbits is > 2000 mg/Kg. Based on data from components or similar materials.
Inhalation Toxicity No data available to indicate product or components may be a toxic inhalation hazard.
Oral Toxicity The LD50 in rats is > 10,000 mg/Kg. Based on data from components or similar materials.
Dermal Sensitization No data available to indicate product or components may be a skin sensitizer.
Inhalation Sensitization No data available to indicate product or components may be respiratory sensitizers.
-- CHRONIC EXPOSURE --
Chronic Toxicity No data available to indicate product or components present at greater than 1% are chronic health hazards.
Carcinogenicity No data available to indicate any components present at greater than 0.1% may present a carcinogenic hazard.
Mutagenicity No data available to indicate product or any components present at greater than 0.1% are mutagenic or genotoxic.
Reproductive Toxicity No data available to indicate either product or components present at greater than 0.1% that may cause reproductive
toxicity.
Teratogenicity No data available to indicate product or any components contained at greater than 0.1% may cause birth defects.
-- ADDITIONAL INFORMATION --
Other No other health hazards known.
12 Ecological Information
-- ENVIRONMENTAL TOXICITY --
Freshwater Fish Toxicity Not determined.
Freshwater Invertebrates Toxicity Not determined.
Algal Inhibition Not determined.
Saltwater Fish Toxicity Not determined.
Saltwater Invertebrates Toxicity Not determined.
Bacteria Toxicity Not determined.
Miscellaneous Toxicity Not determined.
-- ENVIRONMENTAL FATE --
Biodegradation Adequate data is not available to estimate the biodegradation potential of this material.
Bioaccumulation Less than 1.0% of the components display no potential to bioconcentrate.
Soil Mobility Not determined.
13 Disposal Considerations
Waste Disposal This material, if discarded, is not a hazardous waste under RCRA Regulation 40 CFR 261. Treatment, storage,
transportation, and disposal must be in accordance with applicable Federal, State/Provincial, and Local regulations.
14 Transport Information
ICAO/IATA I Not regulated.
ICAO/IATA II Not regulated.
IMDG Not regulated.
IMDG EMS Fire Not applicable.
IMDG EMS Spill Not applicable.
IMDG MFAG Not applicable.
MARPOL Annex II Not determined.
USCG Compatibility Not determined.
U.S. DOT Bulk Not regulated.
DOT NAERG Not applicable.
U.S. DOT (Intermediate) Not regulated.
U.S. DOT Intermediate NAERG Not applicable.
Page 3 / 5
Brooks Automation
214072 Revision B 12-31
Appendices Polycold Cryochiller
Appendix J: Material Safety Data Sheets - MSDS Installation and Operation Manual
SOLEST LT-32
U.S. DOT Non-Bulk Not regulated.
U.S. DOT Non-Bulk NAERG Not applicable.
Canada Not regulated.
Mexico Not regulated.
Bulk Quantity 85000 KG, 187391 lbs.
Intermediate Quantity 11000 KG, 24251 lbs.
Non-Bulk Quantity 400 KG, 882 lbs.
Review classification requirements before shipping materials at elevated temperatures.
15 Regulatory Information
-- Global Chemical Inventories --
USA All components of this material are on the US TSCA Inventory or are exempt.
Other TSCA Reg. None known.
EU May require notification under EC Seventh Amendment Directive 92/32/EEC.
Japan May require notification in Japan.
Australia All components are in compliance with chemical notification requirements in Australia.
New Zealand May require notification before sale under New Zealand regulations.
Canada This material contains one or more components that are on the Non-Domestic Substances list (NDSL). This material or
products containing this material may be exported to Canada in limited quantities.
Switzerland May require notification before sale in Switzerland.
Korea May require notification before sale in Korea.
Philippines All components are in compliance with the Philippines Toxic Substances and Hazardous and Nuclear Wastes Control Act of
1990 (R.A. 6969).
China All components of this product are listed on the Inventory of Existing Chemical Substances in China.
Taiwan May require notification before sale in Taiwan.
-- Other U.S. Federal Regulations --
SARA Ext. Haz. Subst. This product does not contain greater than 1.0% of any chemical substance on the SARA Extremely Hazardous Substances
list.
SARA Section 313 This product does not contain greater than 1.0% (greater than 0.1% for carcinogenic substance) of any chemical substances
listed under SARA Section 313.
SARA 311 Classifications Acute Hazard No
Chronic Hazard No
Fire Hazard No
Reactivity Hazard No
CERCLA Hazardous Substances None known.
-- State Regulations --
Cal. Prop. 65 This product does not intentionally contain any chemicals known by the State of California to cause cancer and/or birth
defects. Moreover, we do not routinely analyze its products for impurities which may be such chemicals.
-- Product Registrations --
U.S. Fuel Registration Not applicable.
Finnish Registration Number Not Registered
Swedish Registration Number Not Registered
Norwegian Registration Number Not Registered
Danish Registration Number Not Registered
Swiss Registration Number Not Registered
Italian Registration Number Not Registered
-- Other / International --
Miscellaneous Regulatory
Not determined.
Information
16 Other Information
US NFPA Codes Health Fire Reactivity Special
1 1 0 N/E
(N/E) - None established
HMIS Codes Health Fire Reactivity
1 1 0
Page 4 / 5
Brooks Automation
12-32 214072 Revision B
Polycold Cryochiller Appendices
Installation and Operation Manual Appendix J: Material Safety Data Sheets - MSDS
SOLEST LT-32
Precautionary Labels Caution.
z May cause skin irritation.
Revision Indicators This MSDS has no revisions since 4 May 2011
As the conditions or methods of use are beyond our control, we do not assume any responsibility and expressly disclaim any liability for any use of this product. Information
contained herein is believed to be true and accurate but all statements or suggestions are made without warranty, expressed or implied, regarding accuracy of the information, the
hazards connected with the use of the material or the results to be obtained from the use thereof. Compliance with all applicable federal, state, and local regulations remains the
responsibility of the user.
Page 5 / 5
Brooks Automation
214072 Revision B 12-33
Appendices Polycold Cryochiller
Appendix J: Material Safety Data Sheets - MSDS Installation and Operation Manual
This Page Intentionally Left Blank
Brooks Automation
12-34 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
Glossary
After Cooler: Component in the refrigeration unit that removes heat from the refrigerant vapor after
it exits the compressor
ANSI: American National Standards Institute.
ASHRAE: American Society of Heating, Refrigerating and Air-Conditioning Engineers
AWG: American wire gauge
Balance pressure: The pressure in the refrigeration unit (or cryopump) when the suction and discharge
sides of the compressor are equal and the system is at room temperature. This is the
same as the charge pressure.
CE: Conformité Européene The CE Marking identifies that the product or machine is com-
plying with all of the safety requirements established by the European Union.
Charge pressure: The pressure in the refrigeration unit (or cryopump) when the suction and discharge
sides of the compressor are equal and the system is at room temperature. This is the
same as the balance pressure.
Coldest liquid: The portion of the refrigerant circuit that obtains the lowest temperature prior to evap-
oration.
Compressor: component in the refrigeration unit that raises the refrigerant pressure and causes the
refrigerant to move through the circuit
Condenser: A component in the refrigeration unit that removes heat from the refrigerant vapor after
it exits the compressor.
Copper Gas Line: Refrigerant line that is made from copper
Cryopump: The Polycold cryogenic refrigeration system that captures water molecules in a vac-
uum chamber. It consists of a refrigeration unit, a refrigerant line, and a cryosurface
(with cryogenic feed-through).
Cryosurface: The coil or baffle in the vacuum chamber that captures water molecules by freezing
them to its surface.
Cylinder Unload: A solenoid that deactivates one of the three compressor cylinders to save power under
certain conditions.
Defrost: The rapid heating process used to remove captured water vapor from the cryocoil.
Brooks Automation
214072 Revision B G-1
Glossary Polycold Cryochiller
DeviceNet: Installation and Operation Manual
DeviceNet: A system control protocol consisting of software and hardware. Uses its own command
format to gather data and command certain actions on the system.
EC: Conformité Européene Early version of the CE Marking. See CE above.
EEC: European Economic Community
EMC: Electromagnetic Compatibility
EN: European norm (or standard)
Ethernet: A serial communication protocol for communication and configuring the XC Cryochller
from a host or service computer. Consists of a family of computer networking technol-
ogies for local area networks. Data is sent in packets with error checking so that dam-
aged data can be resent.
Feed line: The copper tube in the refrigerant line that carries refrigerant from the refrigeration unit
to the cryosurface.
Field replacement charge:
A refrigerant mixture that replaces the refrigerant in the cryopump.
GUTS: Brooks acronym standing for Guaranteed Up-Time Service.
Human Machine Interface (HMI):
The user interface used in the XC Cryochiller
IEC: International Electrotechnical Commission
I/O: Input / output.
Liquid line: A portion of the refrigerant circuit containing high pressure refrigerant just after it has
been cooled by the water-cooled condenser.
MSDS: Material Safety Data Sheet
Manifold: Service manifold gauge set
NEC: National Electrical Code
NPT: National Pipe Thread
OFHC: Oxygen-free high thermal conductivity
Polycold stack: The upper portion of the refrigeration unit that is insulated with foam.
Profibus: A communication protocol designed to control process equipment. Consists of hard-
ware and software. Uses its own command format to gather data and command certain
actions on the system.
Recharge: Procedure for replacing the refrigerant in a refrigeration unit
Brooks Automation
G-2 214072 Revision B
Polycold Cryochiller Glossary
Installation and Operation Manual Refrigerant:
Refrigerant: A proprietary mixture of refrigerants made by Brooks Polycold Systems Inc.
Refrigerant circuit: The path of the refrigerant that goes from the refrigeration unit, through the feed line,
through the cryosurface, through the return line, and back to the refrigeration unit.
Refrigerant expansion tank:
A tank inside the refrigeration unit that maintains the gaseous refrigerant at a safe
pressure when the unit is not at operating temperature.
Refrigerant Line: feed and return lines that carry refrigerant to and from the cryocooler
Refrigeration unit: The machine containing the compressor, condenser, and stack that cools the refriger-
ant mixture to cryogenic temperatures.
Return Line: The copper tube in the refrigerant line that carries refrigerant from the cryosurface to
the refrigeration unit.
RS-232: A serial communication protocol that can command and configure the Polycold Cryo-
chiller using the system commands.
SAE: Society of Automotive Engineers.
TC: Thermocouple.
Top-off charge: A refrigerant mixture that can be added to the refrigerant in the Polycold Cryochiller
Transformer Tap: Jumper or connection configuration that allows for different input voltages to be used
on the system and generate the appropriate internal voltages.
TÜV: Technical Supervision Society verifies compliance with EN and IEC standards
UL: Underwriters Laboratories verifies compliance with NEC standards
Brooks Automation
214072 Revision B G-3
Glossary Polycold Cryochiller
UL: Installation and Operation Manual
This Page Intentionally Left Blank
Brooks Automation
G-4 214072 Revision B
Polycold Cryochiller
Installation and Operation Manual
Index
B T
Brooks Automation Technical Support Bulletin 1-1
Contact Information i-ii TSB 1-1
C
Consumable Items 11-2
Cooling Water 3-6
Cooling Water Purity 3-7, 3-9
D
Declaration of Conformity 1-13
Dimensions 3-2
E
Electrical Hazards 2-14
H
Hazards
Electrical 2-14
Mechanical 2-12
L
Limitations 1-16
Limited Warranty 1-16
M
Mechanical Hazards 2-12
N
Notes 2-2
P
Packing Instructions 12-20
Performance Specifications 3-9
R
Recycling 2-18
S
Site Preparation 3-3
Brooks Automation
214072 Revision B I-1
Index Polycold Cryochiller
T Installation and Operation Manual
Brooks Automation
I-2 214072 Revision B
You might also like
- Body Controller Diagnostic Trouble Codes International 3200, 4100, 4300, 4400, 7300, 7400, 7500, 7600, 7700, 8500, 8600 Fault Code List PDF100% (8)Body Controller Diagnostic Trouble Codes International 3200, 4100, 4300, 4400, 7300, 7400, 7500, 7600, 7700, 8500, 8600 Fault Code List PDF30 pages
- Flow More Pumps LTD: Industrial Training Report100% (1)Flow More Pumps LTD: Industrial Training Report40 pages
- Vacuum Science World - Ebook - Vacuum Pumps100% (1)Vacuum Science World - Ebook - Vacuum Pumps22 pages
- Rotary Vane Pump Pumping Speed Chart PDFNo ratings yetRotary Vane Pump Pumping Speed Chart PDF1 page
- Lecture 1,2 - Ultra High Vacuum Techniques and ProcessesNo ratings yetLecture 1,2 - Ultra High Vacuum Techniques and Processes42 pages
- Basic Pump Parameters and The Affinity Laws: Pdhonline Course M125 (3 PDH)No ratings yetBasic Pump Parameters and The Affinity Laws: Pdhonline Course M125 (3 PDH)14 pages
- Turbomolecular Pump: Vacuum Pump Turbopump Vacuum Momentum Fan Pump VacuumNo ratings yetTurbomolecular Pump: Vacuum Pump Turbopump Vacuum Momentum Fan Pump Vacuum4 pages
- Plastics in Medical Devices Properties, Requirements, and Applications, 2nd Edition No-Wait DownloadNo ratings yetPlastics in Medical Devices Properties, Requirements, and Applications, 2nd Edition No-Wait Download14 pages
- Vacuum Stepper Motors: Arun Microelectronics LimitedNo ratings yetVacuum Stepper Motors: Arun Microelectronics Limited3 pages
- Liquid Spray and Spray Nozzles: CTG SH 07 EuNo ratings yetLiquid Spray and Spray Nozzles: CTG SH 07 Eu25 pages
- 50 Series 8 Parameters: Multiparameter Plug & Play AnalyzerNo ratings yet50 Series 8 Parameters: Multiparameter Plug & Play Analyzer54 pages
- BKF3553 Process Simulation & Computer Aided Design Sem II 2019/2020No ratings yetBKF3553 Process Simulation & Computer Aided Design Sem II 2019/202048 pages
- MANUAL Vertical - Multi Stage - Jockey - Pump FMF 03 313 PVM - SeriesNo ratings yetMANUAL Vertical - Multi Stage - Jockey - Pump FMF 03 313 PVM - Series20 pages
- Instructions On Installation Operation and Maintenance For Kirloskar PumpNo ratings yetInstructions On Installation Operation and Maintenance For Kirloskar Pump23 pages
- How The Quest For Better Pumps Came To (Almost) Nothing - Part 1 - Reliabilityweb - A Culture of ReliabilityNo ratings yetHow The Quest For Better Pumps Came To (Almost) Nothing - Part 1 - Reliabilityweb - A Culture of Reliability7 pages
- Fox Mini-Eductors: For Aspirating, Sampling, Mixing, and Vacuum-GenerationNo ratings yetFox Mini-Eductors: For Aspirating, Sampling, Mixing, and Vacuum-Generation11 pages
- Electric Power Generation, Transmission & Distribution Revenues World Summary: Market Values & Financials by CountryFrom EverandElectric Power Generation, Transmission & Distribution Revenues World Summary: Market Values & Financials by CountryNo ratings yet
- A Case Study for a Single-Phase Inverter Photovoltaic System of a Three-Bedroom Apartment Located in Alexandria, Egypt: building industry, #0From EverandA Case Study for a Single-Phase Inverter Photovoltaic System of a Three-Bedroom Apartment Located in Alexandria, Egypt: building industry, #0No ratings yet
- Taylor 142 Service Operator Manual PartsNo ratings yetTaylor 142 Service Operator Manual Parts32 pages
- Courier Tracking System Project ShowcaseNo ratings yetCourier Tracking System Project Showcase2 pages
- Whalepower Corporation and Tubercle TechnologyNo ratings yetWhalepower Corporation and Tubercle Technology7 pages
- Cyber Crimes Cyber Laws and Intellectual Property Rights100% (1)Cyber Crimes Cyber Laws and Intellectual Property Rights60 pages
- Model Question Paper - 1 Ge 2022 Total Quality Management Part A (10 X 2 20 Marks)No ratings yetModel Question Paper - 1 Ge 2022 Total Quality Management Part A (10 X 2 20 Marks)3 pages
- Map Reduce Daemons: - Job Tracker - Task TrackerNo ratings yetMap Reduce Daemons: - Job Tracker - Task Tracker14 pages
- Anritsu - VSG - MX370104A Multi-Carrier IQproducer (EI1300)No ratings yetAnritsu - VSG - MX370104A Multi-Carrier IQproducer (EI1300)22 pages
- Introducing The Personal GPS: Tracker TrackingNo ratings yetIntroducing The Personal GPS: Tracker Tracking17 pages
- Addiction To Technology Gadgets and Its Impact To The Lifestyle and Health: Focus Grade7 Students of Piagapo National High SchoolNo ratings yetAddiction To Technology Gadgets and Its Impact To The Lifestyle and Health: Focus Grade7 Students of Piagapo National High School31 pages
- IS920 Product Information: Inverter System 48 V DC For TelecommunicationNo ratings yetIS920 Product Information: Inverter System 48 V DC For Telecommunication10 pages
- Aindump2go Saa-C03 PDF Exam 2023-Dec-11 by Theobald 332q VceNo ratings yetAindump2go Saa-C03 PDF Exam 2023-Dec-11 by Theobald 332q Vce27 pages
