HIGH PRESSURE

2LH - HIGH PRESSURE

3LH - HIGH PRESSURE METAL SEAT
EVH - HIGH PURITY GRADE, HIGH PRESSURE
2LS - HIGH PRESSURE, HIGH FLOW
3LS - HIGH PRESSURE HIGH FLOW METAL SEAT
HP - ULTRA HIGH PURITY HIGH-PRESURE VALVE
2LH SERIES
HIGH-PRESSURE
Metal Diaphragm Valves
High-pressure standard models from the Ultra-Clean Valve Series are made according to UHP specifications.
These models come with end connections in 1/4", as a standard. Features include a compact design and a
highly reliable seat structure.
• Can be used as shut-off valves for high-pressure fluids at up to 15.9 MPa/2300 psi.
• Compact designs for minimum footprint.
• Electropolished surfaces
• Optionally ready for 21 MPa/3060 psi (*For 3060 psi, add "-210K" to the valve description).
• Forged body

STANDARD CONFIGURATION DIMENSIONS - mm

Part
Size End Connection A B C D E F G H I J M
Number/ep
2LHS4R-W 1/4 Extended Butt Weld 11 (68) 45 25 (2.5) 47 17
2LHS4R-BW 1/4 Short Butt Weld 11 (68) 45 25 (2.5) 44.4 17
2LHA4R-BV 1/4 Male HTC® 11 (68) 45 (2.5) 17 26 45
2LHS4C-FV 1/4 Swivel Female HTC® 11 (85) 40 25 26 66 17 1/8"

M Air Inlet

H
Ø
M5x2

2-Way Flow Pattern

G 7
G 7

SPECIFICATIONS
Design Burst Proof Leak Rates
Size Temp. Cv
Pressure pressure pressure Inboard Across Seat

21MPa/ 6
-10 to 60°c
(3060 psi) 3X10-12 3X10-10
63.5MPa 24MPa (PCTFE)
1/4 option:
(9200 psi) (3450 psi) -10 to 150°c
0.1 pa•m³/sec pa•m³/sec 5
15.9MPa Helium Helium
(PI)
(2300 psi)

4
STRUCTURE
Item No. Parts Material
1 Body Stainless steel, 316L Var or Vim/Var (1)
2 Seat PCTFE/PI (Polyimide) 3
2
3 Seat Holder Stainless steel, 316L Var or Vim/Var (1)
4 Diaphragm Co-Cr-Ni Alloy 1
5 Act. Button 304 Stainless Steel
6 Act. Button Holder Stainless Steel, ASTM 630 H900
7 Actuation Device Aluminum
(1) Per SEMI F20-0305

2 ULTRA-CLEAN VALVES
3LH SERIES
HIGH-PRESSURE METAL SEAT
Metal Diaphragm Valves
The highest-ranking grade of high-pressure models from the Ultra-Clean Valve Series are made according to UHP
specifications. It is the ultimate in metallic diaphragm-operated valves with resins completely removed from their
gas-contact areas. It can be used to supply corrosive gases (such as HCl and F2) at high pressures.
• Can be used as shuoff valves for high-pressure fluids at up to 15.9 MPa/2300 psi.
• Compact designs for minimum footprint.
• Electropolished surfaces
• Optionally ready for 21 MPa/3060 psi (*For 3060 psi, add "-210K" to the valve description).

STANDARD CONFIGURATION DIMENSIONS - mm

Part
Size End Connection A B C D E F G H J
Number/ep
3LHS2R-BV 1/8 Male HTC® 8 (67) 43 23 (2.5) 16 41 15
3LHS4R-W 1/4 Extended Butt Weld 11 (68) 45 25 (2.5) 17 47 17
3LHS4R-BW 1/4 Short Butt Weld 11 (68) 45 25 (2.5) 17 44.4 17
3LHS4C-FV 1/4 Swivel Female HTC® 11 (85) 40 66 17 1/8"

M Air Inlet

H
Ø
M5x2

2-Way Flow Pattern

5 5

SPECIFICATIONS 4
Design Burst Proof Leak Rates
Size Temp. Cv 3
Pressure pressure pressure Inboard Across Seat

15.9MPa
(2300 psi) 3X10-12 3X10-10
83MPa 31MPa -10 to
1/4 OPTION:
(12000 psi) (4500 psi) 150°c
0.1 pa•m³/sec pa•m³/sec 2
21MPa/ Helium Helium
(3060 psi)

1
STRUCTURE
Item No. Parts Material
1 Body Stainless steel, 316L Var or Vim/Var (1)
2 Diaphragm Co-Cr-Ni Alloy
3 Act. Button 304 Stainless Steel
4 Act. Button Holder Stainless Steel, ASTM 630 H900
5 Actuation Device Aluminum
(1) Per SEMI F20-0305

HAM-LET LEADING BY INNOVATION 3

EVH SERIES
HP-GRADE, HIGH-PRESSURE VALVE
Metal Diaphragm Valves
High-pressure standard models from the Ultra-Clean Valve Series are made according to HP specifications.
• Can be used as shutoff valves for high-pressure fluids at up to 20.6 MPa/3060 psi*.
• Compact designs for minimum footprint.
• Electropolish surfaces as an option ("-EP").
• Forged body
*For 3060 psi, add "-210K" to the valve description

STANDARD CONFIGURATION DIMENSIONS - mm

Part
Size End Connection A B C D E F G H J
Number/ep
EVH4-BI 1/4 LET-LOK® 11 (68) 45 25 (2.5) 17 (63.5) 17
EVH4-V 1/4 Male HTC® 11 (68) 45 25 (2.5) 17 52 17
EVH4C-FV 1/4 Swivel Female HTC® 11 (85) 40 66 17 1/8"

H
Ø
M5x2

2-Way Flow Pattern

7
7

6
SPECIFICATIONS
Design Burst Proof Leak Rates
Size Pressure pressure pressure Temp. Cv 5
Inboard Across Seat

15.9MPa
-10 to 60°c
(2300 psi) 3X10-12 3X10-10
63.5MPa 24MPa (PCTFE)
1/4 OPTION: 0.1 pa•m³/sec pa•m³/sec 4
(9200 psi) (3450 psi) -10 to 150°c
21MPa/ Helium Helium
(PI)
(3060 psi)

3
STRUCTURE 2
Item No. Parts Material
1
1 Body 316L Stainless Steel
2 Seat PCTFE/PI (Polyimide)
3 Seat Holder 316L Stainless Steel
4 Diaphragm Co-Cr-Ni Alloy
5 Act. Button 304 Stainless Steel
6 Act. Button Holder Stainless Steel, ASTM 630 H900
7 Actuation Device Aluminum

4 ULTRA-CLEAN VALVES
2LS SERIES
HIGH-PRESSURE - HIGH-FLOW
Metal Diaphragm Valves
High-Pressure High-Flow models from the Ultra-Clean Valve Series are made according to UHP
specifications. These models come with end connections in two sizes, 1/4" and 1/2",
as a standard.With their compact designs, these valves comfortably fit into High-Pressure
High-Flow applications.
• Can be used as shutoff valves for high-pressure fluids at up to 21 MPa/3060 psi.
• Electropolished surfaces
• Forged body
For more information, please contact one of our field representatives.

STANDARD CONFIGURATION DIMENSIONS - mm

Part
Size End Connection A B C D E H J
Number/ep
2LSS4C-BW 1/4 Short Butt Weld 11 (89) 40 44.4 25 1/8"
2LSS4C-FV 1/4 Swivel Female HTC® 11 (89) 40 70.6 25 1/8"
2LSS8C-W 1/2 Extended Butt Weld 17.5 (92.5) 40 105 28 1/8"
2LSS8C-BW 1/2 Short Butt Weld 17.5 (92.5) 40 55 28 1/8"

M Air Inlet

H
Ø
M5x2

2-Way Flow Pattern

7 7

SPECIFICATIONS 6
Design Burst Proof Leak Rates
Size Temp. Cv
Pressure pressure pressure Inboard Across Seat 5

1/4 -10 to 40°c 0.25

3X10-12 3X10-10
63.MPa / 63.5MPa 24MPa (PCTFE)
pa•m³/sec pa•m³/sec
(3060 psi) (9200 psi) (3450 psi) -10 to 150°c 4
Helium Helium
1/2 (PI) 0.27

STRUCTURE
3
Item No. Parts Material
2
1 Body Stainless steel, 316L Var or Vim/Var (1) 8
2 Seat PCTFE/PI (Polyimide)
3 Seat Holder Stainless steel, 316L Var or Vim/Var (1) 1
4 Diaphragm Co-Cr-Ni Alloy
5 Act. Button 304 Stainless Steel
6 Act. Button Holder Stainless Steel, ASTM 630 H900
7 Actuation Device Aluminum
8 Seat Retainer Stainless steel, 316L Var or Vim/Var (1)
(1) Per SEMI F20-0305

HAM-LET LEADING BY INNOVATION 5

3LS SERIES • Can be used as shutoff valves for
high-pressure fluids at up to 21 MPa/3060 psi.
HIGH-PRESSURE-HIGH-FLOW • Compact designs for minimum footprint.
METAL SEAT • Extensive records of proven performance
on corrosive gases (such as HCl and F2).
Metal Diaphragm Valves • Electropolished surfaces
The highest-ranking grade of high-pressure-high-flow models from
the Ultra-Clean Valve Series are made according to UHP specifica-
For more information, please contact one of our field
tions. It is the ultimate in metallic diaphragm-operated valves with
representatives.
resins completely removed from their gas-contact areas. With their
compact designs, these valves comfortably fit into high-pressure
high-flow applications.

STANDARD CONFIGURATION DIMENSIONS - mm

Part
Size End Connection A B C D F G H
Number/ep
3LSS4R-W 1/4 Extended Butt Weld 11 (71) 45 89 25 M5
3LSS4R-BW 1/4 Butt Weld 11 (71) 45 44.4 25 M5
3LSS4C-FV 1/4 Swivel Female HTC® 11 (89) 40 70.6 25 M5 1/8"
3LSS4C-BV 1/4 Swivel female HTC 11 (89) 40 58 25 M5 1/8"

M Air Inlet

M5x2

2-Way Flow Pattern

5
5

3
SPECIFICATIONS
Design Burst Proof Leak Rates
Size Temp. Cv
Pressure pressure pressure Inboard Across Seat

1/4 83MPa 0.25 3 X 10-12 7 X 10-10 2

21MPa / 31MPa -10 to
(12000 Pa m3/sec Pa m3/sec
(3060 psi) (4500 psi) 150°c
1/2 psi) 0.27 Helium Helium

STRUCTURE 1
Item No. Parts Material
1 Body Stainless steel, 316L Var or Vim/Var (1)
2 Diaphragm Co-Cr-Ni Alloy
3 Act. Botton Set 304 Stainless Steel
4 Act. Botton Holder Stainless Steel, ASTM 630 H900
5 Actuation Device Aluminum
(1) Per SEMI F20-0305

6 ULTRA-CLEAN VALVES
ORDERING INFORMATION - HIGH PRESSURE

Valve Description Example:

2LS S 4 C - BV - P

Valve Series End Connection Feature

2LH - High Pressure 2300 psi / 3060 psi BV - Male Face Seal* P - Polyimide

2LS - High Pressure High flow 3060 psi V - Male Face Seal for EV/EVH series* SD - Safe Device

EVH - HP Grade High Pressure Valve MV - Swivel Male Face Seal* LD - Lock Device

3LS - High Pressure High Flow Metal Seat FV - Swivel Female Face Seal* ISLT - LOTO Device

3LH - High Pressure Metal Seat W - Extended Butt Welld

BW - Short Butt Welld

Valve Type BI - LET-LOK®
* For 1/2", 1/4" End connections only
S - 2-Port Valve (Straight)

A - 2-Port Valve (Angle)

Actuation Device
Body Size
C - Air Operated N.C
4 - 1/4" O - Air Operated N.O

6 - 3/8"* R - Round Handle

8 - 1/2" Q - Oval Handle 1/4 turn

Blue Handle is standard.
For other colors contact your
local HAM-LET representative.

Swivel Female
Face-Seal Ends

Swivel Male
Face-Seal Ends

Male Face-
Seal Ends

Butt Weld
Ends
n Standad seat: PCTFE. For your convenience, port converstion
of old HMJ valves to current HM series:
A = 30 | B = 35 | C = 34 | D = 31 | E = 32 | F = 33

Warning! For your safety

The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-
free installation, operation, and maintenance. Application details, material compatibility and product ratings should all be considered for each selected product.
Improper selection, installation or use of products can cause property damage or personal injury.

HAM-LET LEADING BY INNOVATION 7

HP SERIES
HIGH PRESSURE DIAPHRAGM
VALVES

HP20 SERIES SPECIFICATIONS

Structure Direct-seal metal-diaphragm valve manually & pneumatic operated

Pressure Vacuum to 21MPa (3060 psi)
Burst Pressure Vacuum to 83MPa (12000 psi)
Proof Pressure Vacuum to 31MPa (4500 psi)
Temperature 14 to 104°F, -10 to 60°C (PCTFE Seat), 14 to 302°F, -10°C to 150°C (Polyimide seat)
Leakage: Inboard Leakage Less Than 3x10-11 atm cc He/sec
Across the seat Less Than 1x10-9 atm cc He/sec
Operated Manual : Lever 1/4 turn
Pneumatic : NC/NO
End Connections Swivel Female Face-Seal, Male Face Seal, Swivel Male Face Seal, Buttweld, Let-Lok
CV Value 0.27
Direction 2 port straight, 2 port L, 3 port, 4 port
Surface Finish Ra (Ave)-Standard 5μin
Air Supply 70-90psig, 5-6bar
Air Connection BSPT 1/8” (NPT 1/8" as an option)

STRUCTURE
Item Part No. Material
No.
1 Body **Stainless steel, 316L Var or Vim/Var(1)
2 Seat **PCTFE,Polyimide
3 Diaphragm Co-Cr-Ni Alloy
4 Act. Button Stainless steel, AISI 304, ball AISI 440C 6
5 Act. Button Holder Stainless steel, ASTM 630 H900
6 Handle & Stem Assembly A6061T6, ASTM 630 H900
(1) Per SEMI F20-0305

8 ULTRA-CLEAN VALVES
STANDARD CONFIGURATION DIMENSIONS:
MANUAL HANDLE & PNEUMATIC, NC/NO
ØD
BOTTOM 1/8” BSPT
Four mounting holes, M5 X 0.8 thread,
0.25” (6.5mm) deep, M5x0.8 holes
are compatible with 10-32 mounting
screws. H
G

1.16” (29.4mm)

M5 x4 C
F

Ø 1” (25.4mm) B B
A A

A B C D E F G H
End
Connections Description
mm mm mm mm mm mm mm mm
( inch) ( inch) ( inch) ( inch) ( inch) ( inch) ( inch) ( inch)

HP20-4VKHL-GF4
Swivel Female 70.6
HP20-4VKHC-GF4
Face-Seal (2.78)
HP20-4VKHO-GF4

HP20-4VKHL-M4
Male 58.4
HP20-4VKHC-M4
Face-Seal (2.3)
HP20-4VKHO-M4 11 67.2 40 90 29.2 46.5 63.5
HP20-4VKHL-GM4 (0.43) (2.65) (1.57) (3.54) (1.15) (1.83) (2.5)
Swivel Male 70.6
HP20-4VKHC-GM4
Face-Seal (2.78)
HP20-4VKHO-GM4

HP-20-4VKHL-BW4
44.4
Buttweld HP20-4VKHC-BW4
(1.75)
HP20-4VKHO-BW4

HAM-LET LEADING BY INNOVATION 9

ORDERING INFORMATION HP SERIES
VALVE DESCRIPTION EXAMPLE:

HP 2 1 - 4 V K HL - BW 4 GF 4

Port Designator* Body Material Actuation Device End Size

Valve Series
0, 1, 2, 3, 4, 5 V- SS316L Var HL - Blue Lever Handle 4 - 1/4’’
HP - High Pressure or Vim/Var(1)
* Port Designator HC - Air Operated N.C. 3060 psi 6 - 3/8’’*
(Bar Stock)
per HM Series in the
catalog HO - Air Operated N.O. 3060 psi 8 - 1/2’’
NC-Normally Closed, NO-Normally Open 6 mm*

10 mm*

12 mm*
Valve Type Body Size* Seat Material End Connection
* BW, LL End
connections only
2 - 2-Port Valve 4 - 1/4 K - PCTFE BW - Butt Weld

3 - 3-Port Valve *Note: Body size is 1/4” S - Polyimide GF - Swivel Female Face-Seal**
for all end sizes
4 - 4-Port Valve F - PFA GM - Swivel Male Face-Seal**

M - Male Face-Seal**

*For limit switch indicator on pneumatic Valve, LL - Let-Lok

contact your local HAM-LET representative.
** 1/4", 1/2" End connection size only

PORT DESIGNATOR - (TOP VIEW)

Valve Port Schematic Valve Port Schematic Valve Port Schematic
Configuration Designator Flow Chart Configuration Designator Flow Chart Configuration Designator Flow Chart
2 Port Valve 3 Port Valve 4 Port Valve
HP2_ 0
HP3_ 0
HP4_ 0

1
1 1
L-Port

2
2 2
L-Port

3 3

10 ULTRA-CLEAN VALVES