Multi-Film Rate/Thickness Monitor: O P E R A T I N G M A N U A L

Cover Page
O P E R A T I N G M A N U A L
SQM-160
Multi-Film Rate/Thickness Monitor
™
PN 074-511-P1D
Title Page
O P E R A T I N G M A N U A L
SQM-160
Multi-Film Rate/Thickness Monitor
™
PN 074-511-P1D
www.inficon.com re [email protected]
Trademarks
The trademarks of the products mentioned in this manual are held by the companies that produce them.
INFICON® is a trademark of INFICON Inc.
SQM-160™ and INFICON® are trademarks of INFICON GmbH.
Visual Basic®, Windows®, and Excel® are registered trademarks of Microsoft Corporation.
Java® is a registered trademarks of Oracle and/or its affiliates.
Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2015 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.
Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
www.inficon.com [email protected]
SQM-160 Operating Manual
Table Of Contents
Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Introduction and Specifications
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions, and Warnings . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.3 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
1.3.1 Returning SQM-160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.2 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.3 System Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.4 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
PN 074-511-P1D
1.4.5 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.6 Configurations and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.6.1 SQM-160 Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.2.1 Oscillator Kits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.2.2 Rack Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.2.3 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Chapter 2
Installation
2.1 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Parts Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
TOC - 1
2.1.2 Ground Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.1.3 Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2 Rack Mounting Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1 Full Rack Extender . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1.1 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.2 Rack Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.2.2.1 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.2.2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3 Rear Panel Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.4 System Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.4.1 Sensor Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
2.5 I/O Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Chapter 3
Operation
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Front Panel Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Menu Selection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.4 Film Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.5 System Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.6 Sensor Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.7 Sensor Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.8 Sensor Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.9 Display Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.10 Crystal Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.11 Zero Thickness. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
PN 074-511-P1D
3.12 Shutter Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
3.13 Dual Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
3.14 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.15 Time Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
3.16 Thickness Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.17 Simulate Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.18 Defaulting the Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.19 Relay Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.20 Analog Output Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.21 Depositing a Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
TOC - 2
Chapter 4
SQM-160 Comm Software
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2.1 Update of an Older Version of SQM-160 Comm . . . . . . . . . . . . . . . . . . . . . 4-2
4.3 Start the SQM-160 V2 Comm software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
4.4 Main Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.4.1 Menu Bar Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.4.1.1 File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
4.4.1.2 Edit Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.4.1.3 View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.4.1.4 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.4.2 Main Window Control Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.5 Data Log Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.5.1 Log File Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
4.5.2 Duration Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.5.3 Time Range Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.5.4 Sampling Interval Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.6 Films Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.7 System Parameters Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
4.8 Communications Setup Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17
4.8.1 Establishing Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18
4.8.2 Command Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-20
4.9 Configure Graph(s) Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.10 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
Chapter 5
PN 074-511-P1D
Communications
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.1 RS-232 Serial Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.2 USB Port. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.1.3 Ethernet Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.1.3.1 How to Set Up the Network Protocol on the Computer . . . . . . . . . . . . . . . . 5-2
5.1.3.1.1 Accessing Network Settings in Windows XP . . . . . . . . . . . . . . . . . . . . . . . . 5-3
5.1.3.1.2 Accessing Network Settings in Windows 7 and Windows 8 . . . . . . . . . . . . . 5-6
5.1.3.2 How to change the SQM-160 IP address . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
5.2 SQM-160 Comm Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.3 SQM-160 Communications Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.3.1 Command Packet (Host to SQM-160 Message) . . . . . . . . . . . . . . . . . . . . . 5-9
5.3.2 Response Packet (SQM-160 to Host Message). . . . . . . . . . . . . . . . . . . . . 5-10
TOC - 3
5.3.3 Calculating the CRC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.4 Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
5.4.1 Command: @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.4.2 Command: A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.4.3 Command: B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15
5.4.4 Command: C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16
5.4.5 Command: D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.4.6 Command: J . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.4.7 Command: L. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.4.8 Command: M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.9 Command: N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.10 Command: O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.11 Command: P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.12 Command: R . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.13 Command: S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.14 Command: T. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.4.15 Command: U . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.4.16 Command: W . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.4.17 Command: Y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21
5.4.18 Command: Z. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21
5.5 CRC Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
5.5.1 Visual Basic® 5/6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
5.5.2 Java® . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
5.5.3 C++. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
Chapter 6
Troubleshooting and Maintenance
PN 074-511-P1D
6.1 Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
6.3 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
6.4 Persistent Crystal Fail Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Chapter 7
Calibration Procedures
7.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Determining Density . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
TOC - 4
Chapter 8
Measurement and Theory
8.1 Basics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
Appendix A
Material Table
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1
PN 074-511-P1D
TOC - 5
PN 074-511-P1D
TOC - 6
Chapter 1
Introduction and Specifications
1.1 Introduction
Figure 1-1 SQM-160 multi-film rate/thickness monitor
SQM-160™ uses proven INFICON® quartz crystal sensor technology to measure

rate and thickness in a thin film deposition process. Two sensor inputs are standard
and four additional sensor inputs are optional. Two recorder outputs provide both
analog rate and thickness signals.
Sensor inputs are assigned to different materials, averaged for accurate deposition
control in large systems or configured for a dual sensor. The rate sampling mode
allows a shuttered sensor to extend sensor life in high rate processes. Rate
displays of 0.1 Å/s or 0.01 Å/s are user-selectable. In addition, frequency or mass
PN 074-511-P1D
displays can be selected. Four relay outputs allow SQM-160 to control source or
sensor shutters, signal time and thickness setpoints, and signal crystal failure.
Digital inputs allow external signals to start/stop and zero readings.
SQM-160 comes with an RS-232 port and Windows® software that allows
instrument setup from a computer. The software can be used to set and store all
parameters, operate SQM-160, and save process data in a .txt file that can be
imported into Excel®. Universal Serial Bus (USB) or Ethernet options add to the
communications flexibility.
1-1
1.1.1 Related Manuals

Quartz crystal sensors are covered in separate manuals. The following manuals
are available on the Thin Film Instrument and Sensor Manuals CD
(PN 074-5000-G1), part of the ship kit:
 PN 074-154 - UHV Bakeable Sensor
 PN 074-156 - Front Load Single and Dual Sensors
 PN 074-157 - Sputtering Sensor
 PN 074-643 - ALD Sensor
 PN 147-800 - Cool Drawer Single and Dual Sensors
1.2 Instrument Safety

1.2.1 Definition of Notes, Cautions, and Warnings
When using this manual, please pay attention to notes, cautions,
and warnings found throughout. For the purposes of this manual they are defined
as follows:
NOTE: Pertinent information that when followed is useful in achieving maximum
SQM-160 efficiency.
CAUTION
Failure to heed these messages could result in damage

to SQM-160.
WARNING
PN 074-511-P1D
Failure to heed these messages could result in
personal injury.
WARNING - Risk Of Electric Shock
Dangerous voltages which could result in personal injury

are present.
1-2
1.2.2 General Safety Information
WARNING
Do not open the SQM-160 case. Refer all maintenance to

qualified personnel.
There are no user-serviceable components within the

SQM-160 case. Dangerous voltages may be present
whenever the power cable or external input/relay
connectors are present.
WARNING
SQM-160 contains delicate circuitry, susceptible to

transient power line voltages. Disconnect the power
cable whenever making any interface connections.
Refer all maintenance to qualified personnel.

PN 074-511-P1D
1-3
1.2.3 Earth Ground

SQM-160 is connected to earth ground through a sealed three-core
(three-conductor) power cable, which must be plugged into a socket outlet with
a protective earth terminal. Extension cables must always have three conductors
including a protective earth terminal.
WARNING
Never interrupt the protective earth circuit.
This symbol indicates where the protective earth ground

is connected inside SQM-160.
Never unscrew or loosen this connection.
Disconnecting the protective earth terminal or

interrupting the protective earth circuit, whether inside or
outside of SQM-160, may render SQM-160 dangerous.
1.3 How To Contact INFICON

Worldwide customer support information is available under Support >> Support
PN 074-511-P1D
Worldwide at www.inficon.com.
 Sales and Customer Service
 Technical Support
 Repair Service
When experiencing a problem with SQM-160, please have the following
information readily available:
 The Sales Order or Purchase Order number of the SQM-160 purchase
 The version of SQM-160 firmware
 The version of Windows operating system
 A description of the problem
 An explanation of any corrective action that may have already been attempted
 The exact wording of any error messages that may have been received
1-4
1.3.1 Returning SQM-160

Do not return any component of SQM-160 to INFICON before speaking with a
Customer Support Representative and obtaining a Return Material Authorization
(RMA) number. SQM-160 will not be serviced without an RMA number.
Packages delivered to INFICON without an RMA number will be held until the
customer is contacted. This will result in delays in servicing SQM-160.
If returning SQM-160 with a crystal sensor or another component potentially
exposed to process materials, prior to being given an RMA number, a completed
Declaration Of Contamination (DOC) form will be required. DOC forms must be
approved by INFICON before an RMA number is issued. INFICON may require
that the component be sent to a designated decontamination facility, not to the
factory.
1.4 Specifications
1.4.1 Measurement
Sensor Inputs . . . . . . . . . . . . . . . . . . Two standard, Four additional (optional)
Measurement Frequency Range . . . 6.5 to 1.0 MHz (adjustable)
Reference Frequency Accuracy . . . . 0.002%
Reference Frequency Stability . . . . . ±2 ppm (total, 0 to 50°C)
Thickness Display Resolution . . . . . 1 Å
Frequency Resolution1 . . . . . . . . . . . Standard: ±0.30 Hz @ 6 MHz
High Resolution option: ±0.03 Hz @ 6 MHz
Thickness and Rate
Resolution/Measurement2 . . . . . . . . Standard: ±0.37 Å
High Resolution option: ±0.037 Å
PN 074-511-P1D
Measurement Interval. . . . . . . . . . . . 0.10 to 2.0 s (adjustable)

1Resolution given for 0.10 s measurement interval
2
Tooling/Density = 100/1, fundamental frequency = 6 MHz, 0.10 s
measurement interval
1-5
1.4.2 Film Parameters

Stored Films . . . . . . . . . . . . . . . . . . . 99
Density . . . . . . . . . . . . . . . . . . . . . . . 0.50 to 99.99 g/cm3
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 to 399%
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.10 to 10.00
Final Thickness . . . . . . . . . . . . . . . . 0.000 to 9999 kÅ
Thickness Setpoint. . . . . . . . . . . . . . 0.000 to 9999 kÅ
Time Setpoint . . . . . . . . . . . . . . . . . . 0:00 to 99:59 mm:ss
Sample/Hold. . . . . . . . . . . . . . . . . . . 0 to 5999 s
Sensor Average . . . . . . . . . . . . . . . . 1 to 6, depending on sensors installed
1.4.3 System Parameters

Measurement Period . . . . . . . . . . . . 0.10 to 2.00 s
Simulate Mode . . . . . . . . . . . . . . . . . On/Off
Display Mode . . . . . . . . . . . . . . . . . . Thickness in kÅ (THCK)
Thickness in µm (NANM)
Frequency in Hz (FREQ)
Mass in µg/cm2 (MASS)
Rate Resolution . . . . . . . . . . . . . . . . 0.01 Å/s (HI)
0.1 Å/s (LO)
Measurement Filter . . . . . . . . . . . . . 1 to 20 readings
Relay 2 Mode . . . . . . . . . . . . . . . . . . Time Setpoint (TIME)
Dual Sensor Shutter (DUAL)
PN 074-511-P1D
Sensor 2 Shutter (SNS2)
Relay (1 to 4) . . . . . . . . . . . . . . . . . . Normally Open (nO)/Normally Closed (nC)
Rate Sampling . . . . . . . . . . . . . . . . . On/Off
RS-232 Baud Rate . . . . . . . . . . . . . . 2.4, 4.8, 9.6, 19.2, 38.4, 57.6, 115.2 kbps
Etch Mode . . . . . . . . . . . . . . . . . . . . On/Off
Crystal Tooling (1 to 6) . . . . . . . . . . . 10 to 399%
Frequency Min/Max . . . . . . . . . . . . . 1.0 to 6.4 MHz/1.1 to 6.5 MHz
Analog Output Bounds
Rate Min/Max . . . . . . . . . . . . . . . -99 to 999 Å/s
Thickness Min/Max. . . . . . . . . . . 0.0 to -9999 kÅ
1-6
1.4.4 Digital I/O

Digital Inputs. . . . . . . . . . . . . . . . . . . 4
Functions . . . . . . . . . . . . . . . . . . . . . Open Shutter, Close Shutter, Zero
Thickness, Zero Time
Input Rating . . . . . . . . . . . . . . . . . . . 5 V (dc), non-isolated
Relay Outputs. . . . . . . . . . . . . . . . . . 4
Functions . . . . . . . . . . . . . . . . . . . . . Shutter, Sample/Hold or Thickness Setpoint,
Dual Sensor Shutter or Time Setpoint,
Crystal Fail
Relay Rating . . . . . . . . . . . . . . . . . . . 30 V (rms) or 30 V (dc), 2 A maximum
1.4.5 General Specifications

Mains Power Supply. . . . . . . . . . . . . 100 to 240 V (ac), ±10% nominal, 50/60 Hz
Fuse . . . . . . . . . . . . . . . . . . . . . . . . . 5 x 20 mm, 500 mA, 250 V time lag
Power Consumption . . . . . . . . . . . . . 20 W
Operating Environment . . . . . . . . . . 0 to 50°C (32 to 122°F)
0 to 80% RH non-condensing
0 to 2000 m
Indoor Use Only
Class 1 Equipment (Grounded Type)
Suitable for Continuous Operation
Ordinary Protection (not protected against
harmful ingress of moisture)
Pollution Degree 2
Installation (Overvoltage) Category II
PN 074-511-P1D
for transient overvoltages

Storage Environment . . . . . . . . . . . . -10 to 60°C (14 to 140°F)
Rack Dimensions (HxWxD) . . . . . . . 8.85 x 21.26 x 19.68 cm
(3.48 x 8.37 x 7.75 in.)
Weight . . . . . . . . . . . . . . . . . . . . . . . 2.7 kg (6 lb.)
1-7
1.5 Unpacking and Inspection

1 Remove SQM-160 from its packaging.
2 Carefully examine SQM-160 for damage that may have occurred during
shipping. It is especially important to note obvious rough handling on the
exterior of the container. Immediately report any damage to the carrier as well
as to INFICON.
3 Turn ON SQM-160.
4 Refer to the invoice and take inventory (see section 1.6). Do not discard the
packing materials before verifying inventory and power.
5 To install and set up, see Chapter 2, Installation.
6 For additional information or technical assistance, contact INFICON (refer to
section 1.3 on page 1-4).
1.6 Configurations and Accessories

1.6.1 SQM-160 Configurations
SQM-160 . . . . . . . . . . . . . . . . . . . . . . . . .SQM160-X-X-X
Consult the figure below for possible configurations.
Figure 1-2 SQM-160 configurations
PN 074-511-P1D
NOTE: All configurations ship with Thin Film Instrument and Sensor Manuals CD
(PN 074-5000-G1), which contains the SQM-160 Operating Manual (PN
074-511), SQM-160 Comm software, and sensor manuals.
1-8
1.6.2 Accessories
1.6.2.1 Oscillator Kits
Each sensor requires an oscillator kit to interface with the controller:
3 m (10 ft.) Oscillator Kit . . . . . . . . . . . . . PN 783-500-109-10
7.6 m (25 ft.) Oscillator Kit . . . . . . . . . . . PN 783-500-109-25
15.2 m (50 ft.) Oscillator Kit . . . . . . . . . . PN 783-500-109-50
22.8 m (75 ft.) Oscillator Kit . . . . . . . . . . PN 783-500-109-75
Each oscillator kit includes:
 Oscillator, PN 783-500-013
 15.2 cm (6 in.) BNC cable, PN 782-902-011
 One of the following BNC cables:
3 m (10 ft.) BNC Cable . . . . . . . . PN 782-902-012-10
7.6 m (25 ft.) BNC Cable . . . . . . PN 782-902-012-25
15.2 m (50 ft.) BNC Cable . . . . . PN 782-902-012-50
22.8 m (75 ft.) BNC Cable . . . . . PN 782-902-012-75
NOTE: These oscillator kits are designed for use with the standard in-vacuum
cables which range in length from 15.2 cm (6 in.) to 78.1 cm (30.75 in.).
1.6.2.2 Rack Mounting Options

Rack mount kits allow one or two SQM-160 instruments to be installed in a
standard 48.3 cm (19 in.) rack.
Full Rack Extender (one SQM-160) . . . . PN 782-900-008
Rack Adapter (two SQM-160s) . . . . . . . PN 782-900-014
PN 074-511-P1D
See section 2.2, Rack Mounting Procedure, on page 2-3, for installation
instructions.
1-9
1.6.2.3 Sensors
Front Load Single Sensor . . . . . . . . . . . SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . DL-AXXX
Cool Drawer Single Sensor . . . . . . . . . . CDS-XXFXX
Cool Drawer Dual Sensor . . . . . . . . . . . CDD-XFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . 750-618-G1
UHV Bakeable Sensor . . . . . . . . . . . . . . BK-AXF
ALD Sensor . . . . . . . . . . . . . . . . . . . . . . 750-713-G4
750-717-G2
750-717-G4
NOTE: X indicates user-selectable option (see www.inficon.com for Sensor
Datasheets).
NOTE: All shuttered sensors require a feedthrough with an air line and
a solenoid valve (PN 750-420-G1).
NOTE: Multi-crystal (rotary) sensor should not be used with SQM-160.
PN 074-511-P1D
1 - 10
Chapter 2
Installation
2.1 Installation Requirements

2.1.1 Parts Requirements
 SQM-160 Monitor
 One or more crystal sensor/feedthrough(s)
 One oscillator kit for each crystal sensor
 Quartz crystals appropriate for the application
CAUTION
To maintain proper SQM-160 performance, use only

the 15.2 cm (6 in.) BNC cable, included in the oscillator
kit, to connect the oscillator to the crystal sensor.
The in-vacuum cable (Front Load and Sputtering

Sensors) or electrical conduit tube (Cool Drawer, ALD,
and UHV Bakeable Sensors) should not exceed 78.1 cm
(30.75 in.).
PN 074-511-P1D
2-1
2.1.2 Ground Requirements

Use low impedance cables or straps to connect the chassis of all control
components to a common ground point on the vacuum chamber. The common
ground point must be connected to the earth ground (see section 2.1.3 for the earth
ground requirement).
Solid copper straps are recommended where RF is present. Use a strap of the
shortest possible length, minimum width of 12.7 mm (0.5 in.), and approximately
0.56 mm (0.022 in.) thick. This is particularly important in high-noise e-beam
systems (see Figure 2-1 for the recommended grounding method).
 The oscillator is grounded to SQM-160 and crystal sensor through the
BNC cables.
 The crystal sensor is typically grounded to the wall of the vacuum system. If the
sensor feedthrough is not properly grounded to earth through the vacuum
system, connect a copper strap between the feedthrough and the common
ground point on the vacuum system.
Figure 2-1 System grounding diagram
Sensor
Feedthrough
SQM-160
3-Conductor Oscillator
Power Cable and Cables
Copper Straps to
Common Ground
PN 074-511-P1D
Vacuum System
Earth
Ground
2-2
2.1.3 Establishing Earth Ground
Follow local electrical regulations and codes.
1 Install two 3 m (10 ft.) long copper-clad steel ground rods into the soil, spaced
at least 1.9 m (6.2 ft.) apart. The ideal distance between the rods is 6 m (20 ft.)
(twice the rod length).
2 Pour a solution of magnesium sulfate or copper sulfate around each rod to
reduce resistance to earth ground.
3 Test the ground rods using a ground resistance tester specifically designed for
that purpose.
NOTE: Do not use a common ohmmeter.
4 After verifying that a good earth ground has been achieved, connect the rods
together using solid copper straps at least 76 mm (3 in.) wide and
approximately 0.9 to 1.3 mm (0.05 in.) thick, keeping the strap as short as
possible.
NOTE: Do not use braided wire. Use a solid copper strap.
2.2 Rack Mounting Procedure

SQM-160 is designed to mount in a standard 48.3 cm (19 in.) rack using optional
rack mount kits or can be used on a benchtop.
Two rack mount kits are available:
 Full Rack Extender (PN 782-900-008)
 Rack Adapter (PN 782-900-014)
PN 074-511-P1D
2.2.1 Full Rack Extender

The optional Full Rack Extender (PN 782-900-008) mounts a single SQM-160 into
a full-width 48.3 cm (19 in.) rack space.
2.2.1.1 Inventory
 Two rack mount ears
 Two large black aluminum panels
 Two small black aluminum panels
 Two hex shoulder screws
 Eight small flat-head screws
 Four large flat-head screws
2-3
2.2.1.2 Installation
1 Assemble the Extender
Use the eight small flat-head screws to connect the two small black aluminum
panels and two large black aluminum panels (see Figure 2-2).
Figure 2-2 Assembly of extender
Small flat head screws
PN 074-511-P1D
2-4
2 Install Hex Shoulder Screws

From inside the extender, thread two hex shoulder screws on one side, closest
to the front of SQM-160. Continue to thread the screws until the threads are
completely exposed (see Figure 2-3 and Figure 2-4).
Figure 2-3 Installing hex shoulder screws - inside view
Figure 2-4 Installing hex shoulder screws - overall view

PN 074-511-P1D
2-5
3 Attach the Extender

Align the extender with SQM-160 to fit the rack. The hex shoulder screws
installed in step 2 need to align with the two large threaded holes in SQM-160.
Tighten the hex shoulder screws to secure the extender to SQM-160 (see
Figure 2-5).
Figure 2-5 Attach extender to SQM-160
PN 074-511-P1D
2-6
4 Install the Rack Mount Ears

Using the four large flat-head screws provided, install the rack mount ears onto
the outer ends of the instrument assembly. Install one rack mount ear to
SQM-160, and the other to the extender (see Figure 2-6 and Figure 2-7).
Figure 2-6 Installing rack mount ears
Flat head screws
Figure 2-7 Full Rack Extender final assembly

PN 074-511-P1D
5 Mount SQM-160
Slide the completed assembly (refer to Figure 2-7) into an empty 2U
rack-mount space (8.9 cm [3.5 in.] H x 48.3 cm [19 in.] W). Secure the assembly
with four rack screws (not provided).
2-7
2.2.2 Rack Adapter

The optional Rack Adapter (PN 782-900-014) mounts two SQM-160 or CI-100
instruments side-by-side in a full-width 48.3 cm (19 in.) rack space.
2.2.2.1 Inventory
 Two rack mount ears
 Two rear mount couplers
 Four 4-40 pan-head screws with washers
 Four flat-head screws
2.2.2.2 Installation
1 Locate and Remove the Appropriate Rear Panel Screws. Align the two
instruments side-by-side, as though installed in the rack. Remove the two
adjacent sets of screws on the rear panel (see Figure 2-8).
NOTE: These screws are no longer needed and may be discarded, or kept for
other uses.
Figure 2-8 Locating the SQM-160 rear panel screws
Remove PN 074-511-P1D
2-8
2 Install the Rear Mount Couplers

Using the four pan-head screws and washers provided, install one side of each
rear mount coupler to each instrument (see Figure 2-9). Do not fully tighten the
screws until all screws are installed.
Figure 2-9 Rear mount coupler installation
Pan head screws

PN 074-511-P1D
2-9
3 Install the Rack Mount Ears

Using the four flat-head screws provided, install the rack mount ears on the
outer ends of the instrument assembly (see Figure 2-10). One rack mount ear
should be installed on each instrument (see Figure 2-11).
Figure 2-10 Rack mount ear installation
Flat head screws
Figure 2-11 Rack Adapter final assembly
PN 074-511-P1D
4 Mount the SQM-160 Assembly
Slide the completed assembly (refer to Figure 2-11) into an empty 2U rack
mount space (8.9 cm [3.5 in.] H), 48.3 cm [19 in.] W). Secure the assembly with
four rack screws (not provided).
2 - 10
2.3 Rear Panel Interfaces

Figure 2-12 Rear panel
RS-232 USB/Ethernet Option Card

Sensor Fuse T2.5A 250V
3 4 5 6
Sensor 1 Sensor 2 Rate Out Thick Out Relay I/O

100-120/200-240V~
50/60 Hz
20 W
Sensor 1/Sensor 2
BNC connection to the oscillators for sensors 1 and 2 (see section 2.4.1 for detailed
information on sensor connections).
Rate Out/Thick Out
Provides 0 to 5 V (dc) analog outputs for rate and thickness readings. Rate and
thickness output values are an average of all sensors in use for the active film (see
section 3.20, Analog Output Configuration, on page 3-18 for details on how to set
the analog output scale).
Relay I/O
Connects 4 relays and 4 digital inputs to external devices (see section 2.5 on page
2-14 relay I/O pinout and function information). Detailed programming information
for relay functions can be found in Chapter 3.
RS-232
Connection to computer for programming and data acquisition (see Chapter 5,
PN 074-511-P1D
Communications).
USB/Ethernet
Optional connection to computer USB or Ethernet port for programming and data
acquisition (see Chapter 5, Communications).
Optional Sensor Card (3 to 6)
Provides four additional sensor measurement channels.
Measurement ground terminal useful for common system and cable grounding.
2 - 11
Power Connector and Fuse

Receptacle for mains power. SQM-160 contains a universal power supply capable
of accepting 100 to 240 V (ac) input at 50/60 Hz.
Fuse is 5 x 20 mm, 500 mA, 250 V time lag (PN 062-0105).
Use a removable power cable only of the specified type

and rating, attached to a properly grounded receptacle.
ON/OFF Switch (I/O)

Turns the SQM-160 power ON(I) or OFF(O).
2.4 System Connections

See Figure 2-13 for a simple vacuum system diagram.
Maintain adequate insulation and physical separation of

sensor and I/O wiring from hazardous voltages.
Figure 2-13 Typical vacuum system wiring
Sensor
Ground Wire
PN 074-511-P1D
Option Card
In-Vacuum
Sensor Fuse T2.5A 250V
RS-232 3 4 5 6
Cable Sensor 1 Sensor 2 Rate Out Thick Out Relay I/O
100-120/200-240V~
50/60 Hz
20 W
Feedthrough SQM-160 Monitor
15.2 cm (6 in.)
BNC Cable
3 m (10 ft.) BNC Cable
Oscillator
2 - 12
Sensor
Holds the quartz crystal used to measure rate and thickness. Crystals must
routinely be replaced. Refer to the appropriate sensor operating manual for
installation and maintenance instructions particular to that sensor.
In-Vacuum Cable
Connects the sensor to the feedthrough.
Feedthrough
Provides isolation between vacuum and atmosphere for electrical connections,
water, air, and/or purge gas tubes.
15.2 cm (6 in.) BNC Cable
Provides a flexible connection from the feedthrough to the oscillator.
Oscillator
Contains the electronics to operate the quartz crystal. The length from the
oscillator to the crystal should be under 1 m (40 in.).
3 m (10 ft.) BNC Cable
Connects the oscillator to SQM-160. Lengths up to 22.8 m (75 ft.) are acceptable.
Ground Wire
A wire, preferably a solid copper ground strap, that connects the earth-grounded
vacuum system to SQM-160 ground terminal (refer to section 2.1.2, Ground
Requirements, on page 2-2).
2.4.1 Sensor Connections

1 Connect one end of the oscillator cable (PN 782-902-012-XX) to any SQM-160
sensor connectors.
PN 074-511-P1D
2 Connect the other end of the oscillator cable to the BNC connector on the
oscillator labeled Control Unit.
3 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the
BNC connector on the oscillator labeled Sensor.
4 Connect the other end of the 15.2 cm (6 in.) BNC cable to the BNC connector
on the feedthrough.
5 Install a new 5 or 6 MHz crystal into the sensor.
NOTE: Refer to the sensor operating manual for crystal installation instructions.
2 - 13
CAUTION
To maintain proper SQM-160 performance, use only the

15.2 cm (6 in.) BNC cable, included in the oscillator kit, to
connect the oscillator to crystal sensor.
The in-vacuum cable (Front Load and Sputtering

Sensors) or electrical conduit tube (Cool Drawer, ALD,
and UHV Bakeable Sensors) should not exceed 78.1 cm
(30.75 in.).
Maintain adequate insulation and physical separation of

sensor, I/O, and wiring from hazardous voltages.
6 Turn ON SQM-160, using the ON/OFF switch.
2.5 I/O Connections

A 15-pin, female D-sub connector is included with SQM-160 to connect the digital
I/O to SQM-160 Relay I/O connector. See Figure 2-14 for the solder-side pin
assignments for D-sub connector.
Figure 2-14 Relay I/O D-sub connector rear view
1 8
PN 074-511-P1D
9 15
2 - 14
Table 2-1 Pin functions and descriptions
Pins Function Description
1,2 Crystal Fail Relay Activates when all enabled sensors have failed.
Relay 1
3,4 Time Setpoint, If RL2 in the System menu is set to:

Relay 2 Dual Sensor, or  TIME - Relay 2 activates when time counts down to zero from the
Sensor 2 Shutter programmed Time Setpoint value (see section 3.15 on page
Relay 3-15).
 DUAL - Relay 2 activates when Sensor 1 fails (see section 3.13
on page 3-13).
 SNS2 - Relay 2 activates when the Shutter button is pressed
when Sensor 2 is programmed for the active film.
5,6 Shutter Relay  Controlled by the Shutter button on the front panel. Activated
Relay 3 when the Shutter Open indicator is illuminated.
 If SNS2 is selected for RL2 in the System menu, the shutter relay
activates only if Sensor 1 is programmed for the active film.
7,8 Sampling or  If Sampling is ON in the System menu, Relay 4 activates during

Relay 4 Thickness Setpoint Sample and open during Hold (see section 3.14 on page 3-14).
 If Sampling is OFF, Relay 4 activates when Thickness Setpoint
is reached.
9 Zero Time Input Grounding this pin zeroes the setpoint time.
10 Zero Thick Input Grounding this pin zeroes the thickness display.
11 Close Shutter Input Grounding this pin opens the shutter relay.
12 Open Shutter Input Grounding this pin closes the shutter relay.
13,14,15 Ground
PN 074-511-P1D
WARNING
The inputs are not isolated. The voltage level applied

must be limited between 0 and +5 V (dc), with respect
to ground.
WARNING
Output relays are rated for 30 V (rms) or 30 V (dc), at

2 A maximum. Provide proper fusing and adequate wiring
insulation and separation in case the limits are exceeded.
2 - 15
This page is intentionally blank.
PN 074-511-P1D
2 - 16
Chapter 3
Operation
3.1 Introduction
This chapter details the operation of the SQM-160 menus and front panel controls.
3.2 Front Panel Controls

Figure 3-1 SQM-160 front panel
Crystal
Status Control
Display 1 Indicators Knob
Control Setpoint Configuration

Display 2 Indicators Section
Section
Display 1
PN 074-511-P1D
 Displays Rate/Thickness or Frequency in normal operation.

 If multiple sensors are being used and Time is displayed on Display 2, the
average of the sensors is displayed. Rotate the Control Knob to display each
individual sensor readings.
 Displays the setup parameter name in Program mode.
Display 2
 Displays deposition Time during normal operation.
 When using the Control Knob to display individual sensor readings on
Display 1, the sensor number corresponding to reading in Display 1 is
displayed on Display 2.
 Displays setup parameter values in Program mode.
3-1
Control Section
Zero . . . . . . . . . . . . . . . . . . . . . . . . . Press to zero the thickness reading.
Xtal Life . . . . . . . . . . . . . . . . . . . . . . Press to toggle display between Crystal Life
and Rate/Thickness readings.
Shutter. . . . . . . . . . . . . . . . . . . . . . . Press to activate/deactivate shutter relay.
Open/Closed indicator . . . . . . . . . . Displays the status of the shutter relay.
Configuration Section
Program . . . . . . . . . . . . . . . . . . . . . Press to enter/exit Program mode.
Clear . . . . . . . . . . . . . . . . . . . . . . . . Press to cancel a change and return the
displayed parameter to original value.
Prev . . . . . . . . . . . . . . . . . . . . . . . . . Press to move to previous parameter. Saves
the current setting. If pressed immediately
after entering Program mode, allows access
to System parameters.
Next . . . . . . . . . . . . . . . . . . . . . . . . . Press to move to next parameter. Saves the
current setting.
Setpoint Indicators
 Illuminates when the indicated setpoint is reached.
Crystal Status Indicators
 Illuminates when the crystal is active and operating properly.
 Flashes when an active crystal fails.
 Extinguishes when the crystal is not being used.
Control Knob
PN 074-511-P1D
 Used to adjust values or scroll through menu selections.
 Press the Control Knob to save the current setting and display the next
setting.
 Press the Control Knob to enable or disable a sensor channel when editing
Sensor Average.
3-2
3.3 Menu Selection

Two menus provide control for programming SQM-160.
 The Film menu customizes each stored film.
 The System menu sets values that apply to all films.
The Configuration section of SQM-160 front panel contains four buttons used to
access the Program menus. Within the Program menus, the Control Knob also
adjusts values and selects menu options. In Program mode, Display 1 indicates the
parameter to be changed. Display 2 indicates the value of the selected parameter.
NOTE: If Crystal Life is displayed on SQM-160 display, press Xtal Life to return to
normal Rate/Thickness or Frequency display.
To enter the Film menu, press Program. SQM-160 displays the currently selected
film. First rotate and then press the Control Knob or Next to select a different film
and display the first parameter for the selected film.
To enter the System menu, press Program then press Prev.
Figure 3-2 SQM-160 front panel
Control Knob
Display 1
PN 074-511-P1D
Press
Press Next to Press Prev then Program
Display 2 Next to move through
move through the to access
Film menu the System menu menus
3-3
3.4 Film Menu

The Film menu aids in programming SQM-160 for the materials that will be
deposited. Ninety-nine films can be stored, but only one film is active at any time.
1 Press Program to enter Program mode.
2 Rotate the Control Knob to select the desired Film (1 to 99).
3 Press the Control Knob or Next to display the parameters for the
selected film.
NOTE: This will set the active film and should not be done while running. Press
Program to abort with no change.
4 Press Next or Prev to select other parameters in the Film menu. The selected
parameter is seen on Display 1 (refer to Figure 3-2).
5 Rotate the Control Knob to edit the parameter value displayed on Display 2
(refer to Figure 3-2).
6 Press the Control Knob, Next, or Prev to save the displayed value and move
to the next material parameter. Press Clear to abandon the change and return
to the original value.
7 Press Program to exit the Film menu and return to Normal mode.
NOTE: Figure 3-3 and Table 3-1 detail the parameters available in the Film menu.
Instructions for setting specific parameters are detailed in later sections of
this chapter.
Figure 3-3 Film menu
Film Selection Film Menu Sub-Menu

- DENSITY
Film 1 - TOOLING
Program - Z-FACTOR
PN 074-511-P1D
- FINL THK -1
- THK SET * -2
- TIME SET * -3
- SAMPLE * -4
Film 99 - HOLD * -5
- SENS AVG * -6
NOTE: Depending on System menu parameters, selections marked with a *

may not be available (see Table 3-1).
3-4
Table 3-1 Film menu
Display Description Range Default Units
DENSITY Density of the material being deposited (see 0.50 to 99.99 1.00 g/cm3
Appendix A for common material densities).
TOOLING Overall Tooling Factor for this film (see 10 to 399 100 %
Z-FACTOR Z-Ratio of the material being deposited (see 0.10 to 9.999 1.0
Appendix A for common material Z-Ratios).
FINL THK Programmed Final Thickness of deposited 0.000 to 9999 0.500 kÅ

material. Illuminates Final Thk indicator
when reached.
THK SET Thickness value that activates the Thickness 0.000 to 9999 0.000 kÅ
Setpoint relay (Relay 4) and illuminates Thk
SP indicator. Not available when Sampling is
ON in System menu.
TIME SET Elapsed time that activates the Time 0:00 to 99:59 0:00 mm:ss
Setpoint relay (Relay 2) and illuminates Time
SP indicator. Not available when Relay 2
(RL2) is set to DUAL or SNS2 in the
System menu.
SAMPLE The time for the sensor shutter to remain 0 to 5999 0 s

open when Sampling is enabled in the
System menu (see section 3.14 on page
3-14). Not available when Sampling is
disabled in System menu.
HOLD The time for the sensor shutter to remain 0 to 5999 0 s

closed when Sampling is enabled in the
PN 074-511-P1D
System menu (see section 3.14 on page

3-14). Not available when Sampling is
disabled in System menu.
SENS AVG Enable/disable crystals for the selected film Enabled/ Ch1
(see section 3.6 on page 3-9). Not available Disabled Enabled
when Relay 2 (RL2) is set to DUAL in the
System menu.
3-5
3.5 System Menu

The System menu sets function values for SQM-160 and the vacuum system
setup. System menu parameters apply to all films.
2 Press Prev to display the System menu.
3 Press Next and Prev to select other parameters in the System menu.
4 Rotate the Control Knob to edit the parameter value displayed on Display 2
(refer to Figure 3-2 on page 3-3).
5 Press the Control Knob, Next, or Prev to save the displayed value and move
to the next (or previous) material parameter. Press Clear or Program to
abandon the change and return to the original value.
6 Press Program to exit the System menu and return to Normal mode.
Figure 3-4 System parameters menu
System Menu Display 1 Sub-menu

- TIMEBASE - THCK
- SIM MODE - NANM
- DSP - FREQ
Program Prev - MASS
- RATE RES
- RATEFILT - TIME
- RL2 - DUAL - XTLTOOL1
- SAMPLING - SNS2
- BAUDRATE - XTLTOOL6
- ETCH
- XTOOLING - RELAY 1
- RELAYS
- FREQ MIN - RELAY 4
- FMIN/MAX
- FREQ MAX
- R/T BNDS
- RATE MIN
- RATE MAX
PN 074-511-P1D
- THICKMIN
- THICKMAX
3-6
Table 3-2 System menu
TIMEBASE Time required for a measurement. 0.10 to 2.00 0.25 s

Longer times yield higher accuracy.
Increments by
0.05 s
SIM MODE Simulates sensor inputs and frequency/rate On/Off Off

readings.
DSP Selects the value to display on Display 1: THCK/NANM/ THCK

FREQ/MASS
 Rate/Thickness in Angstroms
 Rate/Thickness in Nanometers
 Frequency
 Mass
See section 3.9 on page 3-12 for details.
RATE RES Sets rate resolution to 0.01 (high) or 0.1 Å/s HI/LO LO
(low).
RATEFILT Number of rate readings averaged. 1 to 20 8
RL2 Selects the function of Relay 2: TIME/DUAL/ Time

 TIME causes Relay 2 to activate when SNS2
time setpoint is reached (see section
3.15 on page 3-15).
 DUAL causes Relay 2 to activate a dual
sensor shutter when Sensor 1 fails (see
 SNS2 causes Relay 2 to activate a
sensor shutter when Sensor 2 is
assigned to a film.
PN 074-511-P1D
SAMPLING When Sampling is ON, the sensor shutter On/Off Off

periodically samples the rate, then closes
the shutter. SQM-160 holds the same rate
reading until the next sample period (see
section 3.14 on page 3-14). Sample and
Hold times are set in the Film menu (refer to
section 3.4).
BAUDRATE Serial baud rate to computer. 2.40/4.80/9.60/ 19.20 kbps

19.20/38.40/
57.60/115.2
ETCH Sets rate negative for etching. On/Off Off
XTOOLING Tooling value assigned to each sensor. See 10 to 399 100 %

section 3.8, Sensor Tooling, on page 3-11.
3-7
Table 3-2 System menu (continued)
RELAYS Assigns normally open or normally closed nO/nC nO

operation for each relay.
NOTE: All relays are open with power
OFF.
FMIN/MAX Sub-menu sets minimum and maximum Min: 1.00 to 6.40 5.00 MHz
crystal frequencies (see section 3.7 on page
3-10). Max: 1.10 to 6.50 6.10
R/T BNDS Rate and Thickness Bounds sub-menu for See below
analog outputs (see section 3.20 on page
3-18).
RATE MIN Deposition rate for zero output (0 V). Must be -99 to 999 0 Å/s
set lower than RATE MAX.
RATE MAX Deposition rate for full-scale output -99 to 999 100 Å/s
(+5 V(dc)). Must be set higher than
RATE MIN.
THICKMIN Thickness for zero output (0 V). 0.000 to 9999 0.000 kÅ

Must be set lower than THICKMAX.
THICKMAX Thickness for full scale output (+5 V (dc)). 0.000 to 9999 1.000 kÅ
Must be set higher than THICKMIN.
PN 074-511-P1D
3-8
3.6 Sensor Selection

SQM-160 comes standard with two sensor inputs. Four additional sensors are
available by adding a Sensor Option Card. A specific sensor can be assigned to
each film, or multiple sensors can be assigned to a film for sensor averaging. The
averaging option provides more uniform coverage of the deposition area and
provides backup sensor capability. If one of the sensors assigned to a film fails, that
sensor is automatically removed from rate/thickness calculations.
NOTE: If Relay 2 (RL2) is set to DUAL in the System menu, Sensors 1 and 2 are
set as a primary/secondary sensor pair and sensor averaging is disabled
(see section 3.13 on page 3-13 for information on dual sensors).
To assign a sensor, or sensors, to a film:
2 Use the Control Knob to scroll to the desired film (1 to 99).
3 Press the Control Knob or Next to enter the Film menu for the selected film
and set the selected film as the active film.
4 Press Next until SENS AVG is displayed.
5 Rotate the Control Knob to display each sensor in Display 2.
6 Press the Control Knob to toggle the indicated sensor On/Off.
The Crystal Status indicators indicate the sensor status for each sensor:
 If the indicator is extinguished, the sensor is disabled.
 If the indicator is illuminated, the sensor is enabled and SQM-160 is
receiving valid readings.
 If the indicator is blinking, the sensor is enabled, but SQM-160 is not
receiving valid readings (crystal fail) (see Chapter 6, Troubleshooting and
PN 074-511-P1D
Maintenance).
7 Continue selecting sensors until the Crystal Status indicators indicate the
desired setup.
9 Rotate the Control Knob to display each enabled sensor reading on Display 1.
 When an individual sensor number is displayed in Display 2, the number in
Display 1 is the individual reading for that sensor.
 When time is displayed in Display 2, the number in Display 1 is the average
of all assigned sensors.
3-9
3.7 Sensor Frequency

Sensor Minimum and Maximum frequencies establish the operating range for the
sensing quartz crystals. Both values are used to determine the % life that is
displayed in Xtal Life mode.
When the sensor frequency reads below the minimum or above the maximum,
SQM-160 indicates a sensor failure (crystal fail) with a flashing Crystal Status
indicator.
To set sensor minimum and maximum frequencies:
2 Press Prev to enter the System menu.
3 Press Next until FMIN/FMAX displays on Display 1.
4 Press the Control Knob to display FREQ MIN on Display 1.
5 Rotate the Control Knob to edit the minimum operating frequency on Display
2 (typically 5.0 MHz for a 6 MHz crystal).
6 Press the Control Knob to accept the minimum value and display FREQ MAX
on Display 1.
7 Rotate the Control Knob to edit the maximum operating frequency on Display
2 (typically 6.0 or 6.1 MHz for a 6 MHz crystal).
8 Press the Control Knob to accept the maximum value.
Crystals sometimes fail unexpectedly, or exhibit erratic frequency shifts (mode
hopping) before total failure. Depending on the material, crystals may fail well
before the typical 5 MHz minimum. If the crystals consistently fail early, set
FREQ MIN to a value higher than 5 MHz to provide a Crystal Life warning that is
PN 074-511-P1D
consistent with actual failure.
A sensor crystal with an initial value that exceeds the maximum frequency will also
cause a flashing Crystal Status indicator. The maximum frequency can be set
slightly above the nominal values with no effect on accuracy.
3 - 10
3.8 Sensor Tooling

Sensor Tooling (xTooling) adjusts for the difference in deposition rate between the
sensor and the substrate being coated. It is an empirically determined value that
aligns the sensor readings to the vacuum system.
 100% tooling indicates that the sensor and substrate receive the same amount
of material during deposition.
 Tooling values over 100% indicate that the sensor receives less material than
the substrate (see Figure 3-5 (a)).
 Tooling values under 100% indicate that the sensor receives more material
than the substrate (see Figure 3-5 (b)).
Figure 3-5 Sensor Tooling
Substrate
Substrate
(a) Tooling (b) Tooling

Over 100% Under 100%
Sensor Tooling is set in the System menu. It adjusts the tooling for each individual
sensor before it is averaged. Sensor Tooling for a sensor applies to all films.
If the Sensor Tooling parameters are set properly, a sensor failure will not cause a
jump in the average Rate and Thickness reading (see section 7.3 on page 7-2).
PN 074-511-P1D
To adjust Sensor Tooling:

3 Press Next until xTOOLING is displayed on Display 1, then press the Control
Knob. XTLTOOL 1 will be displayed, indicating Sensor Tooling for Sensor 1.
4 Rotate the Control Knob to edit the XTLTOOL 1 (Sensor 1 Tooling) value on
Display 2. Press the Control Knob to save the value and display XTLTOOL 2
(Sensor 2 Tooling).
5 Repeat step 4 for each of the installed sensors.
6 Press Program to exit the System menu.
NOTE: Sensor Tooling is different from Film Tooling. Film Tooling is set in the Film
menu and is applied to the averaged Rate and Thickness for all sensors
assigned to that film. Film Tooling is a film-specific value.
3 - 11
3.9 Display Units

SQM-160 can display crystal measurements in several different units.
To select the display units:
3 Press Next until DSP... is displayed on Display 1.
4 Rotate the Control Knob to select the desired display mode:
 THCK — Rate in Å/s, Thickness in kÅ
 NANM — Rate in nm/s, Thickness in µm
 MASS — Rate in ng/cm2/s, Mass in µg/cm2
 FREQ — Frequency in Hz
NOTE: When NANM is selected a lowercase n is displayed between the rate
and thickness values. When MASS is selected a lowercase m is
displayed between the rate and thickness values.
5 Press the Control Knob, Next, or Prev to accept the choice.
NOTE: The Display Units setting does not affect data returned through remote
communications or analog outputs.
3.10 Crystal Life

SQM-160 calculates the crystal life value based on the current frequency
compared to the FMIN/FMAX values set in the System menu (refer to section 3.5
on page 3-6 and section 3.7 on page 3-10). A new crystal should indicate between
PN 074-511-P1D
95 and 100% crystal life.
To display the remaining crystal life for the sensors used by the currently active film:
1 Press Xtal Life.
2 The sensor is displayed on Display 1 and the % remaining life is displayed on
Display 2.
3 Rotate the Control Knob to display the % life of other sensors active for the
selected film.
4 Press Xtal Life again to return to normal rate/thickness or frequency display.
NOTE: Program mode is not available while the crystal life display is active.
3 - 12
NOTE: Usable crystal life depends on the material being evaporated and other
process characteristics. Rate noise and other failure modes may be
observed before the crystal life value reaches 0%.
3.11 Zero Thickness

Before starting each film deposition, reset the SQM-160 Thickness value to zero.
To zero Thickness, press Zero on the front panel Control section.
In addition to zeroing Thickness, pressing Zero has the following effects:
 The Time display is reset to the programmed value and starts counting down.
 The Thickness and Time Setpoint relays deactivate.
 The Time SP, Thk SP, and Final Thk indicators extinguish.
3.12 Shutter Operation

The SQM-160 Shutter button controls a relay (Relay 3) that is normally connected
to the source shutter. To activate or deactivate the Shutter relay, press Shutter.
The Open and Closed indicators illuminate to indicate the shutter status.
NOTE: If Relay 2 (RL2) is set to SNS2 in the System menu, the operation of the
Shutter relay changes slightly. In this case, Relay 3 will activate only if
Sensor 1 is assigned to the active film. If Sensor 2 is assigned to the active
film, Relay 2 will activate instead.
3.13 Dual Sensors

Dual sensors provide a backup (secondary) crystal should the primary crystal fail.
When Relay 2 (RL2) is programmed for DUAL in the System menu, SQM-160 will
automatically switch to Sensor 2 when Sensor 1 readings stop or become erratic.
Relay 2 will activate when Sensor 2 is in operation to actuate a dual sensor shutter.
To program SQM-160 for dual sensors:
PN 074-511-P1D

3 Press Next until RL2 is displayed on Display 1.
4 Rotate the Control Knob clockwise to select DUAL sensor function.
5 Press the Control Knob to accept the value.
7 In the Film menu, assign only Sensor 1 to the film. The backup Sensor 2 is
automatically assigned internally.
3 - 13
NOTE: Relay 2 is a multi-function relay. Relay 2 can be programmed as a dual

sensor shutter, it will activate when a programmed time has elapsed, or as
a Sensor 2 shutter relay. The function of Relay 2 is set in the System menu
RL2 parameter (refer to section 3.5 on page 3-6 for more information about
SQM-160 System parameters or see section 3.19 on page 3-18 for more
information about SQM-160 relay functions).
3.14 Rate Sampling

With Rate Sampling enabled, SQM-160 opens a sensor shutter for a fixed time in
order to sample the rate. SQM-160 then closes the shutter and for a fixed time.
While the shutter is closed (Hold mode), SQM-160 calculates thickness based on
the last sampled rate.
NOTE: Rate sampling can significantly extend crystal life in high deposition
rate and long processes. However, unless the process is very stable, the
thickness calculation during Hold mode may be incorrect. Do not use rate
sampling if the rates vary during deposition.
To program SQM-160 for Rate Sampling:
3 Press Next until SAMPLING is displayed on Display 1.
4 Rotate the Control Knob clockwise to set SAMPLING to ON.
7 Press Program to return to Program mode.
8 Rotate the Control Knob to select the desired film (1 to 99), then press the
PN 074-511-P1D
Control Knob or Next to display the Film menu for the selected film.
9 Press Next until SAMPLE is displayed on Display 1.
10 Rotate the Control Knob to edit the SAMPLE value displayed on Display 2.
Press the Control Knob to accept the SAMPLE value and display HOLD.
NOTE: SAMPLE is the amount of time the sensor shutter will remain open.
11 Rotate the Control Knob to edit the HOLD value displayed on Display 2. Press
the Control Knob to accept the HOLD value.
NOTE: HOLD is the amount of time the sensor shutter will remain closed.
The displayed Rate during this time is the last sampled rate.
3 - 14
NOTE: Relay 4 is a dual function relay. It can be programmed either for Rate
Sampling or as a Thickness Setpoint relay (see section 3.16, Thickness
Setpoint, on page 3-16 or refer to section 2.5, I/O Connections, on page
2-14 for relay wiring). This relay cannot be programmed for more than one
function.
3.15 Time Setpoint

The Time Setpoint provides a convenient way to signal a timed event when
Relay 2 (RL2) is set to TIME in the System menu. After a programmed time period
(TIME SET), the Time SP indicator illuminates and Relay 2 activates. Relay 2 will
deactivate and the time will reset when Zero is pressed.
To program the Time Setpoint:
3 Press Next until RL2 is displayed on Display 1.
4 Rotate the Control Knob clockwise to select TIME. Press the Control Knob to
accept the value.
8 Press Next until TIME SET is displayed on Display 1.
9 Rotate the Control Knob to edit the TIME SET value displayed on Display 2
and press the Control Knob to accept the value.
PN 074-511-P1D
NOTE: Relay 2 is a multi-function relay. It can be programmed as a dual sensor
shutter to activate when a programmed time has elapsed, or as a Sensor
2 shutter relay. The function of Relay 2 is set in the System menu RL2
parameter (refer to section 3.5 on page 3-6 for more information about
SQM-160 System parameters or see section 3.19 on page 3-18 for more
information about SQM-160 relay functions).
3 - 15
3.16 Thickness Setpoint

The Time Setpoint provides a convenient way to signal a thickness based event
when SAMPLING is set to OFF in the System menu. When the programmed
thickness is reached, the Thick SP indicator illuminates and Relay 4 deactivates.
Press Zero to deactivate the relay and zero thickness.
NOTE: Thickness Setpoint is independent of Final Thickness, which always
closes the source shutter.
To program the Thickness Setpoint:
3 Press Next until SAMPLING is displayed on Display 1.
4 Rotate the Control Knob clockwise to set SAMPLING to OFF. Press the
Control Knob to accept the value.
8 Press Next until THK SET, not FINL THK, is displayed on Display 1.
9 Rotate the Control Knob to edit the THK SET value displayed on Display 2.
Press the Control Knob to accept the value.
NOTE: Relay 4 is a dual function relay. It can be programmed either for Rate
Sampling or for as a Thickness Setpoint relay (see section 3.14, Rate
Sampling, on page 3-14 or refer to section 2.5, I/O Connections, on page
PN 074-511-P1D
2-14 for relay wiring). This relay cannot be programmed for more than one
function.
3 - 16
3.17 Simulate Mode

In Simulate mode, SQM-160 simulates attached sensors and provides a simplified
way to become familiar with the SQM-160 front panel controls and programming.
It is possible to open or close the shutter to simulate deposition, zero readings, and
display crystal life. It is also possible to test the Time and Thickness Setpoint relays
and indicators.
To enter Simulate mode:
3 Press Next until SIM MODE is displayed on Display 1.
4 Rotate the Control Knob to set SIM MODE to ON or OFF.
3.18 Defaulting the Memory
CAUTION
Performing this procedure will default SQM-160 to

factory settings and delete all parameters set by the user.
Do not perform this procedure before creating a backup
configuration file using SQM-160 Comm software.
1 Turn ON SQM-160. Immediately press and hold the buttons described in either
1a or 1b, depending on the SQM-160 firmware version.
PN 074-511-P1D
NOTE: The buttons must be pressed and held immediately after positioning
the ON/OFF switch to ON or the procedure will not work.
1a To clear only Film parameters:
Press and hold ZERO + XTAL LIFE + SHUTTER while SQM-160 turns ON.
Continue holding and proceed to step 2.
1b To clear only System parameters (firmware version v4.10 and higher):
Press and hold ZERO + XTAL LIFE + SHUTTER + CONTROL KNOB while
SQM-160 turns ON. Continue holding and proceed to step 2.
2 Continue to hold the buttons from 1a or 1b until ERROR 00 is displayed, briefly
followed by SQM-160 operating display. If parameters have not been defaulted
and ERROR 00 did not display, return to step 1.
3 Turn SQM-160 OFF, then ON. SQM-160 should now turn ON without displaying
errors.
3 - 17
NOTE: Defaulting the SQM-160 memory can also be done using the SQM-160
Comm software (see section 4.6 on page 4-11).
3.19 Relay Operation

The four SQM-160 relays are physically single-pole, normally-open (1FormA)
relays. Each relay can be programmed to act as either normally-open or
normally-closed during SQM-160 operation.
NOTE: All relays will open if SQM-160 is turned OFF or loses power (refer to
section 2.5 on page 2-14 for relay wiring).
To set the relay operating mode:
3 Press Next until RELAYS displays on Display 1.
4 Press the Control Knob to display Relay 1 on Display 1.
5 Rotate the Control Knob to select nO (normally open) or nC (normally closed).
Press the Control Knob to accept the value and display the next relay.
6 Repeat step 4 for each of the four relays.
3.20 Analog Output Configuration

SQM-160 features analog outputs that will produce a 0 to 5 V (dc) representative
of the current rate or thickness. Analog outputs must be set to match the device
that will be attached to the Rate or Thickness output.
To set up the analog outputs in the System menu:
PN 074-511-P1D
3 Press Next until R/T BNDS is displayed on Display 1.
4 Press the Control Knob to display RATE MIN on Display 1.
5 Rotate the Control Knob to set the RATE MIN value appropriately for a 0 V (dc)
output.
6 Press the Control Knob to save the value and display RATE MAX on Display 1.
7 Rotate the Control Knob to set the RATE MAX value appropriately for a 5 V
(dc) output.
8 Press the Control Knob to save the value and display THICKMIN on Display 1.
3 - 18
9 Repeat steps 5 to 8 to adjust the Thickness output values (THICKMIN and

THICKMAX).
10 Press Program to exit the System menu and return to Normal mode. (Refer to
section 3.5 on page 3-6 for more information on setting SQM-160 System
parameters.)
3.21 Depositing a Film

After all Film and System menu parameters are entered, it is possible to deposit a
film. Follow the procedure below to begin deposition.
1 Verify Sensor Operation
Verify that the Crystal Status indicator(s) for the measuring sensor(s) is
illuminated and not flashing.
2 Display Rate/Thickness
Display 1 should display Rate on the left and Thickness on the right.
 If the Crystal Life display mode is active, press the Xtal Life button to return
to Normal mode.
 If the Program mode is active, press Program to return to Normal mode.
3 Zero Thickness
If needed, press Zero to zero the Thickness reading.
4 Start Deposition
Apply power to the source evaporation supply. If the SQM-160 shutter relay
is connected (refer to section 2.5 on page 2-14), press Shutter to open the
source shutter and begin deposition.
Rate and Thickness displays should display non-zero values. If the Rate and
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Thickness displays continue to display zero, check the system setup to ensure
evaporation is occurring and deposition material is reaching the sensor.
If the display is erratic or noisy, refer to the troubleshooting information found in
Chapter 6 or the sensor operating manual.
If the rate and thickness readings do not match expectations, refer to section 3.4
on page 3-4 for information on setting Film parameters (Density, Z-Ratio
(Z-Factor), Film Tooling) and section 3.8 on page 3-11 for information on setting
Sensor Tooling.
3 - 19
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3 - 20
Chapter 4
SQM-160 Comm Software
4.1 Introduction
SQM-160 Comm software communicates with SQM-160 to allow remote
instrument setup and data logging.
Features include:
 Selecting a Film on SQM-160, then opening the shutter to start deposition.
 Viewing SQM-160 readings in both numerical and graphical format.
 Storing SQM-160 log data in a spreadsheet-compatible format.
 Creating and storing an unlimited number of film setups.
 Downloading films to and uploading films from SQM-160.
 Modifying the SQM-160 system setup parameters.
NOTE: This chapter discusses the functionality of SQM-160 Comm V2 software
version 2.60. Previous versions of SQM-160 Comm software may differ in
form and function. Refer to an older manual revision for information about
previous software versions.
Consult Chapter 5, Communications for information on connecting to an SQM-160
and establishing communication with this program.
4.2 Installation
The following instructions are for installation of SQM-160 Comm software.
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1 Click Windows Explorer or File Explorer >> Computer >> (CD drive letter:)
INFICON Technical Documentation>> SQM160 Monitor.
2 Double-click SQM 160 V2 v2.6.0 Setup.exe.
3 The InstallShield Wizard will display.
4 Click Next.
5 Select I accept the terms in the license agreement.
6 Click Next.
7 Click Next to accept the default installation location or click Change to change
the installation folder).
8 Click Install to start the software installation.
4-1
9 Click Finish. The INFICON USB Installer - InstallShield Wizard window will
display.
10 Click Next.
11 Select I accept the terms in the license agreement.
12 Click Next.
13 Enter User Name and Organization information.
14 Click Next.
15 Click Install.
16 Click Finish. The INFICON Thinfilm USB Device Driver Driver Installer
window will display.
17 Click Next.
18 Click Finish.
4.2.1 Update of an Older Version of SQM-160 Comm

If an older version of SQM-160 Comm software is being updated:
1 Navigate to Windows Control Panel >> Programs.
2 In Programs, select SQM-160 Comm and click Uninstall to remove the old
version of SQM-160 Comm software.
3 Install the latest version of SQM-160 Comm software (refer to section 4.2).
NOTE: It may be necessary to remove previously installed USB drivers for the new
drivers to install correctly. This is done using steps 1 to 3 above to uninstall
any INFICON USB drivers or Silicon Laboratories USB drivers. Silicon
Laboratories USBXpress Device (Driver Removal) is a common driver
for previous devices.
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4.3 Start the SQM-160 V2 Comm software.

For Windows 7
Click Windows Start icon >> All Programs >> INFICON >>
SQM-160 Comm V2.
or
Double click the SQM-160 Comm V2 shortcut icon on the desktop.
For Windows 8
In the Start window, click the SQM-160 Comm V2 icon.
If the SQM-160 Comm V2 icon is not visible:
Click Search >> Apps.
Type SQM-160 in the Search box.
Click the SQM-160 Comm V2 icon.
The SQM-160 Comm Main window will display (see Figure 4-1).
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4-3
4.4 Main Window

The Main window displays and graphs process data and allows navigation to other
windows for editing process parameters (see Figure 4-1).
Figure 4-1 SQM-160 Comm Main window - online
On program startup, SQM-160 Comm software attempts to find an SQM-160 using
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the last communications port settings. It may take a few seconds to establish a
connection. At this time, Initializing... will be displayed at the bottom of the Main
window.
 If SQM-160 Comm software is able to connect to SQM-160, the SQM-160
firmware version is displayed at the top of the Main window and On Line -
Ready is displayed at the bottom of the Main window (refer to Figure 4-1).
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 If SQM-160 Comm software is unable to connect to SQM-160, control functions

are disabled, Off Line - Check communications is displayed at the bottom of
the Main window, and Off Line is displayed at the top of the Main window (see
Figure 4-2).
Figure 4-2 SQM-160 Comm Main window - Off line
See section 4.8, Communications Setup Window, on page 4-17 for more
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information on establishing communications.
4.4.1 Menu Bar Functions

The Main window features a menu bar with drop-down menu lists (File, Edit, View,
and Help). All system and process configuration is accessed through these menus.
Some menu selections are not available during data acquisition or if SQM-160
communications are not established.
4-5
4.4.1.1 File Menu

Data Log . . . . . . . . . . . . . . . . . . . . . Opens the Data Log window for configuration
of the SQM-160 Data Log function (see
Print . . . . . . . . . . . . . . . . . . . . . . . . . Prints the Sensor Data tab, Avg Rate tab,
Sensor Rate tab, Avg Thickness tab, and
Sensor Thickness tab. When initially clicked,
opens the Print window for configuration of
printers and printing preferences.
NOTE: Print will not display the Print
window a second time while
SQM-160 Comm software is open.
Exit and open SQM-160 Comm
software to display the Print window
for editing configuration of printers
and printing preferences.
Screen Image to File
Current View to JPG. . . . . . . . . . . . Saves a screenshot of the currently opened
tab in .jpg format to the selected folder. If a
folder has not been selected using Select
JPG Folder, images will be saved to the
INFICON SQM-160 directory.
All Views to JPGs . . . . . . . . . . . . . . Saves a screenshot of all tabs in .jpg format
to the selected folder. If a folder has not been
selected using Select JPG Folder, images
will be saved to the INFICON SQM-160
directory.
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Select JPG Folder . . . . . . . . . . . . . Allows for selection of a default save location
for all Screen Image files.
Exit. . . . . . . . . . . . . . . . . . . . . . . . . . Exits the program.
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4.4.1.2 Edit Menu

Films . . . . . . . . . . . . . . . . . . . . . . . . Opens the Films window for editing of Film
parameters (see section 4.6 on page 4-11).
System. . . . . . . . . . . . . . . . . . . . . . . Opens the System Parameters window for
editing of System parameters (see section
4.7 on page 4-15).
Communications . . . . . . . . . . . . . . Opens the SQM-160 Comm Setup menu for
editing of remote communications settings
(see section 4.8 on page 4-17).
Graph Settings . . . . . . . . . . . . . . . . Opens the Configure Graph(s) window for
editing of graph settings (see section 4.9 on
page 4-21).
4.4.1.3 View Menu

The View menu selects which graph is viewed and also what information is
displayed on right side of the Main window. A check mark indicates the currently
selected information. Graph selection can also be done by clicking on the tabs at
the top of each graph (see section 4.4.2).
Average Rate Graph . . . . . . . . . . . . Displays a graph of the average rate of all
active sensors.
Sensor Rates Graph . . . . . . . . . . . . Displays a graph of the individual rate of
each active sensor.
Average Thickness Graph . . . . . . . Displays a graph of the average thickness of
all active sensors.
Sensor Thickness Graph . . . . . . . . Displays a graph of the individual thickness
of each active sensor.
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Sensor Rates Display. . . . . . . . . . . Displays individual sensor rates in Å/s on the

right side of the Main window.
Sensor Thickness Display . . . . . . . Displays individual sensor thicknesses in kÅ
on the right side of the Main window.
Sensor Frequency Display . . . . . . Displays individual sensor frequencies in Hz
on the right side of the Main window.
4.4.1.4 Help Menu

About . . . . . . . . . . . . . . . . . . . . . . . . Displays the SQM-160 About window (see
Help . . . . . . . . . . . . . . . . . . . . . . . . . Function not available.
4-7
4.4.2 Main Window Control Functions
Film . . . . . . . . . . . . . . . . . . . . . . . . . This drop-down list selects the film on

SQM-160 that will be used for rate/thickness
measurements.
Start/Stop . . . . . . . . . . . . . . . . . . . . Starts or stops SQM-160 data acquisition.
Graphing and display of readings from
SQM-160 starts/stops immediately when this
control is toggled. When data logging is
configured (see section 4.5), logging begins
when Start is clicked.
Open/Close Shutter . . . . . . . . . . . . Toggles the SQM-160 shutter relay. Opening
the shutter automatically starts SQM-160
data acquisition. However, closing the
shutter does not automatically stop data
acquisition.
Zero . . . . . . . . . . . . . . . . . . . . . . . . . Zeros the thickness reading on SQM-160.
The following Main window features display readings from SQM-160:

Graph & Sensor Data Tabs . . . . . . Displays readings from SQM-160. Use the
tabs to select the desired type of information
to display.
Avg Rate . . . . . . . . . . . . . . . . . . . . . Displays a graph of the average rate of all
active sensors.
Sensor Rate . . . . . . . . . . . . . . . . . . Displays a graph of the individual rate of
each active sensor.
Avg Thickness . . . . . . . . . . . . . . . . Displays a graph of the average thickness of
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all active sensors.
Sensor Thickness . . . . . . . . . . . . . Displays a graph of the individual thickness
of each active sensor.
Sensor Data . . . . . . . . . . . . . . . . . . Displays average and individual sensor rate,
thickness, and frequency in a table format.
Elapsed Time . . . . . . . . . . . . . . . . . Displays the elapsed time since Start was
clicked.
Time Remaining . . . . . . . . . . . . . . . Displays the calculated deposition time
remaining based on the current thickness,
current rate, and final thickness setpoint.
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Final Thickness . . . . . . . . . . . . . . . The desired deposition thickness for the

selected film. Final thickness can be edited
in the Film window (see section 4.6 on page
4-11).
Average Thickness. . . . . . . . . . . . . The current film thickness, based on the
average of all sensors assigned to the
selected film.
Average Rate. . . . . . . . . . . . . . . . . . The current deposition rate, based on the
average of all sensors assigned to the
selected film.
Rate 1 to 6 . . . . . . . . . . . . . . . . . . . . The individual sensor rate readings.
NOTE: Rate 1 to 6 can be replaced with
Thickness 1 to 6 or Frequency 1 to 6
using the View menu (refer to
section 4.4.1.3 on page 4-7).
4.5 Data Log Window

SQM-160 Comm software has the ability to log data to a .txt file at user-specified
time intervals. Click File >> Data Log on the Main window to display the Data Log
window. The Data Log window configures the SQM-160 Comm software data
logging function (see Figure 4-3).
NOTE: Once configured, data logging will not begin until Start is clicked.
Figure 4-3 Data Log window
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4-9
Data is saved in tab delimited .txt file format for easy viewing or importing
into a spreadsheet (see Table 4-1).
Table 4-1 Data in tab delimited .txt file format
Start: Date: 9/10/2013 Time: 14:04:41 Film: ALUM
Time AvgThk AvgRate Thk1 Rate1 ......
0.00 0.000 1.10 0.000 1.10
0.50 0.000 1.11 0.000 1.11
1.00 0.001 1.10 0.001 1.10
1.50 0.001 1.10 0.001 1.10
2.00 0.002 1.10 0.002 1.10
.....
End: Date: 9/10/2013 Time: 14:04:44 Film: ALUM
4.5.1 Log File Pane

Select the type of log file, filename and location for the data log, or view the
currently saved data log.
None . . . . . . . . . . . . . . . . . . . . . . . . Data logging is disabled.
Overwrite. . . . . . . . . . . . . . . . . . . . . The log file will be overwritten each time data
logging is started with Start or Open Shutter
on the Main window.
Append . . . . . . . . . . . . . . . . . . . . . . Data is added to the end of the log file each
time data logging is started with Start or Open
Shutter.
By Run # . . . . . . . . . . . . . . . . . . . . . A new log file is created each time logging is
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started. The run number is added to the end
of each filename.
New . . . . . . . . . . . . . . . . . . . . . . . . . Displays a file open dialog box to allow
selection or creation of a new log file and/or
path.
View . . . . . . . . . . . . . . . . . . . . . . . . . Displays the current log file using the default
Windows text file viewer.
4 - 10
4.5.2 Duration Pane

Select the duration of the data log.
Unlimited . . . . . . . . . . . . . . . . . . . . Allows the data log to continue as indefinitely.
Range . . . . . . . . . . . . . . . . . . . . . . . The log will start and end according to the
Time Range settings (see section 4.5.3).
4.5.3 Time Range Pane

Set the start and end time for the data log.
NOTE: Settings in the Time Range pane are only available if Range is selected in
the Duration pane.
Start Time . . . . . . . . . . . . . . . . . . . . The elapsed time when data logging begins.
Set the value in hours, minutes, and
seconds.
End Time . . . . . . . . . . . . . . . . . . . . . The elapsed time when data logging ends.
Set the value in hours, minutes, and
seconds.
4.5.4 Sampling Interval Pane

The Sampling Interval is the elapsed time between data log entries in minutes and
seconds. An interval value of zero causes data to be logged as quickly as possible.
This time will vary depending on system configuration.
4.6 Films Window

Click Edit >> Films on the Main window to display the Films window. This window
allows films to be created, edited, and saved to a file or transferred to/from
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SQM-160. The films are stored in an SQM-160 configuration file in an Extensible

Markup Language (XML) format, Monitor.xml, in the SQM-160 Comm software
program directory by default.
The name of the .xml file being used to store films is displayed at the top of the
Films menu. Films uploaded from SQM-160 are stored automatically in a file
named UploadData.xml.
4 - 11
Figure 4-4 Films window
Data Base . . . . . . . . . . . . . . . . . . . . Click to create a new configuration file, save

the current setting to a new or existing
configuration file, or open an existing
configuration file.
Films List . . . . . . . . . . . . . . . . . . . . Lists the films (1 to 99) available for editing
and download. Click Upload Al <- to update
the Films List with films currently stored in
SQM-160.
Close . . . . . . . . . . . . . . . . . . . . . . . . Exits the Films window and saves changes to
the current .xml file.
Upload Al <- . . . . . . . . . . . . . . . . . . Reads films stored in SQM-160 to the Films
List and automatically saves the read films to
the file UploadData.xml.
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DnLoad All -> . . . . . . . . . . . . . . . . . Saves all films to SQM-160.
NOTE: Clicking DnLoad All -> will overwrite
any films stored in SQM-160.
Download -> . . . . . . . . . . . . . . . . . . Saves the film parameters currently
displayed to SQM-160.
NOTE: Clicking Download -> will overwrite
any films stored in SQM-160.
Defaults . . . . . . . . . . . . . . . . . . . . . . Resets film and system parameters to default
values.
Add Material . . . . . . . . . . . . . . . . . . Enter a new material into the Materials list.
4 - 12
The following editable film parameters pertain to the selected film in the Films List.
Film Name . . . . . . . . . . . . . . . . . . . . The name that is displayed in the Films List
and in the SQM-160 Film menu. Names are
limited to eight alphanumeric characters. No
special characters are allowed.
NOTE: While SQM-160 does not allow
spaces or lowercase characters in
film names (see section 5.4.2 on
page 5-13), it is acceptable to enter
spaces and lowercase characters
using SQM-160 Comm software.
SQM-160 Comm software will
convert characters to the correct
format when downloading to
SQM-160.
Final Thickness . . . . . . . . . . . . . . . The desired film thickness setpoint. When
the Final Thickness is reached, the SQM-160
shutter relay deactivates (closes the source
shutter) and Final Thk indicator illuminates
on the SQM-160 front panel. Values from 0 to
9999 kÅ are valid.
Thick Setpoint. . . . . . . . . . . . . . . . . A thickness setpoint that closes the
Thickness Setpoint relay and illuminates the
Thk SP indicator on the SQM-160 front
panel. This does not affect the source
shutter. Values from 0 to 9999 kÅ are valid.
Time Setpoint . . . . . . . . . . . . . . . . . Elapsed time that closes the Time Setpoint
relay and illuminates the Time SP indicator
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on the SQM-160 front panel. Values from

00:00 to 99:59 mm:ss are valid.
Tooling. . . . . . . . . . . . . . . . . . . . . . . Film Tooling Factor. Correction for
differences in material deposited on the
substrate and material deposited on the
sensor(s). Film Tooling Factor applies to all
sensors used for the selected film. Values
from 10 to 399 are valid.
NOTE: The System Parameters window
(see section 4.7 on page 4-15)
contains tooling corrections for
individual sensors. Consult Chapter
7, Calibration Procedures for more
details on setting tooling factors.
4 - 13
Material . . . . . . . . . . . . . . . . . . . . . . List of available materials. Materials named

UnitMat# are unknown materials uploaded
from SQM-160. Selecting a material in this
list updates Density and Z factor parameters
with stored values for that material.
Density . . . . . . . . . . . . . . . . . . . . . . Density of the selected material. Values from
0.5 to 99.99 g/cm3 are valid.
Z Factor (Z-Ratio) . . . . . . . . . . . . . . Z-Ratio of the selected material. Values of
0.10 to 10.00 are valid.
NOTE: Density and Z-Ratio is listed for
many common materials in the
Material Table on page A-1. See
section 7.4 on page 7-3 for
information on determining the
Z-Ratio experimentally for unknown
materials.
Sensors . . . . . . . . . . . . . . . . . . . . . . Selects the sensors that are used in
calculating rate/thickness for this film. If more
than one sensor is selected, the average
reading of the selected sensors is used to
determine rate and thickness.
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4 - 14
4.7 System Parameters Window

Click Edit >> System on the Main window to display the System Parameters
window. This window allows system parameters to be sent to or read from a
connected SQM-160. These parameters appear in the SQM-160 System menu
(refer to section 3.5 on page 3-6). System parameters are not saved in the .xml
configuration file (refer to section 4.6 on page 4-11).
Figure 4-5 System Parameters menu
Read. . . . . . . . . . . . . . . . . . . . . . . . . Reads the System Parameters from

SQM-160.
Send. . . . . . . . . . . . . . . . . . . . . . . . . Sends the current System Parameters to
SQM-160.
Close . . . . . . . . . . . . . . . . . . . . . . . . Exits the System Parameters window.
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NOTE: Changes will not be saved unless

Send is clicked before Close.
Selections:
Simulate Mode . . . . . . . . . . . . . . . . Select to enable Simulate Mode. In Simulate
Mode, SQM-160 simulates sensor inputs and
deposition rates (for test purposes only).
Etch Mode . . . . . . . . . . . . . . . . . . . . Select to enable Etch Mode. Sets the rate
and thickness to negative values for etching
applications.
4 - 15
High Rate Res. . . . . . . . . . . . . . . . . Select to enable high rate resolution display

(0.01 Å/s). Clear to use low rate resolution
display (0.1 Å/s).
NOTE: Using High Rate Resolution does not
increase the internal precision of
SQM-160. This option only affects
the number of displayed digits.
Display Thickness . . . . . . . . . . . . . When selected, DSP on the SQM-160
System menu is set to THCK. If DSP is set to
NANM, FREQ, or MASS, Display
Thickness is cleared.
NOTE: This parameter cannot be cleared
from SQM-160 Comm software. It
can only be read from SQM-160,
selected if cleared, and written to
SQM-160.
Filter . . . . . . . . . . . . . . . . . . . . . . . . The number of readings averaged for the
rate display. Values of 1 to 20 are valid. A
value of 1 indicates no averaging.
NOTE: The number of readings averaged
per second is dependent on the
Timebase setting.
Timebase. . . . . . . . . . . . . . . . . . . . . The time for a single measurement.
Values of 0.10 to 2.0 seconds are valid.
Min. Frequency. . . . . . . . . . . . . . . . The minimum expected crystal frequency,
typically 5 MHz for a 6 MHz crystal.
Frequency readings below the minimum
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generate a crystal fail error. Values of 1.0 to
6.0 MHz are valid.
Max. Frequency . . . . . . . . . . . . . . . The maximum expected crystal frequency,
typically 6 MHz for a 6 MHz crystal.
Frequency readings above the maximum
generate a crystal fail error. Values of 4.0 to
6.5 MHz are valid.
X Tooling . . . . . . . . . . . . . . . . . . . . . Tooling value assigned to each sensor.
Applies to all films. Values of 10 to 399 are
valid.
Analog Out . . . . . . . . . . . . . . . . . . . Sets the full and zero output values for rate
and thickness analog outputs. Min (Zero
output) is the value for 0 V (dc) and Max (full
scale output) is the value for +5 V (dc).
4 - 16
Min Thickness. . . . . . . . . . . . . . . . . Thickness for zero output (0 V (dc)). Values

of 0.000 to 9999 kÅ are valid.
Max Thickness . . . . . . . . . . . . . . . . Thickness for full scale output (+5 V (dc)).
Values of 0.000 to 9999 kÅ are valid.
Min. Rate . . . . . . . . . . . . . . . . . . . . . Rate for zero output (0 V (dc)). Values of 0.0
to 999.0 Å/s are valid.
Max. Rate. . . . . . . . . . . . . . . . . . . . . Rate for full scale output (+5 V (dc)). Values
of 0.0 to 999.0 Å/s are valid.
4.8 Communications Setup Window

Click Edit >> Communications on the Main window to display the SQM-160
Comm Setup window. The Comm Setup window allows for setup and
troubleshooting of the SQM-160 remote communications connection.
Figure 4-6 Comm Setup window
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Comm Port . . . . . . . . . . . . . . . . . . . Select method of communication: RS-232,

USB, or Ethernet.
RS-232 . . . . . . . . . . . . . . . . . . . . . . . Select communications port connected to
SQM-160 and baud rate. Baud rate must
equal the BAUDRATE setting in the
SQM-160 System menu (refer to section 3.5
on page 3-6).
USB . . . . . . . . . . . . . . . . . . . . . . . . . Select the connected SQM-160 (for
example, 91102).
4 - 17
Ethernet. . . . . . . . . . . . . . . . . . . . . . Enter the Port number and Address for

network communications (for example, Port
2101, Address 192.168.1.200).
Close . . . . . . . . . . . . . . . . . . . . . . . . Exits SQM-160 Comm Setup window and
saves communications settings.
Find . . . . . . . . . . . . . . . . . . . . . . . . . Click to establish communications with
SQM-160 using the selected
communications method.
Command . . . . . . . . . . . . . . . . . . . . Enter a remote command and click Send to
send to SQM-160 (see Chapter 5 for more
information on remote commands).
Response . . . . . . . . . . . . . . . . . . . . Displays the response to the command in the
Command field after Send is clicked.
Send . . . . . . . . . . . . . . . . . . . . . . . . Click to send communication command
entered in the Command field. The response
(or error) is displayed in the Response field.
4.8.1 Establishing Communications

To connect SQM-160 to a computer, a 9-pin male to 9-pin female straight-through
RS-232 cable, USB cable, or Ethernet cable is required. An RS-232 cable is
supplied with each SQM-160.
To establish communications using RS-232:
 Verify SQM-160 is turned on and connected to the computer
with a straight-through cable.
 Select RS-232 in the Comm Port pane of the SQM-160 Comm Setup
window.
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 Select the port number to match the computer port to which the
RS-232 cable is attached.
 Select the Baud rate of the software equal to the BAUDRATE setting in
the SQM-160 System menu.
 Click Find to test the connection. If communication is established
successfully, Found SQM-160 Ver. x.xx is displayed at the bottom of the
SQM-160 Comm Setup window.
4 - 18
To establish communications using USB:

with a standard USB cable.
 Select USB in the Comm Port pane of the SQM-160 Comm Setup window.
To establish communications using Ethernet:
with a standard (straight) Ethernet cable.
 Establish the appropriate computer network protocol (see section 5.1.3.1
on page 5-2).
 Select Ethernet in the Comm Port pane of the SQM-160 Comm Setup
window.
 Enter the appropriate Port and IP address for the specific SQM-160 being
connected. The default address is 192.168.1.200 and Port is 2101.
NOTE: More detailed information about the various communications protocols can
be found in section 5.1 on page 5-1.
PN 074-511-P1D
4 - 19
4.8.2 Command Field

In the SQM-160 Comm Setup window, the Command field provides a
command/response interface for testing SQM-160 remote commands (see Figure
4-7).
The remote communications protocol and commands are detailed in section 5.3,
SQM-160 Communications Protocol, on page 5-9.
Figure 4-7 Command and response example
To use the Command field, insert only the Message (see section 5.3.1 on page
5-9). This does not include the Sync, Length, or CRC characters. In the example in
Figure 4-7, the @ command is used, so only the ASCII @ is entered in the
Command field. SQM-160 Comm software automatically calculates and sends the
Sync, Length, and CRC characters.
PN 074-511-P1D
The Response field displays the communications response message from
SQM-160 after sending a command using the Command field. The Response
message in ASCII does not include Sync, Length, Message Status, or CRC
characters.
4 - 20
4.9 Configure Graph(s) Window

Click Edit >> Graph Settings on the Main window to display the Configure
Graph(s) window. This provides access to graph axis and grid settings.
Figure 4-8 Configure Graph(s) window
OK . . . . . . . . . . . . . . . . . . . . . . . . . . Click to save changes and exit the Configure

Graph(s) window.
Cancel . . . . . . . . . . . . . . . . . . . . . . . Click to cancel changes and exit the
Configure Graph(s) window.
Apply . . . . . . . . . . . . . . . . . . . . . . . . Click to apply changes without exiting the
Configure Graph(s) window.
The Configure Graph(s) window includes a settings tab for each graph type (Avg
Rate, Sensor Rate, Avg Thickness, and Sensor Thickness) and a tab for settings
common to all graphs.
PN 074-511-P1D
The following are available in the Common tab.

X Axis Width . . . . . . . . . . . . . . . . . . Sets the total displayed width of the graph,
in minutes and seconds. Values from 1:00 to
120:59 mm:ss are valid.
X Text Interval . . . . . . . . . . . . . . . . . Sets the amount of time between X axis
labels. Values from 0 to 480 seconds are
valid.
X Axis Scrolling . . . . . . . . . . . . . . . Sets how much blank area is introduced
immediately when the graph scrolls (25, 50,
75, or 100%).
Line Colors . . . . . . . . . . . . . . . . . . . Sets the color for each line that appears on
the graph.
4 - 21
The following are available on the Avg Rate, Sensor Rate, Avg Thickness,
and Sensor Thickness tabs.
Y Axis Range
Y Axis Min . . . . . . . . . . . . . . . . . . . . Sets the minimum value displayed on the Y
axis of the graph, in Å/s or kÅ (for Rate or
Thickness). Values from -10.00 to 100.00 are
valid for Rate graphs and values from
-100.00 to 100.00 are valid for Thickness
graphs.
Y Axis Max . . . . . . . . . . . . . . . . . . . Sets the maximum value displayed on the Y
axis of the graph, in Å/s or kÅ (for Rate or
Thickness). Values from 0.00 to 100.00 are
valid.
Axis Ticks
X Step . . . . . . . . . . . . . . . . . . . . . . . Sets the interval between X axis tick marks,
in seconds. Values from 0 to 100 are valid.
Y Step . . . . . . . . . . . . . . . . . . . . . . . Sets the interval between Y axis tick marks,
in Å/s or kÅ (for Rate or Thickness). Values
from 0.00 to 100.00 are valid.
Visible . . . . . . . . . . . . . . . . . . . . . . . Select, to make tick marks visible. Clear, to
make remove tick marks from the graph.
Graph Grid
X Spacing . . . . . . . . . . . . . . . . . . . . Sets the interval between X axis grid lines,
in seconds. Values from 0 to 100 are valid.
Y Spacing . . . . . . . . . . . . . . . . . . . . Sets the interval between Y axis grid lines,
in Å/s or kÅ (for Rate or Thickness). Values
from 0.00 to 100.00 are valid.
PN 074-511-P1D
Visible . . . . . . . . . . . . . . . . . . . . . . . Select to make grid lines visible.
Clear to remove grid lines from the graph.
Solid Line Y = 0. . . . . . . . . . . . . . . . Select to display a solid line where Y = 0.
Clear to display a dashed line where Y = 0.
Graph Title . . . . . . . . . . . . . . . . . . . Enter the title of the graph to be displayed on
the Main screen.
4 - 22
4.10 Help Menu

Click Help >> About on the Main window to display the About window, which
provides program revision installation information (see Figure 4-9).
Figure 4-9 About window
NOTE: Help >> Help does not have an assigned function.

PN 074-511-P1D
4 - 23
PN 074-511-P1D
4 - 24
Chapter 5
Communications
5.1 Introduction
SQM-160 offers the following types of data communications hardware ports.
 Bit serial RS-232 port (standard)
 Ethernet port (optional)
 USB port (optional)
Both the host and server must have the same form of communications equipment
and complementary setup. For serial communications, the baud rates and data
word format must match.
The word format for bit serial lines (RS-232) is comprised of ten signal bits:
eight data bits, one start bit, one stop bit, and no parity. The eight data bits contain
a byte of information or character whose ASCII value ranges from 0 to 255.
5.1.1 RS-232 Serial Port

RS-232 serial communications are accomplished through an industry standard
9-pin female connector found on the SQM-160 rear panel (refer to Figure 2-12 on
page 2-11). A mating male connector is required to attach a host interface. The
host and SQM-160 can be separated by up to 15.2 m (50 ft.) using multiconductor
shielded data cable.
For successful communications, the baud rate of the host and SQM-160 must
match. Available baud rate options are: 2,400, 4,800, 9,600, 19,200, 38,400,
PN 074-511-P1D
57,600, and 115,200 bps.

SQM-160 is configured as DCE (Data Communication Equipment).
NOTE: Unpredictable RS-232 hardware/software combinations may occasionally
cause a command to not be recognized by SQM-160. Consequently, all
communications should include an automatic retry procedure. If a
command sent via RS-232 does not produce a response from SQM-160
within three seconds, it should be sent again.
5-1
5.1.2 USB Port

USB drivers are installed automatically with installation of the SQM-160 Comm
software. Once the drivers are installed, Windows will find and install SQM-160
automatically when connected to a USB port.
NOTE: If SQM-160 is not found, it is possible to manually install the device
from the 074-5000-G1 INFICON Thin Film Instrument and Sensor
Manuals CD using the USB Installer v1.8.0 Setup file.
In the event an unsigned driver window displays during installation, click Continue
anyway. Successful communication can be confirmed using the SQM-160 Comm
software (refer to section 4.8, Communications Setup Window, on page 4-17).
5.1.3 Ethernet Port

For Ethernet communications, SQM-160 uses the static IP address 192.168.1.200.
The optional Ethernet port supports only the Standard Ethernet TCP/IP protocol.
SQM-160 will communicate using TCP/IP on TCP port number 2101.
The interface supports static addressing. DHCP is not supported. Ethernet
parameters allow the IP address and the net mask to be set. A standard Ethernet
cable is required to connect SQM-160 through a network or hub connection.
5.1.3.1 How to Set Up the Network Protocol on the Computer

An Internet Protocol (IP) address defines the computer on the Internet. Most
computers are configured to automatically obtain the IP address from a server.
Some computers will auto-configure and work with either straight or crossover
Ethernet cable.
To communicate directly with SQM-160, the IP address must be manually
configured on the computer, and the computer and SQM-160 must be connected
with an Ethernet cable. To manually configure the IP address:
PN 074-511-P1D
Follow section 5.1.3.1.1 for instructions to access network settings in Windows XP.
Follow section 5.1.3.1.2 for instructions to access network settings in Windows 7
and Windows 8.
NOTE: The above instructions will set two values—the IP address and the Subnet
mask—which may prohibit access to the Internet. If these values already
contain information, make a record of the information for use in restoring
the Internet connection.
NOTE: If the computer only has one Ethernet port (one network connection),
setting the computer for direct communications will prohibit it from
accessing the Internet until the setting is reversed.
5-2
SQM-160 ships with a pre-assigned address of 192.168.1.200. To communicate

directly with SQM-160 from a computer, the computer must also be assigned a
192.168.1.xxx address, but cannot be set to 192.168.1.200. The examples in
section 5.1.3.1.1 and section 5.1.3.1.2 use the address 192.168.1.201 for the
computer. The Subnet mask 255.255.0.0 is sufficient.
5.1.3.1.1 Accessing Network Settings in Windows XP

1 Select Network Connections from either the Windows Start menu or from
the Control Panel (see Figure 5-1).
Figure 5-1 Accessing Network Connections
2 Select the Local Area Connection to be changed, right-click, and select

Properties (see Figure 5-2).
Figure 5-2 Local Area Connection Properties
PN 074-511-P1D
5-3
3 On the General tab, select Internet Protocol (TCP/IP) and click the
Properties button (see Figure 5-3).
Figure 5-3 Internet Protocol (TCP/IP) Properties
PN 074-511-P1D
5-4
4 Select Use the following IP address, enter the IP address and Subnet mask
(see Figure 5-4) and click OK. With this selection, the computer is assigned an
IP address for communicating with SQM-160.
Figure 5-4 Entering the IP Address and Subnet mask
5 Click OK in all open dialog boxes to close out the Internet Protocol setup for the
Local Area Connection. Open the SQM-160 software and confirm
communications (refer to section 4.8 on page 4-17).
PN 074-511-P1D
5-5
5.1.3.1.2 Accessing Network Settings in Windows 7 and Windows 8

1 Open the Control Panel (Start >> Control Panel) and Select Network and
Sharing Center.
2 Click Change adapter settings on the left side panel (see Figure 5-5). This will
open the Network Connections window.
Figure 5-5 Network and Sharing Center
3 In the Network Connections window, right-click on the appropriate Local

Area Connection and click Properties (see Figure 5-6).
Figure 5-6 Network Connections window
PN 074-511-P1D
5-6
4 In the Local Area Connection Properties, select Internet Protocol Version

4 (TCP/IPv4) and click Properties (see Figure 5-7).
Figure 5-7 Local Area Connection Properties
PN 074-511-P1D
5-7
5 Select Use the following IP address, then enter the IP address and Subnet
mask (see Figure 5-8) and click OK. With this selection, the computer is
assigned an IP address to use when communicating with SQM-160.
Figure 5-8 Entering the IP Address and Subnet mask
6 Click OK in all open dialog boxes to exit the Internet Protocol setup for the Local
Area Connection. Open the SQM-160 Comm software and confirm
communications (see section 4.8 on page 4-17).
5.1.3.2 How to change the SQM-160 IP address
PN 074-511-P1D
The IP address can be changed using the Dgdiscvr program installed in the
SQM-160 directory (typically C:/Program Files/INFICON/SQM-160 Comm) during
SQM-160 Comm software installation.
To change the IP address:
1 Run dgdiscvr.exe and find SQM-160.
2 Double-click on SQM-160.
3 Enter User Name: root and Password: dbps.
4 Click Login.
5 Click Configuration, Network, and Set.
6 Change IP=192.168.1.200 to the new IP address.
7 Click Apply, then Log Out. The new IP address is now configured.
5-8
5.2 SQM-160 Comm Software

SQM-160 Comm software is on the Thin Film Instrument and Sensor Manuals CD
(PN 074-5000-G1) that ships with SQM-160. This program provides real-time
instrument control and process data logging. Data can be graphed and saved in a
spreadsheet format.
For more information and installation instructions on SQM-160 Comm software,
refer to Chapter 4.
5.3 SQM-160 Communications Protocol

SQM-160 communicates with a host computer using an ASCII based protocol.
SQM-160 defaults to 19,200 baud, 8 data bits, and no parity. The baud rate can be
changed in the SQM-160 System menu, but is always 8 data bits with no parity.
5.3.1 Command Packet (Host to SQM-160 Message)

<Sync character> <Length character> <Message> <CRC1><CRC2>
Sync. . . . . . . . . . . . . . . . . . . . . . . . . The Sync character is an exclamation
point (!). When this character is received, the
communications for that packet is reset. The
Sync character is not included in the CRC
calculation.
NOTE: The Sync character (!) is reserved for
the Sync usage, and cannot be used
(sent) in any of the following
message characters. It always
marks the start of a new packet.
Length . . . . . . . . . . . . . . . . . . . . . . . This is based on the decimal number of
PN 074-511-P1D
characters in the packet (excluding the Sync,

Length, and CRC characters). This character
has a decimal 34 added to it so there cannot
be a Sync character (!) embedded in the
packet.
NOTE: The maximum value for length
should not exceed 190 (or 224
including the added 34).
Message . . . . . . . . . . . . . . . . . . . . . Command (see section 5.4).
CRC . . . . . . . . . . . . . . . . . . . . . . . . . .Cyclic Redundancy Check (CRC) is a method
to verify there are no errors in the packet.
See section 5.3.3 on page 5-11 for detailed
instructions to calculate the CRC and section
5.5 on page 5-22 for code examples.
5-9
5.3.2 Response Packet (SQM-160 to Host Message)

<Sync character><Length character><Response Status character><Response
Message><CRC1><CRC2>
Sync. . . . . . . . . . . . . . . . . . . . . . . . . The Sync character is an exclamation
point (!). Anytime this character is received,
the communications for that packet is reset.
The Sync character is not included in the
CRC calculation.
Length . . . . . . . . . . . . . . . . . . . . . . . This is based on the decimal number of
characters in the packet (excluding the Sync,
Length, and CRC characters). The response
Length character has a decimal 35 added to
the decimal count value instead of 34 like the
Length character of the command packet.
Response Status . . . . . . . . . . . . . . This character indicates the status of the
Command Packet message (see Table 5-1).
Response Message . . . . . . . . . . . . Command Response as received using
the protocol described in section 5.3 on page
5-9.
CRC . . . . . . . . . . . . . . . . . . . . . . . . . Cyclic Redundancy Check (CRC) is a
method to verify there are no errors in the
packet. See section 5.3.3 for detailed
instructions to calculate the CRC and section
5.5 on page 5-22 for code examples.
Table 5-1 Response Status
Response Status Meaning
PN 074-511-P1D
A Command understood, normal response
C Invalid command
D Problem with data in command
5 - 10
5.3.3 Calculating the CRC

The following algorithm is used to compute the Cyclic Redundancy Check (CRC):
NOTE: The Sync character and CRC are not included in the CRC calculation. All
other characters should be included.
1 The CRC register (16 bits) is initialized to hexadecimal 3FFF.
2 Each 8 bit character in the packet is examined and added to the CRC in the
following manner (excluding the Sync character):
2a The character byte is exclusive OR’d (XOR) with the least significant byte
of the CRC register with the result replaced in the CRC register least
significant byte. The most significant byte remains unchanged (one time per
character byte).
2b Perform the following loop eight times:
2bi Preserve state of least significant bit (LSB) of the CRC register,
named Cy.
2bii The CRC register is shifted one bit position to the right with a zero
shifted into the most significant bit (MSB).
2biii If bit position 0 has a value of 1 before each shift (Cy=1), the CRC
is exclusive OR’d with hexadecimal 2001 with the result replaced in
the CRC register.
3 Mask the contents of the CRC register by logical AND with 3FFF hexadecimal
and save the result into the CRC register.
4 The CRC register contains 14 significant bits. This is split into two pieces of 7
bits each to send at the end of the packet as CRC1 and CRC2. A decimal 34
(hexadecimal 22) is added to each CRC piece in order to avoid there being an
embedded sync character.
PN 074-511-P1D
4a Extract by masking with hexadecimal 7F the LSB 6 to 0 of the CRC register

and add a decimal 34 (hexadecimal 22). This is CRC1.
4b Extract bits 13 to 7 of the CRC register, shift right seven times, and add a
decimal 34 (hexadecimal 22). This is CRC2.
CRC code examples can be found in section 5.5, CRC Examples, on page 5-22.
NOTE: CRC1 and CRC2 in the sent/received examples are decimal values 34 to
161 (see section 5.4).
5 - 11
5.4 Commands
SQM-160 uses several command types.
Query. . . . . . . . . . . . . . . . . . . . . . . . Returns the requested information about
parameter settings from SQM-160.
Update . . . . . . . . . . . . . . . . . . . . . . . Updates parameters in SQM-160.
Remote . . . . . . . . . . . . . . . . . . . . . . Performs an action.
Status . . . . . . . . . . . . . . . . . . . . . . . Reads system status information.
Several commands can act as more than one command type, depending on how
they are sent. For example, the A command can be used to query or update Film
parameters.
Table 5-2 SQM-160 commands
Command Command Type Parameters Set/Returned or Function
@ Query SQM-160 Version
A Query/Update Film Parameters
B Query/Update System 1 Parameters
C Query/Update System 2 Parameters
D Update Set Active Film
J Query Number of Installed Sensor Channels
L Status Current Sensor Rate
M Status Current Average Rate
N Status Current Sensor Thickness
O Status Current Average Thickness
PN 074-511-P1D
P Status Current Sensor Frequency
R Status Crystal Life
S Remote Zero Average Thickness and Rate
T Remote Zero Time
U Remote/Status Toggle Source Shutter Open/Close

Query Source Shutter State
W Status Rate, Thickness, Frequency
Y Status Power-Up Reset Flag State
Z Update Default All Parameters
NOTE: In the command details below, an underscore (_) indicates a space in the
sent message.
5 - 12
5.4.1 Command: @
Command Type . . . . . . . . . . . . . . . . Query
Description . . . . . . . . . . . . . . . . . . . . Returns the firmware version number.
Command Structure . . . . . . . . . . . . . @
Parameters . . . . . . . . . . . . . . . . . . . . None
Example:
Sent . . . . . . . . . . . . . . . . . . . . . . !#@(79)(55)
Received. . . . . . . . . . . . . . . . . . . !0AMON_Ver_4.13(85)(119)
5.4.2 Command: A
Command Type . . . . . . . . . . . . . . . . Query/Update
Description . . . . . . . . . . . . . . . . . . . . Query or update Film parameters. Available
parameters include Film Name, Density, Film
Tooling, Z-Ratio, Final Thickness, Thickness
Setpoint, Time Setpoint, and Sensor
Average.
Command Structure
Query . . . . . . . . . . . . . . . . . . . . . A<Film number>?
Update . . . . . . . . . . . . . . . . . . . . A<Film number><Film name>_
<Density>_<Film Tooling>_<Z-factor>_
<Final Thickness>_<Thickness Setpoint>_
<Time Setpoint>_<Sensor Average>
Parameters
Film number . . . . . . . . . . . . . . . . 1 to 99, 0 queries or updates current film
PN 074-511-P1D
Encoded as an ASCII character (decimal 49

to 147).
Film name. . . . . . . . . . . . . . . . . . 8-character film name. Must be all uppercase
alphabetic or numeric 0 to 9. No special
characters except underscore (_) can be
used to embed spaces. The first space
delimits the name field, if less than eight
characters.
Density . . . . . . . . . . . . . . . . . . . . 0.50 to 99.99 (g/cm3)
Film Tooling . . . . . . . . . . . . . . . . 10 to 399 (%)
Z-Ratio . . . . . . . . . . . . . . . . . . . . 0.10 to 9.999
Final Thickness. . . . . . . . . . . . . . 0.000 to 9999.000 (kÅ)
5 - 13
Thickness Setpoint . . . . . . . . . . . 0.000 to 9999 (kÅ)

Time Setpoint . . . . . . . . . . . . . . . 0:00 to 99:59 (mm:ss)
Sent/received in integer seconds (0 to 5999).
Sensor Average . . . . . . . . . . . . . The decimal equivalent of a binary number
indicating which sensors are active for the
Film. Each set bit indicates an active sensor.
See Table 5-3 for Bit/Sensor correlations.
Example: Decimal 12 = 00 1100 binary
indicating sensors 3 and 4 are set for the
Film.
Table 5-3 Sensor average bit assignments
Value Bit Sensor

number
1 0 1
2 1 2
4 2 3
8 3 4
16 4 5
32 5 6
Example (query)
Sent . . . . . . . . . . . . . . . . . . . . . . !%A1?(46)(149)
Received . . . . . . . . . . . . . . . . . . !0AFILM 1____1.00_100__1.000_33.380__
0.000_0_1(79)(59)
PN 074-511-P1D
Example (update)
Sent . . . . . . . . . . . . . . . . . . . . . . !KA1GOLD_____1.23_150_1.23_1.234_
1.234_0_12(140)(40)
Received . . . . . . . . . . . . . . . . . . !$A(53)(151)
NOTE: Film name should not contain more
than two consecutive spaces within
the eight character limit.
5 - 14
5.4.3 Command: B
Description . . . . . . . . . . . . . . . . . . . . Query or update System 1 parameters.
Available parameters include Time Base,
Simulate Mode, Display Mode, Rate
Resolution, Rate Filter, and Crystal Tooling
for each sensor.
Command Structure
Query . . . . . . . . . . . . . . . . . . . . . B?
Update . . . . . . . . . . . . . . . . . . . . B_<Time Base>_<Simulate Mode>_
<Frequency Mode>_<Rate
Resolution>_<Rate Filter>_ <Crystal
Tooling1>_ <Crystal Tooling2>_ <Crystal
Tooling3>_ <Crystal Tooling4>_ <Crystal
Tooling5>_ <Crystal Tooling6>_
Parameters
Time Base. . . . . . . . . . . . . . . . . . 0.10 to 2.00 (s).
Simulate Mode . . . . . . . . . . . . . . 0 or 1. 0 indicates simulate is OFF. 1
indicates simulate is ON.
Display Mode . . . . . . . . . . . . . . . 0 to 3, indicating the format of the
Rate/Thickness display. See Table 5-4 for
number/display correlations.
.
Table 5-4 Display mode number codes
Display Mode Rate,

Number Thickness Format
0 Å/s, kÅ
PN 074-511-P1D
1 nm/s, µm
2 Frequency only (Hz)
3 ng/cm2/s, µg/cm2
Rate Resolution . . . . . . . . . . . . . 0 or 1. 0 indicates low display resolution

(0.1 Å/s). 1 indicates high display resolution
(0.01 Å/s).
Rate Filter . . . . . . . . . . . . . . . . . . 1 to 20 (readings)
Crystal Tooling . . . . . . . . . . . . . . 10 to 399 (%). Must be set for each sensor
(integer values).
5 - 15
Example (query)
Sent . . . . . . . . . . . . . . . . . . . . . . !$B?(93)(116)
Received . . . . . . . . . . . . . . . . . . !JA_0.10_1_0_0_1_100_100_100_100_100_
100_(119)(50)
Example (update)
Sent . . . . . . . . . . . . . . . . . . . . . . !HB_0.25_1_0_0_8_100_100_100_100_
100_100(80)(68)
Received . . . . . . . . . . . . . . . . . . !$A(53)(151)
5.4.4 Command: C
Description . . . . . . . . . . . . . . . . . . . . Query or update System 2 parameters.
Available parameters include Minimum
Frequency, Maximum Frequency, Minimum
Rate, Maximum Rate, Minimum Thickness,
Maximum Thickness, and Etch Mode.
Command Structure
Query . . . . . . . . . . . . . . . . . . . . . C?
Update . . . . . . . . . . . . . . . . . . . . C_<Min Frequency>_<Max Frequency>_
<Min Rate>_<Max Rate>_<Min Thickness>_
<Max Thickness>_ <Etch Mode>
Parameters
Min Frequency . . . . . . . . . . . . . . 1.000 to 6.400 (MHz)
Max Frequency. . . . . . . . . . . . . . 1.100 to 6.500 (MHz)
Min Rate . . . . . . . . . . . . . . . . . . . -99 to 999 (Å/s)
Max Rate . . . . . . . . . . . . . . . . . . -99 to 999 (Å/s)
PN 074-511-P1D
Min Thickness . . . . . . . . . . . . . . 0.000 to 9999 (kÅ)
Max Thickness . . . . . . . . . . . . . . 0.000 to 9999 (kÅ)
Etch Mode . . . . . . . . . . . . . . . . . 0 or 1. 0 indicates Etch Mode is OFF. 1
indicates Etch Mode is ON.
Example (query)
Sent . . . . . . . . . . . . . . . . . . . . . . !$C?(103)(47)
Received . . . . . . . . . . . . . . . . . . !LA_4.000_6.000_0.000_100.000_0.000_
1.000_0(86)(120)
Example (update)
Sent . . . . . . . . . . . . . . . . . . . . . . !IC_5.000_6.000_0.000_10.00_0.000_
10.00_0(146)(41)
Received . . . . . . . . . . . . . . . . . . !$A(53)(151)
5 - 16
5.4.5 Command: D
Command Type . . . . . . . . . . . . . . . . Update
Description . . . . . . . . . . . . . . . . . . . . Update the active Film.
Command Structure . . . . . . . . . . . . . D<Film number>
Parameters
Film number . . . . . . . . . . . . . . . . 1 to 99
Encoded as an ASCII character (decimal 49
to 147).
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !$D1(93)(145)
Received. . . . . . . . . . . . . . . . . . . !$A(53)(151)
5.4.6 Command: J
Command Type . . . . . . . . . . . . . . . . Query
Description . . . . . . . . . . . . . . . . . . . . Query the number of channels installed.
The number of channels will be either an
ASCII two or six.
Command Structure . . . . . . . . . . . . . J
Parameters . . . . . . . . . . . . . . . . . . . . None
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !#J(79)(56)
Received. . . . . . . . . . . . . . . . . . . !%A6(118)(134)
PN 074-511-P1D
5.4.7 Command: L
Command Type . . . . . . . . . . . . . . . . Status
Description . . . . . . . . . . . . . . . . . . . . Read the current Rate for a sensor.
Command Structure . . . . . . . . . . . . . L<Sensor number>?
Parameters
Sensor Number . . . . . . . . . . . . . 1 to 6
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !%L1?(133)(123)
Received. . . . . . . . . . . . . . . . . . . !*A_0.00_(91)(100)
5 - 17
5.4.8 Command: M
Description . . . . . . . . . . . . . . . . . . . . Read the current Average Rate.
Command Structure . . . . . . . . . . . . . M
Parameters. . . . . . . . . . . . . . . . . . . . None
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !#M(142)(138)
Received . . . . . . . . . . . . . . . . . . !*A_0.00_(91)(100)
5.4.9 Command: N
Description . . . . . . . . . . . . . . . . . . . . Read the current Thickness for a sensor.
Command Structure . . . . . . . . . . . . . N<Sensor number>
Parameters
Sensor Number . . . . . . . . . . . . . 1 to 6
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !$N1(93)(81)
Received . . . . . . . . . . . . . . . . . . !+A_0.000_(74)(111)
5.4.10 Command: O
Description . . . . . . . . . . . . . . . . . . . . Read the current Average Thickness.
PN 074-511-P1D
Command Structure . . . . . . . . . . . . . O
Parameters. . . . . . . . . . . . . . . . . . . . None
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !#O(143)(57)
Received . . . . . . . . . . . . . . . . . . !+A_0.000_(74)(111)
5 - 18
5.4.11 Command: P
Description . . . . . . . . . . . . . . . . . . . . Read the current Frequency for a sensor.
Command Structure . . . . . . . . . . . . . P<Sensor number>
Parameters
Sensor number . . . . . . . . . . . . . . 1 to 6
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !$P1(90)(145)
Received. . . . . . . . . . . . . . . . . . . !/A5500110.056(147)(45)
5.4.12 Command: R
Description . . . . . . . . . . . . . . . . . . . . Read the Crystal Life for a sensor.
Command Structure . . . . . . . . . . . . . R<Sensor number>
Parameters
Sensor number . . . . . . . . . . . . . . 1 to 6
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !$R1(105)(114)
Received. . . . . . . . . . . . . . . . . . . !*A_50.01(134)(76)
5.4.13 Command: S
Command Type . . . . . . . . . . . . . . . . Remote
PN 074-511-P1D
Description . . . . . . . . . . . . . . . . . . . . Zero Average Thickness and Rate. This also

sets all active Sensor Rates and
Thicknesses to zero.
Command Structure . . . . . . . . . . . . . S
Parameters . . . . . . . . . . . . . . . . . . . . None
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !#S(142)(143)
Received. . . . . . . . . . . . . . . . . . . !$A(53)(151)
5 - 19
5.4.14 Command: T
Command Type . . . . . . . . . . . . . . . . Remote
Description . . . . . . . . . . . . . . . . . . . . Zero Time
Command Structure . . . . . . . . . . . . . T
Parameters. . . . . . . . . . . . . . . . . . . . None
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !#T(79)(53)
Received . . . . . . . . . . . . . . . . . . !$A(53)(151)
5.4.15 Command: U
Command Type . . . . . . . . . . . . . . . . Status/Remote
Description . . . . . . . . . . . . . . . . . . . . Open/close the Source Shutter or read the
Source Shutter state.
Command Structure
Query . . . . . . . . . . . . . . . . . . . . . U?
Remote. . . . . . . . . . . . . . . . . . . . U<Shutter Status>
Parameters
Shutter Status. . . . . . . . . . . . . . . 0 or 1. 0 closes the shutter. 1 opens the
shutter.
Example (Status)
Sent . . . . . . . . . . . . . . . . . . . . . . !$U?(91)(84)
Received . . . . . . . . . . . . . . . . . . !%A0(118)(135)
PN 074-511-P1D
Example (Remote Open Shutter)
Sent . . . . . . . . . . . . . . . . . . . . . . !$U1(90)(113)
Received . . . . . . . . . . . . . . . . . . !$A(53)(151)
5.4.16 Command: W
Description . . . . . . . . . . . . . . . . . . . . Read the Rate (Å/s), Thickness (Å), and
Frequency (Hz) for each sensor
simultaneously.
Command Structure . . . . . . . . . . . . . W
Parameters. . . . . . . . . . . . . . . . . . . . None
5 - 20
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !#W(143)(53)
Received. . . . . . . . . . . . . . . . . . . !\xC4A00.00_07.10_3076.190_
5497894.642_07.10_3076.190_
5498079.900_00.00_00.000_5500330.115_
00.00_00.000_5500440.030_00.00_
00.000_5500550.070_00.00_00.000_
5500660.115_(38)(71)
NOTE: Ignore the first 00.00 in the response.
5.4.17 Command: Y
Description . . . . . . . . . . . . . . . . . . . . Read the status of the Power-Up Reset flag.
The Power-Up Reset flag is set while
SQM-160 turns on, and stays set until the
status of the RS-232 interface is read. After
the flag is read, it is reset and will not be set
again until SQM-160 is power cycled.
Command Structure . . . . . . . . . . . . . Y
Parameters . . . . . . . . . . . . . . . . . . . . None. In the response, 0 indicates the
Power-Up Reset flag has been RESET. 1
indicates the Power-Up Reset flag is SET.
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !#Y(142)(144)
Received. . . . . . . . . . . . . . . . . . . !%A1(55)(60)
!%A0(118)(135)
PN 074-511-P1D
5.4.18 Command: Z
Command Type . . . . . . . . . . . . . . . . Update
Description . . . . . . . . . . . . . . . . . . . . Default all film and system parameters.
Command Structure . . . . . . . . . . . . . Z
Parameters . . . . . . . . . . . . . . . . . . . . None
Example
Sent . . . . . . . . . . . . . . . . . . . . . . !#Z(78)(144)
Received. . . . . . . . . . . . . . . . . . . !$A(53)(151)
5 - 21
5.5 CRC Examples

This section includes examples of code for calculating the CRC in Visual Basic,
Java, and C++. Instructions for calculating the CRC are located in section 5.3.3 on
page 5-11.
®
5.5.1 Visual Basic 5/6
Public Sub CalcChkSumByte(ByRef ByData() As Byte, ByRef byCRC() As
Byte)
Dim CRC As Integer

Dim TmpCRC As Integer
Dim LastIndex As Long
Dim i As Integer
Dim j As Integer
LastIndex = UBound(ByData())
' Avoid on length messages

If ByData(1) > 0 Then
' Set 14 bit CRC to all ones
CRC = &H3FFF
For j = 1 To LastIndex - 2
' XOR current character with CRC
CRC = CRC Xor ByData(j)
' Go thru lower 8 bits of CRC
For i = 1 To 8
' Save CRC before shift
TmpCRC = CRC
' Shift right one bit
CRC = Shri(CRC, 1)
PN 074-511-P1D
If (TmpCRC And 1) = 1 Then
' If LSB is 0 (before shift), XOR with hex 2001
CRC = CRC Xor &H2001
End If
Next i
Next j
' Be sure we still have 14 bits
CRC = CRC And &H3FFF
byCRC(0) = (LoByte(CRC) And &H7F) + 34
byCRC(1) = (LoByte(Shri(CRC, 7)) And &H7F) + 34
Else
' Empty message
byCRC(0) = 0
byCRC(1) = 0
End If
End Sub
5 - 22
Public Function LoByte(ByVal intNumber As Integer) As Byte

' Comments : Returns the low byte of the passed integer
' Parameters: intNumber - integer value for which to return the low
byte
' Returns : byte
' Source : Total VB SourceBook 6
'
On Error GoTo PROC_ERR
LoByte = intNumber And &HFF&
PROC_EXIT:
Exit Function
PROC_ERR:
MsgBox "Error: " & Err.Number & ". " & Err.Description, , _
"LoByte"
Resume PROC_EXIT
End Function
Public Function Shri( _

ByVal lngValue As Long, _
ByVal bytPlaces As Byte) _
As Integer
' Comments : Shifts a long Value right the selected number of places
' Parameters: lngValue - integer Value to shift
' bytPlaces - number of places to shift
' Returns : Shifted value
' Source : Total VB SourceBook 6
'
Dim lngDivisor As Long
PN 074-511-P1D
On Error GoTo PROC_ERR
' if we are shifting 16 or more bits, then the result is always

zero
If bytPlaces >= 16 Then
Shri = 0
Else
lngDivisor = 2 ^ bytPlaces
Shri = Int(IntToLong(lngValue) / lngDivisor)
End If
PROC_EXIT:
Exit Function
5 - 23
PROC_ERR:
MsgBox "Error: " & Err.Number & ". " & Err.Description, , _
"Shri"
Resume PROC_EXIT
End Function
®
5.5.2 Java
private short calcCRC(byte[] str) {
short crc = 0;
short tmpCRC;
int length = 1 + str[1] - 34;
if (length > 0) {
crc = (short) 0x3fff;

for (int jx = 1; jx <= length; jx++) {
crc = (short) (crc ^ (short) str[jx]);
for (int ix = 0; ix < 8; ix++) {

tmpCRC = crc;
crc = (short) (crc >> 1);
if ((tmpCRC & 0x1) == 1) {
crc = (short) (crc ^ 0x2001);
}
}
crc = (short) (crc & 0x3fff);
}
}
return crc;
}
PN 074-511-P1D
private byte crcHigh(short crc) {
byte val = (byte) (((crc >> 7) & 0x7f) + 34);
return val;
}
private byte crcLow(short crc) {
byte val = (byte) ((crc & 0x7f) + 34);
return val;
}
5 - 24
5.5.3 C++
class CRC14
{
public:
CRC14(void) { crc = 0x0;};
public:
short crc;
public:
short calcCRC( unsigned char * str)
{
int length = (str != NULL) ? 1 + str[1] - 34 : 0;
if (length > 0) {
crc = (short) 0x3fff;

for (int jx = 1; jx <= length; jx++) {
crc = (short) (crc ^ (short) str[jx]);
for (int ix = 0; ix < 8; ix++) {

short tmpCRC = crc;
crc = (short) (crc >> 1);
if ((tmpCRC & 0x1) == 1) {
crc = (short) (crc ^ 0x2001);
}
}
crc = (short) (crc & 0x3fff);
}
}
return crc;
}
PN 074-511-P1D
unsigned char crc2() {

unsigned char val = (unsigned char) (((crc >> 7) & 0x7f) +
34);
return val;
}
unsigned char crc1() {
unsigned char val = (unsigned char) ((crc & 0x7f) + 34);
return val;
}
};
5 - 25
PN 074-511-P1D
5 - 26
Chapter 6
Troubleshooting and Maintenance
6.1 Troubleshooting Guide

If SQM-160 does not function as expected, or appears to have diminished
performance, the following Symptom/Cause/Remedy chart may be helpful (see
Table 6-1). Additional troubleshooting information can be found in the operating
manuals for sensors, located on the Thin Film Instrument and Sensor Manuals CD.
If the problem cannot be resolved, contact INFICON (refer to section 1.3, How To
Contact INFICON, on page 1-4).
CAUTION
There are no user-serviceable components within the

SQM-160 case.
Refer all maintenance to qualified personnel.
Table 6-1 Symptom/Cause/Remedy chart
SYMPTOM CAUSE REMEDY
SQM-160 does not turn on. Power cable is not plugged Connect power cable.
into SQM-160 or rear panel
power switch is not on. Set the rear panel power
switch to position 1 (ON).
Incorrect line voltage. Line voltage must be within

SQM-160 line voltage
PN 074-511-P1D
specification (refer to section

1.4.5 on page 1-7).
Fuse open. Remove the fuse drawer

from the power inlet and
examine both fuses, or use
an ohmmeter to check the
fuses. Replace open fuses
with the specified fuse (refer
to section 1.4.5 on page 1-7).
SQM-160 is malfunctioning. Contact INFICON service

department (refer to section
1.3 on page 1-4).
SQM-160 “locks up.” Covers/panels not installed Install and securely fasten all
or not secured. covers and panels.
PRELIMINARY 4/28/15 6-1

Table 6-1 Symptom/Cause/Remedy chart (continued)
SQM-160 “locks up.” Electrical noise is being Locate the sensor, oscillator
picked up by cables cables, I/O cables, and
connected to SQM-160. power cable at least 30.5 cm
(1 ft.) away from high voltage
/ high power cables and other
sources of electrical noise.
Inadequate system Ground wires or straps

grounding. should be short with large
surface area to minimize
impedance to ground.
Ground wires or straps must

connect to an appropriate
earth ground (refer to section
2.1 on page 2-1).
SQM-160 is malfunctioning. Contact INFICON service

department (refer to section
1.3 on page 1-4).
Stored parameter values SQM-160 is malfunctioning. Contact INFICON service

are lost when SQM-160 is department. (refer to section
turned on. 1.3 on page 1-4).
Thickness, Frequency, or Temperature of the crystal is Control the vacuum chamber

Mass reading is unstable unstable (an AT-cut crystal temperature.
or drifting (not the may drift as much as
frequency decrease or 10 Hz/°C). Move the crystal farther away
Thickness/Mass increase from the source (at least
associated with material 25.4 cm (10 in.) from source).
being deposited on the
PN 074-511-P1D
crystal). Check sensor water cooling
for correct flow and
temperature. Refer to the
sensor operating manual.
Clean or replace the crystal

holder. Refer to the sensor
operating manual for
cleaning instructions.
Use SPC-1157-G10 thermal

shock crystals designed to
minimize frequency shifts
due to heat load.
6-2 PRELIMINARY 4/28/15

Thickness, Frequency, or Humidity level on the crystal Avoid condensation by

Mass reading is unstable is changing. Moisture being turning off cooling water to
or drifting (not the absorbed or exuded from the sensor before opening the
frequency decrease or crystal surface. vacuum chamber to air, and
Thickness/Mass increase then flow heated water above
associated with material the room dew point through
being deposited on the the sensor when the
crystal). chamber is open.
Crystal or crystal holder Replace crystal.

crystal seating surface
scratched or dirty. Clean the crystal seating
surface inside the crystal
holder or replace crystal
holder. Refer to sensor
Bad sensor/feedthrough, or Use an ohmmeter to check

bad in-vacuum cable, or bad electrical continuity and
BNC cable. isolation of
sensor/feedthrough,
in-vacuum cable, and both
BNC cables. Refer to the
sensor operating manual for
detailed troubleshooting
information.
Excessive cable length In-vacuum cable length

between oscillator and should not exceed 78.1 cm
crystal. (30.75 in.).
PN 074-511-P1D
Use the 15.2 cm (6 in.) cable

between oscillator and
feedthrough.

Thickness, Frequency, or SQM-160 or oscillator is Test the SQM-160 and

Mass reading is unstable malfunctioning. oscillator using the oscillator
or drifting (not the test mode (see section 6.4 on
frequency decrease or page 6-13).
Thickness/Mass increase
associated with material Substitute a known good
being deposited on the SQM-160 (or other QCM).
crystal).
Substitute a known good
oscillator.
Substitute a PN 760-601-G2
Sensor Emulator or a known
good sensor for the sensor.
Thickness, Frequency, or Excessive cable length In-vacuum cable length

Mass reading deviates between oscillator and should not exceed 78.1 cm
greatly from the expected crystal is causing (30.75 in.).
value. self-oscillation at a frequency
different than the crystal Use the 15.2 cm (6 in.) cable
frequency. between oscillator and
feedthrough.
Bad sensor/feedthrough, or Use an ohmmeter to check

bad in-vacuum cable, or bad electrical continuity and
BNC cable. isolation of
sensor/feedthrough,
PN 074-511-P1D
information.
SQM-160 or oscillator is Test the SQM-160 and

malfunctioning. oscillator using the oscillator
test mode (see section 6.4 on
page 6-13).

SQM-160 (or other QCM).

oscillator.
Sensor Emulator or a known
good sensor for the sensor.

Crystal Status indicator is Failed crystal, or no crystal in Install a new crystal.

blinking, indicating Xtal sensor.
fail.
Two crystals were installed or Remove extra crystal.
crystal is upside down.
Reverse crystal orientation.
Inspect crystal for scratches;
if scratched, replace with
new crystal.
Built-up material at crystal Clean or replace the crystal

holder aperture is touching holder. Refer to the sensor
the crystal. operating manual for
Crystal frequency is not Use a crystal with starting

within the frequency range of frequency appropriate for
SQM-160. SQM-160 frequency range.
Change the FMin/Max

frequency settings in
SQM-160.
Oscillator/sensor not Connect oscillator/sensor to

connected to the Sensor all active Sensor channels.
channel corresponding to the
blinking Crystal Status
indicator.
Excessive cable length In-vacuum cable length

between oscillator and should not exceed 78.1 cm
crystal. (30.75 in.).
PN 074-511-P1D

feedthrough.

Crystal Status indicator is Bad sensor/feedthrough, or Use an ohmmeter to check

blinking, indicating Xtal bad in-vacuum cable, or bad electrical continuity and
fail. BNC cable. isolation of
sensor/feedthrough,
information.
Substitute known good BNC

cables.

in-vacuum cable.

sensor/feedthrough.
Sensor Emulator for the
sensor.
SQM-160 or oscillator is Test the SQM-160 and

malfunctioning. oscillator using the oscillator
test mode (see section 6.4 on
page 6-13).

SQM-160 (or other QCM).
PN 074-511-P1D
oscillator.
Sensor Emulator for the
sensor.

Crystal Status indicator is Crystal is being hit by small Use a shutter to shield the
blinking, indicating Xtal droplets of molten material sensor during source
fail, during deposition from the evaporation source. conditioning.
before “normal” life of
crystal is exceeded. Move the crystal farther away
(at least 25.4 cm (10 in.))
from the source.
Damaged crystal or Replace the crystal.

deposited material is causing
stress to crystal. Use an Alloy crystal if
appropriate for deposited
material.
Material buildup on crystal Clean or replace the crystal

holder is partially masking holder. Refer to the sensor
the crystal surface. operating manual for
Shutter is partially Visually check crystal for an

obstructing deposition flux or uneven coating, and if
sensor is poorly positioned, present, correct shutter or
causing uneven distribution sensor positioning problem.
of material on crystal.
Crystal oscillation is weak In-vacuum cable length

due to excessive cable should not exceed 78.1 cm
length between oscillator and (30.75 in.).
crystal.
feedthrough.
PN 074-511-P1D
Crystal Status indicator is Crystal was near the end of Replace the crystal.
blinking, indicating Xtal its life; opening to air causes
fail, when vacuum film oxidation, which
chamber is opened to air. increases film stress.
Excessive moisture Avoid condensation by

accumulation on the crystal. turning off cooling water to
sensor before opening the
vacuum chamber to air, and
then flow heated water above
the room dew point through
the sensor when the
chamber is open.

Rate reading, and Excessive cable length In-vacuum cable length

Thickness, Frequency, or between oscillator and should not exceed 78.1 cm
Mass reading are noisy. crystal. (30.75 in.).

feedthrough.
Electrical noise is being Locate the sensor, oscillator

picked up by cables cables, I/O cables,
connected to SQM-160. communications cable, and
power cable at least 30.5 cm
(1 ft.) away from high voltage
/ high power cables and other
sources of electrical noise.
Inadequate system Ground wires or straps

grounding. should be short with large
surface area to minimize
impedance to ground.
Ground wires or straps

should connect to an
appropriate earth ground
(refer to section 2.1 on page
2-1).
PN 074-511-P1D

Thickness, Frequency, or Mode hopping due to Replace the crystal.

Mass reading has large damaged crystal.
excursions during
Crystal is near the end of its Replace the crystal.
deposition.
life.
Scratches or foreign particles Clean the crystal seating

on the crystal holder crystal surface inside the crystal
seating surface. holder or replace crystal
holder. Refer to sensor
Uneven coating onto crystal. A straight line from center of

source to center of crystal
should be perpendicular to
face of crystal.
Particles on crystal. Replace crystal.
Remove source of particles.
Intermittent cables or Use an ohmmeter to check

connections. electrical continuity / isolation
of sensor head, feedthrough,
in-vacuum cable, and BNC
cables. Refer to the sensor
operating manual for detailed
troubleshooting information.
Inadequate cooling of crystal. Check water flow rate and

temperature for sensor
cooling.
PN 074-511-P1D
Thickness, Frequency, or Crystal not properly seated Check crystal installation.

Mass reading has large or crystal holder crystal
excursions during source seating surface is dirty. Clean the crystal seating
warm-up or when source surface inside the crystal
shutter is opened (usually holder or replace crystal
causes Thickness reading holder. Refer to sensor
to decrease) and after the operating manual for
termination of deposition cleaning instructions.
(usually causes Thickness
reading to increase).

Thickness, Frequency, or Excessive heat input to the If heat is due to radiation

Mass reading has large crystal. from the evaporation source,
excursions during source move sensor farther away (at
warm-up or when source least 25.4 cm (10 in.)) from
shutter is opened (usually source.
causes Thickness reading
to decrease) and after the Use SPC-1157-G10 thermal
termination of deposition shock crystals designed to
(usually causes Thickness minimize frequency shifts
reading to increase). due to heat load.
Inadequate cooling of crystal. Check water flow rate and

temperature for sensor
cooling.
Crystal is being heated by Use a sputtering sensor for

electron flux. non-magnetron sputtering.
Crystal is being hit by small Use a shutter to shield the

droplets of molten material sensor during source
from the evaporation source. conditioning.
Move the crystal farther away

(at least 25.4 cm (10 in.))
from the source.
Intermittent connection Use an ohmmeter to check

occurring in sensor or electrical continuity / isolation
feedthrough with thermal of sensor head, feedthrough,
variation. and in-vacuum cable. Refer
to the sensor operating
manual for detailed
PN 074-511-P1D
troubleshooting information.
6 - 10 PRELIMINARY 4/28/15
Thickness reproducibility Erratic evaporation flux Move sensor to a different

is poor. characteristics. location.
Check the evaporation

source for proper operating
conditions.
Ensure relatively constant

pool height and avoid
tunneling into the melt.
Assign multiple sensors to

the source.
Material does not adhere well Check for contamination on

to the crystal. the crystal surface.
Evaporate an intermediate
layer of appropriate material
onto the crystal to improve
adhesion.
Use gold, silver, or alloy

crystals, as appropriate.
SQM-160 Comm software Host computer has Check that operating system
does not install correctly incompatible operating and version are compatible
or does not function system or incompatible with SQM-160 Comm
correctly. version of operating system. software (refer to Chapter 4).
Communication cannot be Communications cable is not Check cable connections.

PN 074-511-P1D
established between the connected properly to

host computer and SQM-160 or host computer.
SQM-160.
Baud setting in SQM-160 is Correct communications port
different than the baud settings (refer to section 3.5
setting in SQM-160 Comm on page 3-6 and section 4.8
software, or the wrong comm on page 4-17).
port is selected in SQM-160
Comm software.
SQM-160 Comm software Contact INFICON technical

version is not compatible with support (refer to section 1.3
SQM-160 firmware version. on page 1-4).
RS-232 communication RS-232 cable is not the Use straight-through RS-232

issue. correct type. cable (refer to section 5.1.1
on page 5-1).
PRELIMINARY 4/28/15 6 - 11
USB communication issue. USB device driver is not Refer to section 5.1.2 on
installed correctly. page 5-2.
Ethernet communication Ethernet network settings in Refer to section 5.1.3 on

issue. host computer are incorrect. page 5-2.
Ethernet IP address setting Change Ethernet module IP

in SQM-160 Comm software address or SQM-160 Comm
does not match IP address of software IP address
SQM-160 Ethernet module. (refer to section 5.1.3.2 on
page 5-8).
Straight-through Ethernet Use a cross-over Ethernet

cable is not auto-detected by cable for a direct connection
an older host computer. to a host computer that does
not auto-detect cable type.
6.2 Maintenance
Routine maintenance is not required for SQM-160. Regular sensor maintenance
procedures should be followed according to the sensor operating manual.
6.3 Spare Parts

Fuse . . . . . . . . . . . . . . . . . . . . . . . . . PN 062-0105
Oscillator . . . . . . . . . . . . . . . . . . . . . PN 783-500-013
BNC Cable (15.2 cm (6 in.)) . . . . . . . PN 782-902-011
PN 074-511-P1D
BNC Cable (3.0 m (10 ft.)) . . . . . . . . PN 782-902-012-10
BNC Cable (7.6 m (25 ft.)) . . . . . . . . PN 782-902-012-25
BNC Cable (15.2 m (50 ft.)) . . . . . . . PN 782-902-012-50
BNC Cable (22.8 m (75 ft.)) . . . . . . . PN 782-902-012-75
6.4 Persistent Crystal Fail Indication

OSC-100 oscillators have a test feature to help isolate persistent crystal fail
problems (see Figure 6-1). To activate the test feature, press the Push to Test
button using a small, pointed object, such as a pen or a small screwdriver. This
connects the internal test crystal to the circuit instead of the normal Sensor
connector. If SQM-160 and the oscillator are functioning correctly, the Crystal
Status indicator will stop blinking and illuminate while this button is depressed.
Once the Push to Test button is released, the oscillator returns to normal
operation and the internal test crystal is no longer in use.
If Crystal Status indicator stops blinking and illuminates while the Push to Test
button is depressed, the problem has been isolated to be in the path between the
oscillator and the sensor head. If the Crystal Status indicator continues to blink
while the Push to Test button is depressed, the problem is either the
programming of the sensor selection, in the electronics of the oscillator, or
SQM-160.
Figure 6-1 OSC-100 oscillator
PN 074-511-P1D
PRELIMINARY 4/28/15 6 - 13
PN 074-511-P1D
Chapter 7
Calibration Procedures
7.1 Importance of Density, Tooling and Z-Ratio

The quartz crystal microbalance is capable of precisely measuring the mass added
to the face of the oscillating quartz crystal sensor. SQM-160 recognizes the density
of this added material to allow conversion of the mass information into thickness.
In some instances, where highest accuracy is required, it is necessary to make a
density calibration (see section 7.2).
Because the flow of material from a deposition is not uniform, it is necessary to
account for the different amount of material flow onto the sensor, compared to the
substrates. This is accounted for by the Tooling parameter. Tooling can be
experimentally established by following the guidelines in section 7.3 on page 7-2.
If the Z-Ratio is not known, it could be estimated from the procedures,
outlined in section 7.4 on page 7-3.
7.2 Determining Density

NOTE: The bulk density values retrieved from Appendix A are sufficiently accurate
for most applications.
To determine Density value:
1 Place a substrate (with proper masking for film thickness measurement)
adjacent to the sensor, to ensure the same thickness will be accumulated on
the crystal and substrate.
2 Set Density to the bulk value of the Film material or to an approximate value.
PN 074-511-P1D
3 Set Z-Ratio to 1.000 and Tooling to 100%.

4 Place a new crystal in the sensor and make a short deposition (1000 to 5000 Å).
5 After deposition, remove the test substrate and measure the Film thickness
with either a multiple beam interferometer or a stylus-type profilometer.

6 Determine the new Density value with equation [1]:
3  Tx 
Density  g  cm  = D 1  ------- [1]
 T m
where:
D1 = Initial Density setting
Tx = Thickness reading on SQM-160
Tm = Measured thickness
7 A quick check of the calculated Density may be made. If the SQM-160
thickness has not been zeroed between the test deposition, enter the
calculated Density. Program SQM-160 with the new Density value and observe
whether the displayed thickness is equal to the measured thickness.
NOTE: Due to variations in source distribution and other system factors, it is
recommended that a minimum of three separate evaporations be made, to
obtain an average value for Density.
NOTE: Slight adjustment of Density may be necessary, in order to
achieve Tx = Tm.
7.3 Determining Tooling

1 Place a test substrate in the system substrate holder.
2 Make a short deposition and determine actual thickness.
3 Calculate Tooling from the relationship in equation [2]:
 T m
Tooling (%) = TF i  -------
PN 074-511-P1D
[2]
 Tx 
where
Tm = Actual thickness at substrate holder
Tx = Thickness reading in SQM-160
TFi = Initial Tooling factor
4 Round percent tooling to the nearest 1%.
5 When entering this new value for Tooling into the program, if calculations are
done properly, Tm will equal Tx.
NOTE: To account for variations in source distribution and other system factors,
obtain an average value for Tooling, using a minimum of three separate
evaporations.

7.4 Laboratory Determination of Z-Ratio

A list of Z-Ratio values for materials commonly used are available in Appendix A.
For other materials, Z-Ratio can be calculated from the following formula:
1---
 d q  q 2
Z =  ------------ [3]
 df f 
1
- ---
5 2
Z = 9.378  10  d f  f  [4]
where:
df = Density (g/cm3) of deposited film
µf = Shear modulus (dynes/cm2) of deposited film
dq = Density of quartz (crystal) (2.649 g/cm3)
µq = Shear modulus of quartz (crystal) (3.32 x 1011 dynes/cm2)
NOTE: The densities and shear moduli of many materials can be found in a
number of handbooks.
Laboratory results indicate that Z-Ratio of materials in thin-film form are very close
to the bulk values; however, for high stress producing materials, Z-Ratio values of
thin films are slightly smaller than those of the bulk materials. For applications that
require more precise calibration, the following direct method is suggested:
1 Establish the correct density value as described in section 7.2 on page 7-1.
2 Install a new crystal and record its starting Frequency, Fco.
PN 074-511-P1D
3 Make a deposition on a test substrate such that the percent Crystal Life display
will read approximately 50%, or near the end of crystal life for the particular
material, whichever is smaller.
4 Stop the deposition and record the ending crystal Frequency Fc.
5 Remove the test substrate and measure the film thickness with either a multiple
beam interferometer or a stylus-type profilometer.

6 Using the Density value from step 1 and the recorded values for Fco and Fc,
adjust the Z-Ratio value in thickness equation [5] to bring the calculated
thickness value into agreement with the actual thickness.
 If the calculated value of thickness is greater than the actual thickness,
increase the Z-Ratio value.
 If the calculated value of thickness is less than the actual thickness,
decrease the Z-Ratio value.
4
Z q  10  1 F co 1 F c 
T f = --------------------   -------- ATan  zTan  -----------  –  ----- ATan  zTan  ---------   [5]
2zp   F co   F q    F c   Fq  

where:
Tf = Thickness of deposited film (kÅ)
Fco = Starting frequency of the sensor crystal (Hz)
Fc = Final frequency of the sensor crystal (Hz)
Fq = Nominal blank frequency = 6045000 (Hz)
z = Z-Ratio of deposited film material
Zq = Specific acoustic impedance of quartz = 8765000 (kg/(m2*s))
p = Density of deposited film (g/cm3)
For multiple layer deposition (for example, two layers), the Z-Ratio used for the
second layer is determined by the relative thickness of the two layers. For most
applications, the following three rules will provide reasonable accuracies:
 If the thickness of layer 1 is large compared to layer 2, use material 1 Z-Ratio
for both layers.
 If the thickness of layer 1 is thin compared to layer 2, use material 2 Z-Ratio for
PN 074-511-P1D
both layers.
 If the thickness of both layers is similar, use a value for Z-Ratio which is the
weighted average of the two Z-Ratio values for deposition of layer 2 and
subsequent layers.

Chapter 8
Measurement and Theory
8.1 Basics
The Quartz Crystal deposition Monitor (QCM) utilizes the piezoelectric sensitivity
of a quartz monitor crystal to added mass. The QCM uses this mass sensitivity to
control the deposition rate and final thickness of a vacuum deposition.
When a voltage is applied across the faces of a properly shaped piezoelectric
crystal, the crystal is distorted and changes shape in proportion to the applied
voltage. At certain discrete frequencies of applied voltage, a condition of sharp
electro-mechanical resonance is encountered.
When mass is added to the face of a resonating quartz crystal, the frequency of
these resonances are reduced. This change in frequency is very repeatable and is
precisely understood for specific oscillating modes of quartz. This phenomenon is
the basis of an indispensable measurement and process control tool that can easily
detect the addition of less than an atomic layer of an adhered foreign material.
In the late 1950’s it was noted by Sauerbrey1,2 and Lostis3 that the change in
frequency, DF = Fq-Fc, of a quartz crystal with coated (or composite) and uncoated
frequencies, Fc and Fq respectively, is related to the change in mass from the
added material, Mf , as follows:
M
-------f = -----------
F 
[1]
Mq Fq
where Mq is the mass of the uncoated quartz crystal. Simple substitutions lead to
the equation used with the first frequency measurement instruments:
PN 074-511-P1D
K  F 
T f = ---------------- [2]
df
where the film thickness, Tf, is proportional (through K) to the frequency change,
DF, and inversely proportional to the density of the film, df. The constant, K =
Natdq/Fq2; where dq (= 2.649 g/cm3) is the density of single crystal quartz and Nat
(=166100 Hz cm) is the frequency constant of AT cut quartz.
1.G. Z. Sauerbrey, Phys. Verhand .8, 193 (1957)

2.G. Z. Sauerbrey, Z. Phys. 155,206 (1959)
3.P. Lostis, Rev. Opt. 38,1 (1959)

A crystal with a starting frequency of 6.0 MHz will display a reduction of its
frequency by 2.27 Hz when 1 angstrom of Aluminum (density of 2.77 g/cm3)
is added to its surface. In this manner, the thickness of a rigid adlayer is inferred
from the precise measurement of the frequency shift of the crystal.
The quantitative knowledge of this effect provides a means of determining how
much material is being deposited on a substrate in a vacuum system, a
measurement that was not convenient or practical prior to this understanding.
8.1.1 Monitor Crystals

No matter how sophisticated the electronics surrounding it, the essential device of
the deposition monitor is the quartz crystal. The quartz crystal in Figure 8-1 has a
frequency response spectrum that is schematically displayed in Figure 8-2.
The ordinate represents the magnitude of response, or current flow of the crystal,
at the specified frequency.
Figure 8-1 Quartz resonator
1.4 cm (0.55 in.)
The lowest frequency response is primarily a thickness shear mode that is called
the fundamental. The characteristic movement of the thickness shear mode is for
displacement to take place parallel to the major monitor crystal faces. In other
words, the faces are displacement antinodes (see Figure 8-3).
PN 074-511-P1D
The responses located slightly higher in frequency are called anharmonics; they
are a combination of the thickness shear and thickness twist modes. The response
at about three times the frequency of the fundamental is called the third
quasiharmonic. There are also a series of anharmonics slightly higher in
frequency associated with the quasiharmonic.
The monitor crystal design depicted in Figure 8-1 is the result of several significant
improvements from the square crystals, with fully electroded plane parallel faces
that were first used.
The first improvement implemented the use of circular crystals. The resulting
increase in symmetry greatly reduces the number of allowed vibrational modes.

The second set of improvements was to contour one face of the crystal and to
reduce the size of the exciting electrode. These improvements have the effect of
trapping the acoustic energy.
Reducing the electrode diameter limits the excitation to the central area.
Contouring dissipates the energy of the traveling acoustic wave before it reaches
the edge of the crystal. Energy is not reflected back to the center where it can
interfere with other newly launched waves, essentially making a small crystal
appear to behave as though it is infinite in extent.
With the crystal vibrations restricted to the center, it is practical to clamp the outer
edges of the crystal to a holder, and not produce any undesirable effects.
Contouring also reduces the intensity of response of the generally unwanted
anharmonic modes; hence, the potential for an oscillator to sustain an unwanted
oscillation is substantially reduced.
Figure 8-2 Frequency response spectrum
Log of relative intensity (Admittance)
1
10
1
100
17.792 MHz 278 ohm
18.133 MHz 350 ohm

17.957 MHz 311 ohm
6.333 MHz 142 ohm
6.337 MHz 105 ohm
6.348 MHz 322 ohm
6.419 MHz 350 ohm
5.981 MHz 15 ohm
6.153 MHz 50 ohm
6.194 MHz 40 ohm
1
1000
6 7 17 18
Frequency (in MHz)

PN 074-511-P1D
The use of an adhesion layer has improved the electrode-to-quartz bonding,

reducing rate spikes caused by micro-tears between the electrode and the quartz,
as film stress rises. These micro-tears leave portions of the deposited film
unattached, and therefore unable to participate in the oscillation. These free
portions are no longer detected, which prevents the consequential wrong thickness
from being inferred.
The AT resonator is usually chosen for deposition monitoring, because at room
temperature it can be made to exhibit a very small frequency change, due to
temperature changes.

Since there is currently no way to separate the frequency change caused by added
mass (which is negative), or even the frequency changes caused by temperature
gradients across the crystal or film induced stresses, it is essential to minimize
these temperature-induced changes. It is only in this way that small changes in
mass can be measured accurately.
Figure 8-3 Thickness shear displacement
E X2
displacement node
X
1
X
3
8.1.2 Period Measurement Technique

Although instruments using equation [2] were very useful, it was soon noted that
they had a limited range of accuracy, typically holding accuracy for DF less than
0.02 Fq. In 1961, it was recognized by Behrndt4 that:
M  Tc – Tq   F 
PN 074-511-P1D
-------f = ---------------------- = ----------- [3]
Mq Tq Fc
where Tc and Tq are the periods of oscillation of the crystal with film (composite)
and the bare crystal, respectively.
The period measurement technique was the outgrowth of two factors:
 The digital implementation of time measurement, and
 The recognition of the mathematically rigorous formulation of the
proportionality between the thickness of the crystal, Iq, and the period of
oscillation, Tq = 1/Fq.
4.K. H. Behrndt, J. Vac. Sci. Technol. 8, 622 (1961)

Electronically, the period measurement technique uses a second crystal oscillator,

or reference oscillator, not affected by the deposition, which is usually much higher
in frequency than the monitor crystal. This reference oscillator is used to generate
small precision time intervals, which are used to determine the oscillation period of
the monitor crystal. This is done by using two pulse accumulators:
 The first is used to accumulate a fixed number of cycles, m, of the
monitor crystal.
 The second is turned on at the same time and accumulates cycles from the
reference oscillator until m counts are accumulated in the first.
Since the frequency of the reference is stable and known, the time to accumulate
the m counts is known to an accuracy equal to ±2/Fr where Fr is the reference
oscillator frequency.
The period of the monitor crystal is (n/Fr)/m, where n is the number of counts in the
second accumulator. The precision of the measurement is determined by the
speed of the reference clock and the length of the gate time (set by the size of m).
Increasing one or both of these leads to improved measurement precision.
Having a high frequency reference oscillator is important for rapid measurements
(which require short gating times), low deposition rates, and low density materials.
All of these require high time precision to resolve the small, mass-induced
frequency shifts between measurements.
When the change of a monitor crystal frequency between measurements is small,
that is, on the same order of size as the measurement precision, it is not possible
to establish quality rate control. The uncertainty of the measurement injects
more noise into the control loop, which can be counteracted only by longer time
constants. Long time constants cause the correction of rate errors to be very slow,
resulting in relatively long term deviations from the desired rate.
These deviations may not be important for some simple films, but can cause
PN 074-511-P1D
unacceptable errors in the production of critical films such as optical filters or very
thin-layered superlattices grown at low rates.
In many cases, the desired properties of these films can be lost if the layer-to-layer
reproducibility exceeds one, or two, percent. Ultimately, the practical stability and
frequency of the reference oscillator limits the precision of measurement for
conventional instrumentation.

8.1.3 Z-match Technique

After learning of fundamental work by Miller and Bolef 5, which rigorously treated
the resonating quartz and deposited film system as a one-dimensional continuous
acoustic resonator, Lu and Lewis6 developed the simplifying Z-match™ equation
in 1972. Advances in electronics taking place at the same time, namely the
micro-processor, made it practical to solve the Z-match equation in real-time.
Most deposition process controllers/monitors sold today use this sophisticated
equation that takes into account the acoustic properties of the resonating quartz
and film system (see equation [4]).
N at d q   Fq – Fc 
T f =  ------------------ arctan  Z tan -------------------------  [4]
 d f F c Z  Fq 
where Z=(dquq/dfuf)1/2 is the acoustic impedance ratio and uq and uf are the shear
moduli of the quartz and film, respectively.
Finally, there was a fundamental understanding of the frequency-to-thickness
conversion that could yield theoretically correct results in a time frame that was
practical for process control.
To achieve this new level of accuracy requires only that the user enter an additional
material parameter, Z, for the film being deposited. This equation has been tested
for a number of materials, and has been found to be valid for frequency shifts
equivalent to Ff = 0.4Fq.
Keep in mind that equation [2] was valid to only 0.02Fq and equation [3] was valid
only to ~0.05Fq.
PN 074-511-P1D
5.J. G. Miller and D. I. Bolef, J. Appl. Phys. 39, 5815, 4589 (1968)
6.C. Lu and O. Lewis, J Appl. Phys. 43, 4385 (1972)

Appendix A
Material Table
A.1 Introduction
The following Table A-1 represents the density and Z-Ratio for various materials.
The list is alphabetical, by chemical formula.
WARNING
Some of these materials are toxic. Consult the material

safety data sheet and safety instructions before use.
An * is used to indicate that a Z-Ratio has not been established for a certain
material. A value of 1.000 is defaulted in these situations.
Table A-1 Material table
Formula Density Z-Ratio Material Name
Ag 10.500 0.529 silver
AgBr 6.470 1.180 silver bromide
AgCl 5.560 1.320 silver chloride
Al 2.700 1.080 aluminum
Al2O3 3.970 0.336 aluminum oxide
Al4C3 2.360 *1.000 aluminum carbide
AIF3 3.070 *1.000 aluminum fluoride
PN 074-511-P1D
AIN 3.260 *1.000 aluminum nitride

AlSb 4.360 0.743 aluminum antimonide
As 5.730 0.966 arsenic
As2Se3 4.750 *1.000 arsenic selenide
Au 19.300 0.381 gold
B 2.370 0.389 boron
B 20 3 1.820 *1.000 boron oxide
B 4C 2.370 *1.000 boron carbide
BN 1.860 *1.000 boron nitride
Ba 3.500 2.100 barium
BaF2 4.886 0.793 barium fluoride
BaN2O6 3.244 1.261 barium nitrate
PRELIMINARY 4/28/15 A-1

Table A-1 Material table (continued)

BaO 5.720 *1.000 barium oxide
BaTiO3 5.999 0.464 barium titanate (tetr)
BaTiO3 6.035 0.412 barium titanate (cubic)
Be 1.850 0.543 beryllium
BeF2 1.990 *1.000 beryllium fluoride
BeO 3.010 *1.000 beryllium oxide
Bi 9.800 0.790 bismuth
Bi2O3 8.900 *1.000 bismuth oxide
Bi2S3 7.390 *1.000 bismuth trisulfide
Bi2Se3 6.820 *1.000 bismuth selenide
Bi2Te3 7.700 *1.000 bismuth telluride
BiF3 5.320 *1.000 bismuth fluoride
C 2.250 3.260 carbon (graphite)
C 3.520 0.220 carbon (diamond)
C 8H 8 1.100 *1.000 parlyene (union carbide)
Ca 1.550 2.620 calcium
CaF2 3.180 0.775 calcium fluoride
CaO 3.350 *1.000 calcium oxide
CaO-SiO2 2.900 *1.000 calcium silicate (3)
CaSO4 2.962 0.955 calcium sulfate
CaTiO3 4.100 *1.000 calcium titanate
CaWO4 6.060 *1.000 calcium tungstate
PN 074-511-P1D
Cd 8.640 0.682 cadmium
CdF2 6.640 *1.000 cadmium fluoride
CdO 8.150 *1.000 cadmium oxide
CdS 4.830 1.020 cadmium sulfide
CdSe 5.810 *1.000 cadmium selenide
CdTe 6.200 0.980 cadmium telluride
Ce 6.780 *1.000 cerium
CeF3 6.160 *1.000 cerium (iii) fluoride
CeO2 7.130 *1.000 cerium (iv) dioxide
Co 8.900 0.343 cobalt
CoO 6.440 0.412 cobalt oxide
A-2 PRELIMINARY 4/28/15


Cr 7.200 0.305 chromium
Cr2O3 5.210 *1.000 chromium (iii) oxide
Cr3C2 6.680 *1.000 chromium carbide
CrB 6.170 *1.000 chromium boride
Cs 1.870 *1.000 cesium
Cs2SO4 4.243 1.212 cesium sulfate
CsBr 4.456 1.410 cesium bromide
CsCI 3.988 1.399 cesium chloride
CsI 4.516 1.542 cesium iodide
Cu 8.930 0.437 copper
Cu2O 6.000 *1.000 copper oxide
Cu2S 5.600 0.690 copper (i) sulfide (alpha)
Cu2S 5.800 0.670 copper (i) sulfide (beta)
CuS 4.600 0.820 copper (ii) sulfide
Dy 8.550 0.600 dysprosium
DY2O3 7.810 *1.000 dysprosium oxide
Er 9.050 0.740 erbium
Er2O3 8.640 *1.000 erbium oxide
Eu 5.260 *1.000 europium
EuF2 6.500 *1.000 europium fluoride
Fe 7.860 0.349 iron
Fe2O3 5.240 *1.000 iron oxide
PN 074-511-P1D
FeO 5.700 *1.000 iron oxide

FeS 4.840 *1.000 iron sulfide
Ga 5.930 0.593 gallium
Ga2O3 5.880 *1.000 gallium oxide (b)
GaAs 5.310 1.590 gallium arsenide
GaN 6.100 *1.000 gallium nitride
GaP 4.100 *1.000 gallium phosphide
GaSb 5.600 *1.000 gallium antimonide
Gd 7.890 0.670 gadolinium
Gd2O3 7.410 *1.000 gadolinium oxide
Ge 5.350 0.516 germanium


Ge3N2 5.200 *1.000 germanium nitride
GeO2 6.240 *1.000 germanium oxide
GeTe 6.200 *1.000 germanium telluride
Hf 13.090 0.360 hafnium
HfB2 10.500 *1.000 hafnium boride
HfC 12.200 *1.000 hafnium carbide
HfN 13.800 *1.000 hafnium nitride
HfO2 9.680 *1.000 hafnium oxide
HfSi2 7.200 *1.000 hafnium silicide
Hg 13.460 0.740 mercury
Ho 8.800 0.580 holmium
Ho2O3 8.410 *1.000 holmium oxide
In 7.300 0.841 indium
In2O3 7.180 *1.000 indium sesquioxide
In2Se3 5.700 *1.000 indium selenide
In2Te3 5.800 *1.000 indium telluride
InAs 5.700 *1.000 indium arsenide
InP 4.800 *1.000 indium phosphide
InSb 5.760 0.769 indium antimonide
Ir 22.400 0.129 iridium
K 0.860 10.189 potassium
KBr 2.750 1.893 potassium bromide
PN 074-511-P1D
KCI 1.980 2.050 potassium chloride
KF 2.480 *1.000 potassium fluoride
KI 3.128 2.077 potassium iodide
La 6.170 0.920 lanthanum
La2O3 6.510 *1.000 lanthanum oxide
LaB6 2.610 *1.000 lanthanum boride
LaF3 5.940 *1.000 lanthanum fluoride
Li 0.530 5.900 lithium
LiBr 3.470 1.230 lithium bromide
LiF 2.638 0.778 lithium fluoride
LiNbO3 4.700 0.463 lithium niobate


Lu 9.840 *1.000 lutetium
Mg 1.740 1.610 magnesium
MgAl2O4 3.600 *1.000 magnesium aluminate
MgAl2O6 8.000 *1.000 spinel
MgF2 3.180 0.637 magnesium fluoride
MgO 3.580 0.411 magnesium oxide
Mn 7.200 0.377 manganese
MnO 5.390 0.467 manganese oxide
MnS 3.990 0.940 manganese (ii) sulfide
Mo 10.200 0.257 molybdenum
Mo2C 9.180 *1.000 molybdenum carbide
MoB2 7.120 *1.000 molybdenum boride
MoO3 4.700 *1.000 molybdenum trioxide
MoS2 4.800 *1.000 molybdenum disulfide
Na 0.970 4.800 sodium
Na3AIF6 2.900 *1.000 cryolite
Na5Al3F14 2.900 *1.000 chiolite
NaBr 3.200 *1.000 sodium bromide
NaCl 2.170 1.570 sodium chloride
NaCIO3 2.164 1.565 sodium chlorate
NaF 2.558 1.645 sodium fluoride
NaNO3 2.270 1.194 sodium nitrate
PN 074-511-P1D
Nb 8.578 0.492 niobium (columbium)

Nb2O3 7.500 *1.000 niobium trioxide
Nb2O5 4.470 *1.000 niobium (v) oxide
NbB2 6.970 *1.000 niobium boride
NbC 7.820 *1.000 niobium carbide
NbN 8.400 *1.000 niobium nitride
Nd 7.000 *1.000 neodymium
Nd2O3 7.240 *1.000 neodymium oxide
NdF3 6.506 *1.000 neodymium fluoride
Ni 8.910 0.331 nickel
NiCr 8.500 *1.000 nichrome


NiCrFe 8.500 *1.000 Inconel
NiFe 8.700 *1.000 permalloy
NiFeMo 8.900 *1.000 supermalloy
NiO 7.450 *1.000 nickel oxide
P 3N 5 2.510 *1.000 phosphorus nitride
Pb 11.300 1.130 lead
PbCl2 5.850 *1.000 lead chloride
PbF2 8.240 0.661 lead fluoride
PbO 9.530 *1.000 lead oxide
PbS 7.500 0.566 lead sulfide
PbSe 8.100 *1.000 lead selenide
PbSnO3 8.100 *1.000 lead stannate
PbTe 8.160 0.651 lead telluride
Pd 12.038 0.357 palladium
PdO 8.310 *1.000 palladium oxide
Po 9.400 *1.000 polonium
Pr 6.780 *1.000 praseodymium
Pr2O3 6.880 *1.000 praseodymium oxide
Pt 21.400 0.245 platinum
PtO2 10.200 *1.000 platinum oxide
Ra 5.000 *1.000 radium
Rb 1.530 2.540 rubidium
PN 074-511-P1D
RbI 3.550 *1.000 rubidium iodide
Re 21.040 0.150 rhenium
Rh 12.410 0.210 rhodium
Ru 12.362 0.182 ruthenium
S8 2.070 2.290 sulfur
Sb 6.620 0.768 antimony
Sb2O3 5.200 *1.000 antimony trioxide
Sb2S3 4.640 *1.000 antimony trisulfide
Sc 3.000 0.910 scandium
Sc2O3 3.860 *1.000 scandium oxide
Se 4.810 0.864 selenium


Si 2.320 0.712 silicon
Si3N4 3.440 *1.000 silicon nitride
SiC 3.220 *1.000 silicon carbide
SiO 2.130 0.870 silicon (ii) oxide
SiO2 2.648 1.000 silicon dioxide
Sm 7.540 0.890 samarium
Sm2O3 7.430 *1.000 samarium oxide
Sn 7.300 0.724 tin
SnO2 6.950 *1.000 tin oxide
SnS 5.080 *1.000 tin sulfide
SnSe 6.180 *1.000 tin selenide
SnTe 6.440 *1.000 tin telluride
Sr 2.600 *1.000 strontium
SrF2 4.277 0.727 strontium fluoride
SrO 4.990 0.517 strontium oxide
Ta 16.600 0.262 tantalum
Ta2O5 8.200 0.300 tantalum (v) oxide
TaB2 11.150 *1.000 tantalum boride
TaC 13.900 *1.000 tantalum carbide
TaN 16.300 *1.000 tantalum nitride
Tb 8.270 0.660 terbium
Tc 11.500 *1.000 technetium
PN 074-511-P1D
Te 6.250 0.900 tellurium

TeO2 5.990 0.862 tellurium oxide
Th 11.694 0.484 thorium
ThF4 6.320 *1.000 thorium (iv) fluoride
ThO2 9.860 0.284 thorium dioxide
ThOF2 9.100 *1.000 thorium oxyfluoride
Ti 4.500 0.628 titanium
Ti203 4.600 *1.000 titanium sesquioxide
TiB2 4.500 *1.000 titanium boride
TiC 4.930 *1.000 titanium carbide
TiN 5.430 *1.000 titanium nitride


TiO 4.900 *1.000 titanium oxide
TiO2 4.260 0.400 titanium (iv) oxide
TI 11.850 1.550 thallium
TIBr 7.560 *1.000 thallium bromide
TICI 7.000 *1.000 thallium chloride
TII 7.090 *1.000 thallium iodide (b)
U 19.050 0.238 uranium
U 3O 8 8.300 *1.000 tri uranium octoxide
U 4O 9 10.969 0.348 uranium oxide
UO2 10.970 0.286 uranium dioxide
V 5.960 0.530 vanadium
V 2O 5 3.360 *1.000 vanadium pentoxide
VB2 5.100 *1.000 vanadium boride
VC 5.770 *1.000 vanadium carbide
VN 6.130 *1.000 vanadium nitride
VO2 4.340 *1.000 vanadium dioxide
W 19.300 0.163 tungsten
WB2 10.770 *1.000 tungsten boride
WC 15.600 0.151 tungsten carbide
WO3 7.160 *1.000 tungsten trioxide
WS2 7.500 *1.000 tungsten disulfide
WSi2 9.400 *1.000 tungsten silicide
PN 074-511-P1D
Y 4.340 0.835 yttrium
Y 20 3 5.010 *1.000 yttrium oxide
Yb 6.980 1.130 ytterbium
Yb2O3 9.170 *1.000 ytterbium oxide
Zn 7.040 0.514 zinc
Zn3Sb2 6.300 *1.000 zinc antimonide
ZnF2 4.950 *1.000 zinc fluoride
ZnO 5.610 0.556 zinc oxide
ZnS 4.090 0.775 zinc sulfide
ZnSe 5.260 0.722 zinc selenide
ZnTe 6.340 0.770 zinc telluride


Zr 6.490 0.600 zirconium
ZrB2 6.080 *1.000 zirconium boride
ZrC 6.730 0.264 zirconium carbide
ZrN 7.090 *1.000 zirconium nitride
ZrO2 5.600 *1.000 zirconium oxide
PN 074-511-P1D

PN 074-511-P1D
A - 10 PRELIMINARY 4/28/15

Multi-Film Rate/Thickness Monitor: O P E R A T I N G M A N U A L

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Cover Page

INFICON® is a trademark of INFICON Inc.

SQM-160™ and INFICON® are trademarks of INFICON GmbH.

Java® is a registered trademarks of Oracle and/or its affiliates.

Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.

1.4.5 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

2.1.2 Ground Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

5.3.3 Calculating the CRC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

SQM-160™ uses proven INFICON® quartz crystal sensor technology to measure

1.1.1 Related Manuals

1.2 Instrument Safety

Failure to heed these messages could result in damage

WARNING - Risk Of Electric Shock

Dangerous voltages which could result in personal injury

1.2.2 General Safety Information

Do not open the SQM-160 case. Refer all maintenance to

There are no user-serviceable components within the

SQM-160 contains delicate circuitry, susceptible to

Refer all maintenance to qualified personnel.

1.2.3 Earth Ground

Never interrupt the protective earth circuit.

This symbol indicates where the protective earth ground

Never unscrew or loosen this connection.

Disconnecting the protective earth terminal or

1.3 How To Contact INFICON

1.3.1 Returning SQM-160

Measurement Interval. . . . . . . . . . . . 0.10 to 2.0 s (adjustable)

1.4.2 Film Parameters

1.4.3 System Parameters

1.4.4 Digital I/O

1.4.5 General Specifications

for transient overvoltages

1.5 Unpacking and Inspection

1.6 Configurations and Accessories

1.6.2.2 Rack Mounting Options

2.1 Installation Requirements

To maintain proper SQM-160 performance, use only

The in-vacuum cable (Front Load and Sputtering

2.1.2 Ground Requirements

2.1.3 Establishing Earth Ground

WARNING - Risk Of Electric Shock

Follow local electrical regulations and codes.

2.2 Rack Mounting Procedure

2.2.1 Full Rack Extender

Small flat head screws

2 Install Hex Shoulder Screws

Figure 2-4 Installing hex shoulder screws - overall view

3 Attach the Extender

4 Install the Rack Mount Ears

Flat head screws

Figure 2-7 Full Rack Extender final assembly

2.2.2 Rack Adapter

2 Install the Rear Mount Couplers

Pan head screws

3 Install the Rack Mount Ears

Flat head screws

Figure 2-11 Rack Adapter final assembly

2.3 Rear Panel Interfaces

RS-232 USB/Ethernet Option Card