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Comparison Between Selected Equivalent of Fs 209E and Iso 14644-1

The document compares clean room standards between ISO 14644-1 and FS 209E. ISO 14644-1 defines 8 classes (ISO 1-8) based on the maximum number of particles per cubic meter that are 0.1, 0.2, and 0.3 microns in size. FS 209E defines 6 classes (Class 1-Class 100,000) based on the maximum number of particles per cubic foot that are 0.5 microns or larger. The two systems are generally equivalent, with ISO 7 comparable to FS 209E Class 10,000.

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Phillip Nguyen
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56 views6 pages

Comparison Between Selected Equivalent of Fs 209E and Iso 14644-1

The document compares clean room standards between ISO 14644-1 and FS 209E. ISO 14644-1 defines 8 classes (ISO 1-8) based on the maximum number of particles per cubic meter that are 0.1, 0.2, and 0.3 microns in size. FS 209E defines 6 classes (Class 1-Class 100,000) based on the maximum number of particles per cubic foot that are 0.5 microns or larger. The two systems are generally equivalent, with ISO 7 comparable to FS 209E Class 10,000.

Uploaded by

Phillip Nguyen
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© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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COMPARISON BETWEEN SELECTED EQUIVALENT OF FS 209E AND ISO 14644-1

ISO 14644-1

ISO 3

ISO 4

ISO 5

ISO 6

ISO 7

ISO 8
CTED EQUIVALENT OF FS 209E AND ISO 14644-1

FS 209E

Class 1

Class 10

Class 100

Class 1,000

Class 10,000

Class 100,000
ISO 14644-1 CLEAN ROOM STANDARDS A

ISO Class Maximum Particles/m3

≥0.1µm ≥0.2µm ≥0.3µm

ISO 1 10 2

ISO 2 100 24 10

ISO 3 1,000 237 102

ISO 4 10,000 2,370 1,020

ISO 5 100,000 23,700 1,020

ISO 6 1,000,000 237,000 102,000

ISO 7

ISO 8

ISO 9

** Old FS 209E classes were calculated in cubic feet of air, whereas ISO classes are in cubic meter of air

HOW TO READ THE CLEAN ROOM CLASSIFIC


Maximum Particles/m3
ISO Class
≥0.1µm ≥0.2µm ≥0.3µm
ISO 7

For ISO 7, particles smaller than 0.5 microns (≥0.1 µm, ≥0.2 µm, ≥0.3 µm) are not taken into consideration
particles of 1 micron and above 83,200 or lower and for particles of 5 microns and above 2,930 or lower

CLEAN ROOM CLASSIFICATION AND AIR CHANGES PER HOUR


Air cleanliness is achieved by passing the air through HEPA filters. The more often the air passes through the HEPA filters, the f
AIR CHANGES PER HOUR ACCORDING TO THE ISO CLASS
ISO Class
Average number of air changes per hour
ISO 5 240–360 (unidirectional airflow)
ISO 6 90–180
ISO 7 30–60
ISO 8 10–25
Conventional building 2–4
OOM STANDARDS AND THE FS 209E EQUIVALENT

aximum Particles/m3 Particles/ft3

≥0.5µm ≥1µm ≥5µm ≥0.5µm

35 8 1

352 83 10

352 832 29 100

35,200 8,320 293 1,000

352,000 83,200 2,930 10,000

3,520,000 832,000 29,300 100,000

35,200,000 8,320,000 293,000

ses are in cubic meter of air.

N ROOM CLASSIFICATION PARTICLE COUNT GRAPH


aximum Particles/m3 Particles/ft3
≥0.5µm ≥1µm ≥5µm ≥0.5µm
352,000 83,200 2,930 10,000

e not taken into consideration. The concentration of particles of ≥0.5 µm and above should be below 352,000, for
and above 2,930 or lower

ES PER HOUR
sses through the HEPA filters, the fewer particles are left in the room air.  The volume of air filtered in one hour divided by the volume of t
FS 209E Equivalent

Class 1

Class 10

Class 100

Class 1,000

Class 10,000

Class 100,000

FS 209E Equivalent

Class 10,000

ld be below 352,000, for

e hour divided by the volume of the room gives the number of air changes per hour.

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