Microscope Components For Re Ected Light Applications
Microscope Components For Re Ected Light Applications
Microscope Components
for Reflected Light Applications
Select a Nikon microscope unit
for your manufacturing equipment
and other systems that require high precision
The development, manufacture, and evaluation of products require sub-micron precision,
as symbolized by semiconductor manufacturing technology.
Nikon's microscope units support such high precision and can be integrated with a variety of equipment.
This brochure presents technical data on using Nikon's microscope units.
#ONTENTS
L-IM Modular Focusing Unit 4 Revolving Nosepieces 17
LV-IM IM Modules 6 CF&IC Objectives 18-21
LV-FM FM Modules 7 Compact Reflected Microscopes CM Series 22-24
LVDIA-N DIA Base N 8 Objectives for Measuring microscopes 24
LV-ARM Basic Arm 9 2nd Objective Lens Units 25
LV-ECON E Controller 9 Filters 26
CFI60-2 / CFI60 Objectives 10-14 Eyepiece Tubes 27
LV-UEPI-N Universal Epi-Illuminator 14 Double Port 27
LV-UEPI2 Universal Epi-Illuminator 2 15 Straight Tubes 27
LV-UEPI2A Motorized Universal Epi-Illuminator 2 15 Eyepiece Lenses 28-29
TI-PS100W/A Power Supply 16 CCTV Camera Adapters 30
LV-EPILED White LED Illuminator 16 Glossary 31
CFI60-2/CFI60
Optical System
(for modular
focusing unit)
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• Attachment of the LV-UEPI-N Universal Epi-illuminator enables the use
of brightfield, darkfield and Nomarski DIC techniques.
• The built-in balancer ensures smoother vertical motion, even when
the arm is heavily loaded.
• The standard maximum load is 4kg, which is expandable to 10 kg
by adding a balancer.
• A coarse motion stroke of 5.2 mm per revolution improves the
equipment's load handling capability and increases durability.
• The distance from the optical axis to the mounting surface is 141 mm.
Note: For adding a balancer, consult your Nikon representative.
L-IM Modular Focusing Unit
MBD64010 / 2000 g
Stroke 30 mm
Scale 1 μm
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MBD64070 / 4000 g
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Stroke 30 mm
Coarse focusing 5.2 mm/rotation
Fine Focusing 0.1 mm/rotation
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• Only the bottom mounting surface is supported.
• 20 mm vertical stroke.
• Enables an enhanced system with motorized up/down mechanism
when combined with the LVDIA-N DIA Base N.
• External control is possible via the LV-ECON E Controller.
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• Only the bottom mounting surface is supported.
• 30 mm vertical stroke.
• Creates a system with revolving up/down mechanism that has an
ultra-long vertical stroke of 68 mm when combined with the
LVDIA-N DIA Base N.
Optimal for operations such as semiconductor probe inspections.
• The standard maximum permissible weight is 3-6 kg, which is
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LV-ARM Basic Arm MBD65030 / 1400 g
Unit: mm
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%#/. % #ONTROLLER
4HIS CONTROLLER ENABLES EXTERNAL CONTROL OF VARIOUS UNITS FROM A 0# AND OTHER DEVICES
• Enables external control of motorized universal reflection illuminators and various light sources, universal motorized revolvers,
and motorized focusing modules from a PC or other devices.
• Communication with PC possible via USB.
• Max. 11˚ inclination when using tilt (unit's feet).
Unit: mm
#&) 4 0LAN %0)#&) 45 0LAN &LUOR %0)#&) , 0LAN %0)
"RIGHTlELD /BJECTIVES
#&) #&) OBJECTIVES FOR BRIGHTlELD USE .OMARSKI $)# IS ALSO POSSIBLE WITH THE 45 TYPE
CFI TU Plan Fluor CFI TU Plan Fluor CFI TU Plan Fluor CFI TU Plan Fluor CFI TU Plan Fluor
EPI 5× EPI 10× EPI 20× EPI 50× EPI 100×
CFI T Plan EPI 1× CFI T Plan EPI 2.5× CFI L Plan EPI 2.5×A CFI L Plan EPI 40×
Unit: mm
Code No. CFI 60-2/CFI 60 Objectives Widefield CFI eyepieces Ultra-Widefield CFI eyepieces
CFI 10× (F.N. 22) CFI UW10× (F.N. 25)
Objectives (Magnifications) NA WD (mm) Focal length Physical depth
(mm) of focus (μm)
Weight
(g)
Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of
cation (M) of view (ømm) focus (μm) cation (M) of view (ømm) focus (μm)
MUE12050 CFI TU Plan Fluor EPI 5× 0.150 23.5 40 12.22 115.0 50× 4.40 31.27 50× 5.000 31.27
MUE12100 CFI TU Plan Fluor EPI 10× 0.300 17.5 20 3.06 120.0 100× 2.20 7.82 100× 2.500 7.82
MUE12200 CFI TU Plan Fluor EPI 20× 0.450 4.5 10 1.36 125.0 200× 1.10 2.95 200× 1.250 2.95
MUE12500 CFI TU Plan Fluor EPI 50× 0.800 1.0 4 0.43 150.0 500× 0.44 0.79 500× 0.500 0.79
MUE12900 CFI TU Plan Fluor EPI 100× 0.900 1.0 2 0.34 150.0 1000× 0.22 0.50 1000× 0.250 0.50
MUE12010 CFI T Plan EPI 1× 0.030 3.8 200 305.56 165.0 10× 22.00 781.75 10× 25.000 781.75
MUE12030 CFI T Plan EPI 2.5× 0.075 6.5 80 48.89 140.0 25× 8.80 125.08 25× 10.000 125.08
MUE00031 CFI L Plan EPI 2.5×A 0.075 8.8 80 48.89 167.5 25× 8.80 125.08 25× 10.000 125.08
MUE00400 CFI L Plan EPI 40× 0.650 1.0 5 0.65 200.0 400× 0.55 0.65 400× 0.625 0.65
,5 .OSEPIECE !DAPTER -
!DAPTER FOR ATTACHING AN %0) 0LAN OBJECTIVE TO A BRIGHTlELD
LU Nosepiece
NOSEPIECE OR UNIVERSAL NOSEPIECE Adapter M32-25
MXA23017 / 25 g Unit: mm
,ONG 7ORKING $ISTANCE /BJECTIVES
#&) 45 0LAN %0) %,7$ FOR "RIGHTlELD.OMARSKI $)# 5SE
$RAMATICALLY EXTENDED WORKING DISTANCES FACILITATE OBSERVATIONS OF SAMPLES HAVING IRREGULAR
SURFACES 7ORKING DISTANCES HAVE BEEN EXTENDED SIGNIlCANTLY
CFI TU Plan EPI ELWD 20× CFI TU Plan EPI ELWD 50× CFI TU Plan EPI ELWD 100×
Unit: mm
Code No. CFI 60-2/CFI 60 Objectives Widefield CFI eyepieces Ultra-Widefield CFI eyepieces
CFI 10× (F.N. 22) CFI UW10× (F.N. 25)
Objectives (Magnifications) NA WD (mm) Focal length Physical depth
(mm) of focus (μm)
Weight
(g)
Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of
cation (M) of view (ømm) focus (μm) cation (M) of view (ømm) focus (μm)
MUE21200 CFI TU Plan EPI ELWD 20× 0.4 19.0 10 1.72 135 200× 1.10 3.50 200× 1.25 3.50
MUE21500 CFI TU Plan EPI ELWD 50× 0.6 11.0 4 0.76 130 500× 0.44 1.24 500× 0.50 1.24
MUE21900 CFI TU Plan EPI ELWD 100× 0.8 4.5 2 0.43 155 1000× 0.22 0.61 1000× 0.25 0.61
5LTRA
LONG 7ORKING $ISTANCE /BJECTIVES
#&) 4 0LAN %0) 3,7$ FOR "RIGHTlELD 5SE
5LTRA
LONG WORKING DISTANCES
0ARTICULARLY USEFUL WHEN OBSERVING THE BOTTOM OF A DEPRESSION IN THE SAMPLE
7ORKING DISTANCES HAVE BEEN EXTENDED SIGNIlCANTLY
CFI T Plan EPI SLWD 10× CFI T Plan EPI SLWD 20× CFI T Plan EPI SLWD 50× CFI T Plan EPI SLWD 100×
Unit: mm
Code No. CFI 60-2/CFI 60 Objectives Widefield CFI eyepieces Ultra-Widefield CFI eyepieces
CFI 10× (F.N. 22) CFI UW10× (F.N. 25)
Objectives (Magnifications) NA WD (mm) Focal length Physical depth
(mm) of focus (μm)
Weight
(g)
Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of
cation (M) of view (ømm) focus (μm) cation (M) of view (ømm) focus (μm)
MUE31100 CFI T Plan EPI SLWD 10× 0.2 37 20 6.88 80 100× 2.20 14.02 100× 2.50 14.02
MUE31200 CFI T Plan EPI SLWD 20× 0.3 30 10 3.06 115 200× 1.10 5.44 200× 1.25 5.44
MUE31500 CFI T Plan EPI SLWD 50× 0.4 22 4 1.72 120 500× 0.44 2.43 500× 0.50 2.43
MUE31900 CFI T Plan EPI SLWD 100× 0.6 10 2 0.76 135 1000× 0.22 1.00 1000× 0.25 1.00
#&) 45 0LAN &LUOR "$ "RIGHTlELD$ARKlELD.OMARSKI $)# /BJECTIVES
CFI TU Plan Fluor CFI TU Plan Fluor CFI TU Plan Fluor CFI TU Plan Fluor CFI TU Plan Fluor
BD 5× BD 10× BD 20× BD 50× BD 100×
Unit: mm
Code No. CFI 60-2/CFI 60 Objectives Widefield CFI eyepieces Ultra-Widefield CFI eyepieces
CFI 10× (F.N. 22) CFI UW10× (F.N. 25)
Objectives (Magnifications) NA WD (mm) Focal length Physical depth
(mm) of focus (μm)
Weight
(g)
Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of
cation (M) of view (ømm) focus (μm) cation (M) of view (ømm) focus (μm)
MUE42050 CFI TU Plan Fluor BD 5× 0.15 18.0 40 12.22 150 50× 4.40 31.27 50× 5.00 31.27
MUE42100 CFI TU Plan Fluor BD 10× 0.30 15.0 20 3.06 140 100× 2.20 7.82 100× 2.50 7.82
MUE42200 CFI TU Plan Fluor BD 20× 0.45 4.5 10 1.36 185 200× 1.10 2.95 200× 1.25 2.95
MUE42500 CFI TU Plan Fluor BD 50× 0.80 1.0 4 0.43 200 500× 0.44 0.79 500× 0.50 0.79
MUE42900 CFI TU Plan Fluor BD 100× 0.90 1.0 2 0.34 200 1000× 0.22 0.50 1000× 0.25 0.50
,ONG 7ORKING $ISTANCE /BJECTIVES
#&) 45 0LAN "$ %,7$ FOR "RIGHTlELD$ARKlELD.OMARSKI $)# 5SE
%XTENDED WORKING DISTANCES FACILITATE OBSERVATIONS OF SAMPLES HAVING IRREGULAR SURFACES
CFI TU Plan EPI ELWD 20× CFI TU Plan EPI ELWD 50× CFI TU Plan EPI ELWD 100×
Unit: mm
Code No. CFI 60-2/CFI 60 Objectives Widefield CFI eyepieces Ultra-Widefield CFI eyepieces
CFI 10× (F.N. 22) CFI UW10× (F.N. 25)
Objectives (Magnifications) NA WD (mm) Focal length Physical depth
(mm) of focus (μm)
Weight
(g)
Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of
cation (M) of view (ømm) focus (μm) cation (M) of view (ømm) focus (μm)
MUE61200 CFI TU Plan BD ELWD 20× 0.4 19.0 10 1.72 155 200× 1.10 3.50 200× 1.25 3.50
MUE61500 CFI TU Plan BD ELWD 50× 0.6 11.0 4 0.76 180 500× 0.44 1.24 500× 0.50 1.24
MUE61900 CFI TU Plan BD ELWD 100× 0.8 4.5 2 0.43 205 1000× 0.22 0.61 1000× 0.25 0.61
#&) 45 0LAN !PO %0)#&) 45 0LAN !PO "$
#&) ,5 0LAN !PO %0)#&) ,5 0LAN !PO "$
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2ESOLUTION /BJECTIVES FOR "RIGHTlELD OR FOR $ARKlELD"RIGHTlELD
!POCHROMAT
TYPE OBJECTIVES VIRTUALLY ELIMINATE CHROMATIC ABERRATION AND FEATURE EXCELLENT
RESOLUTION .OMARSKI $)# IS ALSO POSSIBLE WITH THE 45,5 TYPE
CFI TU Plan Apo CFI TU Plan Apo CFI TU Plan Apo CFI TU Plan Apo CFI TU Plan Apo
EPI 50× EPI 100× EPI 150× BD 50× BD 100×
CFI TU Plan Apo CFI LU Plan Apo CFI LU Plan Apo CFI LU Plan Apo
BD 150× EPI 150×A BD 100×* BD 150×A*
Unit: mm
Code No. CFI 60-2/CFI 60 Objectives Widefield CFI eyepieces Ultra-Widefield CFI eyepieces
CFI 10× (F.N. 22) CFI UW10× (F.N. 25)
Objectives (Magnifications) NA WD (mm) Focal length Physical depth
(mm) of focus (μm)
Weight
(g)
Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of
cation (M) of view (ømm) focus (μm) cation (M) of view (ømm) focus (μm)
MUC11500 CFI TU Plan Apo EPI 50× 0.80 2.00 4.00 0.43 150.0 500× 0.44 0.79 500× 0.50 0.79
MUC11900 CFI TU Plan Apo EPI 100× 0.90 2.00 2.00 0.34 175.0 1000× 0.22 0.50 1000× 0.25 0.50
MUC11150 CFI TU Plan Apo EPI 150× 0.90 1.50 1.33 0.34 160.0 1500× 0.15 0.45 1500× 0.17 0.45
MUC41500 CFI TU Plan Apo BD 50× 0.80 2.00 4.00 0.43 190.0 500× 0.44 0.79 500× 0.50 0.79
MUC41900 CFI TU Plan Apo BD 100× 0.90 2.00 2.00 0.34 220.0 1000× 0.22 0.50 1000× 0.25 0.50
MUC41150 CFI TU Plan Apo BD 150× 0.90 1.50 1.33 0.34 220.0 1500× 0.15 0.45 1500× 0.17 0.45
MUC10151 CFI LU Plan Apo EPI 150×A 0.95 0.30 1.33 0.30 217.5 1500× 0.15 0.40 1500× 0.17 0.40
MUC40900* CFI LU Plan Apo BD 100× 0.90 0.51 2.00 0.34 325.0 1000× 0.22 0.50 1000× 0.25 0.50
MUC50151* CFI LU Plan Apo BD 150×A 0.90 0.42 1.33 0.34 305.0 1500× 0.15 0.45 1500× 0.17 0.45
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#&) , 0LAN %0) #2 /BJECTIVES FOR ,#$ )NSPECTION
4HE #&) , 0LAN %0) #2 SERIES EMPLOYS A CORRECTION SYSTEM TO COPE WITH THE THINNER COVERGLASS
FOR &$0 AND THE INCREASED INTEGRATION AND MOUNTING DENSITY OF DEVICES
CFI L Plan EPI 20×CR CFI L Plan EPI 50×CR CFI L Plan EPI 100×CRA CFI L Plan EPI 100×CRB
Unit: mm
Code No. CFI 60-2/CFI 60 Objectives Widefield CFI eyepieces Ultra-Widefield CFI eyepieces
CFI 10× (F.N. 22) CFI UW10× (F.N. 25)
Objectives (Magnifications) NA WD (mm) Focal length Physical depth
(mm) of focus (μm)
Weight
(g)
Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of
cation (M) of view (ømm) focus (μm) cation (M) of view (ømm) focus (μm)
MUE35200 CFI L Plan EPI 20×CR 0.45 10.9~10.0 10.00 1.36 240 200× 1.10 2.95 200× 1.25 2.95
MUE35500 CFI L Plan EPI 50×CR 0.70 3.9~3.0 4.00 0.56 240 500× 0.44 0.97 500× 0.50 0.97
MUE35900 CFI L Plan EPI 100×CRA 0.85 1.2~0.85 2.00 0.38 260 1000× 0.22 0.55 1000× 0.25 0.55
MUE35910 CFI L Plan EPI 100×CRB 0.85 1.3~0.95 2.00 0.38 260 1000× 0.22 0.55 1000× 0.25 0.55
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Configured with LV-LL LED Lamphouse Configured with LV-LH50PC Precentered Lamphouse
Unit: mm
Universal Epi-Illuminator LV-UEPI-N/MBE60201 Code No. Items Weight (g)
Field diaphragm Centerable and synchronized with B/D changeover MBE65700 LV-LL LED Lamphouse 600
Aperture diaphragm Synchronized with B/D changeover MBE65275 LV-LH50PC Precentered Lamphouse 800
MBN66750 YM-NCB ø25 mm Filter Slider NCB11 31
Illumination 12V-50W high-intensity halogen lamp illuminator
MBN66760 YM-ND ø25 mm Filter Slider ND4/ND16 36
Filter 4x ø25 mm filters (NCB11, ND4, ND16), a polarizer/analyzer,
MXA23045 LV-HL50W 12V50W Halogen Lamp 7
ESD supported
MBN66923 LV-PO Polarizer 60
Weight 1,750 g
MBN66922 L-AN Anaryzer 14
MBP60170 L-DIC DIC Slider 120
MBN66730 YM-GIF ø25 mm GIF Filter 25
MXA29002 YM-EPI 3-3PIN Extension Cable 100
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• Equipped with advanced optics suitable for a wide variety of observation methods, ranging from brightfield,
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• Automatically maintains optimal illumination conditions for the field/aperture diaphragms, shutter, and UV cut filters.
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Configured with LV-LL LED Lamphouse Configured with LV-LH50PC Precentered Lamphouse Unit: mm
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diaphragm and the control of the voltage.
• Aperture diaphragm is automatically optimized with the objective lens and illumination technique. Can be changed
manually depending on sample and purpose.
• External control also possible from a PC when combined with the LV-ECON E Controller.
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Configured with LV-LL LED Lamphouse Configured with LV-LH50PC Precentered Lamphouse Unit: mm
Code No. Items Weight (g) Code No. Items Weight (g)
MBE65275 LV-LH50PC Precentered Lamphouse 800 MBE65700 LV-LL LED Lamphouse 600
MBN66750 YM-NCB ø25 mm Filter Slider NCB11 31 MBE42101 C-FL V-2A Filter Cube 40
MBN66760 YM-ND ø25 mm Filter Slider ND4/ND16 36 MBE43101 C-FL BV-2A Filter Cube 40
MXA23045 LV-HL50W 12V-50W Halogen Lamp 7 MBE44501 C-FL B-2A Filter Cube 40
MBN66923 LV-PO Polarizer 60 MBE45501 C-FL G-2A Filter Cube 40
MBN66925 LV-FLAN FL Analyzer 20 MBE64100 LV-PAB Polarizer/Analyzer Cube 45
MBN66924 LV-LP ǂPlate 15 MBN66730 YM-GIF ø25 mm GIF Filter 25
MBE41201 C-FL UV-2A 40 MXA29002 YM-EPI 3-3PIN Extension Cable 100
MBP60170 L-DIC DIC Slider 120
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Unit: mm
TI-PS100W/A Power Supply MEF52251 / 2000 g
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• Light-weight, compact white LED illuminator developed specially for brightfield observation.
• Operated via an attached power source controller.
• Can also be externally controlled via the LV-ECON E controller.
• Includes ND4 and ND16 filters.
• Standard cable length : 2.8 m
Unit: mm
2EVOLVING .OSEPIECES
%IGHT TYPES OF NOSEPIECES n EITHER MANUAL OR MOTORIZED n ARE AVAILABLE TO CHOOSE FROM
C-N6 ESD Sextuple Nosepiece LV-NBD5 BD Quintuple Nosepiece ESD LV-NU5 Universal Quintuple Nosepiece ESD
MBP71316 / 450 g MBP60125 / 580 g MBP60115 / 580 g
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LV-NU5A Motorized Universal Quintuple Nosepiece ESD LV-NU5AC Motorized Universal Quintuple Nosepiece LV-NU5AI Motorized Universal Quintuple Nosepiece
MBP60105 / 800 g MBP60106 / 800 g MBP60107 / 890 g
LV-NU5I Intellijent Universal Quintuple Nosepiece ESD P-N Centering Quintuple Nosepiece LV-NCNT-N Motorized Nosepiece Controller
MBP60108 / 600 g MDP44205 / 600 g MBF65331 / 400 g
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Unit: mm
Code No. Items Weight (g)
MBF11250 Power Cord BJ 160
MQF52056 3-AC AC Adapter 200
CF&IC Optical System
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