Mercury II™ 5000 Series Encoders

High Performance Encoders with Digital Output

RoHS

Mercury II: The N xt Generation

High Resolution Digital Output/Serial Word Directly From the Sensor

MicroE Systems revolutionized encoder technology with the original

Mercury™ series. Smaller, faster, and smarter than anything before,
it set the standard for innovation. Now Mercury II, MicroE Systems
newest series of reflective incremental encoders, takes another giant
step forward by giving you “best-in-class” performance, unparalleled
versatility, superior robustness, and unmatched ease of use. You get
all of this from a single encoder system.

Specifications
Resolution Linear: 5µm to 1.22nm
Rotary: 20k to 268M CPR*
Linearity Tape Scale: ≤ ± 5µm/m**
Accuracy Glass Scales:
Linear: ± 1µm available
The new Mercury II 5000 (MII5000) Series Encoders represents a ± 1.5µm to ± 5µm standard
breakthrough in performance, offering class-leading resolution and Rotary: Up to ± 2.1 arc-sec
accuracy, digital output from the sensor, the smallest sensor size, Outputs A-quad-B, Index Pulse, and Dual Limits
unmatched versatility, robustness, smart programmable features, (MII5500/5700/5800)
High Speed Serial Word in SPI format
and easy installation.
(MII5800Si/Pa)
Scales Same Sensor for Tape or Glass, Linear or
Rotary
* More is possible with custom diameter grating
System Features at a Glance **Over any one meter of travel after slope correction in customer’s
controller
 Mercury II 5000 Series Encoders consists of:
▪ MII5500/5700/5800 - A-quad-B Outputs  Broadest alignment tolerances and pushbutton setup with LEDs
▪ MII5800Si/Pa (Pa - Panasonic) - High Speed Serial Interfaces  Differential outputs for high reliability in high EMI environments
 Serial interface for Panasonic MINAS A4 and A5 series servo  Software for setup, programmable features, and diagnostics
drives (for use with linear axes)  RoHS and CE compliant
 High-resolution interpolated digital output directly from the
Optional Features
sensor; resolution from 5µm to 1.2mm
 Tape scale length - up to 30m per
 Small sensor - 11mm tall sensor fits tight spaces dispenser
 Faster - up to 5m/s at 0.1µm resolution (MII5000). Up to 10 m/s  Glass scale length or diameter: linear
at 1.2nm resolution (MII5800Si/Pa) lengths from 10mm to 1m or custom
 Smarter - programmable filter and other features sizes. Rotary diameters from 44mm to
121mm or custom sizes
 Cut-to-length Marker and Laser tape scale come in dispensers
up to 30m  Sensor cable length of 1m,
3m, 5m, or custom length
 Linear glass scales for high accuracy
up to 10m
 Stick-on optical index and left/right limits
 SmartPrecision™ II
 Bi-directional optical index is repeatable to 1LSB Software
 Low power consumption

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

Optional Equipment
System Configurations
Standard and Optional Equipment
Standard Equipment

Encoder Sensor
Same sensor for linear tape, linear
glass, or rotary glass scales. All
electronics, including interpolation, are
in the sensor. SmartPrecision II™ Software
The software performs setup and diagnostics,
includes displays for encoder output, multiple data
Sensor Cable plots, and is used for programmable functions. It is
The standard high flex life cable is built into the ATMII5000 Alignment Tool; use is
double shielded and available in lengths optional. See Page 12 for details. Requires
of 1m, 3m, 5m, or custom. Ethernet cable.

Installation Accessories
Connector
RS-422 compliant
15-pin standard D-
sub connector.

Tape Scale Applicator Tool

SmartPrecision™ Alignment Tool for Setup - ATMII5000

 Provides fast and easy sensor alignment, index setup, and

limit setup.
 Status and setup LEDs: red/yellow/green signal strength
LEDs assist during setup and provide diagnostics at a
glance; status LEDs for both limits; power-indicating LED.
 Includes AC/DC power supply (not shown).
 Use pushbutton or software for setup.
 Built-in SmartPrecision II Software for setup and diagnostics; Tape Scale Shears
only a web browser is needed (use of software is optional).
 Ethernet software connectivity supports remote connection
to the Alignment Tool and MII5000 Series Encoders and
multiple encoders/computers.

Note: Alignment tool and software not for use in servo control.

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

System Features at a Glance

The Mercury II 5000 Series Encoder is built on the field-proven Mercury technology platform. Known for being smaller,
smarter, and faster, Mercury II builds on the original Mercury series and adds increased performance, versatility, robustness, and ease-of-use.

Mercury II 5000 Series Encoder features include:

 Small, low-mass sensor with ultra-low Z-height fits in compact
motion systems.
 All electronics are in the sensor for maximum space savings,
system reliability and ease of integration; a variety of connector
options are possible, including use of your own connector.
 Superior resolution and accuracy - resolutions up to 1.2nm
(linear), 268M CPR (rotary); cyclic error of ± 20nm typical (linear
glass scales); long range accuracy up to ± 1µm (linear glass
scales up to 130mm long).
 High-speed operation - 5m/s at 0.1µm resolution (Quadrature  Adhesive-mount laser tape scale supplied in
Output); 10m/s at 1.2nm resolution (Serial Output). continuous lengths for cut-to-length
convenience and inventory savings; mounts on
virtually any surface - metals, granite, glass,
composites, or ceramics.
 Stick-on optical index and limit markers can be
placed anywhere required, are easy to apply,
and require no adjustment; markers work on both laser tape
and linear glass scales.
 Convenient tape scale applicator tool ensures consistency and
speedy installation.
 Low power consumption: only 180mA with A, B, I, LL, and RL
outputs terminated for quad output, and only 172mA system
total with all outputs terminated for serial output.
 Robustness features include all differential digital outputs, all
digital signals from the sensor, and double-shielded cabling for
superior EMI/RFI immunity; scale contamination resistance
 Versatility - one sensor works with tape or glass scales, linear ensures encoder operation even with fingerprints, oil, dust and
or rotary. other forms of contamination.
 Broad sensor alignment tolerances and the alignment tool’s  Fail-safe dual optical limits have differential outputs (LVTTL)
built-in red/yellow/green setup LEDs and pushbutton setup, and reduce motion system cabling; limit markers fit right on the
make setup fast and eliminate ancillary setup instruments. 6mm wide tape scale for maximum space savings.
 Included software makes setup and diagnostics easy; Ethernet
connectivity allows you to
use any computer.

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

Smallest Sensor, Lowest System Height, Smallest Tape Scale System, Broader Alignment
Tolerances, and More
Why Mercury II Encoders make it Easier to Design High Performance into Your Equipment
Smallest Tape Scale System
Mercury II Can Reduce System Size and Cost
Mercury II 5000 Series Encoder system height with tape scale is 22% shorter than competitive
encoders with digital output from the sensor, making it easier to fit into your design. This reduction
can also cut motion system weight and cost by allowing the use of smaller motors and stages.
Mercury II 5000 optical index and limit markers are placed within the 6mm width of the tape scale,
saving even more space by eliminating external index and limit magnets

Lowest System Height

Mercury II 5000
Mechanical Dimension Comparison*
Mercury II 5000 Mercury II vs.
Brand X Brand Y
with Tape Scale Best Competitor
System height 12.4mm 18.2mm 15.8mm 22% better
Brand X Sensor Z height 11.0mm 12mm 14.8mm 9% better
Standoff tolerance ± 0.15mm ± 0.1mm ± 0.1mm 50% better
Tape scale width** 6.0mm 22.0mm 15.3mm 155% better

Brand Y
*Based on published specifications for encoders with digital output from the sensor.
**Tape scale system width including index and limits.

Eliminate the Frustration of Touchy Encoder Alignment

With Mercury’s patented PurePrecision™ optics, you can push the sensor against your
Theta Z Alignment Tolerance
reference surface, tighten the screws and you’re finished: try that with Brand X or Y.

This performance is possible thanks to relaxed alignment tolerances, particularly in the

theta Z axis. Mercury II offers a ± 2° sweet spot – that’s a 300% improvement over the
best competitive encoder – that will result in dramatic savings in manufacturing costs.

No other commercially available encoder is easier to align, easier to use, or easier to

integrate into your designs.

Alignment Tolerance Comparison*

Brand X Brand Y Mercury II vs. Best
Mercury II **
Competitor
± 0.5° Mercury is 300% better
± 1.0°
± 1.0°
± ° ± ° ± °
*Based on published specifications for encoders with digital output from the sensor.
**Measured at a constant temperature for one axis at a time with all other axes at their
Lowest Power Consumption ideal positions.

The MII5000 Series Encoders use advanced electronics, giving MII5000s the lowest
power consumption of any high-performance digital-output encoder:

 Lowest heat generation/dissipation

 Cost and size savings in the controls/drives
 More system design flexibility

Note

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

Specifications
Resolution and Maximum Speed Tables - Quadrature Output
Mercury II 5000 systems (models 5500/5700/5800) have programmable interpolation from x4 to x16384 in integer steps. Below are tables of sample
values. For applications requiring up to 10m/s at full resolution, use the MII5800Si/Pa with high speed serial interface.

Linear – 20µ Grating Pitch

Maximum
Resolution Maximum Speed* Applicable Mercury II Models
Interpolation
x4 5.000µm/count 10000mm/sec 5500, 5700, 5800
x 10 2.000µm/count 10000mm/sec 5500, 5700, 5800
x 20 1.000µm/count 10000mm/sec 5500, 5700, 5800
x 40 0.500µm/count 10000mm/sec 5500, 5700, 5800
x 80 0.250µm/count 10000mm/sec 5500, 5700, 5800
x 100 0.200µm/count 10000mm/sec 5500, 5700, 5800
x 200 0.100µm/count 5000mm/sec 5500, 5700, 5800
x 400 0.050µm/count 2500mm/sec 5500, 5700, 5800
x 1000 20.0nm/count 1000mm/sec 5700, 5800
x 2000 10.0nm/count 500mm/sec 5700, 5800
x 4000 5.00nm/count 250mm/sec 5700, 5800
x 8000 2.50nm/count 125mm/sec 5800
x 16384 1.22nm/count† 61mm/sec 5800

Note: †Value rounded for readability; use the following formula to calculate the exact resolution in units of µm/count:
20µ
𝑅𝑒𝑠𝑜𝑙𝑢𝑡𝑖𝑜𝑛 =
𝐼𝑛𝑡𝑒𝑟𝑝𝑜𝑙𝑎𝑡𝑖𝑜𝑛 𝑀𝑢𝑙𝑡𝑖𝑝𝑙𝑖𝑒𝑟

Rotary – 20µ Grating Pitch

Interpolation Note: The range of available values is x4 to x16384 in integer steps; sample values below.

Rotary Glass
Fundamental Resolution Interpolation
Scale Diameter
44.45mm 5000 Lines x4 x20 x40 x400 x1000 x4000 x16384
interpolated resolution (CPR) 20000 100000 200000 2000000 5000000 20000000 81920000
interpolated resolution (arc- 64.8 12.96 6.48 0.648 0.259 0.0648 0.01582
sec/count)**
interpolated resolution (µrad/count)** 314 62.8 31.4 3.14 1.257 0.314 0.0767
maximum speed* (RPM) 6000 6000 6000 1500 600 150 36.6
63.50mm 8192 Lines
interpolated resolution (CPR) 32768 163840 327680 3276800 8192000 32768000 134217728
interpolated resolution (arc- 39.6 7.91 3.96 0.396 0.1582 0.0396 0.00966
sec/count)**
interpolated resolution (µrad/count)** 191.7 38.3 19.17 1.917 0.767 0.1917 0.0468
maximum speed* (RPM) 3660 3660 3660 915 366 91.5 22.3
120.65mm 16384 Lines
interpolated resolution (CPR) 65536 327680 655360 6553600 16384000 65536000 268435456
interpolated resolution (arc- 19.78 3.96 1.978 0.1978 0.0791 0.01978 0.00483
sec/count)**
interpolated resolution (µrad/count)** 95.9 19.17 9.59 0.959 0.383 0.0959 0.0234
maximum speed* (RPM) 1830 1830 1830 457 183.1 45.7 11.17
Applicable Mercury II Models 5500, 5700, 5500, 5700, 5500, 5700, 5700, 5700, 5800 5800
5800 5800 5800 5800 5800
Note*: Maximum speed produces an encoder quadrature output of 50 million states per second (12.5MHz). See page 9 for additional output
frequencies. Maximum speeds shown above will be reduced if a lower quadrature output frequency is selected.
Note**: Resolution values shown are approximate. To calculate exact resolution values, convert from CPR (Counts Per Revolution) to the desired
units.
Note: To calculate desired rotary interpolation multiplier, use the following equation:
𝐷𝑒𝑠𝑖𝑟𝑒𝑑 𝑅𝑒𝑠𝑜𝑙𝑢𝑡𝑖𝑜𝑛 (𝐶𝑃𝑅)
𝐼𝑛𝑡𝑒𝑟𝑝𝑜𝑙𝑎𝑡𝑖𝑜𝑛 𝑀𝑢𝑙𝑡𝑖𝑝𝑙𝑖𝑒𝑟 =
𝐹𝑢𝑛𝑑𝑎𝑚𝑒𝑛𝑡𝑎𝑙 𝑆𝑐𝑎𝑙𝑒 𝑅𝑒𝑠𝑜𝑙𝑢𝑡𝑖𝑜𝑛 (𝐿𝑖𝑛𝑒𝑠)

Note: Specifications assume XOR function which is available in all standard controllers.

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

Specifications
Resolution and Maximum Speed Tables - Serial Output
Mercury II 5800Si/Pa systems have programmable interpolation from x4 to x16384 in binary steps. Below is a table of examples. Unlike A-quad-B
encoders, the MII5800Si/Pa resolution does not drop off with speed.

Linear – 20µ Grating Pitch

Interpolation
Interpolation Bits Resolution Maximum Speed
Multiplier
x4 2 5.000µm/count 10000mm/sec
x8 3 2.500µm/count 10000mm/sec
x 16 4 1.250µm/count 10000mm/sec
x 32 5 0.6250µm/count 10000mm/sec
x 64 6 0.3125µm/count 10000mm/sec
x 128 7 0.15625µm/count 10000mm/sec
x 256 8 0.078125µm/count 10000mm/sec
x 512 9 0.0390625µm/count 10000mm/sec
x 1024 10 19.53125nm/count 10000mm/sec
x 2048 11 9.765625nm/count 10000mm/sec
x 4096 12 4.8828125nm/count 10000mm/sec
x 8192 13 2.44140625nm/count 10000mm/sec
x 16384 14 1.220703125nm/count 10000mm/sec

Rotary – 20µ Grating Pitch

Note: The range of available values is x4 to x16384 in binary steps; sample values below.

Rotary Glass Fundamental

Interpolation
Scale Diameter Resolution
44.45mm 5000 Lines x4 x1024 x4096 x16384
interpolated resolution 20000 5120000 20480000 81920000
(CPR)
interpolated resolution 64.8 0.253 0.0630 0.01582
(arc-sec/count)*
interpolated resolution 314 1.23 0.306 0.0767
(µrad/count)*
maximum speed (RPM) 6000 6000 6000 6000
63.50mm 8192 Lines x4 x1024 x4096 x16384
interpolated resolution 32768 8388608 33554432 134217728
(CPR)
interpolated resolution 39.6 0.154 0.038 0.00966
(arc-sec/count)*
interpolated resolution 191.7 0.749 0.187 0.0468
(µrad/count)*
maximum speed (RPM) 3660 3660 3660 3660
120.65mm 16384 Lines x4 x1024 x4096 x16384
interpolated resolution 65536 16777216 67108864 268435456
(CPR)
interpolated resolution 19.78 0.0772 0.01978 0.00481
(arc-sec/count)*
interpolated resolution 95.9 0.375 0.0937 0.0234
(µrad/count)*
maximum speed (RPM) 1830 1830 1830 1830

Note*: Resolution values are approximate. To calculate exact

Note: To calculate desired rotary interpolation multiplier, use the following equation:
𝐷𝑒𝑠𝑖𝑟𝑒𝑑 𝑅𝑒𝑠𝑜𝑙𝑢𝑡𝑖𝑜𝑛 (𝐶𝑃𝑅)
𝐼𝑛𝑡𝑒𝑟𝑝𝑜𝑙𝑎𝑡𝑖𝑜𝑛 𝑀𝑢𝑙𝑡𝑖𝑝𝑙𝑖𝑒𝑟 =
𝐹𝑢𝑛𝑑𝑎𝑚𝑒𝑛𝑡𝑎𝑙 𝑆𝑐𝑎𝑙𝑒 𝑅𝑒𝑠𝑜𝑙𝑢𝑡𝑖𝑜𝑛 (𝐿𝑖𝑛𝑒𝑠)

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

Specifications
System Sensor Size
Scales H: 11.03mm
 PurePrecision Marker Tape or Laser Tape scales - available W: 13.50mm
in continuous lengths up to 30m. L: 38.50mm
 Linear glass scales for high accuracy.
 Rotary glass scales for rotary applications. Operating and Electrical Specifications
Grating Period 20µm Agency Standards Conformance: In accordance with
Electromagnetic Compatibility Directive 2004/108/EC:
EN 55011:2007, EN 61000-4-2, -3, -6
Signal Period 20µm SPI Interface Clock Speed: 25MHz - 50MHz
Max Sample Rate: 227,272 position reads/s - 50MHz clock
System 5µm - 0.00122µm* in integer interpolation
Resolution steps (factory set or user programmed using
included SmartPrecision II Software. Power Supply: 5VDC ±5%
*Value rounded for readability. Use the formula 20µm/interpolation @ 140mA (no outputs terminated)
multiplier to calculate the exact resolution in units of µm/count. @ 180mA (quad A, B, I, and both limits terminated)
Accuracy/Linearity @ 172mA (all serial I/O connections terminated)
Cyclical Error
Tape Scales: ± 30nm typical over any 20µm movement Temperature
Glass Scales: ± 20nm typical over any 20µm movement Operating: 0°C to 70°C
Storage: -20°C to 85°C
Tape Scale Linearity: ± 5µm/m Humidity: 10 - 90% RH non-condensing
Glass Scale Accuracy CE Compliant

High Accuracy Shock: 300G 0.5 ms half sine (Sensor)

Grade: ±1µm for scales up to 130mm Vibration: 30G @ 17Hz
±2µm for scales from130mm to 1m Sensor 3g (Sensor without cable)
Weight:
Standard Cable: Double Shield
Accuracy Grade:  ±1.5µm for scales up to 130mm Maximum length: 10m
 ±5µm for scales from 130mm to 1m (contact MicroE Systems for applications >5m)
Note: Accuracy is the maximum error over the specified Diameter: 4.2mm
movement when compared to a NIST-traceable laser Flex Life: 20 x 106 cycles @ 20mm bending radius
interferometer standard used at room temperature. 
Rotary Scale O.D. Microradians Arc-Seconds Reliability Information
Accuracy*
44.45mm ± 38 ± 7.8 5 Year Expected Reliability: >99.8% under normal operating
conditions.
63.50mm ± 19 ± 3.9
120.65mm ± 10 ± 2.1
Note: *Based on ideal scale mounting concentricity.
Index: Built-in or stick-on; bi-directional, full speed. Stick-on optical marker can be placed anywhere.
Note: After power up, the index mark must be passed once at  1m/s for proper operation.
Limits: Separate built-in or stick-on left and right limits. Laser-written embedded index and limits available. Contact MicroE
Note: Sensor below shown with tape scale. Refer to the Mercury II 5000 interface drawings for additional details and important notes.
.

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

Sensor Electronics
High Speed Serial Interface*
Motion system engineers who are optimizing their system can boost its
performance by interfacing their SPI-compatible controller with the
Mercury II 5800Si/Pa. Its industry standard SPI high-speed serial data
interface is supported by multiple DSP chip manufacturers, including
TI, Motorola, and Analog Devices, and provides a robust connection
that is ideal for encoder interfacing. With the Mercury II 5800Si,
encoder position values are sent directly into the controller's DSP.
The Mercury II 5000 Series Encoders have all electronics, including Limitations of encoders with A-quad-B output are completely
interpolation, built in to the sensor. This compact, versatile system eliminated. Standard features include:
includes the following features:
 Very high motion speed with high encoder resolution - up to
 Programmable interpolation level and output bandwidth, and low- 10m/s movements with 1.2nm** resolution.
pass filter
 50MHz maximum input clock frequency/Sample rate of
 Accuracy optimization - sensor signals are automatically 227,272 position reads/sec with 50MHz clock.
optimized to improve system accuracy and maximize repeatability
 RS422 voltage levels are resistant to electromagnetic Interference
 Bi-directional index with repeatability of 1LSB and support long cable runs.
 A-quad-B tri-state output alarm for low signal (MII5000). Alarm on  Two index modes:
output pin (and bit in serial word) for low signal (MII5800Si/Pa)
Mode 0: Zeros the position value at power up, without reference
 All settings and setup parameters are stored in non-volatile to the index mark. No changes are made to the position word at
memory the index mark.
 Superior EMI/RFI immunity - CE compliant, and all outputs are Mode 1: Zeros the position value at every encounter with the
differential and RS422 compatible index mark.
Programmable Interpolation The index mode can be factory set or selected by the customer
For the Mercury II 5000 Series Encoder, the sensor has using SmartPrecision II Software - see page 11 for software
programmable interpolation that is selectable over the range x4 to features.
x16384 in integer steps (depending on model), providing output
resolutions that can be matched to your application requirements. This Note*: Mercury II 5000 Series Encoder supports Panasonic serial
feature allows reduced inventory and field spare parts costs since one interface (MII5800Pa).
electronics module can be programmed for many different resolution
Note**: Resolution values shown are approximate - see pages 5 and 6
requirements and different motion axes. Motion system development for exact values.
engineers also benefit from the flexibility of programmable interpolation
by allowing them to vary the encoder's resolution during motion system Dual limits
loop tuning and optimization. Linear resolutions can range from 5µm to Mercury II includes electrically fail-safe independent left and right limits
1.2nm in convenient increments and rotary resolutions from 20k CPR with differential outputs. The limit outputs are non-latching. Optically,
to 268 million CPR. Specify the interpolation value at the time of full reflectivity on the optical limit track is the normal operating
ordering or select the interpolation at your site using SmartPrecision II condition; loss of signal on the optical limit track triggers a limit output,
Software. making them optically fail-safe. The output for limits is active-low,
making them electrically fail-safe. Limit outputs can be configured for
Programmable Maximum Output Frequency active-low or active-high at the time of ordering, or by the customer
For encoder applications combining high resolution and high speed, using SmartPrecision II Software, to match your controller’s
the sensor supports up to 50 million quadrature state changes per requirement.
second.* By specifying the maximum output frequency to match your
controller’s capability - ranging from approximately 0.098 to 50 million Programmable Low Pass Filter
quadrature state changes per second - the Mercury II encoder system The Mercury II 5000 Series Encoder has a programmable low-pass
will never produce encoder counts faster than your controller can read input filter for enhanced performance in low speed applications. The
them. Specify the encoder's maximum output frequency at the time of filter can be disabled for full bandwidth or set from 0.01% - 40% of the
ordering or select the setting at your site using MicroE's sample rate in steps of 0.01%, where the frequency is -3dB output roll-
SmartPrecision II Software. off.

Note*: “Quadrature state changes per second” is the reciprocal of

“dwell time” or “edge separation.” For example, 50 million
states per second = 0.02 µsec dwell time.

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

Quadrature Inputs/Outputs Mechanical Information – 15-Pin Connector

15-Pin Standard Male D-sub Connector Configuration

Pin Function
1 Right Limit+
2 GND
3 Right Limit-
4 Index-
5 B-
6 A-
7 +5V
8 +5V
9 GND
10 Left Limit+
11 Left Limit-
12 Index+
13 B+
14 A+
15 Do Not Connect

Note: Tri-state alarm: A and B are tri-stated if the encoder signal becomes too low for reliable operation.

Maximum Quadrature Output Frequency

A-Quad-B Output Rate Dwell Time (or edge separation)

Output Frequency (MHz)
(millions of states/sec) (µsec)

Note: Values shown are approximate. Exact values may be calculated using either of the following equations:
𝑂𝑢𝑡𝑝𝑢𝑡 𝐹𝑟𝑒𝑞𝑢𝑒𝑛𝑐𝑦 = 12.5𝑀𝐻𝑧/2^𝑛 where n = number of steps below 12.5MHz
𝑂𝑢𝑡𝑝𝑢𝑡 𝑅𝑎𝑡𝑒 = 50/2^𝑛 where n = number of steps below 50 million states per second

Output Signals Signal Termination for A-quad-B, Index,

and Limits
Quadrature* Limits*

120Ω

Mercury II 5000 Cable Z0 = 120Ω Consumer

Series Encoder Electronics

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Serial Inputs/Outputs
Mechanical Information – 15-Pin Connector
15-pin standard Male D-sub connector

Pin Name Direction Description

1 nCS+ Input
2 GND*
3 nCS- Input Negative True
Chip Select
(Capture Start)
Reserved - do Must be floating
4
not connect at host
5 SCLOCK_OUT- Output
6 SDATA_OUT- Output
7 +5V*
8 +5V*
9 GND*
Serial Clock from
10 SCLOCK_IN+* Input Serial Word Data Format*
Host to Sensor
The serial interface to the MII5800Si allows a serial host to receive position and
11 SCLOCK_IN-* Input
status information from the sensor at up to 250,000 position reads/sec. This
Reserved - do Must be floating
12 supports applications up to 10m/s with 1.2nm resolution in servo control, and
not connect at host
applications where a device such as a laser or camera must be triggered from
Serial Clock from
13 SCLOCK_OUT+ Output the encoder at a particular position.
Sensor to Host
Serial Data from Note*: For MII6800Si only. MII6800Pa: Panasonic serial interface supported.
14 SDATA_OUT+ Output
Sensor to Host
58 Bit Data Word
15 Do Not Connect Output

Note*: The following are pin outs for MII5800Pa

Start Position Status CRC Stop
(Panasonic): Pins 2,7,8,9 are same for both MII5800Si/Pa; 4 Bits 4 - 35 Bits 9 Bits 6 Bits 4 Bits
Pin 10 = REQ_SD+, Pin 11 = REQ_SD-, (REQ = Request,
SD = Serial Data). All other pins are NC (no connect)

Signal Termination for Serial I/O Connections The data word length is up to 58 bits. The data word consists of four start bits, a
position word of 4 to 35 bits (35 bits is full interpolation depth), nine bits of
status, a 6-bit cyclic redundancy check (CRC) to provide data communication
error detection, and four stop bits. This position word is large enough to keep
track of a measurement length of 41.9 meters.
120Ω
The number of position bits is determined by adding the number of interpolation
bits (valid range: 2-14) and the number of fringe count bits (valid range: 2-21).
Interpolation bits determine the interpolation multiplier (for example: 14 bits =
Mercury II 5800Si Cable Z0 = 120Ω Consumer x16384 interpolation; see pages 5 and 6 for tables of output resolutions). Fringe
Series Encoder Electronics
count bits determine the maximum number of 20µm fringes that can be counted
in the position word (for example: 21 bits = 2097152 fringes = 41.9 meters).
Most applications can use 14 interpolation bits and 21 fringe count bits. Use
Limit Marker Positioning fewer interpolation or fringe count bits if your motion controller requires a
shorter data word for faster transfer rates than can be achieved with the
maximum data word of 58 bits. The number of interpolation and fringe count bits
is specified at the time of ordering, but may be changed using SmartPrecision
II Software.
The status bits include index window, left limit, right limit, and signal level
alarms.

Important controller interfacing information such as a timing diagram, signal

descriptions, and the CRC formula are in the Mercury II 5000 Installation
Manual.

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Mercury II™ 5000 Series Encoders
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SmartPrecision II™ Software

Why use software with an encoder? Included with every Mercury II 5000 Series Encoder Alignment
Tool, SmartPrecision II Software can perform setup and
Mercury II 5000 Series Encoder Alignment Tool includes built- diagnostic functions locally or remotely across a LAN or WAN. It
in SmartPrecision II Software. The Alignment Tool’s pushbutton operates from the encoder using simple Java commands and
setup process does not require use of the software; however thus does not require any software to be installed on the
SmartPrecision II Software adds unique functionality: computer other than a standard web browser (such as Internet
Explorer). Compatible with numerous web browsers and
 Verify encoder operation using digital readouts and data
operating systems, its features include simultaneous displays
plots such as Lissajous.
of:
 Get support from trained MicroE Systems’ support
personnel for diagnosing customer equipment, no matter  Position in engineering units
where the equipment is located throughout the world.  Lissajous plot
 Use Mercury II's programmable features for more rapid  Encoder signal level
integration and motion system optimization.  Status of software alarms, index and limits
 Perform encoder setup with the convenience and step-by-  Status of programmable encoder settings
step prompts of a software interface.
 Encoder serial number

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Ethernet Connectivity Features

SmartPrecision II Software ™ The software resides in the ATMII5000 Alignment Tool as a
'web server' and is accessed using an Ethernet connection. The
Program Mercury II 5000 Series Encoder Electronics computer does not need any special software to be installed, so
 Set interpolation in integer steps and filter roll-off virtually any computer can connect instantly to an ATMII5000
frequency (quadrature output frequency) for MII5000 or in Alignment Tool. Ethernet connectivity advantages include:
binary steps from x4 to x16,384 for MII5800Si
 High speed, network data connection supports many
 Set maximum output frequency to match your controller configurations:
 Disable/enable low-pass filter and set filter roll-off  One encoder with one computer
frequency  Many encoders with one computer
 Set limit logic when necessary to match your controller’s  Several computers and one encoder
requirements
 Multiple encoders and multiple computers
 Set grating type
 One-to-one (no network), LAN, WAN, or router
 Set index mode
 Securely connect to the encoder remotely for field support
 Select reflective or non-reflective grating type through your company’s Virtual Private Network.
Install Mercury II 5000 Series Encoder  The software’s web server architecture can respond to a
 Align sensor using Signal Level display and Lissajous data variety of requests:
plot  Html pages, data requests, Java plots, etc.
 Locate index and see when sensor is over the scale’s  Take requests from most operating systems
index mark
 Take requests from a variety of sources (user with
 Verify sensor output over length of scale using the Signal web browser, user-software, scripts, controller, etc.)
Strength plot
 Program your controller to communicate with the encoder
 Encoder Calibration using simple HTML web commands for ‘observer’ position
Verify Mercury II 5000 Series Encoder Operation data feedback or encoder status, including calibration,
 Read encoder position in engineering units of your choice alarms, and limits.

 View data plots (software not for use while using encoder  Computer operating system independence and flexibility of
in servo control) interfacing to your own software without needing any
DLLs, drivers, or any specific hardware or software
 Check software alarms and programmable settings
configuration.
Diagnose Mercury II 5000 Series Encoder
Computer Requirements
Performance  Any computer with a web browser (such as Internet
 Capture signal data and email it to MicroE for rapid
Explorer) and Java Runtime Environment installed and
diagnostic support
enabled
 Check software alarms and programmable settings
 Ethernet connection to a computer, LAN, WAN or router
How to Order
SmartPrecision II Software is included with all ATMII5000
Alignment Tools and does not require any installation - just
access it using your computer’s web browser.

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PurePrecision™ Laser Tape Scale with Stick-On Index and Limits

The Best Tape Scale Solutions Available specifications using a laser etch process, installation of the tape
Mercury II PurePrecision scale is reduced to one simple step: just apply the adhesive-mount
Marker Tape and Laser Tape tape scale to your system’s mounting surface and you are done.
scales are fast and easy to There is no need to mount index or limit markers or magnets. The
install, provide excellent laser-written marks are placed in the exact locations you specify –
accuracy and take up less index location, number of index marks, and limit mark lengths can be
space than any encoder in specified at the time of ordering. PurePrecision Marker Tape may be
this class because index and ordered in pre-cut lengths for the fastest installation, or in continuous
limit marks are contained form for cutting at your site.
within the tape’s 6mm width.
PurePrecision Laser Tape
They mount using permanent pressure-sensitive adhesive. Thermal
expansion of the substrate is matched by anchoring the ends of the
with Stick-On Index and Limits
tape scale using epoxy.

Marker Tape and Laser Tape scales are

supplied in dispensers of lengths up to 30m
so that they can be cut to any length
required for your application, minimizing
inventory costs. They may also be ordered
pre-cut to any length you specify for high-
volume OEM applications.

Installation for a
wide range of
lengths is fast and easy using MicroE
Systems’ tape applicator tool, or without a
tool by hand. When using the installation
tool, released paper is automatically
removed from the tape. The tape's location PurePrecision Laser Tape has the same high performance Inconel
on the mounting surface is set by a scale as PurePrecision Marker Tape, but without the factory written
reference edge that is either machined into index/limit markers. Laser Tape provides the ultimate in flexibility and
the substrate or is put in place temporarily. productivity by using stick-on index and limit markers so that you can
cut the tape scale to any length you need.
PurePrecision Marker Tape
PurePrecision Marker Tape has built-in index and limit marks to The stick-on (adhesive-mount) optical index and limit markers are
speed installation. Manufactured into the tape scale to your mounted on the tape in seconds using the same reference edge as
for the tape scale. This space-saving design keeps the index and
limit markers within the 6mm width of the tape, ideal for space-
Enlargement showing constrained motion systems. The index is bi-directional, operates at
built-in index all encoder speeds, and is repeatable to 1LSB.

Mercury II PurePrecision Marker and Laser Tape scale may also be

installed using scale applicator tools for 6mm-wide tape from other
manufacturers.

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High Performance Encoders with Digital O utput

PurePrecision™ Laser Tape Scale with Stick-On Index and Limits

The laser scale length that you specify for your application must be For Example: Measuring Length of 800mm is required, and limits will
calculated as follows. This calculation applies whether your be used at the end of the tape scale. The Tape Scale Length =
application requires end limits or not. 20mm at each end of the tape 800mm + 40mm = 840mm.
scale are not to be used for encoder feedback.
*When the end limits are at the ends of the tape scale and end caps
Tape Scale Length = Measuring Length + 40mm* are not used. The Tape Scale Length must be increased further if the
limit markers are applied at a distance from the ends of the tape
scale.

Index and Limit Marker Locations When End Caps not used

6.00mm

D = Mounting Surface Reference

Specifications

Linearity ≤ ±5µm/m
Material Inconel 625
Typical CTE 13ppm/°C; thermal behavior of the tape scale is typically
matched to the substrate using epoxy at the ends of the
tape scale

Available Lengths
Order as much tape scale as you will require for your production and cut Order the required Tape Scale Length using the model number
it to length for each job, or order pre-cut lengths to match your TS-xxxxx (where xxxxx=Tape Scale Length in mm [40 – 30000mm].
application requirements. Note that the Measuring Length for each axis
For example, 9000mm Tape Scale: .TS-09000. Contact MicroE
in your equipment will be less than the Tape Scale Length depending on
Systems for lengths greater than 30m.
limits and use of end caps. PurePrecision laser tape is shipped in tubes
for lengths from 40mm – 500mm and in dispensers for lengths greater
than 500mm.

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Mercury II™ 5000 Series Encoders
High Performance Encoders with Digital O utput

Linear and Rotary Glass Scales

MicroE Systems offers a wide array of chrome on glass scales. Easy Linear Glass Scales
to install, choose from standard linear and rotary scales, or The stick-on (adhesive-mount) optical index and limit markers are
customized linear, rotary, and rotary segment scales where needed. mounted on the scale in seconds usually using the same reference
Use linear glass scales for the highest accuracy. edge as for the scale or a metal block. This space-saving design
keeps the index and limit markers within the 6mm width of the scale,
Glass Scale Options ideal for space-constrained motion systems. The index is bi-
 Standard linear: 10mm - 1m (contact MicroE for longer lengths)
directional, operates at all encoder speeds, and is repeatable to
 Standard rotary: 44mm - 121mm diameter, with or without hubs 1LSB (embedded index only).
 Custom linear*: special lengths, widths, thickness, index mark The scale length that you specify for your application must be
locations, pre-printed index and limits, and special low CTE calculated as follows:
materials
 Custom rotary*: special IDs, ODs (up to 304.8mm), index mark If your application requires end limits
Glass Scale Length = Measuring Length + 40mm*
inside the main track, and special low CTE materials
 Mounting of hubs for rotary scales: MicroE Systems can mount Example: A Measuring Length of 90mm is required, and limits will be
and align standard, custom, or customer-supplied hubs used. Scale Length = 90mm + 40mm = 130mm.
 Rotary segments*: any angle range; wide range of radius *When the end limits are at the ends of the tape scale
values If your application does not require end limits
Glass Scale Length = Measuring Length + 5mm
Note*: Custom scales or rotary segments are available in OEM
quantities. Contact your local MicroE Systems sales office. Example: A Measuring Length of 25mm is required, and limits will
Mercury II linear glass scales 130mm or shorter are only 6mm wide, not be used. Scale Length = 25mm + 5mm = 30mm.
enabling drop-in replacement of existing 6mm wide tape scale
Factory cut-to-length flexibility
encoders for dramatic improvements in motion system resolution and Mercury II’s stick-on index and limit markers make factory cut-to-
accuracy length glass scales possible, enabling rapid turnaround for any scale
Standard Short Linear Scales length and helping you exactly match your application requirements.
130mm and Shorter (dimensions in mm) For OEM applications, linear glass scales can be ordered with pre-
printed index and limit markers that are optimized for your needs,
Specifications speeding installation and maximizing motion system performance.

Accuracy ±1.5µm standard accuracy grade

±1µm available (high accuracy grade) Order theOrder
required
the Scale Length
required Scaleusing model
Length number
using modelMIILxxxx where xxxx
number MIILxxxx
Material Soda lime glass = Scalewhere
lengthxxxx
in mm (10mm
= Scale - 1000mm).
length For example:
in mm (10mm (30mm
- 1000mm). ForLinear Glass
example:
Typical CTE 8ppm/°C (Ultra-low CTE glass available) Scale): MIIL30. (30mm Linear Glass Scale): MIIL30.

6.00mm

2.49mm

D = Mounting Surface Reference Edge

Note: The following are only examples; you can order any size. Longer scales available; contact MicroE.

Model MIIL18 MIIL30 MIIL55 MIIL80 MIIL105 MIIL130

Scale Length 18mm 30mm 55mm 80mm 105mm 130mm
Measuring Length 13mm 25mm 50mm 75mm 100mm 125mm
Without Limits
Measuring Length N/A N/A 15mm 40mm 65mm 90mm
With Limits

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Mercury II™ 5000 Series Encoders
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Linear Glass Scales with Stick-on Index and Limits

Standard Long Linear Scales
131mm and Longer (dimensions in mm)

Specifications
Accuracy ±5µm standard accuracy grade
Order the required Scale Length using model number MIILxxxx
±2µm available (high accuracy grade)
where xxxx = Scale length in mm (10mm - 1000mm).
Material Soda lime glass
Typical CTE 8ppm/°C (Ultra-low CTE glass available) For example: (225mm Linear Glass Scale): MIIL225. Contact MicroE
Systems for lengths greater than 1m.

20.00mm
2.49mm
D = Mounting Surface Reference
Edge
Note: The following are only examples; you can order any size.

Model MIIL155 MIIL225 MIIL325 MIIL425 MIIL525 MIIL1000

Scale Length 155mm 225mm 325mm 425mm 525mm 1000mm
Measuring Length 150mm 220mm 420mm 420mm 520mm 995mm
Without Limits
Measuring Length 115mm 185mm 285mm 385mm 485mm 960mm
With Limits

Rotary Glass Scales with Built-In Index

Standard Rotary Scales

Specifications
Material Soda lime glass
Typical CTE 8ppm/°C

Dimensions in MM

Custom scales are available including larger diameters.

Model No. Fundamental Scale Outer Scale Inner Optical Hub Inner Diameter Hub Height
CPR Diameter Diameter Diameter +0.013mm/-0.0000

MIIR4513 500 44.45mm 12.70mm 31.83mm 6.358mm 1.27mm

MIIR6425 8192 63.50mm 25.40mm 52.15mm 12.708mm 1.52mm
MIIR12121 16384 120.65mm 50.80mm 104.30mm 25.408mm 2.03mm
Note: MII5800Pa is for linear axes only.

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Mercury II™ 5000 Series Encoders
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How to Order
Sensors

MII5800, A-quad-B Output, with Resolution from MII5700, A-quad-B Output, with Resolution
5µm to 1.2nm from 5µm to 5nm

MII5810-AB-16384-1-1-0 (example) MII5710-AB-4000-1-1-0 (example)

Low Pass Filter Roll Off Low Pass Filter Roll Off
Frequency (kHz) Frequency (kHz)
0=Off (full bandwidth) 0=Off (full bandwidth)
1=1khz 1=1khz
2=2khz 2=2khz

100=100kHz 100=100kHz

Limit Logic Limit Logic

1=Active Low (fail safe) 1=Active Low (fail safe)
2=Active High 2=Active High

Maximum Output Maximum Output

Frequency Frequency
1=12.50 MHz 1=12.50 MHz
2=6.25 MHz 2=6.25 MHz
3=3.125 MHz 3=3.125 MHz
4=1.563 MHz 4=1.563 MHz
5=0.781 MHz 5=0.781 MHz
6=0.391 MHz 6=0.391 MHz
7=0.195 MHz 7=0.195 MHz
8=0.098 MHz 8=0.098 MHz
9=0.049 MHz 9=0.049 MHz
10=0.024 MHz 10=0.024 MHz

Interpolation Interpolation
(Integer Steps) (Integer Steps)
4=x4 4=x4
5=x5 5=x5

16384=x16384 4000=x4000

AB AB
AB=A-quad-B output AB=A-quad-B output

MII58XX (Cable Length) MII57XX (Cable Length)

MII5810=1m cable MII5710=1m cable
MII5830=3m cable MII5730=3m cable
MII5850=5m cable MII5750=5m cable

Note: All specifications are subject to change.

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Mercury II™ 5000 Series Encoders
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How to Order
Sensors

MII5500, A-quad-B Output, with MII5800Si, Serial Output, with Output

Resolution from 5µm to 50nm Resolution up to 1.2nm

MII5510-AB-400-1-1-0 (example) MII5810-Si-14-21-1-0 (example)

Low Pass Filter Roll Off Low Pass Filter Roll Off
Frequency (kHz) Frequency
0=Off (full bandwidth) (% of Sample Rate)
1=1khz 0=Off (full bandwidth)
2=2khz 1=1% of sample rate
2=2% of sample rate

100=100kHz
40=40% of sample rate

Limit Logic Index Mode

1=Active Low (fail safe) 0=No change to position of
2=Active high index
1=Position reset at every
index

Maximum Output Number of Fringe

Frequency Count Bits*
1=12.50 MHz 2=2
2=6.25 MHz 3=3
3=3.125 MHz
4=1.563 MHz
5=0.781 MHz 21=21
6=0.391 MHz
7=0.195 MHz Interpolation Bits*
8=0.098 MHz 2=2
9=0.049 MHz 3=3
10=0.024 MHz

14=14
Interpolation
(Integer Steps)
4=x4 Si
5=x5 Si=Serial Interface

400=x400

AB MII58XX (Cable Length)

AB=A-quad-B output MII5810=1m cable
MII5830=3m cable
MII5850=5m cable

MII55XX (Cable Length)

MII5510=1m cable
MII5530=3m cable Note*: Interpolation bits plus fringe bits must be ≤35 bits.
MII5550=5m cable

Note: All specifications are subject to change.

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Mercury II™ 5000 Series Encoders
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How to Order
Sensors Sensor Installation Tools

MII5800Pa, Serial Output, with Output ATMII5000 *Alignment Tool Kit for MII5000
Resolution up to 1.2nm encoders includes:
- Alignment Tool
MII5810-Pa-14-10-1-0 (example) - SmartPrecision II Software
- USB Cable
Low Pass Filter Roll Off - Power Supply
Frequency (kHz) (100V- 240VAC/50-60Hz)
0=Off (full bandwidth) -US
1=1% of sample rate US=Power supply with US standard 2-
2=2% of sample rate prong plug
-EU EU=Power supply with European
standard 2-prong plug
ZG-PP2 Z-Height Gauge, PurePrecision Tape
Scales
40=40% of sample rate ZG-GS2 Z-Height Gauge, Glass Scales

Index Mode Note*: Required for MII5000/MII6000 setup.

0=Default (no option)

Number of Fringe
Count Bits Adapter for Open Collector Limit Outputs
2=2 MIIA-OCL Small DB15 adaptor to convert 3.3V
3=3 left and right limit output signals to
open collector type (7407)
21=21

Interpolation Bits
2=2
3=3
End Cap Kit, PurePrecision Tape Scales
EC Optional Tape Scale End Caps

14=14

Pa Tape Scale Applicator Tools

Pa=Panasonic
(use for lengths > 300mm)
TSAT-PPT Tape Applicator Tool for applying tape
MII58XX (Cable Length)
scale
MII5810=1m cable
MII5830=3m cable
MII5850=5m cable

Note: Interpolation bits plus fringe bits must be ≤24 bits.

Note: All specifications are subject to change.

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Mercury II™ 5000 Series Encoders
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How to Order

Scales

PurePrecision Marker Tape II

MT-N-A-L-9999-I

I = Individual Lengths
C= Continuous reel with index and cut marks (unless otherwise specified)

Total Segment Lengths in mm (up to 5,000)

Customs (Sequential # 0001, 0002, …….9999)

L=Center and 20mm Limits

I =Center Index Only
C=Custom

A=Adhesive

PurePrecision Laser Tape II

TS-3000

Length in mm (40mm – 30,000 mm)

PurePrecision Linear Glass Scales

(Standard accuracy grade)
MIIL-100
Length in mm (10mm – 1,000 mm).
For high accuracy grade scales, contact MicroE.

Note: Index and limit markers must be ordered separately.

Stick-On Index and Limit Markers

(for Laser Tape II and Performance and Value Linear Glass Scales)
RIMS Qty of 8 Stick-On Index Markers
RLMS Qty of 4 Stick-On Left Limit Markers and Qty of
4 Stick-On Right Limit Markers

Note: To use RIMS/RLMS, MII5000 must be configured for Reflective Grating Type.

PurePrecision Rotary Glass Scales

MIIRxxxx* - Hub
NH=Without Hub
HI=for R4513
HJ=for R6425
HK= for R12151

MIIR4513
MIIR6425
MIIR12151

Note*: Custom Versions are available.

Note: Rotary glass scales are shipped not mounted to hub. Hub mounting is available, contact MicroE
Systems for information.
Note: All specifications are subject to change.

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Mercury II™ 5000 Series Encoders
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Mercury II Encoders are Fully RoHS Compliant

Mercury II is fully compliant with European Directive 2002/95/EC (Restriction of use of Hazardous Substances, “RoHS”).

A Document of Compliance is available upon request. “Mercury™” is a brand name of MicroE Systems; Mercury and

Mercury II encoders do not contain any mercury metal.

Vacuum-Rates and Small Diameter Rotary Encoders

Vacuum-Rated and Small Diameter Rotary Encoders

See http://www.celeramotion.com for Mercury linear and rotary encoders that are vacuum rated up to 10-8 torr, small-diameter rotary encoders
with scale outside diameters from 32mm to 12mm, and low-cost PCB mount encoders.

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