Letter

pubs.acs.org/NanoLett

Dielectric Meta-Reflectarray for Broadband Linear Polarization

Conversion and Optical Vortex Generation
Yuanmu Yang,† Wenyi Wang,‡ Parikshit Moitra,† Ivan I. Kravchenko,§ Dayrl P. Briggs,§
and Jason Valentine*,∥
†
Interdisciplinary Materials Science Program and ‡Department of Electrical Engineering and Computer Science, Vanderbilt
University, Nashville, Tennessee 37212, United States
§
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, United States
∥
Department of Mechanical Engineering, Vanderbilt University, Nashville, Tennessee 37212, United States
*
S Supporting Information

ABSTRACT: Plasmonic metasurfaces have recently attracted

much attention due to their ability to abruptly change the phase
of light, allowing subwavelength optical elements for polarization
and wavefront control. However, most previously demonstrated
metasurface designs suffer from low coupling efficiency and are
based on metallic resonators, leading to ohmic loss. Here, we
present an alternative approach to plasmonic metasurfaces by
replacing the metallic resonators with high-refractive-index silicon
cut-wires in combination with a silver ground plane. We experimentally demonstrate that this meta-reflectarray can be used to
realize linear polarization conversion with more than 98% conversion efficiency over a 200 nm bandwidth in the short-
wavelength infrared band. We also demonstrate optical vortex beam generation using a meta-reflectarray with an azimuthally
varied phase profile. The vortex beam generation is shown to have high efficiency over a wavelength range from 1500 to 1600
nm. The use of dielectric resonators in place of their plasmonic counterparts could pave the way for ultraefficient metasurface-
based devices at high frequencies.
KEYWORDS: Metamaterial, dielectric antenna, polarization conversion, vortex beam

A chieving full control over light propagation is an ever

present issue in modern day optics. In order to realize
such control it is necessary to create devices that allow 0 to 2π
One of the drawbacks of plasmonic metasurfaces is that they
typically suffer from low efficiency due to weak coupling
between the incident and cross-polarized fields. Methods to
phase modulation and/or devices that allow control over the increase efficiency include the use of overlapped electric and
amplitude of light. In conventional optical elements such as magnetic resonances16 as well as the use of thicker metasurface
birefringent waveplates and lenses, a significant propagation sheets,17 though both of these proposals require materials with
distance is needed to acquire disparate phase accumulation for increased complexity. One can also employ antennae working
different polarizations or spatial regions of the beam, thus away from their resonance positions to realize quarter-
requiring thick materials that are difficult to integrate into waveplates with polarization conversion efficiencies of close
compact platforms.1 One solution to this issue is the use of to 50% over large bandwidths.18 In another approach, it was
reflect and transmit-arrays, originally developed at radio shown that an array of metallic antennae in combination with a
frequencies, that allow one to control the amplitude and reflective ground plane can achieve efficiencies of up to 80% for
phase of light using a single, or several, layers of ultrathin anomalous reflection7,13,19 and linear polarization conversion10
antennae.2,3 By changing the geometry of the antenna as a by introducing multiple reflections within the film. While this
function of position, these arrays allow spatial control over the design avoids complexity, the use of metallic antennae still
phase of light. Recently, similar materials, deemed metasurfaces, limits metasurfaces from achieving unity efficiency at optical
have been developed at optical frequencies.4 Metasurfaces wavelengths due to the ohmic losses in metal.7
typically utilize asymmetric electric dipole resonances to allow 0 Resonant dielectric metamaterials offer one potential
to 2π phase control for the cross-polarized scattered light. As in solution to the issue of loss. Formed from high refractive
transmitarrays, varying the geometry of the resonator as a index resonators, dielectric metamaterial unit cells can support
function of position allows arbitrary control of the phase front electric and magnetic dipole responses due to Mie
of light using a subwavelength-thin film and has led to
demonstrations including anomalous refraction,4−8 quarter and Received: December 1, 2013
half waveplates,9,10 lensing,11−13 and manipulation of orbital Revised: February 14, 2014
angular momentum.14,15 Published: February 18, 2014

© 2014 American Chemical Society 1394 dx.doi.org/10.1021/nl4044482 | Nano Lett. 2014, 14, 1394−1399
Nano Letters Letter

resonances.20−25 Dielectric metamaterials can be much less depositing a 380 nm thick amorphous Si (n = 3.7) thin film on
absorptive than their metallic counterparts and have been quartz. The cut-wires were then created using electron beam
recently utilized to realize zero index metamaterials26 and lithography and reactive-ion etching. PMMA (n = 1.48) was
directional light scatterers27 at optical frequencies. Closely then spin-coated onto the sample and planarized to serve as the
related to this concept are high-contrast gratings (HCGs) and low index dielectric spacer and a silver film was deposited on
artificial dielectrics. In HCGs, Mie resonances are used to top, serving as the reflective mirror (see Supporting
control the phase of transmitted or reflected light at a surface. Information Section 1 and Figure S1 for details). The resulting
HCGs have been used to achieve surfaces with near-unity PMMA thickness, measured with profilometry, was 200 nm.
reflection for applications such as mirrors in vertical-cavity The scanning electron microscope (SEM) image of the
surface-emitting lasers,28 quarter waveplates,29 and optical fabricated sample is shown in Figure 1b.
elements with spatial phase variation such as lenses30,31 and To experimentally characterize the performance of the
spiral phase plates.32 However, one of the drawbacks of this polarization converter, we used a supercontinuum light source
approach is that it is difficult to achieve full 2π phase control (Fianium SC400), incident normal to the sample surface with
while preserving near-unity reflectance with a single layer the polarization along the x-axis, which is tilted 45° with respect
grating, an issue that becomes more restrictive as the index of to the Si cut-wire axis. Two linear polarizers were employed in
the resonator is reduced. In artificial dielectrics,33−35 high index front and after the sample to measure the reflectance of the
materials are structured to achieve a gradient index along the same polarization state as that of the incident wave, |rco|2, and
surface of the film and have been demonstrated to have high that of the perpendicular polarization |rcross|2, as illustrated in
diffraction efficiency, exceeding that of blazed gratings. Figure 2a. All reflectance measurements were normalized to the
However, strong resonances in the unit cells are not utilized reflectance measured from a silver mirror. Figure 2b shows the
which results in relatively low index contrast (compared to measured reflectance for both polarizations and the corre-
resonant structures) and the need to utilize structured films that sponding polarization conversion rate (PCR), defined as
have thicknesses that are greater than the free-space wavelength |rcross|2/(|rcross|2 + |rco|2), is shown in Figure 2c. The experimental
to acquire a 0 to 2π phase shift. This results in the structures measurements demonstrate that the PCR remains above 98%
with relatively high aspect ratios which can be challenging to from 1420 to 1620 nm, and the cross-polarized reflection
fabricate. remains above 97% over this bandwidth, in good agreement
In this Letter, we demonstrate a broadband dielectric meta- with the simulations. Measurements beyond 1620 nm were not
reflectarray polarization convertor by utilizing structured silicon possible (shaded region in Figure 2b,c) due to the low quantum
(Si) cut-wire resonators placed above a silver ground plane. efficiency of the spectrometer’s indium gallium arsenide
The meta-reflectarray utilizes Mie resonances in the Si detector and reduced light source intensity at long wavelengths.
resonators, allowing the use of low aspect ratio structures However, the numerical simulation predicts that 90% PCR
with subwavelength thicknesses. Multiple reflections within the extends out to 1720 nm and given the good agreement with
spacer layer also relaxes the required phase delay upon a single theory, we expect the experimentally achievable efficiency to
pass through the resonator layer, mitigating the trade-off also be preserved over this range. Numerical simulations also
between phase control and efficiency present in single layer show that the waveplate is robust to variations of the dielectric
HCGs. This allows the meta-reflectarray to serve as a half- spacer thickness, maintaining a conversion efficiency of >90%
waveplate with near-unity reflectance and over 98% polarization over a 300 nm bandwidth for a PMMA spacer layer thickness of
conversion efficiency across a 200 nm bandwidth. Furthermore, 187 nm ±37 nm (Supporting Information Figure S2). The
by varying the resonator dimensions, broadband 0 to 2π phase reflectarray also maintains near-unity polarization conversion
control of the reflected cross-polarized light can be achieved efficiency for incident angles up to 10° for both s- and p-
while maintaining high conversion efficiency, opening the door polarized light (Supporting Information Figure S3). However,
to ultracompact reflective phase plates at optical wavelengths. the bandwidth of the response is reduced at off-normal
A schematic of the polarization converter is illustrated in incidence due to excitation of a photonic crystal mode in the
Figure 1a. It is composed of an array of Si cut-wires and a silver short-wavelength region of the response. The sensitivity to the
ground plane, with a low index poly(methyl methacrylate) angle of incidence is one trade-off associated with using
(PMMA) spacer in between. Device fabrication began with dielectric resonators possessing slightly larger unit cell size
compared to their plasmonic counterparts.
To better understand the response of the meta-reflectarray,
the incident light, which is linearly polarized along the x-
direction, can be decomposed into two perpendicular
components, u and v, which correspond to the short and
long axis of the resonator, respectively (Figure 2d). The
numerically simulated reflection amplitude and phase for a
resonator array illuminated with polarization along these axes
are shown in Figure 2e,f. It can be observed that the reflection
amplitudes in both polarizations are close to unity while the
relative phase retardation is roughly π throughout the
wavelength range where the linear polarization conversion
Figure 1. (a) Schematic of the meta-reflectarray with a unit cell period occurs, leading to a 90° polarization rotation when light is
of p = 650 nm, a = 250 nm, b = 500 nm, t1 = 380 nm and t2 = 200 nm. incident with polarization along the x- or y-axis of the sample.
In the fabricated sample, the resonators are embedded in PMMA and a The high conversion efficiency can also be understood by
quartz wafer caps the resonators. (b) SEM image of the sample before modeling the field evolution upon multiple reflections within
spin-coating PMMA and depositing the silver film. the low-index spacer layer, resulting in constructive and
1395 dx.doi.org/10.1021/nl4044482 | Nano Lett. 2014, 14, 1394−1399
Nano Letters Letter

Figure 2. (a) Schematic of the polarization conversion measurement setup. (b) Measured and simulated reflectance for co- and cross-polarized light.
(c) Polarization conversion efficiency of the device. The shaded regions indicate the wavelength range where experimental measurements were not
possible due to low detector quantum efficiency. (d) Schematic of the decomposition of linearly polarized incident and reflected light. (e,f)
Reflectance and phase for light polarized along the v (purple curves) and u (red curves) axes demonstrating near-unity reflection and a broadband π-
phase shift.

destructive interference of the cross- and co-polarized light, simulated reflection amplitude and phase for the eight
respectively.10 The polarization conversion region is occurring resonators as a function of the incident wavelength between
primarily between long and short-axis resonances, similar to 1500 and 1600 nm (Figure 3d,e). Within this range, the cross-
previously reported broadband plasmonic metasurface quarter- polarized reflectance remains above 75% with the greatest drop
wave plates.18 In our case, however, this is combined with occurring for resonators 1 and 5 at long wavelengths. However,
smoothing of the phase variation across the resonance due to despite this drop, the average reflectance is 93.6% across this
multiple reflections within the spacer layer, resulting in the 200 bandwidth. The phase gradient is calculated by taking resonator
nm bandwidth over which the PCR remains above 98%. A 1 as a reference at each wavelength and setting its phase
more in-depth discussion of these phenomena can be found in advance to zero. Across the l00 nm bandwidth, it can be seen
the Supporting Information, Section 2d and Figures S4 and S5. that the phase gradient across the resonators remains linear,
More interestingly, by properly engineering the cut-wire ensuring the designed phase profile is maintained.
geometry, a 0 to 2π phase shift can be achieved for the cross- It should also be noted that this meta-reflectarray can be
polarized reflected light with near-unity efficiency. This is in designed using lower index resonator materials such as TiO2 (n
contrast to plasmonic V-shaped antenna based metasurfaces, = 2.27 at 632 nm) while maintaining high conversion efficiency
where the majority of scattered light remains in the ordinary (Supporting Information Figure S6). This is due to the fact that
component (copolarized), resulting in low signal-to-noise ratio there are multiple reflections within the film, relaxing the need
(SNR).4 The two-dimensional colormap of the numerically for achieving a full 2π phase shift from a single pass, which in
simulated reflectance, |rcross|2, and phase, φcross, of the meta- turn allows one to use broader resonances. The use of lower
reflectarray with varying Si cut-wire dimensions at a fixed index transparent dielectrics such as TiO2 permits the design to
wavelength of 1550 nm, are plotted in Figure 3a,b. In these be potentially scalable to visible wavelengths though at higher
simulations the PMMA spacer layer thickness is set to 150 nm frequencies conversion efficiency will be limited by loss in the
to match the fabricated reflectarray discussed below. These silver mirror.
simulations were performed using a finite-element frequency- In order to validate the performance of a variable phase meta-
domain solver (CST Microwave Studio) with periodic reflectarray, we fabricated a sample with a spiral phase profile
boundary conditions. It can be observed that there is a region ranging from 0 to 2π with a phase increment of π/4 along the
of high reflectance in which four antenna dimensions were azimuthal direction (shown in Figure 4a,b). The design is based
chosen (circles in Figure 3a,b) to provide an incremental phase on the eight Si cut-wire resonators modeled in Figure 3. The
shift of π/4 for cross-polarized reflected light. By simply PMMA layer was measured to be 150 nm thick at the edge of
rotating the structures by 90°, the additional π-phase shift can the phase plate using profilometry, though some variation in
be attained for realizing full 2π coverage while maintaining PMMA thickness is expected due to the different resonator
near-unity efficiency. filling fractions across the sample. This particular phase profile
An additional feature of this reflectarray is that it can leads to the generation of a Laguerre-Gaussian beam with a
maintain high efficiency over a wavelength range of ∼100 nm theoretical cross-polarized reflectance that is above 94.5% for
within the telecommunications band as demonstrated by the each section of the reflectarray at the center wavelength of 1550
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Nano Letters Letter

Figure 3. Simulated cross-polarized reflection (a) magnitude and (b) phase for resonators with varying geometry at a fixed wavelength of 1550 nm.
The unit cell period is set as 650 nm and the PMMA spacer thickness is set to 150 nm. (c) Schematic of eight resonators that provide a phase shift
from 0 to 2π. The dimension of resonators 1−4 are (1) a = 200 nm, b = 425 nm; (2) a = 225 nm, b = 435 nm; (3) a = 250 nm, b = 450 nm; (4) a =
275 nm, b = 475 nm. Resonators 5−8 are simply rotated by 90° with respect to resonators 1−4. Simulated cross-polarized reflection (d) amplitude
and (e) phase for arrays of resonators 1−8 as a function of the incident wavelength. The phase delay of array 1 is set to 0 for each wavelength to
serve as a reference.

nm. The Laguerre-Gaussian beam has a helical wavefront with a two beams are tilted and collinear with respect to each other,
phase singularity in the center characterized by an azimuthally respectively, as illustrated in Figure 4f−k. In the tilted
dependent phase term, exp(ilϕ), where l represents the interference measurement, we slightly rotated the beam in
topological charge, which was chosen as l = 1, and ϕ is the the reference arm such that the E-field of the Gaussian beam
azimuthal angle.36 This optical vortex beam carries an orbital was along the transmission axis of the polarizer, preventing it
angular momentum of ℏl, making it a platform for investigating from being filtered out. In order to qualitatively gauge the
fundamental physical phenomenon such as spin−orbit conversion efficiency of the meta-reflectarray, the linear
interaction in photonic systems,14,15 and such beams have polarizer placed before the camera was removed, resulting in
various applications in optomechanics37 and information the images shown in Figure 4l,m. It can be observed that the
processing.38−41 spiral patterns remain largely unaffected, though there is
The evolution of the vortex beam as a function of incident moderate noise in the center of the pattern that is most likely
wavelength was measured by illuminating the sample with a due to the imperfections in the cut-wire arrays and slight
linearly polarized and collimated tunable continuous wave variations in the PMMA thickness across regions with different
diode laser. A linear polarizer oriented 90° with respect to the resonator filling fractions, leading to increased copolarized
illumination polarization was placed in front of the camera to reflection.
filter out any copolarized light. Images of the reflected cross- Finally, one important aspect that remains to be explored is
polarized beam are shown in Figure 4c−e and have the the role of coupling between the resonators in the array. This
characteristic intensity minimum at the center that is a direct has important ramifications for using this type of meta-
consequence of self-cancel-out associated with the corkscrew reflectarray for realizing short focal length lenses, in which
shaped beam. The reflected beam was also measured using a dissimilar resonators are placed adjacent to one another. To
Michelson interferometer with the generated vortex beam and explore the role of coupling, we modeled a surface in which the
the copropagating Gaussian beam in the sample and reference eight resonators from Figure 3, each with a unit cell size of 650
arm, respectively (see Supporting Information Figure S7 for a nm × 650 nm, were placed adjacent to one another forming a
schematic of the measurement setup). The dislocated fringe linear phase gradient over a supercell with length S = 5.2 μm.
and spiral shape phase patterns are clearly observable when the On the basis of the generalized Snell’s law,4 the surface should
1397 dx.doi.org/10.1021/nl4044482 | Nano Lett. 2014, 14, 1394−1399
Nano Letters Letter

Figure 4. (a) Optical microscope image of the fabricated spiral phase plate composed of eight sections of Si cut-wires, providing an incremental
phase shift of π/4. (b) SEM image showing the cut-wires at the center of the reflectarray. (c−e) Experimentally measured intensity profiles of the
generated vortex beam with topological charge l = 1. The wavelengths of the incident light are (c) 1500, (d) 1550, and (e) 1570 nm. (f−h)
Interference pattern of the vortex beam and the copropagating Gaussian beam when the beam axes are tilted with respect to one another. (i−k)
Interference pattern of a vortex beam and a Gaussian beam which have collinear propagation. In (c−k), a linear polarizer is placed in front of the
camera to filter out copolarized light. (l,m) Interference pattern of the vortex beam and the Gaussian beam in the absence of the linear polarizer.

exhibit an anomalous reflection peak at an angle of θr =

sin−1[(λ0/nS) + sin(θi)], where n is the background index,
equal to the index of quartz/PMMA (n = 1.5) in our case, and
θi is the incident angle. Numerical simulations were performed
to verify the meta-reflectarray performance by illuminating the
array at normal incidence (θi = 0°) with a Gaussian beam with a
waist size of 7 μm and wavelength of 1550 nm (device
performance at 1500 and 1600 nm incident wavelength are also
available in Supporting Information Figure S8). The cross-
polarized reflected field is plotted in Figure 5a and
demonstrates a well-defined phase front while the far-field
scattered intensity was collected for both co- and cross-
polarized reflection and is plotted as a function of scattered
angle in Figure 5b. The peak cross-polarized scattering angle
matches well with the theoretical angle of θr = 11.5° (dashed
line) and the diffraction efficiency of the +1 order is 83% with
the major source of inefficiency arising from light remaining in
the zeroth order copolarized beam. The slight reduction in
conversion efficiency, compared to the spatially homogeneous
arrays, indicates that coupling between resonators plays a role
in the response and must be taken into account when designing
sharp phase gradients for applications such as lensing when
dissimilar resonators are placed next to each another.
In summary, we have experimentally demonstrated broad- Figure 5. (a) Electric field plot of the meta-reflectarray illumined with
band linear polarization conversion and optical vortex beam a normally incident x-polarized Gaussian beam with a wavelength of
generator by employing a meta-reflectarray based on dielectric 1550 nm and waist of 7 μm. The metasurface is composed of the eight
antennae. Replacing plasmonic antennae with their dielectric Si cut-wire resonators from Figure 3 with a unit cell period of 650 nm.
counterparts allows loss to be reduced leading to increased (b) Far-field scattered light as a function of angle for both co- and
efficiency. The trade-off is that dielectric based metasurfaces cross-polarizations. The dotted line corresponds to the solution of the
generalized Snell’s law and matches well with the full-wave simulation.
will invariably have a slightly larger unit cell size at optical
frequencies and can be affected by resonator coupling, issues
associated with the relatively modest refractive index of viable normal incidence or sharp phase profiles. However, as shown
constituent materials. This may limit applications requiring off- here, this is not a significant limitation for polarization control
1398 dx.doi.org/10.1021/nl4044482 | Nano Lett. 2014, 14, 1394−1399
Nano Letters Letter

or in realizing reflective phase plates for complex beam (21) Peng, L.; Ran, L.; Chen, H.; Zhang, H.; Kong, J.; Grzegorczyk,
formation. T. Phys. Rev. Lett. 2007, 98, 157403.

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(22) Popa, B.-I.; Cummer, S. Phys. Rev. Lett. 2008, 100, 207401.
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ASSOCIATED CONTENT
12, 60−69.
*
S Supporting Information (24) Ginn, J.; Brener, I.; Peters, D.; Wendt, J.; Stevens, J.; Hines, P.;
Device fabrication, modeling, vortex beam characterization, and Basilio, L.; Warne, L.; Ihlefeld, J.; Clem, P.; Sinclair, M. Phys. Rev. Lett.
Figures S1−S8. This material is available free of charge via the 2012, 108, 097402.
Internet at http://pubs.acs.org. (25) Shi, L.; Tuzer, T. U.; Fenollosa, R.; Meseguer, F. Adv. Mater.

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2012, 24, 5934−5938.
(26) Moitra, P.; Yang, Y.; Anderson, Z.; Kravchenko, I. I.; Briggs, D.
AUTHOR INFORMATION P.; Valentine, J. Nat. Photonics 2013, 7, 791−795.
Corresponding Author (27) Staude, I.; Miroshnichenko, A. E.; Decker, M.; Fofang, N. T.;
*E-mail: [email protected]. Liu, S.; Gonzales, E.; Dominguez, J.; Luk, T. S.; Neshev, D. N.; Brener,
I.; Kivshar, Y. ACS Nano 2013, 7, 7824−7832.
Notes (28) Huang, M. C. Y.; Zhou, Y.; Chang-Hasnain, C. J. Nat. Photonics
The authors declare no competing financial interests.

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2007, 1, 119−122.
(29) Mutlu, M.; Akosman, A. E.; Kurt, G.; Gokkavas, M.; Ozbay, E.
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Scientific User Facilities Division, Office of Basic Energy 1875−1877.
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