Lecture 2

Accuracy of Machine Tools

2-1

Outline
• Definition of Accuracy
• Accuracy Measurement Standards
• Classification of Errors
• Definition of Errors

2-2
 Definition of Accuracy
• Accuracy is the ability to tell the truth or:
¾The maximum translational or rotational error
between any two points in the machine's working
volume.
¾The deviation of the measured value from the
‘true’ value.
¾Linear, planar, and volumetric accuracy can all
be defined for a machine.

2-3

Definition of Accuracy
• Repeatability (Precision) is the ability to tell the
same story over and over again or:
¾ The error between a number of successive attempts to
move the machine to the same position.
¾ Repeatability is often considered to be the most important
parameter of a computer controlled machine (or sensor).
¾ Often the intent is to map the errors and then compensate
for them.
• Minimize static friction and thermal variants to
get better repeatability.
• Note: mechanical accuracy for devices is costly,
whereas repeatability is not expensive.
2-4
 Definition of Accuracy
• Resolution is how detailed your story is
¾ The smallest discernible change in the parameter of
interest that can be detected by the instrument,
¾ The smallest positional increment that can be
commanded of a motion control system,
¾ The smallest programmable step,
¾ The smallest mechanical step the machine can make
during point to point motion.
• Resolution gives a lower bound on the
repeatability.
• Minimize static friction to get better resolution.
2-5

Accuracy, Repeatability, Resolution

2-6
Accuracy vs. Precision

2-7

Repeatability

2-8
 Accuracy, Precision and Standard Deviation
• A measurement can be precise, but may not be
accurate.
• The standard deviation (σ) is a statistical measure
of the precision in a x series of repetitive xi
measurements with n, the number of data, xi is
each individual measurement, and the mean of all
measurements.
• The value xi − x is called the residual for each
measurement.

∑
n
( x − x ) 2
1 n
σ= i =1
； x = ∑i =1 xi
i

n −1 n 2-9

Accuracy, Repeatability, Resolution

Curve Fitting:
One adjusting point:: Linear
Two adjusting points: Bilinear
Three Points & above: two & higher order curve

2-10
• ej is the uncorrected systematic error, at the point j,
with respect to the starting point of the calibration
• Hj is the uncorrected hysteresis error at point j.
(backlash)
• Pj is the unidirectional repeatability at the point j.
• Rj is the bidirectional repeatability at the point j,
which includes hysteresis effects, thus Rj=Pj+Hj. 2-11

National Standards Organizations

• American National Standards Institute
(ANSI)
• British Standards Institute (BSI)
• Deutsches Institut für Normung
(DIN)
• Japanese Industrial Standards (JIS)
• American Society of Mechanical Engineers (ASM
E)
• NMTBA (United States), ISO 230-1~9 (Europe),
BSI BS 4656 Part 16 (British), VDI/DGQ 3441
(German), JIS B 6336-1986 (Japanese), and
ASME B5.54-92 (USA). 2-12
 Accuracy Measurement Standards
• ASME B5.54 Methods for Performance Evaluation of
Computer Numerically Controlled Machining Centers
which "establishes requirements and methods for
specifying and testing the performance of [computer
numerically controlled] CNC machining centers.“
• ANSI/ASME B5.54 defines common terms, machine types,
machining ranges (workzone), position resolution, and
operating modes. It also addresses machine environmental
requirements and responses. This standard provides tests
for evaluating machine accuracy performance as a
machine tool, the machine as a measuring machine with
probes in the spindle, machine cutting performance and,
optionally, the machining of test parts for the assessment
of point-to-point machining capability and contouring
capability. 2-13

Accuracy Measurement Standards

• ISO 230-1:1996
¾ Test code for machine tools - Part 1: Geometric accuracy of machines operating under
no-load or finishing conditions.
• ISO 230-2:2006
¾ Test code for machine tools - Part 2: Determination of accuracy and repeatability of
positioning of numerically controlled axes.
• ISO 230-3:2007
¾ Test code for machine tools - Part 3: Determination of thermal effects.
• ISO 230-4:2005
¾ Test code for machine tools - Part 4: Circular tests for numerically controlled machine
tools.
• ISO 230-5:2000
¾ Test code for machine tools - Part 5: Determination of the noise emission.
• ISO 230-6:2002
¾ Test code for machine tools - Part 6: Determination of positioning accuracy on body
and face diagonals (Diagonal displacement tests).
• ISO 230-7:2006
¾ Test code for machine tools - Part 7: Geometric accuracy of axes of rotation.
• ISO/TR 230-9:2005
¾ Test code for machine tools -- Part 9: Estimation of measurement uncertainty for
machine tool tests according to series ISO 230, basic equations. 2-14
 Gage Accuracy Requirement for
Errors Measuring in Machine Tools
• Gage accuracy requirement in factory
¾gage accuracy requires a 4-to-1 ratio, machine-
measuring accuracy must be four times more
accurate than the specified part accuracy,
• Gage accuracy requirement in national
standard laboratory
¾ according to a National Institute of Standards
and Technology standard that gage accuracy
requires a 10-to-1 ratio.

2-15

Equations of Error in ISO 230-2

• E↑ or E↓: Unidirectional Systematic
Deviation of Positioning of an Axis (E↑ or
E↓ ; 單軸單向系統偏差)

Forward : E ↑= max[ X i ↑] − min[ X i ↑]

Backward : E ↓= max[ X i ↓] − min[ X i ↓]

where X i ↑=
∑ X ij
; Xi
↑
↓=
∑ X ij ↓
n n
n is the number of measured points 2-16
Equations of Error in ISO 230-2
• E: Bidirectional Systematic Deviation of
Positioning of an Axis (單軸雙向系統偏差)

E = max[ X i ↑; X i ↓] − min[ X i ↑; X i ↓]

2-17

Equations of Error in ISO 230-2

• σ i : Standard Deviation (標準差)
1
σi =
n −1
∑ ( X i − X i )2

¾Forward Direction
1
σ i ↑=
n −1
∑ i( X ↑ − X i ↑ ) 2

¾Backward Direction
1
σ i ↓=
n −1
∑ ( X i ↓ − X i ↓) 2
2-18
Equations of Error in ISO 230-2
• R↑ or R↓: Unidirectional Repeatability of
Positioning of an Axis (單軸單向最大重現性
誤差值)
¾Forward Direction For High Precision
► 4σ is replaced
R ↑= max[4σ i ↑] by 6σ
¾Backward Direction

R ↓= max[4σ i ↓]
2-19

Equations of Error in ISO 230-2

• R: Bidirectional Repeatability of Positioning
of an Axis (單軸雙向重現性誤差值)

R = max[2σ i ↑ +2σ i ↓ + Bi ; R ↑; R ↓]
where Bi = X i ↑ − X i ↓
• For High Precision
¾2σ is replaced by 3σ

2-20
 Equations of Error in ISO 230-2
• A↑ or A↓: Unidirectional Accuracy of
Positioning of an Axis (單軸單向最大精度誤
差值)
¾Forward Direction

A ↑= max[ X i ↑ +2σ i ↑] − min[ X i ↑ −2σ i ↑]

¾Backward Direction

A ↓= max[ X i ↓ +2σ i ↓] − min[ X i ↓ −2σ i ↓]

For High Precision
► 4σ is replaced by 6σ 2-21

Equations of Error in ISO 230-2

• Accuracy (A): Bidirectional Accuracy of
Positioning of an Axis (準確度，單軸雙向
精度誤差值):
A = max[ X i ↑ +2σ i ↑; X i ↓ +2σ i ↓]
− min[ X i ↑ −2σ i ↑; X i ↓ −2σ i ↓]
For High Precision
► 4σ is replaced by 6σ

2-22
 Errors in Machine Tools (1/4)
• Positioning error of each axis
• Straightness of each axis in its
perpendicular axes
• Pitch, Yaw and Roll errors of each of the
axes
• Squareness error between the axes
• Backlash error of each axis (Except for 21
Errors)
• Contouring error of each axis (Except for
21 Errors)
2-23

Errors in Machine Tools (2/4)

• The rigid body 21 errors for three axis
machine tools include three each of the
following errors:
¾ linear displacement,
¾vertical straightness,
¾horizontal straightness,
¾roll angular,
¾pitch angular,
¾yaw angular,
¾and squareness. 2-24
 Errors in Machine Tools (3/4)

2-25

Errors in Machine Tools (4/4)

• Using a conventional laser interferometer
for measuring the straightness and
squareness errors requires a prohibitive
amount of time, leading to the development
of the body diagonal displacement method
for a quick check as defined in the ASME
B5.54 or ISO 230-6 standards.

2-26
Overall Part Error and Error Hierarchy

Bearing and Spindle Deflection

2-27

Classification of Errors
• Accuracy and Repeatability are limited by:
¾ Geometric errors of all components
¾ Kinematic errors
¾ Load induced errors
¾ Thermal errors
¾ Dynamic errors
¾ Calibration errors
¾ Computational errors
• Resolution is limited by
¾ Quality of sensors
¾ Quality of control system
¾ Friction (stick and slip effect)
¾ Backlash
2-28
 Geometric Errors (1/4)

• Geometric errors are those errors that exist

in a machine tool from its basic design, the
inaccuracies built-in during assembly and
as a result of the components used on the
machine. Because of that, they form one of
the greatest sources of inaccuracy.
• These errors originate from the so-called
“quasi-static” accuracy of surfaces moving
relative to each other.
2-29

Geometric Errors (2/4)

• Quasi-static accuracy of surfaces moving
relative to each other (e.g., linear or rotary
motion axes):
¾Linear motion axis:
&Pitch
&Roll
&Yaw
&Straightness (2 components)
&Linear displacement

2-30
 Geometric Errors (3/4)
¾Rotary motion axis:
&Radial error motion (2 components in fixed
coordinate frame, 1 component in rotating frame)
&Axial error motion
&Tilt motion (2 components)
&Angular motion about axis of rotation

2-31

Radial error motion

• Radial error motion - Positioning error of
the rotary stage in the horizontal direction
when the tabletop is oriented in the
horizontal plane. Radial runout is defined
as the total indicated (TIR) reading on a
spherical ball positioned 50 mm above the
tabletop and centered on the axis of rotation.

2-32
 Radial error motion

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2-33

Axial error motion

• Axial error motion - Error of the rotary
stage axis of rotation in the vertical
direction when the stage is oriented in the
horizontal plane. Axial runout is defined as
the total indicated reading (TIR) on a
spherical ball positioned 50 mm above the
tabletop and centered on the axis of rotation.

2-34
 Axial error motion

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2-35

Tilt error motion

• Tilt error motion - Wobble is defined as the
angular error between the actual axis of
rotation and the theoretical axis of rotation.

2-36
 Tilt error motion

2-37
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Geometric Errors (4/4)

• Geometric errors can be smooth and

continuous or they could show hysteresis (遲
滯效應) or random behavior.
• These errors are affected by factors like
surface straightness, surface roughness,
bearing pre-loads etc.

2-38
 Hysteresis Effect (遲滯效應)

2-39

Hysteresis error
• Hysteresis error - A deviation between the
actual and commanded position at the point
of interest caused by elastic forces in the
motion system. Hysteresis also affects bi-
directional repeatability. Accuracy and
repeatability errors caused by hysteresis for
Aerotech rotary stages are accounted for in
the stage specification tables. Elastic forces
in the machine base, load, and load coupling
hardware must also be examined and
minimized for optimal performance.
2-40
 Backlash error
• Backlash error - An error in positioning caused by the
reversal of travel direction. Backlash is the portion of
commanded motion that produces no change in position
upon reversal of travel direction. Backlash is caused by
clearance between elements in the drive train. As the
clearance increases, the amount of input required to
produce motion is greater. This increase in clearance
results in increased backlash error. Backlash also affects
repeatability. Unidirectional repeatability refers to the
repeatability when approached from the same direction. It
does not take into account the effects of backlash.
Bidirectional repeatability specifies the repeatability when
approached from any direction and includes the effects of
backlash. ADR and AOM360 series tables are direct-drive
devices and therefore have zero backlash. 2-41

Feedback inaccuracy
• Feedback inaccuracy - Imperfections in the
operation of the encoder such as non-
uniform division of the grating scale,
imperfections in the photodetector signal,
interpolator errors, hysteresis, friction, and
noise can affect the positioning capabilities
of the rotary stage. For a rotary equipment,
the accuracy and repeatability information
in the specification tables takes all of these
errors into account.
2-42
 Errors in form

2-43

Other Errors
• Kinematic Errors
¾Errors in an axis's trajectory that are caused by
misaligned or improperly sized components
&Squareness between axes
&Parallelism between axes
&Error motions in a closed kinematic chain
&External load induced errors:
¾Errors due to deformation of components
&Gravity load induced errors
&Cutting/probing force induced errors
&Axis acceleration load induced errors 2-44
 Kinematic errors (1/3)
• Kinematic errors are due to the relative
motion errors of several moving machine
components that need to move with precise
functional requirements.
• These errors are particularly significant
during the combined motion of different
axes.
• Such errors occur during linear, circular or
other types of interpolation algorithms and
are more obvious during actual machining.
2-45

Kinematic errors (2/3)

• Errors in motion due to alignment.

2-46
 Kinematic errors (3/3)
Errors in motion due to shape:
• Improper offsets (translational) between
components.
¾Spindle axis set too high above tailstock axis on a
lathe.
• Improper component dimension.
¾Linkage length.
¾Bearing location on a kinematic vee and flat
system.

2-47

Thermal Errors (1/4)

• Thermal errors due to thermal factors account for
40-70% of the total dimensional and shape errors
of a workpiece in precision engineering.
• Six sources of thermal influence are identified:
(i) heat from the cutting process,
(ii) heat generated by the machine,
(iii) heating or cooling provided by the cooling systems,
(iv) heating or cooling influence of the room,
(v) the effect of people, and
(vi) thermal memory from any previous environment
2-48
 Thermal Errors (2/4)
• This heat causes relative expansion of the various
elements of the machine tool leading to inaccurate
positioning of the cutting tool. Consequently
errors due to spindle growth, thermal expansion
of the ballscrews and thermal distortion of the bed
are generated at the tool tip.
• As heat generation at contact points is
unavoidable, this source of error is one of the most
difficult to eliminate completely. In the
manufacture of precision components, error due
to thermal deformation of the machine elements
plays a vital role in limiting the accuracy of the
part produced.
2-49

Thermal Errors (3/4)

• Mean temperature other than 68 °F (20 °C).
¾ Gradients in environment's temperature
¾ Errors caused by thermal expansion of elements:
& External heat sources:
– Mean temperature of the room
– Sun shining through the window onto the machine
– Nearby machine's hot air vent
– Overhead lights
– Operator's body heat
& Internal heat sources:
– Motors
– Bearings
– Machining process
– Pumps
– Expansion of compressed fluids
– Coolant
2-50
 Thermal Errors (4/4)
• Design strategies:
¾Isolate heat sources and temperature control the
system.
¾Maximize conductivity, or insulate
¾Combine one of above with mapping and real
time error correction.
¾May be difficult for thermal errors because of
changing boundary conditions.

2-51

Thermal Sources (1/6)

Description
• Speed creates heat, which impacts accuracy and
repeatability.
• This simple equation becomes more problematic
with the longer cycle times and higher speeds and
feeds of high-speed applications.
• However, most applications focus so much on
keeping heat away from the workpiece that other
areas impacted by thermal distortion are
overlooked.
• Thermal stability is maintained by improved heat
dissipation throughout the machining center's
various components. 2-52
 Thermal Sources (2/6)
Sources
1. Spindle:
¾ High-speed spindles can experience growth due to heat
from friction running at high rpms and require a long
saturation period before they stabilize.
¾ Too much heat will compromise accuracy and can cause
failure.
¾ Makino's patented core cooling and under-race
lubrication system cools the spindle from the inside out to
minimize heat and growth for a shorter saturation period.
¾ The cooling system circulates Makino's spindle oil
through the center of the rotating spindle. At high rpms,
centrifugal force draws the lubricant outward through the
spindle circulating through holes in the inner bearing
races to lubricate and chill the bearings. 2-53

Thermal Sources (3/6)

Makino's patented core

cooling and under-race
lubrication system in high
speed spindle.

2-54
 Thermal Sources (4/6)
2. Ballscrews: ballscrew heat from high
feedrate levels by forcing chilled oil through
the core.
3. Hot chips, and chip-heated coolant are also
kept away by shields installed to protect the
machining center.

2-55

Thermal Sources (5/6)

4. Support Components:
¾Running normal operations, miscellaneous
machining center components can also become
heat sources.
¾The location and design of pumps, motors,
hydraulics and magnetics are key.
¾Some machining centers are designed so these
components are mounted at the rear of the
machine with a dead air space isolating them. To
ensure this heat cannot impact the machining
center, a radiator cooling system is sometimes
used to wrap the machining center column. 2-56
 Thermal Sources (6/6)

5. Environment:
¾But even with these safeguards in place, the shop
environment must be checked for external heat
sources.
¾From sunlight on the machining center to
external heat on the shop floor-any increase or
decrease in temperature can negatively impact
accuracy and repeatability.

2-57

Dynamic Errors
• Errors caused by vibration or control processes:
¾ Vibration:
&External environment (usually through the ground)
&Cutting process
&Rotating masses
¾ Control system:
&Algorithm type (e.g., PID, adaptive, etc.)
&Stick-slip friction
&Varying mass
&Varying stiffness
¾ Switching amplifiers
&Servo loop frequency excites a natural mode of the machine
2-58
 Calibration Errors
• Errors associated with sensors:
¾Intrinsic accuracy
¾Interpolation
¾Mounting errors:
&Position
&Mounting stress
¾Calibration (error associated with the mastering
process)

2-59

Additional Errors
• Computational errors:
¾ Error introduced in the analysis algorithms
¾ Rounding off errors due to hardware
• Additional sources of error (often very difficult to model):
¾ Humidity
¾ Loose Joints
¾ Dirt
• Variations in supply systems:
¾ Electricity
¾ Fluid pressure
¾ Operator inattention
¾ Fluid supply cleanliness
• Operators
2-60
 加工誤差發生方式

2-61

Cutting-force induced errors (1/2)

• The dynamic stiffness of all the components of the
machine tool (namely the bed, column, etc.) that
are within the cutting loop of the machine is
responsible for errors caused as a result of the
cutting action.
• This is one of the major sources of error in metal-
cutting machines as the force involved in the
cutting action is considerable.
• As a result of these forces, the position of the tool
tip with respect to the workpiece varies on account
of the distortion of the various elements of the
machine. 2-62
 Cutting-force induced errors (2/2)

• Depending on the stiffness of the structure

under the particular cutting conditions, the
accuracy of the machine tool could vary.
• Therefore, for a machine with a given
stiffness, a heavy cut would generally
produce more inaccurate components than
a light cut.

2-63

Error Assessment and Budgeting

• Given all the different types of errors that can affect all
different components:
¾ Keeping track of all the errors is such a daunting task:
&Most engineers don't bother and use "experience" to guide the design.
&It is left up to manufacturing and service to work the bugs out.
¾ This seems to be a major source of reliability and performance
problems.
• The solution to a successful project is a good budget:
¾ A project requires a good financial budget to make it feasible.
¾ A project requires a good time budget to make it feasible.
¾ A project requires a good error budget to make it feasible.
• In order to make a good error budget for the system, a
good mathematical model is needed.

2-64
 Glossary
• Home reference mark - the location on a linear scale which
provides an independent electrical output to locate the
home or zero reference position.
• Step - in a stepping motor drive, the minimum rotational
movement allowed by the system.
• Velocity - the rate of change of position with time.
• Holding torque - the amount of torque available from a
stepping motor when the windings are energized but the
rotor is stopped.
• Lead - the distance traveled by the leadscrew nut for each
revolution of the leadscrew.
• Leadscrew pitch - the number of revolutions required to
advance the leadscrew nut one inch.
2-65

Glossary
• Squareness (Orthogonality) - the error from
true 90-degree perpendicularity of two axes.
• Open loop positioning - a positioning system
which does not employ feedback
information.
• Closed-loop positioning - a positioning
system that employs an external feedback
element to measure stage position. Typically,
a linear encoder mounted to the axis will
eliminate hysteresis, backlash, and
leadscrew errors. 2-66
 Glossary
• Linear positioning accuracy - the error between the
desired move and the actual position achieved by a linear
positioning component or stage system.
• Error - the difference between the actual and the desired
condition.
• Accuracy - the deviation from the exact value of the
desired position or velocity.
• Repeatability
¾ a. Uni-directional repeatability - the ability of a system to repeat to a
desired location approaching that location from the same direction
each time.
¾ b. Bi-directional repeatability - the ability of a system to repeat to a
desired location approaching that location from both plus and minus
directions.
• Resolution - the smallest incremental positioning move that
a system can achieve or display.
2-67

Glossary
• Backlash
¾ The amount of free play or clearance between two interactive components in
a drive train or leadscrew, often referred to as a “dead-band” when the
motion direction is reversed.
¾ Backlash error is an error in positioning caused by the reversal of travel
direction. Backlash is the portion of commanded motion that produces no
change in position upon reversal of travel direction. Backlash is caused by
clearance between elements in the drive train.
• Flatness of travel
¾ Flatness is a deviation from the true line of travel perpendicular to the
direction of travel in the vertical plane.
¾ Flatness is the vertical deviation of a single point moving horizontally along
a straight line.
¾ Flatness errors are caused by a combination of roll and pitch errors.
• Straightness of travel
¾ Straightness is a deviation from the true line of travel perpendicular to the
direction of travel in the horizontal plane.
¾ Straightness is the horizontal deviation of a single point moving horizontally
along a straight line.
¾ Straightness errors are caused by yaw and roll errors. 2-68
 Glossary

2-69

Yaw, Pitch and Roll

• Rotation around the front-to-back axis is called
roll.
• Rotation around the side-to-side axis is called
pitch.
• Rotation around the vertical axis is called yaw.

2-70
 Yaw, Pitch and Roll
• The 3D rotations are made in following
order:
¾Roll (Z axe rotation)
¾Yaw (Y axe rotation)
¾Pitch (X axe rotation)

2-71

Yaw, Pitch and Roll

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2-72
 Glossary
• Pitch - rotation about the horizontal axis
perpendicular to the axis of travel.
¾ Pitch is a rotation around an axis in the horizontal plane
perpendicular to the direction of travel. If the position of
interest being measured is not located at the center of
rotation, then the pitch rotation will cause an Abbe error
in two dimensions.
¾ For the X-axis, a pitch rotation will cause an Abbe error
in both the X and Z direction. For the Y-axis, a pitch
rotation will cause an Abbe error in both the Y and Z
direction.
¾ The magnitude of these errors can be determined by
multiplying the length of the offset distance by the sine
and 1-cosine of the rotational angle.
E x = A0 sin θ E z = A0 (1 − cos θ ) A0 : offset distance 2-73

Glossary
• Roll - rotation about the axis of movement while
translating along that axis.
¾ Roll is a rotation around an axis in the horizontal plane
parallel to the direction of travel. If the position of interest
being measured is not located at the center of rotation,
then the roll rotation will cause an Abbe error in two
dimensions.
¾ For the X-axis, a roll rotation will cause an Abbe error in
both the Y and Z direction. For the Y-axis, a roll rotation
will cause an Abbe error in both the X and Z direction.
¾ The magnitude of these errors can be calculated by
multiplying the length of the offset distance by the sine
and cosine of the rotational angle. 2-74
 Glossary
• Yaw - rotation about the vertical axis which is
perpendicular to the axis of travel.
¾ Yaw is a rotation around an axis in the vertical plane
perpendicular to the direction of travel. If the position of
interest being measured is not located at the center of
rotation, then the yaw rotation will cause an Abbe error
in two dimensions.
¾ For X- or Y-axis stages, yaw rotation will cause an Abbe
error in both the X and Y direction.
¾ The magnitude of these positioning errors can be
calculated by multiplying the length of the offset distance
by the sine and cosine of the rotational angle.
2-75

Calculate of Roll, Yaw, Pitch

(Given angles at three directions)

• Calculation:
¾Rx (Roll): Rotation about X by x radians
¾Ry (Yaw): Rotation about Y by y radians
¾Rz (Pitch): Rotation about Z by z radians

2-76
 Calculate of Roll, Yaw, Pitch
(Given angles at three directions)

1 0 0 cos( z ) sin( z ) 0
Rx = 0 cos( x) sin( x) Rz = − sin( z ) cos( z ) 0
0 − sin( x) cos( x) 0 0 1

cos( y ) 0 − sin( y )
Ry = 0 1 0
sin( y ) 0 cos( y )

2-77

For Example:

cos( z ) + sin( z ) cos( x) cos( z ) sin( y ) + 0

sin( z ) sin( x) sin( y ) sin( z ) sin( x) sin( y )

− sin( z ) cos( y ) + cos( z ) cos( x) sin( z ) sin( y ) + 0

cos( z ) sin( x) sin( y ) cos( z ) sin( x) cos( y )
Rz Rx R y =
cos( x) sin( y ) − sin( x) cos( x) cos( y ) 0

0 0 0 1

2-78
 Calculate of Roll, Yaw, Pitch
(Given errors at three directions)

where xl_x, xl_y are the values taken from the X-,
and Y-axis accelerometers; mx, my, mz are the
values of the X-, Y-, and Z-axis sensors.

2-79

Glossary
• Concentricity - the difference between a rotating
member is centerline and the actual true
centerline of rotation.
• Encoder error (編碼器誤差)
¾ Imperfections in the operation of the encoder such as
absolute scale length, non-uniform division of the grating
scale, imperfections in the photo-detector signal,
interpolator errors, hysteresis, friction, and noise can
affect the positioning capabilities of the linear translation
stage. The accuracy and repeatability information in the
specification tables takes all of these errors into account
except absolute scale length. Absolute scale length is
affected by thermal expansion of the encoder scale.
Temperature considerations must be accounted for
during system design and specification.
2-80
 Glossary
• Hysteresis error (遲滯誤差)
¾ Hysteresis error is lost movement in the absolute
position of an object when motion is reversed. It
is caused by accumulated forces in elastic
materials.
¾Hysteresis error is a deviation between the actual
and commanded position at the point of interest
caused by elastic forces in the motion system.
¾Hysteresis also affects bi-directional repeatability.

2-81

Abbe error (阿貝誤差) (1/4)

• Abbe error (阿貝誤差)
¾Displacement error caused by angular errors in
bearing ways and an offset distance between the
point of interest and the drive mechanism (ball
screw) or feedback mechanism (linear encoder).
¾指由於量具之量測軸與待測零件之尺寸軸的不
一致，因量具的彈性變形所產生之量測誤差值
稱之 。

2-82
 Abbe error (2/4)

A0

Abbe Error= offset distance x tangent of offset angle

= A0‧tanθ 2-83

Abbe error (3/4)

High quality translation stages have sub-micron
runout errors with angular deviations on the
order of 100–150 µradians.

2-84
 Abbe error (4/4)

2-85

Cosine Error (1/2)

• Cosine error is most typically seen with test-style
indicators and lever type electronic probes doing
run-out and concentricity checks on shafts and
bores; or, in engineering and tool making, doing
checks of parallelism and alignment of flat faces.
• Cosine error results from an angular misalignment
between the motion of a positioning table, and the
accuracy determining element (leadscrew, encoder,
or laser interferometer beam path).

2-86
 Cosine Error (2/2)

E = Ls − L = Ls (1 − cos θ )
2-87

Example

2-88
 Errors from Motor (1/3)
• Positioning errors
¾They are caused by errors in the position
detecting scale and servo system in the case of a
closed-loop type NC (linear scale feedback type
NC). For a semi-closed-loop type NC (encoder
feedback type NC), they are caused by errors in
the servo control system and the ball screw
driving mechanism (nut, ball screw, coupling,
servo motor).

2-89

Errors from Motor (2/3)

• Straightness errors, Squareness errors
¾They are caused by profile errors of the bed,
column, saddle and their guide ways in the
condition of the machine tool at installation.
• Angular motion errors I
¾Same as straightness/squareness errors, they are
caused by profile errors of bed, column, saddle
and their guide ways at the condition the
machine tool was installed.

2-90
 Errors from Motor (3/3)
• Angular motion error II
¾The magnitudes of angular motion errors are
determined by the magnitudes of the moment
added to the sliders by the gravity, counter
balance force, ball screw driving force, and
sliding friction during the motion of sliders. They
are also determined by the rigidity of the guide
ways that restrict the sliders. Inertial force should
also be considered when the acceleration of feed
motion is very high.
2-91

Origins of motion errors in NC

machine tools
Positioning Errors
• Errors in the scaling system
¾ uniform expansion or contraction of the linear scale, cyclic error and
local error.
¾ Thermal expansion and distortion errors, where temperature change
causes the leadscrew to grow or the temperature gradient to distort
machine geometry, also affect the positioning errors.
• Errors in the ball screw driving system
¾ uniform expansion or contraction of the ball screw, pitch error,
whirling, lost-motion, backlash, tilling of the thrust bearing: errors in
coupling, transmission gear, timing belt, etc.
• Errors in the servo control system
¾ stick-motion, stick-slip, inadequate pitch error compensation,
inadequate backlash compensation, reduction in radius during
circular interpolation motion due to response lag, mismatching of
position loop gain, noise in detectors. 2-92
 Origins of motion errors in NC
machine tools
• Straightness errors, squareness errors
¾ Straightness errors and squareness errors of guide ways.
¾ Straightness errors, caused when the guide way is not
perfectly straight, usually because of weight shifting or
overhanging during axis travel, may lead to positioning
errors.
• Angular motion errors I
¾ Straightness errors and parallelity errors of guide ways.
• Angular motion errors II
¾ Asymmetrical guide way and ball screw, counter balance,
shift of weight, levitation of slider. etc.
2-93

Classification of motion error

origins
• Errors in positioning mechanism
¾(a) (first order, second order) uniform expansion
or contraction of the ball screw and linear scale
¾(b) cyclic error of the ball screw, linear scale, etc.
¾(c) noise in detectors
¾(d) backlash
¾(e) backlash compensation
¾(f) pitch error compensation

2-94
 Classification of motion error
origins
• Profile errors of guide way
¾ (g) squareness errors between 2 axes
¾ (h) straightness errors
&(h-1) produced during manufacturing and assembling
&(h-2) due to improper installation of base
&(h-3) due to shift of weight
¾ (i) moment
&(i-l) rolling of vertical axis
&(i-2) pitching of vertical axis
& (i-3) yawing of vertical axis
& (i-4) yawing of vertical axis with pre-compensated geometry
& (i-5) yawing of horizontal axis
¾ (j) parallelity error
¾ (k) collision of hose, friction of the sliding cover 2-95

Classification of motion error

origins
• Feedrate dependent errors
¾(l) lost motion
¾(m) stick motion
¾(n) stick-slip
¾(o) mismatching of position loop gain
¾ (p) decrease in radius of circular interpolation
motion due to response lag in servo system
¾(q) vibration of hydraulic valve, chain, etc.
¾(r) levitation of sliders due to dynamic pressure
2-96
 First Order Uniform Expansion or
Contraction of Linear Scale

2-97

Second Order Uniform Expansion or

Contraction of Linear Scale

2-98
Second Order Straightness Error of
Guide Way

2-99

Elastic Deformation Caused by

Improper Installation of Basement

2-100
 Elastic Deformation Caused by Shift
of Weight

2-101

Movement of Spindle Head in the

Yawing

First Order function of the Y

Coordinate

Full Line: Upward

Dotted Line: Downward

2-102
 Movement of Spindle Head in the
Yawing

Second Order function of

the Y Coordinate

Full Line: Upward

Dotted Line: Downward

2-103

Parallelity Error

2-104
Yawing of Narrow Guide

2-105

Lost Motion

2-106
 Lost Motion-Stick-Slip

2-107

Machine Design is Key to

Volumetric Accuracy
• Based on their experience in the field, the
leveling systems as the design characteristic
usually impacting volumetric accuracy.
• High-performance machining centers utilize
a three-point leveling system and
incorporate much thicker castings to carry
the weight and maintain the accuracy
between the leveling points.

2-108
 參考文獻
1. http://www.mmsonline.com/articles/039803.html
2. http://www.aerotech.com/products/engref/strait2
.html
3. Y. Kakino, Y. Ihara, A. Shinohara, “Accuracy
inspection of NC machine tools by double ball
bar method,” Edited by Johannes Heidenhain
GmbH, Hanser Gardner Publications, Munich,
1993 .
4. Layton Carter Hale,” Principles and Techniques
for Designing Precision Machines,” Degree of
Doctor of Philosophy in Mechanical Engineering,
Massachusetts Institute of Technology, 1999.
2-109