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    EC8001 Syllabus

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    Sarika Ayyathurai
    The document outlines the objectives and content of a course on microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). The course covers introduction to MEMS and NEMS, fabrication technologies like photolithography and etching, micro sensors including acoustic and pressure sensors, micro actuators using various actuation methods, and nano devices applying quantum mechanics. The objectives are to introduce concepts, fabrication, design of micro sensors and actuators, and nano systems.

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    EC8001 Syllabus

    Uploaded by

    Sarika Ayyathurai
    213 views1 page
    The document outlines the objectives and content of a course on microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). The course covers introduction to MEMS and NEMS, fabrication technologies like photolithography and etching, micro sensors including acoustic and pressure sensors, micro actuators using various actuation methods, and nano devices applying quantum mechanics. The objectives are to introduce concepts, fabrication, design of micro sensors and actuators, and nano systems.

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    EC8001 syllabus

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    The document outlines the objectives and content of a course on microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). The course covers introduction to MEMS and NEMS, fabrication technologies like photolithography and etching, micro sensors including acoustic and pressure sensors, micro actuators using various actuation methods, and nano devices applying quantum mechanics. The objectives are to introduce concepts, fabrication, design of micro sensors and actuators, and nano systems.

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    © All Rights Reserved
    Download as DOCX, PDF, TXT or read online from Scribd
    Download as docx, pdf, or txt
    213 views1 page

    EC8001 Syllabus

    Uploaded by

    Sarika Ayyathurai
    The document outlines the objectives and content of a course on microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). The course covers introduction to MEMS and NEMS, fabrication technologies like photolithography and etching, micro sensors including acoustic and pressure sensors, micro actuators using various actuation methods, and nano devices applying quantum mechanics. The objectives are to introduce concepts, fabrication, design of micro sensors and actuators, and nano systems.

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    of 1

    28/06/2019

    EC8001 MEMS AND NEMS

    OBJECTIVES:
    To introduce the concepts of micro and nano electromechanical devices
    To know the fabrication process of Microsystems
    To know the design concepts of micro sensors and micro actuators
    To introduce the concepts of quantum mechanics and nano systems

    UNIT I INTRODUCTION TO MEMS AND NEMS 9

    Introduction to Design of MEMS and NEMS, Overview of Nano and Microelectromechanical Systems,
    Applications of Micro and Nano electromechanical systems, Materials for MEMS and NEMS: Silicon, silicon
    compounds, polymers, metals.

    UNIT II MEMS FABRICATION TECHNOLOGIES 9

    Photolithography, Ion Implantation, Diffusion, Oxidation, CVD, Sputtering Etching techniques, Micromachining:
    Bulk Micromachining, Surface Micromachining, LIGA.

    UNIT III MICRO SENSORS 9

    MEMS Sensors: Design of Acoustic wave sensors, Vibratory gyroscope, Capacitive Pressure sensors, Case study:
    Piezoelectric energy harvester

    UNIT IV MICRO ACTUATORS 9

    Design of Actuators: Actuation using thermal forces, Actuation using shape memory Alloys, Actuation using
    piezoelectric crystals, Actuation using Electrostatic forces, Case Study:RF Switch.

    UNIT V NANO DEVICES 9

    Atomic Structures and Quantum Mechanics, Shrodinger Equation, ZnO nanorods based NEMS device: Gas sensor.

    TOTAL: 45 PERIODS

    OUTCOMES:

    On successful completion of this course, the student should be able to:


    CO1: Interpret the basic operation of micro/nano electromechanical systems including their applications and
    advantages

    CO2: Recognize the use of materials in micro fabrication and describe the fabrication processes including surface
    micromachining, bulk micromachining and LIGA.

    CO3: Analyze the key performance aspects of electromechanical transducers like Acoustic wave sensors, Capacitive
    Pressure sensors and Vibratory gyroscope

    CO4: Design actuators for performing actuation using thermal forces, electrostatic forces, shape memory alloys and
    piezoelectric crystals

    CO5: Comprehend the theoretical foundations of quantum mechanics and Nano systems

    REFERENCES:
    1. Marc Madou, ―Fundamentals of Microfabrication‖, CRC press 1997.
    2. Stephen D. Senturia,‖ Micro system Design‖, Kluwer Academic Publishers,2001
    3. Tai Ran Hsu ,‖MEMS and Microsystems Design and Manufacture‖ ,Tata Mcraw Hill, 2002.
    4. Chang Liu, ―Foundations of MEMS‖, Pearson education India limited, 2006,
    5. Sergey Edward Lyshevski, ―MEMS and NEMS: Systems, Devices, and Structures‖ CRC Press, 2002

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