K550X Sputter Coater

Instruction Manual

For technical and applications advice plus our on-line shop for
spares and consumable parts visit www.quorumtech.com
Quorum Technologies Ltd
South Stour Avenue
Ashford
Kent
TN23 7RS Tel: +44 (0) 1233 646332
UK Fax: +44 (0) 1233 640744
Email: [email protected]
Website: http:///www.quorumtech.com

For further information regarding any of the other products designed and manufactured by Quorum
Technologies, contact your local representative or directly to Quorum Technologies at the address
above.

Issue Date Details Revised By

1 07/02/2000 Initial Issue for new instrument DJR
2 10/09/2002 Page 1 Photo added RIS
3 31/12/2003 Revision JB
4 12/01/2007 Paragraph removed re: gas inlets HR
5 01/08/2007 Company name change, new document layout JLS

Disclaimer
The components and packages described in this document are mutually compatible and
guaranteed to meet or exceed the published performance specifications. No performance
guarantees, however, can be given in circumstances where these component packages are used
in conjunction with equipment supplied by companies other than Quorum Technologies Ltd.

Quorum Emitech is a wholly owned business of Quorum Technologies Limited. Registered offices Unit 19 Charlwoods Road,
East Grinstead, West Sussex. RH19 2HL. Registered in England and Wales, company No. 4273003.
 K550X Sputter Coater

1 Contents

1.1 Section Contents

1 Contents .......................................................................................................... 3
1.1 Section Contents .................................................................................................. 3
1.2 List of Figures....................................................................................................... 4
1.3 List of Tables ........................................................................................................ 4
2 Health and Safety............................................................................................ 5
2.1 Control of Substances Hazardous to Health (COSHH) ........................................ 5
2.2 WEEE Compliance............................................................................................... 5
2.3 Conformity ............................................................................................................ 6
2.4 Hazard Signal Words ........................................................................................... 6
2.5 Fail Safe ............................................................................................................... 6
3 Description ...................................................................................................... 7
3.1 K550X Sputter Coater .......................................................................................... 7
3.1.1 Features................................................................................................................. 7
3.1.2 Benefits.................................................................................................................. 8
3.2 Specifications ....................................................................................................... 8
3.2.1 Services ................................................................................................................. 8
3.3 K150X FTM Option............................................................................................... 9
4 Installation..................................................................................................... 10
4.1 Preliminary Checks ............................................................................................ 10
4.2 Connections ....................................................................................................... 11
4.3 Initial Operating Checks ..................................................................................... 13
5 Operation....................................................................................................... 14
5.1 Display................................................................................................................ 14
5.2 Setting Operating Parameters............................................................................ 15
5.3 To Check or Modify Parameters......................................................................... 15
5.4 Cycle Sequence ................................................................................................. 16
5.5 Pump Hold Feature ............................................................................................ 17
5.6 Sputtering Protocols ........................................................................................... 18
6 Service and Maintenance............................................................................. 19
6.1 Maintenance....................................................................................................... 19
6.2 Changing the Target........................................................................................... 19
6.3 Troubleshooting the K550X................................................................................ 20
6.4 Spares ................................................................................................................ 21
6.5 Accessories ........................................................................................................ 22
6.6 SEM Specimen Stubs ........................................................................................ 23
6.7 Fuse Listings ...................................................................................................... 24
7 Appendices.................................................................................................... 25
7.1 World Wide Electrical Supplies .......................................................................... 25
7.2 Pump Plug Wiring .............................................................................................. 26
7.3 Return of Goods ................................................................................................. 27
7.3.1 General Introduction:............................................................................................ 27
7.3.2 Health and Safety Declaration.............................................................................. 27
7.3.3 Despatch.............................................................................................................. 27
7.3.4 Return Address: ................................................................................................... 27
7.3.5 Declaration of Contamination Form...................................................................... 28
8 Index .............................................................................................................. 29

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1.2 List of Figures

Figure 2-1: WEEE Directive Symbol ..................................................................................................... 5
Figure 3-1: K550X Sputter Coater ......................................................................................................... 7
Figure 3-2: K150X Film Thickness Monitor Option ................................................................................ 9
Figure 4-1: K550X Rear Panel ............................................................................................................ 11
Figure 5-1: K550X Front Panel............................................................................................................ 14
Figure 5-2: Sputtering Deposition Rate using Gold ............................................................................. 16

1.3 List of Tables

Table 1: Specifications of the K550X Sputter Coater............................................................................. 8
Table 2: K550X Rear Panel Functions ................................................................................................ 11
Table 3: K550X Power Requirements ................................................................................................. 12
Table 4: K550X Front Panel Controls .................................................................................................. 14
Table 5: Setting Operating Parameters ............................................................................................... 15
Table 6:- Maintenance Tasks .............................................................................................................. 19
Table 7:- Spare Parts for the K550X ................................................................................................... 21
Table 8:- Accessories for the K550X................................................................................................... 22
Table 9:- SEM Specimen Stubs for the K550X.................................................................................... 23
Table 10:- Fuse Listing for the 230 Volt K550X ................................................................................... 24
Table 11:- Fuse Listing for the 115 Volt K550X ................................................................................... 24
Table 12:- Electrical supplies World Wide........................................................................................... 25
Table 13: Pump Plug Wiring ............................................................................................................... 26
Table 14: Declaration of Contamination Form ..................................................................................... 28

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 K550X Sputter Coater

2 Health and Safety

Safety is very important when using any instrumentation.
Quorum Technologies is committed to providing a safe working environment for its
employees and those that use it's equipment and conducts its business responsibly, and in
a manner designed to protect the health and safety of its customers, employees and the
public at large. It also seeks to minimise any adverse effects that its activities may have on
the environment.
Quorum Technologies regularly reviews its operations to make environmental, health and
safety improvements in line with UK and European Community legislation.
Quorum Technologies cannot be held responsible for any damage, injury or consequential
loss arising from the use of its equipment for any other purposes, or any unauthorised
modifications made to the equipment.
All service work carried out on the equipment should only be undertaken by suitably
qualified personnel. Quorum Technologies is not liable for any damage, injury or
consequential loss resulting from servicing by unqualified personnel. Quorum Technologies
will also not be liable for damage, injury or consequential loss resulting from incorrect
operation of the instrument or modification of the instrument.

2.1 Control of Substances Hazardous to Health (COSHH)

The E.C. legislation regarding the “Control of Substances Hazardous to Health” requires
Quorum Technologies to monitor and assess every substance entering or leaving their
premises. Consequently any returned goods of whatever nature must be accompanied by
a declaration form Health and Safety Declaration form completed. (Appendix -7.3.5 for
the form)
Without this declaration Quorum Technologies reserves the right not to handle the
substance/item. Also in accordance with E.C. regulations we will supply on request hazard
data sheets for substances used in our instruments.

2.2 WEEE Compliance

This product is required to comply with the European Union’s Waste Electrical &
Electronic Equipment (WEEE) Directive 2002/96/EC.

Figure 2-1: WEEE Directive Symbol

For full details of our environmental policies including WEEE please visit
http://www.quorumtech.com/environmental_policy.htm

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 K550X Sputter Coater

2.3 Conformity
This Equipment of this Design and manufacture and marked CE, conforms with the
requirements of the European Directives EMC 89/336/EEC & LVD 73/23/EEC.

2.4 Hazard Signal Words

The standard three hazard signal words are defined as follows:
• DANGER - imminently hazardous situation or unsafe practice that, if not
avoided, will result in death or severe injury.
• WARNING - potentially hazardous situation or unsafe practice that, if not
avoided, could result in death or severe injury.
• CAUTION - potentially hazardous situation or unsafe practice that, if not
avoided, may result in minor or moderate injury or damage to equipment.

2.5 Fail Safe

This Equipment will “fail safe” in the presence of excessive RF, Electrostatic Discharge or
Mains Transients. While a loss of function could occur under extreme circumstances the
Equipment’s operation will be fully recoverable under normal operating conditions

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 K550X Sputter Coater

3 Description

3.1 K550X Sputter Coater

The K550X system employs a Magnetron Target Assembly, which enhances the
efficiency of the process using low voltages, and giving a fine grain; cool sputtering,
without the need to cool the target or the specimen stage.
The specimen stage accommodates a range of specimen types and stubs, which
together with pre-selectable parameters and automatic control, gives defined and
repeatable film thickness depositions.
The Instrument is fitted with 60mm diameter x 0.1mm thick, Gold, quick-change target
giving optimum consumable cost performance.
The integrated instrument panel and plug-in electronics maximise 'up-time' and, with
user-friendly designs, ensures satisfactory multi-user discipline.
The sputtering parameters can be pre-set, including the gas bleed needle valve, which
has electromagnetic valve back-up.
The sputtering head is interlocked, and the system can easily accommodate a K250
Carbon Coating Attachment.
The independent vacuum pump is controlled by the Instrument throughout the fully
automatic coating cycle.

Figure 3-1: K550X Sputter Coater

3.1.1 Features
• Fully Automatic Control
• Low Voltage Sputtering
• High Resolution Fine Coating (Order of 2nm Gold Grain)
• Special Rotating Stage with full Tilt Facility fitted as standard
• Even Thickness Deposition (Typically 20nm or 200 Angstroms for SEM work)
• 165mm Diameter (6 inches) Chamber
• Can be integrated with Film Thickness Monitor

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3.1.2 Benefits
• Easy to operate
• No cooling required
• Precise reproducible coatings
• Fully adaptable to a wide range of specimens
• Repeatable film thickness depositions
• Easy loading and unloading of specimens
• Can pre-set deposition thickness

3.2 Specifications
Specifications of the K550X Sputter Coater Unit

Instrument Case 450mm Wide x 350mm Deep x 175mm High

Work Chamber Borosilicate Glass 165mm Dia x 125mm High
Safety Shield Polycarbonate
Weight 18 Kg
Target 60mm Dia x 0.1mm Thick (Gold fitted as Standard)
Specimen Stage 60mm Dia. Rotating Stage with Tilt facility. (Spacing to
Target 40mm)
Vacuum Gauge Range ATM - 1x10-4 mbar
Deposition Range 0-50mA
Deposition Rate 0-25nm/Minute
Sputter Timer 0-4 minutes
Pre-set Needle Valve Control of Argon Supply
Table 1: Specifications of the K550X Sputter Coater

3.2.1 Services
Services Argon - Nominal 5 psi
Electrical Supply 230V 50 Hz 10 Amp max Supply
115V 60 Hz 16 Amp max Supply
Vacuum Pump No 5 Pump or similar (approx 6m3/hour) pumping speed. Oil
mist filter, Vacuum Hose, (included with instrument.) is
needed (see Technologies EK3175)

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 K550X Sputter Coater

3.3 K150X FTM Option

The K550X can be used with a film thickness monitor, which measures the thickness of
coating deposited on a crystal in the chamber, and hence calculates the thickness
deposited on the sample to give qualitative repeatable coatings.
The FTM can be used in two modes, AUTO or MANUAL. In manual mode the coating
runs for the pre-selected time and the FTM is enabled so that it can count the deposition
and disabled at the end of the coating process.
In Auto mode the required deposition is selected on the FTM and a control signal is
asserted to inform the K550X that AUTO mode has been selected. When the required
amount has been deposited, a control line from the K150X to the K550X will be asserted
which tells the coater to stop. The coating time is loaded with a value, which acts as a
time-out in the event of a fault with the FTM and no coating taking place.
By default the “FTM enabled” option is set to NO in the menu. If using an FTM set this
option to YES. Connect the control lead to the 5-pin DIN socket at the rear of the K550X
and the BNC lead to the BNC socket at the rear of the K550X.

Figure 3-2: K150X Film Thickness Monitor Option

For further information see the K150X manual.

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 K550X Sputter Coater

4 Installation

WARNING – MAINS LEAD

This Equipment must be Earthed and fitted with the correct lead for
the country of operation. This will normally be achieved from the
correct mains supply socket.

It is important that this equipment is installed and operated by skilled personnel in

accordance with these instructions. Failure to do so may result in damage, and
impair protection provided. 'If in doubt - ask'.
A suitable location should be provided for the unit - either operated on a bench or the
recommended trolley. The total weight of the system is 18 Kg. The system operating
environment ambient temperature range is 15oC to 25oC in a non-condensing relative
humidity of not more than 75%. Sufficient ventilation is required, and positioning should
be out of direct sunlight. The system is rated for continuous operation other than those
supplies specified.
.

4.1 Preliminary Checks

Remove Instrument from packing and place on appropriate operational position. Carry
out visual inspection for any signs of transit damage.
Remove Accessories Pack and check contents against K550X Accessories Pack
Shipping List.
Ensure that all areas of the Instrument are free of loose packaging material. Check
specifically the Instrument chamber, glass cylinder, and 'L' gaskets. (Do not use vacuum
grease on gaskets.)
Where a vacuum pump has been supplied, carry out preliminary checks in accordance
with manufacturers recommendations. ( Refer to: Appendix 7.2 )

NOTE: - If you are using existing or alternative vacuum pump, and have any difficulty with
connections, please advise.

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 K550X Sputter Coater

4.2 Connections

WARNING – EARTH CONNECTOR

This Equipment is normally supplied from 3 pin supply including Earth.
If only 2 pin supply is available a separate Earth must be fitted.
The supplementary Earth stud can be used to facilitate this requirement.

Connections should only be made in accordance with instructions. Refer To: Figure 4-1
and Table 2.

Figure 4-1: K550X Rear Panel

UNDER NO CIRCUMSTANCES SHOULD ANY OTHER CONNECTIONS OR

OUTLETS/INLETS BE USED FOR ANY OTHER EQUIPMENT OR SERVICES.

WARNING - OUTPUT
This is for the pump supply only and is the mains voltage at a maximum of
8 Amps

TITLE FUNCTION
Rocker Switch/ Power Inlet/ Main power on to Instrument.
Fuseholder

Pump Out Power out to pump controlled by Instrument

Gas Inlet Process gas inlet supply from low pressure
regulator.
Coating Output HT output to cathode (target).
Fuse 2 HT Power Supply Fuse
Table 2: K550X Rear Panel Functions
NOTE: - Any other items on rear panel not listed are for common manufacturing and are
not available for this Instrument.

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 K550X Sputter Coater

Note: - A single phase AC supply with Earth is required - selected to the correct voltage
for the country of operation. Either nominal 240V or nominal 120V. The voltage
and frequency range is:

Nominal 240 Max. Current 10A 200 - 264V 47Hz To 63Hz

Nominal 120 Max. Current 20A 90V - 132V 47Hz To 63Hz
Table 3: K550X Power Requirements

For fuse ratings and voltages refer to: Table 10 and Table 11 Fuse Listings
If required, carry out process gas connections to rear panel (Refer To: Figure 4-1) with
tubing and connectors provided. The connector is push-fit and will 'snap' into a locked
position. It can be released by depressing the metal tongue. Any gas connected should
be regulated at a nominal pressure of 4 p.s.i. ( approx 0.3 bar)
The electrical input to the Instrument is made with the power lead provided. The
Instrument connection is standard and the lead is fitted with the appropriate plug for the
country of operation.
Ensure the plugs are firmly located. Check the voltage is correct voltage for country of
operation, which should correspond to the voltage label on the Instrument. The
appropriate electrical supplies for countries are given in Appendix 7.5.
The vacuum connection is made by 1 Metre length of vacuum hosing. This is a push-on
fit to the Instrument. Ensure that this is firmly in place to the full length of the vacuum
connector.

NOTE: - If you are using existing or alternative vacuum pump, and have any difficulty
with connections, please advise.
An Oil Mist Filter with metal adapter should be fitted to outlet of vacuum pump (See
Section Spare 6.4 ).
Check that the vacuum pump is filled with correct oil (See Section Spares 6.4 for suitable
type). If the vacuum pump is fitted with an ON/OFF switch, ensure that it is left in the
'ON' position as the Instrument will carry out required control.
Ensure that the HT connector to the lid is pushed firmly in place.

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 K550X Sputter Coater

4.3 Initial Operating Checks

(These should be made having become familiar with the controls. Refer to Section 5
Operation)
ALL SUPPLIES ARE CONTINUOUSLY RATED WITH THE EXCEPTION OF THE H.T.
SUPPLY WHICH IS RATED AT 50%.
Switch power on with rocker switch located on rear panel of Instrument. The L.E.D. in the
STOP switch should illuminate showing power to the instrument, and the L.C.D. should
show the following display:

Press ENTER to change parameters

Press START to run when ready

Settings: 25mA, 00:02:00 H:M:S

Check process gas by pressing the STOP button. The process gas cylinder output gauge
will drop slightly. The K550X lid will lift 'slightly' when chamber fills with gas.
When the display has returned to the initial layout as above press the START key. The
chamber vacuum reading should achieve 5 x 10-1mbar within 1 minute, and 1 x 10-1
mbar (the bleed trip point) within 2 minutes.

Bleeding Gas into Chamber

Time Remaining 00:00:14 H:M:S

Vacuum : 2x10-1 mbar

Provided that Pump Hold is NOT enabled (see Section 5.5) the gas bleed portion of the
cycle will commence. the screen display should look like that shown below. If necessary,
adjust needle valve at rear of Instrument to achieve a stable vacuum of 1 x 10-1mbar.
When the bleed time has expired the coating will commence. A blue plasma with the
required current level should be observed. The display should look like that below. Allow
the coating to automatically time-out and vent the chamber to atmosphere. The
instrument should complete the automatic cycle, coating at 25mA for 2 minutes (which
are default settings) at a vacuum 1 x 10-1mbar, which may initially need to be adjusted.
.
Coating Sample at 25 milliamps

Vacuum Current Time Remaining

1x10-1 mbar 25 mA 00:01:38 H:M:S

NOTE: The sputter cycle is rated for a maximum 50mA for 5 minutes, with a duty cycle of
50%. (Off time - 5 minutes.)

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5 Operation

5.1 Display
The diagram below shows the layout of the instrument front panel showing the LCD and
the data entry keys.

Figure 5-1: K550X Front Panel

MENU OPERATION FUNCTIONS

UP KEY Whilst a parameter is displayed increments its value by the
increment amount.
DOWN KEY Whilst the parameter is displayed decrements its value by the
increment amount.
ENTER KEY Pressing this key will accept the current value of the parameter
and proceed to the next parameter or accept a set up
START KEY Starts the process using the parameters accepted by the operator.
STOP KEY Stops the process at any point during the cycle. (L.C.D. displays
user aborted cycle.)
Table 4: K550X Front Panel Controls

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 K550X Sputter Coater

5.2 Setting Operating Parameters

There are a number of user programmable options that can be altered by the front panel
keys. These are :-

PARAMETER ALLOWABLE DESCRIPTION

VALUES

0-50mA in 5mA
Coating Current Plasma Current. (Default value 25mA)
Steps
0-4 Minutes in
Coating Time one second Time for the coating. (Default 2 Minutes)
steps
This value determines whether the software
monitors the STOP signal from the FTM. If it is
FTM enabled Yes/No
enabled and there is no FTM connected the
coating will stop immediately.
Pump Hold Whether extra pumping is enabled or not.
Yes/No
Enabled (Default - No)
0-8 Hours in 5 How long extra pumping will last. (Default 10
Pump Hold Time
Second Steps Minutes)
Stage Rotate Rotate the specimen stage during the coating.
Yes/No
Enabled (Default - No)
Table 5: Setting Operating Parameters
When options are modified, the software will by default save these so that they are in
force the next time that the instrument is powered up

5.3 To Check or Modify Parameters

From the main menu press the ENTER to select the change parameters menu. The
screen below should appear on the L.C.D.

UP or DOWN key to ALTER

ENTER to accept, STOP to return
Variable Name Current Value

For most parameters the value is shown along with the variable name. Us the UP or
DOWN arrow keys to amend the value as required. When the required value is shown
press the ENTER key to accept. To exit from the parameter editing menu press the
STOP key.

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5.4 Cycle Sequence

Below is a sequence of events for a typical coating cycle. Assuming the default values
have not been altered and the instrument has been set up as instructions under Section
4.3
The suggested parameters which should be satisfactory for general applications are
as listed.
1. Needle valve (bleed) adjustment set to give 1x10-1mbar with process gas
(Argon) at a nominal 4 p.s.i.) ( approx. 0.3 bar)
2. Discharge current at 25mA. (default)
3. Discharge time 2 minutes. (default)

A typical coating achieved using these settings should be approximately 15nm (150
Angstroms).

NOTE: These conditions for coating thickness can be more readily determined by
referring to the K550X Deposition Chart, (Appendix Error! Reference source not
found.) allowing for any differences in the spacing of any stub and specimen
height when reading final settings.

Sputtering Deposition Rate Using Gold

-1
(Using Argon @ 1x10 mbar, target to sample spacing = 30mm)
35
30
Deposition Rate

25
(nm/minute)

20
15
10
5
0
10 20 30 40 50 60 70 80 90 100
Deposition Current (mA)

Figure 5-2: Sputtering Deposition Rate using Gold

After the pressing the START key the following will happen:

• The rotary pump will start and commence the pump down
• When the bleed trip point has been reached, if pump hold is not enabled (see
below) the bleed valve will operate, and chamber vacuum will stabilise for 15
seconds at 1 x 10-1mbar (dependent upon needle valve setting)
• Coat will operate at deposition current of 25mA.
• Coating will stop and the vent valve will open an the chamber will vent to
atmosphere
• If further purging is required, the vent-stop can be operated by pressing the
STOP button while the instrument is idle.

NOTE The STOP button can be pressed at any time during a cycle to abort the
process.

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 K550X Sputter Coater

5.5 Pump Hold Feature

The Pump Hold feature is used for one of two conditions.

1. If it is required to outgas a specimen more than would be possible during the

normal automatic cycle, then select Pump Hold as enabled in the parameter
menu. This will inhibit the cycle from continuing until either, a key is pressed, or
the stored Pump Hold time elapses, whereby the cycle will continue in the normal
-2
manner. The vacuum should eventually achieve better than 7 x 10 mbar.

2. If it is required to use a K250 for carbon 'flash' evaporation. If this is the case,
then select Pump Hold and select a fairly long time, perhaps longer than 30
minutes. The K550X is now used as a vacuum chamber for carbon head. Using
Carbon String or Cord, outgas vacuum of 1 x 10-1mbar, and evaporation vacuum
-2
of 7 x 10 mbar or better. After completion of the carbon flash Stop on the
K550X.

NOTE: For full details consult separate K250 Instruction Manual

When Pump Hold is enabled, the instrument will pump to the bleed trip point as normal,
then the pump hold feature becomes active. The display should look like that below.

Pump Holding, Press a key to continue

Time Remaining: 00:04:36 H:M:S

Vacuum: 8x10-2 mbar

The pump hold time has a default value of 10 minutes but can be programmed for up to 8
hours. As stated above the instrument will continue pumping until either the time elapses
or, a key is pressed. The cycle will then continue as normal

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5.6 Sputtering Protocols

The following is only a brief outline and guide. For further details consult:-

1. NOCKOLDS, C. E. MORAN, K. DOBSON, E. and PHILLIPS A.

Design and operation of a high efficiency magnetron Sputter Coater.
Scanning Electron Microscopy (1982) Issue 3, pp. 907-915
(Available on Request)

The K550X is primarily to provide conductive metal coatings for SEM microscopy. In
such applications it would be common to use Aluminium Specimen Stubs. The main
classification of specimen types is between 'bulk' and 'particulate'.
In the case of 'bulk' specimens, a good bonding to the stub is required. In addition,
although an omni-directional coating is achieved, it may be advantageous to use
adhesives, which are electrically conductive. Silver Dag, a Silver Loaded Conductive
Paint is commonly used, but to achieve a somewhat more substantial bonding, Silver
Loaded Epoxy which has good strength and electrical conductivity is advantageous.
In the case of 'particulate' specimens, depending on the nature, again a thin layer of Silver
Dag is suitable, with the specimens 'sprinkled' on it. Alternatively, a Cyanoacrylate or
double-sided tape can be used. In both cases the mounting medium is of low profile.
The coating should be sufficient to make electrical contact with the specimen and stub. If
this is not the case, it may be necessary to bond using one of the previously mentioned
conducting adhesives.
While the standard settings for Sputter Coating, mentioned in Section 5, Operation, may
be satisfactory for most SEM applications (giving typically 15nm (150 Angstroms)
settings: 25mA. 45mm. 2mins), these can be optimised depending on the specimen. The
objective being to obtain as thin and continuous conductive coating as possible to avoid
obstructing detail, while giving specimen stability and avoiding charging.
For very irregular specimens a slightly thicker coating may be required if charging is
observed. While various settings such as time and spacing can be altered, we would
recommend increasing the coating time, while maintaining the sputtering current and
distances. (Giving typically 21nm (210 Angstroms) settings: 20mA. 45mm. 3mins.)
For less irregular specimens and thinner coatings for fine detail, where charging does not
appear as significant, then reducing the sputtering current would be the preferred method.
(Giving typically 10nm (100 Angstroms) settings: 15mA. 45mm. 2 minutes.)
The heat input from sputtering with the K550X is very small. If it is considered the
specimen is heat sensitive, then a low sputtering current, with longer time to achieve the
necessary coating thickness is recommended, while maintaining maximum specimen
spacing. It is not considered necessary, with the low thermal input and low sputtering
voltage, to pre-cool the specimen stage. Assuming the specimen is stable at room
temperature.
The low sputtering voltage is to achieve low thermal input, and high resolution, small grain
size coatings. Typically the grain size of Gold is of the order of 2nm (20 Angstroms).
However, as we normally require somewhat thicker coatings to achieve electrical
conductivity the final resolution will be somewhat less.
Alternative target materials may suggest smaller grain size, Gold/Palladium is the order of
1.7nm (17 Angstroms), there may not necessarily be a recognisable gain in high
resolution, and such coatings may be susceptible to cracking. Careful consideration
should be given when using alternative material, Gold having proved particularly
successful for the majority of SEM work when utilised in Instruments such as the K550X

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 K550X Sputter Coater

6 Service and Maintenance

For technical and applications advice plus our on-line shop for spares and
consumable parts visit www.quorumtech.com

CAUTION
Ensure mains electrical power is off during any maintenance and service
activities

6.1 Maintenance
PROCEDURE FREQUENCY
Clean the glass chamber and the 'L' gaskets as required using Velin
tissue and foam cleanser (See Section 6.4), or similar. Monthly
Do not use vacuum grease on 'L' gaskets.
Check vacuum pump oil level. Change oil every 6 months using 1
Monthly
litre of Supergrade 'A'. (See Section 6.4).
Check Oil Mist Filter for saturation. Change every 6 months, or more
regularly as required. (See Section 6.4 for suitable part) (This is a Monthly
disposable plastic filter and cannot be reactivated.)
Check the condition of the target material. The wear will depend on
use. This is mainly over an outer annulus, accounting for some 70%
of the surface area.
Monthly
When the backing plate shows at the edges, it may still be used.
When this becomes excessive and sputtering is affected, the target
should be replaced
Regularly inspect electrical power cords and plugs for general
Regularly
condition
Table 6:- Maintenance Tasks
NOTE: A replacement target exchange service is offered for precious metal recovery.
On return of your original target backing plate, a discount made against your
new purchase.

6.2 Changing the Target

Firstly disconnect the instrument from the mains and remove the power cord. Now
loosen the two small Allen screws around the circumference of the target holder using the
Allen key provided with your spares kit. These locate into a 'V' groove in the target
circumference; the target can then be removed. Replace with the new target, ensuring
that the screws are tightened equally and firmly into the 'V' groove to ensure good
electrical and mechanical connection.

NOTE: Consumable items can be obtained from Quorum Technologies or approved

Distributor. Only Quorum Technologies recommended items should be used.
For technical assistance and advice - contact Quorum Technologies.

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6.3 Troubleshooting the K550X

Routine service should not be necessary. In the event of non-operation, carry out the
following checks.

CAUTION
Ensure mains electrical power is off during any maintenance and
service activities

• Check electronic supplies: The LED in the STOP switch should be on at power
up.
• Check fuses: Refer to Section 6.7.
• Check vacuum pump: Local switch should be in 'On' position.
• Check chamber seating for vacuum leaks.
• Check operating conditions of Instrument controls.
• Check Allen screws to target and connections.
• Check correct conditions for sputtering have been set (i.e. vacuum and gas
pressure).
• Check all connections.
• Check that the LCD is showing the correct display.
• Check Pump Hold Enabled is set to NO.

In the event of all checks proving negative, please contact Quorum Technologies, or your
local Distributor.

An Advance Delivery Modular Exchange Service Scheme is operated for the complete
single module control electronics.

This can normally be customer installed in accordance with instructions provided.

NOTE: Spare items can be obtained from Quorum Technologies or approved Distributor.
Only Quorum Technologies recommended items should be used. For technical
assistance and advice - contact Quorum Technologies.

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6.4 Spares
The following are available from Quorum Technologies, or your local distributor, and are
featured in more detail in the current Quorum Technologies Consumables Catalogue.
Copies can be sent on request.
SPARES FOR K550X SPUTTER COATER UNIT CATALOGUE QUANTITY
NUMBER

Glass Cylinder 6" G6260 Each

'L' Gaskets to suit G6261 Pair
Oil Mist Filter O7803 Each
Supergrade 'A' Rotary Pump Oil O7802 1 Litre
230v Fuse Pack AL107037-1 Pack
215v Fuse Pack AL107038-1 Pack
TARGETS - 60MM DIAMETER X 0.1MM THICK, BONDED TO TARGET HOLDER.
EX-STOCK DELIVERY**
Gold Target EK8842 Each
Gold/Palladium (80/20%) Target EK8843 Each
Platinum Target EK8844 Each
Table 7:- Spare Parts for the K550X
** for special Targets please enquire

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6.5 Accessories
The following are available from Quorum Technologies, or your local distributor, and are
featured in more detail in the current Quorum Technologies Consumables Catalogue.
Copies can be sent on request.

USEFUL ACCESSORIES FOR K550X CATALOGUE QUANTITY

NUMBER

Amberclens Foam Cleanser C5427 Each

Conductive Paint A5001 3g. Bottle
Silver Loaded Epoxy A5002 2x15g.
Cyanoacrylate Adhesive Grade C2 A5003 5x5g.
Cyanoacrylate Adhesive Grade C4 A5004 5x5g.
Cyanoacrylate 'Superglue' A5005 3g. Tube

Table 8:- Accessories for the K550X

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6.6 SEM Specimen Stubs

A comprehensive supply of S.E.M. specimen stubs in machined Aluminium to suit most
makes of S.E.M.
DESCRIPTION CATALOGUE QUANTITY
NUMBER

Amray
½” Dia Pin Stub S8620 Pack 10
1" Dia Pin Stub S8621 Pack 10
Cambridge
½” Dia Pin Stub S8622 Pack 10
1" Dia Pin Stub S8623 Pack 10
1¼ Re-entrant Base Stub S8624 Pack 10
3
1¼ Dia x /8" High Stub S8625 Pack 10
Camscan
½” Dia Pin Stub S8622 Pack 10
1½” Dia Pin Stub S8626 Pack 10
Etec
½” Dia pin stub S8622 Pack 10
Hitachi
15mm Dia x 6mm Stub S8627 Pack 10
25mm Dia x 6mm Stub S8628 Pack 10
32mm Dia x 10mm Stub S8629 Pack 10
I.S.I.
15mm Dia x 10mm Stub S8631 Pack 10
15mm Dia x 15mm Stub S8632 Pack 10
Jeol
10mm Dia x 5mm Stub S8633 Pack 10
10mm Dia x 10mm Stub S8634 Pack 10
15mm Dia x 10mm Stub S8631 Pack 10
15mm Dia x 15mm Stub S8632 Pack 10
12.5mm Dia x 10mm Stub S8635 Pack 10
12.5mm Dia x 5mm Stub S8636 Pack 10
Philips
½” Dia Pin Stub S8622 Pack 10
1" Dia Pin Stub S8623 Pack 10

Table 9:- SEM Specimen Stubs for the K550X

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6.7 Fuse Listings

Fuse listing for 230 Volt K550X

TITLE RATING FUNCTION

Fuse 1 (1.25" X 0.25") T 10A Ceramic Main Power, located in inlet
unit.
Fuse 2 ( 20 x 5 mm) T3.15 Ceramic Internal Fuse Holder mounted
(INTERNAL) on HT PCB

Table 10:- Fuse Listing for the 230 Volt K550X

Fuse listing for 115 Volt K550X

TITLE RATING FUNCTION

Fuse 1 (1.25" X 0.25") T 15A Ceramic Main Power, located in inlet
unit.
Fuse 2 ( 20 x 5 mm) T 5A Ceramic Internal Fuse Holder mounted
(INTERNAL) on HT PCB

Table 11:- Fuse Listing for the 115 Volt K550X

T10A is preferred fuse.

May be substituted for 10A Slo-Blo Ceramic Fuse - Non preferred..
Fuse Standard IEC 127, CEE4.
Fuse Standard CSA C22.2/UL 198G *
Replacement fuses can be supplied by QUORUM TECHNOLOGIES, or the approved
distributor.**

** If an approved distributor is not known - please contact Quorum Technologies direct for
details.

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7 Appendices

7.1 World Wide Electrical Supplies

COUNTRY VOLTAGE FREQUENCY

Australia 240V 50Hz

Brazil 115V/230V 60Hz
Canada 115V 60Hz
Finland 230V 50Hz
France 230V 50Hz
Germany 230V 50Hz
India 230V 50Hz
Ireland 230V 50Hz
Israel 230V 50Hz
Italy 230V 50Hz
Korea (South) 230V 60Hz
Japan 115V 50 / 60Hz
Netherlands 230V 50Hz
Norway 230V 50Hz
Pakistan 230V 50Hz
Portugal 230V 50Hz
Scandinavia 230V 50Hz
Singapore 230V 50Hz
Spain 230V 50Hz
Taiwan 115V 60Hz
Turkey 230V 50Hz
United Kingdom 230V 50Hz
United States of America 115V 60Hz

Table 12:- Electrical supplies World Wide

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7.2 Pump Plug Wiring

WARNING – EARTH CONNECTOR

This Equipment is normally supplied from 3 pin supply including Earth.
If only 2 pin supply is available a separate Earth must be fitted.
The supplementary Earth stud can be used to facilitate this requirement.

Pin2
Earth

Pin 1 Pin 3
Live Neutral

PIN UK AND EUROPE U.S.A. AND CANADA

Pin 1 ( Live or Hot) Brown Black
Pin 2 ( Earth ) Green / Yellow Green
Pin 3 ( Neutral) Blue White
Table 13: Pump Plug Wiring

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7.3 Return of Goods

Safety information for the return of Preparation Equipment and Accessories.

7.3.1 General Introduction:

The employer (user) is responsible for the health and safety of his employees. This also
applies to all those persons who come into contact with the Preparation Equipment and
Accessories either at the user’s or manufacturer’s premises during repair of service. The
contamination of Preparation Equipment and Accessories has to be declared and the
Health and Safety Declaration form completed. (Appendix -7.3.5 for the form)

7.3.2 Health and Safety Declaration

Those persons carrying out repair or service have to be informed of the condition of the
components. This is the purpose of the ‘Declaration of Contamination of Preparation
Equipment and Accessories.’.

7.3.3 Despatch
When returning equipment the procedures set out in the Operating Instructions must be
followed. For example:
- Drain the vacuum pumps.
- Neutralise the flushing with gas.
- Remove filter elements.
- Seal all outlets.
- Pack glass components safely.
- Pack loose attachments securely for example stages.
- Seal in heavy duty polythene or a bag,
- Despatch in suitable transport container.

7.3.4 Return Address:

F.A.O.: The Service Manager,
Quorum Technologies,
Units 1 & 3 Eden Business Centre
South Stour Avenue,
ASHFORD,
Kent. TN23 7RS

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7.3.5 Declaration of Contamination Form

Declaration of Contamination of Preparation Equipment and Accessories.

The repair and/or service of Preparation Equipment and Accessories can only be carried out if a correctly completed
declaration has been submitted. Non-completion will result in delay. The manufacturer reserves the right to refuse acceptance
of consignments submitted for repair or maintenance work where the declaration has been omitted.
This declaration may only be completed and signed by authorised and qualified staff.
1. Description of component 2. Reason for return:
- Equipment type/model: _________________________ __________________________________________
- Code No:. ________________________________ __________________________________________
- Serial No.: ________________________________ __________________________________________
- Invoice No. (if known) ________________________ __________________________________________
- Delivery Date.: (if known)________________________ __________________________________________
3. Equipment condition 4. Process related contamination of Equipment/
- Has the equipment been used? Yes/No Accessories.
- What type of operating medium was used? - Toxic Yes/No
_____________________________________________ - Corrosive Yes/No
- Is the equipment free from potentially harmful - Explosive* Yes/No
substances? Yes/No - Microbiological* Yes/No
(If Yes go to Section 5) - Radioactive* Yes/No
(If No go to Section 4) - Other harmful substances Yes/No

* We will not accept any Equipment/Accessories which have been radioactively, explosively, or microbiologically
contaminated without written evidence that such Equipment/Accessories have been decontaminated in the
prescribed manner.

Please list all harmful substances, gases and dangerous by-products, which have come into contact with the
Preparation Equipment and Accessories.

Trade name Chemical name and Danger Precautions First aid measures in
Product name symbol class associated with the event of an
Manufacturer substance. accident.
1.
2.
3.
4.
5.

5. Legally Binding Declaration.

I hereby declare that the information supplied on this form is complete and accurate. The despatch will be in
accordance with the appropriate regulations covering Packaging, Transportation and Labelling of Dangerous
Substances.
Name of Organisation: __________________________________________________________________
Address: _____________________________________________________________________________
_____________________________ Post Code: ______________________
Tel.: _____________________________ Fax.: ______________________
Name: _____________________________ Job Title: ______________________
Date: _____________________________ Company Stamp: ______________________

Table 14: Declaration of Contamination Form

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8 Index
A L
Accessories ................................................. 22 List of Figures ................................................4
adhesives .................................................... 18 List of Tables..................................................4
Aluminium Specimen Stubs ........................ 18 M
Appendices.................................................. 25 Maintenance.................................................19
B O
Benefits ......................................................... 8 Oil Mist Filter ................................................12
C Operation .....................................................14
C.O.S.H.H. .................................................... 5 Operation Functions.....................................14
Changing the Target.................................... 19 P
Check or Modify Parameters....................... 15 Preliminary Checks ......................................10
Coating Current ........................................... 15 Pump Hold Feature......................................17
Coating Time ............................................... 15 Pump Plug Wiring ........................................26
Conformity ..................................................... 6
Connections ................................................ 11 R
Contents ........................................................ 3 Return of Goods...........................................27
Cycle Sequence .......................................... 16 Despatch .........................................................27
General Introduction........................................27
D Health and Safety Declaration.........................27
Declaration of Contamination Form ............ 28 Return Address ...............................................27
Description .................................................... 7 S
Display......................................................... 14 Section Contents............................................3
F SEM Specimen Stubs ..................................23
Fail Safe ........................................................ 6 Service and Maintenance.............................19
Features ........................................................ 7 Services .........................................................8
Fuse Listings ............................................... 24 Setting Operating Parameters .....................15
H Spares..........................................................21
Hazard Signal Words .................................... 6 Specifications .................................................8
Health and Safety.......................................... 5 Sputtering Protocols.....................................18
Sputtering Rate ............................................27
I
T
Index............................................................ 29
Initial Operating Checks .............................. 13 Targets ........................................................21
Installation ................................................... 10 Troubleshooting the K550X .........................20
K W
K150X FTM Option........................................ 9 WEEE Compliance ........................................5
K550X Sputter Coater ................................... 7 World Wide Electrical Supplies....................25

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A4100138-Issue 5 30 K550X - Instruction Manual

Quorum Technologies Ltd
Units 1 & 3 Eden Business Centre
South Stour Avenue
ASHFORD
Kent, UK
TN23 7RS
Tel: +44(0) 1233 646332
Fax: +44(0) 1233 640744
Email: [email protected]
Web: http:///www.quorumtech.com

For technical and applications advice plus our on-line shop for spares and consumable parts
visit www.quorumtech.com

Quorum Emitech is a wholly owned business of Quorum Technologies Limited. Registered offices Unit 19 Charlwoods
Road, East Grinstead, West Sussex. RH19 2HL. Registered in England and Wales, company No. 4273003.