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CHEE 5375 Chemical Processing For Microelectronics

This document provides information on the course CHEE 5375 - Chemical Processing for Microelectronics. The course applies chemical engineering principles to microelectronic device fabrication and processing. Topics covered include an overview of microelectronic materials and devices, crystal growth, oxidation, diffusion, ion implantation, thin-film deposition, lithography, plasma processing, electrochemical deposition, and process integration. The course aims to provide an understanding of the basic principles and operations of important microelectronic fabrication unit processes. Students will also learn how to quantitatively predict process outcomes using models and apply chemical engineering principles to new areas.

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Sami White
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57 views

CHEE 5375 Chemical Processing For Microelectronics

This document provides information on the course CHEE 5375 - Chemical Processing for Microelectronics. The course applies chemical engineering principles to microelectronic device fabrication and processing. Topics covered include an overview of microelectronic materials and devices, crystal growth, oxidation, diffusion, ion implantation, thin-film deposition, lithography, plasma processing, electrochemical deposition, and process integration. The course aims to provide an understanding of the basic principles and operations of important microelectronic fabrication unit processes. Students will also learn how to quantitatively predict process outcomes using models and apply chemical engineering principles to new areas.

Uploaded by

Sami White
Copyright
© © All Rights Reserved
Available Formats
Download as PDF, TXT or read online on Scribd
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CHEE 5375

Chemical Processing for Microelectronics

Catalog Data: CHEE 5375-6375: Chemical Processing for Microelectronics Cr. 3. (3-0). Prerequisites:
CHEE 4367 or consent of instructor.

Chemical Engineering principles applied to microelectronic device fabrication and processing.

Textbook: Richard C. Jeager, “Introduction to Microelectronic Fabrication,” second edition, Modular


Series on Solid State Devices, Vol. V, G. W. Neudeck and R. F. Pierret, series editors, Prentice Hall,
2002.

Class notes handed out by the instructor.

Prerequisites by Topic:

1. Knowledge of basic principles of reaction kinetics, mass and heat transport.


2. Knowledge of basic principles of reaction engineering.

Topics: (each class is 80 minutes, two classes per week)

1. Overview of microelectronic materials, devices and processing (4 classes).

2. Crystal growth (1 class).

3. Oxidation: growth mechanisms and kinetics, thin oxides, process modeling (1 class).

4. Diffusion: models of solid-state diffusion, non-linear effects (1 class).

5. Ion implantation (1 class).

6. Thin-film deposition: fundamentals of vacuum science and technology, chemical vapor deposition
(CVD), physical vapor deposition (PVD), rapid thermal processing (RTP), epitaxy, process simulation (6
classes).

7. Lithography: photoresists, optical lithography, advanced lithographies (2 classes).

8. Plasma Processing: fundamentals of plasmas, plasma reactor design, plasma etching and deposition,
process simulation (6 classes).

9. Electrochemical deposition and chemical mechanical planarization (1 class)

10. Thin-film characterization (2 classes).

11. Process integration (3 classes).


Expected Course Outcomes and Performance Criteria1

Demonstrate an understanding of the basic principles and operations governing each of the most
important unit processes involved in the fabrication of microelectronic devices. (a,c)

Demonstrate the ability to quantitatively predict the outcome of a given process using simplified
engineering models. (a,d,e)

Apply chemical engineering principles to solve problems in areas outside traditional chemical
engineering. (d)

Appreciate that microelectronics fabrication is a rapidly developing field and, therefore, they need to
update their knowledge continually if they want to stay on top of this field. (i)

Evaluation:

1. Homework
2. Examinations
3. Project.

1
Lowercase letters in parentheses refer to ABET outcomes under Criterion 3 (see Appendix)
Appendix
ABET Outcome, Criterion 3 Program-Specific Outcomes
(a) an ability to apply knowledge • Use chemistry and physics concepts to set up and solve chemical
of mathematics, engineering problems
science and engineering. • Use mathematical tools to solve chemical engineering problems
(b) an ability to design and conduct • Select appropriate experimental equipment and techniques
experiments as well as to analyze necessary to solve a given problem
and interpret data. • Evaluate and interpret experimental results using statistical tools
and chemical engineering concepts
(c) an ability to design a system, • Apply material and energy balance concepts to design a unit
component, or process to meet operation
desired needs within realistic • Define objectives and perform the design of an integrated chemical
constraints such as economic, process under realistic constraints
environmental, social, political,
ethical, health & safety,
manufacturability, and
sustainability.
(d) an ability to function on multi- • Define roles and responsibilities to align with capabilities of team
disciplinary teams. members and fulfill project requirements
• Develop and carry out a project plan through team work
(e) an ability to identify, formulate • Translate an engineering problem into a mathematical model or other
and solve engineering problems. suitable abstraction
• Use mathematical model or other suitable abstraction to solve an
engineering problem and interpret results
(f) an understanding of • Demonstrate knowledge of professional code of ethics.
professional and ethical • Identify ethical issues and make decisions for a chemical engineering
responsibility. problem.

(g) an ability to communicate • Make presentations that are factual and tailored to the audience
effectively. • Can communicate in writing to non-technical and technical audiences
(h) the broad education necessary • Understand the impact of chemical engineering solutions in a global,
to understand the impact of economic, environmental, and societal context.
engineering solutions in a global,
economic, environmental, and
societal context.
(i) a recognition of the need for • Recognize the importance of advanced education and development
and an ability to engage in life- opportunities
long learning. • Identify, retrieve, and organize information necessary to solve open-
ended problems
(j) a knowledge of contemporary • Know the interplay between current technical and societal issues
issues. • Know the recent history, current status, and future trends of chemical
engineering
(k) an ability to use the techniques, • Use modern software to solve chemical engineering problems
skills, and modern engineering • Understand how to operate equipment relevant to chemical
tools necessary for engineering engineering systems
practice.

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