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Introduction On SILVACO and MOSFET Simulation Technique PDF

This document provides an overview of using SILVACO TCAD software to simulate MOSFET fabrication processes and analyze device characteristics. It describes SILVACO's process and device simulation capabilities using ATHENA and ATLAS. The document outlines the simulation of a MOSFET fabrication process in SILVACO, including defining materials, growing oxides, doping, depositing gates, contacts and more. Next steps include extracting data from the simulated device and simulating other devices like solar cells.

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‍전다솜[학생](대학원 전자정보융합공학과)
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304 views18 pages

Introduction On SILVACO and MOSFET Simulation Technique PDF

This document provides an overview of using SILVACO TCAD software to simulate MOSFET fabrication processes and analyze device characteristics. It describes SILVACO's process and device simulation capabilities using ATHENA and ATLAS. The document outlines the simulation of a MOSFET fabrication process in SILVACO, including defining materials, growing oxides, doping, depositing gates, contacts and more. Next steps include extracting data from the simulated device and simulating other devices like solar cells.

Uploaded by

‍전다솜[학생](대학원 전자정보융합공학과)
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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An overview on SILVACO TCAD and MOSFET

Simulation Process Analysis using SILVACO

Presented By:
Md.Majharul Islam
Showmik Singha
Shaon Das

Dept. of Electrical and Electronic Engineering


05/01/2017
Shahjalal University Of Science And Technology 1
SEMICONDUCTOR Research Group ,SUST
Outline
About SILVACO MOSFET Simulation

Introduction to TCAD Process Simulation

What Is SILVACO? Device simulation

How it WORKS? Characterization and


analysis
SILVACO Analogy
Our Next Work
05/01/2017 SEMICONDUCTOR Research Group,SUST 2
Introduction to TCAD
• Technology CAD (Technology Computer Aided Design) is a branch of
electronic design automation that models semiconductor fabrication
and semiconductor device operation.

• The modeling of the fabrication is termed Process TCAD [ATHENA In


SILVACO],

• Modeling of the device operation is termed Device TCAD[ATLAS In


SILVACO].

05/01/2017 SEMICONDUCTOR Research Group,SUST 3


Working Scope on SILVACO

• It has Built in Library for Different Semiconductor


materials.
• We can characterize those materials in Various
Analysis process.
• It has 23 different type of Substrate materials to
research
• 15 different type of impurity materials

05/01/2017 SEMICONDUCTOR Research Group,SUST 4


Working Scope on SILVACO cont…
List of Different available dopant in SILVACO

05/01/2017 SEMICONDUCTOR Research Group,SUST 5


How SILVACO Works?
SILVACO

Input Text
Command Output .STR file
Deckbuild ATHENA ATLAS

Tonyplot
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SILVACO Analogy

SILVACO is a
Virtual Fabrication Lab

ATLAS analyze device


characteristics

ATHENA fabricates a device by


different process

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Defining Substrate Materials :

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Oxide Layer To p-well Formation:

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Nitrous diffusion, gate oxide formation and etching:

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Sacrificial Cleaning and defining gate oxide width:

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Polysilicon formation ,Oxidation, Etching & DE-oxidation:

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Aluminum Formation and Etching :

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Inside view and mirroring the device to for Final MOSFET:

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Data extracting and Shaping metal Electrode

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Defining Drain ,Gate and Source Metal node
ready for data extraction via ATLAS
Gate
Source Drain

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Our next work

Extracting data from the device via ATLAS


Collect more information about Available materials on
SILVACO.
Simulate different MOSFET Devices with variation of
different parameter.
Design and Analysis (Solar cell, Multi-gate FET,GFET)

05/01/2017 SEMICONDUCTOR Research Group,SUST 17

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