Mitutoyo CMM Accuracy Statements
Mitutoyo CMM Accuracy Statements
Mitutoyo CMM Accuracy Statements
The accuracy statements specified on the following pages for Mitutoyo CMM’s are based on ISO
standards. The following is a brief description of these standards.
22.5゜
■ Maximum Permissible Scanning Probing Error MPETHP ISO 10360-4:2000 22.5゜ a
This is the accuracy standard for a CMM if equipped with a scanning probe. The test procedure under this standard is to perform 22.5゜
a scanning measurement of 4 planes on the standard sphere and then, for the least squares sphere center calculated using all 22.5゜
the measurement points, calculate the range (dimension ‘A’ in Figure 2) in which all measurement points exist. Based on the least
squares sphere center calculated above, calculate the distance between the calibrated standard sphere radius and the maximum
measurement point or minimum measurement point, and take the larger distance (dimension ’B’ in Figure 2). If both calculated
values are less than the specified limits, this scanning probe test is passed.
22.5゜
Figure 2 Target measurement planes for the maximum permissible scanning probing error and its evaluation concept
L-2
CRYSTA-Plus M
SERIES 196 — Manual Floating CMM
Manual floating CMMs were developed in The Crysta-Plus M700 series has a large main
quest for high-accuracy, low-cost and easy unit and is equipped with a mobile clamp
operation. The Crysta-Plus M is suitable so that one-touch clamping on each axis
to measure a wide range of applications can be performed by hand. Continuous fine
from a simple dimension to a complex feed over the entire measuring range can be
form. The scale systems on Mitutoyo high- performed.
precision models use a high-performance
Ergonomically designed guide grip on Z-axis for reliable linear encoder (manufactured by Mitutoyo) FEATURES
measurement
(only for Crysta-Plus M776 and M7106) for detecting axis position. In addition, • Smooth operation utilizing high-precision
various technologies have been used in the air bearings and lightweight moving
structure, part processing and assembly to members.
One-touch air clamp and provide high-accuracy measurement. • Continuous fine feed over the entire
fine feed for rapid and measuring range.
easy positioning
• One-touch air clamp for each axis.
Crysta-Plus M574
MH20i
see page L-20
Crysta-Plus M7106
SPECIFICATIONS
Type: Bridge Model No. Crysta-Plus M443 Crysta-Plus M574 Crysta-Plus M7106
Crysta-Plus M443 X axis 15.74” (400mm) 19.68” (500mm) 27.55” (700mm)
Range Y axis 15.74” (400mm) 27.55” (700mm) 39.36” (1000mm)
Z axis 11.81” (300mm) 15.74” (400mm) 23.62” (600mm)
Resolution 0.000019” (0.0005mm)
Material Granite
24.56” x 31.69” 30.07” x 46.25” 35.43” x 68.50”
Work table Size
(624mm x 805mm) (764mm x 1175mm) (900mm x 1740mm)
Tapped insert M8 x 1.25mm
Max. height 18.89” (480mm) 23.22” (590mm) 31.49” (800mm)
Workpiece
Max. load 396 lbs. (180kg) 1,763 lbs. (800kg)
Mass (incl. stand) 793 lbs. (360kg) 1,424 lbs. (646kg) 3,968 lbs. (1800kg)
Dimensions 38.62 x 41.22 x77.44” 56.45 x 44.17 x 89.25” 57.48 x 79.40 x 111.81”
WxDxH (981 x 1047 x 1967mm) (1434 x 1122 x 2267mm) (1460 x 2017 x 2840mm)
Air Supply Pressure 50.7 PSI (0.35MPa) 58.0 PSI (0.4MPa)
Consumption 1.76CFM (50L/min)
Source 3.53CFM (100L/min)
ISO-10360-2: 2001
Probe illumination (optional) to illuminate the probe and styli E (3.0+4.0L/1000)µm (3.5+4.0L/1000)µm (4.5+4.5L/1000)µm
directly and brighten the working field 19-21°C (66.2-69.8°F) TP20:
R 4µm 5µm
L-3
CRYSTA-Apex S 500/700/900
High-performance, low-price CNC Coordinate Measuring Machine that meets global standards
CMM accuracy comparison
0.008
SERIES 191 — Standard CNC CMM 0.006
Accuracy envelope of CMM with MPEE = (2.5+4 L/1000) µm
Surftest
(surface finish)
See page L-27
Stylus Configurations for ISO Tests Air Supply 500 700/900 Environment 18-22°C (64.4-71.6°F ) 16-26°C (60.8-78.8°F)
TP200: Ø4mm x L10mm Pressure 58.0 PSI (0.4MPa) 2.0C° or less per hour 2.0C° or less per hour
Rate of change
SP25/SP80: Ø4mm x L50mm Consumption 1.76CFM (50L/min) 2.11CFM (60L/min) 2.0C° or less per day 5.0C° or less per day
MPP310Q: Ø4mm x L18mm Source 3.53CFM (100L/min) Gradient 1.0C° or less per meter vertical & horizontal
† This test is not part of Mitutoyo America’s standard A2LA-accredited CMM calibration procedure and is quoted upon request.
See page L-2 for explanation of ISO accuracy statements
L-4
CRYSTA-Apex S 900/1200
SERIES 191 — Standard CNC CMM
Supported Probe Systems
Type Probe AS500 AS700/900/1200
Designed for high rigidity TOUCH
MH20i l l
TP20
As is the case with Mitutoyo’s conventional CMMs, various structures TRIGGER
TP200
l
l
l
l
are employed in the CRYSTA-Apex S in order to give the body higher PROBES
TP7 l l
rigidity. The Y-axis guide rail, which is attached to one side of the SCANNING
SP25 l l
MPP
granite surface plate, shows very little deterioration with use, and thus PROBES
SP80
l
—
l
l
Integrated Y-Axis in promises to maintain high accuracy for a long time. The air bearings SM606 s l
Granite Table located on the bottom face, in addition to those at the front, rear, LASER SM606T s l
PROBES SM610
and upper surfaces of the slider unit of the X-axis, minimize vibration s l
Effect of higher speed and acceleration on drive distance SM1010 s l
500 even during high-speed, high-acceleration movement, thus ensuring SURFACE
SurfTest l l
450 stable linear motion. FINISH
400 QVP s l
OPTICAL
CF20 l l
350
Drive distance (mm)
L-5
CRYSTA-Apex EX 500T/700T/900T
SERIES 191 — PH20 Equipped 5-Axis CNC CMM
The CRYSTA-Apex EX 500T/700T/900T series are CNC CMMs equipped with the PH20 5-axis control touch-
trigger probe. The 5-axis operation reduces the time required for probe rotational movements and allows
more flexible positioning. This also ensures easy access to complex workpieces and saves time both during
programming and measurement.
In addition to 3-axis point measurement similar to conventional coordinate measuring machines, the PH20
probe head also supports head-touch operation for quick point measurement using the two rotational axes of
the probe only, with no movement required along the CMM axes.
The PH20 incorporates a TP20 probe and allows use of modules designed for the TP20. Automatic probe
changes with a module changer is also supported with the use of the TCR20 change rack (option).
FEATURES
• Incorporates PH20 5-axis touch-trigger probe
• Ultra-high speed 5-axis control touch-trigger probe
• Smooth 5-axis control drastically reduces
measurement time (typically 40-65%) for probe
rotation
• 5-axis design provides highly efficient measurement
method of head touch for point measurement by
moving the probe head only in two axes
MF SF
EM1
Specifications PH20
Vertical (A-axis) -115° to +115° (0.08sec) EM2
Rotation angle
(Pitch angle) Horizontal (B-axis) ∞ (0.08sec)
Stylus Maximum length 50mm
CRYSTA-Apex EX 544T
SPECIFICATIONS
Type: CRYSTA-Apex CRYSTA-Apex CRYSTA-Apex CRYSTA-Apex CRYSTA-Apex CRYSTA-Apex CRYSTA-Apex
Model No.
BRIDGE EX 544T EX 574T EX 776T EX 7106T EX 9106T EX 9166T EX 9206T
Range X axis 19.68” (500mm) 27.55” (700mm) 35.43” (900mm)
Y axis 15.74” (400mm) 27.55” (700mm) 39.36” (1000mm) 62.99” (1600mm) 78.73” (2000mm)
Z axis 15.74” (400mm) 23.62” (600mm)
Resolution 0.000004” (0.0001mm)
Guide Method Air bearing on each axis
Work table Material Granite
25.11 x 33.86” 25.11 x 45.67” 34.64 x 55.90” 34.64 x 67.71” 42.51 x 67.71” 42.51 x 91.33” 42.51 x 107.0”
Size
(638 x 860mm) (638 x 1160mm) (880 x 1420mm) (880 x 1720mm) (1080 x 1720mm) (1080 x 2320mm) (1080 x 2720mm)
Tapped insert M8 x 1.25mm
Workpiece Max. height 21.45” (545mm) 31.49” (800mm)
Max. load 396 lbs. (180kg) 1,763 lbs. (800kg) 2,204 lbs (1000kg) 2,645 lbs. (1200kg) 3,306 lbs. (1500kg) 3,968 lbs. (1800kg)
Mass (incl. stand & controller) 1,181 lbs. (536kg) 1,424 lbs. (646kg) 3,739 lbs. (1696kg) 4,347 lbs. (1972kg) 4,964 lbs. (2252kg) 6,369 lbs. (2889kg) 8,670 lbs. (3933kg)
Dimensions 42.60x44.17x86.02” 42.60x57.40x86.02” 57.87x64.96x107.48” 57.87x76.77x107.48” 65.74x76.77x107.48” 65.74x105.90x107.48” 65.74x121.65x107.48”
WxDxH (1082x1122x2185mm) (1082x1458x2185mm) (1470x1650x2730mm) (1470x1950x2730mm) (1670x1950x2730mm) (1670x2690x2730mm) (1670x3090x2730mm)
ISO-10360-2:2009 E0,MPE
18-22°C (64.4-71.6°F) (2.2+3L/1000)µm
16-26°C (60.8-78.8°F) (2.2+4L/1000)µm
ISO-10360-2:2009†
R0,MPL 1.8µm 2.2µm
ISO-10360-5: 2010
PFTU,MPE 2.2µm
Stylus Configurations for ISO Tests Air Supply 500 700/900 Environment 18-22°C (64.4-71.6°F ) 16-26°C (60.8-78.8°F)
TP20: Ø4mm x L12mm Pressure 58.0 PSI (0.4MPa) 2.0C° or less per hour 2.0C° or less per hour
Rate of change
Consumption 1.76CFM (50L/min) 2.11CFM (60L/min) 2.0C° or less per day 5.0C° or less per day
Source 3.53CFM (100L/min) 4.23CFM (120L/min) Gradient 1.0C° or less per meter vertical & horizontal
† This test is not part of Mitutoyo America’s standard A2LA-accredited CMM calibration procedure and is quoted upon request.
See page L-2 for explanation of ISO accuracy statements.
L-6
CRYSTA-Apex EX 1200R
SERIES 191 — REVO-Equipped 5-Axis CNC CMM
The CRYSTA-Apex EX 1200R series is advanced CNC
CMMs equipped with the REVO 5-axis scanning probe
head. The 5-axis operation reduces the time required
for probe repositioning movements and allows for more
flexible positioning. This also facilitates access to complex
workpieces and saves time both during programming and
measurement.
The ultra-high speed 5-axis scanning (max. 500mm/s)
surpasses conventional 3-axis control, supporting high-
speed sampling of up to 4,000 points per second and
allowing data acquisition of densely spaced measurement
points, even during high-speed scanning.
The internal implementation of laser sensing technology
ensures high-accuracy measurement, even with long
styli (up to 500 mm as measured from probe rotation
center to stylus tip). Two types of scanning probes are
supported:
• RSP2 for 5-axis scanning
• RSP3 probe (SP25M type), allowing the use of a
cranked stylus
Automatic changeover of these probes with an auto
probe changer is possible, enabling fully automated
measurement of parts with diverse shapes. Probe
calibration of RSP2 requires only about 20 minutes
to enable use of the full angular range. Compared to
conventional scanning probes, this reduces preparation
time.
FEATURES
• Equipped with REVO 5-axis scanning probe head
• Ultra-high speed 5-axis scanning
SPECIFICATIONS
Type: Crysta-Apex Crysta-Apex Crysta-Apex
Model No.
BRIDGE EX 121210R EX 122010R EX 123010R
Range X axis 47.24” (1200mm)
Y axis 47.24” (1200mm) 78.73” (2000mm) 118.10” (3000mm)
Z axis 39.36” (1000mm)
Resolution 0.000004” (0.0001mm)
Guide Method Air bearing on each axis
Material Granite
55.90” x 85.23” 55.90” x 116.73” 55.90” x 156.10”
Work table Size (1420mm x 2165mm) (1420mm x 2965mm) (1420mm x 3965mm)
Tapped insert M8 x 1.25mm
Max. height 45.66” (1160mm)
Workpiece
Max. load 4,409 lbs. (2000kg) 5,511 lbs. (2500kg) 6,613 lbs. (3000kg)
Mass (incl. stand & controller) 8,928 lbs. (4050kg) 13,558 lbs. (6150kg) 20,084 lbs. (9110kg)
Dimensions 86.61 x 100.19 x 143.50” 86.61 x 131.69 x 143.50” 86.61 x 171.06 x 143.50”
WxDxH (2200 x 2545 x 3645mm) (2200 x 3345 x 3645mm) (2200 x 4345 x 3645mm)
ISO-10360-2:2009 E0,MPE
18-22°C (64.4-71.6°F) (2.9+4L/1000)µm
16-26°C (60.8-78.8°F) (2.9+5L/1000)µm
ISO-10360-5: 2010
PFTU,MPE 3.2µm
Configuration for ISO Tests Air Supply Environment 18-22°C (64.4-71.6°F) 16-26°C (60.8-78.8°F)
RSP2+RSH250 Ø6mm x L10mm Pressure 72.5 PSI (0.5MPa) Rate of 1.0C° or less per hour 1.0C° or less per hour
Consumption 5.29CFM (150L/min) change 2.0C° or less per day 5.0C° or less per day
Source 8.12CFM (230L/min) Gradient 1.0C° or less per meter vertical & horizontal
Specification of REVO Scanning Probe
Rotation angle Vertical (A-axis) -5° to +120° (0.08 sec)
(Pitch angle) Horizontal (B-axis) ∞ (0.08sec)
Stylus Maximum length 50mm (Distance from probe rotation center to stylus tip)
See page L-2 for explanation of ISO accuracy statements.
L-7
CRYSTA-Apex S1600/2000
SERIES 191 — Standard CNC CMM
Crysta-Apex S1600/2000 series are large-sized CNC
CMMs developed for supporting quality evaluation of large
parts. The scale systems on Mitutoyo high-precision models
utilize a high-performance linear encoder (manufactured
by Mitutoyo) for detecting axis position. In addition,
various technologies have been utilized in the structure,
part processing and assembly to provide high-accuracy
measurement. SP80 Probe
(Extended reach scanning)
Floor vibration at the installation location can be a source See page L-21
of variations in measured values. The auto-leveling air
spring vibration isolators is available as an option for Supported Probe Systems
Crysta-Apex S1600/2000 series. The vibration isolators Type Probe AS1600 AS2000
MH20i
insulates the main unit from floor vibrations and can TOUCH-
TP20
l
l
l
l
quickly level the CMM main unit using a sensor that TRIGGER
PROBES
TP200 l l
detects load fluctuations caused by axis movement of the TP7
SP25
l
l
l
l
CMM or workpiece loading. Build to order. SCANNING
PROBES
MPP l l
SP80 l l
SM606 l l
LASER SM606T l l
PROBES SM610 l l
SM1010 l l
SURFACE
SurfTest l s
FINISH
QVP l l
OPTICAL
CF20 l l
l Supported s Not Recommended
SPECIFICATIONS
CRYSTA-Apex S162012 CRYSTA-Apex S163012 CRYSTA-Apex S164012
Type: BRIDGE Model No. [CRYSTA-Apex CRYSTA-Apex S203016 CRYSTA-Apex S204016
S162016] [CRYSTA-Apex S163016] [CRYSTA-Apex S164016]
Range X axis 62.99” (1600mm) 78.73” (2000mm)
Y axis 78.73” (2000mm) 118.10” (3000mm) 157.47” (4000mm) 118.10” (3000mm) 157.47” (4000mm)
Z axis 47.24” (1200mm) [62.99” (1600mm)] 62.99” (1600mm)
Resolution 0.000004” (0.0001mm)
Guide Method Air bearing on each axis
Maximum Drive Speed 3D 27.28”/s (693mm/s)
Maximum Acceleration 3D 0.14G (1,390mm/s2)
Work table Material Granite
70.86” x 126.18” 70.86” x 165.55” 70.86” x 204.92” 86.61” x 165.55” 86.61” x 204.92”
Size (1800mm x 3205mm) (1800mm x 4205mm) (1800mm x 5205mm) (2200mm x 4205mm) (2200mm x 5205mm)
Tapped insert M8 x 1.25mm
Workpiece Max. height 55.11” (1400mm) [70.86” (1800mm)] 70.86” (1800mm)
Max. load 6,613 lbs. (3000kg) 7,716 lbs. (3500kg) 9,920 lbs. (4500kg) 8,818 lbs. (4000kg) 11,023 lbs. (5000kg)
Mass 20,502 lbs. (9300kg) 23,368 lbs. (10600kg) 32,628 lbs. (14800kg) 31,085 lbs. (14100kg) 42,769 lbs. (19400kg)
(incl. stand & controller) [20,613 lbs. (9350kg)] [23,479 lbs. (10650kg)] [37,738 lbs. (14850kg)]
Dimensions 106.29 x 141.73 x 162.99” 106.29 x 181.10 x 162.99” 106.29 x 220.47 x 164.96”
WxDxH (2700 x 3600 x 4140mm) (2700 x 4600 x 4140mm) (2700 x 5600 x 4190mm) 122.04 x 181.10 x 196.45” 122.04 x 220.47 x 198.42”
[106.29 x 141.73 x 194.48”] [106.29 x 181.10 x 194.48”] [106.29 x 220.47 x 196.45”] (3100 x 4600 x 4990mm) (3100 x 5600 x 5040mm)
[(2700 x 3600 x 4940mm)] [(2700 x 4600 x 4940mm)] [(2700 x 5600 x 4990mm)]
ISO-10360-2:2009 E0,MPE
18-22°C TP200: (6+4.5L/1000)µm [(7+5.5L/1000)µm] (9+8L/1000)µm
(64.4-71.6°F) MPP310/SP25: (3.3+4.5L/1000)µm [(4.5+5.5L/1000)µm] (4.5+8L/1000)µm
16-24°C TP200: (6+5.5L/1000)µm [(7+6.5L/1000)µm] (9+9L/1000)µm
(60.8-75.2°F) MPP310/SP25: (3.3+5.5L/1000)µm [(4.5+6.5L/1000)µm] (4.5+9L/1000)µm
ISO-10360-4 MPETHP/MPTTHP †
MPP310/SP25: 5µm/60sec 6µm/60sec
ISO-10360-5: 2010 PFTU,MPE
TP200: 6.5µm [7.5 µm] 9.5µm
MPP310/SP25: 5µm [6µm] 6µm
Stylus Configurations for ISO Tests Air Supply Environment 18-22°C (64.4-71.6°F ) 16-24°C (60.8-75.2°F)
TP200: Ø4mm x L10mm Pressure 58.0 PSI (0.4MPa) 1.0C° or less per hour 1.0C° or less per hour
Rate of change
SP25/SP80: Ø4mm x L50mm Consumption 5.29CFM (150L/min) 2.0C° or less per day 5.0C° or less per day
MPP310Q: Ø4mm x L18mm Source 7.06CFM (200L/min) Gradient 1.0C° or less per meter vertical & horizontal
† This test is not part of Mitutoyo America’s standard A2LA-accredited CMM calibration procedure and is quoted upon request.
See page L-2 for explanation of ISO accuracy statements.
L-8
STRATO-Apex 500/700/900
Supported Probe Systems
STRATO STRATO
Type Probe Apex 500 Apex 700/900
MH20i l l
TOUCH-
TRIGGER
TP20 l l SERIES 355 — High-Accuracy CNC CMM
TP200 l l
PROBES
TP7 l l
SP25
SCANNING
MPP
l
l
l
l
The STRATO-Apex series is high-accuracy CNC CMMs achieving 0.9µm for the first term. The series
PROBES
SP80 s l guarantees high accuracy and also high-moving speed and acceleration achieved with improved rigid
LASER
SM606
SM606T
s
s
l
l
air bearings on all axial guideways. The scale systems on Mitutoyo high-precision models utilize a
PROBES SM610 s l high-performance linear encoder (manufactured by Mitutoyo), for detecting axis position. In addition,
SM1010 s l various technologies have been utilized in the structure, part processing and assembly to provide high-
SURFACE
FINISH
SurfTest — l accuracy measurement.
QVP s l TP7 Probe
OPTICAL
CF20 l l (High-precision touch trigger)
l Supported s Not Recommended — Not supported See page L-20
See page L-20 thru L-27 for
probe system information.
SPECIFICATIONS
Type: BRIDGE Model No. STRATO-Apex 574 STRATO-Apex 776 STRATO-Apex 7106 STRATO-Apex 9106 STRATO-Apex 9166
Range X axis 19.68” (500mm) 27.55” (700mm) 35.43” (900mm)
Y axis 27.55” (700mm) 39.36” (1000mm) 62.99” (1600mm)
Z axis 15.74” (400mm) 23.62” (600mm)
Resolution 0.0000019” (0.00005mm) 0.00000078” (0.00002mm)
Guide Method Air bearing on each axis
Maximum Drive Speed 3D 20.43”/s (519mm/s)
Maximum Acceleration 3D 0.17G (2,309mm/s2) 0.26G (2,598mm/s2)
Work table Material Granite
26.61 x 55.90” 33.93 x 55.90” 33.93 x 67.71” 41.81 x 67.71” 41.81 x 91.33”
Size (676 x 1420mm) (862 x 1420mm) (862 x 1720mm) (1062 x 1720mm) (1062 x 2320mm)
Tapped insert M8 x 1.25mm
Max. height 22.04” (560mm) 30.31” (770mm)
Workpiece
Max. load 396 lbs. (180kg) 1,102 lbs. (500kg) 1,763 lbs. (800kg) 1,763 lbs. (800kg) 2,645 lbs. (1200kg)
Mass (incl. stand & controller) 3,373 lbs. (1530kg) 4,177 lbs. (1895kg) 4,806 lbs. (2180kg) 5,313 lbs. (2410kg) 6,801 lbs. (3085kg)
Dimensions 49.99x64.96x94.88” 57.48x73.22x111.41” 57.48x85.03x111.41” 65.35x85.03x111.41” 65.35x108.66x111.41”
WxDxH (1270x1650x2410mm) (1460x1860x2830mm) (1460x2160x2830mm) (1660x2160x2830mm) (1660x2760x2830mm)
ISO-10360-2:2009 E0,MPE
TP200: (1.4+2.5L/1000)µm* (1.4+2.5L/1000)µm** (1.5+2.5L/1000)µm**
SP25: (0.7+2.5L/1000)µm* (0.9+2.5L/1000)µm**
ISO-10360-2:2009 E150,MPE
TP200: (1.9+2.5L/1000)µm* (1.9+2.5L/1000)µm** (2.0+2.5L/1000)µm**
SP25: (0.7+2.5L/1000)µm* (0.9+2.5L/1000)µm**
ISO-10360-2:2009 R0,MPL TP200: 1.2µm* 1.2µm**
SP25: 0.7µm* 0.8 µm**
ISO-10360-4 MPETHP/MPTTHP SP25: 1.3µm/40sec* 1.8µm/45sec**
TP200: 1.8µm* 1.8µm**
ISO-10360-5: 2010 PFTU,MPE SP25: 0.7µm* 0.9 µm**
* 18-22°C (64.4-71.6°F - Strato Apex 574
** 19-21°C (66.2-69.8°F) - Strato Apex 776/7106/9106/9166
Stylus Configurations for ISO Tests Air Supply Environment 18-22°C (64.4-71.6°F ) 19-21°C (66.2-69.8°F)
TP200: Ø4mm x L10mm Pressure 58.0 PSI (0.4MPa) 1.0C° or less per hour
Rate of change
SP25/SP80: Ø4mm x L50mm Consumption 2.11CFM (60L/min) 2.0C° or less per day
Source 4.23CFM (120L/min) Gradient 1.0C° or less per meter vertical & horizontal
L-9
STRATO-Apex 1600 Type
Supported Probe Systems
Probe
STRATO
Apex 1600
air spring vibration isolator is available as an option See page L-20 thru L-27 for
for STRATO-Apex 1600 series. The vibration isolator probe system information
insulates the main unit from floor vibrations and can
quickly level the CMM main unit using a sensor that
detects load fluctuations caused by axis movement of
the CMM or workpiece loading. All STRATO-Apex high-
precision series CMMs are equipped with temperature
compensation and therefore do not require a
temperature-controlled room. Accuracy is
guaranteed within the range
of 16 to 26°C.
STRATO-Apex 1600
SP80 Probe
(Extended reach scanning)
SPECIFICATIONS See page L-21
Type: BRIDGE Model STRATO-Apex 162012 STRATO-Apex 162016 STRATO-Apex 163012 STRATO-Apex 163016
X axis 62.99” (1600mm)
Range Y axis 78.73” (2000mm) 118.10” (3000mm)
Z axis 47.24” (1200mm) 62.99” (1600mm) 47.24” (1200mm) 62.99” (1600mm)
Resolution 0.0000019” (0.00005mm)
Guide Method Air bearing on each axis
Maximum Drive Speed 3D 23.85”/s (606mm/s)
Maximum Acceleration 3D 0.13G (1,350mm/s2)
Work table Material Granite
72.83 x 129.13” 72.83 x 168.50”
Size (1850mm x 3280mm) (1850mm x 4280mm)
Tapped insert M8 x 1.25mm
Workpiece Max. height 53.14” (1350mm) 368.89” (1750mm) 53.14”(1350mm) 68.89” (1750mm)
Max. load 7,716 lbs. (3500kg) 8,818 lbs. (4000kg)
Mass (incl. stand & controller) 24,582 lbs. (11150kg) 24,692 lbs. (11200kg) 33,730 lbs. (15300kg) 33,841 lbs. (15350kg)
Dimensions 110.43x145.07x170.86” 110.43x145.07x202.36” 110.43x184.44x172.83” 110.43x184.44x204.33”
WxDxH (2805x3685x4340mm) (2805x3685x5140mm) (2805x4685x4390mm) (2805x4685x5190mm)
ISO-10360-2:2009 E0,MPE
18-22°C (64.4-71.6°F) TP200: (3.5+4L/1000)µm (4.0+4L/1000)µm (3.5+4L/1000)µm (4.0+4L/1000)µm
SP25/SP80: (2.5+4L/1000)µm (3.0+4L/1000)µm (2.5+4L/1000)µm (3.0+4L/1000)µm
ISO-10360-2:2009 E150,MPE †
18-22°C (64.4-71.6°F) TP200: (3.5+4L/1000)µm (4.0+4L/1000)µm (3.5+4L/1000)µm (4.0+4L/1000)µm
SP25/SP80: (2.5+4L/1000)µm (3.0+4L/1000)µm (2.5+4L/1000)µm (3.0+4L/1000)µm
ISO-10360-2:2009 R0,MPL †
TP200: 3.5µm 4.0µm 3.5µm 4.0µm
SP25: 2.5µm
ISO-10360-4 MPETHP/MPTTHP †
SP25/SP80: 2.5µm/60sec 3.0µm/60sec 2.5µm/60sec 3.0µm/60sec
ISO-10360-5: 2010 PFTU,MPE TP200: 3.5µm 4.0µm 3.5µm 4.0µm
SP25/SP80: 2.3µm 2.8µm 2.3µm 2.8µm
Stylus Configurations for ISO Tests Air Supply Environment 18-22°C (64.4-71.6°F )
TP200: Ø4mm x L10mm Pressure 58.0 PSI (0.4MPa) 1.0C° or less per hour
Rate of change
SP25/SP80: Ø4mm x L50mm Consumption 3.53CFM (100L/min) 2.0C° or less per day
1.0C° or less per meter vertical
Source 8.82CFM (250L/min) Gradient & horizontal
† This test is not part of Mitutoyo America’s standard A2LA-accredited CMM calibration procedure and is quoted upon request.
See page L-2 for explanation of ISO accuracy statements.
L-10
FALCIO Apex 2000/3000
SERIES 355 — High-Accuracy Large CNC CMM
The FALCIO-Apex 2000/3000 series CNC CMMs use Mitutoyo’s standard structure for large
machines, which are designed for measuring large and heavy workpieces with high accuracy.
The measuring accuracy and drive speed are the highest level in the X-axis measuring range
of 2000mm and 3000mm for CNC CMMs worldwide. Units are equipped with a system
(MOVAC) to automatically restore accuracy deterioration caused by foundation deformation as
a standard feature. Safety devices such as Z-axis beam sensor, tape switch and area sensor are
available as options. Built to order.
SurfaceMeasure Probes
(Laser scanning probes—non-contact)
See page L-22
SPECIFICATIONS
Type: SEPARATE GUIDE Model No. FALCIO-Apex 203015 FALCIO-Apex 204015 FALCIO-Apex 205015 FALCIO-Apex 305015
X axis 78.73” (2000mm) 118.10” (3000mm)
Range Y axis 118.10” (3000mm) 157.47” (4000mm) 196.84” (5000mm)
Z axis 59.05” (1500mm)
Resolution 0.0000039” (0.0001mm)
Mass (incl. stand & controller) 26,455 lbs. (12000kg) 30,864 lbs. (14000kg) 33,069 lbs. (15000kg) 35,273 lbs. (16000kg)
Dimensions 167.32x190.94x184.64” 167.32x230.31x184.64” 167.32x269.68x184.64” 213.77x312.99x184.64”
WxDxH (4250x4850x4690mm) (4250x5850x4690mm) (4250x6850x4690mm) (5430x7950x4690mm)
ISO-10360-2:2009 E0,MPE
18-22°C (64.4-71.6°F) TP200: 3.5+4L/1000µm
TOUCH-
MH20i l See page L-2 for explanation of ISO
TP20 l accuracy statements.
TRIGGER
TP200 l
PROBES
TP7 l
SP25 l
SCANNING
MPP s
PROBES
SP80 l
SM606 l
LASER SM606T l This machine incorporates a startup system (relocation
PROBES SM610 l -AIN¬5NIT detection system), which disables operation when
SM1010 l 3TARTUP¬3YSTEM an unexpected vibration is applied or the machine is
relocated. Be sure to contact your nearest Mitutoyo
TP200 Probe
SURFACE
SurfTest l prior to relocating this machine after initial installation. (Touch trigger)
FINISH Refer to page VIII for details. See page L-20
l Supported s Not Recommended
L-11
LEGEX 500/700/900/1200 Z spindle Drive axis
Drive axis
Achieving premium performance, the LEGEX series with its fixed bridge structure and precision air bearings resting
on rigid guideways ensures superior stability of motion and ultra-high measuring accuracy. Thorough testing, using
FEM structure analysis simulation, guarantees geometric motion accuracy has minimal errors from fluctuations in the X beam
load and other variables. LEGEX series CNC CMMs are suitable for complex small- to medium-size workpieces, such
as gears, bearings, lens, precision dies or other high-precision workpieces requiring dimensional accuracies with small
tolerances.
The LEGEX series incorporates an ultra-high accuracy scale unit with crystallized glass scales (thermal expansion XY axis independence and center-of-gravity drive
coefficient of 0.01x10-6/K), and a high-resolution, high-performance reflection linear encoder providing premium system. The fixed-bridge design of the LEGEX allows the axes
positioning performance. All LEGEX Ultra-accuracy series CMM’s are equipped with temperature compensation and to operate independently. Movement of the X-axis slide does
therefore do not require a temperature controlled room. Accuracy is guaranteed within the range of 18 to 22°C. not change the loading on the Y-axis slide and therefore does
not cause deformation. In addition, the center-of-gravity drive
MPP-310Q system places the drive units near the center of gravity of each
Mitutoyo’s MPP-310Q probe can be used for point-to-point measuring and continuous scanning slide, allowing high speed and highly accurate measurements
applications. If the workpiece requires the maximum accuracy, the MPP-310Q offers zero-point data by reducing inertia-induced deflections during acceleration
acquisition for statistical measurement. In this mode the MPP-310Q obtains the measurement data and deceleration.
after all the CMM slides have come to a complete standstill. This statistical measurement is intended
to eliminate dynamic effects on measurement. See page L-21 for MPP-310Q system information.
MPP-310Q Specs
• Resolution: 0.01µm
• Measuring Force: 0.20N/mm
• Maximum Stylus Length: 200mm
• Maximum Stylus Weight: 75g
Vibration Control
The LEGEX is hardened against floor-induced vibration by use
of air-damped spring isolators with an auto-leveling function,
LEGEX 9106 virtually eliminating factory-floor vibrations from the entire
LEGEX 574 LEGEX 776 machine structure.
Ceramic-coated worktable
Standard feature for corrosion
resistance and long life.
SPECIFICATIONS
Type: FIXED BRIDGE Model No. LEGEX 574 LEGEX 774 LEGEX 776 LEGEX 9106
X axis 19.68” (500mm) 27.55” (700mm) 35.43” (900mm)
Range Y axis 27.55” (700mm) 39.36” (1000mm)
Z axis 15.74” (400mm) 23.62” (600mm)
Resolution 0.00000039” (0.01µm)
Guide Method Air bearing on each axis
Maximum Drive Speed 3D 7.8”/s (200mm/s)
Maximum Acceleration 3D 0.1G (980mm/s2)
Material Cast Iron with Ceramic Coating
21.65” x 29.52” 29.52” x 29.52” 37.40” x 41.33”
Work table Size (550mm x 750mm) (750mm x 750mm) (950mm x 1050mm)
Tapped insert M8 x 1.25mm
Max. height 27.59” (701mm) 33.50” (851mm)
Workpiece
Max. load 551 lbs. (250kg) 1,102 lbs. (500kg) 1,763 lbs. (800kg)
Mass (incl. stand & controller) 7,716 lbs. (3500kg) 11,023 lbs. (5000kg) 11,243 lbs. (5100kg) 14,330 lbs. (6500kg)
Dimensions 62.44 x 94.48 x 103.54’’ 65.74 x 94.48 x 103.54’’ 65.74 x 94.48 x 115.35’’ 73.62 x 119.29 x 120.07’’
WxDxH (1470 x 2400 x 2630mm) (1670 x 2400 x 2630mm) (1670 x 2400 x 2930mm) (1870 x 3030 x 3050mm)
ISO-10360-2:2009 E0,MPE 19-21°C (66.2-69.8°F) 18-22°C (64.4-71.6°F)
MPP310Q: (0.28+L/1000)µm (0.30+L/1000)µm
19-21°C (66.2-69.8°F)
SP25M: (0.38+L/1000)µm (0.40+L/1000)µm
ISO-10360-4 MPETHP/MPTTHP †
MPP310Q/SP25M: 1.1µm/60sec
ISO-10360-5: 2010 PFTU,MPE MPP310Q: 0.40µm
SP25M: 0.45µm
Stylus Configurations for ISO Tests Air Supply 500/700/1200 900 Environment 19-21°C (66.2-69.8°F) / 18-22°C (64.4-71.6°F)
MPP310Q: Ø4mm x L18mm Pressure 58.0 PSI (0.5MPa) 72.5 PSI (0.4MPa) 0.5C° or less per hour
Rate of change
SP25M: Ø4mm x L50mm Consumption 4.23CFM (120L/min) 1.0C° or less per day
Source 5.65CFM (160L/min) Gradient 1.0C° or less per meter vertical & horizontal
† This test is not part of Mitutoyo America’s standard A2LA-accredited CMM calibration procedure and is quoted upon request.
See page L-2 for explanation of ISO accuracy statements.
L-12
MACH-V9106
SERIES 360 — Inline CNC CMM
The MACH-3A and MACH-V maximize machining operations by performing in-line or
near-line high-speed coordinate measuring in conjunction with your CNC machine tools.
These high-throughput machines can be incorporated right into the manufacturing line and can
provide pre/post machining feedback to your machine tool for machining adjustments.
SPECIFICATIONS
Type: INLINE Model No. MACH V9106
X axis 35.43” (900mm)
Range Y axis 39.36” (1000mm)
Z axis 23.62” (600mm)
Resolution 0.0000039” (0.0001mm)
Guide Method Mechanical bearing on each axis
Maximum Drive Speed 3D 34.09”/s (866mm/s)
Maximum Acceleration 3D 0.88g (8660mm/s2)
Material Steel
Work table Size SP25 Probe 35.62” x 41.96”
(905mm x 1066mm) See page L-21.
(Scanning)
MACH-V9106 Tapped insert M8 x 1.25mm
Max. height 31.49” (800mm)
Workpiece
Max. load 330 lbs. (150kg)
Mass (including controller) 9,105 lbs. (4130kg)
Dimensions 58.14 x 115.82 x 114.17” Stylus Configurations for ISO Tests
WxDxH (1477 x 2942 x 2900mm)
TP7: Ø4mm x L20mm
ISO-10360-2:2009 E0,MPE
SP25: Ø4mm x L50mm
19-21°C (66.2-69.8°F) (2.5+3.5L/1000)µm
18-22°C (64.4-71.6°F) (2.7+3.8L/1000)µm Environment 5-35°C (71.6-64.4°F)
TP7/SP25:
15-25°C (59.0-77.0°F) (2.9+4.3L/1000)µm 2.0C° or less per hour
Rate of change
5-35°C (41.0-95.0°F) (3.6+5.8L/1000)µm 10.0C° or less per day
Gradient 1.0C° or less per meter
ISO-10360-4 MPETHP/MPTTHP † SP25: 4.0µm/40sec vertical & horizontal
ISO-10360-5: 2010 PFTU,MPE TP7: 2.2µm
SP25: 2.2µm
† This test is not part of Mitutoyo America’s standard A2LA-accredited CMM calibration procedure and is quoted upon request.
MACH-3A 653
SERIES 360 — Inline CNC CMM
Inline CNC CMM (horizontal type) incorporating the CMM controller and host computer in the
main unit results in a compact spacing-saving footprint for the shop floor. This series is designed for
24-hour operation, resulting in stable operation.
SPECIFICATIONS
Type: INLINE Model No. MACH-3A 653
X axis 23.62” (600mm)
Range Y axis 19.68” (500mm)
Z axis 11.02” (280mm)
Resolution 0.0000039” (0.0001mm)
Guide Method Mechanical bearing on each axis
Maximum Drive Speed 3D 47.71”/s (1,212mm/s)
Maximum Acceleration 3D 1.21G (11,882mm/s2)
Mass 8,818 lbs. (4000kg)
Dimensions 73.62 x 50.39 x 75.59”
WxDxH (1870 x 1280 x 1920mm) TP7 Probe
MACH-3A 653 (High-precision tough-trigger)
ISO-10360-2:2009 E0,MPE
See page L-20.
19-21°C (66.2-69.8°F) (2.2+3.5L/1000)µm
15-25°C (66.2-69.8°F) (2.5+4.2L/1000)µm
SP25:
10-30°C (50.0-86.0°F) (2.9+5.0L/1000)µm
Stylus Configurations for ISO Tests
5-35°C (66.2-95.0°F) (3.2+5.7L/1000)µm TP7: Ø4mm x L20mm
19-21°C (66.2-69.8°F) (2.5+3.5L/1000)µm SP25: Ø4mm x L50mm
15-25°C (66.2-69.8°F) (2.8+4.2L/1000)µm
TP7: Environment 5-35°C (71.6-64.4°F)
10-30°C (50.0-86.0°F) (3.2+5.0L/1000)µm
2.0C° per hour
5-35°C (66.2-95.0°F) (3.5+5.7L/1000)µm Rate of change 10.0C° per day
ISO-10360-4 MPETHP/MPTTHP † SP25: 4.0µm/40sec 1.0C° or less per meter
Gradient
ISO-10360-5: 2010 PFTU,MPE SP25: 2.2µm vertical & horizontal
TP7: 2.5µm
† This test is not part of Mitutoyo America’s standard A2LA-accredited CMM calibration procedure and is quoted upon request.
See page L-2 for explanation of ISO accuracy statements.
L-13
MACH KO-GA-ME
SERIES 360 — Inline CNC CMM
SPECIFICATIONS
Type: INLINE Model No. KGM888-B KGM12128-B
TP200 Touch-Trigger Probe
Range X axis 3.14” (80mm) 4.72” (120mm) See page L-20.
Y axis 3.14” (80mm) 4.72” (120mm)
Z axis 3.14” (80mm)
Resolution 0.00000078” (0.02µm)
Guide Method Straight-motion hard bearing
Maximum Drive Speed 3D 13.38”/s (340mm/s)
Maximum Acceleration 3D 0.68G (6,750mm/s2)
Mass: main unit 61.7 lbs. (28kg)
Dimensions* 15.03 x 14.68 x 30.90”
W x D x H: (height includes Z measuring range) (382 x 373 x 785mm)
Measuring Accuracy (ISO 10360-2:2009)
19-21°C (66.2-69.8°F) (2.4+5.7L/1000)µm
15-25°C (66.2-69.8°F) (2.7+6.4L/1000)µm
TP200/SP25:
10-30°C (50.0-86.0°F) (3.1+7.2L/1000)µm
10-35°C (50.0-95.0°F) (3.4+7.9L/1000)µm
Probing Error (ISO 10360-2:2009)
TP200/SP25: 2.0µm
Scanning probing error (ISO 10360-4:2000)
SP25: 2.7µm/(30s)
Stylus Configurations for Accuracy Tests Environment 10-35°C (50.0-95.0°F)
TP200: Ø3mm x L10mm 2.0C° or less per hour
Rate of Change
SP25: Ø4mm x L50mm 10.0C° or less per day
Gradient 1.0C° or less per meter vertical & horizontal
L-14
CARBapex / CARBstrato
SERIES 355 — Car Body Measuring System CNC CMM
SPECIFICATIONS
Type: HORIZONTAL ARM Model No. CARBapex 601624 CARBstrato 601624
Range X axis 236.21” (6000mm)
Y axis (Single) 62.99” (1600mm)
Y axis (Dual) 153.54” (3900mm)
Z axis 94.48” (2400mm)
Resolution 0.0000039” (0.0001mm)
Mass Single Arm 4,982 lbs. (2260kg) 13,845 lbs. (6280kg)
Dual Arm 9,964 lbs. (4520kg) 27,690 lbs. (12560kg)
Dimensions 163.18 x 275.58 x 144.33” 176.10 x 238.34 x 155.62”
Single Arm
WxDxH (4145 x 7000 x 3666mm) (4473x 7324 x 3953mm)
322.79 x 275.58 x 144.33” 348.26 x 238.34 x 155.62”
Dual Arm
(8190 x 7000 x 3666mm) (8846x 7324 x 3953mm)
ISO-10360-2:2009 E0,MPE TP20: (25+28L/1000≤95)µm (18+20L/1000≤70)µm
Single Arm
16-26°C (60.8-78.8°F) SP25: (20+28L/1000≤95)µm (15+20L/1000≤70)µm
Dual Arm TP20: (50+35L/1000≤120)µm (38+30L/1000≤90)µm
This machine incorporates a startup system (relocation
detection system), which disables operation when
an unexpected vibration is applied or the machine is
SP25: (45+35L/1000≤120)µm (35+30L/1000≤90)µm
relocated. Be sure to contact your nearest Mitutoyo ISO-10360-5: 2010 PFTU,MPE TP20: 20µm 15µm
prior to relocating this machine after initial installation. Single Arm
SP25: 15µm 13µm
TP20: 20µm 15µm
Dual Arm
SP25: 15µm 13µm
Stylus Configurations for ISO Tests
TP20: Ø3mm x L10mm
SP25: Ø4mm x L50mm
See page L-2 for explanation of ISO accuracy statements.
L-15