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SW Test Approach
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3 CONTRIBUTING AUTHORS
Name author Part(s) of this document

5 OPEN ISSUES
ID Description AIR, IP/ECR Action holder

9 DOCUMENT CHANGE & HISTORY RECORD

Maintainer Last update Status Version AIR, IP/ECR Comment

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1 APPLICABLE DOCUMENTS
2
3TCE Controlling documents (auto generated, do not change)
Ref. Title Author Modified date
<Test Strategy>

4TCE Reference documents (auto generated, do not change)

Ref. Title Author Modified date

6 USEFUL LINKS
Link Description
ASML coding standards The ASML coding standards
ASML Dictionary Software Architecture User Manual
Black Book of testing Software Test Architecture User Manual
Component List Overview of the Twinscan components
FC Test Strategy guideline Guideline on how to use this template for FC Test Level test strategy
FCT Overview of all FCT’s
Interface viewer Overview of the required and provided interfaces per component and interface details
SW Product Architects Overview of all SW Product Architects
System Test Strategy guideline Guideline on how to use this template for System Interface Level test strategy
Twinscan Layer Diagrams Twinscan layer diagrams,
Unit Test Strategy guideline Guideline on how to use this template for Unit Test Level test strategy
Yellow Book Software Architecture User Manual
7

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1 TABLE OF CONTENTS

21 TEST SCOPE...................................................................................................................................................... 5

32 TEST ITEMS....................................................................................................................................................... 6
4 2.1 REQUIREMENTS............................................................................................................................................................ 6

53 TEST CONDITIONS............................................................................................................................................ 7
6 3.1 RISK ANALYSIS.............................................................................................................................................................. 7
7 3.2 RISK DETAILS................................................................................................................................................................. 7
8 3.2.1 RISK1......................................................................................................................................................................... 7
9 3.2.2 RISK2......................................................................................................................................................................... 7
10 3.3 RISK AFTER MITIGATION.............................................................................................................................................. 7
11 3.3.1 RISKAM1.................................................................................................................................................................... 8
12 3.3.2 RISKAM2.................................................................................................................................................................... 8

134 TEST DESIGN..................................................................................................................................................... 9

14 4.1 RISK MITIGATIONS......................................................................................................................................................... 9
15 4.1.1 MITIGATION RISK1................................................................................................................................................... 9
16 4.1.2 MITIGATION RISK2................................................................................................................................................... 9

175 TEST ENVIRONMENTS.................................................................................................................................... 10

186 ENTRY / EXIT CRITERIA.................................................................................................................................. 11

19 6.1 ENTRY CRITERIA......................................................................................................................................................... 11
20 6.2 EXIT CRITERIA.............................................................................................................................................................. 11

217 TEST SPECIFICATION..................................................................................................................................... 12

22 7.1 FFM/PROTO TEST CASES........................................................................................................................................... 12
23 7.2 PROGRESSION TEST CASES..................................................................................................................................... 12
24 7.3 REGRESSION TEST CASES........................................................................................................................................ 12
25

26 LIST OF TABLES
27Table 1 Affected components..................................................................................................................................... 5
28Table 2: Risk items..................................................................................................................................................... 7
29Table 3 Risk items after mitigation.............................................................................................................................. 8
30Table 4 Mitigations...................................................................................................................................................... 9
31

32 FIGURES
33Figure 1 Risk Assessment Matrix overview................................................................................................................ 7
34

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11 TEST SCOPE
14The test scope describes what is in scope for the current document.
15  Platform: EUV (and for common components also DUV)
16  NXE:3400
17  QBL release
18
19Table 1 Affected components

Building Block Component CC Owner

BB-040-0011A CMEM
BB-006-0022C DIADEU
BB-006-0011A GNID
BB-006-0002B IDEU
BB-006-0002B IFEU
20

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12 TEST ITEMS

82.1 REQUIREMENTS
9
ID Requirement Ref. Impacted Components Risk
introduced

10
11
12

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13 TEST CONDITIONS

123.1 RISK ANALYSIS

13Find the Image Sensing’s strategy for Risk analysis in the following link:
14https://techwiki.asml.com/index.php/Risk_Analysis.
15
16Table 2: Risk items
Risk ID Short Description Severity Likelihood Zone
RISK1
RISK2

17The mitigations are according to the risk matrix zone’s in Figure 1 Risk Assessment Matrix overview.

18
19Figure 1 Risk Assessment Matrix overview

203.2 RISK DETAILS

21The risk details include some additional information about the root cause of the risk.

223.2.1 RISK1
23[Description]

243.2.2 RISK2
25[Description]

263.3 RISK AFTER MITIGATION

27After the mitigations mentioned in Table 4 Mitigations have been executed, the following risks remain:

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1Table 3 Risk items after mitigation

Risk ID Short Description Severity Likelihood Zone
RISKAM1
RISKAM2

23.3.1 RISKAM1
3[Description]

43.3.2 RISKAM2
5[Description]

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14 TEST DESIGN

64.1 RISK MITIGATIONS

7
8Table 4 Mitigations

Risk ID Short Description Test case

RISK1
RISK2
9

104.1.1 MITIGATION RISK1

11[Description]

124.1.2 MITIGATION RISK2

13[Description]
14

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15 TEST ENVIRONMENTS
4<Start your test environment description here>

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16 ENTRY / EXIT CRITERIA

36.1 ENTRY CRITERIA

7<Start your entry criteria description here>

86.2 EXIT CRITERIA

12<Start your exit criteria description here>
13

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17 TEST SPECIFICATION
2Note: This section is to be replaced by a test database in order to avoid repetition of testcases in every
3Test Approach.

47.1 FFM/PROTO TEST CASES

5Often written down in an EP (Execution Plan) template.

67.2 PROGRESSION TEST CASES

<Test-case ID> <Title>
Objective
Pre-conditions /
Set up
Configuration
Duration
Step Execute Expected result
ID
1.
2.
3.
4.
5.
Wrap up / Post-conditions
7

87.3 REGRESSION TEST CASES

<Test-case ID> <Title>
Objective
Pre-conditions /
Set up
Configuration
Duration
Step Execute Expected result
ID
1.
2.
3.
4.
5.
Wrap up / Post-conditions
9

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