The AMN-600R is an automatic impedance matching network for 0-600 watts that quickly and accurately adjusts the input impedance in response to load changes. It uses a phase and magnitude detector to determine capacitor positions, and a controller drives servomotors to minimize reflected power. Key features include forced air cooling, a rack-mount controller, and frequency options from 370kHz to 84MHz.
The AMN-600R is an automatic impedance matching network for 0-600 watts that quickly and accurately adjusts the input impedance in response to load changes. It uses a phase and magnitude detector to determine capacitor positions, and a controller drives servomotors to minimize reflected power. Key features include forced air cooling, a rack-mount controller, and frequency options from 370kHz to 84MHz.
The AMN-600R is an automatic impedance matching network for 0-600 watts that quickly and accurately adjusts the input impedance in response to load changes. It uses a phase and magnitude detector to determine capacitor positions, and a controller drives servomotors to minimize reflected power. Key features include forced air cooling, a rack-mount controller, and frequency options from 370kHz to 84MHz.
The AMN-600R is an automatic impedance matching network for 0-600 watts that quickly and accurately adjusts the input impedance in response to load changes. It uses a phase and magnitude detector to determine capacitor positions, and a controller drives servomotors to minimize reflected power. Key features include forced air cooling, a rack-mount controller, and frequency options from 370kHz to 84MHz.
All AMN-R automatic impedance matching networks are engineered with high-speed tuning and user convenience in mind. The AMN-R adjusts input impedance quickly, accurately and dependably - in response to the changes in load characteristics during your process. At the input of the AMN-R, a phase and magnitude detector determines the position of the capacitors. This information is transferred to the separate ' automatic matching network controller' also known as the AMNC (included). The controller then drives the servomotors to the positions, which give zero, or minimum reflected power.
Main features
Robust analogue design.
0-600 Watts MAX. Forced air-cooled Rack-mount controller as standard (included) Compact: 125mm (H) x 210mm (W) x 330mm (L) – 3.2kg Phase and Magnitude detector provides continuous corrections for process drift. Sensing network measures bias voltage. Frequency options range between 370khz – 84mhz.
(Non-standard frequencies are available - please contact factory for details).
Functions
Via included matching network controller:
Displays the current position of the capacitors on the VFD display.
Parks the capacitors in a predetermined ‘base’ position when RF is inactive. Allows the base position to be adjusted / preset. Allows the base positions to be set by external equipment (Useful for automated processes). Allows the current positions to be read by external equipment. Buffer for bias voltage. Configurable polarity on Phase and Magnitude detector inputs. Configurable tuning span, defaults to 180 degrees for air and gas type capacitors
Coaxial Power Systems LTD | Spectrum House | Unit 2 Finmere Road | Eastbourne | East-Sussex | U.K | BN22 8QL
Tel: +44 (0)1323 639974 | Fax: +44 (0)1323 739654 | Web: www.coaxialpower.com | Email: [email protected] Physical Model Variant AMN 600R 125mm (H) x 210mm (W) x 330mm (L) Dimensions External connectors protrude extra 14mm MAX (Front panel), 14mm MAX (Rear panel) Weight 3.2Kg (8 lb) MAX. Material Chromate Aluminium Style Free-Standing (Other options are available – please consult factory) Connector and Cable Specifications
‘N’ type as standard.
RF Output Connector Other types are available – please consult factory for options
‘N’ type as standard.
RF Input Connector Other types are available – please consult factory for options Control port 25-pin, Sub-Miniature ‘D’ Male, with 8mm 4-40 jack post AC Power Input Connector / Cable N/A Electrical RF Input Power / Impedance 0-600 Watts / 50 Ω
RF Output Power 0-600 Watts
370 khz, 380 khz, 2mhz, 4mhz, 13.56 mhz, 27.12mhz, 40.68 mhz, 84mhz and variable options are Frequency Options available. Other frequencies are available, please consult factory for options Configuration ‘L’, ‘Pi or ‘T’ Network Supplied configured as ‘L’ network unless requested otherwise. ‘L’ Network – 5-20 Ohms Output Impedance Range ‘Pi’ Network – 10-200 Ohms ‘T’ Network – Please consult factory Phase Shift 0 to +/- 160 Tuning Range Depends on unit frequency and the tuning coil installed. Frequency options range between 370khz-84mhz. Frequency Range The network frequency is configured to user required frequency / range and requirements. Load: Air-Vane type Capacitors Tune: Vacuum type Inductor Air-cooled fixed inductor Environmental Operating Temperature 0-40°C (32°F-104°F) Storage Temperature 0-20°C to +65°C (-4 to149°F) Cooling Requirements Cooling Forced air-cooled Other CE Certification BS EN ISO 9001:2008 EN61000-3-2: 2006 Standards EN6100-3-3/A2: 2005 EN61326-1: 2006 EN61010-1: 2001 D.C Bias voltage measurement & control (Optional)
Model DCP-1 : Dark Space Bias Voltage Measurement and Control
A probe, installed inside the network, measures the d.c voltage (0 to 1999V) developed across the dark space in plasma applications such as sputtering and reactive ion etching. The voltage is converted to a 0 to 5V signal, which can be fed back to the generator control system. The voltage is displayed on the loading capacitor position meter.
Coaxial Power Systems LTD | Spectrum House | Unit 2 Finmere Road | Eastbourne | East-Sussex | U.K | BN22 8QL
