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ACT - Piezo & MEMS Extension - WS9 - Capacitance Extraction

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134 views14 pages

ACT - Piezo & MEMS Extension - WS9 - Capacitance Extraction

Uploaded by

Miguel Panesso
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Download as PDF, TXT or read online on Scribd
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Workshop 9:

Capacitance Extraction for Comb Drive

Piezo & MEMS ACTx

1 © 2011
2014 ANSYS, Inc. January 31, 2017
Capacitance Extraction
Capacitance is key parameter in electrostatic devices.
FEA can be used to accurately calculate capacitance.
FEA can be used to extract “ground” capacitance matrix:
• relates charge on conductor with conductor’s voltage drop (to
ground)
“Ground” matrix can be converted to “lumped” matrix of self and
mutual capacitors
Capacitance plays key role in creating electrostatic forces
• Fe = 1/2 dC/dx V2

P12

P11 P22

2 © 2011
2014 ANSYS, Inc. January 31, 2017
Installing ACT Extensions
Installing from WB Project page:

1. Select the “Install Extension …” option


2. It will open a file dialog to select a “*.wbex” file
3. The extension is installed

3 © 2011
2014 ANSYS, Inc. January 31, 2017
Include ACT Extension in Current Analysis

Installing from WB Project page:


1. Select Extensions -> Manage Extension…
2. Check the Piezo and MEMS Extension to load it analysis systems.
Note if this is done after Mechanical is launched, then Mechanical
must be closed and re-opened for it to take effect.

4 © 2014 ANSYS, Inc. January 31, 2017


Capacitance Extraction
Goal of this workshop is to extract the capacitance for a lateral
comb drive.
Lateral comb-drive fingers are sliding parallel plate capacitors
Electrostatic behavior of comb-drive is controlled by capacitance
between the fingers.

Workshop material provided


by Ozen Engineering Inc
www.ozeninc.com

5 © 2011
2014 ANSYS, Inc. January 31, 2017
Capacitance Extraction
Create FEA model of dielectric (probably air) surrounding the
conductors
• conductors are assumed to be “perfect” conductors
– i.e., conductors are not included in electrostatic mesh
• to create a “quality” electrostatic mesh it is sometimes
advantageous to mesh the conductors before meshing the
surrounding air and then clear conductor meshes
– group faces (i.e. nodes on surface) of conductors into individual
named selections with a common prefix and a sequentially
increasing suffix
• For example, named selections in a three conductor system
could have the following naming convection
• conduct1, conduct2, and conduct3

6 © 2011
2014 ANSYS, Inc. January 31, 2017
Project Schematic

• From the project page File menu,


select Restore Archive...

• Using the dialog box, browse to


the file
“Capacitance_Extraction.wbpz”.

7 © 2014 ANSYS, Inc. January 31, 2017


Mechanical Model
• Open Electric Simulation Model.

8 © 2014 ANSYS, Inc. January 31, 2017


Permittivity Definition

Permittivity of the material must be defined to


extract the capacitance.
• Insert an “Electric Relative Permittivity” object in
the electric analysis and select the body
• Define a permittivity of 1 in X, Y and Z direction:

9 © 2011
2014 ANSYS, Inc. January 31, 2017
Voltage Definition

• Insert a Voltage in the analysis


• Select the “conduct1” Named Selection
• Define a Voltage Magnitude of 20 V:

10 © 2011
2014 ANSYS, Inc. January 31, 2017
Voltage Definition

• Insert another Voltage in the analysis


• Select the “conduct2” Named Selection
• Define a Voltage Magnitude of 0 V:

11 © 2011
2014 ANSYS, Inc. January 31, 2017
Capacitance Extraction

• Insert a “Capacitance Extraction” object in the analysis


from the “Solution Controls” menu of the Piezo And
MEMS toolbar
• The model has no symmetry so choose “Full Model”
• The Named Selection prefix used here is “conduct”
• 2 conductors are used here

12 © 2011
2014 ANSYS, Inc. January 31, 2017
Capacitance Post-Processing

• Solve the model


• Insert “Capacitance Post Processing” object in the solution
part of the analysis and select the corresponding
“Capacitance Extraction” object:

• After evaluating the result the Capacitance is displayed:

13 © 2011
2014 ANSYS, Inc. January 31, 2017
Capacitance Extraction

Calculated self capacitance should be 0.105e-2 pF


• calculated capacitance is per comb finger.

Total capacitance obtained by multiplying capacitance


per finger by number of fingers
To obtain a curve of capacitance versus stroke, analysis
can be re-run for different finger positions

14 © 2011
2014 ANSYS, Inc. January 31, 2017

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