INTERNATIONAL ISO

STANDARD 11254-1

First edition
2000-06-01

Laser and laser-related equipment —

Determination of laser-induced damage
threshold of optical surfaces —
Part 1:
1-on-1 test
Lasers et équipements associés aux lasers — Détermination du seuil
d’endommagement provoqué par laser sur les surfaces optiques —
Partie 1: Essai 1 sur 1

Reference number
ISO 11254-1:2000(E)

© ISO 2000
ISO 11254-1:2000(E)

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 ISO 11254-1:2000(E)

Contents

Foreword.....................................................................................................................................................................iv
Introduction .................................................................................................................................................................v
1 Scope ..............................................................................................................................................................1
2 Normative references ....................................................................................................................................1
3 Terms and definitions ...................................................................................................................................1
4 Symbols and units .........................................................................................................................................3
5 Sampling.........................................................................................................................................................4
6 Test method....................................................................................................................................................4
6.1 Principle..........................................................................................................................................................4
6.2 Apparatus .......................................................................................................................................................5
6.3 Preparation of test specimens .....................................................................................................................8
6.4 Procedure .......................................................................................................................................................9
7 Evaluation.......................................................................................................................................................9
8 Accuracy.......................................................................................................................................................10
9 Test report ....................................................................................................................................................10
Annex A (informative) Test report example............................................................................................................12
Annex B (informative) Example of a measurement procedure.............................................................................15
Annex C (informative) Units and scaling of laser-induced damage thresholds .................................................21
Bibliography ..............................................................................................................................................................22

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ISO 11254-1:2000(E)

Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies (ISO
member bodies). The work of preparing International Standards is normally carried out through ISO technical
committees. Each member body interested in a subject for which a technical committee has been established has
the right to be represented on that committee. International organizations, governmental and non-governmental, in
liaison with ISO, also take part in the work. ISO collaborates closely with the International Electrotechnical
Commission (IEC) on all matters of electrotechnical standardization.

International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 3.

Draft International Standards adopted by the technical committees are circulated to the member bodies for voting.
Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote.

Attention is drawn to the possibility that some of the elements of this part of ISO 11254 may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights.

International Standard ISO 11254-1 was prepared by Technical Committee ISO/TC 172, Optics and optical
instruments, Subcommittee SC 9, Electro-optical systems.

ISO 11254 consists of the following parts, under the general title Laser and laser-related equipment —
Determination of laser-induced damage threshold of optical surfaces:

¾ Part 1: 1-on-1 test

¾ Part 2: S-on-1 test

Annexes A, B and C of this part of ISO 11254 are for information only.

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 ISO 11254-1:2000(E)

Introduction
Optical components can be damaged by laser irradiation of sufficiently high energy or power. At any specified laser
irradiation level, the probability for laser damage is usually higher for the surface of a component than for the bulk.
Thus the limiting value of an optical component is usually given by the damage threshold of its surface.

This part of ISO 11254 describes a standard procedure for determining the laser-induced damage threshold (LIDT)
of optical surfaces, both coated and uncoated. The procedure has been promulgated in order to provide a method
for obtaining consistent measurement results, which may be rapidly and accurately compared among different
testing laboratories. In order to simplify the comparison of laser-damage measurement facilities, laser groups are
defined in this part of ISO 11254.

This part of ISO 11254 is applicable to single-shot testing only (1-on-1 tests). For multi-shot testing (S-on-1) refer to
ISO 11254-2.

© ISO 2000 – All rights reserved v

INTERNATIONAL STANDARD ISO 11254-1:2000(E)

Laser and laser-related equipment — Determination

of laser-induced damage threshold of optical surfaces —

Part 1:
1-on-1 test

1 Scope
This part of ISO 11254 specifies a test method for determining the single-shot laser radiation-induced damage
threshold (LIDT) of optical surfaces.

This test procedure is applicable to all combinations of different laser wavelengths and pulse lengths. However
comparison of laser damage threshold data may be misleading unless the measurements have been carried out at
identical wavelengths, pulse lengths and beam diameters.

Application of this part of ISO 11254 is provisionally restricted to irreversible damage of optical surfaces.

NOTE Examples of units and scaling of laser-induced damage thresholds are given in annex C.

WARNING — The extrapolation of damage data can lead to inaccurate or wrong calculated results and to
an overestimation of the LIDT. In the case of toxic materials (e.g. ZnSe, GaAs, CdTe, ThF4, chalcogenides,
Be, Cr, Ni) this could lead to severe health hazards.

2 Normative references
The following normative documents contain provisions which, through reference in this text, constitute provisions of
this part of ISO 11254. For dated references, subsequent amendments to, or revisions of, any of these publications
do not apply. However, parties to agreements based on this part of ISO 11254 are encouraged to investigate the
possibility of applying the most recent editions of the normative documents indicated below. For undated
references, the latest edition of the normative document referred to applies. Members of ISO and IEC maintain
registers of currently valid International Standards.

ISO 10110-7:1996, Optics and optical instruments — Preparation of drawings for optical elements and systems —
Part 7: Surface imperfection tolerances.

ISO 11145:1994, Optics and optical instruments — Lasers and laser-related equipment — Vocabulary and
symbols.

3 Terms and definitions

For the purposes of this part of ISO 11254, the terms and definitions given in ISO 11145 and the following apply.

3.1
surface damage
any permanent laser radiation-induced change of the surface characteristics of the specimen which can be
observed by an inspection technique described within this part of ISO 11254

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ISO 11254-1:2000(E)

3.2
1-on-1 test
test programme that uses one shot of laser radiation on each unexposed site on the specimen surface

3.3
threshold
highest quantity of laser radiation incident upon the optical surface for which the extrapolated probability of damage
is zero

NOTE The quantity of laser radiation may be expressed as energy density Hmax or power density Emax (see annex C).

3.4
target plane
plane tangential to the surface of the specimen at the point of intersection of the test laser beam axis with the
surface of the specimen

3.5
effective area
AT,eff
ratio of power [pulse energy] to maximum power [energy] density

NOTE 1 For spatial beam profiling perpendicular to the direction of beam propagation and angles of incidence differing from
0 rad, the cosine of the angle of incidence is included in the calculation of the effective area. In this case, the effective area may
be approximated by the following formulae:

Q
AT,eff = (1)
H maxcos(= )

P
AT,eff = (2)
Emax cos(= )

NOTE 2 For the special case of a circular flat-top beam profile with diameter d100, the effective area is given by:

2
Q Hmax d100 1 2
AT,eff


d100 (3)
Hmax 4 Hmax 4

For a focused Gaussian beam (circular beam) with a beam diameter d86,5, the effective area is given by:

x2
y2
  8
2
d 86,5

Q
H max ò ò e dxdy  
8r 2
2
d 86,5 1
 
ò
2
AT,eff = = = 2p e r dr = pd 86,5 (4)
H max H max 8
0

With the definition of the second moment of the energy density distribution function H(x,y,z) at the location z,

zz

2
r 2 H(r, )r dr d

2 (z) =

zz
0 0

2
(5)
H(r, )r dr d
0 0

and the definition of the beam diameter dI as a function of the second moment

dI ( z ) = 2 2I ( z ) (6)

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the effective area can be expressed in the following forms:

1 2 1
a) flat-top beam: AT,eff = Fd100 = FdI2 = 2 FI 2 ; d100 = dI (7)
4 4

1 2 1
b) Gaussian beam: AT,eff = Fd86,5 = FdI2 = FI 2 ; d86,5 = dI (8)
8 8

3.6
effective beam diameter
dT,eff
double the square root of the effective area divided by the factor pi

AT,eff
dT,eff = 2 (9)
F

3.7
effective pulse duration
ratio of total pulse energy to maximum pulse power

4 Symbols and units

Table 1 — Symbols and units of measurement

Symbol Unit Term

nm wavelength

 rad angle of incidence

p degree of polarization
dT mm beam diameter in the target plane
dT,eff mm effective beam diameter in target plane
2
AT,eff cm effective area in the target plane

tH ns, µs, s pulse duration

teff ns, µs, s effective pulse duration (see 6.2.6.2)

Q J pulse energy
Ppk W peak pulse power

P W power
2
Hmax J/cm maximum energy density
2
Emax W/cm maximum power density
2
Hth J/cm threshold energy density
2
Eth W/cm threshold power density

Fth W/cm threshold linear power density

NTS total number of sites for the test

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ISO 11254-1:2000(E)

5 Sampling

Either a functional component or a witness specimen shall be tested. If a witness specimen is tested, the substrate
material and surface finish shall be the same as for the component, and the witness specimen shall be coated in
the same coating run as the component. The coating run number and date shall be identified for the test
component.

6 Test method

6.1 Principle

The basic approach to laser damage testing is shown in Figure 1. The output of a well-characterized stable laser is
set to the desired energy or power with a variable attenuator, and delivered to the specimen located at or near the
focus of a focussing system. The use of a focussing system permits the generation of destructive energy densities
or power densities at the test specimen.

Key
1 Sample compartment 5 Waveplate
2 On-line damage detector 6 Variable attenuator
3 Beam diagnostic 7 Laser system
4 Focussing system

Figure 1 — Basic approach to 1-on-1 laser damage testing

The specimen is mounted in a manipulator which is used to position different test sites in the beam and set the
angle of incidence. The polarization state is set with an appropriate waveplate. The incident laser beam is sampled
with a beamsplitter which directs a portion of the beam to a diagnostic unit. The beam diagnostic unit permits
simultaneous determination of the total pulse energy and the spatial and temporal profiles.

Microscopic examination of the testing site before and after irradiation is used to detect damage.

The specimen is positioned at different non-overlapping test sites in reference to the beam, and irradiated at
different energy densities or power densities. From these data the damage threshold can be determined.

This procedure is applicable to testing with all laser systems, irrespective of pulse length and wavelength. Pulse
durations widely used in industrial and scientific applications are summarized and grouped in Table 2.

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Table 2 — Laser groups

Group Description Pulse duration

1 very short pulse 1 ns to 3 ns

2 short pulse 10 ns to 30 ns

3 medium pulse 1
s to 3
s

4 long pulse 200
s to 1000
s

5 pulse length to be specified

6 cw 1s

NOTE Damage thresholds of pulsed lasers (Groups 1 to 4) are usually expressed in units of energy density
2
(J/cm ). The pulse duration of the test laser shall be documented in the test report. Group 6: Damage thresholds of
continuous-wave (cw) lasers are usually expressed in units of linear power density (W/cm). Power density refers to
the average power during the irradiation time. Examples for units of laser-induced damage thresholds are described
in annex C.

6.2 Apparatus

6.2.1 Laser, delivering pulses with a reproducible near-Gaussian or near-flat-top spatial profile.

The temporal profile of the pulses is monitored during the measurement. For the different laser groups, the
maximum allowable variations of the pulse parameters are compiled in Table 3. As a minimum specification of a
laser system of Group 5, the pulse-to-pulse variation of the maximum power density shall be less than  20 %.
Stability criteria for the beam parameters shall be determined and documented in an error budget.

Table 3 — Maximum percentage variation of laser parameters and corresponding percentage variation
of maximum pulse power density Emax

Laser Pulse energy Average power Pulse duration Effective area Power density
group
Q Pav Jeff AT,eff Emax

1 5 —  10  10  15

2 5 — 5 6  10

3 5 — 5 6  10

4 5 — 5 6  10

6 — 5 — 6  20

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ISO 11254-1:2000(E)

6.2.2 Variable attenuator and beam delivery system

The laser output shall be attenuated to the required level with an external variable attenuator that is free of drifts in
transmissivity and imaging properties.

The beam delivery system and the attenuator shall not affect the properties of the laser beam in a manner
inconsistent with the tolerances given in 6.2.1. In particular, the polarization state of the laser beam shall not be
altered by the beam delivery system.

6.2.3 Focussing system

The arrangement of the focussing system should be adapted to the special requirements of the laser system and to
the intended beam profile in the target plane. The specific arrangement and the parameters of the focussing
system shall be documented in the test report. The specifications of the active area and the energy density shall be
referred to the location of the test surface.

For Gaussian beams, it is advisable to select an aperture of the focussing system which amounts to not less than
three times the beam diameter at the entrance of the focussing system. A minimum effective f-number of 50 and a
beam diameter in the target plane of not less than 0,8 mm are recommended. The target plane should be located
at or near the focal waist formed by the focussing system. For Groups 3 to 6, the beam diameter may be reduced
depending on the power density necessary, but should not be smaller than 0,2 mm. In such cases the effective
f-number may be reduced below a value of 50.

For near-flat-top laser beams, it is advisable to position the test surface in the image plane of the focussing system
with a focal length > 0,2 m that forms an image of a suitable aperture in the optical path.

Coherence effects in specimens with parallel surfaces can occur and affect the measurement. These effects shall
be eliminated by appropriate techniques, such as wedging or tilting of the specimen. The application of a highly
converging beam is also a practical method for removing coherence effects in the specimen.

6.2.4 Specimen holder

The test station shall be equipped with a manipulator which allows for a precise placement of the test sites on the
specimen with an accuracy sufficient for the specimen size.

6.2.5 Damage-detection microscope, to inspect the surface before and after the test.

The investigations shall be made with an incident light microscope having Nomarski-type differential interference
contrast. A magnification in the range from 100 to 150 shall be used.

NOTE 1 For routine inspection and objective measurement of laser damage, an image analyser may be attached to the
microscope.

NOTE 2 An appropriate on-line damage detection system may be installed for evaluating the state of the surface under test or
for switching off the laser in long-pulse and cw damage-measurement facilities to avoid catastrophic damage of the specimen.
For on-line detection, any appropriate technique may be used. Techniques suited to this purpose are for instance on-line
microscopic techniques in conjunction with image analysers, photoacoustic and photothermal detection, as well as scatter
measurements using a separate laser or radiation from the damaging laser. A typical set-up for an on-line scatter measurement
system is described in ISO 11254-2.

6.2.6 Beam diagnostics

6.2.6.1 Measurement of total pulse energy and power

The diagnostic package shall be equipped with a calibrated detector to measure the pulse energy or beam power
delivered to the target plane. This instrument shall be traceable to a national standard with an absolute uncertainty
of  5 % or better.

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6.2.6.2 Temporal profile analysis

The diagnostic package shall include suitable instrumentation for analysing the temporal profile of the laser to
determine the pulse duration. The temporal profile shall be integrated to determine the ratio of total pulse energy Q
to maximum pulse power Ppk. This ratio is called the effective pulse duration teff:

z
¥
P(t ) dt
Q
teff = = 0 (10)
Ppk Ppk

For pulsed lasers (Groups 1 to 4), upper limits for the temporal resolution of the pulse duration measurement are
defined in Table 4. For Group 6 lasers, the temporal stability of the output shall be determined with a resolution of
less than 10 ms. For lasers not included in Table 4, the upper limit of the temporal resolution shall not exceed 10 %
of the effective pulse duration.

Table 4 — Upper limits for the temporal resolution of the pulse duration measurement

Group Temporal resolution

1 100 ps

2 1 ns

3 100 ns

4 10 µs

6.2.6.3 Spatial profile

In all cases, the spatial profile shall be analysed in the target plane or an equivalent plane. The diagnostic package
shall be equipped with instrumentation to measure the two-dimensional spatial profile with a spatial resolution of
1,5 % of the beam diameter or better.

The maximum energy density or power density of the beam shall be determined as follows:

The two-dimensional profile shall be integrated to determine the ratio of total pulse energy Q to maximum energy
density Hmax or the ratio of power P to maximum power density Emax, respectively. The effective area AT,eff is
deduced from the formulae:

zz
¥ ¥
H( x, y) dx dy
Q -¥ -¥
AT,eff = = (11)
Hmax Hmax

zz
¥ ¥
E( x, y) dx dy
P -¥ -¥
AT,eff = = (12)
Emax Emax

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ISO 11254-1:2000(E)

The maximum energy density Hmax is given by

Q
Hmax = (13)
AT,eff

The maximum power density Emax is given by

Hmax
Emax = (14)
teff

The maximum power density Emax is given by

P
Emax = (15)
AT,eff

The testing equipment shall be characterized by the following parameters:

a) wavelength, ;

b) angle of incidence, ;

c) degree of polarization, p;

d) beam diameter in the target plane, dT;

e) effective beam diameter in the target plane, dT,eff;

f) pulse duration, tH;

g) effective pulse duration, teff;

h) (minimum) number of sites tested at each energy density value;

i) total number of sites per test, NTS.

6.3 Preparation of test specimens

Wavelength, angle of incidence and polarization of the laser radiation as used in the test shall be in accordance
with the specifications by the manufacturer for normal use. If ranges are given for the values of these parameters,
an arbitrary combination of wavelength, angle of incidence and polarization within these ranges may be used.

Carry out storage, cleaning and preparation of the specimens in accordance with the specimen specifications
provided by the manufacturer for normal use.

In the absence of manufacturer-specified instructions, use the following procedure.

a) Store the specimen at less than 50 % relative humidity for 24 h prior to testing. Handle the specimen by the
non-optical surfaces only.

b) Before testing, carry out a microscopic evaluation of surface quality and cleanliness in accordance with
ISO 10110-7 using a Nomarski/darkfield microscope at 150´ magnification or higher.

c) If contaminants are seen on the specimen, the surface shall be cleaned. The cleaning procedure shall be
documented. If the contaminants are not removable, document them by photographic and/or electronic means
before testing.

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 ISO 11254-1:2000(E)

d) Inspect the test site for dust particles during irradiation. The test environment shall be clean, filtered air of less
than 50 % relative humidity and shall be documented.

e) The test sites shall be in a defined and reproducible arrangement. Refer the test grid to fixed reference points
on the specimen. It is acceptable to make marks at known locations on the specimen as reference points only
after testing is completed and before the specimen is removed from the specimen positioner.

NOTE It is usually possible to use one or more large damage spots as reference points, rather than potentially
contaminating the surface of the specimen. This is preferable if there is any likelihood of having to make further tests on the
specimen.

6.4 Procedure

A number of test sites are positioned into the beam and irradiated at different energy densities or power densities.
From this data, the damage threshold can be determined. Test a minimum of 10 sites for each energy-density or
power-density increment. The range of pulse energies or beam powers employed shall be sufficiently broad to
include points of zero damage frequency, as well as points of 100 % damage probability.

7 Evaluation
Damage threshold data are obtained by the damage-probability method. Expose a minimum of ten sites to one
pulse energy (or beam power) and record the fraction of sites which are damaged. Repeat this procedure for other
pulse energies or beam powers to develop a plot of damage probability versus energy or power. An example is
shown in Figure 2. Linear extrapolation of the damage probability data to zero damage probability yields the
threshold energy. Convert the threshold value to the appropriate threshold energy density Hth or threshold power
density Eth as described in 6.2.6.3.

Figure 2 — Diagram for the determination of the damage threshold from experimental data
(damage to KBr windows, 50 pieces, Æ 40 mm, BMFT 315-5691 ATT 2249 A/8)

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ISO 11254-1:2000(E)

In the case of a laser system with a high pulse-to-pulse energy variation, it is permissible to expose the specimen
to arbitrary pulse energies and to sort the data with respect to appropriate energy intervals after the experiment. A
minimum of ten sites shall be tested within one energy interval.

NOTE For an efficient measurement procedure with maximum accuracy for a given number of sites, an appropriate
example is described in annex B.

8 Accuracy
Prepare a calibration error budget to determine the overall measurement accuracy. Variations in the total energy or
beam power, spatial profile, and temporal profile shall be included in the error budget.

An example for Group 3 lasers is given in Table 5. Similar formats are appropriate for other laser groups.

Table 5 — Error budget for a Group 3 laser-damage testing facility

Random variations:

Pulse-to-pulse energy stability 3%

Pulse-to-pulse spatial profile stability 5%

Pulse-to-pulse temporal profile stability 5%

Systematic variations:

Calorimeter calibration 3%

Calorimeter-energy monitor correlation 2%

Overall energy density measurement reproducibility  5,8 %

Overall energy density measurement uncertainty  6,8 %

Overall power density measurement reproducibility  7,7 %

Overall power density measurement uncertainty  8,5 %

9 Test report

To guarantee a reliable in-process documentation, each specimen tested is assigned a unique run number, which
accompanies it through the test process from initial receipt to submission of the final report. All pertinent information
pertaining to test station configurations, source calibration, cleaning, microscopic inspections, exposure
parameters, raw data and reduced test results shall be traceable to this run number. This data shall be retained by
the test laboratory as a primary permanent reference.

For the purpose of documentation and presentation of measured data, the test report shall include the following
information.

a) Information on the testing institute

1) name and address of the testing institute;

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 ISO 11254-1:2000(E)

2) date of testing;

3) name of the operator.

b) Information on the specimen

1) type of the specimen (part or witness);

2) manufacturer of the specimen;

3) specifications of the manufacturer for storage, cleaning, and preconditioning;

4) specifications of the manufacturer for normal use (wavelength, pulse duration, polarization, angle of
incidence, purpose);

5) part identification number, date of production.

c) Information on the test (test specifications)

1) test equipment used including focussing system and beam f-number;

2) laser parameters according to 6.2.6.3 a) to h);

3) diagrams of the spatial and temporal profile of the laser beam;

4) error budget (see Table 5);

5) arrangement of the testing sites on the specimen;

6) damage detection method;

7) methods for storage, cleaning and preconditioning;

8) test environment.

d) Information on the result

1) Nomarski micrograph of a typical damaged testing site; a pulse energy or beam power in the range
between 20 % and 80 % damage probability shall be chosen;

2) diagram according to clause 7;

3) result of the test, given as Hth or Eth or Fth;

4) total number of sites for the test, NTS.

It is recommended that a test report containing the test specifications and the test results be written and supplied to
the customer. An example is given in annex A.

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ISO 11254-1:2000(E)

Annex A
(informative)

Test report example

Laser-induced Damage Threshold, 1-on-1 test

(ISO 11254-1)
Testing Institute

Testing Institute: Xaa Xaaaaa Xaaaaaaaa xaa XX Xaaaa XXXX-XXXX Xaaaaa XX (Xaa. Xaa. Xaaaaaa)

Tester/Date X. Xaaaaaaaa / 1994-02-28

Specimen

Type of Specimen: original part, HR at 1064 nm on BK7 glass

Manufacturer: Xaa Xaaaaa XaaAXaaaaa xaa XX Xaaaa XXXX-XXXX Xaaaaa XX (Xaa. Xaa. Xaaaaaa)

Storage, Cleaning: No special requirements

Specification: Highly reflective mirror, R > 99,5 % at 1064 nm, 0 rad angle of incidence, standard coating
for normal use

Part identification:

Date of production: Coating Run #1187 of 1993-05-31

Test Specification

Pulsed Nd:YAG-laser consisting of an electro-optically Q-switched oscillator and an optically isolated amplifier
stage. Single transversal and longitudinal mode operation. Focussing by a biconvex lens with a beam f-number of
300.

Laser parameters:

Wavelength 1064 nm

Angle of incidence 0 rad

Polarization state linear

Minimum time between two shots 5s

Effective beam diameter in target plane 0,34 mm

Pulse duration 12 ns (Group 2)

Effective pulse duration 12,7 ns

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 ISO 11254-1:2000(E)

Error budget:

a) random variations:

pulse-to-pulse energy stability 3%

pulse-to-pulse spatial profile stability 5%

pulse-to-pulse temporal profile stability 8%

b) systematic variations:

calorimeter calibration 5%

calorimeter-energy monitor correlation 2%

overall energy density measurement reproducibility  12,2 %

overall energy density measurement uncertainty  10,4 %

Test procedure:

Number of shots per specimen: 25

Arrangement of test sites: 5  5 matrix

Minimum distance between sites: 3 mm

Number of specimens tested: 5

Total number of sites for the test: 125

Damage detection: on-line scatter measurement, on-line image processor

Storage of the specimen: manufacturer box, normal room conditions

Test environment: clean filtered air

Cleaning: dust off with dry nitrogen

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ISO 11254-1:2000(E)

Test Result

Damage Probability Plot (13 EU 0077, EU 226)

Damage threshold 15,1 J

Nomarski micrograph for Nomarski micrograph for

an energy density of 19 J/cm2 an energy density of 30 J/cm2

Comment: Damage induced by inclusions in the coating. Contribution of absorption-induced damage for higher
energy density levels.

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 ISO 11254-1:2000(E)

Annex B
(informative)

Example of a measurement procedure

B.1 General
This annex describes an example of a measurement procedure (J. W. Arenberg). The basic structure of the
procedure consists of three steps.

In the first initialization step, the fundamental parameters of the test are calculated or defined. The initialization may
also include a binary search routine for an estimation of the actual damage threshold and for a determination of the
energy density intervals for testing. In the initialization procedure, the fundamental test parameters are specified on
the basis of the intended application and information available from former tests of samples of similar design and
materials.

In the second step, the optic is interrogated and the data collected.

In the final step, the data collected is analysed and an estimate of the damage threshold and its uncertainty are
calculated.

B.2 Initialization of the measurement procedure

B.2.1 Total number of test sites, ntotal

From the area Aoptic of the sample available for the damage test, the beam diameter dT,eff and the separation of
test sites in terms of laser spot size dsep, the total number ntotal of test sites can be determined. If a rectangular
array of test sites is assumed, the total number of sites is determined by:

4 Aoptic
ntotal = (B.1)
(dsep dT,eff )2

In case of an arrangement of the test sites according to a hexagonal close-packed (HCP) structure, a factor of 2/
has to be introduced in equation (B.1):

8 Aoptic
ntotal = (B.2)
3 (dsep dT,eff )2

In this HCP-arrangement, all next-neighbour test sites are dsep  dT,eff apart. As minimum conditions for the damage
frequency method, the value of ntotal should exceed 75 shots, and dsep should range between 1,25 and 5 for a
beam with a Gaussian spatial distribution.

B.2.2 nsteps, Probability resolution, Pres , Number of damage sites, nsites

Figure B.1 is used to determine the values of the probability resolution, Pres and the number of sites to be damaged
per fluence level, nsites, for a given value of ntotal. For a given value of ntotal, the range of possible values of Pres and
nsites can be seen by following the contour for the value of ntotal from left to right. For a sufficiently large value of
ntotal there is a large number of possible values for Pres and nsites allowing a great flexibility in the design of the test.
For smaller values of ntotal, the choices in design are more limited.

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ISO 11254-1:2000(E)

If there is history or suspicion of a tail of low probability, then the tester should opt for the smallest acceptable value
of Pres. This will ensure, to the extent possible, that such a low probability tail is seen by the interrogation protocol.
If there is no history or concern over a low probability tail, then preferred selection would be for the largest value of
nsites possible. The choice of a large value of nsites leads to the most precise determination of the damage-
probability allowed-for area available to test [see equation (B.5)].

After the selection of Pres, Figure B.2 is used to determine the number of fluence levels used in the test, nsteps. The
curve in Figure B.2 is directly read to determine nsteps, the number of fluence steps.

EXAMPLE Selection of nsites and Pres.

Consider a test with 200 sites. The nsites contour for 200 allows for values of nsites from 1 to 5 and corresponding values of Pres
from approximately 0,06 to 0,15. If there is concern over a low probability tail, then the lower values of Pres, which allows for
more fluence levels to be interrogated, is recommended. If this concern is not present, then a higher value for Pres is the
preferred choice, because of increased precision in measuring of the damage probability.

B.2.3 Top and bottom energy density levels, Htop and Hbottom

The top and bottom energy density levels, Htop and Hbottom, can be estimated by historical data available from
previous damage tests on comparable specimens. The value Htop corresponds to an energy density value with
approximately 60 % damage probability. The value for Hbottom is near, but above, the estimated threshold. If
historical data are not available, the values Htop and Hbottom can be determined by a binary search routine, which is
performed on the actual test area. A minimum number of 15 test sites should be used for this binary search routine.
For large test areas with ntotal >150, it is permissible to employ a fraction of 0,1 ntotal sites for this initial binary
search.

B.2.4 Resolution of energy density, @H

The energy density resolution is defined by

H top  Hbottom
@H
(B.3)
nsteps

where nsteps has been determined in step B.2.2.

B.3 Testing routine

The algorithm for the irradiation sequence of the specimen is illustrated in Figure B.3. The initial energy density
D
level H1 is Htop. After interrogation of the first site, the state of damage is detected and recorded. The variables n i
ND
and n i are counting variables for the number of sites damaged and not damaged, respectively, at the selected
th
energy density level Hi. Irradiation of the sample at the i level continues until at least 12 sites have been
D ND
interrogated and n i = nsites or n i = 3/Pres without observation of a single damage site. When the irradiation is
th
complete at the i level and nsites sites have been damaged, the energy density level is decreased by the
decrement H. If 3/Pres shots at Hi are taken without observation of a single damage site, the energy density level
for the next value of i is increased by the increment 0,5 H and H for each level thereafter. This procedure is
repeated until the test area is exhausted.

B.4 Evaluation of the test

The final step of the algorithm consists of an evaluation procedure of the data stored during the test routine, as
discussed below.

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 ISO 11254-1:2000(E)

For the determination of the damage threshold and the uncertainty in the result of the test, a linear extrapolation of
the measured damage probabilities is performed. For each energy density level Hi the observed damage
probability Pi is calculated by the equation:

niD
Pi
(B.4)
niD  niND
D ND D
where n i + n i is the total number of sites exposed to achieve n i damaged sites. The uncertainty for each point i
in the data set is estimated using:

R| nND

i
S
| niD (niD  niND )
  2F when nD  0

||
(B.5)

T  2F when nD
0

where AF is the fractional uncertainty in the measured energy density.

The slope, m, and intercept, b, of the weighted linear fit to the measured damage probability curve is calculated
using:

LMF 1 I F P H I _ F H I F P I OP
MNGH å  JK GH å  JK GH å  JK GH å  JK PQ
1 i i i i
m= (B.6)

i
2
i i
2
i i
2
i i
2
i

where

F 1 IF H I _ F H I

= Gå
2

H  JK GH å  JK GH å  JK
2
i i
2 2 2
(B.7)
i i i i i i

and

LMF Hi2 I F Pi I _ F Hi I F Pi Hi I OP
MNGH åi  2i JK GH åi  i2 JK GH åi  i2 JK GH åi  i2 JK PQ
1
b= (B.8)

The damage threshold is determined by the expression:

b
H TH = _ (B.9)
m

The calculated threshold should be both positive and less than or equal to the lowest observed energy density
causing damage. If the value of HTH is not positive, the reported threshold should be given as the lowest observed
energy density causing damage. Further, if any additional test sites are available, a binary search for the threshold
should be conducted with highest energy density in this search being the lowest energy density corresponding to
damage seen in the measurement.

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ISO 11254-1:2000(E)

The uncertainty in the threshold is determined using:

1
I Th
b 2I 2m  m 2I 2b (B.10)
m2

where

1 H2

b =
 å
i2 (B.11)
i

and

1 1

m =
 å
2 (B.12)
i

The lower limit of the estimated threshold HTh – ITh should be positive and less than or equal to the lowest
observed energy density causing damage. If either of these conditions is not fulfilled for the lower limit, then it
should be replaced with 0.

Figure B.1 — Contour plot of ntotal

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 ISO 11254-1:2000(E)

Figure B.2 — Plot of Pres versus nsteps

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ISO 11254-1:2000(E)

Figure B.3 — Test flow

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 ISO 11254-1:2000(E)

Annex C
(informative)

Units and scaling of laser-induced damage thresholds

C.1 General
It is the purpose of this annex to inform the user of potential dangers in scaling results of a damage threshold
measurement when applied to different conditions.

Excluding environmental conditions, damage is a function of material properties and the laser parameters, in
particular wavelength, spot size and irradiation duration. Scaling broadly falls into three groups, depending on the
component properties.

For pulsed laser irradiation in insulators, the laser-induced damage threshold correlates with dielectric breakdown.
The laser-induced damage thresholds in this case are usually reported in units of watts per square centimetre
2
(W/cm ). Where dielectric breakdown is the dominant mechanism, there are four regimes in which the scaling laws
with respect to pulse duration are different. In this case, a statement of laser-induced damage threshold shall
specifically state wavelength, spot size and pulse duration.

For absorbing and semi-transmitting materials and coatings, where the laser pulses are short with respect to the
thermal diffusion time, the laser-induced damage threshold is driven by the energy density level, units of joules per
2
square centimetre (J/cm ). For those materials subjected to longer pulses, there is significant flow of heat out of the
vicinity of the laser spot; the key parameter is peak power, which is expressed in watts (W).

For very long pulses or cw-operation, for all materials, the LIDT is thermally dominated, and scales with linear
power density, whose units are watts per centimetre (W/cm).

C.2 Example of incorrect scaling

This clause describes the pitfalls of an incorrect scaling and the potential dangers therein. This specific case deals
with a mirror made of beryllium (Be-mirror). With a spot diameter of 0,33 mm, the maximum safe operating power is
determined to be 56 W. If this result is scaled using the power density as a variable to a beam size of 5 mm
diameter, the safe operating power is calculated to be 12,76 kW. When the LIDT is scaled in terms of the linear
power density, the safe operating power is calculated to be 0,85 kW. The estimate of safe operating power
obtained by scaling in power density is 15 times greater than the estimate derived from scaling in linear power
density. If the Be-mirror were to be exposed to a laser with a spot diameter of 5 mm and 12,76 kW it would surely
melt, causing an extreme safety problem.

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ISO 11254-1:2000(E)

Bibliography

[1] ISO 11146:1999, Lasers and laser-related equipment — Test methods for laser beam parameters — Beam
widths, divergence angle and beam propagation factor.

[2] ISO 11254-2:—1), Lasers and laser-related equipment — Test methods for laser-induced damage threshold
of optical surfaces — Part 2: S-on-1 test.

[3] ISO 11554:1998, Optics and optical instruments — Lasers and laser-related equipment — Test methods for
laser beam power, energy and temporal characteristics.

Damage in laser glass

[4] ASTM STM STP 469 (1969)

Damage in laser materials

[5] NBS SP 341 (1970) [National Bureau of Standards Special Publication]

[6] NBS SP 356 (1971)

Laser-induced damage in optical materials

[7] Proceedings of the Boulder Damage Symposium,

[8] NBS SP 372 (1972)

[9] NBS SP 387 (1973)

[10] NBS SP 414 (1974)

[11] NBS SP 435 (1975)

[12] NBS SP 462 (1976)

[13] NBS SP 509 (1977)

[14] NBS SP 541 (1978)

[15] Index of Papers 1969 - 1978 (1979)

[16] NBS SP 568 (1979)

[17] NBS SP 620 (1981)

[18] NBS SP 638 (1983)

[19] NBS SP 669 (1984)

[20] NBS SP 688 (1985)

[21] NBS SP 727 (1986)

1) To be published.

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 ISO 11254-1:2000(E)

[22] NBS SP 746 (1987)

[23] SPIE Vol. 2428 (1995) [Society of Photo-optical Instrumentation Engineers]

[24] SPIE Vol. 2714 (1995)

[25] SPIE Vol. 2966 (1996)

[26] SPIE Vol. 3244 (1997)

[27] SPIE Vol. 3578 (to be published)

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ISO 11254-1:2000(E)

ICS 31.260
Price based on 23 pages

© ISO 2000 – All rights reserved