A-81053E-314 01 Aging PDF
A-81053E-314 01 Aging PDF
A-81053E-314 01 Aging PDF
1. Outline
In the maintenance work of mirror cleaning and mirror replacement, it is necessary to make
a mirror alignment by reasonable procedure after performance of enough aging. There are
some cases to be not able to make an accurate mirror alignment after lacking performance of
aging.
It has been necessary to perform aging by pulse power command a long time for enough
aging. This time, we developed the new aging procedure “High power aging” to perform
enough and reliable aging at the almost same time of conventional procedure.
Procedure of “High power aging” comprises the repetition of internal discharge by rated
power command, laser gas exchange, and aging by pulse power command. This document
describes the detail of procedure of “High power aging”.
After mirror cleaning or mirror replacement, be sure to perform the “High power aging”, and
afterwards make a mirror alignment. If aging after maintenance except for mirror cleaning
and replacement is necessary, perform the “High power aging” for enough aging.
2. Purpose
We found that below laser troubles occurred after cavity mirror maintenance and alignment
with only conventional aging (by pulse power command).
“Shifting the beam mode at cold state or hot state”,
“Laser power down”,
“Power calibration coefficient increasing”
We know that no enough aging before a mirror alignment causes these laser troubles. It is
possible to make a mirror alignment after enough aging that perform aging by rated power
command after aging by pulse power command. Conventional aging (by pulse power
command) do not warrant to perform enough aging, it is not actualized the trouble in the field
maintenance. We confirm the enough aging by performing aging by rated power command
after performing aging by pulse power command.
Be sure to perform the “High power aging” for enough aging before a mirror alignment in
order to keep performance and quality of FANUC laser.
3. Application
3-1. Apply the High power aging to the following oscillator models.
1kW Laser 2kW Laser 4kW Laser 5kW Laser 6kW Laser
C1000-E C2000-C C4000-A C5000-E C6000-B
C1000i–A C2000-E C4000-E C5000i-A C6000-E
Model C1000i-C C2000i-A C4000i-A C6000i-A
C2000i-B C4000i-B C6000i-B
C2000i-C C4000i-C C6000i-C
Note 1) Do not apply to C6000-A and other old models except models above.
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The aging procedure
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1kW Laser 2kW Laser 4kW Laser 5kW Laser 6kW Laser
Power 700W 1500W 2000W 2000W 4000W
Frequency 100Hz 100Hz 100Hz 100Hz 100Hz
Duty 50% 50% 50% 50% 30%
Note.1) Refer to the chapter 6 (See following table) for the specific procedure of the High power
aging. It is described about procedure of maintenance, aging condition, intervals, and times.
Section No. Section name Page No.
6-1 Aging for cleaning, replacement of cavity mirrors Page 5
6-2 Aging for cleaning or replacement of all cavity mirrors one time Page 6
6-3 Aging for installation or after a long storage Page 6, 7
6-4 Aging for overhaul or replacement of Turbo Blower Page 7
6-5 Aging for replacement of discharge tubes Page 8
6-6 Aging after opening vacuum chamber of oscillator at the failure Page 9
Note.2) Refer to the chapter 7 (Page 10,11) for how to perform the High power aging by
automatic aging function.
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The aging procedure
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1kW Laser 2kW Laser 4kW Laser 5kW Laser 6kW Laser
Power 1000W 2000W 4000W 5000W 6000W
Frequency 100Hz 100Hz 100Hz 100Hz 100Hz
Duty 100% 100% 100% 100% 100%
Note.1) Refer to the chapter 6 (See following table) for the specific procedure of the High power
aging. It is described about procedure of maintenance, aging condition, intervals, and times.
Section No. Section name Page No.
6-1 Aging for cleaning, replacement of cavity mirrors Page 5
6-2 Aging for cleaning or replacement of all cavity mirrors one time Page 6
6-3 Aging for installation or after a long storage Page 6, 7
6-4 Aging for overhaul or replacement of Turbo Blower Page 7
6-5 Aging for replacement of discharge tubes Page 8
6-6 Aging after opening vacuum chamber of oscillator at the failure Page 9
Note.2) Refer to the chapter 7 (Page 10,11) for how to perform the High power aging by
automatic aging function.
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Table 5-2 Folding mirrors for peaking at the installation and all mirror cleaning and replacement
1kW Laser 2kW Laser 4kW Laser 5kW Laser 6kW Laser
Mirror for Folding Folding Folding Folding Folding
peaking mirror mirror mirror mirror mirrors
(FM3) (FM1) (FM4) (FM4) (FM1 and FM4)
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6-1. Aging for cleaning, replacement of cavity mirrors (According to the Maintenance Manual)
Perform the “High power aging”, interval time, times, at the aging in the following procedure
for the cleaning or replacement of cavity mirrors for periodical maintenance.
Cleaning or replacement of
Condition, interval, and times of aging
FM (2 or 3 pieces) 1. Pulse power command 5 minutes, 5 times
2. Temp. alignment (Peaking by one FM)
3. Rated power command 3 minutes, 5 times
Leakage check, Aging, Alignment 4. Normal alignment (Peaking by one FM)
Cleaning or replacement of
FM (2 or 4 pieces) Condition, interval, and times of aging
1. Pulse power command 5 minutes, 5 times
2. Temp. alignment (Peaking by 1 or 2 FM)
3. Rated power command 3 minutes, 5 times
Leakage check, Aging, Alignment 4. Normal alignment (Peaking by 1 or 2 FM)
Close the openings of mirror holder with masking tape to prevent to enter the air or
contamination while mirror cleaning and replacement.
It is not necessary to clean all folding mirrors at the periodic maintenance.
Select to rotate folding mirrors to clean for recommended cleaning interval to decrease
working time and cleaning interval.
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If you cannot perform aging from the day before of making an alignment, perform the
following “High power aging”, intervals and times the work day. You can stop the aging
by rated power command after performing aging 4 hours.
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6-4-2 Aging for two days work both Turbo Blower overhaul and cavity mirror cleaning.
Perform the “High power aging” that following contents for Turbo Blower overhaul or
replacement. You can stop the aging by pulse power command after performing aging 8
hours. After that, clean or replacement of cavity mirror after the aging by pulse power
command.
Refer to the Chapter 4 for the detail of 1 and
3 following.
Turbo Blower Overhaul or replacement Condition, interval, and times of aging
1. Pulse power command 15 minutes, 30 times
(Over 8 hours)
Leakage check, Aging 3. Rated power command 3 minutes, 5 times
At the case of section [6-1]
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6-5-2 Aging for two days work both replacement of all discharge tubes and mirror cleaning or
replacement
Perform the aging that following contents for replacement of all discharge tubes at the
failure or periodic maintenance. You can stop the aging by pulse power command after
performing aging 8 hours. After that, clean or replace the cavity mirrors after the aging
by pulse power command.
Refer to the Chapter 4 for the detail of 1
and 3 following.
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6-6-2 Aging for one-day work for replacement of heat exchanger at the water leakage failure
Perform the aging that following contents for replacement of heat exchanger at the
water leakage failure. You can stop the aging by rated power command after performing
aging 4 hours.
We will recommend performing the section [6-6-1]. You have to perform this work plan,
explain this risk to the MTB and customer enough, in addition to perform carefully.
Refer to the Chapter 4 for the detail of 1 and 3 following.
Condition, interval, and times of aging
1. Pulse power command 5 minutes, 5 times
3. Rated power command 7 minutes, 30 times (Over 4 hours)
Note) There is serious risk to break discharge tubes because water will vaporize
suddenly when discharge tubes are discharged by high input power at the water
remained in the vacuum chamber of oscillator.
When there is problem at the oscillator like the discharge voltage (RFV) is higher
200V compared with voltage of data sheet or laser power that is over 500W at the
1kW laser model or over 1000W at other laser model is dropped in regard to
power command. If it is necessary to perform aging, perform conventional aging
by pulse power command. After that, if discharge voltage and laser power meets
standards, perform the “High power aging”. Do not shorten the time of aging by
rated power command.
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(2). Next, change the following parameter of aging condition in the table.
Parameter No.15326 : Power command for aging
Parameter No.15327 : Frequency command for aging
Parameter No.15328 : Duty command for aging
Parameter No.15329 : Internal discharge time for aging
Parameter No.15330 : Gas pressure for aging
1kW Laser 2kW Laser 4kW Laser 5kW Laser 6kW Laser
Power (No.15326) 700W 1500W 2000W 2000W 4000W
(3). Start the oscillator to the state (LRDY) of discharge preparation completion.
(4). Input the aging number in the following parameter, turn on the discharge start signal
[HVON], start the aging by pulse power command.
Parameter No.15334 = Specified number: Number of aging operations
(5). Turn on the discharge start signal [HVON] from 0 to 1, then the aging by pulse power
command starts automatically. After aging by pulse power command, the oscillator goes to
the state (LSTR) of oscillation preparation completion.
(2). After a temporary alignment, turn off the oscillator at the state (PURGE) .
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1kW Laser 2kW Laser 4kW Laser 5kW Laser 6kW Laser
Power (No.15326) 1000W 2000W 4000W 5000W 6000W
Frequency (No.15327) 100Hz 100Hz 100Hz 100Hz 100Hz
Duty (No.15328) 100% 100% 100% 100% 100%
Time (No.15329) Specified time
Gas press. (No.15330) Original value of parameter No.15242
(2). Turn off the oscillator start signal [RUN] from 1 to 0. At the state (LRDY) of discharge
preparation completion, input the aging number in the following parameter.
Parameter No.15334 = Specified number: Number of aging operations
(3). Turn on the discharge start signal [HVON] from 0 to 1, start the aging by rated power
command. After aging by rated power command end, go to the state (LSTR) of oscillation
preparation completion.
(4). Return the parameter changed at the section 7- -(1),7- -(2), 7- -(1) to original value.
The “High power aging” is end at this.
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