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Zirconia Analyzer

The document provides an overview of Yokogawa's zirconia oxygen analyzer product line including models ZR22G/S, ZR202G/S, ZR402G, and AV550G. It describes the key features and specifications of the products such as the proven zirconia sensor, field replaceable design, explosion proof certifications, measurement ranges, response times, outputs, and communications.

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0% found this document useful (0 votes)
181 views60 pages

Zirconia Analyzer

The document provides an overview of Yokogawa's zirconia oxygen analyzer product line including models ZR22G/S, ZR202G/S, ZR402G, and AV550G. It describes the key features and specifications of the products such as the proven zirconia sensor, field replaceable design, explosion proof certifications, measurement ranges, response times, outputs, and communications.

Uploaded by

audithira
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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Zirconia Oxygen

Analyzer

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
Introduction – Typical Combustion
FUEL RICH (Flue gas condition in the firebox) AIR RICH

(Insufficient Air) Efficiency Extended Life (Excess Air)


• Reduce fuel • Reduce coking
consumption • Prevent formation
- Explosion risk
CO • Increase
throughput
of hotspots - Energy loss
• Tube life - Affect heater life cycle
- Unburned fuel

Emissions Safety
• Reduce Pollutants: • API-556
NOx, CO • Prevent risk of unstable
combustion
• Reduce greenhouse
gases: CO2 • Prevent unnecessary trips
• Detect leakage of fuel
shut-off valve
O2

Stoichiometric air demand

Optimal Excess Oxygen level


% EXCESS AIR
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
1. Yokogawa O2 Analyzer Line-up
OX400

Zirconia

Yokogawa
Para-
O2 magnetic
Analyzer

Laser

TDLS8000
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
2. Selection Flow Chart (1)

Oxygen Analyzer

Application

Semiconductor etc. Combustion control


“ppm” measurement or Process control etc.

OX400

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
2. Selection Flow Chart (2)

Combustion control or Process control etc.

Flammable gas NO
Next page
included?

No ignition source YES

Direct in-situ Sampling

Explosion-proof YES
Required? MG8E
NO

TDLS8000

MG8G
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
2. Selection Flow Chart (3)

ZR Series

Averaging
Measurement? NO

YES

Line averaging Multi point averaging

TDLS8000
AV550G+ZR22
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
AGENDA

1. Zirconia Products Outline


Yokogawa Zirconia O2 analyzer
ZR22G/S
ZR202G/S
ZR402G
AV550G

2. Zirconia Sensor Principle & Structure


3. MS Code
4. Other Equipment
5. Summary

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

Yokogawa Zirconia O2 Analyzer


Long history, since 1970’s
Reliable zirconia sensor
Application; Power plant, steel, chemical, etc.

ZR22G

ZR202G
ZR402G AV550G

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

 Yokogawa Zirconia O2 Analyzer


Long history, since 1970’s
Reliable zirconia sensor

Current
3rd Generation models(2000s)
(1990s) (ZR series)
Multifunction (ZA8C)
2nd Generation
(1980s)
1st Generation Microprocessor-based
(1970s) (ZO21C)
Analog Type (ZO6C)
Same design sensor
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

ZR22G/S Detector (1)


 Proven zirconia sensor
 Long Life, Fast response
 Field replaceable design
 Sensor, Heater
 Ex-proof available (ATEX, FM, CSA, IEC)
 Zone1, Div.1

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

ZR22G/S Detector (2)


ZR22G/S Specification Description
Measurement range 0-5~0-100 %O2
Repeatability ±1%FS 0-5%O2~0-25%O2 range

Linearity ±0.5%FS 0-5%O2~0-25%O2 range

Response time <5 sec 90% response

Sample gas temp. 0~700℃ (1400℃) (ZO21P-H is required)


Pressure compensation type
Sample gas pressure -5~+250kPa ZR22S; -5~5kPa
(No press. Comp.)

Ambient temp. -20~+150℃


Pressure compensation type
Enclosure NEMA4X or Ex-proof type

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

ZR402G Converter (1)


 LCD touch screen operation
 HART communication & configuration
 Auto calibration
 Sensor diagnostics with cell life
 Just as “Guide”
 NEMA4X enclosure
 No Explosion-proof model

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

ZR402G Converter (2)


ZR402G Specification Description
Display range 0.00~100%O2
Display size 320 by 240 dot With touchscreen

Analog output 4-20mA 2-points


Relay output 3+1 (for fail-safe)
Contact input 2 For calibration etc.

Digital communication HART


Ambient temp. -20~55℃
Enclosure NEMA4X
Safety EN, CSA, UL

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

ZR202G/S Integral type (1)


 Local display, Infra-red “push-button” operation
 HART communication & configuration
 Automatic calibration unit can be attached
 Reduces wiring costs
 Ex-proof available (ATEX, FM, CSA, IEC).
 Zone1, Div.1

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

ZR202G/S Integral type (1)


ZR202G/S Specification Description
Analog output 4-20mA 1-point
Relay output 1+1 (for fail-safe)
Contact input 2 For calibration etc.

Digital communication HART


Ambient temp. -20~55℃
Pressure compensation type
Enclosure NEMA4X or Ex-proof type

Safety EN, CSA, UL

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

AV550G Averaging Converter


 Multi channel oxygen analyzer
 8 individual detector outputs and 3 average
outputs
 Large, Color display
 Automatic calibration
 Foundation Fieldbus available

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
1. Zirconia Products Outline

AV550G Detector Features (2)


AV550G Specification Description
Display range 0.00~100%O2
Display size 5.7”, 320 by 240 dot With touchscreen
3-average
Analog output 4-20mA 8-individual

Relay output 4+1 (for fail-safe) + 8-individual output

Contact input 2 For calibration etc.

Digital communication Foundation Fieldbus


Ambient temp. -5~50℃
Enclosure Indoor type
Safety EN, CSA, UL

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
AGENDA

1. Zirconia Products Outline


2. Zirconia Sensor Principle & Structure
Principle of Zirconia O2 Analyzer
Principle of Humidity Analyzer
Detector Structure
3. MS Code
4. Other Equipment
5. Summary

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
2. Zirconia Sensor Principle & Structure

Principle of Zirconia O2 Analyzer (1)


 Sensor structure and principle
E Electromotive force
- + 750℃

O2
O2--
Reference air
O2--

O2
Sample gas

Zirconia Cell Molecularly Bonded Platinum

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
2. Zirconia Sensor Principle & Structure


PX
PA
E; Electromotive force [V]
R; Gas Constant (8.31 J/mol ºK)
T; Absolute Temperature [ºK] ( ºK = 273.15 + ºC )
n; Electrons (= 4)
F; Faraday’s Constant ( 9.64 × 104 coulomb/mol )
Px ; Partial Pressure of O2 on Sample Side of Cell
PA; Partial Pressure of O2 on Reference Side of Cell

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
2. Zirconia Sensor Principle & Structure
Principle of Zirconia O2 Analyzer (2)

100

67mV
75
EMF [mV]

50

25
20.95%

0
0.2 1.0 10 100
O2 [%]
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
2. Zirconia Sensor Principle & Structure
Principle of Humidity Analyzers

H 2O X
Water 79%
H2O Air
100 % N2
100 %
Nitrogen

O2 21%
Y Oxygen

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
2. Zirconia Sensor Principle & Structure
Detector Structure
Contact spring Heater TC (type-K)
Cell output
Cell

Terminal

U-shape pipe

Calibration gas pipe Reference gas pipe Gas connection port

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
AGENDA

1. Zirconia Products Outline


2. Zirconia Sensor Principle & Structure
3. MS Code
Probe length
Wetted Material
Reference Air
Option
4. Other Equipment
5. Summary

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code

ZR22G-①-②-③-④-⑤-⑥-⑦-⑧/⑨
ZR22G Description
① Probe Length Insertion probe length
② Wetted Material Cal gas pipe material can be selected
③ Flange ANSI, DIN, JIS, 14 type available
④ Reference Air 3 types, which is appropriate?
⑤ Gas Thread Gas port thread, NPT(ANSI) or R(ISO)
⑥ Connection box Thread Cable entry thread, NPT or G or M or Pg
⑦ Instruction Manual English or Japanese
⑧ Spare (Always “-A”)
⑨ Options Valve, Filter, Tag etc.

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code

ZR22G-①-②-③-④-⑤-⑥-⑦-⑧/⑨
ZR22G Description
① Probe Length Insertion probe length
② Wetted Material Cal gas pipe material can be selected
③ Flange ANSI, DIN, JIS, 14 type available
④ Reference Air 3 types, which is appropriate?
⑤ Gas Thread Gas port thread, NPT(ANSI) or R(ISO)
⑥ Connection box Thread Cable entry thread, NPT or G or M or Pg
⑦ Instruction Manual English or Japanese
⑧ Spare (Always “-A”)
⑨ Options Valve, Filter, Tag etc.

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code
① Probe length
MS code Length Note
for high temp. (with ZO21P)
-015 0.15m
Flange “-Q” is required
-040 0.4m
・・・

・・・

-200 2.0m
-250 2.5m
-300 3.0m
-360 3.6m
In horizontal installation,
ZO21R Probe protector is
-420 4.2m
required
-480 4.8m
-540 5.4m
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
3. MS-code
ZR22G-①-②-③-④-⑤-⑥-⑦-⑧/⑨
ZR22G Description
① Probe Length Insertion probe length
② Wetted Material Cal gas pipe material can be selected
③ Flange ANSI, DIN, JIS, 14 type available
④ Reference Air 3 types, which is appropriate?
⑤ Gas Thread Gas port thread, NPT(ANSI) or R(ISO)
⑥ Connection box Thread Cable entry thread, NPT or G or M or Pg
⑦ Instruction Manual English or Japanese
⑧ Spare (Always “-A”)
⑨ Options Valve, Filter, Tag etc.

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code
② Wetted Material
Description
MS-code
Main Material Calibration gas pipe
-S Stainless steel Stainless steel
Inconel
-C Stainless steel
(Prevent corrosion, e.g. HCL)

Calibration gas pipe

Condensation
.

| Document Number| October 22, 2019 |


Cal gas inlet
© Yokogawa Electric Corporation
‹#›
3. MS-code

ZR22G-①-②-③-④-⑤-⑥-⑦-⑧/⑨
ZR22G Description
① Probe Length Insertion probe length
② Wetted Material Cal gas pipe material can be selected
③ Flange ANSI, DIN, JIS, 14 type available
④ Reference Air 3 types, which is appropriate?
⑤ Gas Thread Gas port thread, NPT(ANSI) or R(ISO)
⑥ Connection box Thread Cable entry thread, NPT or G or M or Pg
⑦ Instruction Manual English or Japanese
⑧ Spare (Always “-A”)
⑨ Options Valve, Filter, Tag etc.

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code
④ Reference air type
“-C” Natural convection “-E” Instrument Air “-P” Pressure Comp.

Wide gap Small hole Sealing enclosure


Enclosure; IP44 Enclosure; IP44 Enclosure;IP66/NEMA4X
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
3. MS-code

Natural convection type “-C”


 Instrument air is not required
 Measurement is not stable due to humidity
 Instrument air can be connected
 Replacement of ZO21D (Recommend)

Gap

Plug
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
3. MS-code
Instrument air type “-E”
 “Rain proof type”
 Better enclosure protection than natural
convection type
 Can not use as natural convection type

Small hole (Outlet)

Reference air inlet


| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
3. MS-code
Pressure compensation type “-P”
 Sample gas pressure; MAX.250 kPa
 IP66/NEMA4X enclosure
 No fluctuation by sample gas pressure
 Ref. air pressure setting; Inside probe >
Furnace
Return pipe Sealing wall

To furnace

Reference air inlet


| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
3. MS-code
ZR22G-①-②-③-④-⑤-⑥-⑦-⑧/⑨
ZR22G Description
① Probe Length Insertion probe length
② Wetted Material Cal gas pipe material can be selected
③ Flange ANSI, DIN, JIS, 14 type available
④ Reference Air 3 types, which is appropriate?
⑤ Gas Thread Gas port thread, NPT(ANSI) or R(ISO)
⑥ Connection box Thread Cable entry thread, NPT or G or M or Pg
⑦ Instruction Manual English or Japanese
⑧ Spare (Always “-A”)
⑨ Options Valve, Filter, Tag etc.

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code

⑨ Option
Option code Description
/C Inconel bolt and U-shape pipe
/CV Check valve
/SV Stop valve (Needle valve)
/F1 Dust filter
/F2 Dust guard filter
/PT Printed tag plate (Label)
/SCT Stainless steel tag plate

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code

⑨ Option (1)
Option code Description
/C Inconel bolts and U-shape pipe
 Sample gas temperature ≧ 600℃
 Prevent bolts and U-shape pipe seizing

Bolts for fixing


U-shape pipe
the cell (4 pics)

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code
⑨ Option (2) “/SV” or “/CV”
Option Description
code Part name Usage
/SV Stop valve Manual calibration
/CV Check valve Automatic calibration

Stop valve Check valve

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code
Check valve “/CV”
 Enable to conduct Automatic-calibration
 Body; Stainless steel, Piston; FPM
 Supply pressure range; 150〜350kPa
 Setting; Sample gas pressure + 150kPa
 Max. Sample gas pressure; 200kPa

Piston Body

IN OUT

Check valve

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code

⑨ Option (3) “/F1” or “/F2”


Option Description
code Part name Application
Concrete kiln
/F1 Dust filter Recovery boiler etc.
General purpose
/F2 Dust guard protector Dust; 1g/Nm3~
SiC filter Flow

Dust filter Dust guard protector


| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
3. MS-code
⑨ Option (3) “/F1” or “/F2”
Option code
Advantage Disadvantage
Name

/F1 - Corrosive dust -Slow response


- Flammable dust -Clogged
Dust filter (ZO21R prevent it from being clogged)

/F2 - Fast response - Corrosive dust


Dust guard - Unlikely to be clogged - Flammable dust
protector

F1; Needs careful selection


F2; Recommend
Fly Ash filter – coal & Biomass fuel
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
3. MS-code

ZR402G-①-②-③-④/⑤
ZR402G Description
① Converter thread Cable entry thread
② Display Display language
English, German, French, Chinese, Japanese
③ Instruction Manual English, Chinese, Japanese
④ Spare (Always “-A”)
⑤ Option Humidity setting, Hood, Tag, Namur* NE43
* Namur ;
German standard for actuator components

Hood

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
3. MS-code

ZR202G-①-②-③-④-⑤-⑥-⑦-⑧-⑨/⑩
ZR202G Description
① Probe Length Insertion probe length
② Wetted Material Cal gas pipe material can be selected
③ Flange ANSI, DIN, JIS, 14 type available
④ Auto calibration Back pack type Auto calibration unit
⑤ Reference Air 3 types, which is appropriate?
⑥ Gas Thread Gas port thread, NPT(ANSI) or R(ISO)
⑦ Connection box Thread Cable entry thread, NPT or G or M or Pg
⑧ Instruction Manual English or Japanese
⑨ Spare (Always “-A”)
Options Valve, Filter, Tag, Namur NE43 etc.
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
AGENDA

1. Zirconia Products Outline


2. Zirconia Sensor Principle & Structure
3. MS Code
4. Other Equipment
Calibration Equipment (ZO21S, ZA8F, ZR40H)
Detector Equipment (ZO21P-H, ZO21R-L)
5. Summary

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment

1. Calibration equipment
Description
Model
Product name Usage

ZO21S Standard gas unit Manual calibration

ZA8F Flow setting unit Manual calibration

ZR40H Auto calibration unit Automatic calibration

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment

Description
Model
Product name Usage
Manual calibration
ZO21S Standard gas unit
(with ambient air & zero gas)

Air pump
Flow-
supplying
checker
ambient air

Valve Zero gas


cylinder
(6-pack)
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
4. Other Equipment
System configuration using ZO21S
Exception; Pressure compensation type

ZO21S

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment

Description
Model
Product name Usage
Manual calibration
ZA8F Flow setting unit
(with instrument air & zero-gas)

 Poll mount or wall mount


 Rainproof
 Max. pressure; 300kPa
 Sample gas pressure; MAX.250kPa
 With check valve; MAX.150kPa

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment

System configuration using ZA8F

ZA8F

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment
Description
Model
Product name Usage
Automatic calibration
ZR40H Auto calibration unit
(with instrument air & zero-gas)

 Available only ZR402G


 Poll mount or wall mount
 IP67/NEMA4X (except flow meter)
 Max. pressure; 690kPa
 Sample gas pressure; MAX.250kPa
 With check valve; MAX.200kPa

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment
System configuration using ZR40H

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment

1. Detector equipment
Description
Model
Product name Usage
High temperature sample gas
ZO21P-H Probe adapter
(700~1400℃)
- Brace for long probe
ZO21R-L Probe protector - Protector from abrasion of heavy dust
- Protect dust filter from clogging

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment

Description
Model
Product name Usage
High temperature sample gas
ZO21P-H Probe adapter
700~1400℃

Ejector ZR22G
(Option) Length; -015
Flange; -Q

Probe
ZO21P-H
Sample gas Flow

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment
ZO21P-H-①-②-③-④/⑤
Description
ZO21P-H
code Specification usage
① Probe material -A Stainless steel (SUS310S) ~800℃
~1400℃
-B SiC
(Vertical only)
② Probe length - 0.5~1.0, 1.5m -
③ Flange - ANSI, DIN, JIS, JPI -
④ style code *B - -
⑤ Option Ejector /EJ1 Rc1/4 (ISO) Negative
Pressure
⑤ Option Ejector /EJ2 1/4NPT (ANSI) (-0.5~0 kPa)
Tag plate /SCT Stainless steel tag plate -
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
4. Other Equipment
Ejector or valve
Sample gas pressure
~+0.05 kPa
-0.5~ ~+5 kPa
+0.05~ 5 kPa ~
Ejector P.G Valve
Reducer/Connector
Air

Valve

e.g.) + L9852CB (Rc1/4) or


Option; “EJ1 or EJ2”
Option; None G7016XH (1/4NPT)
(including P.G, valve)
+ Reducer
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
4. Other Equipment
Probe materials
Sample gas temperature
~800 ℃ ~1000 ℃ ~1400 ℃

Vertical SUS310S SUS310S SiC


installation ZO21P-H-B-… ZO21P-H-B-… ZO21P-H-A-…

Inconel600
Horizontal SUS310S
installation
ZO21P-H-Z-… N/A
ZO21P-H-B-…
Z; Tokuchu

Probe

Probe
Vertical Horizontal

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
4. Other Equipment
Description
Model Product
Usage
name
- Brace for long probe (>2.0m)
- Protector from abrasion of heavy dust
ZO21R-L Probe protector
(Flow rate >10m/s2)
- Protect dust filter from clogging

Dust Flow

Gravity

Brace Protect
| Document Number| October 22, 2019 |
© Yokogawa Electric Corporation
‹#›
AGENDA

1. Zirconia Products Outline


2. Zirconia Sensor Principle & Structure
3. MS Code
4. Other Equipment
5. Summary

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
5. Summary

Calibration equipment selection


~5
-5~ ~ 150 ~200 ~250
Sample gas pressure
kPa kPa kPa kPa
Needle valve N/A N/A N/A
ZO21S
Manual-cal Check valve N/A N/A N/A N/A

Needle valve N/A


ZA8F
Manual-cal Check valve N/A

ZR40H Needle valve


Auto-cal unit
(For ZR402G) Check valve N/A

ZR20H
Auto-cal unit -
(for ZR202G)

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›
Thank you

| Document Number| October 22, 2019 |


© Yokogawa Electric Corporation
‹#›

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