EE105 - Fall 2015 Microelectronic Devices and Circuits: Prof. Ming C. Wu Wu@eecs - Berkeley.edu 511 Sutardja Dai Hall (SDH)
EE105 - Fall 2015 Microelectronic Devices and Circuits: Prof. Ming C. Wu Wu@eecs - Berkeley.edu 511 Sutardja Dai Hall (SDH)
Prof. Ming C. Wu
[email protected]
511 Sutardja Dai Hall (SDH)
1-1
1-2
1
The First Integrated Circuits - 1958
1-3
Moore’s Law
Memory chip density Microprocessor complexity
versus time versus time
1-4
2
Moore’s Paper in 1965
1-5
1-6
3
Moore’s Argument
1-7
4
7nm Transistors by IBM
1-9
FinFET
• Invented at Berkeley !
• Hisamoto, D.; Wen-Chin
Lee; Kedzierski, J.;
Takeuchi, H.; Asano, K.;
Kuo, C.; Anderson, Erik;
Tsu-Jae King; Bokor, J.;
Chenming Hu,
"FinFET-a self-aligned
double-gate MOSFET
scalable to 20 nm,"
IEEE Transactions on
Electron Devices, 2000
http://www.nytimes.com/
imagepages/2011/05/05/science/
05chip_graphic.html?
action=click&contentCollection=Sci
ence&module=RelatedCoverage&r
egion=Marginalia&pgtype=article
1-10
5
Digital vs Analog
• Analog electrical signals
take on continuous values
1-11
Why Analog?
TX RX
6
Another Example: RF Transceiver
• Analog needs to
provide gain +
filtering with low
noise and distortion
1-13 (Elad Alon)
Sensing
7
Creative Touch Sensors
http://www.ivanpoupyrev.com/projects/touche.php
1-15
sensory
swarm infrastructural internet of things
core
mobile access
Adapted from
Rabaey, ASPDAC, 2008
1-16
8
Sensors in a Phone
Lots of sensors:
• 9DoF motion sensing,
– 3 axis accelerometer
– 3 axis gyroscope
– 3 axis compass
• 3 microphones,
• 2 image sensors,
• ambient light and proximity
sensors,
• archetypal touch screen
sensor.
1-17
Inside iPhone4
Gyroscope
Accelerometer
www.memsjournal.com/2010/12/motion-sensing-in-the-iphone-4-mems-accelerometer.html
1-18
9
Accelerometer in iPhone4
• Made by STMicroelectronics
• ASIC stacked on MEMS
• Wafer level packaging (WLP) for
MEMS
• 2 polysilicon layer surface
micromachining process
(pioneered at Berkeley Sensor
and Actuator Center, BSAC)
• EE 147, Intro to MEMS, covers a
lot more on this
www.memsjournal.com/2010/12/motion-sensing-in-the-iphone-4-mems-accelerometer.html
1-19
Accelerometer in iPhone4
www.memsjournal.com/2010/12/motion-sensing-in-the-iphone-4-mems-accelerometer.html
1-20
10
Differential Capacitive Accelerometer
1-21
x0 x0
C1 = C C2 = C
x 0 + δx x 0 − δx
C1 δx
V0 = −VS + ⋅ 2VS V0 ≈ − VS
C1 + C 2 x0
C1 − C 2 Output voltage is linearly
= VS
C1 + C 2 proportional to the displacement
1-22
11
ADXL Block Diagram – Open Loop
time
1-24
12
What You Will Learn in EE 105
Op Amp Circuit
1-25
1-26
13
Circuit Simulation
1-27
14