22

MEASUREMENT OF SMALL CAPACITANCE VARIATIONS

D.Marioli, E.Sardini, A.Taroni
Dip. Automazione Industriale,
Univ. di Brescia,
1-25060 Brescia (Italy).

Abstract any current. The current raped by Csl is supplied by

Vs.In conclusion the only current that wachthe A node
In this paper a new technique to measure low fquency is that flowing through tbe C, capacitor. This current
aad low level capacitance variations is pmposed. It is befow reaching the Rf -, is deaeased by the If
based on a ‘lock-in detection” circuit with a feedback curreat,that is proportionat to t
k mean value of the C,
loop, containing an integrator and a modulator to capacitor and is supplied by the feedbackcircuit.
zeroing the capacitance mean value. This way let us to In order to obtain a high sensitivity, a high value of the
obtain a good signal to noise ratio and high sensitivity. current flowing through the C, capacitor is required.
Capacitance variations can be in the order of 100 ~m This can be achieved by using a high freclutncy voltage
of the mean value while the frequency of the variations signal.
can be as low as 0.1 Htz Stray capacitances and the
drift due t o ‘ the environmental conditions are
automatically compensated. A brief description of the CX A
I
measurement tecbtuque and the experimental apparatus f
is reported together with a tim set of experimental
results.

Introductions. FIGURE 1: Block scheme reporting the stray

capacitance compensation and the
Capacitive senson are widely used in application such moon value zeroing tec hniquea
as measurement of displaament, pressure, component
coM;entration in multicomponent fluids, density and so
on. ”e applications q u i r e to measure capacitance
in the range of 0.1-30pf with a resolution in the order
of 1 fF [l]. Experimental apparatus.
A capacitance sensor usually has an earthed Screen to
shield the electrode plates from external electrical A functional block diagram of the circuit is reported in
fields. In this way stray capacitances, Csl and Cs2. fig 2. The oscillator is a 10 MHz Wien bridge type with
between the electrodes and the shielding area appear a circuit for the amphmde regolation and stabilization.
and their values are often large compared with the Tbe voltage from the oscillator is fed into tbe C,
capacitance to be measured. Therefore to achieve high capacitor and the Ttsulticg current ( o*Vs*c,+senwt )
resolution and high sensitivity, a stray immune circuit is converted in a voltage signal through the Rfresistor.
con6guration is required [2]. The following stages amplifies the C, signal and
Moreover the changing of the environmental conditions multiplies it with tbe oscillator voltage shifted by a 90
induces capacitance variatiolls, that can be in the same degrees. Tbe last stage, low pass filter, gives a signal
order or greater than the measuring range, nevertheless proportional to the small variation of the C, capacitor.
with frequency fluctuations normally lower than the The feedback circuit composed by an integrator and a
frequency of the signal component. modulator achieves the zeroing mean value function.

The measurement technique. Experimental results.

Figure 1 describes schematically the meawement A lirst set of test, in order to statically characterize the
situations. Vs is the signal generator, C, is the system, has been cooductcd. Tbe results obtained are
capacitance that has to be measured, while Csl and Cs2 reported in fig. 3 and fig. 4.. In both, the output in mV
m the stray capacitances between the electrode and the is reported as a fuoctioa of tbe variations, in ff, from
shield scrten. Because of the virtual gmund, Cs2 has the mean value of the C,capacitor. The variations has
both annature to the same voltage and daes’nt absorb

CH2822-5/90/0000-0022 1601.00 0 1990 IEEE

 23

been obtained by varying tbe relative distance beetween

two annanrre of an electrode plate capacitor.

Conclusions

A system for the measurement of small capacitance

variations has been described. The 6rst set of results let -40 J 1
us to measure small variations, about 10 fF, in tbe -500 - 100 100 300
presence of 10 pF meaa value. We art conducting A % (fF>
FIGURE 3: &aimontd r.rulCI. Voltage output
laboratory activity in order to raise the mean value (up aa a function of tho var#tiona trom tho
to 30 pF) and the resolution (up to 100, perhaps 10, capacitonco moon vako. [ cx- 10pF]
ppm of the mean value). We art-confident to be able to
present these new results to the conference.

References

[l] S.M.Huang, A.L. Stott, R.G. Green, M.S. Beck,

"Electronic trausducers for industrial measurement of
low value capacitances". J. Phys. E: Sci. Inst"., 21
(1988), 242-280.
[2] S.M. Huang, J. Fielden, R.G.Gne4 M.SBeck, "A
new capacitance transducer for industrial applications", -101 . . . . I
-60 -40 -20 0 20 40 60
J. Phys. E.: Sci. Instnun.21 (1988), 251-256.
[3] R.G.Gree4 H.K.Kwan, RJohn, M.S.Beck, "A low
A qJff)
FIGURE 4: Expaimontol reauk. Voltage output
cost solids flowmeter for iodwtnal* use", J. Phys. E.: a8 a function of the variationr from
Sci. Inst"., 11 (1978). 1005-1010. tho capacitancr moan vatur. [Cx- 1opf]
[4] G.Francescbini, D.Marioli, "Measurement technique
of low level and low frequency conductivity
fluctuations", IEEE Trans. Ins".Meas., IM-34
(1983,466-468.
[5] S.M.Huang et al., "A capacitance-based solids
concentration transducer with high immunity to
interference from the electrostatic charge generated in
solidlair two component fluids",Traos. Inst. M. C., 10
(1988),98-102.

FIGURE 2: Block diagram of the circuit,