Micro-Electro-Mechanical Systems (MEMS) and
Nanotechnology
The field of Microelectromechanical Systems/Nanotechnology (MEMS/Nano) studies the integration of
science, engineering, and technology in the length scale of micrometers and nanometers. As partial
preparation for the degrees of Ph.D. and M.S. in the Mechanical and Aerospace Engineering Department,
with a major field in MEMS and Nanotechnology, students should be able to demonstrate mastery of the
subject matter described below.
Summary of Major Field Body of Knowledge:
Students should master the major field body of knowledge covered in the following courses:
MAE M280A (equiv. to EE M250A and BME M250A),
MAE M280L (equiv. to EE M250L and BME M250L),
MAE M280B (equiv. to EE M250B and BME M250B),
MAE M287
and a selection of 2 courses from the following (or other courses if supported by the research advisor and
approved by the field chair in advance):
MAE 231G, 281, M282, 283, 284, 285, C287L.
The written qualifying (preliminary) examination covers the entire major field body of knowledge.
More details concerning the major field body of knowledge can be found in the Syllabus for the Major
Field, on the next page.
Minimum Requirements for Ph.D. Major Field Students:
The student must pass a written examination in the major field and satisfy other program requirements for
the Ph.D. in the MAE Department besides completing all other formal University requirements.
Format of Written Qualifying Examination:
The Ph.D. preliminary exam in the MEMS/Nano Major Field is in both written and oral forms.
Timing of Written Qualifying Examination:
The exam is typically arranged near the end of each academic year. Students are strongly encouraged to
take the exam in the first academic year. If failed, they can take it again in the second academic year from
the time of admission to the Ph.D. program, and may not take the exam more than twice. The details of
the exam will be announced each year, and students need to register for the exam in the department
student affairs office before the announced deadline.
Link to old exams:
http://stdntsvcs.mae.ucla.edu/exam/index.htm
Ph.D. Minor Field Requirements:
Students who select MEMS/Nano as a minor field must pass three courses among the MEMS/Nano
courses listed on the following page with a minimum GPA of 3.33. At least two must be at the graduate
level, and at least one of the two must be from the MEMS/Nano core courses.
Syllabus for the Major Field in MEMS/Nanotechnology
The written qualifying (preliminary) exam tests the mastery of core materials in the MEMS/Nano field as
well as the fundamentals of science and engineering. The specific body of knowledge tested includes
materials from all of the MEMS/Nano core courses, as well as two of the MEMS/Nano specialty courses
listed below.
MEMS/Nano Core Courses:
1. Introduction to Micromachining and MEMS – MAE M280A (equiv. to EE M250A and BME M250A)
Essential technical background for lithography-based micromachining
Photolithography, vacuum systems, etching methods, deposition methods, and
process integration
2. Introduction to Micromachining and MEMS Laboratory – MAE M280L (equiv. to EE M250L and BME
M250L)
Prerequisite: Simultaneous enrollment in MAE M180
Hands-on micromachining experience in UCLA’s Microfabrication Laboratory.
3. MEMS Fabrication — MAE M280B (equiv. to EE M250B and BME M250B)
Prerequisite: MAE M180 and MAE M180L or equivalent, to be approved by the instructor
Background in MEMS fabrication for advanced R&D of MEMS
Surface micromachining and bulk micromachining
Non-lithographical micromachining such as LIGA and laser-assisted processing
Mechanical properties of thin film and residual stress
Process integration and issues of thermal budget
4. Nanoscience and Biotechnology—MAE M287
Basic physical, chemical, and biological principles in nano sciences
Nanoscale materials prepared by various methods
Top-down and bottom-up nano fabrication techniques
Nano characterization
Applications of nano technology on electronics, biology, medicine, energy, environment, etc.
MEMS/Nano Specialty Courses:
5. Microsciences—MAE 281
Issues of being in micrometers and nanometers in science and engineering
Important physical and chemical principles important in MEMS and Nanotechnology
Mechanical properties of materials in microscale
Surface tension and its relevance in MEMS
Single molecule mechanics
Molecular motors
6. Microscopic Energy Transport—MAE 231G
Basics of statistical thermodynamics/quantum mechanics
Microscopic transport theory
Applications to semiconductor electronic/optoelectronic devices
Applications to MEMS/NEMS devices
Applications to nanostructures
Applications to biological systems
7. MEMS Device Physics and Design— MAE M282 (equiv. to EE M252)
Prerequisite: MAE M280A (equiv. to EE M250A) or equivalent
Critical understanding of various transduction principles
Design, production, and characterization of MEMS devices
Sensing (piezoelectric, capacitive, magnetic, etc.)
Actuation (electrostatic, electromagnetic, thermal, piezoelectric, SMA, etc.)
Layout and design rules, Foundry services (MUMPs, MOSIS, SUMMiT, etc.)
8. Experimental Mechanics for Microelectromechanical Systems (MEMS)—MAE M283
Methods, techniques, and philosophies to characterize micro/nano electromagneto-
mechanical systems
Material and mechanical property characterization
Crystallographic and anisotropic properties
Emerging approaches for micro/nano scale characterization
Biomechanical testing techniques
9. Sensors, Actuators, and Signal Processing—MAE284
Principles and performance of micro transducers
Design of experiments
Sensor and actuator spatial/temporal resolution, error analysis, uncertainty
propagation, and data acquisition
Applications of micro transducers for distributed real-time control of systems
10. Interfacial Phenomena—MAE 285
Surface tension, surfactants, and interfacial forces
Interfacial thermodynamics
Interfacial hydrodynamics
Dynamics of the triple line
Applications to wetting, change of phase, foams and emulsions, MEMS, and
biological systems
11. Nanoscale Fabrication, Characterization, and Biodetection Lab— MAE C287L
Prerequisite: MAE M180 and MAE M180L or equivalent, to be approved by the instructor
Basic physical, chemical, and biological principles in nano-areas
Top-down and bottom-up nanofabrication techniques
Nano characterization techniques
Biosensing technology
12. Introduction to Micro/Nano Fluids
Fluid mechanics in macro and micro systems
Sedimentation
Diffusion
Osmotic pressure and equilibrium
Surface phenomena
Attractive van Waals interactions
The electrical double-layer and repulsive double-layer interactions
Electrophoresis and Zeta potential
Non-Newtonian fluid mechanics
Requirements for Ph.D. Major Field Students:
The basic program of study for the Ph.D. degree is built around the MEMS/Nano major field, one minor
field, and three additional courses. There is no formal major field course requirement for the Ph.D.
degree, but students must pass preliminary examination in MEMS/Nano field, which requires for the
mastery of knowledge equivalent to the core courses for the field and specialty courses for the individual
(see below). They should also satisfy the requirement for one minor field and successfully finish the three
additional courses, of which at least two on the graduate level, approved by their faculty advisors.
Qualifying Examination:
After passing the preliminary exam and performing preliminary research on the dissertation topic, the
student is ready to take the qualifying exam. The qualifying exam is in the form of oral presentation, but
each student should prepare a prospectus that introduces the topic and outlines the research plan.
A qualifying exam committee needs to be formed with a composition that conforms to the following rules:
must consist of at least four ladder faculty members (i.e., assistant, associate, or full professors)
three faculty members must be within the department (your advisor is chair of this committee)
one faculty member must be from outside of the department
adjunct faculty members, industrial collaborators, and other non-academic advisors can serve on
the committee as additional non-voting members
Ph.D. Dissertation:
A thesis must be completed under the direction of a faculty advisor. It must be signed by four faculty
members, whose composition follows the following rules:
must consist of at least four ladder faculty members (i.e., assistant, associate, or full professors)
three faculty members must be within the department
one faculty member must be from outside of the department
M.S. Comprehensive Examination:
MAE students in the M.S. comprehensive examination plan can also take the preliminary exam to satisfy
the requirement for a comprehensive exam for an M.S. degree.
