Figure 3.

Fringes for a spherical surface in PSI

mode (monochromatic illumination) are visible
everywhere in the field of view.

Figure 2. The low noise of HDVSI mode allows for the finely detailed measurement of this 3 nm tall grating.

Every measurement begins by PSI mode uses a nearly monochromatic surfaces while still providing good data
evaluating the test sample and then light source to generate interference for those areas on the sample where the
determining the best way to measure fringes, and the surface topography fringe signal is somewhat saturated.
it. Veeco’s optical profilers have is calculated by measuring the shape
traditionally utilized two complementary (position) of the fringes on the sample VSI typically uses a white light source
modes of operation, phase shifting (see figure 3). Only a few frames are and looks at the fringe contrast rather
interferometry (PSI) and vertical collected by the solid-state camera than the shape of the fringes as in
scanning interferometry (VSI). PSI is during the approximately 1 micron PSI. During the VSI measurement the
very precise and is used to measure vertical scan, and the full-field objective moves vertically down the
smooth, continuous surfaces, such as measurement is completed in less than full height range of the sample while
micromirrors, plastic films, and solar 200 milliseconds. The fringes generated collecting frames at the camera frame
cell substrates. VSI can measure a wider represent a topography map of the rate. although the scanner generally
range of surfaces, but with a somewhat sample’s surface from which the shape moves at speeds of about 5 microns
lower level of precision than is possible is then derived. Veeco’s PSI mode is fast, per second, 100 microns-per-second
with PSI. repeatable and highly accurate. scans are possible with reduced vertical
resolution. During a VSI scan each pixel
PSI is used to map optically smooth although less precise than PSI, VSI on the camera sees fringes only when
surface topographies and can achieve allows for the measurement of rough the given point on the sample comes
sub-nanometer vertical resolution surfaces or those with larger height into focus (see figure 4). The position of
better than any other optical method. discontinuities. VSI mode works well maximum fringe contrast is then found
Vertical resolution refers to the point for measuring samples that PSI cannot for each pixel. Because the white light
where measurement data drops into measure effectively, such as integrated source has a short coherence length,
the noise of the system. This mode can circuit boards, paper, fabric or foam. fringes only appear around the best
measure samples as tall as tens of Rough surfaces can be difficult to focus position. For this reason VSI can
microns, but samples with abrupt height measure because only a little light is be considered an array of best-focus
discontinuities greater than about 150 reflected back into the system. However, sensors. VSI is an extremely versatile
nanometers on an otherwise smooth VSI mode is versatile enough to accept mode, for it can measure the full range
surface result in ambiguities that are the high levels of illumination required of most surfaces.
difficult for this method to resolve. to obtain measurements on rough

PaGE 2 Greater Measurement Detail with High-Definition Vertical Scanning Interferometry

 Figure 5. With HDVSI, the sharp features of these
90nm tall cross-hatch bars can be measured
precisely and easily.

PSI and VSI are complementary methods during a VSI scan, both the position of
and which mode to use depends on maximum fringe contrast (VSI) and the
the sample surface. However, the position of the fringes on the sample
advancement of new technologies (PSI) are calculated concurrently and
and the presence of a wider range of independently of each other. The VSI
applications for optical profilers have data provides an approximate surface
challenged the capabilities of both profile, while the PSI information
PSI and VSI. For example, for a MEMS imparts sub-nanometer precision to
device with a smooth surface and the measurement (see figure 5). System
height discontinuities less than 150 features such as Veeco’s reference
nanometers, PSI mode could be used. A signal technology help overcome error
similar surface with step heights larger sources such as scanner nonlinearity
than 150 nanometers would require and mechanical vibration.
VSI mode; however, although VSI could
measure the step height, noise inherent In technical terms, the patent-pending
in VSI limits the vertical resolution to HDVSI mode applies a unique PSI
around 3nm, which is well below PSI quadature-demodulation algorithm
mode’s vertical resolution of 0.1nm. to the fringe data already contained in
For these kinds of surfaces Veeco has the VSI measurement. This procedure
developed a measurement mode that allows the position of the fringes (phase)
combines the accuracy of PSI with the to be calculated independently of the
versatility of VSI. position of maximum fringe contrast.
The VSI data is then combined with
Figure 4. Fringes for spherical surface in VSI and
HDVSI mode (white light illumination) are visible The new HDVSI mode combines the the PSI data to avoid the ambiguities
only very close to the best focus plane for three high vertical resolution of PSI with inherent in PSI-only measurements on
different scan positions: close to the bottom, VSI’s ability to measure discontinuous rough or discontinuous surfaces. The
middle and top of sample.
and rough surfaces. HDVSI further resulting topography map merges the
advances Veeco’s surface mapping sub-nanometer vertical resolution of PSI
technologies in a number of significant with the large vertical scanning range of
ways. From a single set of data acquired VSI (see figure 6).

Greater Measurement Detail with High-Definition Vertical Scanning Interferometry Page 3