HM SERIES

ULTRA-HIGH PURITY,
METAL-DIAPHRAGM VALVES
FOR GAS DELIVERY SYSTEMS

ULTRA CLEAN VALVES

 HM & HMS SERIES
METAL DIAPHRAGM VALVES
The HM & HMS Valve Series includes Metal-Diaphragm, Ultra-
Clean Valves, size 1/4". The HM & HMS Series is suitable for
low and high-pressure applications in multi-port configurations
(2- port, L-port, 3-port, 4-port). The valves can be operated manually
or pneumatically. UCV valves are assembled, inspected, tested
and packaged in a Class 10 Clean Room. Each valve is individually
assembled and submitted to pressure testing, functionality tests
and a helium leak test.

THE UCV HM & HMS SERIES SPECIFICATIONS

MATERIAL SURFACE ROUGHNESS

UCV Series Valves meet the chemical composition and the All wetted parts of the UCV Series Valves have an average surface
mechanical properties of Stainless Steel 316L, according to the roughness (Ra avg) of 5 microinch Ra, and maximum surface
ASTM A276 specification. Chemical Composition: The body material roughness (Ra max) of 10 microinch Ra, complying with ISO 4288.
of the UCV Series complies with SEMI F20 - the sulfur content is
lower or equal to 0.01 percent. HELIUM LEAK TEST
ULTRA CLEAN VALVES

All UCV Series Valves are 100% helium leak tested. Helium-leak
MECHANICAL SIZE - DIMENSIONAL SPECIFICATION tests are performed using a helium-leak detector machine with
UCV Series Valves meet the end-to-end length and overall envelope a sensitivity of 0.1x10-10 atm cc He/sec. The standard leak-rate
and comply with SEMATECH Technology Transfer 96063137-ENG. tests are listed below.
(Lower leak rates are optional on request)
PACKAGING Maximum Helium (He) leak ratings:
HAM-LET standard for packing the UCV Series Valves is a double Inboard leak integrity 3x10-11 atm cc/sec. Complies with SEMI
bag. The inner bag contains ultra-pure nitrogen. F1. Leak across the seat 1x10-9 atm cc/sec. This test is done in
All end fittings, threads and sealing surfaces are protected with accordance with SEMASPEC 90120391B-STD (held for at least
a cap to prevent any damage. 15 seconds).

ELECTROPOLISHED SURFACES - SURFACE FINISH PARTICLES

UCV Valves meet a surface defect level of maximum of 25 for The particles standard for UCV Series Valves is: less than 5 particles/
any location with a maximum average of 15. This test is done in ft^3 for particles 0.1m and 20 particles 0.02 m for static and
accordance with SEMASPEC 90120401-STD. dynamic tests, according to SEMASPEC 90120390-STD.
UCV Valves meet the Chromium Enhancement ratio of chromium-
to-iron ratio of 2:1 and chromium oxide-to-iron oxide ratio of 3:1. MOISTURE TESTING
This test is done in accordance with SEMASPEC 90120403-STD. The standard moisture level is 20 ppbv H20 in Nitrogen baseline
UCV Valves meet the oxide layer depth and surface contamination or less, within 2 hours after 2 ppmv spike for 1 minute at flow
of 20 angstroms after subtraction of the carbon layer. The carbon rate of 1.5 SLM or less, according to SEMASPEC 90120397-STD.
layer is 10 angstroms.
CLEANING
All CNC machined valve parts are cleaned to ensure that they
MAXIMUM SURFACE CONTAMINATIONS are free of emulsion composition and residues involved in the
Element Atomic Percentage machining process.
Carbon 30.0
Sulfur 1.0 RELIABILITY
Phosphorus 2.0 The valves demonstrate a MTTF of more than 1 million cycles for
Silicon 1.5 pneumatic valves and more than 100,000 cycles for manual valves,
Nitrogen 2.0 in accordance with SEMASPEC 90120395-STD and 90120390-STD.

414 ULTRA-CLEAN VALVES

HM SERIES
METAL DIAPHRAGM
MANUAL HANDLE VALVES
The manually operated Ultra-Clean Diaphragm Valves are
for high and low-pressure applications. The HM series
is designed and manufactured per SEMI F-20 material
specifications. The valves include a flexible port design
with butt weld and face-seal end connections.

MATERIALS
Item Part No. Material
No.
1* Body **Stainless steel, 316L Var or Vim/Var(1)
2* Seat **PCTFE,Polyimide
3* Seat Holder **Stainless steel, 316L Var or Vim/Var(1)
4* Diaphragm Co-Cr-Ni Alloy
5 Act. Button Stainless steel, AISI 304, ball AISI 440C
6 Act. Button Holder Stainless steel, ASTM 630 H900

ULTRA CLEAN VALVES

7 Handle & Stem Assembly A6061T6, ASTM 630 H900

*Wetted parts ** Standard material

PANEL MOUNTING 7 7
Each manual valve has an upper panel mounting as well as a
bottom mounting, as a standard.
The upper panel mounting has a stainless steel nut, which
requires a minimum width of 0.04 for panel.
For multi port valves, select the End Connection for each port, 6 6
starting with port A, which is indicated by the sniffer hole in the
body. Continue with the other ports (B,C,D).

Male Face- Butt Weld Swivel Female Swivel Male

Seal Ends Ends Face-Seal Ends Face-Seal Ends

(1) Per SEMI F20-0305

HAM-LET ADVANCED CONTROL TECHNOLOGY 415

 HM SERIES
METAL DIAPHRAGM
MANUAL HANDLE VALVES

UCV SPECIFICATIONS NITROGEN FLOW FOR

LOW-PRESSURE VALVE-CV 0.3
Direct-seal metal-diaphragm valve
Structure
without seal packing
Manually operated
Inlet pressure (psig)
0 28 56 84 112 140
Pressure Vacuum to 300 psi (20 bar)
500 17.1
Temperature: Standard 14 to 140F, -10 to 60C (PCTFE Seat)
= P
14 to 302F, -10 to 150C
Available 122.6 kpa
(*Polyimide Seat)
ULTRA CLEAN VALVES

17.6 psi
Leakage: Inboard Leakage 3x10 atm cc He/sec
-11
400 14.1
across the seat 1x10-9 atm cc He/sec
98.1 kpa
Particle No particle detected above 0.1m. 14.1 psi

Flow Rate (SCFM)

Flow rate (SLPM)
Round handle 3/4 turn 300 73.6 kpa 10.6
Operated
Oval handle 1/4 turn 10.6 psi

Connections Face seal or tube weld 49.0 kpa

7.0 psi
CV value - Low Pressure 0.3 200 7.1
Valve Lift 0.024'', 0.6 mm
24.5 kpa
Direction 2 port straight, 2 port L, 3 port, 4 port 3.5 psi

Surface Finish Ra (Ave)-Standard 5in

100 9.8 kpa 3.5
Surface Finish Ra (Max)-Standard 10in
1.4 psi
*Used with Fluorocarbon FKM O-ring LP-Low pressure

0 0
0 196 392 588 785 981
Round Handle Oval Handle Inlet Pressure (KPAG)

E C

VALVE DIMENSIONS- inch, mm

A B C D E* F G H
Size Connection
in mm in mm in mm in mm in mm in mm in mm in mm
1/4'' Swivel Female Face-Seal 2.78 70.6 0.44 11.0 2.48 63.0 1.14 29.0 0.04 1.00 1.77 45.0 2.68 68.0 1.34 34.0
1/4'' Male Face-Seal 2.30 58.4 0.44 11.0 2.48 63.0 1.14 29.0 0.04 1.00 1.77 45.0 2.68 68.0 1.34 34.0
1/4'' Swivel Male Face-Seal 2.78 70.6 0.44 11.0 2.48 63.0 1.14 29.0 0.04 1.00 1.77 45.0 2.68 68.0 1.34 34.0
1/4'' Butt Weld 1.75 44.4 0.44 11.0 2.48 63.0 1.14 29.0 0.04 1.00 1.77 45.0 2.68 68.0 1.34 34.0

Dimensions are for reference only, and are subject to change. *Minimum height for panel

416 ULTRA-CLEAN VALVES

HM SERIES
METAL DIAPHRAGM
AIR-OPERATED VALVES
The pneumatically operated Ultra-Clean Diaphragm Valve
is for high and low-pressure applications. The HM series
is designed and manufactured per SEMI F-20 material
specifications, and it offers a flexible port design with
butt-weld and face-seal end connections.

UCV SPECIFICATIONS

Direct-seal metal-diaphragm
Structure
valve without seal packing
Pneumatically operated
Pressure Vacuum to 300 psi (20 bar)
Temperature: Standard 14 to 140F, -10 to 60C (PCTFE Seat)
Available 14 to 302F, -10 to 150C (*Polyimide Seat)
Leakage: Inboard Leakage 3x10-11 atm cc He/sec
across the seat 1x10-9 atm cc He/sec 7

ULTRA CLEAN VALVES

Particle No particle detected above 0.1m.
Operated Pneumatic, NC/NO**
Connections Face Seal or Tube Weld 6
CV value - Low Pressure 0.3
Valve Lift 0.6mm (0.024) 5
Direction 2-port straight, 2-port L, 3-port, 4-port
Surface Finish Ra (Ave)-Standard 5in
Surface Finish Ra (Max)-Standard 10in
4
Air Supply 60-90 psig , 4 - 6 bar
Air Connection 1/8'' NPT
*Used with Fluorocarbon FKM O-ring **NC-Normally Closed LP-Low pressure
NO-Normally Open 3

MATERIALS
Item 2
Part No. Material
No.
1* Body **Stainless steel, 316L Var or Vim/Var(1)
2* Seat **PCTFE,Polyimide
1
3* Seat Holder **Stainless steel, 316L Var or Vim/Var(1)
4* Diaphragm Co-Cr-Ni Alloy
5 Act. Button Stainless steel, AISI 304, ball AISI 440C
6 Act. Button Holder Stainless steel, ASTM 630 H900 Butt Weld
7 Actuator Assembly A6061T6 Ends Swivel Female
Face-Seal Ends
*Wetted parts ** Standard material

Male Face- Swivel Male

Seal Ends Face-Seal Ends

(1) Per SEMI F20-0305

HAM-LET ADVANCED CONTROL TECHNOLOGY 417

 HM SERIES
METAL DIAPHRAGM
AIR OPERATED VALVES

VALVE DIMENSIONS - INCH (MM)

A B C D E* F
Size Connection
in mm in mm in mm in mm in mm in mm
1/4'' Swivel Female Face-Seal 2.78 70.6 0.44 11.0 1.16 29.4 1.16 29.4 1.00 25.4 1.40 35.3
1/4'' Male Face-Seal 2.30 58.4 0.44 11.0 1.16 29.4 1.16 29.4 1.00 25.4 1.15 29.2
1/4'' Swivel Male Face-Seal 2.78 70.6 0.44 11.0 1.16 29.4 1.16 29.4 1.00 25.4 1.40 35.3
1/4'' Butt Weld 1.75 44.4 0.44 11.0 1.16 29.4 1.16 29.4 1.00 25.4 0.87 22.2
ULTRA CLEAN VALVES

ACTUATOR DIMENSIONS - INCH (MM) 1/8" NPT

Effective Output
Actuator type I J K
Area Force
Low Pressure 2.86 (72.7) 1.33 (34) 3.29 (83.7) 1.58 in2 550 psig
High Pressure 3.50 (89) 1.57 (40) 3.93 (100) 1.58 in2 550 psig
AO-Position switch 3.78 (96)

STANDARD PANEL MOUNTING FOR

TWO-PORT STRAIGHT VALVE
n Optional, four threaded holes (two as standard).
n All the other valve types
have standard four threaded
holes.
n According to SEMATECH

96063137-ENG.

The M5 threaded mounting holes

will accept 10-32 screws.

10-32 UNF
1/8" O.D.

Top View
Bottom View

* The dimensions apply to pneumatic and manual valves. Dimensions are for reference only, and are subject to change.

418 ULTRA-CLEAN VALVES

ORDERING INFORMATION - HM SERIES

Valve Description Example:

HM 2 1 - 4 V K LR - BW 4 GF 4 - LS

Valve Series Port Designator Body Material Actuation Device End Size

HM - UCV Valves 0, 1, 2, 3, 4, 5 V - SS316L Var or LC - Air Operated N.C. 150 psi 4 - 1/4''
Vim/Var(1) C - Air Operated N.C. 300 psi 6 - 3/8''*
(Bar Stock) LO - Air Operated N.O. 150 psi 8 - 1/2''
Standard O - Air Operated N.O. 300 psi 6mm*
LR - Round Handle 3/4 turn 300 psi* * BW, LL End
connections only
LQ - Oval Handle 1/4 turn 300 psi
* Blue color is a standard
Handle color can be delivered by request.
NC-Normally close, NO- Normally open.

ULTRA CLEAN VALVES

Valve Type Body Size Seat Material End Connection Features

2 - 2-Port Valve 4 - 1/4 K - PCTFE BW - Butt Weld LD - Locking Device

3 - 3-Port Valve S* - Polyimide GF - Swivel female Face-seal** ISLT - LOTO handle
4 - 4-Port Valve K Standard, *Available GM - Swivel male Face-seal** LS - F or limit switch
M - Male Face-seal** indicator on AOP
LL - Let-Lok Valve, contact your
local HAM-LET
** 1/4", 1/2" End connection size only representative

PORT DESIGNATOR - (TOP VIEW)

Valve Port Schematic Valve Port Schematic Valve Port Schematic
Configuration Designator Flow Chart Configuration Designator Flow Chart Configuration Designator Flow Chart
2 Port Valve 3 Port Valve 4 Port Valve
HM2_ 0
HM3_ 0
HM4_ 0

1
1 1
L-Port

2
2 2
L-Port

3 3

(1) Per SEMI F20-0305

HAM-LET ADVANCED CONTROL TECHNOLOGY 419

 HMS SERIES
SURFACE-MOUNT SERIES
The Ultra Clean Valves Series offer a surface mount body
design. The surface mount design complies with SEMI PR 3.1
for 1.125'' C-seal. HMS Series is manufactured according to
UHP specifications of SEMI F-20 with manual and pneumatic
operating mechanisms.

MATERIALS

Item
Part No. Material
No.
1 Body Stainless steel, 316L Var or Vim/Var(1) 4
2 Seat PCTFE,Polyimide
3 Seat Holder Stainless steel, 316L Var or Vim/Var(1)
4 Diaphragm Co-Cr-Ni Alloy 3
Manual A6061T6
5 Actuation Device 2
ULTRA CLEAN VALVES

Pneumatic A6061T6

UCV SPECIFICATIONS 5 5
1
Direct-seal, metal-diaphragm valve
Structure
without seal packing, manually and
pneumatically operated
Pressure Vacuum to 150 psi (10 bar)
Operating Temperature: Standard 14 to140F, -10 to 60C (PCTFE Seat)
Available 14 to 302F, -10 to150C *(Polyimide Seat)
Leakage: Inboard Leakage 3x10-11 atm cc He/sec
across the seat 1x10-9 atm cc He/sec
Particle No particles detected above 0.1m.
CV value 0.3 10-32 UNF
Surface Finish Ra (Ave)-Standard 5in
Actuator Air Supply (Pneumatic) 60-90 psig , 4 - 6 bar 1/8"O.D.
Air Connection (Pneumatic) Thread 10-32 UNF
* Used with Fluorocarbon FKM O-ring for actuation device

ACTUATION DEVICE - MARKING

0.185" (4.7)
Warning! Type x 4
The system designer and user have the sole responsibility for selecting products The dimensions apply to
suitable for their special application requirements, ensuring their safe and trouble- (28.4) pneumatic and manual valves.
free installation, operation, and maintenance. Application details, material Dimensions are for reference
compatibility and product ratings should all be considered for each selected (7.7) only, and are subject to change.
product. Improper selection, installation or use of products can cause property (21.7)
damage or personal injury.

(1) Per SEMI F20-0305

420 ULTRA-CLEAN VALVES

 *
HMSC
COMPACT SURFACE-MOUNT
SERIES
The Ultra Clean Valve Series offer a surface mount body design. The
surface mount design complies with SEMI PR 3.1 for 1.125'' C-seal.
This valve is a low profile body design with an Integral Safety Lockout
Tag-out (ISLT) handle.
(Pat. No. 165393).

MATERIALS

Item
Part No. Material
No.
1 Body Stainless steel, 316L Var or Vim/Var(1)
2 Seat PCTFE,Polyimide
3 Diaphragm Co-Cr-Ni Alloy
Manual A6061T6 4 3
4 Actuation Device
Pneumatic A6061T6

ULTRA CLEAN VALVES

2
UCV SPECIFICATIONS 4
Pressure Vacuum to 150 psi (10 bar)
1
Operating Temperature: Standard 14 to140F, -10 to 60C (PCTFE Seat)
Available 14 to 302F, -10 to150C *(Polyimide Seat)
Leakage: Inboard Leakage 3x10-11 atm cc He/sec
Across the seat 1x10-9 atm cc He/sec
Particle No particles detected above 0.1m. Valve Status
CV value 0.3 indication hole
Surface Finish Ra (Ave)-Standard 5in
Actuator Air Supply (Pneumatic) 60-90 psig , 4 - 6 bar
Air Connection (Pneumatic) Thread 10-32 UNF 10-32 UNF
* Used with Fluorocarbon FKM O-ring for actuation device

1/8"O.D.

ACTUATION DEVICE - MARKING

Warning!
0.173" (4.4)
The system designer and user have the sole responsibility for selecting n The dimensions apply to
Type x 4
products suitable for their special application requirements, ensuring their pneumatic and manual valves.
safe and trouble-free installation, operation, and maintenance. Application (28.4) n Dimensions are for reference
details, material compatibility and product ratings should all be considered for only, and are subject to change.
each selected product. Improper selection, installation or use of products can (7.7)
cause property damage or personal injury. (21.7)

(1) Per SEMI F20-0305

HAM-LET ADVANCED CONTROL TECHNOLOGY 421

 ORDERING INFORMATION - HMS & HMSC

Stage A B
Valve
Description
Example: HM S 30 - 4 V K LQ - LD

Valve Series Body Size Seat Material

S - UCV Surface Mount Valves 4 - 1/4'' K - PCTFE

SC - Compact UCV Surface (Modular 1.125 inch) S* - Polyimide
Mount Valves K Standard, *Available.
ULTRA CLEAN VALVES

Valve Type Body Raw Material Actuation Device Option

20 - Two Port Valve V - SS316L Var or Vim/Var(1) C - Air Operated N.C. 150 psi LD - Locking Device
30 - Three Port Valve Other raw materials are available. LO - Air Operated N.O. 150 psi ISLT - Lotto Device*
LQ - Oval Handle 1/4 turn 150 psi * Standart for HMSC LQ handle
* Actuation for High Temperature with For limit switch indicator on AOP Valve,
Fluorocarbon FKM O-ring contact your local HAM-LET representative
* HMSC is Loto Enabled

ORDERING EXAMPLES

HMS30 - 4VSLQ -LD HMS20 - 4VKC

Valve Type - Stage A 30 Surface Mounted Valve - Three Port 20 Surface Mounted Valve - Two Port
Body Size 4 1/4'' (Modular 1.125 inch) 4 1/4'' (Modular 1.125 inch)
Body Material V SS316L Var or Vim/Var(1) V SS316L Var or Vim/Var(1)
Seat Material S Polyimide K PCTFE
Actuation Device - Stage B LQ Oval Handle 1/4 turn 150 psi C Air Operated N.C. 150 psi
Features LD Locking Device

(1) Per SEMI F20-0305

422 ULTRA-CLEAN VALVES

TWO STAGES FOR ORDERING SURFACE-MOUNT VALVES A B
STAGE A VALVE TYPE
Flow Direction Body View Schematic Flow Chart Flow Direction

HMS(C)20
Two Port

ULTRA CLEAN VALVES

Valve

HMS(C)30
Three Port
Valve

STAGE B ACTUATION DEVICE*

Actuation Actuation Actuation Actuation

Description Description
Type Mode Type Mode

Normally Closed 150 psi Oval Handle 1/4 turn

Normally Opened 150 psi 150 psi with Locking Device
Pneumatic

Manual

C LD

* The Actuation Device for the manual

* Blue Actuation Cap valve does not include: locking device
indicates Normally Closed. or locker unit as standard.
** Red Actuation Cap
indicates Normally Opened.

HAM-LET ADVANCED CONTROL TECHNOLOGY 423

 HMC SERIES
COST EFFICIENT ULTRA CLEAN METAL
DIAPHRAGM VALVE FOR GENERAL PURPOSE
Metal Diaphragm Valves
n Compact design
n Manual 3/4 turn handle and position indicator (open/close), 300 PSI
n Safety clip; Locking device for manual round 3/4 turn handle
n Pneumaticlly actuated, Normally Closed and Normally Open version, 150 PSI
n Electropolished surfaces as standard
n Standard panel mounting

PART NUMBER / DIMENSIONS

A B C D E G
Actuation type End Connection
mm mm mm mm mm mm
Butt Weld 1/4 44.4
Male HTC 1/4 58.4
Air Operated
Let-Lok 1/4 64.7* 56.9 32
NC / NO
Female HTC 1/4 70.6
Swivel Male HTC 1/4 70.6 4
ULTRA CLEAN VALVES

Butt Weld 1/4 44.4

Male HTC 1/4 58.4
Round 3/4
Let-Lok 1/4 64.7* 51.4 45 11 25.4 29.4
Turn Handle
Female HTC 1/4 70.6
Swivel Male HTC 1/4 70.6
Butt Weld 1/4 44.4 3
Male HTC 1/4 58.4
Oval Directional
Let-Lok 1/4 64.7* 68 34
1/4 Turn Handle 2-Way Flow Pattern
Female HTC 1/4 70.6
Swivel Male HTC 1/4 70.6

* LET-LOK configuration length including nuts and ferrules fingers tight

2 1
SPECIFICATIONS
Leak Rates
Size Pressure Temp. Cv
Inboard Across Seat
Vaccum to 3 X10-11 3 X10-9
-10~60C
1/4 300 psi 0.25 Atm cc/sec Atm cc/sec
14~140F
(20.7 bar) Helium Helium

STRUCTURE
Parts Material
1 Body 316L Stainless Steel / SS316L Var or Vim/Var(1)
2 Seat PCTFE
3 Diaphragm Co-Cr-Ni Alloy
4 Handle/Act Aluminum Anodize

ORDERING INFORMATION
Valve HMC 20 4 L K ER M4
Description
Example:

Seat
Valve Type Body Size Body Material Actuation Type End Connection
Material
2 2-port 4 - 1/4 L - St.St. 316L K - PCTFE ER - Round 3/4 turn Handle 300 psi M4 - 1/4 Male Face Seal
A - SS316L Var or EC - Air operated Normally Close 150 psi BW4 - 1/4 Tube Butt-Weld
Vim/Var(1) EO - Air operated Normally Open 150 psi LL4 - 1/4 Let-Lok
EQ - Oval Directional 300 psi GM4 - 1/4 Swivel Male Face Seal
HMC20 is standard. For other configuration contact HAM-LET customer service GF4 - 1/4 Swivel Female Face Seal

The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-
free installation, operation, and maintenance. Application details, material compatibility and product ratings should all be considered for each selected product.
Improper selection, installation or use of products can cause property damage or personal injury.
(1) Per SEMI F20-0305

424 ULTRA-CLEAN VALVES

2LN SERIES (HYBRID(
AIR OPERATED, MANUAL OVERRIDE
Metal Diaphragm Valves
Surface-mount models from the Ultra Clean Valve specifications are ready for SEMI PR 3.1, 1.125" C seal
connections. These valves implement Cv 0.3 for their compact designs.

VALVE DIMENSIONS - INCH (MM)

Part End A B C D E F G H J
Size
Number/ep Connection in mm in mm in mm in mm in mm in mm in mm in mm in mm
2LNS4C-CM2-HB 1/4" 1.125" 0.89 22.8 4.4 111.0 0.25 6.6 1.12 28.4 0.30 7.75 0.50 12.7 0.19 5 0.85 21.74 0.17 4.4

1/8"O.D.
SPECIFICATIONS
Leak Rates
Size Pressure Temp. Cv
Inboard Across Seat
10-32 UNF

ULTRA CLEAN VALVES

3 X 10-12 3 X 10-10
1MPa -10
1/4 0.3 Pa l m3/sec Pa l m3/sec
(150 psi) 600c
Helium Helium

STRUCTURE
Parts Material
1 Body 316L Stainless Steel
2 Seat PCTFE/PI (Polyimide) 4

3 Diaphragm Co-Cr-Ni Alloy

4 Handle/Act Aluminum

View of B-B (Disabled Position)

1 3 2
View of B-B (Enabled Position)

ORDERING INFORMATION

2LNS4C-CM2-HB
The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-
free installation, operation, and maintenance. Application details, material compatibility and product ratings should all be considered for each selected product.
Improper selection, installation or use of products can cause property damage or personal injury.

HAM-LET ADVANCED CONTROL TECHNOLOGY 425

 HD SERIES
ECONOMIC DIAPHRAGM VALVES
The HD series of manual and pneumatically operated diaphragm valves provides
a cost effective solution for low pressure applications up to 300 psi (20 bar).
This unique diaphragm valve series was specifically designed to meet the
pressure, finish and cleanliness requirements of Photo Voltaic panels and LED
manufacturing as well as several Semiconductor applications.
The HD20 valve series is the latest addition to HAM-LET high quality and
economic solutions.

HD20 SERIES SPECIFICATIONS

ULTRA CLEAN VALVES

Structure Direct-seal metal-diaphragm valve manually & pneumatic operated

Pressure: Manual Aluminum round handle turn 300 psi (20bar)
Air Operated 150psi (10bar)
Air Operated 300psi (20bar)
Temperature 14 to 140F, -10 to 60C (PCTFE Seat)
Leakage: Inboard Leakage Less Than 3x10-11 atm cc He/sec
Across the seat Less Than 1x10-9 atm cc He/sec
End Connections Swivel Female Face-Seal, Male Face Seal, Swivel Male Face Seal, Buttweld, Let-Lok
Cv value 0.3 (for high flow available Cv = 0.42)
Direction 2 port straight
Surface Finish Ra (Ave)-Standard 10in, No Electro Polish

AOP 150 psi AOP 300 psi

426 ULTRA-CLEAN VALVES

 AOP 300 psi AOP 150 psi
D
STANDARD CONFIGURATION DIMENSIONS: 1/8 NPT
D
10-32 UNF

Round Handle 1/8 O.D.

D
C
C

0.98 ( 25.0mm)
C
1.18 (30.0)

B B B
A A A
1.16 (29.4mm)

ULTRA CLEAN VALVES

A B C D
End Connections Description
mm inch mm inch mm inch mm inch
Swivel Female Face-Seal HD20-4LKR-GF4 46.8 1.84 38 1.5
HD20-4LKLC-GF4 70.6 2.78 72.2 2.84 28.2 1.11
HD20-4LKC-GF4 90 3.54 34 1.34
Swivel Male Face-Seal HD20-4LKR-GM4 46.8 1.84 38 1.5
HD20-4LKLC-GM4 70.6 2.78 72.2 2.84 28.2 1.11
HD20-4LKC-GM4 90 3.54 34 1.34
Male Face-Seal HD20-4LKR-M4 46.8 1.84 38 1.5
HD20-4LKLC-M4 58 2.28 11 0.43 72.2 2.84 28.2 1.11
HD20-4LKC-M4 90 3.54 34 1.34
Buttweld HD20-4LKR-BW4 46.8 1.84 38 1.5
HD20-4LKLC-BW4 44.4 1.75 72.2 2.84 28.2 1.11
HD20-4LKC-BW4 90 3.54 34 1.34
Let-Lok HD20-4LKR-LL4 46.8 1.84 38 1.5
HD20-4LKLC-LL4 64.7 2.55 72.2 2.84 28.2 1.11
HD20-4LKC-LL4 90 3.54 34 1.34

ORDERING INFORMATION HD SERIES

HD 20 - 4 L K R - LL 4 - LS

Valve Series Valve Type Body Material Actuation Device End Size

HD Series 20 - 2-Port Valve L - 316L Stainless LC - Air Operated N.C.150 psi 4 - 1/4
Steel C - Air Operated N.C.300 psi 6 MM*
R - Round Handle 1/4 turn 300 psi * BW, LL End
connections only

* Port Designator NC- Normally Closed

according to HAM-LET
Catalog

Body Size* Seat Material End Connection Optional

4 - 1/4 K - PCTFE BW - Butt Weld LS* - Limit Switch

GF - Swivel Female Face-Seal HF** - High Flow
GM - Swivel Male Face-Seal * Contact your local HAM-LET
*Note: Body size is 1/4
M - Male Face-Seal representative
for all end sizes ** Limited for GF, GM, M End connections
LL - Let-Lok

HAM-LET ADVANCED CONTROL TECHNOLOGY 427

 HP SERIES
HIGH PRESSURE DIAPHRAGM VALVES

HP20 SERIES SPECIFICATIONS

Structure Direct-seal metal-diaphragm valve manually & pneumatic operated

Pressure Vacuum to 3060 psi (210 bar)
Temperature 14 to 104F, -10 to 60C (PCTFE Seat)
Leakage: Inboard Leakage Less Than 3x10-11 atm cc He/sec
Across the seat Less Than 1x10-9 atm cc He/sec
Operated Manual : Lever 1/4 turn
Pneumatic : NC/NO
End Connections Swivel Female Face-Seal, Male Face Seal, Swivel Male Face Seal, Buttweld, Let-Lok
ULTRA CLEAN VALVES

CV Value 0.27
Direction 2 port straight, 2 port L, 3 port, 4 port
Surface Finish Ra (Ave)-Standard 5in
Air Supply 60-90 psig, 4-6 bar
Air Connection BSPT 1/8 (NPT 1/8" as an option)

D
STANDARD CONFIGURATION DIMENSIONS: 1/8 BSPT

MANUAL HANDLE & PNEUMATIC, NC/NO

Bottom H
Four mounting holes, M5 X 0.8 thread, 0.25
G
(6.5mm) deep, M5x0.8 holes
are compatible with 10-32 mounting screws.
E

1.16 (29.4mm)

M5 x4 C
F

1 (25.4mm) B B
A A

A B C D E F G H
End
Description
Connections mm mm mm mm mm mm mm mm
( inch) ( inch) ( inch) ( inch) ( inch) ( inch) ( inch) ( inch)
HP20-4VKHL-GF4
Swivel Female 70.6
HP20-4VKHC-GF4
Face-Seal (2.78)
HP20-4VKHO-GF4
HP20-4VKHL-M4
Male 58.4
HP20-4VKHC-M4
Face-Seal (2.3)
HP20-4VKHO-M4 11 67.2 40 90 29.2 46.5 63.5
HP20-4VKHL-GM4 (0.43) (2.65) (1.57) (3.54) (1.15) (1.83) (2.5)
Swivel Male 70.6
HP20-4VKHC-GM4
Face-Seal (2.78)
HP20-4VKHO-GM4
HP-20-4VKHL-BW4
44.4
Buttweld HP20-4VKHC-BW4
(1.75)
HP20-4VKHO-BW4

428 ULTRA-CLEAN VALVES

ORDERING INFORMATION HP SERIES
Valve Description Example:

HP 2 1 4 V K HL BW 4 GF 4 LS

Valve Series Port Designator* Body Material Actuation Device End Size

UCV Valves 0, 1, 2, 3, 4, 5 V- SS316L Var or HL - Blue Lever Handle 4 - 1/4

High Pressure Vim/Var(1) HC - Air Operated N.C. 3060 psi 6 - 3/8*
* Port Designator (Bar Stock)
per HM Series in the HO - Air Operated N.O. 3060 psi 8 - 1/2
catalog NC-Normally Closed, NO-Normally Open 6 mm*
10 mm*
12 mm*
* BW, LL End

ULTRA CLEAN VALVES

connections only

Valve Type Body Size* Seat Material End Connection Features

2 - 2-Port Valve 4 - 1/4 K - PCTFE BW - Butt Weld For limit switch

3 - 3-Port Valve GF - Swivel Female Face-Seal** indicator on AOP
4 - 4-Port Valve GM - Swivel Male Face-Seal** Valve, contact your
*Note: Body size is 1/4 local HAM-LET
M - Male Face-Seal**
for all end sizes representative
LL - Let-Lok
** 1/4", 1/2" End connection size only

PORT DESIGNATOR - (TOP VIEW)

Valve Port Schematic Valve Port Schematic Valve Port Schematic

Configuration Designator Flow Chart Configuration Designator Flow Chart Configuration Designator Flow Chart
2 Port Valve 3 Port Valve 4 Port Valve
HP2_ 0
HP3_ 0
HP4_ 0

1
1 1
L-Port

2
2 2
L-Port

3 3

(1) Per SEMI F20-0305 UCV HM, Rev.06, January 2015

HAM-LET ADVANCED CONTROL TECHNOLOGY 429

ULTRA CLEAN VALVES

430 ULTRA-CLEAN VALVES