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Threshold Voltage Calculation

The threshold voltage of a MOSFET equals the sum of the flatband voltage, twice the bulk potential, and the voltage across the oxide depletion layer charge. The threshold voltage depends on the doping density and is illustrated in a figure showing the threshold voltage of n-type and p-type MOSFETs increasing and decreasing respectively with higher doping densities. Variations in oxide charge will shift both threshold voltage curves up or down depending on the charge being positive or negative.

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Ashish Kumar
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393 views2 pages

Threshold Voltage Calculation

The threshold voltage of a MOSFET equals the sum of the flatband voltage, twice the bulk potential, and the voltage across the oxide depletion layer charge. The threshold voltage depends on the doping density and is illustrated in a figure showing the threshold voltage of n-type and p-type MOSFETs increasing and decreasing respectively with higher doping densities. Variations in oxide charge will shift both threshold voltage curves up or down depending on the charge being positive or negative.

Uploaded by

Ashish Kumar
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© © All Rights Reserved
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7.3.

1 Threshold voltage calculation


The threshold voltage equals the sum of the flatband voltage, twice the bulk potential and the
voltage across the oxide due to the depletion layer charge, or:

(mcc8)
where the flatband voltage, VFB, is given by:

(mcc4)
with

(mcc3)
and

(mcc3a)
The threshold voltage dependence on the doping density is illustrated with the figure below for
both n-type and p-type MOS structures with an aluminum gate metal.

threshol.xls - threshol.gif
Fig.7.3.1 Threshold voltage of n-type (upper curve) and p-type (lower curve) MOSFETs
versus substrate doping density.
The thresholds of both types of devices is slightly negative at low doping densities and differs by
4 times the absolute value of the bulk potential. The threshold of nMOS capacitors increases with
doping while the threshold of pMOS structures decreases with doping in the same way. A

variation of the flatband voltage due to oxide charge will cause both curves to move down if the
charge is positive and up if the charge is negative.

7.3.2 Threshold voltage adjustment

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