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Vacuum System Operation: E Beam 1 Vaccum Operations Evaporator Operation The Log Book

The vacuum systems of ebeams 1 and 2 operate similarly. Each system uses a mechanical pump to reduce pressure to 50 milliTorr, then a cryopump reduces pressure below 1 microTorr. Pressure is measured using thermocouple gauges from atmosphere to 10 milliTorr and an ion gauge for lower pressures. The systems have valves to connect components like the mechanical pump, cryopump, and nitrogen feed for venting. To pump down, the mechanical pump is used first before opening the cryopump valve, and to vent the cryopump valve is closed and nitrogen is admitted.

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34 views2 pages

Vacuum System Operation: E Beam 1 Vaccum Operations Evaporator Operation The Log Book

The vacuum systems of ebeams 1 and 2 operate similarly. Each system uses a mechanical pump to reduce pressure to 50 milliTorr, then a cryopump reduces pressure below 1 microTorr. Pressure is measured using thermocouple gauges from atmosphere to 10 milliTorr and an ion gauge for lower pressures. The systems have valves to connect components like the mechanical pump, cryopump, and nitrogen feed for venting. To pump down, the mechanical pump is used first before opening the cryopump valve, and to vent the cryopump valve is closed and nitrogen is admitted.

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jokerbuddy01
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© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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Next:EBeam1VaccumOperationsUp:EvaporatorOperationPrevious:TheLogBook

VacuumSystemOperation
Thevacuumsystemsofebeams1and2operatethesameway.Eachsystemconsistsofamechanicalpump,a
cryopump,atwothermocouplepressuregauges,aniongaugepressuresensor,andfourvalves.
Themechanicalpumpisusedtoremovemostofthepressurefromtheevaporationchamber(Andto
removemostofthepressurefromthecryopumpduringregeneration).Itshouldnotbeusedtopumpthe
chambertobelow50milliTorr,sinceatthispressurepumpoilwillbackflowintothechamber.
Thecryopumpisusedtopumpthechamberfrom50milliTorrtopressuresbelowonemicroTorr.Itworks
bycondensingchambergassesatliquidheliumtemperatures.Sincethecryopumpdoesnotexhaustthe
gassesitpumps,itmustbeemptied(regenerated)periodically.
Thermocouplepressuregaugesmeasurepressuresbetweenatmosphereandapproximately10milliTorr.
Eachevaporatorhasonethermocouplegaugeintheevaporationchamberandoneinthecryopumpitself.
Thegaugeinthecryopumpisusedonlyduringregenerationwhilethegaugeinthechamberisused
duringnormaloperationoftheevaporator.
Eachevaporatorhasaniongaugeformeasuringextremelylowpressures.Theiongaugeisessentiallya
vacuumtubeconnectedtothechamber.Operatingthegaugeinanoxygencontainingatmosphereathigh
pressuresdamagesit,sotheiongaugeremainsoffuntilthepressurebecomestoolowforthe
thermocouplegaugetomeasure.
The``roughing''valveconnectsthedepositionchamberandthemechanicalpump.
The``Hivac''valveconnectsthedepositionchamberandthecryopump.
The``vent''valveconnectsthedepositionschambertoanitrogenfeed.
The``fore''valveconnectsthemechanicalpumpdirectlytothecryopump(Thisisusedonlyforcryopump
regeneration)
Totakethechamberfromatmosphericpressuretovacuumthefollowingstepstakeplace:
1.Thechamberisclosed
2.Allvalvesareclosedexceptthe``roughing''valve,whichisopened.
3.Overthecourseofabout5minutes,themechanicalpumpevacuatesthechambertobetween100and50
milliTorr(asmeasuredbythethermocouplegauge).
4.The``roughing''valveisclosedandthe``Hivac''valveisopened.
5.Thecryopumppumpsthechambertobelow10milliTorr.
6.Theiongaugeisturnedon.
Itmaytakeseveralhoursforthechambertoreachanacceptablepressureforevaporation(

).

Totakethechamberfromhighvacuumtoatmosphere,thefollowingstepstakeplace:
1.Theiongaugeisturnedoff.
2.The``Hivac''valveisclosed.
3.The``vent''valveisopened.
4.Overthecourseofabout5minutes,thechamberfillswithnitrogenandcomestoatmosphericpressure.

Subsections
EBeam1VaccumOperations
EBeam2VaccumOperations
EBeam2pumpdownprocedure
EBeam2ventprocedure

Next:EBeam1VaccumOperationsUp:EvaporatorOperationPrevious:TheLogBook
CollinW.Hitchcock20020228

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