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    This appendix discusses estimating the Hansen Solubility Parameters (HSP) of solvent mixtures from solubility data of photoresist materials in various solvents and solvent blends. It provides background on the photoresist materials tested, the solvents used in testing, and an analysis of solubility test results for one of the photoresists.

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    This appendix discusses estimating the Hansen Solubility Parameters (HSP) of solvent mixtures from solubility data of photoresist materials in various solvents and solvent blends. It provides background on the photoresist materials tested, the solvents used in testing, and an analysis of solubility test results for one of the photoresists.

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    This appendix discusses estimating the Hansen Solubility Parameters (HSP) of solvent mixtures from solubility data of photoresist materials in various solvents and solvent blends. It provides background on the photoresist materials tested, the solvents used in testing, and an analysis of solubility test results for one of the photoresists.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    22 views1 page

    Pages From 589

    Uploaded by

    palanaruva
    This appendix discusses estimating the Hansen Solubility Parameters (HSP) of solvent mixtures from solubility data of photoresist materials in various solvents and solvent blends. It provides background on the photoresist materials tested, the solvents used in testing, and an analysis of solubility test results for one of the photoresists.

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    of 1

    Appendix

    C4

    Estimation of HSP from Solvent Mixtures

    Box C4-1 Abbreviations and Names of Solvents used in Appendix C4

    ID

    CAS

    Name

    ID

    CAS

    Name

    ID

    CAS

    Name

    AC

    67-64-1

    Acetone

    EG

    107-21-1

    Ethylene
    Glycol

    NMP

    872-50-4

    N-Methyl-2Pyrrolidone

    BA

    100-51-6

    Benzyl Alcohol

    EHA

    103-11-7

    2-Ethyl Hexyl
    Acrylate

    NP

    108-03-2

    1-Nitropropane

    CAP

    105-60-2

    Caprolactone
    (Epsilon)

    H2O

    7732-18-5

    Water (with
    Organic
    Liquids)

    PC

    108-32-7

    Propylene
    Carbonate

    CHexanone

    108-94-1

    Cyclohexanone

    HFC

    13849542-8

    HFC-4310mee +
    38%
    TRANS DCE

    PGME

    107-98-2

    Propylene Glycol
    Methyl Ether

    MC

    75-09-2

    Methylene
    Chloride

    HFE

    16370207-6

    HFE-7100

    TCE

    79-01-6

    Trichloroethylene
    (TCE)

    DMSO

    67-68-5

    Dimethyl
    Sulfoxide

    MIBK

    108-10-1

    Methyl
    Isobutyl
    Ketone

    Texanol

    25265-77-4

    Texanol

    EA

    141-78-6

    Ethyl Acetate

    NEP

    2687-91-4

    1-ethyl-2Pyrrolidinone

    THF

    109-99-9

    Tetrahydrofuran

    THFA

    97-99-4

    Tetrahydrofurfuryl
    alcohol

    analysis can aid in understanding whether aws in scale-up


    are related to aws in the matrix of experimental steady-state
    solubility data, or in transport operations4 which control
    dynamic migration/diffusion of solvents into the material
    being dissolved.
    HSP are thermodynamic properties. They represent and
    describe equilibria. If the experimental solubility data
    describing the dissolution of a soil by solvents are true
    equilibrium data, and not partially complete dynamic nonequilibrium results, the solubility results and solubility
    characteristics of the soil should be well described by the
    analysis method below. If not, then successful scale-up may
    be at risk because the solubility experiments didnt produce
    equilibrium data5.

    Transport operations are, by denition, non-equilibrium events. Most


    commonly, they are diffusion of one solvent into and throughout a soil
    or heat ow from a hot solvent into and throughout a soil.
    5
    This situation is analogous to experimenters measuring vapor-liquid
    equilibrium data from which expensive distillation equipment will be
    designed. They must know if their data represent thermodynamic
    equilibrium, or some intermediate metastable state. So they use
    a thermodynamic relationship known as the Gibbs-Duhem Equation as
    a reference. If the experimental data are consistent with that
    relationship, they are true equilibrium data, and probably useful. If not,
    the data will likely be (and should be) discarded.

    588

    C. PHOTORESIST MATERIALS
    (SOILS)
    Photoresists (PR) are copolymers. Two were studied in
    these testsdidentied as PR1 and PR2. PR1 is a polymethacrylate photoresist with two different ester sidegroups, an adamantane and a lactone. PR2 is a mixed
    polyacrylate-polymethacrylate photoresist, also with adamantane and lactone side-groups.

    D. ANALYSIS OF PR1 CLEANING


    TESTS
    The compositions6, cleaning solubility performance, and
    analysis are shown in Table C4-1 (Box C4-1). A total of 80
    tests were reported for the photoresist noted as PR1.
    Note that this solvent cleaning work was done at room
    temperature with only incidental agitationdtesting not
    6
    Twenty-two solvents were on the ingredient list for formulation of
    solvent blends. Some of these solvents were also used as
    single-component solvents.

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