Vacuum Chambers

Vacuum Chambers
In This Section
13
page(s)
Technical Note . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-2 to 13-3

Pyrex Bell Jars . . . . . . . . . . . . . . . . . . . . . . . . . . .13-4 to 13-5
Cylindrical Chambers . . . . . . . . . . . . . . . . . . . . . .13-6 to 13-9
Bell Jars (304 SS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-6
Service Wells (304 SS) . . . . . . . . . . . . . . . . . . . . . . . . . .13-7
Feedthrough Collars (304 SS) . . . . . . . . . . . . . . . . . . . . .13-8
Endplates . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-9
Spherical Chambers . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-10
Box Chambers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-11
D-Shape Chambers . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-12
Cylindrical Chamber Assemblies . . . . . . . . . . . . . . . . . .13-13
Frames & Hoists . . . . . . . . . . . . . . . . . . . . . . . . .13-14 to 3-17
Carbon Steel Frames . . . . . . . . . . . . . . . . . . .13-14 to 13-15
Extruded Aluminum Frames . . . . . . . . . . . . . . . . . . . . .13-16
Motorized Hoists and Accessories . . . . . . . . . . . . . . . . .13-17
Custom Chambers . . . . . . . . . . . . . . . . . . . . . .13-18 to 13-20
Capabilitites . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-18
Build Your Own Camber . . . . . . . . . . . . . . . . . . . . . . . . .13-19
Quotation Forum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-20
13-1
Technical Notes
Geometries & Characteristics

Vacuum chambers are built in a huge variety of
shapes and sizes, limited only by application,
imagination, and engineering consideration.
Chambers range in volume from less than 1 cc
to the worlds largest vacuum chamber at NASA
Plumbrook, USA which is 100 ft diameter by
122 ft tall (~3.5 x 1010 cc).
The more standard vacuum chamber shapes
include: box, sphere, cylinder, D-shape, and bell jar.
Additional components, used in vacuum chamber
construction, include: endplates, feedthrough collars,
and service wells. All are separately discussed to
illustrates the strengths of the basic shapes/designs.
38" x 37" x 132" I.D.

Rectangular Chamber
Box
The box shape chamber is available in two basic
forms. One, sealed with metal wire and flat copper
gaskets and often called a rectangular chamber, is
designed for UHV applications. The other, called a
box chamber, has one complete side hinged as an
o-ring sealed door and operates at high vacuum.
Since both versions are flat-sided, either thick
walls or extensive bracing is used to withstand
atmospheric pressure.
13
The box chambers door provides easy, fast access

to any part of the internal volume. It is the platformof-choice for any repetitive batch process such as:
coating multiple substrates; product degassing;
evacuation before impregnation, etc. However, its
accessibility also makes it an excellent chamber for
research applications where, for example, deposition
sources, coating materials, and deposition geometry
are frequently changed.
Pyrex Bell Jars
horizontal orientation. Vertical cylinders are often

chosen for thin film deposition research. The interior
is accessed, for changing evaporant or target, by
removing the lid or lifting the whole cylinder off its
baseplate. Some vertical cylinders have secondary
load-lock chambers attached to a side port for
substrate changing.
Horizontal cylinders are often equipped with hinged,
domed, o-ring sealed end-doors the same diameter
as the cylinder.
Bell jars made from Pyrex are inexpensive and

transparent vacuum chambers. Using an L-shape
gasket to seal the bottom edge to a metal baseplate,
they are a good choice for laboratory high vacuum
applications. However, as is obvious, glass is fragile.
To protect personnel (and the chamber) surround the
bell jar with a metal grid guard before applying
vacuum. Although wall thickness is carefully
controlled during manufacture, no two bell jars are
exactly alike.
Endplates
Vacuum Chambers
Spherical
The spherical chamber equipped with CF (ConFlat

style) flanges is a popular choice for applications
requiring radial component placement as in pulse
laser deposition or surface sciences. These
chambers have many ports for particle/radiation
sources or analytical instrumentation directed at the
spheres center or other relevant focal points. With
suitable surface preparation and pumping, such
chambers can reach pressures in the UHV range.
Cylindrical
While cylindrical chambers can be made with metal
wire seals, most are o-ring sealed and, therefore,
appropriate for high vacuum operation. The thin
cylindrical walls resist atmospheric pressure well and
is a commonly used shape, in either vertical or
13-2
Endplates or baseplates (depending on mounting

orientation) are flat metal flanges made to cap
standard pyrex/metal bell jars and cylinders.
Endplates usually have one large flanged port where
the HV pump is attached, plus a number of smaller
ports for feedthroughs and components.
Metal Bell Jars
A metal bell jar is essentially a cylindrical chamber
which has a domed top-plate already welded in
place. With a metal wire seal base flange metal bell
jars can reach the UHV range with suitable surface
preparation and pumping. However, the o-ring
sealed base flange version is very popular for high
vacuum application. It is relatively simple to cool
metal bell jars using an cooling-water trace welded
to the outer surface. Such bell jars are often chosen
for high temperature applications and because
the simple design makes manufacturing easier
and lowers costs.
Service Wells
Service wells, like endplates, act as transition
stages between the pumping stack and the bell
jar or other chamber. The physical distinction is
that service wells are wide-bore tubes, closed
at the bottom, with feedthrough flanges radially
penetrating the tube walls. Because there is
a much larger area for feedthrough ports and
because the ports are not buried beneath the
lowest surface, the service wells primary
advantages are number of feedthroughs
and convenience.
Technical Notes
for high vacuum and UHV. Two problems prevent

the regular use of aluminum for vacuum
chambers: (a) it is more difficult to weld when
vacuum integrity is required and (b) its low
strength means it cannot be used for CF flange
knife-edges without expensive modification.
Feedthrough Collars
This name sometimes misleads, as a
feedthrough collar has no feedthroughs.
Like the service well, it has a number of radial
ports for feedthroughs, but otherwise is simply
a tube with flanges at each end, used as
a transition piece between a bell jar and
an endplate.
D-Shape
The D-shape chamber (when viewed from above)
combines the thin wall of the cylindrical chamber
with the volume and large, o-ring sealed access
door of the box chamber making it appropriate for
high vacuum applications. The door is frequently
aluminum to reduce weight. For many applications,
including substrate rotation during deposition, the
cylindrical rear section of the D creates no serious
dimensional restrictions. The shape is often
chosen for the same applications as the more
traditional box chambers.
Materials
For experiments disturbed by residuel

magnetic fields or radioactive backgrounds,
or which require chamber walls with excellent
thermal or electrical conductivity, weldable
grades of aluminum (typically 6061) are used
Glass is a common chamber material in

educational and some research laboratories.
Many types of glass have low gas permeability
(except for helium) and good vacuum
characteristics. The background radioactivity due
to potassium 40; however, it may be high enough
to preclude it for some uses. Obviously, glass is
more susceptible to damage and less
easily modified by the average machine shop
than metal, but glass bell jars offer the benefits
of low cost, transparency, and simplicity.
When the earths magnetic field interferes
with experiments, the complete chamber is
sometimes made of mu-metal. However,
anecdotal evidence suggest it has strange
properties when used as a vacuum construction
material (see Liners for an alternative solution).
Common materials such as brass are sometimes
used, but not recommended. Less common,
chemically inert materials such as Monel and
Inconel have special applications. Zinc or
cadmium-plated steels or screws should never
be used inside a vacuum chamber. Their
relatively high vapor pressure can cause
operational adventures that are best avoided.
Water Cooling
For applications with high heat outputs, double
chamber walls with channeling and baffles
provide the most effective method of water
cooling to provide a cold wall. For lower heat
outputs, a water trace (a channel welded to the
external chamber surface) is used. The trace
covers a small fraction of the surface but, using
data on heat input and thermal conductance,
the trace pattern is designed for adequate
cooling efficiency. Occasionally, copper tubing
is brazed to the chambers exterior. Although
less expensive, this is never as effective as
the first two methods.
Water-cooled chambers should undergo rigorous
testing procedures to ensure they are free of
leaks. Testing methods include stress-testing all
water cavities with a pressurized gas (typically
dry nitrogen) and helium leak checking all
internal and external welds.
Liners
Two common applications for chamber liners
are: (a) reducing the effects of magnetic fields by
installing multiple mu-metal liners inside the
chamber (often a better solution than a mumetal chamber), and (b) preventing sputtered or
evaporated materials reaching the chamber's
surfaces using aluminum foil or thin (shaped)
stainless liners.
When receiving a Pyrex chamber, immediately

look for shipping damage. Any Pyrex chamber
will have a variety of small imperfections.
We recommend you ignore small surface
scratches and blisters/bubbles (either flattened
and elongated, or tiny spheres), because
they are difficult to avoid in manufacturing
and handling thick glass, and will not
adversely affect vacuum applications.
However, do not ignore cracks, particularly
those causing a distinct dark line more than
an inch long in the bulk of the glass. A crack
suggests shipping damage. If undamaged,
re-pack the glass chamber in its original
box until ready for installation. If you find
damage, please contact us immediately
for further instruction. We will do everything
we can to rectify the situation.
During use, examine the glass chamber
regularly for clouding, cracks, star formations
(caused by point impact), or deep, long
scratches. Clean the external surface using
commercial glass cleaners. If the process
clouds the internal surfaces, seek advice on
the best method to remove the deposit. But
remember, if you are depositing some inert
or hard-coating material on a substrate, it
will form an inert, hard layer on the glass.
Do not compromise the vacuum by using
cleaners that cannot wash away with water
or clean solvent.
13
Vacuum Chambers
The most commonly used material for high

vacuum and UHV chambers is a 300-series
stainless steelmost frequently 304L (carbon
content >0.03%), which is available in sheet,
tube, bar, plate, and forged forms. This steel,
and others such as 316L, has desirable
vacuum chamber properties: mechanically
strong, machinable, weldable; magnetic
permeability close to 1; resistance to
atmospheric corrosion; takes a high polish;
and can be effectively outgassed by baking.
For large space simulation chambers operating
in the HV Torr range, mild steel is a costeffective option. However, its magnetic,
corrosion resistance, and out-gassing
properties make it generally unacceptable.
Inspecting and Using

Pyrex Chambers
Never allow hydrogen fluoride (HFgas

or aqueous solution) near the glass chamber.
It attacks glass, causing it to become opaque.
Never use harsh abrasives, wire brushes,
files, or metal scrapers on the glass surface.
If the glass chamber becomes cracked
or starred, discard it immediately.
13-3
Pyrex Bell Jars
Pyrex Bell Jars

n Open Ended Cylindrical & Domed End Bell Jars
Made from Pyrex to withstand thermal shock and chemical attack
Bottom of bell jar is ground flat to accept an L-gasket for sealing
to our baseplates, feedthrough collars, or service wells
Inexpensive and transparent
Features good high-vacuum properties
Pyrex cylinders in various diameters and lengths
Vacuum Chambers
13

O.D.

O.D.
Tolerance
Pyrex Bell Jar
1
/8
10.25
1
/8
10.25
1
/8
12.5
1
/8
12.5
1
/8
14.25
1
/8
14.25
1
/8
14.25
1
/8
15.375
1
/8
15.375
1
/8
15.375
1
/8

18
1
/8

18
1
/8

18
1
/8

18
1
/8

12
1
/8

12
Pryex Cylinder Open Ended
1
/8
12.5
1
/8
12.5
1
/8
12.5
1
/8

18
1
/8

18
1
/8

18
Nominal
Height
12
18
12
18
12
18
21
18
24
30
12
18
24
30
12
18
12
18
24
12
18
21
Height
Tolerance
Wall
Thickness

Flatness

Part No.
Price
/8
/8
1
/8
1
/8
1
/8
1
/8
1
/8
1
/8
1
/8
1
/8
1
/4
1
/4
1
/4
1
/4
1
/8
1
/8
4.8mm-10mm
4.8mm-10mm
4.8mm-10mm
4.8mm-10mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-10mm
4.8mm-10mm
.007
.007
.007
.007
.007
.007
.007
.010
.010
.010
.010
.010
.010
.010
.007
.007
BJ10X12
BJ10X18
BJ12X12
BJ12X18
BJ14X12
BJ14X18
BJ14X21
BJ15X18
BJ15X24
BJ15X30
BJ18X12
BJ18X18
BJ18X24
BJ18X30
BJ12X12EURO
BJ12X18EURO
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/8
/8
1
/8
1
/4
1
/4
1
/4
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
4.8mm-11mm
.007
.007
.007
.010
.010
.010
CY12X12
CY12X18
CY12X24
CY18X12
CY18X18
CY18X21
Call
Call
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1
1
NOTE: Although carefully controlled during manufacture to ensure a minimum wall of 3/16 and checked under vacuum, glass chambers are individually blown
into molds. No two are exactly alike.
NOTE: For our standard chambers please refer to www.lesker.com for downloadable Adobe PDF 2D Dimensional Drawings, Engineering Files
in DXF (2D), STP (3D) formats, and interactive 3D models which enable users to rotate, zoom, and much more.
13-4
Pyrex Chambers
Pyrex Open Ended Cylindrical &

Domed Bell Jar Guards
Pyrex Bell Jar Guards
Carbon steel and painted
Compatible Chamber Required Hoist Bracket
BJ10X12
HSTLD-12GBKT
BJ10X18
HSTLD-18GBKT
BJ12X12
HSTLD-12GBKT
BJ12X18
HSTLD-18GBKT
BJ14X12
HSTLD-12GBKT
BJ14X18
HSTLD-18GBKT
BJ14X21
HSTLD-21GBKT
BJ15X18
HSTLD-18GBKT
BJ15X24
HSTLD-24GBKT
BJ15X30
HSTLD-30GBKT
BJ18X12
HSTLD-12GBKT
BJ18X18
HSTLD-18GBKT
BJ18X24
HSTLD-24GBKT
BJ18X30
HSTLD-30GBKT
BJ12X12EURO
HSTLD-12GBKT
BJ12X18EURO
HSTLD-18GBKT
CY12X12
HSTLD-12GBKT
CY12X18
HSTLD-18GBKT
CY12X24
HSTLD-24GBKT
CY18X12
HSTLD-12GBKT
CY18X18
HSTLD-18GBKT
CY18X21
HSTLD-21GBKT
Part No.
BG10X12
BG10X18
BG12X12
BG12X18
BG14X12
BG14X18
BG14X21
BG15X18
BG15X24
BG15X30
BG18X12
BG18X18
BG18X24
BG18X30
BG12X12EURO
BG12X18EURO
CG12X12
CG12X18
CG12X24
CG18X12
CG18X18
CG18X21
Price
Call
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NOTE: For our standard chambers please refer to www.lesker.com for downloadable Adobe PDF 2D Dimensional Drawings, Engineering Files in
DXF (2D), STP (3D) formats, and interactive 3D models which enable users to rotate, zoom, and much more.
13
Designed to fit over the outer surface of the pyrex chamber.

Bell Jar Gaskets: Bell jar and cylinder gaskets have an L crosssection. The bell jar sits inside the riser of the L and is sealed by
atmospheric pressure pushing it down into the horizontal surface. The
lower side of the horizontal surface seals against the baseplate. To
make a good seal, many users lubricate the bell jar gaskets with
Apiezon hydrocarbon grease or Dow Corning silicone grease (see
Section 6 for greases).
Bell Jar O.D.

10.25"
12" & 12.5"
14.25"
15.375"
18"
10.25"
12" & 12.5"
14.25"
15.375"
18"
Gasket Material
Buna-N
Buna-N
Buna-N
Buna-N
Buna-N
Viton
Viton
Viton
Viton
Viton
Part No.
LG10B
LG12B
LG14B
LG15B
LG18BP
LG10V
LG12V
LG14V
LG15V
LG18V
Price
Call
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Vacuum Chambers
Pyrex Bell Jar L-Gaskets
NOTE: Because the pyrex chambers rim may have imperfections, many users lubricate the gaskets with either a hydrocarbon or silicone grease.
13-5
Cylindrical Chambers
Bell Jars (304 SS)

Our standard range of bell jars are available in dovetail o-ring grooved and standard
ISO Flange mounting configurations. In conjunction with KJLC standard hoist and
frame, the bell jar can be quickly lifted and moved for easy access to your
equipment. The bell jar is also fully compatible with our line of feedthrough collars,
service wells and end plates.
Standard Features:
Manufactured from 304 stainless steel
6" CF viewport (4" nominal viewing area) kit
supplied for all bell jars (assembly not included)
O-ring sealed chambers are capable of reaching
High Vacuum (HV) Levels
Viton o-ring included (assembly not included)
Lifted Lug on center 1/2-13 UNC thread size
Available Options:
Additional flanged ports
Water coolingtrace and double wall
Extruded aluminum and
Carbon Steel Frame available
Standard hoist options
Dovetail O-Ring Grooved Flange
Vacuum Chambers
13
Constructed from vertical cylinders

with 12", 183/8", 24", and 30" O.D.
Domed at the top and features a dovetailshaped o-ring groove sealing flange
at the bottom
Includes a Viton o-ring for the bottom flange
Chamber O.D.
Ring O.D.
A
B
12.00
16.00
18.38
22.00
18.38
22.00
24.00
28.00
30.00
34.00
With Hoist Bracket Included
12.00
16.00
18.38
22.00
18.38
22.00
24.00
28.00
30.00
34.00
OAH
C
12.00
19.43
28.50
29.50
27.375
# Lifting Lugs
D
1 (center)
1 (center)
1 (center)
1 (center)
1 (center)
Approx.
Weight
54 lbs.
104 lbs.
113 lbs.
184 lbs.
230 lbs.
Part No.
BJ1212SU
BJ1819SU
BJ1829SU
BJ2429SU
BJ3028SU
Price
Call
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12.00
19.43
28.50
29.50
27.375
1 (center)
1 (center)
1 (center)
1 (center)
1 (center)
64 lbs.
114 lbs.
123 lbs.
194 lbs.
240 lbs.
BJ1212SUBKT
BJ1819SUBKT
BJ1829SUBKT
BJ2429SUBKT
BJ3028SUBKT
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ISO Flange
with 12 3/4", 16", and 20" O.D.
Domed at the top and features a standard
ISO flange at the bottom
Chamber O.D.
Ring O.D.
A
B
12.75
14.57 (ISO320-K)
16.00
17.72 (ISO400-K)
20.00
21.65 (ISO500-K)
OAH
C
12.00
16.00
29.50
# Lifting Lugs
D
1 (center)
1 (center)
1 (center)
Approx.
Weight
42 lbs.
63 lbs.
124 lbs.
Part No.
BJ1312SQ
BJ1616SQ
BJ2029SQ
Price
Call
Call
Call
NOTE: Please contact [email protected] with your specific requirements for a customized chamber quotation.
NOTE: For our standard chambers please refer to www.lesker.com for downloadable Adobe
PDF 2D Dimensional Drawings, Engineering Files in DXF (2D), STP (3D) formats, and
interactive 3D models which enable users to rotate, zoom, and much more.
13-6
Service Wells (304 SS)

Our standard range of Service Wells are available in dovetail o-ring grooved and
standard ISO flange configurations. The service well can be used with our line of
Pyrex or Metal Bell Jars feedthrough collars.
Standard Features:
Manufactured from 304 SS

O-ring sealed chambers are capable of reaching High Vacuum (HV) levels
Available Options:
Additional Flanged Ports or replace with KF style ports
G
Water coolingtrace or double wall

Extruded aluminum and Carbon steel frames available
(4X) .56" THROUGH

(FRAME MOUNTING
HOLES)
Mounting Tabs

Standard Features:
Constructed from vertical cylinders with 12", 183/8", 24", and 30" O.D.
A flat surface on one end to accept an o-ring seal
Opposite end to have a flat welded plate
Chamber O.D.
A
Ring O.D.
B
OAH
C
12.00
18.38
18.38
24.00
30.00
16.00
22.00
22.00
28.00
34.00
8.38
8.38
8.5
8.38
8.38
Pump Port
D
E
N/A
8"CF
8"CF
8"CF
8"CF
6"CF
N/A
N/A
N/A
N/A
Port Locations
F
G
Mating Bell Jar
Utility Ports
Approx.
Weight
Part No.
Price
N/A
6.50
6.50
9.00
9.00
Pyrex or Metal
Metal Only
Pyrex or Metal
Pyrex or Metal
Metal Only
(6) x 2.75" CF
(11) x 2.75" CF
(11) x 2.75" CF
(11) x 2.75" CF
(11) x 2.75" CF
95 lbs.
166 lbs.
173 lbs.
257 lbs.
360 lbs.
SW1208SU
SW1808SU
SW1808SUG
SW2408SU
SW3008SU
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N/A
5.25
5.25
6.00
6.00
ISO Flange
Constructed from vertical cylinders with 12 3/4", 16", and 20" O.D.
One end has a standard ISO flange; other end features a blank
plate with a pumping port
Mounting tabs
Chamber O.D.
A
12.75
18.38
18.38
Ring O.D.
B
OAH
C
14.57 (ISO320-K)
22.00
22.00
8.12
8.12
8.09
Pump Port
D
E
N/A
N/A
N/A
6"CF
6"CF
6"CF
Port Locations
F
G
N/A
N/A
N/A
N/A
N/A
N/A
Mating Bell Jar
Utility Ports
Approx.
Weight
Part No.
Price
Metal Only
Metal Only
Metal Only
(6) x 2.75" CF
(6) x 2.75" CF
(6) x 2.75" CF
59 lbs.
80 lbs.
110 lbs.
SW1308SQ
SW1608SQ
SW2008SQ
Call
Call
Call
Vacuum Chambers
13
13-7
Feedthrough Collars (304 SS)

Our Standard range of Feedthrough Collars are available in dovetail o-ring grooved
and standard ISO flange mounting configurations. The Feedthrough Collar can be
used with our line of Pyrex or metal bell jars, Service Wells and Endplates...
Standard Features:
Available Options:
Manufactured from 304 SS
Replace CF ports with KF style ports and/or additional flanged ports
Viton o-ring provided (assembly not included)
Water coolingtrace and double wall
O-ring sealed chambers are capable of reaching High

Vacuum (HV) levels.
Standard framesExtruded aluminum and carbon steel (starting at

starting at page 13-14)
Mounting tabs
Vacuum Chambers
13
with 12", 18 3/8", 24", and 30" O.D.
Dovetailed/o-ring sealed on one end,
and features a flat sealing surface
to accept an o-ring seal on the
other end
Chamber O.D.
A
12.00
18.38
18.38
24.00
30.00
Ring O.D.
B
16.00
22.00
22.00
28.00
34.00
OAH
C
8.00
8.00
8.13
8.00
8.00
Utility Ports
(6) x 2.75" CF
(8) x 2.75" CF
(8) x 2.75" CF
(8) x 2.75" CF
(8) x 2.75" CF
Approx.
Mating Bell Jar Weight
Pryex or Metal 64 lbs.
Metal Only
93 lbs.
Pyrex or Metal 96 lbs.
Pyrex or Metal 128 lbs.
Metal Only
157 lbs.
Part No.
FT1208SU
FT1808SU
FT1808SUG
FT2408SU
FT3008SU
Price
Call
Call
Call
Call
Call
OAH
C
8.00
8.00
8.00
Utility Ports
(6) x 2.75" CF
(6) x 2.75" CF
(6) x 2.75" CF
Mating Bell Jar

Metal Only
Metal Only
Metal Only
Approx.
Weight
34 lbs.
41 lbs.
50 lbs.
Part No.
FT1308SQ
FT1608SQ
FT2008SQ
Price
Call
Call
Call
Includes a Viton o-ring
ISO Flange
with 12 3/4", 16", and 20" O.D.
Standard ISO flanges on both ends
Chamber O.D. Ring O.D.

A
B
12.75
14.57 (ISO320-K)
16.00
17.72 (ISO400-K)
20.00
21.65 (ISO500-K)
13-8
Endplate
Endplates, also known as top plates or baseplates are available in 304 SS

or 6061-T6 Aluminum. Endplates can be used in conjunction with our pyrex
or metal bell jars and feedthrough collars.
Standard Features:
Available Options:
Disc-shaped, 1" thick with a flat sealing

surface to accept a o-ring
or L-gasket seal
Replace CF ports with KF style ports

and/or add additional flanged ports
Water coolingtrace or machine groove

with laser cut cover into plate
Welded bosses for lifting
Mounting tabs
On aluminum baseplates all ports will

be machined profile
Standard framesextruded aluminum

and carbon steel (starting at page 13-14)
Add Dovetail oring grooved to mate to
Servicewell
Ring O.D.
Pump Port
A
B
C
Stainless Steel
16.00
N/A
6"CF
22.00
8"CF
N/A
28.00
8"CF
N/A
30.00
8"CF
N/A
Aluminum
16.00
N/A
QF100-SWK
22.00
QF160-SWK
N/A
28.00
QF160-SWK
N/A
30.00
QF160-SWK
N/A
Port Locations
D
E
Utility Ports
Approx.
Weight
Mating
Bell Jar
Part No.
Price
N/A
5.25
6.00
6.00
N/A
6.50
9.00
9.00
N/A
(3) x 2.75" CF
(3) x 2.75" CF
(3) x 2.75" CF
57 lbs.
108 lbs.
172 lbs.
255 lbs.
Pyrex or Metal
Pyrex or Metal
Pyrex or Metal
Metal Only
BP1200SU
BP1800SU
BP2400SU
BP3000SU
Call
Call
Call
Call
N/A
5.25
6.00
6.00
N/A
6.50
9.00
9.00
N/A
(3) QF40
(3) QF40
(3) QF40
19 lbs.
35 lbs.
58 lbs.
86 lbs.
Pyrex or Metal
Pyrex or Metal
Pyrex or Metal
Pyrex or Metal
BP1200SUA
BP1800SUA
BP2400SUA
BP3000SUA
Call
Call
Call
Call
ISO Flange
Standard Features:
Disc-shaped 304 stainless steel plate using standard ISO flanges
Available Options:
Replace CF ports with KF style port and/or add additional flanged ports
Water coolingtrace
Vacuum Chambers
13
Standard pumping and gauging packages

Standard framescarbon steel and extruded aluminum with or without rackmounting
Ring O.D.
14.57 (ISO320-K)
17.72 (ISO400-K)
21.65 (ISO500-K)
Pump Port
6" CF
6" CF
6" CF
Weight
34 lbs.
49 lbs.
72 lbs.
Mating Bell Jar

Metal only
Metal only
Metal only
Part No.
BP1300SQ
BP1600SQ
BP2000SQ
Price
Call
Call
Call
13-9
Spherical Chambers
Spherical Chambers
Standard Features:
304 stainless steel hemisphere x 3/16" wall
Flanges are CF (knife-edge or ConFlat style), with through-holes
Each ports center-line passes through the spheres center point
Sphere is bakeable to 400 C when fitted with copper-gasketed blank
flanges and pumped
Metal Seal chambers are capable of reaching Ultra High Vacuum
(UHV) levels
Part numbers below ending with EP have electropolish finish inside
and outside
Available Options:
Replace CF port with KF style port and/or add additional
flanged ports
Vacuum Chambers
13
Standard frames extruded aluminum and carbon steel
O.D.
12"
12"
18"
18"
Material
304 SS
304 SS
304 SS
304 SS
Ports
(4) 8.00" CF, (2) 6.00" CF, (1) 4.50" CF, (4) 2.75" CF
(4) 8.00" CF, (2) 6.00" CF, (1) 4.50" CF, (4) 2.75" CF
(6) 8.00" CF, (1) 6.00" CF, (4) 4.50" CF, (8) 2.75" CF
(6) 8.00" CF, (1) 6.00" CF, (4) 4.50" CF, (8) 2.75" CF
Approx.
Weight
52 lbs.
52 lbs.
97 lbs.
97 lbs.
Part No.
SP1200S
SP1200SEP
SP1800S
SP1800SEP
Price
Call
Call
Call
Call
Spherical Chamber Accessories

Approx.
Compatible Frames
Weight
FRMA-S001-A, FRMA-S001-B,
14 lbs.
FRMA-S001-C, FRMC-S001-B, FRMC-S001-D
* Adapter ring required to mount 12" or 18" spherical chambers to standard frames.
Description
Frame Mounting Adapter Ring
O.D.
14"
Material
304 SS
Part No.
SPMGFGS
Price
Call
13-10
Box Chambers
Box Chambers
Standard Features:
304 stainless steel plate with KF utility ports and a 6061 aluminum
hinged door
Aluminum door features a dovetailo-ring groove, and includes a Viton
o-ring and rectangular view port with safety cover (Viton o-ring seal in
center of the door with a viewing area of 31/4" x 51/4")
O-ring sealing box chambers are capable of reaching High Vacuum
(HV) levels
Available Options:
Replace KF port with CF style port and/or add additional flanged ports
13
Water coolingtrace
Standard frames extruded aluminum and carbon steel
Width
12"
12"
16"
24"
24"
30"
36"
I.D.
Depth
12"
12"
16"
24"
24"
30"
36"
Height
12"
24"
16"
24"
30"
30"
48"
Box Sides
304 SS
304 SS
304 SS
304 SS
304 SS
304 SS
304 SS
Box Door
6061 Al
6061 Al
6061 Al
6061 Al
6061 Al
6061 Al
6061 Al
Ports
(1) QF40, (1) QF100-SWK
(2) QF40, (1) QF100-SWK
(2) QF40, (1) QF100-SWK
(2) QF40, (1) QF100-SWK
(4) QF40, (1) QF160-SWK
(4) QF40, (1) QF100-SWK & (1)QF160-SWK
(4) QF40, (1) QF100-SWK & (1)QF320-SWK
Approx.
Weight
172 lbs.
266 lbs.
253 lbs.
670 lbs.
775 lbs.
1471 lbs.
2674 lbs.
Part No.
BX1212S
BX1224S
BX1616S
BX2424S
BX2430S
BX3030S
BX3648S
Price
Call
Call
Call
Call
Call
Call
Call
Vacuum Chambers
NOTE: Frames not included. Standard frames start on page 13-14.
13-11
D-Shape Chambers
D-Shape Chambers
Standard Features:
Constructed from 304 stainless steel and 6061-T6 aluminum
Includes machined configurations into the top and bottom with
aluminum blanking flanges supplied with Viton o-ring and clamps
KF Utility Ports
The aluminum door features a dovetailed o-ring groove and Viton oring seal; rectangular viewport (fluorocarbon o-ring sealed in center of
the door with a viewing area of 31/4" x 51/4")
O-ring sealing D shaped chambers are capable of reaching
pressures in the 10-7 Torr rangeclean, dry, and empty
Available Options:
Replace KF port with CF style port and/or add additional flanged
13
ports
Vacuum Chambers
Water coolingtrace
Replace standard frame with rackmounting frame
Mounting Feet
Customer specific options as needed
I.D.
Width Height Depth
14"
24" 14.69"
18"
22" 18.69"
24"
30" 26.38"
Chamber
304 SS
304 SS
304 SS
Chamber Door
6061 Al
6061 Al
6061 Al
Ports
(1) ISO100-SWK, (1) ISO160-SWK, (2) ISO250-F
(1) ISO100-SWK, (1) ISO160-SWK, Custom o-ring seal
(1) 160-SWK, (1) 250-SWK, Custom o-ring seal
Approx.
Weight
173 lbs.
300 lbs.
670 lbs.
Part No.
DS1424S
DS1822S
DS2430S
Price
Call
Call
Call
13-12
Cylindrical Chamber Assemblies
Our standard range of Horizontal chamber assemblies are available with a welded,
dome end on one side and a hinged, aluminum door on the opposite end. The
chamber assembly can be mated with a standard aluminum frame.
Standard Features:
Available Options:
Chamber body manufactured
Replace QF utility ports with

CF style ports and/or add
additional flanged ports
from 304 Stainless Steel

Chamber door manufactured
from 6061-T6 aluminum
The aluminum door features a
dovetailed o-ring groove, and
includes a Viton o-ring and
Water Trace Cooling available

Standard Frames
Customer specific options
as needed
rectangular viewport with safety

cover (Viton o-ring sealed in
center of the door with a viewing
area of 31/4" x 51/4")
QF utility ports
Mounting feet

Chamber O.D.
18.38"
18.38"
24"
30"
30"
Door O.D.
22"
22"
28"
34"
34"
OAL
24.18
33.19
33.19
33.41
53.41
Ports
(2) QF40, (1) QF160-SWK
(2) QF40, (1) QF160-SWK, (1) QF250-SWK
(2) QF40, (1) QF160-SWK, (1) QF250-SWK
(2) QF40, (1) QF160-SWK, (1) QF250-SWK
(2) QF40, (1) QF160-SWK, (1) QF250-SWK
Approx.
Weight
272 lbs.
301 lbs.
440 lbs.
420 lbs.
522 lbs.
Part No.
CA1821S
CA1830S
CA2430S
CA3030S
CA3050S
Price
Call
Call
Call
Call
Call
Vacuum Chambers
13
13-13
Frames & Hoists
Carbon Steel Frames

Carbon Steel Bay-Style Frames
Pre-engineered frames to accept a variety of standard chambers with ability to add a hoist.
Bay-style frames are fully welded and powder coated in durable gray finish.
Standard Features:
Front 19" rack instrument mounting
Removable side and rear door panels
Stainless steel top work surface
Carbon steel bottom plate deck
Rear bulkhead panels and power distribution
box brackets
Heavy-duty swivel casters and leveling pads
Designed to accept standard KJLC motorized
hoist assemblies
Vacuum Chambers
13
HOIST
LOCATION
10.82
(274)
HOIST
LOCATION
A (MTG BC)
HOIST
LOCATION
18.75
(476)
A (MTG BC)
34.00
(863)
17
(432)
0.56 DIA THRU
B (DIA ACCESS)
0.56 DIA THRU
33.5
(851)
21.63
(549)
FRONT RACK
MOUNTING
41.50
(1054)
1 Bay Style
13-14
18.75
(476)
AUX HOIST
BRACKET
B (DIA ACCESS)
42.00
(1066)
FRONT RACK
MOUNTING
41.5
(1054)
41.50
(1054)
1.5 Bay Style
2 Bay Style
Frames & Hoists
Carbon Steel Frames

Carbon Steel Bay-Style Frame Options
Compatible
Standard
Product
SP1200S
SP1200SEP
SP1800S
SP1800SEP
SP1200S
SP1200SEP
SP1800S
SP1800SEP
BP1200SU
BP1200SUA
SW1208SU
BP1800SU
BP1800SUA
SW1808SU
SW1808SUG
BP1800SU
BP1800SUA
SW1808SU
SW1808SUG
BP1800SU
BP1800SUA
SW1800SU
SW1800SUG
BP2400SU
BP2400SUA
SW2400SU
BP2400SU
BP2400SUA
SW2408SU
BP3000SU
BP3000SUA
SW3008SU
BP3000SU
BP3000SUA
SW3008SU
Dimensions
215/8" W x 34" D x 31" H
A
Mounting
B.C.
10.50" dia.
B
Access
Diameter
8.50" dia.
Hoist
Compatible
No
Part No.
FRMC-S001-B
Price
Call
2 Bay
42" W x 34" D x 411/2" H
10.50" dia.
8.50" dia.
No
FRMC-S001-D
Call
1 Bay
215/8" W x 34" D x 411/2" H
15.00" dia.
14.00" dia.
Yes
FRMC-S010-B
Call
1 Bay
215/8" W x 34" D x 411/2" H
20.50" dia.
18.375" dia.
Yes
FRMC-S011-B
Call
1.5 Bay
311/2" W x 34" D x 411/2" H
20.50" dia.
18.375" dia.
Yes
FRMC-S011-C
Call
2 Bay
42" W x 34" D x 411/2" H
20.50" dia.
18.375" dia.
Yes
FRMC-S011-D
Call
1.5 Bay
311/2" W x 34" D x 411/2" H
26.50" dia.
24.50" dia.
Yes
FRMC-S012-C
Call
2 Bay
42" W x 34" D x 411/2" H
26.50" dia.
24.50" dia.
Yes
FRMC-S012-D
Call
2 Bay
42" W x 34" D x 411/2" H
32.50" dia.
30.50" dia.
Yes
FRMC-S013-D
Call
3 Bay
623/8" W x 34" D x 411/2" H
32.50" dia.
30.50" dia.
Yes
FRMC-S013-F
Call
Bay
Size
1 Bay
NOTE: Please contact [email protected] with your specific requirements for a customized frame quotation.
Standard Features:
Fully welded and powder coated in durable gray finish
Heavy-duty swivel casters and leveling pads
Vacuum Chambers
Carbon Steel A-Frame Style Frames
13
Carbon Steel A-Frame Style Options

Compatible
Standard
Product
BX3648S
CA3030S
CA3050S
Dimensions
56" W x 401/2" D x 22.61" H
54" W x 33" D x 241/2" H
54" W x 33" D x 241/2" H
Part No.
FRMC-S020-A
FRMC-S040-A
FRMC-S041-A
Price
Call
Call
Call
13-15
Frames & Hoists
Extruded Aluminum Frames

Extruded Aluminum Bay-Style Frames
Standard Features:
Constructed of Extruded
Aluminum
Clean Room Compatible
Standard Chamber Mounting

Light weight
Choose the standard base unit from chart below and add available
options. Next, compose the order code as shown, below.
Example Configuration Part No.: FRMA-S001-B-C
Leveling Pads
Base Unit
Bay-Style Aluminum Frames
Extruded Aluminum
Bay-Style Frame
Extruded Aluminum
Upright-Style Frame
Vacuum Chambers
13
Part No. Prefix

FRMA-S001-B
FRMA-S001-C
FRMA-S020-C
FRMA-S021-D
FRMA-S030-C
FRMA-S031-C
FRMA-S032-D
FRMA-S040-C
FRMA-S001-A
Optional Part No.
C
R
T
Upright-Style Aluminum Frames

Options
Casters-swivel with integrated leveling pads
Rack MountingFront and Rear
Top Work SurfaceBonded to a plastic
core 4mm thick
BottomPlastic, electrostatic protected
B
area 16mm thick
Side PanelsLeft and Right Gray Plastic 4mm thick
P
Front and Rear PanelsGray Plastic 4mm thick
Q
Hoists*
H
* Frames are capable to accept a standard KJLC hoist. See hoist options to
select the correct product for your application.
Extruded Aluminum Bay-Style Frames

Compatible
Standard Product
Bay Size
SP1200S
1 Bay
SP1200SEP
SP1800S
SP1800SEP
SP1200S
1.5 Bay
SP1200SEP
SP1800S
SP1800SEP
BX1212S
1.5 Bay
BX1224S
BX1616S
BX2424S
BX2430S
2 Bay
BX3030S
D-Shaped DS1424S
1.5 Bay
D-Shaped DS1822S
1.5 Bay
D-Shaped DS2430S
2 Bay
CA1821S
1.5 Bay
CA1830S
CA2430S
*Additional charges will be added for crating
Dimensions
243/4" W x 35" D x 375/16" H
Available
Options
B, C, P, Q, R, T
Part No.
FRMA-S001-B
Price
Call
373/32" W x 35" D x 375/16" H
B, C, P, Q, R, T
FRMA-S001-C
Call
373/32" W x 35" D x 345/16" H
B, C, P, Q, R, T
FRMA-S020-C
Call
491/2" W x 38" D x 349/16" H
B, C, P, Q, R, T
FRMA-S021-D
Call
371/8" W x 35" D x 3415/16" H

371/8" W x 35" D x 3415/16" H
471/8" W x 393/4" D x 3115/16" H
373/32" W x 38" D x 2715/16" H
B, C, P, Q, R, T
B, C, P, Q, R, T
B, C, P, Q, R, T
B, C, P, Q, R, T
FRMA-S030-C
FRMA-S031-C
FRMA-S032-D
FRMA-S040-C
Call
Call
Call
Call
Dimensions
28" W x 28" D x 36" H
Available
Options
C
Part No.
FRMA-S001-A
Price
Call
Extruded Aluminum Upright-Style Frames

Compatible
Standard Product
Bay Size
SP1200S
Upright Style No Bay
SP1200SEP
SP1800S
SP1800SEP
*Additional charges will be added for crating
NOTE: Please contact [email protected] with your specific requirements for a customized frame quotation.
13-16
Frames & Hoists
Motorized Hoists & Accessories

Motorized Hoists & Accessories
Chamber hoists commonly raise and lower chamber lids or bell
jars to enable access to the internal fittings of vacuum systems.
Motorized hoists safely raise and lower bell jars or chamber top plates, enabling access to the
internal fixturing of vacuum systems. They include vacuum interlocks and have hand-held
pendants for operation. Power input is 115 VAC.
Two different styles of hoists are offered:
Industrial Style Hoist

A rugged, industrial style hoist that comes in a heavy-duty model. With its heavy mounting base
and tall outer column, it can be easily retrofitted to existing framework. Mechanical lower and
upper limit switches can be adjusted to limit stroke.
Telescoping Hoists
The compact telescoping hoist is modular in design. The standard-duty model is ideal for clean
room applications. The light-duty model is suited for glass bell jars and lighter top plates. Fixed
limit switches prevent under- or over-run.
All hoists require a top shaft assembly that connects the component to be raised with the hoist
itself. Most models rotate 360 to offer full, unobtrusive access to the internal fixturing. Light-duty
hoist applications simply raise and lower.
The top shaft assembly is purchased separately, with custom configurations manufactured to fit
your application. Please contact [email protected] for more information.
Type
Industrial Heavy Duty
Standard Duty
Telescoping Standard Duty
Telescoping Light Duty
Mounting Assemblies For HSTLD

Stroke
28"
16"
16"
18"
Rating
900 ft.-lbs.
400 ft.-lbs.
400 ft.-lbs.
100 ft.-lbs.
Load
Part No.
HSTHD
HSTST
HSTSTTE
HSTLD
Price
Call
Call
Call
Call
Description
Part No.
12" High Bell Jar Guard Bracket*
HSTLD-12GBKT
HSTLD-18GBKT
HSTLD-21GBKT
HSTLD-24GBKT
HSTLD-30GBKT
Bell Jar Guard Bracket, HSTLD**
HSTLD-BJGBKT
* HSTLD-XXGBKT Bracket Mates to Bell Jar Guard
** HSTLD-BJGBKT Bracket Mates between HSTLD-XXGBKT
Bracket & HSTLD Hoist
Price
Call
Call
Call
Call
Call
Call
Vacuum Chambers
Hoist Specifications
13
NOTE: Please contact [email protected] with your specific requirements for a customized hoist quotation.
13-17
Custom Chambers
Capabilities
Introduction
The Kurt J. Lesker Company is a leading manufacturer of high and
Geometries:
Surface Finishing Options:
ultra-high (HV & UHV) vacuum chambers. We are recognized
Spherical
#8 Mirror
worldwide for specializing in both R&D and production environments.
Cylindrical
#4 Brush Finish
Box and rectangular
Glass Bead Blasted
large box chambers over 14' long for production coatings, our
Bell jar
#2 B
expansive machine shop at our Pittsburgh, Pennsylvania facility is
D-shape
DA Finish
poised to service any and all of your custom vacuum chamber needs.
Custom
#1 Mill Finish
Materials:
Electropolish
304 and 304L
Surface Ground
316 and 316L
Blanchard Ground
Aluminum (6061)
Water Cooling Options:
Quality:
Double wall and water

trace available
From smaller, spherical chambers several inches in diameter for R&D, to
Large Machining
Capability
Coordinate Measuring
Machine (CMM) inspection
Helium mass spectrometers
with sensitivity to 5 x 10-12 STD
cc/sec
Pressurized and helium leak

checking of water channels
Vacuum Chambers
13
38" x 37" x 132" I.D.

Large Rectangular Chamber
Custom UHV
Chamber
Rectangular UHV Chamber
13-18
Fabrication and
Welding Expertise
Custom Chambers
Build Your Own Chamber
1, 2, 3...
Building a custom chamber is as simple as

with the Kurt J. Lesker Company.
Clarify Your Needs
Submit your sketch, CAD drawing, or process requirements by email

to [email protected]. Our Process Equipment Division will review
your fabrication requirements and specifications to resolve any design
conflicts and provide you with a quotation. Use the Custom Chamber
RFQ (request for quotation) worksheet (next page) for assistance.
Engineering & Design
13
Our design and project engineers work together to design a chamber to

suit your application. During this process, we encourage your input as
Manufacturing
Vacuum Chambers
part of the design team.
Our cutting-edge facilities are equipped to handle the integral

machining, inspection, and cleaning processes with the available
on-site support of our vacuum technicians and engineers to
ensure a quality, timely finished product built to your specifications.
6061 Aluminum Box

Chamber with Hinged Lid
13-19
Custom Chambers
Quotation Form
Port Configuration
Termination
The port will terminate in either a flange or
weldable tube end. For ports terminating in
a flange, specify the flange system, size, and
type using the table below. Note the selection
of a particular flange will limit your Tube O.D.
and Tube Length choices for standard flange
configurations.
Tube O.D.
Specify the port tube O.D. Selection may be
limited by select flange size, where applicable.
Focal Point
Specify the focal point, or target point, for a
particular port using your defined Cartesian
coordinate system.
Focal Length
Specify the port focal length. The focal length
is measured from the face of the flange or tube
end edge to the focal point specified for the
particular point.
Azimuthal Angle (a)
Specify the azimuthal (a) angle by setting one
of the axes equal to 0 along the chambers
centerline and indicating the clockwise angle
from the 0 reference line to the ports
centerline.
Polar Angle ()
Specify the polar () angle by setting the vertical
axis equal to 0 and indicating the angle from
the 0 vertical reference line to the ports
centerline.
Instrument or Tolerance
Identify any known instruments that will be
mounted to the port or specific tolerances in
order to identify any critical tolerances needed
to accommodate the selected focal length.
Vacuum Chambers
13
Port #
Custom Chamber RFQ Worksheet
Use the worksheet below or use our online worksheet at www.lesker.com/chamberRFQ.cfm

to create a custom chamber RFQ. You may fax your chamber RFQ to 412-387-9200 or email
us at [email protected].
Step 1: Specify Chamber Size and Geometry

Indicate unit
of measure:
____inches
____feet
____centimeters
____meters
Specify the shape and size of the chamber body:

____Spherical & Hemispherical Outside Radius_________
____Box & Rectangular
Length_______________
Width______ Height_____
____Cylindrical
Outside Diameter________ Overall Height__________
____D-Shape
Overall Height__________ Width______ Depth_____
____Other (please specify) _______________________________________________
Step 2: Select Chamber Material

____304 Stainless Steel
____316 Stainless Steel
____6061 Aluminum
____Other (please specify)_______________________________________
Step 3: Specify Port Configuration

In the chart below, specify the following for each of the required ports. Establishing an orthogonal
set of axes (X,Y,Z) will be necessary when specifying the ports location.
Termination
Weldable Tube End
11/3" CF
21/8" CF
23/4" CF
23/4" CF
33/8" CF
41/2" CF
6" CF
8" CF
10" CF
KF10
KF16
KF16
KF25
KF40
KF50
ISO63
ISO80
ISO100
ISO160
ISO200
Rotatable or
Through-Holes
Clamped
Flange Type
Non-Rotatable
or Tapped Holes
or Bolted
& Size
(CF Flanges only) (CF Flanges only) (ISO Flanges only)
11/3"CF
Rotatable
Tapped
N/A
Standard
Tube O.D. (in.)
N/A
0.750
1.000
1.500
1.625
2.000
2.500
4.000
6.000
8.000
0.500
0.500
0.750
1.000
1.500
2.000
2.500
3.000
4.000
6.000
8.000
Tube
O.D.
Focal
Point
Focal
Length
Azimuthal
Angle (a)
0.75"
0,0,4
2.50"
45
Polar
Instrument/
Angle () Tolerance
165
N/A
*Example Port Configuration shown in table above.
Step 4: Specify Base Pressure Required

_____________________________
13-20
Step 5: Select Desired Surface Finish

_____#8 Mirror*
_____#4 Brush Finish
_____Glass Bead Blasted
_____Surface & Blanchard Ground**
*(available in cylindrical & D-shape only)
_____#DA Finish
_____#1 Mill Finish
_____Electropolish
**(available in box & rectangular only)

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Vacuum Chambers

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Vacuum Chambers

Technical Note . . . . . . . . . . . . . . . . . . . . . . . . . . . .13-2 to 13-3

Geometries & Characteristics

38" x 37" x 132" I.D.

The box chambers door provides easy, fast access

Pyrex Bell Jars

horizontal orientation. Vertical cylinders are often

Bell jars made from Pyrex are inexpensive and

The spherical chamber equipped with CF (ConFlat

Endplates or baseplates (depending on mounting

for high vacuum and UHV. Two problems prevent

For experiments disturbed by residuel

Glass is a common chamber material in

When receiving a Pyrex chamber, immediately

The most commonly used material for high

Inspecting and Using

Never allow hydrogen fluoride (HFgas

Pyrex Bell Jars

Pyrex Bell Jars

Pyrex Open Ended Cylindrical &

Designed to fit over the outer surface of the pyrex chamber.

Bell Jar O.D.

Pyrex Bell Jar L-Gaskets

Bell Jars (304 SS)

Dovetail O-Ring Grooved Flange

Constructed from vertical cylinders

Service Wells (304 SS)

Dovetail O-Ring Grooved Flange

Manufactured from 304 SS

Water coolingtrace or double wall

(4X) .56" THROUGH

Dovetail O-Ring Grooved Flange

Mating Bell Jar

Mating Bell Jar

Feedthrough Collars (304 SS)

Manufactured from 304 SS

Replace CF ports with KF style ports and/or additional flanged ports

Viton o-ring provided (assembly not included)

Water coolingtrace and double wall

O-ring sealed chambers are capable of reaching High

Standard framesExtruded aluminum and carbon steel (starting at

Mating Bell Jar

Includes a Viton o-ring

Chamber O.D. Ring O.D.

Endplates, also known as top plates or baseplates are available in 304 SS

Dovetail O-Ring Grooved Flange

Disc-shaped, 1" thick with a flat sealing

Replace CF ports with KF style ports

Water coolingtrace or machine groove

Welded bosses for lifting

On aluminum baseplates all ports will

Standard framesextruded aluminum

Standard pumping and gauging packages

Mating Bell Jar

Standard frames extruded aluminum and carbon steel

Spherical Chamber Accessories

NOTE: Frames not included. Standard frames start on page 13-14.

NOTE: Frames not included. Standard frames start on page 13-14.

Cylindrical Chamber Assemblies