tmp2C09 TMP
tmp2C09 TMP
tmp2C09 TMP
SUBJECT AREAS:
OPTICAL PROPERTIES AND
DEVICES
PHOTONIC DEVICES
TERAHERTZ OPTICS
Received
30 January 2014
Accepted
27 May 2014
Published
27 June 2014
Correspondence and
requests for materials
should be addressed to
X.C. (xschen@mail.
sitp.ac.cn)
Lin Wang, Xiaoshuang Chen, Anqi Yu, Yang Zhang, Jiayi Ding & Wei Lu
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road,
Shanghai, Shanghai 200083, China, Synergetic Innovation Center of Quantum Information & Quantum Physics, University of
Science and Technology of China, Hefei, Anhui 230026, China.
Terahertz (THz) technology is becoming a spotlight of scientific interest due to its promising myriad
applications including imaging, spectroscopy, industry control and communication. However, one of the
major bottlenecks for advancing this field is due to lack of well-developed solid-state sources and detectors
operating at THz gap which serves to mark the boundary between electronics and photonics. Here, we
demonstrate exceptionally wide tunable terahertz plasma-wave excitation can be realized in the channel of
micrometer-level graphene field effect transistors (FET). Owing to the intrinsic high propagation velocity of
plasma waves (.,108 cm/s) and Dirac band structure, the plasma-wave graphene-FETs yield promising
prospects for fast sensing, THz detection, etc. The results indicate that the multiple guide-wave resonances
in the graphene sheets can lead to the deep sub-wavelength confinement of terahertz wave and with Q-factor
orders of magnitude higher than that of conventional 2DEG system at room temperature. Rooted in this
understanding, the performance trade-off among signal attenuation, broadband operation, on-chip
integrability can be avoided in future THz smart photonic network system by merging photonics and
electronics. The unique properties presented can open up the exciting routes to compact solid state tunable
THz detectors, filters, and wide band subwavelength imaging based on the graphene-FETs.
he terahertz (THz) region of the electromagnetic spectrum contains almost half of all the photons emitted in
the Universe1,2. Because of this, the terahertz technology has recently emerged as a highly sought-after and
versatile scientific tool in wide spectrum of applications, including medical diagnose, biological sensing and
wireless communications3,4. However, due to the lack of easy-to-use sources and detectors in this frequency range,
the scientific progress historically lags behind microwave and infrared edges, which is known as terahertz
gap57. To satisfy the terahertz frequency, making metal-oxide-semiconductor field-effect-transistor (FET)
smaller is continuously anticipated8. The state-of-art high-frequency performance including cut-off frequency
fT ,600 GHz for Si, InP and GaAs devices with gate length shorter than 30 nm has been achieved8,9, while it will
be increasing difficulty to raise the frequency above 1 THz when the device arrives its ballistic limit. A more recent
approach for exploiting FETs such as IIIV high electron mobility transistors (HEMT) or Si complementary
metal oxide semiconductor transistors relies on the excitation of plasma waves in the channel10 (see
Supplementary Information). It has been predicted that the hydrodynamic nonlinearity of plasma waves can
lead to the multiplication and detection of THz radiation1114. A strong resonant photoresponse of plasma waves
in 50 nm InAlAs/InGaAs HEMT with voltage tuned from 1.8 to 3.1 THz has been observed at 10 K15. However,
the dissipative damping caused by the scattering of impurities or phonons, and the strong reflection at Restralenband, limit the maximum available THz photon absorption and range of working frequency (e. g. GaAs ,
2.5 THz, GaN , 10 THz) at room temperature16,17.
To this regard, graphene, a two-dimensional crystal of carbon atoms packed in honeycomb lattice, may offer
efficient platform for strong light-matter interaction, due to its intrinsic high mobility and chiral electronic
spectrum1820. From the first large-scale patterning of graphene FETs18, performance has improved at a rapid
pace. Graphene, synthesized by various techniques including exfoliation of highly ordered pyrolitic graphite18,
chemical vapor deposition21, epitaxial growth on silicon carbide22,23 exhibits prominent advantage for highSCIENTIFIC REPORTS | 4 : 5470 | DOI: 10.1038/srep05470
SCIENTIFIC REPORTS SREP-14-00528-T.3d 17/6/14 13:41:41
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Table I | Experimental mobility (cm2/Vs) of monolayer, bilayer and multilayer graphene on different substrates
SiO2
Monolayer graphene
Bilayer graphene33
Multilayer graphene
BN
30
9 00030 000
3 00012 000
,10 00034
frequency applications. Recent progress on either back-gated or topgated graphene FETs integration with high-k dielectric such as
Al2O3, has achieved mobility over 8000 cm2/Vs at high charge density and and 40000 cm2/Vs at low charge density22, making graphene
a potential candidate for THz nanoelectronics. In principle, the free
carrier density in graphene can be tuned by several orders of magnitude (1011 , 1014 cm22). Such unique property allows one to control strongly the plasma waves from far-infrared to terahertz
frequencies. However, there are still limited investigations on the
ac dynamics of Dirac fermions in FETs at THz frequency, and the
efficient excitation of plasma waves in graphene-FETs is imposed as a
key step towards future resonant detectors. Motivated by such awareness, in this work, we deal with the plasma wave excitation in the
channel-cavity of graphene-FETs. In the meantime, the screening
effects of metallic grating-gates/cooperative electric vibrators on
the plasma wave are explored for opto-electronic interconnect. The
strong change of optical transmission with wide voltage-tunability is
observed at the resonant frequency of plasma waves. These results
allow one to explore electro-optic properties of plasma waves based
on the configuration of graphene FETs, and can be used to build both
the ultra-fast THz modulators and the tunable detectors.
55 000125 000
40 000
SiC
31
18 10032
6 00010 00028
1 0003 000
Table II | Quality factors of various IIIV FETs (experimental) and the proposed one in this work
Materials
Monolayer
Graphene
10 000
0.069
0.104
Bilayer Graphene
(AB stacking)
10 000
0.037
0.059
AlGaN/GaN25
InGaAs/InAlAs
AlGaAs/GaAs38
,1200
,7000
7480
0.22
0.04215
0.063
,1 (1.1 THz)
,2.5 (2.5 THz)
,5.5 (2.5 THz)
1.15
0.05
0.16
2
<
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is commensurate with gate length (L). On the other hand, the
wavelength of plasma waves can occupy the entire period (L) of
the grating if f , 1. Due to the screening of the metallic gratinggates, the effective permittivity e* is determined by the thickness d of
dielectric layer separating the graphene from electrodes and the
period L or the plasma wavelength (seeing Material and Methods).
Thus, the propagation of plasma waves in the gated and ungated
channels follows different dispersion relationship36.
We tune the Fermi level from Dirac point electrically. Fig. 2 (a)
shows the plasma wave-induced THz optical absorption in graphene-FETs when the Fermi energy is 0.39 eV above the CNP
(charge neutral point). There are rich veins of sharp resonances with
frequency ranging from 2.5 THz to 30 THz are induced in the nearfield zone of the electrodes (seeing Figs. 2(e) and (f)). It is shown that
the quality factor (Q) of ,15 can be order of magnitudes larger than
that of previous GaAs or GaN heterojunction FETs37 with the
same dimensions (seeing Table II), and the absorption strength
approaches to the maximum available value ,40% (seeing Material and Methods), which is remarkable since the active device is only
one-single layer. It is worth noting that period L of the present device
is about two times and order of magnitude longer than that of
AlGaN/GaN and InAlAs/InGaAs, therefore the quality factor presented here is a conservative estimation. Moreover, the resonances
up to seventh order can be discernable from Fig. 2(a), which can be
engineered to facile wider tunable THz detection or modulation
beyond other available ones. Such results benefit from the potential
highly tunable electron density from 1011 cm22 at CNP up to
1014 cm22 or above and higher carriers mobility.
However, due to the relativistic electron transport properties
caused by the linear dispersion, the plasma waves in graphene-
Figure 1 | Illustration of plasma waves in graphene FETs for terahertz detection and modulation. (a) The formation of plasmonic cavity with
electric vibrator at top contact monitoring the conductivity of graphene channel, the bottom gate is used to tune the Fermi level, and the cascade
cooperative plasma oscillation is formed, leading to the rectify and detection of THz radiation (seeing Materials and Methods). (b) The conical band
structure and the optical process are shown. The plasmon enabled intraband electron transition is dominant due to the Pauli blocking and low density of
states at Dirac point. (see Supplementary Information). (c) Left column: the proposed MGL-FETs with the stacked graphene sheets being connected to
different or same voltage sources if needed, the grating contacts at the top side act both as electrodes and couplers. Right column: with an applied bias, the
shift of Hartree band and the Fermi level accommodate the carriers distributions.
SCIENTIFIC REPORTS | 4 : 5470 | DOI: 10.1038/srep05470
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Figure 2 | The plasma wave resonance in monolayer and double-layer FETs with grating coupler (Fig. 1(c)), period L 5 2.8 mm, gate length L 5 2.4 mm
(corresponding to the filling factor f 5 0.86), the thickness of dielectric tunneling junction d 5 50 nm. (a) All kinds of resonances have higher
Q value than other conventional 2DEG system like GaN. (b) The shift of plasma wave resonance frequency after electrically tuning the Fermi level, solid
symbols indicate the frequency dependence of plasma waves in double-layer FETs on the gate voltage, and the dashed line is that of monolayer FETs, both
of these device exhibit approximately Vg1/4 relationship. Open symbols is the frequency dependence of plasma waves in monolayer FETs on Fermi level
relative to the CNP. (c) and (d) are the contour map of plasma wave resonance in monolayer FETs. It is found that there is the non-monotonous
dependence of resonance on Fermi level. (e)The near-field enhancement caused by the screening of the electrodes is related to the first two resonances A
and B.
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frequency of plasma wave resonance depends on the period L only,
the frequency of plasma waves propagating in graphene-FETs is
inversely proportional to the gate length ,1/L, which may originate
from the screening caused by the electrodes (seeing Materials and
Methods). In strong coupling multi-layer graphene system (Fig. 3(e)),
the screening between graphene-layer can not be neglected and the
virtual gate effect should be taken into account40. In such cases, the
graphene layer not only supports the plasma waves but also behaves
like another electrode to tune the frequency. Therefore, the resonance
frequency of plasmaX
waves in the strong coupling limit should be
2 0:5
n0:5
modified as vp !(
i di ) =L, i is the layer index, di is the
i
Figure 3 | Illustration of the scaling of plasma wave resonance and screening effect in MGL-FETs (Fig. 1(c) under different controllable parameters.
(a) The frequency dependence of plasma waves in strong coupling double-layer device (Fig. 1(c)) with interlayer spacing d , 50 nm is proportional to the
inverse of gate length L, the solid and open symbols are the first two resonances at EF , 0.21 eV and EF , 0.29 eV, respectively. (b) The screening
(virtual-gate effect) between two graphene sheets affect obviously the dispersion of plasma wave resonance in the strong coupling limit (d , 60 nm),
where the virtual gate effect dominates (Fig. 3(d)), and the tunability degrades to the monolayer plasma wave resonance if the interlayer spacing exceeds
60 nm, in the meantime, a sharp contrast in near-field strength is seen between Figs. 3(d) and (e). Also, the good agreement between virtual gate model
and obtained data in Fig. 2(b) corroborates again the dominated role of screening (Fig. 3 (c)). By increasing the number of graphene sheets, the plasma
wave resonance can be tuned in wider frequency band (f). (g) is the schematic of the multi-waveguide-like FETs as proposed for nano-photonics making
use of the strong screening effect and confinement of plasma wave in graphene. (i) Indicating the good agreement between effective medium model
(seeing Materials and Methods) (open symbols) and obtained results (solid symbols). We find the sensitive tunable resonance and propagation constant
or absorption in deep subwavelength regime from 0 nm to 200 nm (i. e. l2/d2 , 104) (h), enabling the flexible design of monolithic THz photonic network
system.
SCIENTIFIC REPORTS | 4 : 5470 | DOI: 10.1038/srep05470
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Figure 4 | The hybridization modes in monolayer and multi-layer graphene FETs, as shown in Fig. 1(a), (a)(c) the spectral characteristics of plasma
waves in monolayer (a), double-layer (b) and four-layer devices (c), in which the Fermi level can be tuned separately. We find the enhancement and
splitting due to the interaction between Edge and Waveguide plasma waves. (d)(f) displays elementary plasma waves in monolayer graphene-FETs,
(d) and (e) illustrate the Edge-graphene-plasma waves (EGP), and (f) illustrates Waveguide-graphene-plasma waves (WGP). (g)(i) demonstrate the
interaction between WGP modes with different node numbers along the two channels of double-layer FETs. The oscillating charges are all extracted and
shown along the channels.
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with four layers and resonance up to 7th order occurs in single-layer
ones (Figs. 4(a)(c)), and activation of AP mode when the channel
length between upper and lower channel is different. All these results
illustrate potentially wide tunable THz/far-infrared detection of graphene, meanwhile, the plasma wave will cause the modulation and
control the polarization of incident waves (seeing Supplementary
Information), and thus enabling the realization of monolithic THz
spectrometer.
Conclusions
In summary, we have introduced novel graphene-based FETs with
the plasma waves acting as a new quasi-particle to transfer THz
signal. Owing to its intrinsic high transport velocity and mechanical
flexibility, the plasma wave devices yield very promising properties,
including high sensitivity and wide-band tunability throughout the
entire THz domain. The multiple guide-wave resonances in the graphene plane create deep sub-wavelength confinement of plasma
wave and lead to Q-factor an order of magnitude higher than that
of conventional 2DEG system at room temperature. Such unique
properties enable the potentially application of graphene-based
plasma wave device for compact solid state THz detectors. Most
importantly, the screening effect of plasma waves in FETs can be
explored both electrically with tuning the Fermi level and geometrically with changing the structural sizes. Rooted in the understanding, the performance trade-off among signal attenuation, broadband
operation, on-chip integrability and structural complexity can be
avoided in future THz smart photonic network system merging
the photonic and electronic advantages of graphene. Besides the
presented exciting results, the plasma wave FETs may offer subwavelength imaging for defects, adsorbents or surface morphology
of epitaxial-grown layers by implanting recent IR nanoscopy technique44. To that end, the THz waves are unambiguously safer due to
its lower energy and higher penetrability. During the nano-imaging,
there would be no additional free-carriers generated in target materials through direct interband transition, and free-carrier absorption
distorting available information. Moreover, since graphene is a twodimensional conducting sheet with high electrical tunability, the
signals can be transferred or amplified to other conventional electronic system, opening up the exciting routes to wide band subwavelength imaging.
Methods
The dispersion of 2D plasma waves in FETs. In the long wavelength limit, the Bohr
radius of Dirac fermions is far less than the periodic perturbation of charge density
and plasmon wavevector q is smaller the electron Fermi wavevector 2kF. Therefore,
the carriers suffer from collisions with each other very rapidly under the action of
terahertz field, and behave like a fluid, in which the validity of the hydrodynamic
formalism can be established. Linearization the continuity and Eulers equation, the
following expressions can be obtained,
2
Lv1 (r)
e n1 (r 0 )
dr 0
~{
Lt
mb e jr{r 0 j
and
Ln1 (r)
ens +:v1 (r)~{
;
Lt
where v1(r) and n1(r) are the first order perturbative quantities of electron velocity
and density, e* is the effective permittivity, the dispersion relation of plasma wave in
the single-layer graphene sheet can be obtained as shown in the text. The Coulomb
interaction or the restoring forces between carriers depend strongly on the dielectric
environment. In metallic gated graphene structure the effective permittivity e* 5 1/
2[es 1 ebcoth(qd)] (es andeb are the dielectric constants of the substrate and barrier
layer, respectively) is determined by the plasma wave wavevector and the thickness of
the dielectric barrier layer d separating the channel from electrodes. If qd ? 1, the
effective permittivity is ,1/2(es 1 eb), on the contrary it is reduced to eb/2qd. If the
graphene layer is only covered by dielectric layer d, the permittivity e* is ,1/2[es 1
eb(1 1 ebtanh(qd))/(eb 1 tanh(qd))], in consistent with the metallic screening one if
qd ? 1, and depends strongly on the thickness d if qd , 1. The results also indicate
that the screening effect of the gate decreases the plasma wave frequency evidently.
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Acknowledgments
The authors acknowledge the support provided by the State Key Program for Basic Research
of China (2013CB632705, 2011CB922004), the National Natural Science Foundation of
China (11334008, 61290301), the Fund of Shanghai Science and Technology Foundation
(13JC1408800).
Author contributions
L.W. performed major part of numerical experiments and written the paper. A.Y.
performed simulation study of Fig. 3 and tunable graphene waveguide, filters in the
Supplementary Information. Y.Z. and J.Y.D. performed numerical analysis of electrostatic
effect. W.L. and X.S.C. developed the optical models of graphene plasma waves. All authors
discussed the simulation results.
Additional information
Supplementary information accompanies this paper at http://www.nature.com/
scientificreports
Competing financial interests: The authors declare no competing financial interests.
How to cite this article: Wang, L. et al. Highly Sensitive and Wide-Band Tunable Terahertz
Response of Plasma Waves Based on Graphene Field Effect Transistors. Sci. Rep. 4, 5470;
DOI:10.1038/srep05470 (2014).
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Paper: SREP-14-00528-T
Title: Highly Sensitive and Wide-Band Tunable Terahertz Response of Plasma Waves Based on Graphene Field Effect
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