Non contact

3D optical
profler
The new S line for
non-contact optical
3D profling. The line
that opens the gate to
a new 3D experience.
Designed as a high-performance 3D optical
profler from the outset, S neox outperforms all
existing optical proflers, combining confocal
and interferometry techniques in the same
sensorhead without any moving parts.
S neox, the best
of two techniques.
Sensofars S line
Feel the 3D experience
2
Feel the 3D experience
Confocal proflers have been
developed to measure the
surface height of smooth to
very rough surfaces. Confocal
profling provides the highest
lateral resolution that can be
achieved by an optical profler.
Thus, spatial sampling can be
reduced to 0.10 m, which
is ideal for critical dimension
measurements. High NA (0.95)
and magnifcation (150X)
objectives are available to
measure smooth surfaces with
steep local slopes over 70 (for
rough surfaces up to 86). The
proprietary confocal algorithms
provide vertical repeatability on
the nanometer scale.
PSI Phase shift interferometers
have been developed to
measure the surface height of
very smooth and continuous
surfaces with sub-nanometer
resolution. PSI profling provides
sub-nanometer vertical
resolution for all numerical
apertures (NA). Very low
magnifcations (2.5X) can be
employed to measure large
felds of view with the same
height resolution.
VSI White-light vertical
scanning interferometers have
been developed to measure
the surface height of smooth to
moderately rough surfaces.
VSI profling provides
nanometer vertical resolution
for all NAs. The VSI algorithms
enable the S neox to use all
the available magnifcations to
profle shape features with the
same height resolution.
Interferometry Confocal
Confocal no moving parts
For confocal scanning, the neox uses the Sensofars patented tech-
nology, which is based on a microdisplay. The microdisplay is based
on ferroelectric liquid crystal on silicon (FLCoS), a fast switching
device with no moving parts that makes the scanning of confocal
images fast and very stable with an unlimited lifetime. Existing
confocal microscopes use mirror scanning heads, which are mova-
ble mechanisms that limit lifetime and degrade pixel dithering at
high magnifcations.
3
Multispectral wavelength LEDs
Red. Green. Blue. White.
Focused on optimizing the light source for each
application, S neox has four LED light sources insi-
de its optical core: red (630 nm), green (530 nm),
blue (460 nm) and white. Shorter wavelength is
used on those applications where the highest
lateral resolution is required.
Longer wavelengths provide greater optical cohe-
rence, up to 20 m, making Phase Shifting Inter-
ferometry possible on large area smooth surfaces.
Additionally, the red, green and blue LEDs are pul-
sed to acquire real color images and high contrast
color-coded depth information in real time.
80
160
240
320
400
480
560
400 425 450 475 500 525 550 575 600 625 650 675 700 725
Dichroic Blue Filter
Blue LED Green LED Red LED
Dichroic Red Filter
Dichroic Green Filter
4
Sequential color
Each pixel
in real color
Red, green and blue LEDs are
used to sequentially illuminate
the surface under inspection.
Three monochromatic images
are taken and compounded into
a high resolution color image.

saturation, as well as real
pixel-to-pixel color information.
In contrast to color cameras
based on a Bayer matrix of
pixels, the S neox does not
need to interpolate the color
information between pixels.
100%
100%
100%
25%
25%
50%
The S neox uses a high-resolution CCD sensor
of up to 1360x1024 pixels in combination with
high-resolution displays of 2560x1440. The
images acquired with S neox do not need to
be up-scaled or down-scaled, so they always
appear sharp, vivid and realistic on-screen.
Amazing image quality
See the big picture
Sensofars S neox Bayer Matrix
5
Live 3D
feelings
A new way to feel
the 3D experience
A confocal RGB image view technique allows
the user to observe nano-level details within
a few microns range. The red, green and blue
LEDs are sequentially pulsed and synchronized
to acquire three confocal images. The result is
color-coded depth information determined from
the chromatic depth distortion of the microscope
objective, resulting in a pseudo-color topography
with qualitative information of the height of the
topography.
6
From nanoworld
to your eyes
Highest level of details
Confocal images are taken at the highest
camera resolution with very impressive details.
A complete 3D scan is taken in less than 10 seconds.
For high-speed applications and extremely low
refective surfaces, the camera is binned at 2x2,
making it possible to acquire an incredible full 3D
scan in less than 3 seconds.
3
Incredible
full 3D scan
in less than
7
Outstanding
lateral resolution
Thin & thick flms
The highest quality objectives,
the highest quality performance
According to the well-known Rayleigh resolution criterion, two
points are resolved when the frst minimum of one Airy disk is
aligned with the central maximum of the second Airy disk.
R
lateral

Lateral resolution is improved when a short wavelength
and a very high objective are used. K-factor is related
with the width of the Airy disk and depends on the imaging
conditions. Confocal technique reduces by about 30 percent
the lateral extent of the Airy disk compared to that in a
widefeld microscope. Additional reduction of the K factor is
obtained when incoherent illumination is used instead of a
coherent light source (laser illumination).
Therefore, S neox outperforms CLSM and provides
the best lateral and axial resolutions that can be
attained in an optical profler.
A full range solution is provided for thin and
thick flms with the optional spectroscopic
refectometer. As a fexible system, S neox can
incorporate a spectroscopic refectometer, coupled
through an optical fber, for the measurement
of thin flms with thicknesses ranging from 10
nm and up to 10 layer stacks. The optical fber is
imaged through the microscopes objectives. Thus,
thin flms can be measured with spots as small
as 5 m. The measurement is undertaken with
the integrated LED light source, thus providing
real-time bright-feld images of the sample and
simultaneous thin flm measurements.
The S neox uses premium CF60-2 Nikon
objectives lenses that have been designed to
correct for chromatic aberrations and produce
sharp, fat and clear images with high contrast
and high resolution. Phase Fresnel lenses improve
the operability and the working distance,
meaning that S neox objectives provide the
largest available working distance for each NA.
Multiple confgurations
Sample size
is important for us
The S neox is a complete tool. Its compact
design is ideal for obtaining a fast, non-invasive
assessment of the micro- and nanogeometry of
technical surfaces in multiple confgurations.
S neox provides the fexibility, durability and
efciency required from the standard setup
for R&D and quality inspection laboratories to
sophisticated, customized solutions for online
process controls, measuring samples up to
700 x 600 mm
2
.
FOV
150mm
300mm
700mm
XS
S/M
L/XL
XXL
What size do you need?
Choose from portable to XXL systems
9
Save time, make it
easy for yourself
SensoSCAN software drives
the S neox with its clear and
intuitive friendly-interface. The
user is guided through the
3D world, delivering a unique
user experience. SensoSCAN
software provides an interface
with which any measurement
can easily be taken, as well as
a basic set of tools for displa-
ying and analyzing data.
Complete tool for
a complete system
An overview tool helps the
user to inspect the sample
during measurement
preparation, check
measurement positions
before acquisition as well
as assist in the automation
procedure. Work with high
magnifcation will be easier, as
you will know where you are
at every moment.
Automating
procedure
Automated measurements
are obtained using the
Recipes tool, an easily
customizable tool for creating
quality control procedures. It
is ideal for online inspection,
it is extremely easy to defne
procedures for automating
measurements with the
profle manager tool,
sample identifcation, data
exportation and pass or fail
criteria.
Acquisition & Analysis Software
SensoSCAN
10
Everything
is fast, really fast
Thanks to our dedicated
algorithms, the S neox allows
results to be acquired in
less than a minute after the
sample has been positioned.
Naturally any data acquisition
is still made following our
obsession for the best quality
and performance.
SensoPRO

It has never been so easy and fast to perform
quality control in a production line. Thanks to
SensoPRO LT, the operator in the production line
only needs to load the sample and follow guided
instructions. Plug-in-based data analysis algo-
rithms provide a high degree of fexibility. Current
capabilities include PSS module (Conic, Mesa
and Merging LEDs), Bump, Hole, Roughness, Step
Height, Traces and Trenches. New modules can be
easily customized to other industry needs.
SensoMAP

SensoMAP, based on Mountains technology
from Digital Surf, is a extremely powerful tool
for analysis and reporting. SensoMAP software
is completely modularly adaptable to customer
requirements. Two levels (standard and premium)
and several modules (2D, 3D or 4D modules, Ad-
vanced Contour, Grains &Particles, Statistics and
Stitching) are available.
Powerful Analysis Software
...need more?
A fully automated process
(measurement and analysis)
can be undertaken in
combination with two
external software applications:
SensoPRO or SensoMAP.
11
Applications
PSS Solder balls
Flat panel display
The S neox plays a key role in demanding
industries such as the semiconductor,
biomedical, and biotechnology industries.
Focus on your needs
12
After more than 10 years as a metrology
consultancy and understanding the fast changes
in the market, we have learned that opening
the gate to innovation is the only way to make
high-end products. Sensofar optical proflers
are installed in hundreds of facilities and quality
control departments for micro, nano and sub-
nano applications that analyze the 3D surface
characteristics of the material. The S neox has
been developed as a versatile and multipurpose
system that focuses on solving your application.
Improving your quality control process and
adding value to your products is where Sensofar
wants to be.
Innovation
Solar cell
Texture surface
with electron beam
Paper Leather
Focus on your needs
13
Sensorhead
Motorized nosepiece
5 position
Manual nosepiece
6 position
5 position
Spectroscopic
Refectometer
Piezo Z Stage
200m
Manual XY Stage Motorized XY Stage
114 x 75 mm
150 x 150 mm Motorized XY Stage
250 x 200 mm
300 x 300 mm
Tip-Tilt
Bredboard
Active vibration isolation
Pasive vibration isolation
DI
10X
20X
50X
100X
TI
2.5X
5X
High NA
2.5X
5X
10X
20X
50X
100X
150X
200X
ELWD
20X
50X
100X
SLWD
10X
20X
50X
100X
Interferential Confocal
Standard
base & column
Adjustable
base & column
Adjustable
column
600
172
451
334
389 650 209 318 569
Dimensions unit: mm
System confguration
Brightfeld Interferometric
MAG 5X 10X 20X 50X 100X 150X 2.5X 5X 10X 20X 50X 100X
NA 0.15 0.30 0.45 0.80 0.90 0.95 0.075 0.13 0.30 0.40 0.55 0.70
WD (mm) 23.5 17.5 4.5 1.0 1.0 0.2 10.3 9.3 7.4 4.7 3.4 2.0
FOV
1
(m) 3508x2640 1754x1320 877x660 351x264 175x132 117x88 7016x5280 3508x2640 1754x1320 877x660 351x264 175x132
Spatial sampling
2
(m) 2.58 1.29 0.65 0.26 0.13 0.09 5.16 2.58 1.29 0.65 0.26 0.13
Optical resolution
3
(m) 0.93 0.46 0.31 0.17 0.15 0.14 1.87 1.07 0.46 0.35 0.25 0.20
Maximum slope
4
() 8 14 21 42 51 71 315 860 14 21 25 42
Vertical resolution
5
(nm) 75 25 8 3 2 1 PSI/ePSI 0.1 nm (0.01 nm with PZT) VSI 1 nm
Measurement time
6
(s) >3s >3s
Other objectives are available.
For confocal: Water immersion, Super Long Working Distance, Extra
Long Working Distance, Collar Ring depth focusing correction.
For interferometry: Variable refectance, Michelson,
Mirau and Linnik.
1 Maximum feld of view with 3/2camera and 0.5X optics.
2 Pixel size on the surface
3 L&S: Line and Space, half of the difraction limit according to the Rayleigh criterion.
Values for blue LED.
4 On smooth surfaces, up to 86 on roughness surfaces
5 System noise measured as the diference between two consecutive measures on a calibration mirror
placed perpendicular to the optical axis. For brightfeld objectives, two confocal image averages. For
interferometric objectives, PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are
achieved with Piezo stage scanner and temperature controlled room.
6 For brightfeld objectives, 21 scanning planes. For interferometric objectives, 10m scanning range.
Measurement array 1360 x 1024 pixels
LED light sources red (630 nm), green (530 nm), blue (460 nm) and white (550 nm)
Sample height up to 40 mm (standard) ; 150 mm (adjustable) (larger under request)
XY sample size up to 700 x 600 mm
Vertical range 40 mm with linear stage; 200 m with piezo stage
Max. vertical scannning range PSI 20 m; ePSI 100 m; VSI 10 mm
Z stage linearity <0.5 m/mm with linear stage and <30 nm/100 m (0.03%) with piezo stage
Z stage resolution 0.75 nm with linear stage; 2 nm with piezo stage
Step height repeatability 0.1%
Step height accuracy 0.5%
Sample refectivity 0.05% to 100%
Display resolution 0.001 nm
System Line Voltage 100-240V AC, frequency 50/60Hz single phase
Computer iMac 27LED-backlit display with IPS technology; 2560 x 1440 pixels resolution
Operating system Microsoft Windows 7
Environment Temperature 10C to 35C Humidity <80% RH Altitude <2000 m
Objectives
System specifcations
15
SENSOFAR is a leading-edge
technology company that has the
highest quality standards within the
feld of non-contact surface metrology.
We provide high accuracy optical proflers based on
interferometry and confocal techniques. From standard
setups for R&D and quality inspection laboratories to complete
non-contact metrology solutions for online production processes,
Sensofar ofers technology that enables our customers to achieve
breakthroughs, particularly in the semiconductor, precision
optics, data storage, display devices, thick and thin flm and
material testing technologies felds. Sensofar is represented in
over 20 countries through channel partners and has its own
ofces in Asia, Japan and the United States.
HEADQUARTERS AND SALES OFFICE
SENSOFAR-TECH, SL.
Parc audiovisual de Catalunya
Crta. BV1274 Km 1
E-08224 Terrassa
Tel. (+34) 93 700 14 92
Fax (+34) 93 786 01 16
[email protected]
www.sensofar.com

SALES OFFICE
SENSOFAR Japan Ltd.
Ichikawa Business Plaza 405,
4-2-5 Minami-Yawata
ICHIKAWA-SHI, CHIBA, 272-0023 (JAPAN)
Tel. (+81) 47 370 8600
Fax (+81) 47 370 8623
[email protected]
www.sensofar.co.jp

SENSOFAR LLC (USA)
PO Box 2013
Carefree AZ 85377
Tel. 1 800 530 3097
eFax 1 419 745 1516
[email protected]
www.sensofarusa.com
+info S neox