Classified abstracts 5454-5463

recommended in the dome method to obtain the intrinsic speed of the

pump. (India)
J K N Sbarma and D R Shamsa, Vacuum, 32 (S), 1982, 253-256.
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5454. Higbqeed ion pump witb a multipctor cntbode-tbe multipactor ion
21
pump. (GB)
A new type of high-speed ion pump using a multipactor cathode is
proposed and the experimental results, combined with the first trial pump,
are described. The multipactor cathode has excellent characteristics as an
electron source in order to obtain increased pumping speed of an ion
pump, namely: (1) since it is a cold cathode made of pure metal, such as Al,
it does not contaminate the vacuum condition, (2) the electron emission
density is high, (3) the supply of electrons can be greatly increased in
comparison with that of any other supply method, (4) the electrons can be
supplied easily into a very wide area. This proposal is to make a high-speed
ion pump by combining such an attractive cathode with a normal ion
pump. The experimental results showed that the maximum pump current
per unit pump volume reached up to 30 times that of a normal ion pump in
vacuum conditions of less than 10m4 Pa. (Japan)
K Yokoo and S Ow, Vacuum, 32 (S), 1982,265-268.
5455. M&a&al vaeunm pumping equipment for applications involving
corrosive and aggressive materials (USA)
In chemical environments such as those encountered in the semiconductor
industry it is important to specify a complete pumping system including
pumps, accessories, oils and an operating procedure. The paper discusses
certain features of the pump design that are important in ensuring
reliability when pumping aggressive materials. Further the accessories
designed to augment the performance of the pump in aggressive situations
are discussed with specific data on their performance under controlled
conditions. Special attention is given to a range of oils and oil filtration
methods, as in most cases it is the results of oil degradation and
contamination that cause operating difficulties in aggressive atmospheres.
(GB)
J Currington et al, J Vat Sci Technol, 20 (4), 1982, 1019-1022.
54% Calculation of sputtering ion pump speed. (USA)
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Until now, a semiempirical formula S=K(I/P) is widely used to express
the pumping speed of a sputtering ion pump. The constant K is decided by
experiments. An attempt is made to find this constant by the Schuurmans
theory of magnetic confined gas discharge, the theory of sputtering and the
Langmuirs theory of adsorption. It is found that K may be expressed as
K =4.9 x 10-3Cfu~4[g+2-(gz +4g)], for nitrogen at room tempera-
ture in a diode pump, where C is a configuration factor,f is a pressure
dependent factor, u, is the anode potential, g = 2.45 x 10-3Cfu,41/P.4, and
A is the area of the inner surface of the anode. This relation is in fairly good
agreement with experimental results. (China)
W Ho R K Wongnnd T P Keng, J Vat Sci Technof, 20 (4). 1982,1010-1013.
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5457. On cryosorption pumping of bydrogen with the ZDB-150 type
cryopump cooled by a two-stage closed-cycle refrigerator. (USA)
The ZDB-150 type cryopump with a 150-mm i.d. flange, cooled by a two-
stage refrigerator, has been developed for pumping hydrogen, which is the
major outgassing product of most metals and the main gas load to be
removed in some special applications, such as nuclear fusion. In order to
improve the pumping performance of this cryopump for hydrogen, several
different configurations and geometries of cryosorption panels were
designed and tested. On the other hand, the favourable distribution of the
refrigeration capacity and temperature at two cold heads of the
refrigerator were also considered and tested. This paper presents the test
results on pumping speed and pump capacity for hydrogen with
forenamed various considerations. In the selected optimum configuration
and condition, the maximum pumping speed and capacity, 2400 1 s- and
11000 torr I, respectively, were reached. It was concluded that enhancing
the pumping capability of cryopump for hydrogen is potentially feasible.
(China)
Bing-kun Liu et al, J Vat Sci Technol, 7.0 (4). 1982, 1000-1004.
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54%. InlIuence of magnetic fields on a large-sired turbomolecular pump.
(USA)
Application of turbomolecular pumps in the field of nuclear fusion
research and accelerators requires knowledge concerning the temperature
rise and the decrease of rotation frequency due to leakage magnetic field.
We measured them for pumps OV-TH 5ooo (pumping speed: 5000 I s- )
and OV-TH 500 (500 1 s - i), set in a leakage magnetic field of mirror field
coils used for plasma research. The allowable magnetic field is about
100 G for both types, if we take 120C to be tolerable rotor temperature.
An effective magnetic shield can be realized by the use of simple permalloy
cylinders. (Japan)
A Nisbide et al, J Vat Sci Technol, 20 (4), 1982, 1105-l 108.
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5459. Factors inllueucing tbe ultimate vacuum of single structure vapour
pumping groups (USA)
N T M Deunls et al, J Vat Sci Technol, 20 (4), 1982, 996999.
The single structure vapour pumping group consists of a vapour pump,
watercooled baffle and a quarter swing valve mounted in a single casing.
Ten years of experience with such pumping groups using polyphenyl ether
has shown that they can give a virtually contamination-free vacuum.
Potential sources of contamination such as vacuum sealing, pump design,
high vacuum valves (their sealing gaskets and mode of operation), and the
fore vacuum conditions have been studied using both mass spectrometers
and quartz crystal microbalances to determine the low levels of organic
contamination that arise in the system from the above sources. It is shown
that the precautions taken to ensure a clean vacuum must be more
stringent than were previously appreciated. (GB)
22. GAUGES AND MEASUREMENT OF LOW PRESSURES
22
5460. Pressure measurements in magnetic fusion devices. (USA)
Accurate pressure measurements are important in magnetic fusion devices
for: (1) plasma diagnostic measurements of particle balance and ion
temperature; (2) discharge cleaning optimization; (3) vacuum system
performance; and (4) tritium accountability. This paper reviews the
application, required accuracy and suitable instrumentation for these
measurements. Demonstrated used of ionization-type and capacitance-
diaphragm gauges for various pressure and gas-flow measurements in
tokamaks are presented, with specific reference to the effects of magnetic
fields on gauge performance and the problems associated with gauge
calibration.
H F Dylla, J Vat Sci Technol, 20 (2), 1982, 119-128.
5461. An axbtl-emission ultrabigb vacuum pump. (USA)
22
The BA gauge has been widely used in ultrahigh vacuum systems for many
years. However, it has some well-known dlsadvantages. In this paper a
new ionization gauge structure, the Axial-Emission gauge (AEG) is
described. The filament and the ion collector plate of the AEG are located
on the two terminals of a spiral grid, respectively. The sensitivity (for N,)
ofthe AEG isO. Pa- (37.5 torr-I). Thedistance between electrodesin
the AEG has only a slight eNect on the gauge sensitivity. The variation in
sensitivity from gauge to gauge is less than +5x. The x-ray limit of the
AEG is 2.67 x 10m9 Pa (2 x lo- torr). The upper limit of linearity
(f 5%) has been ascertained to be 5.3 x 1O-2 Pa (4 x 10m4 torr). The
electrodes in the AEG are quite simple. Therefore it is easy to degas and
can be used on any general purpose uhv system. (China)
J Z Chm and C D Suen, J Vat Sci Technol, 20 (I), 1982, 88-91.
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5462. A report from tbe AVS Standards Committee: Comparison of ion
gauge calibrations by several standards laboratories. (USA)
Calibrations by four US laboratories of four hot-cathode ion gauges, in
the range 0.07-l 3 mPa, showed systematic differences among laboratories
that were much larger than the expected error of any one calibration. They
also suggested that any of the four gauges tested, if properly packaged and
shipped, was able to serve as a transfer standard with probable error of
2%. A second comparison was made of the calibrations by two US
laboratories of some other gauges that had also been calibrated by the
National Physical Laboratory, England. Results did not permit conclusive
determination of whether digerences were due to the laboratories or to
changes in the gauges.
I Wnrshawsky, J Vat Sci Tech&, Xl (I), 1982, 75-79.
5463. Gas analysis in the ironmaking process. (GB)
22
Knowledge of the composition of process gases in ironworks has always
been required to ensure efficient operation. This paper describes the
development of an on-line quadrupole mass spectrometer for the analysis
of blast furnace off-gas from initial development trials using a prototype
instrument up to the present day when production instruments are in
operation on all blast furnaces in the British Steel Corporation,
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