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    01 Welcome and Administrative Introduction

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    Dani Lopez
    This document provides an overview of the Introduction to Micromachining and MEMS course taught by Professor Eric P. Y. Chiou. It outlines the syllabus including grading, textbooks, and references. It also lists related MEMS/nano courses at UCLA in Electrical Engineering, Mechanical Engineering, and Biomedical Engineering and describes the research areas of MEMS faculty from those departments.

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    01 Welcome and Administrative Introduction

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    Dani Lopez
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    This document provides an overview of the Introduction to Micromachining and MEMS course taught by Professor Eric P. Y. Chiou. It outlines the syllabus including grading, textbooks, and references. It also lists related MEMS/nano courses at UCLA in Electrical Engineering, Mechanical Engineering, and Biomedical Engineering and describes the research areas of MEMS faculty from those departments.

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    This document provides an overview of the Introduction to Micromachining and MEMS course taught by Professor Eric P. Y. Chiou. It outlines the syllabus including grading, textbooks, and references. It also lists related MEMS/nano courses at UCLA in Electrical Engineering, Mechanical Engineering, and Biomedical Engineering and describes the research areas of MEMS faculty from those departments.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    105 views15 pages

    01 Welcome and Administrative Introduction

    Uploaded by

    Dani Lopez
    This document provides an overview of the Introduction to Micromachining and MEMS course taught by Professor Eric P. Y. Chiou. It outlines the syllabus including grading, textbooks, and references. It also lists related MEMS/nano courses at UCLA in Electrical Engineering, Mechanical Engineering, and Biomedical Engineering and describes the research areas of MEMS faculty from those departments.

    Copyright:

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    of 15

    MAE CM180/280A EE CM150/CM250A , BME CM150/CM250A

    Introduction to Micromachining and MEMS


    Prof. Eric P. Y. Chiou

    EE CM150/CM250A, MAE CM180/280A, BME CM150/CM250A:

    Introduction to Micromachining and MEMS


    Lecture 1: Welcome and Administrative Issues

    Syllabus
    Instructor:
    Prof. Eric P. Y. Chiou Email: [email protected]

    Office Hours
    Thursday 11-12 in 37-138 Eng. IV

    Lecture
    Mon, Wed 12:00 ~ 1:50 pm in PUB AFF 1234

    Course Web
    https://courseweb.seas.ucla.edu/ Lecture Notes Homework, Solutions

    Syllabus
    Grading
    30% = homeworks (weekly assignment starting from week 2) 30% = Midterm 40% = Final (Dec. 9, 2012, 11:30am-2:30pm) Under and Graduate will be graded in different groups

    TA
    Yue Chen

    Syllabus
    Textbooks
    Readers: consists of chapters and selections from books and other texts Fundamental of Microfabrication and Nanotechnology Vol II (3rd Ed) Marc Madou Silicon Processing for the VLSI Era Vol. 1 Process Technology Stanley Wolf and Richard N. Tauber Introduction to Microelectronic Fabrication R. C. Jaeger (cheap and highly recommend)

    References:

    Reference for this Class


    Fundamentals of Microfabrication and Nanotechnology -volume II (3rd Ed.) Marc Madou

    Reference for this Class


    Introduction to Microelectronic Fabrication R. C. Jaeger

    Reference for this Course


    Silicon Processing for the VLSI Era- Volume 1: Process Technology (2nd Ed.) S. Wolf and R.N. Tauber

    EE M150: MAE M180:

    MEMS/Nano Courses (EE/MAE)


    Methods of micromachining and and their use to produce a variety of MEMS, including microstructures, microsensors, and microactuators.

    Introduction to Micromachining and MEMS (Fall) Prereq: EE1 or Physics 1C, Chem20A,

    EE M150L: Intro. to Micromachining and MEMS Lab MAE M180L: (Fall) Prereq: EE1 or Physics 1C, Chem20A,
    REQUIRES: Concurrent enrollment in EE M150
    Methods of micromachining and and their use by students to fabricate a set of basic MEMS structures in a hands-on microfabrication laboratory.

    EE 250B: MAE M282: EE M250A: MAE M280:

    MEMS Design (Winter)


    Design methods, design rules, sensing and actuation mechanisms, microsensors, and microactuators. Designing MEMS to be produced with both foundry and non-foundry processes. Design project required.

    Micromachining and MEMS (Spring)


    Advanced discussion of micromachining processes used to construct MEMS (lithographic, deposition, and etching processes) and process integration. Materials issues such as chemical resistance, corrosion, mechanical properties, and residual / intrinsic stress

    MEMS Courses (EE/MAE)


    MAE 281: Microsciences (Fall) Prereq: MAE 131A, MAE 150A (or equivalent)
    Basic science issues in micro domain. Topics include micro fluid science, microscale heat transfer, mechanical behavior of microstructures, as well as dynamics and control of microdevices.

    MAE 284:

    Sensors, Actuators, and Signal Processing


    Principles and performance of micro transducers. Applications of using unique properties of micro transducers for distributed and real-time control of engineering problems. Associated signal processing requirements for these applications.

    MAE 187L:

    NANOSCALE LAB
    introduces laboratory techniques of nanoscale fabrication, characterization, and biodetection. Basic physical, chemical, and biological principles related to these techniques, top-down and bottom-up (self-assembly) nanofabrication, nanocharacterization (AEM, SEM, etc.), and optical and electrochemical biosensors.

    MEMS/Nano Courses (EE/MAE)


    MAE 287: Nanoscience and Technology
    Introduction to fundamentals of nanoscale science and technology. Basic physical principles, quantum mechanics, chemical bonding an nanostructures, top-down and bottom-up (self-assembly) nanofabrication; nanocharacterization; nanomaterials, nanoelectronics, and nanobiodetection technology. Introduction to new knowledge and techniques in nano areas to understand scientific principles behind nanotechnology and inspire students to create new ideas in multidisciplinary nano areas.

    Other MEMS related courses: MAE 250 M: Introduction to Microfluids/Nanofluids (Kavepour) (Fall) MAE 186/286: Applied Optics (Chiou) MAE 231G: Microscopic Energy Transport (Ju) MAE CM 240: Introduction to Biomechanics

    MEMS Faculty in EE
    Robert Candler ([email protected])
    RF MEMS (energy dissipation in resonators), fundamental limits of physical sensors, and the interface of microstructures with biology.

    MEMS Faculty in MAE


    Chih-Ming Ho ([email protected])
    Microfluidics, Biosensors, feedback control for combinatorial drug screening

    C.-J. Kim ([email protected])


    MEMS fabrication, surface tension based devices, superhydrophobic surface

    Greg Carmen ([email protected])


    Active materials for MEMS, energy harvesting devices Magnetic materials

    MEMS Faculty in MAE


    Yong Chen ([email protected])
    nanoscale materials, devices, and circuits Nanofabrication, nanoimprint technology

    Sungteak Ju ([email protected])
    microscale heat conduction

    Eric Pei-Yu Chiou ([email protected])


    Biophotonics, BioMEMS, Laser surgery, Laser manufacturing

    MEMS Faculty in BME


    Jacob Schmidt ([email protected])
    Engineered bimolecular systems Dino Di Carlo ([email protected])
    BioMEMS, Quantitative cell biology, Inertia microfluidics

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