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End Effector Design

This document discusses end effector selection and design. It begins by describing common end effector types including mechanical grippers, vacuum, magnetic, and others. It then provides more details on mechanical grippers and vacuum end effectors. The document outlines general design practices for end effectors and specific design criteria based on workpiece and process analysis. It concludes with several case studies on vacuum end effectors for applications like handling hot wafers, warped wafers, and high speed PV wafer handling.
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0% found this document useful (0 votes)
342 views27 pages

End Effector Design

This document discusses end effector selection and design. It begins by describing common end effector types including mechanical grippers, vacuum, magnetic, and others. It then provides more details on mechanical grippers and vacuum end effectors. The document outlines general design practices for end effectors and specific design criteria based on workpiece and process analysis. It concludes with several case studies on vacuum end effectors for applications like handling hot wafers, warped wafers, and high speed PV wafer handling.
Copyright
© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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End Effector Selection and Design

End Effector Types General Design Practices Specific Design Criteria Case Studies

End Effector Types


Mechanical Grippers Negative Pressure (vacuum) Magnetic Hooks Ladles (scoops liquid or powder) Others (electrostatic)

End Effector Types- Mechanical Grippers


Parallel Grippers
Most common More accurate

End Effector Types- Mechanical Grippers


Parallel Grippers
Most common More accurate

Angular Gripper
Limited space Clearance

Toggle Gripper
High mechanical advantage Over centering

End Effector Types- Mechanical Grippers


External Grippers Internal Grippers

End Effector Types- Negative Pressure


Vacuum
Suction Cups Edge grip Specialty
Flat

Shaped

Bellows

Rough Surfaces

End Effector Types- Negative Pressure


Vacuum Bernoulli (non-contact)

End Effector Types- Negative Pressure


Vacuum Bernoulli Coanda (high flow, low pressure)

End Effector Types- Negative Pressure


Vacuum Bernoulli Coanda (high flow, low pressure) Specialty
Vacuum/pressure (Coreflow) Vacuum/ultrasonic (Zimmerman-Schlip)

General Design Practices


Minimize weight- affects robot performance
Material selection Lightening holes

Minimize size
Helps minimize weight Reduce cantilever load and moment of inertia May conflict with flexibility

Maximize rigidity
Improves positional accuracy and repeatability Reduce vibrations

Maximize holding force


Reliably hold part (without damage) Orient part to maximize force in direction of motion

Maintenance and form factor change considerations


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Specific Design Criteria


Work piece analysis (objects to be handled) Process Analysis Design Considerations

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Work Piece Analysis


Work piece Dimensions and tolerances
Determines size and weight of end effector
Material, stiffness, cost

Can single tool handle size and shape variation of work piece? Is compliance required?
PV Wafer stack not parallel due to wedge shape of wafers

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Work Piece Analysis


Material and physical properties
Use gripper, vacuum or magnet? Permissible contact points
Semiconductor: 3mm exclusion zone Hard disk: ID clamp zone, OD chamfer PV wafers: contact top surface but minimal edge contact

Permissible grip forces


High force on PV wafer surface creates micro-cracks Need to control force and clamping speed?

Weight and balance of part


Quantity and location of grip points

Surface finish and shape


Vacuum for smooth flat surfaces, mechanical gripper for round parts Surface texture and condition (oily, sticky)
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Process Analysis
Manual or automated
Take tool to part or part to tool?

Range and quantity of parts


Hard disk tools require multiple form factors (48, 65, 78, 84, 95mm) Automated or manual tool change

Presentation and disposition


Position and orientation at pickup and drop-off

Dimensional clearances to avoid interferences


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Process Analysis
Sequence of events and cycle time requirements
Number of end effectors batch processing

Environment
Cleanliness Temperature (environment or workpiece) Atmospheric or Vacuum Chemicals Vibration and shock

In process inspection requirements


Add gauging to end effector Compatibility with inspection process
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Design Considerations
Cost Flexibility Changeover Safety (lost of power, collision) Handling of damage product Sensing
Part sensing

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Case Studies

Case Studies
Vacuum end effector- Hot wafers Bonded wafers Picking wafer from blind pocket PV cell handling- high speed PV cell handling- perforated wafers

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Hot Wafers- Vacuum End Effector


Problem: How to pick up a hot wafer with a cold vacuum end effector?
Wafer deforms (warps) due to temperature gradient and breaks vacuum.

Solution: a paddle type end effector with a low thermal mass insert made from low thermal conductivity material.

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Hot Wafers- vacuum end effector


O-ring

Spring

Quartz Insert

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Warped Wafers- vacuum end effector


Problem: Bonded wafers are often deformed (warped or bowed).
Edges are sharp and brittle and can not be handled with edge grip end effectors Will not hold vacuum with rigid vacuum pads

Solution: compliant vacuum pads

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Warped Wafers- vacuum end effector


Pad snaps onto a ball shaped receptor and rocks +/-1deg

Vacuum pads

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Top Surface, Non-contact Pick-up


Problem: How to pick up a wafer from a blind pocket- without touching top surface Vacuum will not work Solution: Bernoulli gripper creates low pressure for pickup Edge support prevents contact with wafer surface

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Top Surface, Non-contact Pick-up


housing

Wafer contacts housing only at the edge


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Bernoulli gripper

PV wafer handling
Problem: How to pick up and drop off PV wafers at 3600pph without damage
Off flat belt Off stationary coinstack Cycle time is limited by pickup and dropoff- not robot speed

Solution:
High flow low vacuum, generate at point of use
Rapid pickup, low stress on wafer

Built-in blowoff for quick release of wafer Rigid, large contact surface for high holding force with non-marking wafer support

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PV wafer handling
Videos
High speed pickup and dropoff Slow motion of pickup and dropoff 7200pph (for alternative subtrate)

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PV wafer handling- Fragile


Problem: Pick up highly fragile partially perforated wafers off coinstack.
Wafers stick together through surface tension Vacuum applied on top wafer leaks through and holds on to wafers below

Solution:
Add blowoff nozzle to separate cells Change vacuum pattern with compliant seal in non-perforated cell area
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