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Seminar: Compiled by Shafeek - Kattakada

The document discusses the evolution of microelectromechanical systems (MEMS) displays. It describes different types of MEMS displays including pixilated displays like digital micromirror devices and interferometric modulator displays, as well as non-pixilated displays like laser scanning displays. The document outlines the components, manufacturing processes, and applications of MEMS technology. It concludes that MEMS displays enable miniaturization, cost reduction and productivity improvements with opportunities in nanoelectromechanical systems.

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166 views52 pages

Seminar: Compiled by Shafeek - Kattakada

The document discusses the evolution of microelectromechanical systems (MEMS) displays. It describes different types of MEMS displays including pixilated displays like digital micromirror devices and interferometric modulator displays, as well as non-pixilated displays like laser scanning displays. The document outlines the components, manufacturing processes, and applications of MEMS technology. It concludes that MEMS displays enable miniaturization, cost reduction and productivity improvements with opportunities in nanoelectromechanical systems.

Uploaded by

v2brother
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPT or read online on Scribd
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SEMINAR

COMPILED BY

SHAFEEK_KATTAKADA
THE EVOLUTION OF……
CONTENTS
• MEMS
• MEMS DISPLAYS
PIXILATED MEMS DISPLAYS
NON-PIXILATED MEMS DISPLAYS
STERIOSCOPIC MEMS DISPLAYS
• CONCLUSION
• REFERENCES
M- MICRO
E-ELECTRO
M-MECHANICAL
S-SYSTEMS
MEMS
“ A S/M integrating electronic
& mechanical elements on
S/C substrate using micro-
fabrication techniques
forming a functional
module.”
Cntd….

FUNCTIONAL MODULES

• FLUID SENSORS
• MIRRORS
• ACTUATORS
• DETECTORS
• VALVES
ARCHITECTURE
CENTRAL
PROCESSOR

INTERFACE

PERIPHERALS
Cntd…

Components- 1um to 100 um

MEMS DEVICE- 20 um to 1mm


MANUFACTURE
-MATERIALS-

• SEMI-CONDUCTORS

• POLYMERS

• METALS
Cntd…

MEMS-BASIC PROCESSES

DEPOSITION PATTERNING ETCHING


MEMS-APPLICATIONS
• INKJET PRINTERS

• ACCELEROMETERS

• CAR TYRE PRESSURE SENSORS

• DISPLAYS

• OPTICAL SWITCHING TECHNOLOGY

• BIO-MEDICAL APPLICATIONS
MEMS & NANO-TECHNOLOGY
• IN ADVANCED BIO-MEDICAL APPLICATIONS

• IN ADVANCED ENERGY SYSTEMS

• IN SECURITY SYSTEMS

• IN CONSUMER APPLICATIONS
Mems -thermal-actuator
MEMS-Ratchet
WL_pack_thumbnail
Mems-chips
Mems_DNA_chip
MEMS- Cover story opener
ST Micro-MEMS-motion-sensor
DISPLAY S/M

INPUT DISPLAY S/M VISUAL


SIGNAL OUTPUT

ELECTRICAL ELECTRONIC DISPLAY S/M VISUAL


INPUT OUTPUT
CTRL- CARRIER SCANNER
LOGIC BEAM VI
INP
UT- SU
SIG AL
NAL -
DISPLAY SYSTEM O/
P
ENERGY
SCANNER-THE VISIBLE LIGHT
VARIATIONS
OR
IN THE TRANSDUCER
SCANNED VISUAL O/P
BEAM

DISPLAY= SCANNER = MIRROR = MODULATOR


MEMS DISPLAYS

PIXILATED NON-PIXILATED
NO.OF
NO.OF
MIRRORS
MIRRORS
=NO. OF
=1
PIXELS
PIXILATED MEMS DISPLAYS
1.DMDs
.Digital Micro-mirror Devices
.Digital Light Processing [DLP] PROJECTOR
.Bi-stable micro-mirrors suspended on chip
Cntd…

Two micro-mirrors at two different tilt states…….one


in +10 degree….other in -10 degree from the flat
level.
Cntd…

Micro-mirror at two tilt levels


producing bright & the dark pixels.
2.GLV
• Grating Light Valve display technology.

• Use of movable ribbons to modulate the phase


of light.

• Ribbons made of silicon nitride.


Cntd…

IN ON STATE-First order diffraction resulting bright pixel.

IN OFF STATE-Zero 1st order diffraction giving dark pixel.


3.IMod

• Interferometric Modulator [I Mod] Technology.

• Based on optical interference.

• Two conductive plates with air gap in b/w.

• Lower one, a suspended reflective membrane.


Cntd…

OFF STATE—OPEN STATE—CONSTRUCTIVE


INTERFERENCE==BRIGHT PIXEL.

ON STATE—COLLAPSED STATE—DESTRUCTIVE
INTERFERENCE==DARK PIXEL.
4.PEN FILM -DISPLAYS
• PEN-Poly Ethylene Naphthalate.

• A bottom PEN substrate[200um] & upper


suspended PEN[16um].

• Semi-transparent aluminium layers[12nm] on


substrate and upper film as electrodes & cavity
reflectors.
Cntd…

1: Electrode/mirror (aluminum)
2: Air cavity spacer (photoresist)
3: Optical spacer (silicon oxide)
4: Electrode/mirror (aluminum)
Cntd…

On state (volt. applied)-cavity length shortens-


back light passes through----bright pixel
Off state – cavity blocks light – dark pixel
NON-PIXILATED MEMS DISPLAYS
1.LSDs

• Laser Scanning Display [LSD]

• A single micro-mirror scanner is used.

• Scanner should have high scan rate & large scan angle.

• A gimbal-less two axis – electrostatic comb drive – micro


mirror is used.
Cntd…
Cntd…
2.RSDs

• Retinal Scanning Display [RSD].

• A type of LSD.

• Scans the image on to retina instead on to


projection screen.
Scanning angle=53 deg. & 65 deg.
MEMS-STERIOSCOPIC DISPLAY
• 3-D display.

• LED matrix as image source.

• Micro-lens array for collimation of source’s light.

• Tilting micro mirrors form separate images for left and


right eyes.
ADVANTAGES-MEMS DISPLAYS
• Low power consumption.

• Simplicity.

• Large scanning angle.

• High scan rates.


thumb_230
QUALCOMM
mirasol1
lubix_ubhs-ph2_mems_qualcomm
inventec_v11_smartphone
CONCLUSION
• MEMS DISPLAYS-
MINIATURIZATION,COST REDUCTION
& PRODUCTIVITY.
• NEMS TECHNOLOGY.
REFERENCES
• [1] J. A. Walker, “The future of MEMS in telecommunications networks,”

J. Micromech. Microeng., vol. 10, no. 3, pp. R1–R7, Sep. 2000.


• [2] A. Neukermans and R. Ramaswami, “MEMS technology for optical
networking
applications,” IEEE Commun. Mag., vol. 39, no. 1, pp. 62–69,
Jan. 2001.
• [3] B. Barber, C. R. Giles, V. Askyuk, R. Ruel, L. Stulz, and D. Bishop,
“A fiber connectorized MEMS variable optical attenuator,” IEEE Photon.
Technol. Lett., vol. 10, no. 9, pp. 1262–1264, Sep. 1998.

• [4] C. Marxer, P. Griss, and N. F. Rooij, “A variable optical attenuator based


on silicon micromechanics,” IEEE Photon. Technol. Lett., vol. 11, no. 2,
pp. 233–235, Feb. 1999.

• [5] J. A. Yeh, S. S. Jiang, and C. Lee, “MOEMS variable optical attenuators


using rotary comb drive actuators,” IEEE Photon. Technol. Lett., vol. 18,
no. 10, pp. 1170–1172, May 15, 2006.

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